LED light source control method, device and equipment and storage medium

Abstract

The invention provides an LED light source control method, device and equipment and a storage medium, and the method comprises the steps: collecting the temperature data of an LED light source module, carrying out the sliding window filtering processing, obtaining a temperature change curve, and calculating a temperature compensation control signal through combining a working current and a temperature-light intensity characteristic curve; dividing the detection period into a plurality of time slices, and performing frequency and amplitude modulation to obtain a composite pulse sequence; calculating surface shadow area distribution according to the three-dimensional contour data of the to-be-measured object, dividing the LED light source module into a main light source group and a supplementary light source group, and generating a time sequence interleaving control signal; controlling the two groups of light sources to alternately illuminate and collecting light intensity distribution data in the detection process; and performing deviation analysis on the light intensity distribution data to generate a compensation signal, and feeding back and updating a temperature compensation control signal. According to the scheme, through prediction compensation and an alternating illumination mechanism, the temperature drift influence of the LED light source is reduced, the response delay of feedback control is reduced, the stability of light intensity is improved, and the accuracy of a detection result is ensured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an LED light source control method, device, equipment and storage medium. Background Art

[0002] LED light sources are widely used in the field of semiconductor detection due to their fast response speed and long service life. In the semiconductor detection process, in order to obtain accurate detection results, the lighting quality of the LED light source needs to be guaranteed. In the prior art, real-time feedback control is usually used to adjust the output parameters of the LED light source to maintain the stability of the light intensity.

[0003] However, when the LED light source is working for a long time, temperature drift will occur. Due to the response delay of the traditional feedback control method, it is impossible to compensate for the light intensity fluctuation caused by temperature change in time, thus affecting the accuracy of detection. Especially in high-speed detection scenarios, this problem of unstable light intensity will be more obvious. Summary of the invention

[0004] The main purpose of the present invention is to solve the technical problems of unstable light intensity and delayed feedback response caused by temperature drift in the existing LED light source during semiconductor detection; A first aspect of the present invention provides a method for controlling an LED light source, the method comprising: The temperature data of the LED light source module collected by the temperature sensor array is processed by sliding window filtering to obtain a temperature change curve, and the temperature compensation control signal is calculated in combination with the working current of the LED light source module and the preset temperature-light intensity characteristic curve; Dividing the detection period of the object to be detected into multiple time segments, and frequency modulating and amplitude modulating the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; Calculating the shadow area distribution on the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and dividing the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and generating a timing interleaved control signal for the main light source group and the supplementary light source group; When the object to be tested is detected, the main light source group and the supplementary light source group are respectively controlled to perform alternating illumination according to the timing interleaving control signal, and light intensity distribution data when the main light source group and the supplementary light source group are illuminated are collected; Deviation analysis is performed on the light intensity distribution data to generate a light intensity compensation signal, and the light intensity compensation signal is fed back to the temperature compensation control signal for parameter update.

[0005] Optionally, in a first implementation of the first aspect of the present invention, the temperature data of the LED light source module collected by the temperature sensor array is subjected to sliding window filtering to obtain a temperature change curve, and combined with the working current of the LED light source module and a preset temperature-light intensity characteristic curve, the temperature compensation control signal is calculated, including: Constructing a dynamic window for the temperature data collected by the temperature sensor array, and adaptively adjusting the window length of the dynamic window according to the standard deviation of the temperature data to obtain a filter window parameter; Performing weighted average calculation on the temperature data according to the filter window parameters, and performing differential operation on the weighted average temperature data to obtain a temperature change rate sequence; Performing piecewise linear mapping on the working current of the LED light source module according to the temperature change rate sequence to obtain a working current correction coefficient; The working current correction coefficient and the preset temperature-light intensity characteristic curve are subjected to piecewise interpolation calculation to obtain a light intensity compensation factor, and the light intensity compensation factor is subjected to piecewise integration operation to obtain a temperature compensation control signal.

[0006] Optionally, in a second implementation of the first aspect of the present invention, the detection period of the object to be detected is divided into a plurality of time segments, and the LED light source of each time segment is frequency modulated and amplitude modulated according to the temperature compensation control signal to obtain a composite pulse sequence, including: Calculate the detection period in segments according to the position information and the movement speed of the object to be detected to obtain a reference time segment sequence; Allocating the temperature compensation control signal according to a reference time segment sequence to obtain a compensation coefficient for each time segment; Calculating the modulation frequency parameters of each time segment according to the compensation coefficient to obtain a modulation frequency sequence, and performing amplitude matching on each frequency component of the modulation frequency sequence to obtain an amplitude modulation sequence; The modulation frequency sequence and the amplitude modulation sequence are interleaved and combined in the time domain to obtain a composite pulse sequence.

[0007] Optionally, in a third implementation of the first aspect of the present invention, the shadow area distribution on the surface of the object to be measured is calculated according to the three-dimensional contour data of the object to be measured, and the LED light source module is divided into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and the timing interleaved control signals of the main light source group and the supplementary light source group are generated, including: Performing curvature analysis on the three-dimensional contour data of the object to be measured, obtaining curvature change mutation points and curvature extreme value points, and constructing a surface feature point matrix according to the curvature change mutation points and curvature extreme value points; Performing ray tracing simulation on the object to be measured according to the surface feature point matrix to obtain a corresponding relationship diagram between the ray projection angle and the shadow area, and grouping and marking the LED light source modules according to the corresponding relationship diagram to obtain an initial grouping sequence; Mapping the initial grouping sequence and the composite pulse sequence point by point to generate a light source group mapping matrix, and grouping the light sources of the LED light source module into a main light source group or a supplementary light source group according to the light source group mapping matrix to obtain a light source grouping scheme; According to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence, the composite pulse sequence is used to generate a phase-interleaved driving waveform according to the spatial distribution of the main light source group and the supplementary light source group to obtain a timing-interleaved control signal.

[0008] Optionally, in a fourth implementation of the first aspect of the present invention, according to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence, generating a phase-interleaved driving waveform according to the spatial distribution of the main light source group and the supplementary light source group by the composite pulse sequence to obtain a timing interleaved control signal includes: Performing spatial scanning and sorting on the composite pulse sequence according to the spatial position distribution of the main light source group and the supplementary light source group to obtain a reference scanning sequence, and performing spatial interpolation calculation on the reference scanning sequence to obtain a scanning path point set; Associatively mapping each spatial position point in the scanning path point set with the frequency modulation parameter of the composite pulse sequence to obtain a frequency distribution matrix, and assigning a reference phase value to each light source according to the frequency distribution matrix to obtain an initial phase sequence; Calculating the phase difference between adjacent light sources according to the initial phase sequence and the amplitude modulation parameter, and performing a quadratic distribution fitting on the phase difference to obtain a phase compensation coefficient; The initial phase sequence and the phase compensation coefficient are combined and operated to generate a driving waveform sequence of each light source, and the driving waveform sequence is interlaced according to the light source grouping scheme to obtain a timing interlaced control signal.

[0009] Optionally, in a fifth implementation of the first aspect of the present invention, performing deviation analysis on the light intensity distribution data, generating a light intensity compensation signal, and feeding back the light intensity compensation signal to the temperature compensation control signal for parameter update includes: The light intensity distribution data of the main light source group and the supplementary light source group are processed in segments, and statistical characteristic parameters are calculated for each segment of data to obtain a light intensity distribution characteristic sequence; Constructing a light intensity deviation model according to the light intensity distribution characteristic sequence, performing a singular value decomposition operation on the light intensity deviation model to obtain a principal component vector of the light intensity deviation; Performing a weighted superposition operation on the principal component vector to obtain a light intensity compensation reference value, and correcting the light intensity compensation reference value according to a temperature change trend in a current detection cycle to obtain a light intensity compensation signal; A polynomial interpolation operation is performed on the light intensity compensation signal and the temperature compensation control signal to obtain a compensation parameter update value, and the coefficient of the temperature compensation control signal is corrected according to the compensation parameter update value.

