Ion source debugging device suitable for various structural forms and ion source debugging method

Abstract

The invention discloses an ion source debugging device suitable for various structural forms and an ion source debugging method. The testing device is characterized in that the upper layer is an ion source and an extraction system, and the middle layer is an ion source motion platform for driving the ion source to move in the X-Y direction and an extraction system motion platform for driving the extraction system to move in the X direction and rotate; the lower layer is a fixed tray; the ion source is an ion source with a plurality of structural forms; the method comprises the following steps: coarsely adjusting the mutual position and angle between the ion source and the extraction electrode in various structural forms in the atmospheric environment; and fine adjustment of the mutual position between the ion source and the extraction electrode in various structural forms is carried out in a vacuum environment. The ion source testing device can be used for testing different types of ion sources, including H ion sources, He ion sources and the like, and ion sources with different structural forms, including radial insertion and axial insertion forms, so that independent testing and optimization of various ion sources on the testing device are realized.

Description

Technical Field

[0001] The invention belongs to the field of particle accelerators, and in particular relates to an ion source debugging device and an ion source debugging method which are adaptable to various structural forms. Background Art

[0003] A cyclotron accelerator is a device that uses magnetic and electric fields to make charged particles perform cyclotron motion, and repeatedly accelerates them through high-frequency electric fields during motion. It is an important instrument in high-energy physics, among which the superconducting cyclotron accelerator is the core equipment of the current medical proton therapy accelerator. The medical proton therapy accelerator can achieve the treatment of tumors with protons and heavy ion rays in the microscopic world, and is the most advanced radiotherapy technology in the world today.

[0004] In particle accelerators, ion source technology is a key technology (an ion source is a device that ionizes neutral atoms or molecules and extracts ion beams from them). The ion source is the source of the beam, determines the beam quality, and directly affects the performance of the particle accelerator. In this high magnetic field and strong beam extraction, the ion source extraction structure directly determines the beam quality. The spacing in the ion source extraction structure, the centering of the gap, and the parallelism of the electric field parallel plates all have a direct impact on the beam quality. It is necessary to determine the extraction structure by studying these factors, improve the extraction beam quality of the ion source, and then improve the performance indicators of the accelerator. Since the micro Penning ion source used in the superconducting cyclotron accelerator needs to be installed in an extremely small space and its size is very compact, higher design requirements are placed on its extraction structure, including the extraction electrode.

[0005] The difficulty in debugging the ion source extraction structure lies in that ion sources of different structural forms have different external and internal structures, resulting in that when a new ion source is replaced, the original distance between the ion source and the extraction electrode, the parallelism between the ion source plane and the extraction electrode plane, and the alignment between the ion source gap and the extraction electrode gap can no longer be used and need to be re-debugged.

[0006] The installation method of the ion source and the extraction electrode in the prior art is that they are directly fixed to the tray. This method of directly fixing to the tray causes the extraction structure of the ion source to be debugged only in a static environment and cannot be debugged online, but the debugging result in the static environment cannot be separated from the online verification. The online verification is verification in a vacuum environment. Since the debugging result of the ion source extraction structure in the static environment cannot be guaranteed to be qualified at one time during the online verification, when it is unqualified, it is necessary to return from the vacuum environment to the static environment (atmospheric environment), debug again in the atmospheric environment, and then put the debugging result into the vacuum environment again for online verification. It is necessary to evacuate from the atmospheric environment to the vacuum environment, and it takes 1 day to evacuate once. If repeated debugging and repeated verification are required, it will take several days to evacuate, which is time-consuming and laborious. Summary of the invention

[0007] In view of the problems existing in the prior art, the present invention proposes an ion source debugging device and an ion source debugging method suitable for various structural forms, aiming to solve the problem that the existing ion source extraction structure can only be debugged in a static environment but cannot be debugged online, which is time-consuming and labor-intensive.

[0008] The present invention adopts the following technical solutions to solve the technical problems:

[0009] A debugging device adapted to ion sources of various structural forms comprises three layers: an upper layer, a middle layer and a lower layer. The upper layer comprises an ion source (1-1) and an extraction system, wherein the extraction system is an ion source beam extraction system; the extraction system comprises an extraction electrode (1-2) and a Faraday cage (1-3); the middle layer comprises an ion source motion platform (2-1) for driving the ion source (1-1) to move in the XY directions, and an extraction system motion platform (2-2) for driving the extraction system to move in the X direction and to rotate; the lower layer comprises a fixed tray (3), wherein the fixed tray (3) is respectively fixedly connected to the lower surface of the ion source motion platform (2-1) and the lower surface of the extraction system motion platform (2-2); the X direction of the ion source motion platform (2-1) and the X direction of the extraction system motion platform are the same direction, and the XY direction of the ion source motion platform and the X direction of the extraction system motion platform are fixed and unchanged. The invention is characterized in that:

