Edge passivation coating reaction chamber structure and passivation equipment

Abstract

The invention provides an edge passivation coating reaction chamber structure and passivation equipment, and the structure comprises a reaction furnace body which is internally provided with a passivation boat; the passivation boat comprises a first electrode plate, the potential of the first electrode plate is opposite to that of a passivation piece box in the passivation boat when the passivation boat is powered on, and an alternating electric field used for generating plasma is formed between the passivation face of the battery piece in the passivation piece box and the first electrode plate. According to the invention, the alternating electric field is formed by the top plane of the battery piece in the passivation piece box and the first electrode plate to generate the plasma, so that the top plane of the battery piece in the passivation piece box is uniformly coated; plasma can be drained and deposited on the upper top faces of the battery pieces in the passivation piece box through the holes of the second electrode plate, and superposition coating passivation is achieved. And the process requirements of a gas field, an electric field and a temperature field in ALD, PECVD and annealing processes are met at the same time. And seamless switching of multiple processes in the same working environment is realized.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell coating, and in particular to edge coating equipment for crystalline silicon cells. Background Art

[0002] With the rapid development of the photovoltaic industry, crystalline silicon cell technology is constantly updated to meet the growing energy demand and improve the efficiency of photovoltaic modules. In the production process of battery modules, laser slicing technology (LS for short) is widely used to accurately split large-size cells into two or more small-size cells. Through this segmentation method, the current density in the string can be effectively reduced, and the power loss caused by the series resistance can be reduced, thereby significantly improving the overall output power and conversion efficiency of the photovoltaic module. This technology has become one of the important means to increase the power of photovoltaic modules.

[0003] However, laser chipping technology has a certain impact on the conversion efficiency of the cell. Specifically, the new cut surface generated during the laser cutting process is likely to become an active area for carrier recombination, resulting in an increase in the carrier recombination rate. Especially in high-efficiency cells, the negative impact of edge recombination on conversion efficiency is more significant.

[0004] Therefore, how to improve the conversion efficiency of solar cells after laser cutting has become an urgent problem to be solved. Summary of the invention

[0005] In order to solve the technical problem in the prior art that the conversion efficiency of a cell is too low after laser cutting, the present invention proposes an edge passivation coating reaction chamber structure and a passivation device.

[0006] The technical solution adopted by the present invention is:

[0007] The present invention proposes an edge passivation coating reaction chamber structure, comprising:

[0008] The reaction furnace body is provided with a reaction chamber inside for placing the passivation boat, and is provided with an air inlet and an air exhaust port connected to the reaction chamber;

[0009] A passivation boat, used for loading a passivation film box, the passivation boat comprises a first electrode plate, wherein the first electrode plate is close to and directly faces the passivation surface of the battery cell in the loaded passivation film box;

[0010] The electrode assembly is installed on the reaction furnace body and is electrically connected to the first electrode plate of the passivation boat and the passivation film box. When power is turned on, the electric potential of the first electrode plate and the passivation film box are opposite, so that an alternating electric field for generating plasma is formed between the passivation surface of the battery cell in the passivation film box and the first electrode plate.

[0011] Furthermore, the passivation boat also includes a second electrode plate. The loading space of the passivation boat has multiple loading positions for loading passivation film boxes, and the passivation film boxes on the loading positions are conductively connected to the second electrode plate. The second electrode plate is provided with drainage holes corresponding to each loading position.

[0012] Preferably, the distance between the first electrode plate and the second electrode plate is set in the range of 10-50 mm.

[0013] The passivation boat comprises: a first boat frame and a second boat frame; the first boat frame comprises a first electrode plate and a second electrode plate connected by insulating fasteners, the second boat frame has a plurality of loading positions for loading passivation film boxes, and the first boat frame is installed above the second boat frame.

[0014] Furthermore, a plurality of second insulating support seats and a plurality of second conductive support seats are provided on the second boat frame, and the second conductive support seats are electrically connected to the passivation film box loaded in each loading position; a first insulating support seat corresponding to the second insulating support seat is provided on the first electrode plate, and a first conductive support seat corresponding to the second conductive support seat is provided on the second electrode plate.

[0015] Furthermore, a first electrical connector is disposed on the first electrode plate, a second electrical connector is disposed on the second boat frame, and the electrode assembly includes a first electrode rod and a second electrode rod respectively plugged with the first electrical connector and the second electrical connector for electrical conduction.