[0010] Optionally, in a sixth implementation of the first aspect of the present invention, performing a polynomial interpolation operation on the light intensity compensation signal and the temperature compensation control signal to obtain a compensation parameter update value, and correcting a coefficient of the temperature compensation control signal according to the compensation parameter update value includes: Normalizing the light intensity compensation signal and the temperature compensation control signal, and generating equally spaced interpolation nodes between the normalized data points to obtain an interpolation reference point set; Establishing a Lagrange interpolation polynomial according to the interpolation reference point set, performing least squares fitting on the coefficients of the interpolation polynomial to obtain a polynomial coefficient matrix; The polynomial coefficient matrix is ​​subjected to condition number analysis, and the coefficient matrix is ​​regularized according to the size of the condition number to obtain compensation parameter update values, and the compensation parameter update values ​​are used to iteratively update the coefficients of the temperature compensation control signal in a recursive manner.

[0011] A second aspect of the present invention provides an LED light source control device, the LED light source control device comprising: The temperature acquisition processing module is used to perform sliding window filtering on the temperature data of the LED light source module collected by the temperature sensor array to obtain a temperature change curve, and calculate the temperature compensation control signal in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve; A pulse processing module, used for dividing the detection period of the object to be detected into multiple time segments, and performing frequency modulation and amplitude modulation on the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; A control signal generating module, used to calculate the shadow area distribution of the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and to divide the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and to generate a timing interleaved control signal for the main light source group and the supplementary light source group; An alternating module, for controlling the main light source group and the supplementary light source group to perform alternating illumination according to the timing interleaving control signal when the object to be detected is detected, and collecting light intensity distribution data when the main light source group and the supplementary light source group are illuminated; An update control module is used to generate a light intensity compensation signal according to a deviation analysis of the light intensity distribution data, and feed the light intensity compensation signal back to the temperature compensation control signal for parameter update.

[0012] The third aspect of the present invention provides an LED light source control device, comprising: a memory and at least one processor, wherein instructions are stored in the memory, and the memory and the at least one processor are interconnected via a line; the at least one processor calls the instructions in the memory so that the LED light source control device executes the steps of the above-mentioned LED light source control method.

[0013] A fourth aspect of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores instructions, which, when executed on a computer, enable the computer to execute the steps of the above-mentioned LED light source control method.

[0014] The above-mentioned LED light source control method, device, equipment and storage medium obtain the temperature change curve by collecting the temperature data of the LED light source module and performing sliding window filtering, and calculate the temperature compensation control signal by combining the working current and the temperature-light intensity characteristic curve; divide the detection period into multiple time segments and perform frequency and amplitude modulation to obtain a composite pulse sequence; calculate the surface shadow area distribution according to the three-dimensional contour data of the object to be tested, divide the LED light source module into a main light source group and a supplementary light source group and generate a time-series interleaved control signal; control the two groups of light sources to alternately illuminate and collect light intensity distribution data during the detection process; perform deviation analysis on the light intensity distribution data to generate a compensation signal and feedback to update the temperature compensation control signal. This scheme reduces the influence of temperature drift of the LED light source, reduces the response delay of feedback control, improves the stability of light intensity, and ensures the accuracy of the detection results through predictive compensation and alternating lighting mechanisms.

[0015] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0016] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of a first embodiment of a method for controlling an LED light source in an embodiment of the present invention; Figure 2 A schematic diagram of an embodiment of an LED light source control device in an embodiment of the present invention; Figure 3FIG. 1 is a schematic diagram of an embodiment of an LED light source control device in an embodiment of the present invention. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] The terms "including" and "having" and any variations thereof mentioned in the embodiments of the present invention are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device end including a series of steps or units is not limited to the listed steps or units, but may optionally include other steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or device ends.

[0020] To facilitate understanding of this embodiment, a method for controlling an LED light source disclosed in an embodiment of the present invention is first described in detail. Figure 1 As shown, the method comprises the following steps: 101. Perform sliding window filtering on the temperature data of the LED light source module collected by the temperature sensor array to obtain a temperature change curve, and calculate a temperature compensation control signal in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve; In one embodiment of the present invention, the temperature data of the LED light source module collected by the temperature sensor array is subjected to sliding window filtering to obtain a temperature change curve, and the temperature compensation control signal is calculated in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve, including: constructing a dynamic window for the temperature data collected by the temperature sensor array, and adaptively adjusting the window length of the dynamic window according to the standard deviation of the temperature data to obtain a filter window parameter; performing weighted averaging calculation on the temperature data according to the filter window parameter, and performing a differential operation on the weighted averaged temperature data to obtain a temperature change rate sequence; performing piecewise linear mapping on the working current of the LED light source module according to the temperature change rate sequence to obtain a working current correction coefficient; performing piecewise interpolation calculation on the working current correction coefficient and the preset temperature-light intensity characteristic curve to obtain a light intensity compensation factor, and performing piecewise integration operation on the light intensity compensation factor to obtain a temperature compensation control signal.

[0021] Specifically, the temperature data collected by the temperature sensor array needs to be processed first. Since the temperature change of the LED light source module during operation has different fast and slow change characteristics, the dynamic window method is used for data processing. Specifically, the temperature data is arranged into a data sequence according to the sampling time sequence, a reference window length is initially set, and the standard deviation of the temperature data in the window is calculated. The standard deviation reflects the degree of fluctuation of the temperature data. When the standard deviation is large, it means that the temperature changes violently, and the window length needs to be reduced to ensure the responsiveness to rapid temperature changes; when the standard deviation is small, it means that the temperature changes slowly, and the window length is increased to obtain a better filtering effect. The window length is adjusted using a piecewise function, and different adjustment coefficients are set in different standard deviation intervals. The increment or decrement of the window length is calculated by multiplying the standard deviation and the adjustment coefficient, thereby obtaining a new filter window parameter. The filter window parameters include key parameters such as window length, sliding step length, and cutoff frequency, which determine the characteristics of subsequent filtering processing. For the standard deviation of the temperature data, multiple threshold intervals are set, each interval corresponds to a different window adjustment strategy, and the historical information of temperature changes is considered at the same time, and the inertial constraint of the window length change is introduced to avoid violent fluctuations in the window length. Furthermore, a weighting factor is introduced when calculating the standard deviation so that newer data has a larger weight, thereby making the adjustment of the window length more sensitive to recent temperature changes.

[0022] Specifically, after obtaining the filter window parameters, the temperature data is processed. First, the weight coefficient sequence is determined according to the window length. The data points closer to the current moment in the window are given a larger weight, while the earlier data points are given a smaller weight. The weight coefficient decays exponentially over time. The temperature data and the corresponding weight coefficients are weighted averaged to obtain the filtered temperature sequence. In order to obtain the temperature change trend, it is necessary to perform a differential operation on the weighted averaged temperature data. The differential operation adopts the forward differential method to calculate the temperature change between adjacent sampling points and divide it by the sampling time interval to obtain the temperature change rate sequence. Each element of the sequence represents the temperature change speed at the corresponding moment. A positive value indicates a temperature rise, and a negative value indicates a temperature drop. The numerical value reflects the speed of temperature change. When performing weighted average calculation, the design of the weight coefficient adopts a normalized Gaussian function to ensure that the sum of all weight coefficients is 1 while maintaining a smooth transition of the data. Before the differential operation, the weighted averaged temperature sequence is subjected to boundary processing, and the influence of the boundary effect is eliminated by sequence extension. The temperature change rate sequence not only contains the direction and amplitude information of temperature change, but also reflects the acceleration characteristics of temperature change, providing an important basis for subsequent compensation control.