[0010] The ion source is an ion source of various structural forms, and the ion sources of various structural forms are: each ion source has a different external structure and internal structure, and the ion sources of different external structures and internal structures have different distances between the beam extraction outlet and the extraction electrode (1-2), different degrees of centering of the beam extraction outlet gap relative to the extraction electrode gap, and different degrees of parallelism of the ion source extraction outlet plane relative to the extraction electrode plane; the extraction system motion platform (2-2) is used to roughly adjust the spacing between the ion sources of various structural forms (1-1) and the extraction electrode (1-2) in an atmospheric environment, and to adjust the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane; the ion source motion platform (2-1) is used to finely adjust the spacing between the ion sources of various structural forms (1-1) and the extraction electrode (1-2), and to finely adjust the centering of the ion source beam extraction outlet gap and the extraction electrode gap in a vacuum environment.

[0011] Furthermore, the extraction system motion platform (2-2) is provided with an extraction platform connecting plate (2-2-1), a rotational motion platform (2-2-2), and an X-motion platform (2-2-3) in sequence from top to bottom; the rotational motion platform (2-2-2) includes an extraction platform-rotation mechanism (2-2-2-1), the X-motion platform (2-2-3) includes an extraction platform-X-axis fine-tuning mechanism (2-2-3-1), the extraction platform connecting plate (2-2-1) is used to be fixedly connected to the extraction electrode (1-2) and the Faraday cage (1-3) arranged on its upper surface, and the extraction platform-X-axis fine-tuning mechanism The structure (2-2-3-1) is used to drive the extraction system to move along the X direction, and the X direction is perpendicular to the extraction electrode (1-2) plate, and then the distance between the extraction electrode (1-2) and the ion source extraction outlet of different structures is adjusted through the X direction movement of the extraction platform-X axis fine adjustment mechanism (2-2-3-1); the extraction platform-rotation mechanism (2-2-2-1) is used to drive the extraction system to rotate, and then the parallelism between the extraction electrode (1-2) plane and the ion source extraction outlet plane of different structures is adjusted through the rotation movement of the extraction platform-rotation mechanism (2-2-2-1).

[0012] Furthermore, the ion source motion platform (2-1) is provided with an ion source motion platform connecting plate (2-1-1), an ion source X motion platform (2-1-2), and an ion source Y motion platform (2-1-3) in sequence from top to bottom; the ion source X motion platform (2-1-2) and the ion source Y motion platform (2-1-3) are respectively provided with an ion source X-axis fine-tuning mechanism (2-1-2-1) and an ion source Y-axis fine-tuning mechanism (2-1-3-1); the ion source motion platform connecting plate (2-1-1) is used to be connected to the ion source body (1-1-1) and the ion source Y-axis fine-tuning mechanism (2-1-3-1) arranged on its upper surface. The ion source bracket (1-1-2) is fixedly connected; the ion source X-axis fine adjustment mechanism (2-1-2-1) is used to drive the ion sources of different structures to move along the X direction, thereby adjusting the distance between the ion sources (1-1) of different structures and the extraction electrode (1-2); the ion source Y-axis fine adjustment mechanism (2-1-3-1) is used to drive the ion sources of different structures to move along the Y-axis direction, thereby adjusting the alignment between the ion source beam extraction port gap and the extraction electrode gap of the different structures; the ion source extraction port plane is perpendicular to the X direction, and the ion source extraction port plane is parallel to the Y direction.

[0013] Furthermore, the extraction system motion platform (2-2) is used to roughly adjust the distance between the ion source (1-1) of various structural forms and the extraction electrode (1-2) in an atmospheric environment, and to adjust the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane, that is, the distance between the ion source (1-1) and the extraction electrode (1-2) is adjusted by the extraction system X motion platform (2-2-3), and the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane is adjusted by the extraction system rotation motion platform (2-2-2).

[0014] Furthermore, the ion source motion platform (2-1) is used to finely adjust the distance between the ion sources (1-1) of various structural forms and the extraction electrodes (1-2) under a vacuum environment, and to finely adjust the alignment between the ion source beam extraction port gap and the extraction electrode gap, that is, the distance between the ion source (1-1) and the extraction electrode (1-2) is finely adjusted by the ion source X motion platform (2-1-2), and the alignment between the ion source beam extraction port gap and the extraction electrode gap is finely adjusted by the ion source Y motion platform (2-1-3).