[0016] Furthermore, the second power connector and the second conductive support seat are located at opposite ends of the second boat frame.

[0017] Furthermore, the first electrical connector and the second electrical connector are located at the same end or two opposite ends of the passivation boat.

[0018] The second boat frame includes a pair of brackets arranged at intervals and a pair of side plates connected between the pair of brackets and jointly enclosing a loading space.

[0019] Furthermore, a conductive tape is provided at the bottom of the second boat frame.

[0020] Furthermore, the second conductive support seat and the second insulating support seat are respectively arranged on different brackets for supporting two ends of the first boat frame.

[0021] Furthermore, a gripping and positioning assembly is arranged on the side of the first electrode plate facing away from the second electrode plate, and the gripping and positioning assembly includes beams arranged at intervals on the first electrode plate, and a plurality of gripping blocks respectively connected to the beams.

[0022] The reaction furnace body includes: a transversely arranged furnace tube, a front flange and a rear flange respectively installed at both ends of the furnace tube, a heating device arranged on the outer wall of the furnace tube, a boat support rod arranged inside the furnace tube to support the passivation boat, and an electrode assembly installed on the front flange or the rear flange.

[0023] The passivation film box includes: a box body made of conductive material, the top surface of the box body is not closed to form a receiving groove for placing the battery cell, a support plate is provided on one side of the receiving groove, and a fixing component that can be moved toward the support plate to press the battery cell is provided on the other side of the box body corresponding to the receiving groove; the side of the fixing component facing the support plate and the support plate are both made of insulating material.

[0024] The present invention also provides a passivation device, comprising the above-mentioned edge passivation coating reaction chamber structure.

[0025] Compared with the prior art, the present invention has the following advantages:

[0026] 1. The edge passivation coating reaction chamber can realize the edge passivation boat, through the top plane of the battery cell in the passivation film box and the first electrode plate to form an alternating electric field, plasma is generated in between, and the top plane of the battery cell in the passivation film box is evenly coated, thereby avoiding the carrier recombination of the newly cut surface of the battery cell, improving the conversion efficiency of the battery cell after laser cutting, and solving the technical problem of low conversion efficiency of the battery cell after laser cutting in the related technology.

[0027] 2. The opening of the second electrode plate can drain the plasma between the first electrode plate and the second electrode plate and deposit it on the upper top surface of the battery cell in the passivation plate box to achieve superimposed coating passivation.

[0028] 3. The passivation boat, combined with the reactor structure, can simultaneously meet the gas field, electric field and temperature field requirements of ALD, PECVD and annealing processes. It can achieve seamless switching of multiple processes in the same working environment. The combination of ALD+PECVD processes can effectively reduce the amount of water used while ensuring the passivation effect, thereby greatly weakening the problem of aluminum oxide plating.

[0029] 4. The equipment has strong process scalability. In the same tube passivation process formula, the deposition of silicon nitride film and annealing process can also be added to achieve the superposition of multiple processes to achieve a better passivation effect. It can more effectively reduce and repair the conversion efficiency loss after the whole cell is split. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 A front view of a reaction chamber structure in an embodiment of the present invention;

[0032] Figure 2 A top view of the reaction chamber structure in an embodiment of the present invention;

[0033] Figure 3 It is a front view of a passivation boat loaded with a passivation film cassette in an embodiment of the present invention;

[0034] Figure 4 is a front view of a passivation boat frame according to an embodiment of the present invention;

[0035] Figure 5 is a three-dimensional structural diagram of a second boat frame in an embodiment of the present invention;

[0036] Figure 6 is a three-dimensional structural diagram of a first boat frame in an embodiment of the present invention;

[0037] Figure 7 A three-dimensional structural diagram of a passivation film box in an embodiment of the present invention;

[0038] Figure 8 It is a cross-sectional view of a passivation boat loaded with a passivation film cassette in an embodiment of the present invention;

[0039] Fig. 9 is a bottom view of the first boat frame in an embodiment of the present invention;

