Crystal grain ejection device and crystal grain ejection method
By vibrating and applying air pressure when the push rod of the die ejection device rises, the damage or non-peeling phenomenon that traditional devices may cause when processing thin grains is solved, and more efficient die ejection is achieved.
Patent Information
- Application Number
- CN202411178925.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-10-16
- Filing Date
- 2024-08-27
- Publication Date
- 2025-04-18
Smart Images
Figure CN119852203A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a die ejecting apparatus and method, and more particularly, to a die ejecting apparatus and method which can prevent damage to or non-peeling of a die during die ejection. Background Art
[0002] Generally, a die ejection device that peels a die (semiconductor chip) adhered to a dicing tape from the dicing tape so that the die can be picked up by a pickup head may use a push rod that is lifted and lowered to penetrate the ejection head to press the die.
[0003] The push rod of this conventional die ejection device can press the die adhered to the dicing tape when simply rising, thereby separating the die from the dicing tape. Summary of the invention
[0004] [Technical issues]
[0005] However, conventional die ejection devices have many problems. For example, as the thickness of the die becomes very thin, the adhesion of the dicing tape causes the die to be subjected to physical stress caused by the simple rise of the push rod, which may make it easy to be damaged. In the case where the adhesion of the dicing tape is strong, the die may even not be separated from the dicing tape and may not be peeled off.
[0006] The present invention aims to solve various problems including the above problems, and its purpose is to provide a grain ejection device and a grain ejection method that can prevent grain damage or non-peeling phenomenon during grain ejection. However, this is only exemplary, and the scope of the present invention is not limited thereto.
[0007] [Technical solution]
[0008] A die ejection device based on the concept of the present invention for solving the above-mentioned problem may include: an ejection head, on which a dicing tape bonded to the die is installed; a push rod, formed to the ejection head and rising with the ejection head as a reference, thereby pressing the die so that the die can be separated from the dicing tape; a push rod lifting device, which raises or lowers the push rod; and a vibration device, which is formed to the push rod lifting device or formed between the push rod and the push rod lifting device, and vibrates the push rod so that the push rod can vibrate when rising.
[0009] Furthermore, according to the present invention, the push rod lifting device may include a voice coil motor that can realize both the lifting function of lifting and lowering the push rod for a long time and the vibration function of briefly and repeatedly vibrating the push rod up and down when rising, thereby being able to serve as a vibration device.
[0010] Furthermore, according to the present invention, a voice coil motor may include: a fixed coil portion; and a moving portion which may vibrate when ascending by a magnetic force formed at the fixed coil portion.
[0011] In addition, according to the present invention, the grain ejection device may further include: a control part, applying a driving control signal using a pulse wave to the fixed coil part, so that the moving part can briefly repeat the lifting vibration when it rises as a whole based on the fixed coil part.
[0012] In addition, according to the present invention, the die ejection device may further include: an adsorption plate, formed to the ejection head, and having a plurality of vacuum adsorption holes so that the dicing tape with the die bonded thereto can be vacuum adsorbed, and having a push rod hole so that the push rod can pass through; and a vacuum adsorption line, connected to the vacuum adsorption holes of the adsorption plate.
[0013] In addition, according to the present invention, the die ejection device may further include: an air supply line formed to the ejection head, so that air pressure can be applied toward the die along the gap between the push rod hole and the push rod or along the gap inside the push rod.
[0014] Furthermore, according to the present invention, the die ejection device may further include: a control part which applies a vibration increase control signal to the voice coil motor and applies an air pressure increase control signal to an air valve formed in the air supply line.
[0015] In addition, according to the present invention, the control part may include: a simultaneous vibration and air control part, which applies a vibration increase control signal so that the height of the push rod can increase as a whole and linearly over time during repeated lifting and lowering vibrations, and at the same time applies a pressure increase control signal so that the air pressure can increase over time; and an independent air control part, which interrupts the vibration increase control signal when the height of the push rod reaches a reference value, and continues to apply the pressure increase control signal so that the air pressure can increase over time.
[0016] In addition, according to the present invention, the die ejection device may further include: a main body, a fixed ejection head; and an LM guide (linear motion guide) formed to the main body in an up-and-down direction and guiding the lifting path of the moving part with the fixed coil part of the voice coil motor as a reference.
[0017] In addition, according to the present invention, the grain ejection device also includes a level adjustment device for adjusting the level of the main body to which the ejection head is fixed, and the level adjustment device may include: a first height adjustment screw, which is arranged at a first location between the main body and the base to adjust the level of the main body to which the ejection head is fixed; a second height adjustment screw, which is arranged at a second location between the main body and the base to adjust the level of the main body to which the ejection head is fixed; and a third height adjustment screw, which is arranged at a third location between the main body and the base to adjust the level of the main body to which the ejection head is fixed.
[0018] Furthermore, according to the present invention, the level adjustment device may further include: a guide pin formed on the base and guiding an ascending path of the body.
[0019] Furthermore, according to the present invention, the die ejection device may further include: a displacement measuring device formed to the main body so as to measure the lifting and lowering displacement of the push rod.