[0015] Furthermore, the ion source motion platform connecting plate connecting plate (2-1-1) is provided with a plurality of holes. When an ion source of a different structure is replaced, different holes are connected through the current ion source so that the outlet plane of the ion source of the different structure is always perpendicular to the X direction of the ion source motion platform.

[0016] A debugging method for ion sources adapting to various structural forms is characterized by comprising the following steps:

[0017] Step 1: Preparation before debugging; including the following steps:

[0018] ①When replacing a new ion source, the extraction electrode should be replaced simultaneously;

[0019] ② Dismantle the old ion source and extraction electrode;

[0020] ③Before debugging, complete the installation of the new ion source and the new extraction electrode.

[0021] Step 2: Debug the parallelism in atmospheric environment:

[0022] Step 3: Debug the gap alignment in a vacuum environment:

[0023] Step 4: Debug the spacing in atmospheric environment and vacuum environment.

[0024] Furthermore, the step 2 of debugging the parallelism in an atmospheric environment comprises the following steps:

[0025] ① Through the ion source motion platform connecting plate (2-1-1), it is ensured that after the ion source is installed, the plane of the ion source beam extraction hole must be perpendicular to the X direction of the ion source motion platform (2-1).

[0026] ② By means of the extraction platform connecting plate (2-2-1), the extraction platform-rotation mechanism (2-2-2-1), and the consistency of the X direction of the extraction system motion platform (2-2) and the ion source motion platform (2-1), it is ensured that the extraction electrode plane and the ion source beam extraction outlet plane are both perpendicular to the X direction of the extraction system motion platform (2-2), thereby ensuring the parallelism of the extraction electrode plane and the ion source beam extraction outlet plane.

[0027] Furthermore, the step three of debugging the gap alignment under a vacuum environment comprises the following steps:

[0028] ① When installing the ion source and extraction electrode, keep the centering error of the two gaps within a very small range;

[0029] ② In a vacuum environment, the gap of the ion source beam outlet and the gap of the extraction electrode are aligned through the ion source Y motion platform 2-1-3.

[0030] Furthermore, the step 4 of debugging the spacing in the atmospheric environment and the vacuum environment includes the following steps:

[0031] ① In an atmospheric environment, the distance between the extraction electrode (1-2) and the ion source (1-1) can be adjusted through the extraction platform-X axis fine adjustment mechanism (2-2-3-1);

[0032] ② Under vacuum environment, the distance between the ion source (1-1) and the extraction electrode (1-2) is further adjusted through the ion source X fine adjustment mechanism (2-1-2-1), thereby improving the fine adjustment of the distance.

[0033] Advantages and effects of the present invention

[0034] The device designed by the present invention is used for parameter optimization and testing experiments of ion sources. The device can carry out tests on different types of ion sources (H ion source, He ion source, etc.), as well as tests on ion sources of different structural forms (radial insertion, axial insertion forms), thereby realizing independent testing and optimization of multiple ion sources on the testing device, and further analyzing the reasons affecting the performance parameters of the ion source and the methods for optimizing them, so as to obtain an ion source with better performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a layout diagram of an ion source testing device that is adaptable to various structural forms according to the present invention;

[0036] Figure 2This is a schematic diagram of the ion source motion platform of this embodiment;

[0037] Figure 3 A schematic diagram of the system motion platform is provided for this embodiment;

[0038] Figure 4 This is a schematic diagram of the lead-out platform in this embodiment connecting the lead-out electrode and the Faraday cage;

[0039] Figure 5 This is the first viewing angle of the positional relationship between the ion source motion platform and the extraction system motion platform of this embodiment;

[0040] Figure 6 This is the second viewing angle of the positional relationship between the ion source motion platform and the extraction system motion platform of this embodiment;

[0041] Figure 7 This is the third viewing angle of the positional relationship between the ion source motion platform and the extraction system motion platform of this embodiment;

[0042] Figure 8 This is the fourth perspective of the positional relationship between the ion source motion platform and the extraction system motion platform of this embodiment;

[0043] In the figure: 1-1: ion source; 1-1-1: ion source body; 1-1-2: ion source bracket; 1-1-3: ion source water pipe; 1-1-4: ion source ventilation pipe; 1-2: extraction electrode; 1-2-1: extraction electrode plane; 1-3: Faraday cage; 2-1: ion source motion platform; 2-1-1: ion source motion platform connecting plate; 2-1-2: ion source X motion platform; 2-1-2-1: ion source X fine-tuning mechanism; 2-1-3: ion source Y motion platform; 2-1-3-1: ion source Source Y fine-tuning mechanism; 2-1-4: ion source beam outlet plane; 2-2: extraction system motion platform; 2-2-1: extraction platform connecting plate; 2-2-2: rotation motion platform; 2-2-2-1: extraction platform-rotation mechanism; 2-2-3: X motion platform; 2-2-3-1: extraction platform-X axis fine-tuning mechanism; 2-2-3-2: X motion platform moving layer; 2-2-3-3: X motion platform slide rail layer; 2-2-3-4: X motion platform fixed layer; 2-2-4: extraction platform water pipe; DETAILED DESCRIPTION