[0040] 1. exhaust port; 2. rear flange; 3. furnace tube; 4. heating device; 5. front flange; 6. air inlet; 7. passivation boat; 8. boat support rod; 9. second electrode rod; 10. first electrode rod; 11. passivation boat frame; 12. passivation film box; 13. second boat frame; 14. first boat frame; 16. second insulating support seat; 17. rear side plate; 18. conductive belt; 19. second conductive support seat; 20. right support; 21. front side plate; 22. left support; 23 , drainage hole; 24, second power connection connector; 25, gripping block 1; 26, gripping block 2; 27, first conductive support seat; 28, crossbeam; 29, insulating fastener; 30, first electrode plate; 31, second electrode plate; 32, first insulating support seat; 33, first power connection connector; 34, spring assembly; 35, spring pressure plate; 36, rear guard plate; 37, battery cell; 38, support plate; 39, front guard plate; 40, box body electrode rod; 41, box body; 42, gripping plate. DETAILED DESCRIPTION

[0041] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0042] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0043] In order to reduce and eliminate the loss of conversion efficiency of cells caused by laser cracking in the assembly process, cell manufacturers currently use edge passivation technology to passivate the edges of cells to solve this problem. At present, many edge passivation technologies in the industry are still in the small-scale verification stage, and a new process equipment and method that can be stably put into mass production is needed to further improve the conversion efficiency of cells.

[0044] In this regard, Figure 1 , 2 As shown in Figure 6, the present invention proposes an edge passivation coating reaction chamber structure, which is mainly used for edge passivation coating of battery cells 37 after cutting, and specifically includes: a reaction furnace body, a passivation boat 7 and an electrode assembly. A reaction chamber is provided inside the reaction furnace body for placing the passivation boat 7 that needs to be edge passivated, and the reaction chamber is heated by a heating device 4 to provide reaction conditions. The heating device 4 can adopt a resistance heating or radiation heating method. At the same time, the reaction furnace body is also provided with an air inlet 6 and an exhaust port 1 connected to the reaction chamber. The air inlet 6 is used to pass through the reaction gas to support the gas supply of the atomic layer deposition (ALD) process or the plasma enhanced chemical vapor deposition (PECVD) process; the exhaust port 1 is used to evacuate the reaction chamber so that the furnace body can maintain the pressure environment in the reaction chamber, ensuring the stable flow of the process gas and the controllability of the reaction conditions. The passivation boat 7 is used to load the passivation film box 12, which can be fed into and taken out of the reaction chamber by an automatic feeding and taking mechanism (such as a robot, a transmission belt or a tray).

[0045] The passivation boat 7 includes a first electrode plate 30 and a second electrode plate 31 which are arranged at intervals. The first electrode plate 30 and the second electrode plate 31 can be arranged to be parallel or approximately parallel, wherein the second electrode plate 31 is closer to the passivation film box 12 loaded in the passivation boat 7 relative to the first electrode plate 30, and the second electrode plate 31 is directly opposite to the passivation surface of the battery cell 37 in the passivation film box 12 that needs to be passivated. The electrode assembly is installed on the reaction furnace body and is electrically connected to the first electrode plate 30 and the second electrode plate 31 of the passivation boat 7. When the electrode assembly is energized, the electric potential of the first electrode plate 30 and the second electrode plate 31 are opposite, and an alternating electric field is formed between the passivation surface of the battery cell 37 in the passivation film box 12 and the first electrode plate 30 for generating plasma. After connecting to the radio frequency power supply, a high-frequency alternating electric field is generated between the two plates, so that the process gas between the two plates generates plasma. The edge plane of the battery cell 37 at the same pole as the second electrode plate 31 realizes plasma chemical vapor deposition coating. The edge passivation coating reaction chamber can generate superimposed plasma between the first electrode plate 30 and the second electrode plate 31 in the passivation boat 7, and between the first electrode plate 30 and the top surface of the battery cell 37 in the edge passivation film box 12; the superposition effect of this multi-layer plasma can significantly improve the density and adhesion of the passivation film, ensuring the high quality of the passivation film.

[0046] The edge passivation coating reaction chamber structure realizes the industrialization of edge passivation coating of half-cells, and has the advantages of stable process, excellent passivation film, high coating efficiency, low manufacturing cost, etc. It ensures the consistency and high quality of the passivation film, significantly improves the performance and life of the cell, and has significant technical advantages.