[0023] Specifically, after obtaining the temperature change rate sequence, it is necessary to establish the corresponding relationship between the temperature change and the LED working current. The piecewise linear mapping method can accurately describe the current regulation required under different temperature change intervals. Specifically, the temperature change rate sequence is divided into multiple intervals, and each interval corresponds to a different current regulation strategy. In the temperature rising interval, a larger current regulation slope is used to quickly reduce the working current to suppress the temperature rise; in the temperature changing interval, a smaller regulation slope is used to fine-tune the working current to maintain temperature stability; in the temperature falling interval, the working current is increased accordingly to compensate for the light output. Through this piecewise linear mapping, a functional relationship between the temperature change rate and the current regulation amount is established to obtain the working current correction coefficient. The correction coefficient is a normalized value that represents the adjustment ratio relative to the rated working current. The interval division of the piecewise linear mapping is based on the thermal characteristics analysis results of the LED, and the mapping function slope of each interval is obtained by fitting a large amount of experimental data. At the same time, in order to prevent the sudden change of current regulation, a smooth transition function is used at the segmentation point to connect the mapping relationship of different intervals to ensure the continuity of current regulation. The working current correction coefficient also needs to consider the safe working range of the LED, set upper and lower limit constraints, and avoid excessive regulation leading to LED damage.

[0024] Specifically, the working current correction coefficient is combined with the preset temperature-light intensity characteristic curve to calculate the final compensation amount. The temperature-light intensity characteristic curve describes the light output characteristics of the LED at different temperatures. This curve is usually obtained through preliminary calibration and stored in the form of a lookup table. When performing segmented interpolation calculation, the temperature range where the current working point is located is first determined, and then the accurate light intensity value is calculated in this range using the cubic spline interpolation method. The working current correction coefficient is used as a weight factor for the interpolation calculation and multiplied by the light intensity value obtained by interpolation to obtain the light intensity compensation factor. The light intensity compensation factor reflects the amplitude and direction of the light intensity adjustment. In order to make the compensation process smoother, the light intensity compensation factor needs to be segmented and integrated. The integration process adopts a variable step size integration method, using a smaller integration step size in the interval where the light intensity changes drastically and a larger integration step size in the interval where the light intensity is stable. Through the integration operation, a temperature compensation control signal that changes continuously with time is obtained. This control signal will be used in the subsequent LED drive circuit to adjust the output of the LED in real time. The interval division of the segmented integration is determined according to the rate of change of the light intensity compensation factor, and the selection of the integration step needs to balance the requirements of control accuracy and computational efficiency.

[0025] 102. Divide the detection period of the object to be detected into multiple time segments, and perform frequency modulation and amplitude modulation on the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; In one embodiment of the present invention, the detection period of the object to be detected is divided into multiple time segments, and the LED light source of each time segment is frequency modulated and amplitude modulated according to the temperature compensation control signal to obtain a composite pulse sequence, including: segmented calculation of the detection period according to the position information and movement speed of the object to be detected to obtain a reference time segment sequence; allocating the temperature compensation control signal according to the reference time segment sequence to obtain a compensation coefficient for each time segment; calculating the modulation frequency parameters of each time segment according to the compensation coefficient to obtain a modulation frequency sequence, and performing amplitude matching on each frequency component of the modulation frequency sequence to obtain an amplitude modulation sequence; and interleaving the modulation frequency sequence and the amplitude modulation sequence in the time domain to obtain a composite pulse sequence.

[0026] Specifically, during the semiconductor detection process, the object to be tested is usually in motion, and the detection sequence needs to be reasonably planned according to its motion characteristics. First, the position information and motion speed information of the object to be tested on the conveyor belt are obtained. The position information is collected in real time by the position sensor, including the starting position, current position and target position of the object to be tested; the motion speed is determined by the rotation speed of the conveyor belt and the posture of the object to be tested. Based on these motion parameters, the total time required for the object to be tested to move from the starting position to the target position is calculated, that is, the detection cycle. Considering that the object to be tested may have an acceleration or deceleration process during the movement, the detection cycle is divided into several reference time segments. The division of time segments needs to consider the motion trajectory characteristics of the object to be tested. A smaller time interval is used in the area where the motion speed changes greatly, and a larger time interval is used in the area where the motion speed is stable. Through this adaptive segmentation method, a reference time segment sequence is obtained. Each time segment corresponds to a section on the motion trajectory of the object to be tested, and the length of the time segment reflects the detection time allocation of the area. In the process of generating the reference time segment sequence, the response characteristics of the detection equipment need to be considered to ensure that the length of each time segment is greater than the minimum response time of the equipment, so as to ensure that the detection action can be reliably executed.

[0027] Specifically, after obtaining the reference time segment sequence, the temperature compensation control signal needs to be allocated to each time segment. The temperature compensation control signal reflects the amount of compensation that the LED light source needs to make due to temperature changes, and this compensation amount will change over time during the detection period. The compensation control signal is resampled according to the reference time segment sequence, and the corresponding compensation value is calculated for each time segment. The compensation value is calculated using the segmented weighted average method, and the compensation control signal in the time segment is integrated to obtain the average compensation amount of the period. Considering the continuity requirement of the compensation control signal, a smooth transition function is used at the boundary of the time segment to avoid sudden changes in the compensation amount. Through this allocation method, the compensation coefficient of each time segment is obtained. The compensation coefficient sequence retains the change characteristics of the temperature compensation control signal, while adapting to the distribution characteristics of the reference time segment, providing a basis for the subsequent modulation parameter calculation. In the process of calculating the compensation coefficient, normalization processing is introduced to ensure that the compensation effects of different time segments are comparable, and the effective range of the compensation coefficient is set to prevent over-compensation.

[0028] Specifically, the modulation parameters are determined according to the compensation coefficient of each time segment. In the LED driving process, frequency modulation is mainly used to control the switching cycle of the LED, and the compensation coefficient determines the depth of the frequency modulation. Specifically, a reference frequency range is first set. The selection of this range needs to consider the response characteristics of the LED and the bandwidth limitation of the driving circuit. For each time segment, the frequency modulation parameters are calculated according to its compensation coefficient. When the compensation coefficient is a positive value, it means that the output of the LED needs to be enhanced. At this time, the modulation frequency is increased and the number of times the LED is turned on per unit time is increased; when the compensation coefficient is a negative value, it means that the output of the LED needs to be reduced. At this time, the modulation frequency is reduced. The calculation of the modulation frequency parameter adopts a nonlinear mapping function. A smaller frequency change rate is used in the middle range of the compensation coefficient, and a larger frequency change rate is used in the range at both ends. This nonlinear characteristic helps to improve the accuracy of the modulation. The frequency parameters calculated for each time segment are arranged in sequence to form a modulation frequency sequence. Next, the corresponding amplitude parameter is calculated for each frequency component in the modulation frequency sequence. The calculation of the amplitude ratio needs to consider the response characteristics of the LED at different frequencies. Usually, a larger driving amplitude is required to ensure sufficient light output when working at high frequency. The specific ratio relationship is obtained by looking up a table, and the data in the table is derived from the characteristic test results of the LED device. After the ratio calculation is completed, the amplitude modulation sequence corresponding to the frequency sequence is obtained.