[0044] Design principle of the present invention

[0045] 1. Innovation of the present invention

[0046] One of the innovative points: the two-layer structure is changed to a three-layer structure. An ion source motion platform that can move along the XY direction, and an extraction system motion platform that can rotate along the X-axis are added between the ion source and the fixed tray, and between the extraction electrode and the fixed tray. Compared with the prior art, the prior art can only perform static adjustment but not online adjustment. Since the present invention adds an ion source motion platform and an extraction system motion platform in the middle layer, static adjustment and online adjustment are combined, eliminating the step of vacuuming for online adjustment every time in the prior art, and the work efficiency is increased several times;

[0047] The second innovation point: universal debugging device. ① The universal debugging device consists of an ion source motion platform and an extraction system motion platform. The extraction system motion platform consists of an extraction platform connecting plate, an extraction platform-rotation mechanism, and an extraction platform-X-axis fine-tuning mechanism. The ion source motion platform consists of an ion source motion platform connecting plate, an ion source-X motion platform, and an ion source-Y motion platform; wherein, a plurality of holes are provided on the ion source motion platform connecting plate, and the plurality of holes are used to form a combination of a plurality of holes, and each combination of holes corresponds to a structure of the ion source, and each combination of holes ensures that the plane of the ion source extraction port connected by the combination of holes must be perpendicular to the X direction; there are a total of 7 groups of holes in the present embodiment, which can correspond to 7 types of ion source structures;

[0048] 2. Application examples of general debugging devices

[0049] The debugging contents include: parallelism debugging, gap alignment debugging, and spacing debugging.

[0050] The first step is preparation before debugging: ① When replacing a new ion source, the extraction electrode must be replaced simultaneously, because the height of the extraction electrode must be suitable for the structure of the current ion source. ② Before replacing a new ion source, disassemble the old ion source and extraction electrode through the extraction platform connecting plate and the ion source motion platform connecting plate; ③ Before debugging, complete the installation of the new ion source and the new extraction electrode.

[0051] The second step is to debug the parallelism. The debugging of parallelism is carried out in an atmospheric environment. ① Through the ion source motion platform connecting plate 2-1-1, the parallelism of the extraction electrode plane 2-1-4 and the ion source beam outlet plane 1-2-1 is ensured. When installing a new ion source, find a group of holes corresponding to the current ion source on the ion source motion platform connecting plate (a total of 7 groups of holes in this embodiment, corresponding to 7 ion source structures), and fix the connecting plate and the ion source according to this group of holes. After the installation is completed, the ion source beam extraction hole plane 1-2-1 must be perpendicular to the X direction of the ion source motion platform 2-1. ② Through the consistency of the extraction platform connecting plate 2-2-1, the extraction platform-rotation mechanism 2-2-2-1, and the extraction system motion platform 2-2 and the ion source motion platform 2-1X direction, the parallelism of the extraction electrode plane 1-2-1 and the ion source beam outlet plane 2-1-1 is ensured. When installing a new extraction electrode, the extraction platform-rotation mechanism 2-2-2-1 rotates at an angle, driving the extraction platform connection plate 2-2-1 and the extraction electrode 1-2 to rotate together, so that the extraction electrode 1-2-1 plane is perpendicular to the X direction of the extraction platform. Due to the consistency of the X direction of the extraction system motion platform and the ion source motion platform, when the extraction electrode plane 1-2-1 and the ion source extraction outlet plane 2-1-1 are both perpendicular to the X direction, the parallelism between the extraction electrode plane 1-2-1 and the ion source extraction outlet plane 2-1-1 is guaranteed.

[0052] Step 3: Debugging the gap alignment. The gap alignment is debugged by online debugging. Online debugging uses the ion source Y motion platform 2-1. The gap alignment is the alignment of the gap at the ion source beam outlet and the gap at the extraction electrode. Since the alignment error of the two gaps has been controlled within a very small range when the ion source 1-1 and the extraction electrode 1-2 are installed, the adjustment amount of online debugging is very small.