[0020] In addition, according to the present invention, the grain ejection device further includes: a control part, which applies a vibration control signal to the vibration device when applying a rising control signal to the push rod lifting device, so that the push rod can rise while vibrating, and the push rod lifting device includes: a linear motor, which lifts and lowers the push rod; or a cam follower formed to the push rod, an eccentric cam for lifting and lowering the cam follower, and a rotary motor for rotating the eccentric cam; and the vibration device may include a vibration motor or an ultrasonic vibration device.
[0021] In addition, a method for ejecting a die based on the concept of the present invention for solving the above-mentioned problem comprises: step (a), installing a dicing tape with a die bonded thereto onto an ejection head; step (b), using a push rod lifting device, raising the push rod with the ejection head as a reference to press the die so that the die can be separated from the dicing tape; and step (c), using a vibration device to vibrate the push rod during the raising of the push rod.
[0022] Furthermore, according to the present invention, in step (c), air can be supplied using an air supply line so that air pressure can be applied toward the grain along the gap between the push rod hole and the push rod or along the gap inside the push rod.
[0023] In addition, according to the present invention, step (c) may include: step (c-1), applying a vibration increase control signal to the vibration device to control the vibration device, so that the height of the push rod can increase as a whole and linearly over time during repeated lifting and lowering vibrations; and at the same time, applying a pressure increase control signal to the air supply line so that the air pressure can increase over time.
[0024] In addition, according to the present invention, step (c) may also include: step (c-2), when the height of the push rod reaches a reference value, interrupting the vibration increase control signal, and continuously applying a pressure increase control signal to the air supply line so that the air pressure can increase over time.
[0025] Furthermore, according to the present invention, in step (b) or step (c), a voice coil motor may be used to simultaneously perform a lifting action of raising and lowering the push rod for a long period of time and a vibration action of causing the push rod to briefly and repeatedly vibrate up and down while rising.
[0026] In addition, according to the present invention, in step (b) or step (c), a driving control signal using a pulse wave can be applied to the fixed coil part of the voice coil motor, so that the moving part can briefly repeat the rising and falling vibration while rising as a whole with the fixed coil part of the voice coil motor as a reference.
[0027] In addition, a die ejection device for solving the above-mentioned problems based on the concept of the present invention includes: an ejection head, on which a dicing tape bonded to the die is installed; a push rod, formed to the ejection head, and rising with the ejection head as a reference, thereby pressing the die so that the die can be separated from the dicing tape; a push rod lifting device, which raises or lowers the push rod; and a vibration device, formed to the push rod lifting device or formed between the push rod and the push rod lifting device, and vibrating the push rod so that the push rod can vibrate when it rises. The push rod lifting device can be a voice coil motor that can fully realize the lifting function of lifting and lowering the push rod for a long time and the vibration function of briefly repeating the vibration of the push rod up and down when rising, so that the vibration device can be used at the same time. The voice coil motor includes: a fixed coil part; and a moving part, which can vibrate when rising by the magnetic force formed in the fixed coil part. The die ejection device also includes: a control part, which applies a driving control signal using a pulse wave to the fixed coil part, so that the moving part can briefly repeat the lifting and lowering vibration when it rises as a whole with the fixed coil part as the reference; an adsorption plate, which forms an ejection head and is formed with a plurality of vacuum adsorption holes so that the dicing tape with the die bonded thereto can be vacuum adsorbed, and is formed with a push rod hole so that the push rod can pass through; a vacuum adsorption line, which is connected to the vacuum adsorption hole of the adsorption plate; and an air supply line, which is formed to the ejection head, so that air pressure can be applied toward the die along the gap between the push rod hole and the push rod or along the gap inside the push rod; wherein the control part is also configured to apply a vibration rise control signal to the voice coil motor and apply an air pressure rise control signal to the air valve formed on the air supply line. The control part may include: a simultaneous vibration and air control part, which applies a vibration increase control signal so that the height of the push rod can increase overall and linearly over time during repeated lifting and lowering vibrations; and simultaneously applies a pressure increase control signal so that the air pressure can increase over time; and an independent air control part, which interrupts the vibration increase control signal when the height of the push rod reaches a reference value, and continues to apply a pressure increase control signal so that the air pressure can increase over time.
[0028] [Beneficial Effects]
[0029] According to the above-mentioned embodiments of the present invention, a push rod that rises when vibrating up and down can be used to minimize the stress of the die during the peeling of the die from the dicing tape, thereby preventing the damage or non-peeling of the die, and a voice coil motor in a linear motor that can simultaneously realize the vibration function and the rising function is used to make the Z-axis movement fast, thereby greatly improving productivity, and air pressure is applied to the gap of the push rod not only during the vibration and rising of the push rod, or after that, so that the peeling of the die becomes easy, and the horizontal adjustment function or the Z-axis displacement sensing function is realized, thereby greatly improving the die ejection performance and other effects. Of course, the scope of the present invention is not limited to these effects. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Figure 1 is a cross-sectional view showing a standby state of a die ejection device according to some embodiments of the present invention.