[0029] Finally, the modulation frequency sequence and the amplitude modulation sequence need to be combined into a composite pulse sequence. The time domain interleaving method is to alternate frequency modulation and amplitude modulation in time. This combination method can give full play to the advantages of the two modulation methods. First, determine the basic pulse structure, including the rise time, fall time and flat top time of the pulse. In each time segment, the repetition period of the pulse is determined according to the modulation frequency, and the peak level of the pulse is determined according to the amplitude parameter. In order to make the transition between adjacent time segments smoother, a gradual interval is inserted at the segment boundary, and the pulse parameters are gradually adjusted in the gradual interval. At the same time, in order to reduce electromagnetic interference, a trapezoidal waveform is used at the edge of the pulse, which can effectively suppress high-frequency harmonics compared to a square wave. The generation process of the composite pulse sequence also needs to consider the constraints of the drive circuit, including the maximum switching frequency, the minimum pulse width, the level switching rate, etc. When the calculated modulation parameters exceed these limits, a limiting process is required to ensure that the generated pulse sequence is feasible. The final composite pulse sequence contains the driving waveform information of the LED light source within a complete detection cycle, which will be used to control the output of the LED drive circuit.

[0030] 103. Calculate the shadow area distribution on the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, divide the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and generate a timing interleaved control signal for the main light source group and the supplementary light source group; In one embodiment of the present invention, the shadow area distribution on the surface of the object to be measured is calculated according to the three-dimensional contour data of the object to be measured, and the LED light source module is divided into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and the timing interleaved control signal of the main light source group and the supplementary light source group is generated, including: performing curvature analysis on the three-dimensional contour data of the object to be measured, obtaining the curvature change mutation points and the curvature extreme points, and constructing a surface feature point matrix according to the curvature change mutation points and the curvature extreme points; performing ray tracing simulation on the object to be measured according to the surface feature point matrix to obtain the ray projection angle A correspondence diagram with the shadow area is obtained, and the LED light source modules are grouped and marked according to the correspondence diagram to obtain an initial grouping sequence; the initial grouping sequence and the composite pulse sequence are mapped point by point to generate a light source group mapping matrix, and the light sources of the LED light source module are grouped into a main light source group or a supplementary light source group according to the light source group mapping matrix to obtain a light source grouping scheme; according to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence, the composite pulse sequence is generated into a phase-interlaced driving waveform according to the spatial distribution of the main light source group and the supplementary light source group to obtain a timing interlaced control signal.

[0031] Specifically, in the semiconductor inspection process, there are often complex three-dimensional structures on the surface of the object to be tested, which will produce shadows during the lighting process. Curvature analysis of three-dimensional contour data is a key step in identifying surface features. First, the acquired three-dimensional point cloud data is gridded to establish a surface grid model. At each grid node, the local geometric features of the surface are characterized by calculating the principal curvature and Gaussian curvature. The principal curvature represents the maximum and minimum curvature of the surface at that point, while the Gaussian curvature reflects the overall curvature characteristics of the surface. By setting the curvature threshold, the locations where the curvature changes drastically are identified, which usually correspond to the edges, ridges or concave areas of the surface. At the same time, the gradient of the curvature is calculated, and the points where the curvature gradient exceeds the threshold are marked as mutation points. In the area where the curvature distribution is relatively flat, the local maximum and minimum points are found, and these points are marked as curvature extreme points. The mutation points and extreme points together constitute the feature point set of the surface. In order to facilitate subsequent processing, the three-dimensional coordinates, normal vectors, curvature values ​​and other information of these feature points are organized into a matrix form, with each row corresponding to a feature point and each column corresponding to an attribute parameter. The surface feature point matrix not only contains geometric information, but also records the topological relationship between feature points. This information will be used to determine the lighting strategy.

[0032] Specifically, after having the surface feature point matrix, it is necessary to analyze the relationship between the light and the surface of the object to be measured. Using ray tracing technology, light is emitted from the position of the LED light source to the feature point, and the intersection of the light and the surface, the incident angle, and the reflection direction are calculated. Considering the luminous characteristics of the LED, the light needs to be sampled according to the light intensity distribution characteristics of the LED when it is emitted. For each feature point, the incident light from different LED light sources is calculated respectively, and the number of the light source that can effectively illuminate the point is recorded. When the light is blocked by the raised part of the surface, the area is marked as a shadow area, and the surface features that cause the blockage are recorded. Through the statistical results of a large number of light, a corresponding relationship diagram between the light projection angle and the shadow area is established. The relationship diagram describes the distribution law of the shadow at different incident angles. According to the corresponding relationship diagram, the lighting contribution of each LED light source to the shadow area is evaluated, and the light source with a larger contribution is marked as a candidate supplementary light source for the shadow area. In this way, the initial grouping sequence of the LED light source module is obtained, and the position, orientation, and grouping mark information of each light source are recorded in the sequence.

[0033] Specifically, after obtaining the initial grouping sequence, it is necessary to combine it with the composite pulse sequence to determine the final light source grouping scheme. The point-by-point mapping process first establishes a coordinate correspondence relationship, and maps the spatial position of the light source in the initial grouping sequence with the time axis of the composite pulse sequence. For each LED light source, analyze its frequency and amplitude parameters at the corresponding moment in the composite pulse sequence, which reflect the working state of the light source at different moments. At the same time, considering the distribution position of the light source in space, the distance and angle between adjacent light sources will also affect the grouping decision. Through this spatiotemporal mapping relationship, a two-dimensional light source group mapping matrix is ​​generated. The rows of the matrix represent the spatial position, the columns represent the time sequence, and the matrix elements contain the working parameters and grouping attributes of the light source. Based on the information of the mapping matrix, each light source is classified as the main supplementary light source by setting the grouping criterion. The criterion includes multiple dimensions such as the coverage rate of the light source to the shadow area, the degree of interference with the adjacent light source, and the working characteristics in the composite pulse sequence. When a light source is mainly responsible for basic lighting, it is divided into the main light source group; when the light source is mainly used to eliminate the shadow of a specific area, it is divided into the supplementary light source group. In this way, a complete light source grouping scheme is obtained, which clearly specifies the working mode and group affiliation of each light source.

[0034] Specifically, the last step is to generate a specific control signal according to the light source grouping scheme. The composite pulse sequence contains information in two dimensions: frequency modulation and amplitude modulation. These modulation parameters need to be rearranged according to the grouping of the light sources. For the main light source group, the basic characteristics of the composite pulse sequence are maintained, but the phase relationship between the light sources needs to be considered in the spatial distribution. Adjacent main light sources usually use the same or similar phases to provide uniform basic lighting. For the supplementary light source group, it is necessary to stagger the working sequence with the main light source group, and supplement the shadow area during the interval of the main light source lighting. The design of phase interleaving needs to consider the spatial distribution of the light source. Light sources that are farther away can use similar phases, while light sources that are close in spatial position require a larger phase difference to avoid interference. In this way, the composite pulse sequence is reorganized according to the spatial distribution characteristics to generate a driving waveform containing phase information. The driving waveform not only contains the switching timing of each light source, but also contains the specific parameters of the light intensity modulation. The driving waveforms of each light source are combined in time sequence to form the final timing interleaving control signal. This control signal will be sent to the LED drive circuit to achieve coordinated control of the main light source group and the supplementary light source group.