[0047] In a specific embodiment, Figure 1 , 6 As shown in Figures 9 and 10, the loading space of the passivation boat 7 is provided with a plurality of loading positions, each of which is used to accommodate a passivation film box 12. The passivation film box 12 on each loading position is connected to the second electrode plate 31 of the passivation boat 7 through a conductive connection, ensuring that the battery cells 37 in each passivation film box 12 can be subjected to the electric field when power is turned on. A drainage hole 23 is specially provided on the second electrode plate 31 for each loading position, and the drainage hole can drain the plasma between the first electrode plate 30 and the second electrode plate 31 and deposit it on the upper top surface of the battery cell 37 in the passivation film box 12 to achieve superimposed coating passivation. The coating speed of the passivation boat 7 on the battery cell 37 is accelerated, the coating efficiency of the passivation boat 7 is improved, and it is conducive to the large-scale edge passivation coating of the battery cell.

[0048] In a preferred embodiment, the drainage hole is a square hole, which faces the passivation surface of the battery cell below it. At the same time, the size of the drainage hole is greater than or equal to the length and width of the overall top edge surface of the battery cell 37 group in the passivation cell box 12.

[0049] In other optional embodiments, the shape of the drainage hole can also be elliptical, diamond-shaped or irregular, etc., as long as its size is greater than or equal to the length and width of the overall top edge surface of the battery cell 37 group in the passivation cell box 12.

[0050] In a preferred embodiment, the distance between the first electrode plate 30 and the second electrode plate 31 is 10-50 mm. In addition, after the passivation film box 12 is placed inside the passivation boat 7 frame, the distance between the top edge surface (i.e., the passivation surface) of the battery cell 37 group in the passivation film box 12 and the second electrode plate 31 is 10-50 mm. In practical application, when the distance between the first electrode plate 30 and the second electrode plate 31 is 20 mm, and the distance between the top edge surface of the battery cell 37 group in the passivation film box 12 and the second electrode plate 31 is 20 mm, the coating efficiency of the passivation boat 7 is better.

[0051] In a specific embodiment, Figures 3 to 6As shown in Figures 8 and 9, the passivation boat 7 includes a passivation boat frame 11 and a passivation film box 12, wherein the passivation boat frame 11 includes a first boat frame 14 and a second boat frame 13. The first boat frame 14 connects the first electrode plate 30 and the second electrode plate 31 through an insulating fastener 29. The insulating fastener 29 can be made of a high-temperature resistant insulating material, such as ceramic or high-performance polymer, to adapt to the high temperature environment in the reaction chamber and prevent short circuits between the electrode plates. The second boat frame 13 is provided with a plurality of loading positions for accommodating a plurality of passivation film boxes 12. These loading positions are equipped with independent fixing structures, such as card slots arranged on both sides of the passivation film box 12, for carding into the electrode rods and other components corresponding to the side of the passivation film box 12 to realize the positioning of the passivation film box 12. The first boat frame 14 is installed above the second boat frame 13. Through the structural design of the first boat frame 14 and the second boat frame 13, stable support and uniform passivation of a plurality of passivation film boxes 12 are achieved.

[0052] In a further embodiment, a plurality of second insulating support seats 16 and a plurality of second conductive support seats 19 are provided on the second boat 13. The main function of the second insulating support seats 16 is to provide mechanical support for the first boat 14 and ensure that electrical insulation is maintained during the connection process. The second conductive support seats 19 not only mechanically support the first boat 14, but are also responsible for achieving electrical connection. The second conductive support seats 19 are electrically connected to the passivation film boxes 12 loaded in the plurality of loading positions of the second boat 13, that is, the frame of the second boat 13 is made of conductive material.

[0053] On the first electrode plate 30, a first insulating support seat 32 corresponding to the second insulating support seat 16 is provided, and on the second electrode plate 31, a first conductive support seat 27 corresponding to the second conductive support seat 19 is provided. The first insulating support seat 32 corresponds to the second insulating support seat 16 one by one, ensuring that the first electrode plate 30 can achieve a stable mechanical connection with the second boat frame 13 through the insulating support seat while maintaining electrical isolation. The first insulating support seat 32 uses the same or similar high-insulation material as the second insulating support seat 16 to ensure that the insulation performance of the overall system is consistent and prevent current from flowing on a path that should not be conducted.

[0054] On the second electrode plate 31, a first conductive support seat 27 corresponding to the second conductive support seat 19 is provided to form a stable electrical connection channel. That is, the second electrode plate 31 can be effectively connected to the second conductive support seat 19 through the first conductive support seat 27, so that current is conducted from the second boat 13 to the second electrode plate 31.