[0031] Figure 2 It is shown Figure 1 A cross-sectional view of the vibration and rising state of the grain ejection device.
[0032] Figure 3 2 is a perspective view showing a die ejection device according to some other embodiments of the present invention.
[0033] Figure 4 It is shown Figure 3 An enlarged stereoscopic view of the ejection head of the die ejection device.
[0034] Figure 5 It is shown Figure 3 Plan view of the die ejection device.
[0035] Figure 6 It is shown Figure 3 A cross-sectional view of a die ejection device in a standby state.
[0036] Figure 7 It is shown Figure 6 A cross-sectional view of the vibration and rising state of the grain ejection device.
[0037] Figure 8 2 are cross-sectional views showing die ejection devices according to other embodiments of the present invention.
[0038] Fig. 9 It is shown Figure 1 A graph showing the height of the push rod of the die ejection device changing with time.
[0039] Fig.10 It is shown Figure 1 A graph showing the stress variation of a grain with the grain ejection device over time.
[0040] Fig.11 is a flow chart showing steps of a die ejection method according to some embodiments of the present invention.
[0041] Fig.12 It is shown Fig.11 Flow chart of step (c) of the grain ejection method.
[0042] [Explanation of Reference Numerals]
[0043] D: Grain
[0044] T: Dicing tape
[0045] 10: Top out
[0046] 11: Main body
[0047] 12: Linear motion guide
[0048] 20: Putting
[0049] 30: Push rod lifting device
[0050] 31: Voice coil motor
[0051] 311: Fixed coil part
[0052] 312: Moving Part
[0053] 40: Vibration device
[0054] 50: Control section
[0055] 51: Vibration air simultaneous control section 52: Air independent control section
[0056] 60: Adsorption board
[0057] 60a: Vacuum adsorption hole
[0058] 60b: Push rod hole
[0059] 70: Vacuum adsorption line
[0060] 80: Air supply line V: Air valve
[0061] 90: Horizontal adjustment device B: Base 91: First height adjustment screw
[0062] 92: Second height adjustment screw
[0063] 93: Third height adjustment screw
[0064] 94: Guide pin
[0065] 99: Displacement measuring device
[0066] LM: Linear Motor
[0067] CF: Cam Follower
[0068] C: Eccentric cam
[0069] VM: Vibration Motor
[0070] 100, 200, 300: Grain ejection device DETAILED DESCRIPTION
[0071] Hereinafter, some preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0072] The embodiments of the present invention are provided to more completely illustrate the present invention to those of ordinary skill in the art, and the following embodiments may be changed into various forms, and the scope of the present invention is not limited to the following embodiments. On the contrary, these embodiments make the present invention more substantial and complete, and are provided to fully convey the spirit of the present invention to those skilled in the art. In addition, for convenience and clear description, the thickness or size of each layer in the drawings is exaggerated.
[0073] The terms used in the specification are used to describe specific embodiments and do not limit the present invention. As used in this specification, unless the context clearly indicates otherwise, the singular form may include the plural form. As used herein, "comprise" and / or "comprising" means the existence of the mentioned shapes, numbers, steps, operations, components and / or combinations thereof, and does not exclude the existence or addition of one or more other shapes, numbers, steps, operations, components and / or combinations thereof.
[0074] Hereinafter, embodiments of the present invention are described with reference to the accompanying drawings which briefly illustrate preferred embodiments of the present invention. In the accompanying drawings, it is expected that the shapes shown will be deformed due to manufacturing techniques and / or tolerances. Therefore, embodiments of the present invention should not be interpreted as being limited to the specific shapes within the regions shown in this specification, but include shape variations caused by, for example, manufacturing.
[0075] Figure 1 is a cross-sectional view showing a standby state of the die ejection device 100 according to some embodiments of the present invention.
[0076] First, if Figure 1 As shown, a die ejection device 100 according to some embodiments of the present invention may generally include an ejection head 10 , a push rod 20 , a push rod lifting device 30 , a vibration device 40 and a control portion 50 .
[0077] For example, the ejection head 10 may be a head structure that contacts the dicing tape T so that the dicing tape T bonded to the die D may be mounted thereon.
[0078] For example, the ejector head 10 is formed below a pickup head of the die attaching device and may be disposed at a position corresponding to the pickup head.
[0079] However, the ejection head 10 is not limited to the die attaching device, and very various forms and types of ejection heads capable of separating the die D from the dicing tape T may be applicable.
[0080] For example, the ejector head 10 may be formed to protrude in a direction vertical to the upper portion of the main body 11 to which the ejector head 10 is fixed, the push rod 20 may be provided inside, and may be a column-shaped structure having sufficient strength and durability to guide the up and down path of the push rod 20 when supporting the push rod 20.
[0081] However, the ejection head 10 is not necessarily limited to the drawings, and various forms and types of head structures may be applicable according to the shape, standard, or installation space of the die D or the dicing tape T.