[0035] Furthermore, the method of generating a phase-interleaved driving waveform for the composite pulse sequence according to the spatial distribution of the main light source group and the supplementary light source group according to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence to obtain a timing interleaved control signal includes: spatially scanning and sorting the composite pulse sequence according to the spatial position distribution of the main light source group and the supplementary light source group to obtain a reference scanning sequence, and performing spatial interpolation calculation on the reference scanning sequence to obtain a scanning path point set; associating and mapping each spatial position point in the scanning path point set with the frequency modulation parameters of the composite pulse sequence to obtain a frequency distribution matrix, and assigning a reference phase value to each light source according to the frequency distribution matrix to obtain an initial phase sequence; calculating the phase difference between adjacent light sources according to the initial phase sequence and the amplitude modulation parameters, and performing quadratic distribution fitting on the phase difference to obtain a phase compensation coefficient; combining the initial phase sequence with the phase compensation coefficient to generate a driving waveform sequence for each light source, and staggering the driving waveform sequence according to the light source grouping scheme to obtain a timing interleaved control signal.

[0036] Specifically, the composite pulse sequence is rearranged based on the spatial distribution characteristics of the main light source group and the supplementary light source group. First, the spatial scanning order of the light source needs to be determined. The spatial scanning sorting process takes into account the geometric layout of the LED array. Starting from a corner point of the array, the entire array is traversed in a spiral or serpentine path. During the traversal process, the spatial coordinates, group information, and distance relationship of each light source with adjacent light sources are recorded. This information constitutes the reference scanning sequence. The reference scanning sequence reflects the physical distribution law of the light source, but only contains discrete light source position points. In order to obtain more detailed spatial distribution information, it is necessary to perform spatial interpolation calculation on the reference scanning sequence. The interpolation process uses the cubic spline interpolation method to generate transition points between adjacent light sources. The two dimensions of spatial position and light source properties are considered during interpolation. When interpolating between light sources in the main light source group, a smaller interpolation step size is used to ensure the continuity of basic lighting; for interpolation between supplementary light source groups or cross-group light sources, a larger interpolation step size is used to reserve space for subsequent phase difference adjustment. After the interpolation calculation is completed, a scanning path point set including the original light source position and the interpolation position is obtained. This point set provides more detailed spatial distribution information and provides a basis for subsequent parameter mapping.

[0037] Specifically, after obtaining the scanning path point set, it is necessary to associate the frequency modulation information of the composite pulse sequence with the spatial distribution. For each position point in the scanning path point set, extract the composite pulse sequence fragment corresponding to the position and analyze its frequency modulation parameters. By establishing the correspondence between the position coordinates and the frequency parameters, a two-dimensional frequency distribution matrix is ​​formed. The rows and columns of the matrix correspond to the two dimensions of the space respectively, and the matrix elements represent the frequency modulation parameters of the position. The frequency distribution matrix not only records the operating frequency of each light source, but also reflects the spatial variation trend of the frequency parameters. Based on the frequency distribution matrix, a reference phase value is assigned to each light source. The principle of phase allocation is that adjacent light sources with similar frequencies should have a certain phase difference to avoid interference caused by simultaneous opening; light sources with large frequency differences can use similar phases because their working cycles naturally form a time stagger. Through this phase allocation method that considers the time-frequency characteristics, a sequence containing the initial phase information of all light sources is obtained. The initial phase sequence provides a reference value for subsequent phase optimization.

[0038] Specifically, after obtaining the initial phase sequence, it is necessary to fine-tune the phase relationship between adjacent light sources in combination with the amplitude modulation parameters. Based on the phase values ​​of each pair of adjacent light sources in the initial phase sequence, the phase difference between them is calculated. The calculation of the phase difference needs to take into account the amplitude modulation parameters of the light source. When the amplitude parameters of adjacent light sources are quite different, the phase difference between them needs to be increased to prevent visual interference caused by sudden brightness changes; when the amplitude parameters are close, a smaller phase difference can be used to improve time utilization efficiency. The calculated phase difference sequence is analyzed, and the quadratic polynomial fitting method is used to describe the distribution law of the phase difference in space. During fitting, key control points are selected, including the phase difference within the main light source group, the phase difference within the supplementary light source group, and the phase difference between the light sources across groups, and the coefficients of the quadratic polynomial are determined by the least squares method. The fitted polynomial function reflects the spatial variation trend of the phase difference, and the phase compensation coefficient is calculated based on this function. The phase compensation coefficient is a matrix, in which each element represents the phase amount that needs to be adjusted for the light source at the corresponding position, and these adjustments will be used to correct the initial phase sequence.

[0039] Finally, the initial phase sequence and the phase compensation coefficient need to be combined to generate the final driving waveform. For each light source, its initial phase value and the corresponding compensation coefficient are weighted and combined to calculate the corrected phase value. When correcting the phase, it is necessary to ensure that the phase value falls within the valid range, and the value outside the range is periodically wrapped. Based on the corrected phase value, combined with the frequency and amplitude parameters in the composite pulse sequence, the driving waveform of each light source is constructed. The construction of the driving waveform adopts the form of a piecewise function, which includes a start segment, a maintenance segment, and a shutdown segment in each working cycle. The time ratio of each segment is determined by the frequency modulation parameter, and the amplitude of the waveform is controlled by the amplitude modulation parameter. Considering the implementation characteristics of the circuit, a buffer time is added at the transition point of the waveform to avoid sharp level changes. The driving waveforms of all light sources are arranged according to the light source grouping scheme, with the waveform sequence of the main light source group in front and the waveform sequence of the supplementary light source group in the back, forming a complete timing interleaved control signal. This control signal contains the detailed driving timing of all light sources, which can achieve coordinated work of the main and supplementary light sources.

[0040] 104. When the object to be tested is detected, the main light source group and the supplementary light source group are respectively controlled to perform alternating illumination according to the time sequence interleaving control signal, and light intensity distribution data of the main light source group and the supplementary light source group are collected during illumination; In one embodiment of the present invention, during the semiconductor detection process, the execution of the timing interleaving control signal involves the precise control of the main light source group and the supplementary light source group. According to the phase information and driving waveform parameters recorded in the timing interleaving control signal, the main light source group is first started for basic lighting, and each LED in the main light source group works according to the preset frequency parameters and amplitude parameters, and the distributed light intensity sensor array is used to collect the light intensity distribution when the main light source group is illuminated. The light intensity sensor array is arranged at a key position in the detection area, and each sensor is equipped with a signal conditioning circuit for converting the photoelectric signal into a digital quantity. After the lighting cycle of the main light source group ends, the system completes the collection and temporary storage of light intensity data within the preset dead time, and the length of the dead time is determined by the response characteristics of the driving circuit. Then, the supplementary light source group starts to work according to the phase difference specified in the timing interleaving control signal, and supplements the area that the main light source group fails to fully illuminate. During the operation of the supplementary light source group, the light intensity sensor array is also used to collect light intensity distribution data. The sampling frequency during the supplementary lighting process needs to match the modulation frequency of the supplementary light source to ensure that the change in light intensity can be accurately captured. The collected light intensity data is preprocessed, including removing background light interference, correcting the nonlinear response of the sensor, etc., and finally a data set reflecting the light intensity distribution of the entire detection area is obtained.

[0041] 105. Perform deviation analysis on the light intensity distribution data, generate a light intensity compensation signal, and feed the light intensity compensation signal back to the temperature compensation control signal for parameter update.