[0055] In a preferred embodiment, as shown in the figure, two first insulating support seats 32 are spaced apart at the left end of the first electrode plate 30, and two second insulating support seats 16 are correspondingly provided at the left end of the second boat frame 13, wherein the two second insulating support seats 16 are two vertically arranged insulating rods arranged on the second boat frame 13, and the top surface of the insulating rod is an arc convex upward, and a protrusion is provided on the top surface, and the corresponding bottom surface of the first insulating support seat 32 is provided with an arc-shaped depression corresponding to the insulating rod, and a notch corresponding to the protrusion. With this structure, the second insulating support seat 16 can provide support force for the first electrode plate 30 and limit the lateral sliding of the first electrode plate 30.

[0056] A first conductive support seat 27 is disposed at the right end of the second electrode plate 31 . The lower surface of the first conductive support seat 27 is provided with an arc-shaped depression, and the corresponding second conductive support seat 19 is provided with an arc-shaped protrusion to provide support and conductive connection.

[0057] In addition to the above embodiments, the insulating support seat and the conductive support seat may also have matching structures of other shapes, and they are within the protection scope of the present invention as long as they can achieve the corresponding conductive support function.

[0058] In a specific embodiment, a first electrical connector 33 is provided on the first electrode plate 30, a second electrical connector 24 is provided on the second boat frame 13, and the electrode assembly includes a first electrode rod 10 and a second electrode rod 9 respectively plugged and conductive with the first electrical connector 33 and the second electrical connector. That is, the passivation boat 7 is transported into the reaction chamber, and the second boat frame 13 and the passivation film box 12 on the second boat frame 13 are energized, and the first electrode plate 30 is energized by plugging and conducting with the electrode assembly.

[0059] It should be noted that the conductive connection between the first electrode plate 30 and the second boat frame 13 and the electrode assembly is not limited to plug-in connection, and other forms of conductive structures may also be used.

[0060] Specifically, the first electrical connector 33 and the second electrical connector 24 are located at the same end of the passivation boat 7 for easy connection.

[0061] In other embodiments, the first power connector 33 and the second power connector 24 are located at opposite ends of the passivation boat 7 (not shown in the figure). By arranging the first power connector 33 and the second power connector 24 at opposite ends, the electric potential of the second boat frame 13 gradually increases from the end close to the second power connector 24 to the end away from the second power connector 24, and the electric potential of the first electrode plate 30 of the first boat frame 14 gradually increases from the end close to the first power connector 33 to the end away from the first power connector 33, so that the electric potential of the entire boat frame is more uniform, so that a more uniform plasma can be generated, and a uniform coating effect can be achieved.

[0062] In a further embodiment, the second power connector 24 and the second conductive support seat 19 are located at opposite ends of the second boat frame 13, and the electric potential of the second electrode plate 31 gradually increases from the end close to the second conductive support seat 19 to the end away from the second conductive support seat 19, so as to compensate for the defect that the electric potential of the first electrode plate 30 is weak at the end away from the first power connector 33, so that the passivation boat 7 generates a uniform strength electric field in the coating reaction chamber from the end close to the rear end flange 2 of the cavity to the end close to the front end flange 5 of the cavity, so as to achieve uniform coating on the top edge surface of the battery cell 37 group in the passivation film box 12.

[0063] In actual application, the first boat frame 4 and the second boat frame 5 are respectively connected to two electrical connectors in the coating reaction chamber. The first boat frame 4 includes a first electrode plate 30 and a second electrode plate 31. After being connected to the radio frequency power supply, a high-frequency alternating electric field is generated between the first electrode plate 30 and the second electrode plate 31, so that the process gas between the first electrode plate 30 and the second electrode plate 31 generates plasma, thereby enabling the top edge surface of the battery cell 37 group at the same electric potential as the second electrode plate 31 to achieve plasma chemical vapor deposition coating.