[0082] For example, the push rod 20 is formed to the ejection head 10 and may be a rod-shaped structure that rises based on the ejection head 10 to press the die D so that the die D can be separated from the dicing tape T.
[0083] For example, the push rod 20 may be guided to ascend and descend by the push rod hole 60b formed to the ejector head 10, and a gap may be formed spaced apart from the push rod hole 60b or a gap may be formed inside so that air may be ejected.
[0084] However, the push rod 20 is not necessarily limited to the drawings, and a wide variety of shapes or types of push rods may be applicable depending on the shape of the die D or the dicing tape T, the shape of the standard or ejection head 10, etc.
[0085] For example, the push rod lifting device 30 is a device for lifting the push rod 20, and uses Figure 1 A wide variety of actuators can be used to raise and lower the push rod 20, such as a linear motor LM, a hydraulic cylinder, a pneumatic cylinder, an electric cylinder, or various power transmission devices such as a gear combination, a nut / screw combination, a belt / pulley combination, a chain / sprocket, a wire / pulley combination, a cam / cam follower combination, etc.
[0086] For example, the vibration device 40 may be formed to the push rod lifting device 30 or formed between the push rod 20 and the push rod lifting device 30, and various vibration devices that vibrate the push rod 20 so that the push rod 20 can vibrate while rising may be applicable.
[0087] For example, the control portion 50 may apply an ascending control signal to the push rod lifting device 30 so that the push rod 20 may ascend while vibrating, while applying a vibration control signal to the vibration device 40 .
[0088] In addition, if Figure 1As shown, the die ejection device 100 according to some other embodiments of the present invention may further include an adsorption plate 60, a vacuum adsorption line 70, and an air supply line 80. The adsorption plate 60 is formed to the ejection head 10, and is formed with a plurality of vacuum adsorption holes 60a so that the dicing tape T with the die D bonded thereto can be adsorbed by vacuum, and is formed with a plurality of push rod holes 60b so that the push rod 20 can pass through. The vacuum adsorption line 70 is connected to the vacuum adsorption hole 60a of the adsorption plate 60. The air supply line 80 is formed to the ejection head 10 so that air pressure can be applied toward the direction of the die D along the gap between the push rod hole 60b and the push rod 20 or along the gap inside the push rod 20.
[0089] For example, the control portion 50 may apply an air pressure rising control signal to the air valve V formed to the air supply line 80 .
[0090] More specifically, for example Figure 1 As shown, the control part 50 may also include a vibration air simultaneous control part 51 and an air independent control part 52. The vibration air simultaneous control part 51 applies a vibration rise control signal so that the height of the push rod 20 can be increased integrally and linearly over time when the lifting vibration is repeated; and simultaneously applies a pressure rise control signal so that the air pressure rises over time. When the height of the push rod 20 reaches the reference value, the air independent control part 52 interrupts the vibration rise control signal and continues to apply the pressure rise control signal so that the air pressure rises over time.
[0091] Figure 2 It is shown Figure 1 A cross-sectional view of the die ejection device 100 in a vibration and ascending state.
[0092] Therefore, if Figure 2 As shown, the vibration and rising state of the grain ejection device 100 according to some embodiments of the present invention can be described as follows: when the dicing tape T bonded with the grain D is adsorbed to the vacuum adsorption hole 60a of the adsorption plate 60 of the ejection head 10, the control part 50 applies a vibration control signal to the vibration device 40 when applying a rising control signal to the push rod lifting device 30, so that the push rod 20 can vibrate up and down when rising, and vibrate and press the grain D bonded to the dicing tape T.
[0093] At this time, in the vibration air simultaneous control range (see Fig. 9 During the period from the first XXX ms to the last XXX ms of the movement of the push rod 20 , the control portion 50 may apply a vibration increase control signal so that the height of the push rod 20 may increase integrally and linearly over time during repeated lifting and lowering vibrations; and at the same time, an air pressure increase control signal may be applied to the air valve V formed to the air supply line 80 so that the air pressure may increase over time.
[0094] Then, when the height of the push rod 20 reaches the reference value, in the air independent control range (see Fig. 9 Within the interval of the second XXXms position of the vibration increase control signal, the control part 50 interrupts the vibration increase control signal and continues to apply the pressure increase control signal so that the air pressure can increase with time, thereby only the air pressure can be increased with time.
[0095] Therefore, by using a push rod 20 that rises while vibrating up and down, the stress of the grain D is minimized during the peeling of the grain D from the dicing tape T, thereby preventing damage to the grain D or non-peeling phenomenon, and air pressure is applied to the gap of the push rod 20 not only during the vibration and rising of the push rod 20, but also after that, so that the peeling of the grain D becomes easy.
[0096] Figure 3 2 is a perspective view showing a die ejection device 200 according to some other embodiments of the present invention. Figure 4 It is shown Figure 3 FIG. 2 is an enlarged stereoscopic view of the ejection head 10 of the die ejection device 200 . Figure 5 It is shown Figure 3 A plan view of a die ejection device 200 is shown. Figure 6 It is shown Figure 3 A cross-sectional view of the die ejection device 200 in a standby state. Figure 7 It is shown Figure 6 A cross-sectional view of the die ejection device 200 in the vibration and ascending state.