[0042] In one embodiment of the present invention, the deviation analysis of the light intensity distribution data, the generation of the light intensity compensation signal, and the feedback of the light intensity compensation signal to the temperature compensation control signal for parameter update include: performing data segmentation processing on the light intensity distribution data of the main light source group and the supplementary light source group, and calculating the statistical characteristic parameters of each segment of data to obtain a light intensity distribution characteristic sequence; constructing a light intensity deviation model according to the light intensity distribution characteristic sequence, performing a singular value decomposition operation on the light intensity deviation model to obtain a principal component vector of the light intensity deviation; performing a weighted superposition operation on the principal component vector to obtain a light intensity compensation reference value, and correcting the light intensity compensation reference value according to the temperature change trend within the current detection cycle to obtain a light intensity compensation signal; performing a polynomial interpolation operation on the light intensity compensation signal and the temperature compensation control signal to obtain a compensation parameter update value, and correcting the coefficient of the temperature compensation control signal according to the compensation parameter update value.

[0043] Specifically, after obtaining the light intensity distribution data of the main light source group and the supplementary light source group, the data needs to be segmented for analysis. The segmentation is based on the spatial characteristics of the detection area, and the detection area is divided into multiple sub-areas, each of which corresponds to a segment of light intensity data. The basis for segmentation includes the surface characteristics of the object to be measured, the spatial distribution of the light source, and the arrangement position of the sensor. Statistical characteristic parameters are calculated for each segment of data, including the mean, standard deviation, skewness, and kurtosis. The mean reflects the overall illumination level of the area, the standard deviation indicates the uniformity of the light intensity distribution, the skewness reflects the asymmetry of the light intensity distribution, and the kurtosis indicates the concentration of the light intensity distribution. At the same time, the correlation coefficient between adjacent data segments is calculated to evaluate the continuity of illumination. Each statistical parameter is normalized to make different feature quantities comparable. These normalized statistical features are arranged in spatial order to form a light intensity distribution feature sequence. This feature sequence not only contains the illumination characteristics of each area, but also retains the spatial position information, providing a data basis for the subsequent establishment of a light intensity deviation model.

[0044] Specifically, based on the light intensity distribution feature sequence, a light intensity deviation model reflecting the illumination status of the entire detection area is constructed. The model is in the form of a matrix, where each row of the matrix corresponds to a spatial position and each column corresponds to a statistical characteristic parameter. In order to extract the main components of the light intensity deviation, a singular value decomposition operation is performed on the matrix. Singular value decomposition can decompose complex light intensity changes into several independent modes, which are sorted according to their importance (singular value size). The left singular vector obtained by decomposition represents the spatial distribution pattern, the right singular vector represents the combination of characteristic parameters, and the singular value represents the weight of each mode. By setting the cumulative contribution rate threshold, the most important singular values ​​and their corresponding singular vectors are selected, and these selected vectors constitute the principal component vectors of the light intensity deviation. The principal component vector reflects the main change mode of the light intensity deviation, and each vector represents a typical deviation distribution form.

[0045] Specifically, after obtaining the principal component vectors, these vectors need to be synthesized into actual compensation values. The principal component vectors are weighted and superimposed. The weight coefficients are determined based on the singular values ​​corresponding to each principal component. The principal component with the larger singular value obtains a higher weight. The superposition process adopts an iterative method. First, starting from the principal component corresponding to the maximum singular value, the contribution of the secondary principal component is gradually added until the change in the superposition result is less than the preset threshold. The result obtained by the superposition operation is the reference value of the light intensity compensation, which reflects the compensation required under the ideal state. However, the actual compensation also needs to consider the influence of temperature factors. By analyzing the temperature change trend in the current detection cycle, a relationship model between the temperature change rate and the light intensity response is established. The model is based on the temperature-light intensity characteristic curve of the LED to correct the compensation reference value. The time delay effect of temperature change is introduced in the correction process, that is, the influence of temperature change on light intensity has a certain hysteresis. Taking these factors into consideration, the light intensity compensation reference value is corrected to obtain the final light intensity compensation signal. This compensation signal contains both spatial distribution information and temperature influence.

[0046] Specifically, the light intensity compensation signal needs to be integrated with the existing temperature compensation control signal. The mapping relationship between the two compensation signals is established by polynomial interpolation. The order of the interpolation polynomial is determined according to the complexity of the signal. Usually, a cubic or quartic polynomial is selected to ensure sufficient fitting accuracy. In each compensation control cycle, the sampling point of the light intensity compensation signal is matched with the time point of the temperature compensation control signal to generate an interpolation node. By solving the polynomial coefficient equation group, the coefficients of the interpolation function are obtained, and these coefficients constitute the compensation parameter update value. The compensation parameter update value is actually a weight coefficient for correcting the temperature compensation control signal. These updated values ​​are applied to the calculation formula of the temperature compensation control signal to correct the original control coefficient. The correction process adopts a sliding update method, that is, only a part of the coefficients are updated each time, so as to ensure the smooth change of the control signal. The corrected temperature compensation control signal will be used for the LED light source control of the next detection cycle, thereby forming a closed-loop control.

[0047] Furthermore, the light intensity compensation signal and the temperature compensation control signal are subjected to a polynomial interpolation operation to obtain an updated compensation parameter value, and the coefficient of the temperature compensation control signal is corrected according to the updated compensation parameter value, including: normalizing the light intensity compensation signal and the temperature compensation control signal, and generating equally spaced interpolation nodes between the normalized data points to obtain an interpolation reference point set; establishing a Lagrange interpolation polynomial according to the interpolation reference point set, performing least squares fitting on the coefficients of the interpolation polynomial to obtain a polynomial coefficient matrix; performing condition number analysis on the polynomial coefficient matrix, regularizing the coefficient matrix according to the size of the condition number to obtain an updated compensation parameter value, and iteratively updating the coefficient of the temperature compensation control signal according to the updated compensation parameter value in a recursive manner.

[0048] Specifically, first, the light intensity compensation signal and the temperature compensation control signal need to be uniformly numerically processed to facilitate subsequent interpolation operations. Normalization is performed on the two signals respectively, and the numerical range is mapped to the interval [0,1]. The normalization process adopts the maximum and minimum value normalization method, and the minimum value of the signal is subtracted from each data point and then divided by the numerical range of the signal. The normalized data maintains the change characteristics of the original signal and eliminates the influence of the dimension. On the basis of the normalized data, interpolation nodes need to be constructed. Since the sampling time of the two signals may not completely correspond, equally spaced interpolation nodes are generated between adjacent normalized data points. The spacing of the interpolation nodes is determined according to the bandwidth characteristics of the signal. The smaller the spacing, the higher the interpolation accuracy, but the greater the amount of calculation. New nodes are inserted between each pair of adjacent data points by uniform sampling to form an encrypted data sequence. The original normalized data points and the newly generated interpolation nodes are merged and arranged in chronological order to form an interpolation reference point set. This point set provides data support for subsequent interpolation polynomial calculations.

[0049] Specifically, the Lagrange interpolation polynomial is constructed based on the interpolation reference point set. The advantage of the Lagrange interpolation polynomial is that it can ensure that the interpolation curve passes through all given data points. For each point in the interpolation reference point set, the corresponding Lagrange basis function is calculated, which is a set of orthogonal polynomials. All basis functions are linearly combined to obtain a complete interpolation polynomial expression. In order to improve the interpolation accuracy, the coefficients of the interpolation polynomial are fitted by least squares. A least squares equation system is established, and the order of the equation system is equal to the order of the interpolation polynomial. The coefficient value that minimizes the fitting error is obtained by solving this equation system. These coefficients are arranged in the order of the degree of the polynomial to form a polynomial coefficient matrix. Each row of the coefficient matrix corresponds to a time point, and each column corresponds to the coefficients of different degree terms in the polynomial. The structure of the matrix reflects the mapping relationship between the two compensation signals.