[0064] Working principle: The passivation film box 12 filled with battery cells 37 is loaded into the second boat frame 13 of the passivation boat 7. The second boat frame 13 can be loaded with several boxes at one time. At this time, the electrode rods of the passivation film box 12 itself are supported in the positioning grooves of the second boat frame 13, and electrical conduction is formed between the passivation film box 12 and the second boat frame 13. The passivation film box 12, the battery cells 37, the second boat frame 13, and the second electrode plate 31 of the first boat frame 14 are all at the same potential. After loading is completed, the first boat frame 14 is covered on the second boat frame 13. At this time, the first boat frame 14 is connected to the first electrode rod 10 in the reaction chamber, and the second boat frame 13 is connected to the second electrode rod 9 in the reaction chamber.

[0065] In a specific embodiment, the second boat frame 13 includes a pair of brackets disposed at intervals, and a pair of side plates connected between the pair of brackets to jointly enclose a loading space.

[0066] A pair of side panels include a symmetrically arranged front side panel 21 and a rear side panel 17, and a pair of brackets include a symmetrically arranged left bracket 22 and a right bracket 20. The left bracket 22 is connected to the left ends of the front side panel 21 and the rear side panel 17 at the same time, and the right bracket 20 is connected to the right ends of the front side panel 21 and the rear side panel 17 at the same time. The left bracket 22, the front side panel 21, the right bracket 20 and the rear side panel 17 are jointly enclosed to form a loading space that can load multiple passivation film boxes 12. At the same time, two second insulating support seats 16 are spaced apart on the left bracket 22, and the second power connector 24 is also arranged on the outer side of the left bracket 22, and two second conductive support seats 19 are spaced apart on the right bracket 20.

[0067] In a further preferred embodiment, a conductive belt 18 is disposed in the loading space of the loading frame, and the conductive belt 18 is connected to a pair of brackets.

[0068] It should be understood that the conductive tape 18 is made of a material with good electrical conductivity. By laying the conductive tape 18 on the bottom of the second boat frame 13 , the electrical conductivity of the entire second boat frame 13 can be enhanced.

[0069] More preferably, if Figure 5 As shown, a pair of side plates (i.e., the front side plate 21 and the rear side plate 17) are fixedly connected by a plurality of connecting rods. The number of connecting rods can be set to, but not limited to, 5. By adding a plurality of connecting rods, the stability and reliability of the entire second boat frame 13 can be enhanced.

[0070] More preferably, if Figure 4 As shown, a pair of side plates are provided with a plurality of positioning groove groups for clamping a plurality of passivation film boxes 12.

[0071] It should be understood that each positioning slot group is composed of 4 positioning slots, of which two positioning slots are arranged on one of the side plates (i.e., the front side plate 21), and the other two positioning slots are arranged on the other side plate (i.e., the rear side plate 17). The passivation film box 12 itself is provided with four electrode rods, and these four electrode rods are evenly installed on both sides of the box body 41. When the passivation film box 12 filled with battery cells 37 is loaded on the second boat 13, the four electrode rods in the passivation film box 12 are stuck in the four positioning slots of the second boat 13, and the four positioning slots form a positioning slot group. At the same time, the passivation film box 12 and the second boat 13 are electrically connected, so that the passivation film box 12 and the second boat 13 are at the same potential.

[0072] In a specific embodiment, a gripping and positioning assembly is disposed on the side of the first electrode plate 30 facing away from the second electrode plate 31 , and the gripping and positioning assembly includes a pair of beams 28 spaced apart on the first electrode plate 30 , and a plurality of gripping blocks respectively connected to the pair of beams 28 .

[0073] Further, the number of gripping blocks can be set to, but not limited to, two. The first gripping block 25 and the second gripping block 26 are respectively disposed on the first electrode plate 30 at positions close to both ends thereof. The first boat frame 14 is provided with a crossbeam 28 and gripping blocks, which facilitates positioning and grasping by a manipulator. When the passivation film box 12 is automatically loaded and unloaded, the first boat frame 14 can be grasped and placed on the second boat frame 13 by a manipulator.