[0097] like Figures 3 to 7 As shown, according to some other embodiments of the present invention, the push rod lifting device 30 of the grain ejection device 200 may include a lifting function that can fully realize the lifting and lowering of the push rod 20 for a long time and a vibration function that makes the push rod 20 briefly vibrate repeatedly up and down when rising, so that the voice coil motor 31 of the vibration device 40 can be used at the same time.
[0098] For example, the voice coil motor 31 may include a fixed coil portion 311 fixed to one side of the body 11 fixing the ejector head 10 and a moving portion 312 connected to the push rod 20 and vibrating when ascending by a magnetic force formed at the fixed coil portion 311 .
[0099] The control part 50 may apply a driving control signal using a pulse wave to the fixed coil part 311 so that the moving part 312 may briefly repeat the lifting vibration while rising as a whole with reference to the fixed coil part 311 .
[0100] like Figures 3 to 7As shown, the die ejection device 200 according to some other embodiments of the present invention may further include an adsorption plate 60, a vacuum adsorption line 70 and an air supply line 80. The adsorption plate 60 is formed in the ejection head 10 and is formed with a plurality of vacuum adsorption holes 60a (see Figure 4 ) so that the dicing tape T with the die D bonded thereto is vacuum-adsorbed, and a plurality of push rod holes 60b are formed (see Figure 4 ) so that the push rod 20 can pass through. The vacuum adsorption line 70 is connected to the vacuum adsorption hole 60a of the adsorption plate 60. The air supply line 80 is formed to the ejection head 10 so that air pressure can be applied to the direction of the grain D along the gap between the push rod hole 60b and the push rod 20 or along the gap inside the push rod 20.
[0101] For example, the control portion 50 applies a vibration increase control signal to the voice coil motor 31 , and may apply an air pressure increase control signal to an air valve V formed to the air supply line 80 .
[0102] The control part 50 may also include a vibration air simultaneous control part 51 and an air independent control part 52. The vibration air simultaneous control part 51 applies a vibration increase control signal so that the height of the push rod 20 can be increased integrally and linearly over time when the lifting vibration is repeated, and simultaneously applies a pressure increase control signal so that the air pressure increases over time. When the height of the push rod 20 reaches a reference value, the air independent control part 52 interrupts the vibration increase control signal and continues to apply the pressure increase control signal so that the air pressure increases over time.
[0103] like Figures 3 to 7 As shown, the grain ejection device 200 according to some other embodiments of the present invention may also include: a main body 11, which fixes the ejection head 10; an LM guide (linear motion guide) 12, which is formed in the main body 11 in the up and down direction and guides the lifting and lowering path of the moving part 312 based on the fixed coil part 311 of the voice coil motor 31; and a horizontal adjustment device 90, which adjusts the level of the main body 11 that fixes the ejection head 10.
[0104] For example, as a method in which the main body 11 is supported at three points by the base B, the level adjustment device 90 may include: a first height adjustment screw 91, which is provided at a first location between the main body 11 and the base B so as to adjust the level of the main body 11 to which the ejector head 10 is fixed; a second height adjustment screw 92, which is provided at a second location between the main body 11 and the base B so as to adjust the level of the main body 11 to which the ejector head 10 is fixed; and a third height adjustment screw 93, which is provided at a third location between the main body 11 and the base B so as to adjust the level of the main body 11 to which the ejector head 10 is fixed. The level adjustment device 90 may further include a guide pin 94, which is formed on the base B so that the main body 11 and the base B are stably assembled with each other so that the horizontal state can be adjusted, and guides the ascending path of the main body 11.
[0105] Therefore, the operator can adjust one of the first height adjustment screw 91, the second height adjustment screw 92, and the third height adjustment screw 93 to adjust the level of the main body 11, and thereby accurately control the tilt angle of the ejector head 10. However, the level adjustment device 90 is not necessarily limited to the drawings, and a very diverse number or form of level adjustment devices or horizontal alignment automatic actuators can be applied.
[0106] In addition, if Figures 3 to 5 As shown, the grain ejection device 200 according to some other embodiments of the present invention may further include a displacement measuring device 99 such as an encoder or a caliper, and the displacement measuring device 99 is formed to the main body 11 so as to measure the lifting displacement of the push rod 20.
[0107] Therefore, if Figure 6 to Figure 7 As shown, the vibration and rising state of the die ejection device 100 according to some embodiments of the present invention can be described as follows: Figure 6 As shown in FIG. 1 , in a state where the dicing tape T with the die D bonded thereto is vacuum-adsorbed to the vacuum adsorption hole 60a of the adsorption plate 60 of the ejection head 10, as shown in FIG. Figure 7 As shown, the control part 50 applies a driving control signal using a pulse wave to the fixed coil part 311, so that the moving part 312 can repeat the lifting and lowering vibration when it rises as a whole with the fixed coil part 311 as a reference, so that the push rod 20 can vibrate up and down when it rises to vibrate and press the grain D adhered to the dicing tape T.