[0053] Step 4: Debugging of the spacing. The debugging of the spacing adopts a combination of online and offline, coarse and fine adjustments. The offline is the atmospheric environment, and the online is the vacuum environment. In the coarse adjustment stage, since the new ion source has been installed and the planar posture of the ion source extraction port has been determined, the spacing between the extraction electrode 1-2 and the ion source 1-1 can be adjusted through the extraction platform-X axis fine adjustment mechanism 2-2-3-1; in the fine adjustment stage, when the shape of the beam does not reach the ideal parameters, the spacing between the ion source 1-1 and the extraction electrode 1-2 is further adjusted through the ion source X motion platform 2-1, thereby improving the fine adjustment of the spacing.

[0054] The present invention is specifically described below in conjunction with the accompanying drawings and embodiments:

[0055] A debugging device adapted to various structural forms of ion sources, such as Figure 1-8As shown, the test device includes three layers: upper, middle and lower. The upper layer is an ion source 1-1 and an extraction system, and the extraction system is an ion source beam extraction system; the extraction system includes an extraction electrode 1-2 and a Faraday cage 1-3; the middle layer is an ion source motion platform 2-1 that drives the ion source 1-1 to move in the XY direction, and an extraction system motion platform 2-2 that drives the extraction system to move in the X direction and rotate; the lower layer is a fixed tray 3, and the fixed tray 3 is respectively fixed to the lower surface of the ion source motion platform 2-1 and the lower surface of the extraction system motion platform 2-2; the X direction of the ion source motion platform 2-1 and the X direction of the extraction system motion platform are the same direction, and the XY direction of the ion source motion platform and the X direction of the extraction system motion platform are fixed and unchanged, and its characteristics are:

[0056] The ion source is an ion source with various structural forms, and the ion sources with various structural forms are: each ion source has different external and internal structures, and the ion sources with different external and internal structures have different distances between the beam extraction outlet and the extraction electrode 1-2, different degrees of centering of the beam extraction outlet gap relative to the extraction electrode gap, and different degrees of parallelism of the ion source extraction outlet plane 2-1-4 relative to the extraction electrode plane 1-2-1; the extraction system motion platform 2-2 is used to coarsely adjust the spacing between the ion sources 1-1 and the extraction electrode 1-2 of the various structural forms in an atmospheric environment, and adjust the parallelism of the extraction electrode plane 1-2-1 and the ion source beam extraction outlet plane 2-1-4; the ion source motion platform 2-1 is used to finely adjust the spacing between the ion sources 1-1 and the extraction electrode 1-2 of the various structural forms, and finely adjust the centering of the ion source beam extraction outlet gap and the extraction electrode gap in a vacuum environment.

[0057] like Figure 3As shown, the extraction system motion platform 2-2 is provided with an extraction platform connecting plate 2-2-1, a rotating motion platform 2-2-2, and an X motion platform 2-2-3 from top to bottom in sequence; the rotating motion platform 2-2-2 includes an extraction platform-rotation mechanism 2-2-2-1, and the X motion platform 2-2-3 includes an extraction platform-X axis fine adjustment mechanism 2-2-3-1, the extraction platform connecting plate 2-2-1 is used to be fixedly connected to the extraction electrode 1-2 and the Faraday cage 1-3 arranged on its upper surface, and the extraction platform-X axis fine adjustment mechanism 2-2-3 ... The extraction system is driven to move along the X direction, which is perpendicular to the extraction electrode 1-2 plate, and then the distance between the extraction electrode 1-2 and the ion source extraction outlet of different structures is adjusted through the X direction movement of the extraction platform-X axis fine-tuning mechanism 2-2-3-1; the extraction platform-rotation mechanism 2-2-2-1 is used to drive the extraction system to rotate, and then the parallelism between the extraction electrode plane 1-2-1 and the ion source beam extraction outlet plane 2-1-4 of different structures is adjusted through the rotational movement of the extraction platform-rotation mechanism 2-2-2-1.

[0058] like Figure 1 , Figure 2 , Figure 7 As shown, the ion source motion platform 2-1 is provided with an ion source motion platform connecting plate 2-1-1, an ion source X motion platform 2-1-2, and an ion source Y motion platform 2-1-3 from top to bottom; the ion source X motion platform 2-1-2 and the ion source Y motion platform 2-1-3 are respectively provided with an ion source X-axis fine-tuning mechanism 2-1-2-1 and an ion source Y-axis fine-tuning mechanism 2-1-3-1, and the ion source motion platform connecting plate 2-1-1 is used to connect with the ion source body 1-1-1 and the ion source bracket 1-1-2 arranged on its upper surface. fixed connection; the ion source X-axis fine-tuning mechanism 2-1-2-1 is used to drive ion sources of different structures to move along the X direction, thereby adjusting the distance between the ion sources 1-1 of different structures and the extraction electrode 1-2; the ion source Y-axis fine-tuning mechanism 2-1-3-1 is used to drive ion sources of different structures to move along the Y-axis direction, thereby adjusting the alignment between the ion source beam extraction port gap and the extraction electrode gap of different structures; the ion source extraction port plane 2-1-4 is perpendicular to the X direction, and the ion source extraction port plane 2-1-4 is parallel to the Y direction.