[0074] In a specific embodiment, Figure 1 , 2As shown, the reaction furnace body includes: a furnace tube 3, a front end flange 5, a rear end flange 2, a heating device 4, and a boat support rod 8. The furnace tube 3 is arranged horizontally, that is, a horizontal furnace body, and the front end flange 5 and the rear end flange 2 are respectively fixed at both ends of the furnace tube 3, and are used to connect the reaction furnace body with an external gas supply system and an exhaust system, wherein an exhaust port 1 is arranged on the rear end flange 2, and an air inlet 6 is arranged on the front end flange 5, and the front end flange 5 and the rear end flange 2 can also be installed with an electrode assembly, for example, the electrode rod of the electrode assembly is installed on the rear end flange 2. The heating device 4 is arranged on the outer wall surface of the furnace tube 3, and is mainly used to heat the reaction chamber and provide necessary reaction conditions. The boat support rod 8 can be evenly distributed inside the furnace tube 3 through multiple supporting points to ensure that the passivation film box 12 on each loading position can be passivated and coated under stable conditions.

[0075] In a specific embodiment, Figure 7 As shown, the passivation film box 12 includes: a box body 41 made of conductive material, the top surface of the box body 41 is not closed, forming a receiving groove for placing the battery cell 37, and box body electrode rods 40 are provided on the front and rear sides of the box body 41 for being placed in the positioning groove of the second boat frame for support and conductive connection; a support plate 38 is provided on the right side of the receiving groove, and a fixing component that can approach the support plate 38 to press the battery cell 37 is provided on the right side of the box body 41 corresponding to the receiving groove; and the side of the fixing component facing the support plate 38 and the support plate 38 are both made of insulating material.

[0076] In a preferred embodiment, the fixing assembly adopts a spring structure to provide pressure, specifically including: a spring pressure plate 35, a grab plate 42, and a spring assembly 34, wherein the grab plate 42 is located outside the box body 41, the spring pressure plate 35 is located inside the box body 41, and the spring assembly 34 passes through the side of the box body 41 and is connected between the spring pressure plate 35 and the grab plate 42. When loading, the grab plate 42 can be pulled open by a manipulator to keep the spring pressure plate 35 away from the battery cell 37, so as to facilitate the removal and placement of the battery cell 37 in the box. The support plate 38 and the spring pressure plate 35 are made of insulating materials to weaken the electric field around the battery cell 37 and avoid the phenomenon of winding plating on the non-coated surface of the battery cell 37, thereby solving the problem of reduced conversion efficiency of the battery cell 37 due to winding plating on the non-coated surface of the battery cell 37.

[0077] Furthermore, the top surface of the box body 41 is provided with a front guard plate 39 and a rear guard plate 36 at the front edge and the rear edge respectively, both of which are made of insulating materials to weaken the electric field around the battery cell 37 and avoid the occurrence of wrap-around plating on the non-coated surface of the battery cell 37.

[0078] The present invention also provides a passivation device, comprising the above-mentioned edge passivation coating reaction chamber structure.

[0079] The working principle is as follows: the passivation boat 7 loaded with the battery cell 37 is sent into the coating reaction chamber by the automatic boat entry and exit mechanism. The first electrode rod 10 and the second electrode rod 9 in the reaction chamber are respectively inserted into the first power connector 33 and the second power connector 24 corresponding to the passivation boat 7, and the passivation boat 7 is placed on the boat support rod 8 in the chamber. The automatic boat entry and exit mechanism exits, the furnace door of the reaction chamber is closed (the furnace door can be specifically set on the flange), and the pre-set process formula is started to automatically run, and the edge passivation coating of the battery cell 37 is performed. After the coating is completed, the furnace door of the reaction chamber is automatically opened, and the passivation boat 7 is taken out by the automatic boat entry and exit mechanism and sent to the next work process.

[0080] The coating equipment can realize the atomic layer deposition technology coating of ALD process, such as aluminum oxide film;

[0081] And realize the coating of PECVD process, such as aluminum oxide film, silicon nitride film, aluminum nitride film, etc.;

[0082] And realize the annealing process of the battery cell to activate the passivation film layer.

[0083] This equipment, through the free combination of ALD, PECVD, annealing and other processes, realizes the process-controlled generation of a composite passivation film on the new edge of the cell after laser cracking, so as to achieve the best passivation effect and maximize the conversion efficiency of the cell.