[0108] Here, in the vibration air simultaneous control range (see Fig. 9 During the period from the first XXX ms to the last XXX ms of the movement of the push rod 20 , the control portion 50 may apply a vibration increase control signal so that the height of the push rod 20 may increase integrally and linearly over time during repeated lifting and lowering vibrations; and at the same time, an air pressure increase control signal may be applied to the air valve V formed to the air supply line 80 so that the air pressure may increase over time.
[0109] At this time, when the displacement measuring device 99 is used to measure the lifting displacement of the push rod 20, the height of the push rod 20 may be raised to a reference value while vibrating up and down.
[0110] Then, when the height of the push rod 20 reaches the reference value, in the air independent control range (see Fig. 9 Within the interval of the second XXXms position), the control part 50 can interrupt the vibration increase control signal, and continue to apply the pressure increase control signal so that the air pressure can increase with time, so that only the air pressure can be increased with time.
[0111] Therefore, by using a push rod 20 that rises while vibrating up and down, the stress of the grain D is minimized during the peeling of the grain D from the dicing tape T, thereby preventing damage to the grain D or non-peeling phenomenon, and air pressure is applied to the gap of the push rod 20 not only during the vibration and rising of the push rod 20, but also after that, so that the peeling of the grain D becomes easy.
[0112] Figure 8 2 is a cross-sectional view showing a die ejection device 300 according to some other embodiments of the present invention.
[0113] like Figure 8 As shown, the push rod lifting device 30 of the grain ejection device 300 according to some other embodiments of the present invention includes: a cam follower CF formed to the push rod 20, an eccentric cam C for lifting the cam follower CF and a rotary motor M for rotating the eccentric cam C, and the vibration device 40 may include a vibration motor VM or an ultrasonic vibration device.
[0114] Therefore, if Figure 8 As shown, the vibration and rising state of the grain ejection device 300 according to some other embodiments of the present invention can be described as follows: when the dicing tape T bonded with the grain D is vacuum adsorbed to the vacuum adsorption hole 60a of the adsorption plate 60 of the ejection head 10, the control part 50 applies a vibration control signal to the vibration device 40 when applying a rising control signal to the push rod lifting device 30, so that the push rod 20 can vibrate up and down when rising, and at the same time vibrate and press the grain D bonded to the dicing tape T.
[0115] At this time, in the vibration air simultaneous control range (see Fig. 9 During the period from the first XXX ms to the last XXX ms of the movement of the push rod 20 , the control portion 50 may apply a vibration increase control signal so that the height of the push rod 20 may increase integrally and linearly over time during repeated lifting and lowering vibrations; and at the same time, an air pressure increase control signal may be applied to the air valve V formed to the air supply line 80 so that the air pressure may increase over time.
[0116] Then, when the height of the push rod 20 reaches the reference value, in the air independent control range (see Fig. 9 Within the interval of the second XXXms position), the control part 50 can interrupt the vibration increase control signal, and continue to apply the pressure increase control signal so that the air pressure can increase with time, so that only the air pressure can increase with time.
[0117] Therefore, by using a push rod 20 that rises while vibrating up and down, the stress of the grain D is minimized during the peeling of the grain D from the dicing tape T, thereby preventing damage to the grain D or non-peeling phenomenon, and air pressure is applied to the gap of the push rod 20 not only during the vibration and rising of the push rod 20, but also after that, so that the peeling of the grain D becomes easy.
[0118] Fig. 9 It is shown Figure 1 FIG. 1 is a graph showing the Z-height (Z-height) of the push rod 20 of the die ejection device 100 as a function of time, Fig.10 It is shown Figure 1 FIG. 1 is a graph showing how the stress of a die D of the die ejection device 100 changes with time.
[0119] like Fig. 9 As shown, in the vibration air simultaneous control range (see Fig. 9 During the period from the first XXX ms to the last XXX ms of the movement of the push rod 20 , a vibration increase control signal may be applied so that the height of the push rod 20 may be increased integrally and linearly over time during repeated lifting and lowering vibrations; and at the same time, an air pressure increase control signal may be applied to the air valve V formed to the air supply line 80 so that the air pressure may increase over time.
[0120] Then, when the height of the push rod 20 reaches the reference value, in the air independent control range (see Fig. 9 Within the interval of the second XXXms position of the vibration increase control signal, the vibration increase control signal can be interrupted, and the pressure increase control signal can be continuously applied so that the air pressure can increase with time, so that only the air pressure can increase with time.
[0121] Therefore, if Fig.10 As shown, looking at the graph showing the stress variation of the grain D of the grain ejection device 100 over time, in the interval up to the first XXX ms, due to the up and down vibration, the stress value of the grain D repeatedly increases and then decreases, thereby reducing the stress. Thereafter, in the interval at the second XXX ms position, only the pressure of the air is acted on, so that the stress of the grain D is minimized.