[0050] Specifically, it is crucial to evaluate the numerical stability of the polynomial coefficient matrix, which needs to be achieved through condition number analysis. First, the condition number of the coefficient matrix is ​​calculated. The condition number is the ratio of the maximum singular value to the minimum singular value of the matrix, which reflects the stability of the matrix in numerical calculations. When the condition number is large, it indicates that the matrix is ​​close to singularity, and the coefficient solution is very sensitive to small perturbations of the input data, so regularization is required. Regularization uses the Tikhonov regularization method to introduce a regularization term in the least squares objective function. The weight coefficient of this term is adaptively adjusted according to the size of the condition number. After regularization, a corrected coefficient matrix is ​​obtained, which has better numerical stability. The corrected coefficients are reorganized according to the structure of the polynomial to obtain the compensation parameter update value. The compensation parameter update value is actually a set of correction factors used to adjust the calculation process of the temperature compensation control signal. The correction process is carried out in a recursive manner. Only part of the coefficients are adjusted each time, and the adjustment range is determined by the size of the update value. Specifically, the current temperature compensation control signal coefficient is weightedly combined with the compensation parameter update value. The combination coefficient gradually decreases with the number of iterations. This progressive update method can ensure the smooth change of the control coefficient. After each iteration, the temperature compensation control signal is recalculated and compared with the target value. When the signal error is less than the set threshold or the maximum number of iterations is reached, the update process is stopped. This iterative update mechanism not only ensures the compensation effect, but also maintains the stability of the control system.

[0051] In this embodiment, the temperature change curve is obtained by collecting the temperature data of the LED light source module and performing sliding window filtering, and the temperature compensation control signal is calculated by combining the working current and the temperature-light intensity characteristic curve; the detection period is divided into multiple time segments and the frequency and amplitude modulation is performed to obtain a composite pulse sequence; the surface shadow area distribution is calculated according to the three-dimensional contour data of the object to be tested, and the LED light source module is divided into a main light source group and a supplementary light source group and a time-series staggered control signal is generated; during the detection process, the two groups of light sources are controlled to alternately illuminate and the light intensity distribution data is collected; the light intensity distribution data is analyzed for deviations to generate compensation signals and feedback is used to update the temperature compensation control signal. This solution reduces the influence of temperature drift of the LED light source, reduces the response delay of the feedback control, improves the stability of the light intensity, and ensures the accuracy of the detection results through predictive compensation and alternating illumination mechanisms.

[0052] The above describes the LED light source control method in the embodiment of the present invention. The following describes the LED light source control device in the embodiment of the present invention. Figure 2 In one embodiment of the present invention, an LED light source control device includes: The temperature acquisition processing module 201 is used to perform sliding window filtering on the temperature data of the LED light source module collected by the temperature sensor array to obtain a temperature change curve, and calculate a temperature compensation control signal in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve; The pulse processing module 202 is used to divide the detection period of the object to be detected into multiple time segments, and perform frequency modulation and amplitude modulation on the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; A control signal generating module 203 is used to calculate the shadow area distribution of the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and to divide the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and to generate a timing interleaved control signal for the main light source group and the supplementary light source group; An alternating module 204, for controlling the main light source group and the supplementary light source group to perform alternating illumination according to the timing interleaving control signal when the object to be detected is detected, and collecting light intensity distribution data when the main light source group and the supplementary light source group are illuminated; The update control module 205 is used to generate a light intensity compensation signal according to the deviation analysis of the light intensity distribution data, and feed the light intensity compensation signal back to the temperature compensation control signal for parameter update.

[0053] In an embodiment of the present invention, the LED light source control device runs the above-mentioned LED light source control method, the LED light source control device collects the temperature data of the LED light source module and performs sliding window filtering to obtain a temperature change curve, and calculates a temperature compensation control signal in combination with the working current and the temperature-light intensity characteristic curve; divides the detection period into multiple time segments and performs frequency and amplitude modulation to obtain a composite pulse sequence; calculates the surface shadow area distribution according to the three-dimensional contour data of the object to be measured, divides the LED light source module into a main light source group and a supplementary light source group, and generates a time-series staggered control signal; controls the two groups of light sources to alternately illuminate and collect light intensity distribution data during the detection process; performs deviation analysis on the light intensity distribution data to generate a compensation signal and feedback updates the temperature compensation control signal. This scheme reduces the influence of temperature drift of the LED light source, reduces the response delay of feedback control, improves the stability of light intensity, and ensures the accuracy of the detection results through predictive compensation and alternating illumination mechanisms.

[0054] above Figure 2 The LED light source control device in the embodiment of the present invention is described in detail from the perspective of modular functional entities. The LED light source control device in the embodiment of the present invention is described in detail from the perspective of hardware processing.

[0055] Figure 3 3 is a schematic diagram of the structure of an LED light source control device provided by an embodiment of the present invention. The LED light source control device 300 may have relatively large differences due to different configurations or performances, and may include one or more processors (central processing units, CPU) 310 (for example, one or more processors) and a memory 320, and one or more storage media 330 (for example, one or more mass storage device terminals) storing application programs 333 or data 332. Among them, the memory 320 and the storage medium 330 can be short-term storage or permanent storage. The program stored in the storage medium 330 may include one or more modules (not shown in the figure), and each module may include a series of instruction operations in the LED light source control device 300. Furthermore, the processor 310 may be configured to communicate with the storage medium 330, and execute a series of instruction operations in the storage medium 330 on the LED light source control device 300 to implement the steps of the above-mentioned LED light source control method.

[0056] The LED light source control device 300 may also include one or more power supplies 340, one or more wired or wireless network interfaces 350, one or more input and output interfaces 360, and / or one or more operating systems 331, such as Windows Serve, Mac OS X, Unix, Linux, FreeBSD, etc. Those skilled in the art will appreciate that Figure 3The structure of the LED light source control device shown does not constitute a limitation on the LED light source control device provided by the present invention, and may include more or fewer components than shown in the figure, or a combination of certain components, or a different arrangement of components.

[0057] The present invention also provides a computer-readable storage medium, which may be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium. Instructions are stored in the computer-readable storage medium. When the instructions are executed on a computer, the computer executes the steps of the LED light source control method.

[0058] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the above-described system, device, or unit can refer to the corresponding process in the aforementioned method embodiment and will not be repeated here.

[0059] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program code.

[0060] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for controlling an LED light source, characterized in that: The LED light source control method comprises: The temperature data of the LED light source module collected by the temperature sensor array is processed by sliding window filtering to obtain a temperature change curve, and the temperature compensation control signal is calculated in combination with the working current of the LED light source module and the preset temperature-light intensity characteristic curve; Dividing the detection period of the object to be detected into multiple time segments, and frequency modulating and amplitude modulating the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; Calculating the shadow area distribution on the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and dividing the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and generating a timing interleaved control signal for the main light source group and the supplementary light source group; When the object to be tested is detected, the main light source group and the supplementary light source group are respectively controlled to perform alternating illumination according to the timing interleaving control signal, and light intensity distribution data when the main light source group and the supplementary light source group are illuminated are collected; Deviation analysis is performed on the light intensity distribution data to generate a light intensity compensation signal, and the light intensity compensation signal is fed back to the temperature compensation control signal for parameter update.