[0084] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0085] In the description of the present invention, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", and "top, bottom", etc. are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0086] For ease of description, spatially relative terms, such as "above...", etc., may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above..." may include both "above..." and "below..." orientations. The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0087] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0088] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An edge passivation coating reaction chamber structure, characterized in that: include: A reaction furnace body, which is provided with a reaction chamber for placing the passivation boat, and is provided with an air inlet and an air exhaust port connected to the reaction chamber; A passivation boat, used for loading a passivation film box, the passivation boat comprising a first electrode plate, wherein the first electrode plate is close to and directly faces the passivation surface of the battery cell in the loaded passivation film box; The electrode assembly is mounted on the reactor body and is electrically connected to the first electrode plate of the passivation boat and the passivation film box. When powered on, the electric potentials of the first electrode plate and the passivation film box are opposite, so that an alternating electric field for generating plasma is formed between the passivation surface of the battery cell in the passivation film box and the first electrode plate.

2. The edge passivation coating reaction chamber structure as claimed in claim 1, characterized in that: The passivation boat also includes a second electrode plate. The loading space of the passivation boat has a plurality of loading positions for loading the passivation film boxes, and the passivation film boxes on the loading positions are conductively connected to the second electrode plate. The second electrode plate is provided with drainage holes corresponding to each of the loading positions.

3. The edge passivation coating reaction chamber structure as claimed in claim 2, characterized in that: The distance between the first electrode plate and the second electrode plate is set in a range of 10-50 mm.

4. The edge passivation coating reaction chamber structure according to any one of claims 1 to 3, characterized in that: The passivation boat includes: a first boat frame and a second boat frame; the first boat frame includes the first electrode plate and the second electrode plate connected by insulating fasteners, the second boat frame has a plurality of loading positions for loading the passivation film boxes, and the first boat frame is installed above the second boat frame.

5. The edge passivation coating reaction chamber structure as claimed in claim 4, characterized in that: The second boat frame is provided with a plurality of second insulating support seats and a plurality of second conductive support seats, and the second conductive support seats are electrically connected to the passivation film box loaded in each of the loading positions; the first electrode plate is provided with a first insulating support seat corresponding to the second insulating support seat, and the second electrode plate is provided with a first conductive support seat corresponding to the second conductive support seat.

6. The edge passivation coating reaction chamber structure as claimed in claim 5, characterized in that: The first boat frame is provided with a first electrical connector, the second boat frame is provided with a second electrical connector, and the electrode assembly comprises a first electrode rod electrically connected to the first electrical connector and a second electrode rod electrically connected to the second electrical connector.

7. The edge passivation coating reaction chamber structure as claimed in claim 6, characterized in that: The second power connection connector and the second conductive support seat are located at two opposite ends of the second boat frame.

8. The edge passivation coating reaction chamber structure as claimed in claim 6, characterized in that: The first electrical connector and the second electrical connector are located at the same end or two opposite ends of the passivation boat.

9. The edge passivation coating reaction chamber structure as claimed in claim 5, characterized in that: The second boat frame includes a pair of brackets arranged at intervals, and a pair of side plates connected between the pair of brackets and jointly enclosing a loading space.

10. The edge passivation coating reaction chamber structure according to claim 9, characterized in that: A conductive tape is disposed at the bottom of the second boat.

11. The edge passivation coating reaction chamber structure according to claim 9, characterized in that: The second conductive support seat and the second insulating support seat are respectively arranged on different brackets for supporting two ends of the first boat frame.

12. The edge passivation coating reaction chamber structure according to any one of claims 1 to 3, characterized in that: A gripping and positioning assembly is arranged on the side of the first electrode plate facing away from the second electrode plate. The gripping and positioning assembly comprises beams arranged at intervals on the first electrode plate and a plurality of gripping blocks respectively connected to the beams.

13. The edge passivation coating reaction chamber structure according to claim 1, characterized in that: The reaction furnace body includes: a furnace tube arranged transversely, a front flange and a rear flange respectively installed at both ends of the furnace tube, a heating device arranged on the outer wall of the furnace tube, a boat support rod arranged inside the furnace tube to support the passivation boat, and the electrode assembly is installed on the front flange or the rear flange.

14. The edge passivation coating reaction chamber structure according to claim 1, characterized in that: The passivation film box includes: a box body made of conductive material, the top surface of the box body is not closed to form a receiving groove for placing battery cells, one side of the receiving groove is provided with a support plate, and the other side of the box body corresponding to the receiving groove is provided with a fixing component that can move toward the support plate to press the battery cell; the side of the fixing component facing the support plate and the support plate are both made of insulating material.

15. A passivation device, characterized in that: The invention comprises the edge passivation coating reaction chamber structure as claimed in any one of claims 1 to 14.

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