[0059] like Figure 1 , Figure 3 , Figure 7As shown, the extraction system motion platform 2-2 is used to roughly adjust the distance between the ion source 1-1 and the extraction electrode 1-2 of the various structural forms under the atmospheric environment, and adjust the parallelism of the extraction electrode plane and the ion source beam extraction outlet plane, that is, the distance between the ion source 1-1 and the extraction electrode 1-2 is adjusted by the extraction system X motion platform 2-2-3, and the parallelism of the extraction electrode plane 1-2-1 and the ion source beam extraction outlet plane 2-1-4 is adjusted by the extraction system rotation motion platform 2-2-2.

[0060] like Figure 1 , Figure 3 As shown, the ion source motion platform 2-1 is used to fine-tune the distance between the ion source 1-1 of various structural forms and the extraction electrode 1-2 in a vacuum environment, and to fine-tune the alignment of the ion source beam extraction outlet gap and the extraction electrode gap, that is, the distance between the ion source 1-1 and the extraction electrode 1-2 is fine-tuned by the ion source X motion platform 2-1-2, and the alignment of the ion source beam extraction outlet gap and the extraction electrode gap is fine-tuned by the ion source Y motion platform 2-1-3.

[0061] like Figure 2 As shown, the ion source motion platform connecting plate 2-1-1 is provided with a plurality of holes. When replacing an ion source of a different structure, different holes are connected through the current ion source so that the outlet planes of the ion sources of different structures are always perpendicular to the X direction of the ion source motion platform.

[0062] A debugging method for ion sources adapting to various structural forms is characterized by comprising the following steps:

[0063] Step 1: Preparation before debugging; including the following steps:

[0064] ①When replacing a new ion source, the extraction electrode should be replaced simultaneously;

[0065] ② Dismantle the old ion source and extraction electrode;

[0066] ③Before debugging, complete the installation of the new ion source and the new extraction electrode.

[0067] Step 2: Debug the parallelism in atmospheric environment:

[0068] Step 3: Debug the gap alignment in a vacuum environment:

[0069] Step 4: Debug the spacing in atmospheric environment and vacuum environment.

[0070] Furthermore, the step 2 of debugging the parallelism in an atmospheric environment comprises the following steps:

[0071] ① Through the ion source motion platform connecting plate 2-1-1, ensure that after the ion source is installed, the plane of the ion source beam extraction hole must be perpendicular to the X direction of the ion source motion platform 2-1.

[0072] ② By means of the consistency of the extraction platform connecting plate 2-2-1, the extraction platform-rotation mechanism 2-2-2-1, and the X-direction of the extraction system motion platform 2-2 and the ion source motion platform 2-1, it is ensured that the extraction electrode plane and the ion source beam extraction outlet plane are both perpendicular to the X-direction of the extraction system motion platform (2-2), thereby ensuring the parallelism of the extraction electrode plane and the ion source beam extraction outlet plane.

[0073] like Figure 2 As shown, the step three of debugging the gap alignment under a vacuum environment includes the following steps:

[0074] ① When installing the ion source and extraction electrode, keep the centering error of the two gaps within a very small range;

[0075] ② In a vacuum environment, the gap of the ion source beam outlet and the gap of the extraction electrode are aligned through the ion source Y motion platform 2-1-3.

[0076] like Figure 2 , Figure 3 , Figure 4 As shown, the step 4 of debugging the spacing in the atmospheric environment and the vacuum environment includes the following steps:

[0077] ① In the atmospheric environment, the distance between the extraction electrode 1-2 and the ion source 1-1 can be adjusted through the extraction platform-X axis fine adjustment mechanism 2-2-3-1;

[0078] ② Under vacuum environment, the distance between the ion source 1-1 and the extraction electrode 1-2 is further adjusted through the ion source X fine adjustment mechanism 2-1-2-1, thereby improving the fine adjustment of the distance.

[0079] Embodiment 1

[0080] The invention discloses an ion source debugging device which is adaptable to various structural forms, and mainly comprises a superconducting magnet system, a vacuum system, a beam measurement system, an extraction system, an ion source system, a two-dimensional motion platform and other parts.

[0081] First, the beam measurement system, extraction system, ion source system two-dimensional motion platform and other components are installed in the vacuum chamber, wherein the beam measurement system and the extraction system are relatively fixedly installed, and their components are installed on the two-dimensional motion platform, and the ion source is fixed on the vacuum chamber. The relative position of the ion source and the beam measurement system and the extraction system can be adjusted through the two-dimensional motion platform.