[0122] Therefore, according to the present invention, during the period when the grain D is peeled off from the dicing tape T, the push rod 20 that rises while vibrating up and down is used to minimize the stress of the grain D, thereby preventing damage to the grain D or non-peeling phenomenon, and the voice coil motor 31 in the linear motor that can simultaneously realize the vibration function and the rising function is used to make the Z-axis movement rapid, thereby greatly improving productivity, and during or after the vibration and rising of the push rod 20, air pressure is applied to the gap of the push rod 20 to facilitate the peeling of the grain D, and the horizontal adjustment function or the Z-axis displacement sensing function is realized, thereby greatly improving the grain ejection function.
[0123] Fig.11 is a flow chart illustrating a die ejection method according to some embodiments of the present invention.
[0124] like Figures 1 to 11 As shown, the die ejection method according to some embodiments of the present invention includes: step (a), installing a dicing tape T with a die D bonded thereto onto an ejection head 10; step (b), using a push rod lifting device 30, raising a push rod 20 based on the ejection head 10 to press the die D so that the die D can be separated from the dicing tape T; and step (c), using a vibration device 40 to vibrate the push rod 20 while the push rod 20 is rising.
[0125] In step (b) or step (c), the voice coil motor 31 may be used to simultaneously perform a lifting action of raising and lowering the push rod 20 for a long time and a vibration action of briefly and repeatedly vibrating the push rod 20 up and down while rising.
[0126] In step (b) or step (c), a driving control signal using a pulse wave may be applied to the fixed coil part 311 so that the moving part 312 may briefly repeat the lifting vibration while rising as a whole with reference to the fixed coil part 311 of the voice coil motor 31 .
[0127] Fig.12 It is shown Fig.11 Flow chart of step (c) of the grain ejection method.
[0128] like Figures 1 to 12 As shown, in step (c), air can be supplied through the air supply line 80 so that air pressure can be applied toward the grain D along the gap between the push rod hole 60 b and the push rod 20 or along the gap inside the push rod 20 .
[0129] At this time, step (c) may include: step (c-1), applying a vibration increase control signal to the vibration device 40 and controlling the vibration device 40, so that the height of the push rod 20 increases as a whole and linearly over time during repeated lifting and lowering vibrations, and at the same time applying a pressure increase control signal to the air supply line 80 so that the air pressure can increase over time; and step (c-2), when the height of the push rod 20 reaches a reference value, interrupting the vibration increase control signal, and continuously applying a pressure increase control signal to the air supply line 80 so that the air pressure increases over time.
[0130] Although the present invention is described with reference to the embodiments shown in the accompanying drawings, this is only exemplary, and it should be understood that a person skilled in the art may make various modifications and other equivalent embodiments. Therefore, the true technical protection scope of the present invention should be limited by the technical ideas of the scope of the attached patent claims.
Claims
1. A grain ejection device, comprising: An ejection head, equipped with a dicing tape bonded to the die; A push rod, formed to the ejector head and rising with the ejector head as a reference, thereby pressing the die so that the die can be separated from the dicing tape; A push rod lifting device, raising or lowering the push rod; as well as A vibrating device is formed to the push rod lifting device or formed between the push rod and the push rod lifting device, and vibrates the push rod so that the push rod can vibrate when it rises.
2. The grain ejection device according to claim 1, wherein: The push rod lifting device and the vibration device are configured as a voice coil motor that realizes both a lifting function of lifting and lowering the push rod and a vibration function of repeatedly vibrating the push rod up and down when the push rod rises.
3. The grain ejection device according to claim 2, wherein: The voice coil motor comprises: a fixed coil portion; and The moving part is capable of vibrating when ascending due to the magnetic force formed on the fixed coil part.
4. The die ejection device according to claim 3, further comprising: The control section applies a driving control signal using a pulse wave to the fixed coil section so that the moving section can repeat the lifting vibration while rising as a whole with reference to the fixed coil section.
5. The die ejection device according to claim 2, further comprising: an adsorption plate, formed to the ejection head, formed with a plurality of vacuum adsorption holes so as to be able to vacuum adsorb the dicing tape bonded with the die, and formed with a push rod hole so that the push rod can pass through; and A vacuum adsorption line is connected to the vacuum adsorption hole of the adsorption plate.
6. The die ejection device according to claim 5, further comprising: An air supply line is formed to the ejector head so that air pressure can be applied toward the die along a gap between the push rod hole and the push rod or along a gap inside the push rod.
7. The die ejection device according to claim 6, further comprising: A control section applies a vibration increase control signal to the voice coil motor and applies an air pressure increase control signal to an air valve formed at the air supply line.
8. The grain ejection device according to claim 7, wherein: The control part includes: The vibration air simultaneous control part applies the vibration increase control signal so that the height of the push rod can be increased integrally and linearly over time when the lifting and lowering vibrations are repeated; and the pressure increase control signal is applied so that the air pressure can be increased over time; and The air independent control part interrupts the vibration increase control signal when the height of the push rod reaches a reference value, and continues to apply the pressure increase control signal, so that the air pressure can increase over time.