2. The LED light source control method according to claim 1, characterized in that: The temperature data of the LED light source module collected by the temperature sensor array is subjected to sliding window filtering to obtain a temperature change curve, and the temperature compensation control signal is calculated in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve, including: Constructing a dynamic window for the temperature data collected by the temperature sensor array, and adaptively adjusting the window length of the dynamic window according to the standard deviation of the temperature data to obtain a filter window parameter; Performing weighted average calculation on the temperature data according to the filter window parameters, and performing differential operation on the weighted average temperature data to obtain a temperature change rate sequence; Performing piecewise linear mapping on the working current of the LED light source module according to the temperature change rate sequence to obtain a working current correction coefficient; The working current correction coefficient and the preset temperature-light intensity characteristic curve are subjected to piecewise interpolation calculation to obtain a light intensity compensation factor, and the light intensity compensation factor is subjected to piecewise integration operation to obtain a temperature compensation control signal.

3. The LED light source control method according to claim 1, characterized in that: The method of dividing the detection period of the object to be detected into a plurality of time segments, and performing frequency modulation and amplitude modulation on the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence includes: Calculate the detection period in segments according to the position information and the movement speed of the object to be detected to obtain a reference time segment sequence; Allocating the temperature compensation control signal according to a reference time segment sequence to obtain a compensation coefficient for each time segment; Calculating the modulation frequency parameters of each time segment according to the compensation coefficient to obtain a modulation frequency sequence, and performing amplitude matching on each frequency component of the modulation frequency sequence to obtain an amplitude modulation sequence; The modulation frequency sequence and the amplitude modulation sequence are interleaved and combined in the time domain to obtain a composite pulse sequence.

4. The LED light source control method according to claim 1, characterized in that: The step of calculating the shadow area distribution on the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and dividing the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and generating a timing interleaved control signal for the main light source group and the supplementary light source group includes: Performing curvature analysis on the three-dimensional contour data of the object to be measured, obtaining curvature change mutation points and curvature extreme value points, and constructing a surface feature point matrix according to the curvature change mutation points and curvature extreme value points; Performing ray tracing simulation on the object to be measured according to the surface feature point matrix to obtain a corresponding relationship diagram between the ray projection angle and the shadow area, and grouping and marking the LED light source modules according to the corresponding relationship diagram to obtain an initial grouping sequence; Mapping the initial grouping sequence and the composite pulse sequence point by point to generate a light source group mapping matrix, and grouping the light sources of the LED light source module into a main light source group or a supplementary light source group according to the light source group mapping matrix to obtain a light source grouping scheme; According to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence, the composite pulse sequence is generated into a phase-interleaved driving waveform according to the spatial distribution of the main light source group and the supplementary light source group to obtain a timing interleaved control signal.

5. The LED light source control method according to claim 4, characterized in that: The step of generating a phase-staggered driving waveform based on the composite pulse sequence according to the light source grouping scheme and the frequency modulation parameters and amplitude modulation parameters of the composite pulse sequence according to the spatial distribution of the main light source group and the supplementary light source group to obtain a timing staggered control signal includes: Performing spatial scanning and sorting on the composite pulse sequence according to the spatial position distribution of the main light source group and the supplementary light source group to obtain a reference scanning sequence, and performing spatial interpolation calculation on the reference scanning sequence to obtain a scanning path point set; Associatively mapping each spatial position point in the scanning path point set with the frequency modulation parameter of the composite pulse sequence to obtain a frequency distribution matrix, and assigning a reference phase value to each light source according to the frequency distribution matrix to obtain an initial phase sequence; Calculating the phase difference between adjacent light sources according to the initial phase sequence and the amplitude modulation parameter, and performing a quadratic distribution fitting on the phase difference to obtain a phase compensation coefficient; The initial phase sequence and the phase compensation coefficient are combined and operated to generate a driving waveform sequence of each light source, and the driving waveform sequence is interlaced according to the light source grouping scheme to obtain a timing interlaced control signal.

6. The LED light source control method according to claim 1, characterized in that: The performing deviation analysis on the light intensity distribution data to generate a light intensity compensation signal, and feeding back the light intensity compensation signal to the temperature compensation control signal for parameter update comprises: The light intensity distribution data of the main light source group and the supplementary light source group are processed in segments, and statistical characteristic parameters are calculated for each segment of data to obtain a light intensity distribution characteristic sequence; Constructing a light intensity deviation model according to the light intensity distribution characteristic sequence, performing a singular value decomposition operation on the light intensity deviation model to obtain a principal component vector of the light intensity deviation; Performing a weighted superposition operation on the principal component vector to obtain a light intensity compensation reference value, and correcting the light intensity compensation reference value according to a temperature change trend in a current detection cycle to obtain a light intensity compensation signal; A polynomial interpolation operation is performed on the light intensity compensation signal and the temperature compensation control signal to obtain a compensation parameter update value, and the coefficient of the temperature compensation control signal is corrected according to the compensation parameter update value.

7. The LED light source control method according to claim 6, characterized in that: The step of performing a polynomial interpolation operation on the light intensity compensation signal and the temperature compensation control signal to obtain a compensation parameter update value, and correcting the coefficient of the temperature compensation control signal according to the compensation parameter update value comprises: Normalizing the light intensity compensation signal and the temperature compensation control signal, and generating equally spaced interpolation nodes between the normalized data points to obtain an interpolation reference point set; Establishing a Lagrange interpolation polynomial according to the interpolation reference point set, performing least squares fitting on the coefficients of the interpolation polynomial to obtain a polynomial coefficient matrix; The polynomial coefficient matrix is ​​subjected to condition number analysis, and the coefficient matrix is ​​regularized according to the size of the condition number to obtain compensation parameter update values, and the compensation parameter update values ​​are used to iteratively update the coefficients of the temperature compensation control signal in a recursive manner.

8. An LED light source control device, characterized in that: The LED light source control device comprises: The temperature acquisition processing module is used to perform sliding window filtering on the temperature data of the LED light source module collected by the temperature sensor array to obtain a temperature change curve, and calculate the temperature compensation control signal in combination with the working current of the LED light source module and a preset temperature-light intensity characteristic curve; A pulse processing module, used for dividing the detection period of the object to be detected into multiple time segments, and performing frequency modulation and amplitude modulation on the LED light source of each time segment according to the temperature compensation control signal to obtain a composite pulse sequence; A control signal generating module, used to calculate the shadow area distribution of the surface of the object to be measured according to the three-dimensional contour data of the object to be measured, and to divide the LED light source module into a main light source group and a supplementary light source group according to the shadow area distribution and the composite pulse sequence, and to generate a timing interleaved control signal for the main light source group and the supplementary light source group; An alternating module, for controlling the main light source group and the supplementary light source group to perform alternating illumination according to the timing interleaving control signal when the object to be detected is detected, and collecting light intensity distribution data when the main light source group and the supplementary light source group are illuminated; An update control module is used to generate a light intensity compensation signal according to a deviation analysis of the light intensity distribution data, and feed the light intensity compensation signal back to the temperature compensation control signal for parameter update.

9. An LED light source control device, characterized in that: The LED light source control device comprises: a memory and at least one processor, wherein instructions are stored in the memory; The at least one processor calls the instructions in the memory to enable the LED light source control device to perform the steps of the LED light source control method according to any one of claims 1 to 7.

10. A computer-readable storage medium having instructions stored thereon, characterized in that: When the instructions are executed by the processor, the steps of the LED light source control method according to any one of claims 1 to 7 are implemented.

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