[0082] After all the systems are installed, first turn on the vacuum pump to evacuate the vacuum chamber, and at the same time excite the superconducting magnet until the vacuum degree is better than 5×10-4Pa and the magnetic field is stabilized to 1T.

[0083] Then adjust the ion source gas flow and cathode voltage until the ion source arcs stably. At the same time, high voltage is applied to the extraction system to monitor the current changes on the Faraday cage of the beam measurement system to achieve the extraction of the ion source beam.

[0084] During the experiment, the best performance of the ion source can be obtained by adjusting various parameters such as the ion source and beam measurement system, extraction system, gas flow, extraction voltage, etc.

[0085] At the same time, ion sources with different structural forms can also be replaced and tested under the system to obtain the relationship between different structural forms and ion source performance.

[0086] It should be emphasized that the above specific embodiments are merely explanations of the present invention, and they are not limitations of the present invention. After reading this specification, those skilled in the art can make modifications to the above embodiments without any creative contribution as needed, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A debugging device for ion sources adapting to various structural forms, the testing device comprises three layers: an upper layer, a middle layer and a lower layer, wherein the upper layer is an ion source (1-1) and an extraction system, wherein the extraction system is an ion source beam extraction system; the extraction system comprises an extraction electrode (1-2) and a Faraday cage (1-3); the middle layer is an ion source motion platform (2-1) for driving the ion source (1-1) to move in the XY direction, and an extraction system motion platform (2-2) for driving the extraction system to move in the X direction and to rotate; the lower layer is a fixed tray (3), wherein the fixed tray (3) is respectively fixedly connected to the lower surface of the ion source motion platform (2-1) and the lower surface of the extraction system motion platform (2-2); the X direction of the ion source motion platform (2-1) and the X direction of the extraction system motion platform are the same direction, and the XY direction of the ion source motion platform and the X direction of the extraction system motion platform are fixed and unchanged, characterized in that: The ion source is an ion source of various structural forms, and the ion sources of various structural forms are: each ion source has a different external structure and internal structure, and the ion sources of different external structures and internal structures have different distances between the beam extraction outlet and the extraction electrode (1-2), different degrees of centering of the beam extraction outlet gap relative to the extraction electrode gap, and different degrees of parallelism of the ion source extraction outlet plane relative to the extraction electrode plane; the extraction system motion platform (2-2) is used to roughly adjust the spacing between the ion sources of various structural forms (1-1) and the extraction electrode (1-2) in an atmospheric environment, and to adjust the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane; the ion source motion platform (2-1) is used to finely adjust the spacing between the ion sources of various structural forms (1-1) and the extraction electrode (1-2), and to finely adjust the centering of the ion source beam extraction outlet gap and the extraction electrode gap in a vacuum environment.

2. The debugging device for ion sources of various structural forms according to claim 1, characterized in that: The extraction system motion platform (2-2) is provided with an extraction platform connecting plate (2-2-1), a rotating motion platform (2-2-2), and an X-motion platform (2-2-3) in sequence from top to bottom; the rotating motion platform (2-2-2) comprises an extraction platform-rotating mechanism (2-2-2-1), the X-motion platform (2-2-3) comprises an extraction platform-X-axis fine-tuning mechanism (2-2-3-1), the extraction platform connecting plate (2-2-1) is used for fixing with the extraction electrode (1-2) and the Faraday cage (1-3) arranged on its upper surface, and the extraction platform-X-axis fine-tuning mechanism (2-2-3-1) is used for fixing with the extraction electrode (1-2) and the Faraday cage (1-3) arranged on its upper surface. The extraction platform-rotation mechanism (2-2-2-1) is used to drive the extraction system to move along the X direction, wherein the X direction is perpendicular to the extraction electrode (1-2) plate, and then the distance between the extraction electrode (1-2) and the ion source extraction outlet of different structures is adjusted through the X direction movement of the extraction platform-X axis fine adjustment mechanism (2-2-3-1); the extraction platform-rotation mechanism (2-2-2-1) is used to drive the extraction system to rotate, and then the parallelism between the extraction electrode (1-2) plane and the ion source extraction outlet plane of different structures is adjusted through the rotation movement of the extraction platform-rotation mechanism (2-2-2-1).