9. The die ejection device according to claim 3, further comprising: A main body, fixing the ejection head; as well as A linear motion guide is formed to the body in an up-and-down direction and guides an ascending and descending path of the moving part with reference to a fixed coil part of the voice coil motor.
10. The die ejection device according to claim 9, further comprising: A level adjustment device is used to adjust the level of the main body to which the ejector head is fixed. The level adjustment device comprises: a first height adjustment screw disposed at a first location between the body and the base to adjust the level of the body to which the ejector head is secured; a second height adjustment screw disposed at a second location between the body and the base to adjust the level of the body to which the ejector head is fixed; and A third height adjustment screw is provided at a third location between the main body and the base to be able to adjust the level of the main body to which the ejection head is fixed.
11. The grain ejection device according to claim 10, wherein: The level adjustment device also includes: A guide pin is formed on the base and guides an ascending path of the body.
12. The die ejection device according to claim 9, further comprising: A displacement measuring device is formed to the main body so as to be able to measure the lifting displacement of the push rod.
13. The die ejection device according to claim 1, further comprising: The control part applies a vibration control signal to the vibration device when applying a rising control signal to the push rod lifting device, so that the push rod can rise when vibrating, wherein, The push rod lifting device comprises: A linear motor to raise and lower the push rod; or a cam follower formed to the push rod, an eccentric cam for raising and lowering the cam follower, and a rotary motor for rotating the eccentric cam, The vibration device includes a vibration motor or an ultrasonic vibration device.
14. A method for ejecting a grain, comprising: Step (a), installing a dicing tape with a die bonded thereto onto a top head; Step (b), using a push rod lifting device to lift the push rod based on the ejection head to press the die so that the die can be separated from the dicing tape; Step (c), vibrating the push rod using a vibration device during the period when the push rod is rising.
15. The method for ejecting a die according to claim 14, wherein: In the step (c), Air is supplied using an air supply line so that air pressure can be applied toward the die along a gap between a push rod hole and the push rod or along a gap inside the push rod.
16. The method for ejecting a die according to claim 15, wherein: The step (c) comprises: Step (c-1), applying a vibration increase control signal to the vibration device to control the vibration device, so that the height of the push rod can increase integrally and linearly over time during repeated lifting and lowering vibrations, and at the same time applying a pressure increase control signal to the air supply line so that the air pressure can increase over time.
17. The method for ejecting a die according to claim 16, wherein: The step (c) further comprises: Step (c-2), when the height of the push rod reaches a reference value, interrupting the vibration increase control signal, and continuously applying the pressure increase control signal to the air supply line, so that the air pressure can increase over time.
18. The method for ejecting a die according to claim 16, wherein: In the step (b) or the step (c), A voice coil motor is used to simultaneously perform a lifting action of raising and lowering the push rod and a vibration action of causing the push rod to repeatedly vibrate up and down while ascending.
19. The method for ejecting a die according to claim 16, wherein: In the step (b) or the step (c), A driving control signal using a pulse wave is applied to the fixed coil portion of the voice coil motor so that the moving portion can repeat the up-and-down vibration while rising as a whole with reference to the fixed coil portion of the voice coil motor.
20. A grain ejection device, comprising: An ejection head, equipped with a dicing tape bonded to the die; A push rod, formed to the ejector head and rising with the ejector head as a reference, thereby pressing the die so that the die can be separated from the dicing tape; A push rod lifting device, raising or lowering the push rod; as well as a vibrating device formed to the push rod lifting device or formed between the push rod and the push rod lifting device, and vibrating the push rod so that the push rod can vibrate when it rises, wherein The push rod lifting device is capable of fully realizing the lifting function of lifting and lowering the push rod and the vibration function of repeatedly vibrating the push rod up and down when rising, so that the voice coil motor of the vibration device can be used concurrently. The voice coil motor comprises: a fixed coil portion; and The moving part is capable of vibrating when rising due to the magnetic force formed on the fixed coil part. The crystal grain ejection device further comprises: a control section that applies a driving control signal using a pulse wave to the fixed coil section so that the moving section can repeat the lifting vibration while rising as a whole with reference to the fixed coil section; An adsorption plate, formed to the ejection head, formed with a plurality of vacuum adsorption holes so as to be able to vacuum adsorb the dicing tape bonded with the die, and formed with a push rod hole so that the push rod can pass through; a vacuum adsorption line connected to the vacuum adsorption hole of the adsorption plate; and an air supply line formed to the ejector head so as to apply air pressure along a gap between the push rod hole and the push rod or along a gap inside the push rod in a direction toward the grain; wherein the control section is further configured to apply a vibration increase control signal to the voice coil motor and an air pressure increase control signal to an air valve formed on the air supply line, Wherein, the control part includes: The vibration air simultaneous control part applies the vibration increase control signal so that the height of the push rod can be increased integrally and linearly over time when the lifting and lowering vibrations are repeated; and the pressure increase control signal is applied so that the air pressure can be increased over time; and The air independent control part interrupts the vibration increase control signal when the height of the push rod reaches a reference value, and continues to apply the pressure increase control signal, so that the air pressure can increase over time.