3. The debugging device for ion sources adapting to various structural forms according to claim 1, characterized in that: The ion source motion platform (2-1) is provided with an ion source motion platform connecting plate (2-1-1), an ion source X motion platform (2-1-2), and an ion source Y motion platform (2-1-3) in sequence from top to bottom; the ion source X motion platform (2-1-2) and the ion source Y motion platform (2-1-3) are respectively provided with an ion source X-axis fine adjustment mechanism (2-1-2-1) and an ion source Y-axis fine adjustment mechanism (2-1-3-1); the ion source motion platform connecting plate (2-1-1) is used for connecting with the ion source body (1-1-1) and the ion source Y-axis fine adjustment mechanism (2-1-3-1) arranged on its upper surface. The source bracket (1-1-2) is fixedly connected; the ion source X-axis fine adjustment mechanism (2-1-2-1) is used to drive the ion sources of different structures to move along the X direction, thereby adjusting the distance between the ion sources (1-1) of different structures and the extraction electrode (1-2); the ion source Y-axis fine adjustment mechanism (2-1-3-1) is used to drive the ion sources of different structures to move along the Y-axis direction, thereby adjusting the alignment between the ion source beam extraction port gap and the extraction electrode gap of the different structures; the ion source extraction port plane is perpendicular to the X direction, and the ion source extraction port plane is parallel to the Y direction.

4. The debugging device for ion sources adapting to various structural forms according to claim 1, characterized in that: The extraction system motion platform (2-2) is used to roughly adjust the distance between the ion source (1-1) of various structural forms and the extraction electrode (1-2) in an atmospheric environment, and to adjust the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane, that is, the distance between the ion source (1-1) and the extraction electrode (1-2) is adjusted by the extraction system X motion platform (2-2-3), and the parallelism between the extraction electrode plane and the ion source beam extraction outlet plane is adjusted by the extraction system rotation motion platform (2-2-2).

5. The debugging device for ion sources adapting to various structural forms according to claim 1, characterized in that: The ion source motion platform (2-1) is used to finely adjust the distance between the ion sources (1-1) of various structural forms and the extraction electrode (1-2) under a vacuum environment, and to finely adjust the alignment between the ion source beam extraction port gap and the extraction electrode gap, that is, the distance between the ion source (1-1) and the extraction electrode (1-2) is finely adjusted by the ion source X motion platform (2-1-2), and the alignment between the ion source beam extraction port gap and the extraction electrode gap is finely adjusted by the ion source Y motion platform (2-1-3).

6. The debugging device for ion sources adapting to various structural forms according to claim 1, characterized in that: The ion source motion platform connecting plate connecting plate (2-1-1) is provided with a plurality of holes. When an ion source with a different structure is replaced, the current ion source is connected to different holes so that the outlet plane of the ion source with a different structure is always perpendicular to the X direction of the ion source motion platform.

7. A method for debugging ion sources of various structural forms based on a debugging device for ion sources of various structural forms according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step 1: Preparation before debugging; including the following steps: ①When replacing a new ion source, the extraction electrode should be replaced simultaneously; ② Dismantle the old ion source and extraction electrode; ③Before debugging, complete the installation of the new ion source and the new extraction electrode; Step 2: Debug the parallelism in atmospheric environment: Step 3: Debug the gap alignment in a vacuum environment: Step 4: Debug the spacing in atmospheric environment and vacuum environment.

8. The debugging method of an ion source adaptable to various structural forms according to claim 7, characterized in that: The step 2 of debugging the parallelism in an atmospheric environment comprises the following steps: ① Through the ion source motion platform connecting plate (2-1-1), it is ensured that after the ion source is installed, the plane of the ion source beam extraction hole must be perpendicular to the X direction of the ion source motion platform (2-1). ② By ensuring the consistency of the extraction platform connecting plate (2-2-1), the extraction platform-rotation mechanism (2-2-2-1), and the X-direction of the extraction system motion platform (2-2) and the ion source motion platform (2-1), it is ensured that the extraction electrode plane and the ion source beam extraction port plane are both perpendicular to the X-direction of the extraction system motion platform (2-2).

9. The debugging method of an ion source adaptable to various structural forms according to claim 7, characterized in that: Step 3: Debugging the gap alignment under vacuum; including the following steps: ① When installing the ion source and extraction electrode, keep the centering error of the two gaps within a very small range; ② In a vacuum environment, the gap of the ion source beam outlet and the gap of the extraction electrode are aligned through the ion source Y motion platform 2-1-3.

10. The debugging method for ion sources adapting to various structural forms according to claim 7, characterized in that: The step 4 of debugging the spacing in the atmospheric environment and the vacuum environment includes the following steps: ① In the atmospheric environment, the distance between the extraction electrode and the ion source can be adjusted through the extraction platform-X-axis fine-tuning mechanism; ② In a vacuum environment, the distance between the ion source and the extraction electrode is further adjusted through the ion source X motion platform, thereby improving the fine adjustment of the distance.

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