Multifunctional multi-stage ammonia gas washing tower

Abstract

The application discloses a multifunctional multistage ammonia gas washing tower, which comprises a tower frame, a tower body, a temperature control mechanism, a nano generating mechanism, a spraying mechanism, a filter bag, a demister, a cooling mechanism and multistage filler layers; the tower body is fixedly connected with the tower frame, the filter bag, the demister, the cooling mechanism and the multistage filler layers; the tower body is provided with a first side hole, a flange hole and a bottom opening; the temperature control mechanism comprises a first pneumatic valve; the nano generating mechanism comprises a second pneumatic valve and a circulating pump; the spraying mechanism comprises a fifth pneumatic valve and a sixth pneumatic valve; the first pneumatic valve is connected with the first side hole through a pipeline; the second pneumatic valve is fixedly connected with the bottom opening; the sixth pneumatic valve is connected with the flange hole through a pipeline; and the circulating pump is connected with the fifth pneumatic valve through a pipeline; the application relates to the technical field of ammonia gas washing towers, and greatly improves the quality and product recovery rate, and meanwhile, the ultrasonic nano water bubbles are prevented from being sprayed to the inner wall of the tower body, so that the inner wall of the tower body is difficult to clean.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ammonia scrubbing tower, in particular to a multifunctional multi-stage ammonia scrubbing tower. BACKGROUND

[0002] Electronic grade ultra-pure ammonia water is mainly used for cleaning silicon wafers in the semiconductor industry, which can effectively remove impurity particles, metal ions, inorganic residues and carbon deposits on the wafers. With the development of integrated circuits to large and ultra-large scale, the update speed of integrated circuits is getting faster and faster, and the chip integration is getting higher and higher, and the photolithography lines on the wafer surface are getting finer and finer. At present, it has broken through 28 nanometers to 7 nanometers below, and the quality requirements of electronic grade ultra-pure ammonia water are also getting more and more strict.

[0003] At present, some advanced domestic enterprises have produced high-quality ultra-pure ammonia water, but the quality grade is G4 or below, which cannot reach the G5 grade of foreign and European high-end enterprises. The reason is that the equipment and materials are the key factors, especially the capillary heat exchange equipment, washing equipment and absorption equipment commonly used at present, which have high material and processing requirements, but there are many disadvantages such as easy leakage, many dead angles and difficult cleaning in domestic market, which have a great influence on product quality. In the existing ammonia gas spraying tower equipment, the downward washing liquid will be subjected to horizontal force, and when the washing liquid is thrown out, it will collide with each other to cause splashing, so that the washing liquid is sprayed to the inner wall of the tower body, causing the inner wall of the tower body to be difficult to clean. SUMMARY

[0004] The purpose of the present application is to provide a multifunctional multi-stage ammonia scrubbing tower to solve the problems in the prior art.

[0005] To achieve the above purpose, the present application provides the following technical scheme: a multifunctional multi-stage ammonia scrubbing tower comprising a tower, a tower body, a temperature control mechanism, a nano generating mechanism, a spraying mechanism, a filter bag, a demister, a cooling mechanism and a multi-stage filler layer, the tower body is fixedly connected with the tower, the filter bag, the demister, the cooling mechanism and the multi-stage filler layer, the tower body is provided with a first side hole, a flange hole and a bottom opening, the temperature control mechanism comprises a first pneumatic valve, the nano generating mechanism comprises a second pneumatic valve and a circulating pump, the spraying mechanism comprises a fifth pneumatic valve and a sixth pneumatic valve, the first pneumatic valve is connected with the first side hole through a pipeline, the second pneumatic valve is fixedly connected with the bottom opening, the sixth pneumatic valve is connected with the flange hole through a pipeline, and the circulating pump is connected with the fifth pneumatic valve through a pipeline.

[0006] The application discloses an integrated device for purifying ammonia by washing, which comprises a tower body, a first pneumatic valve, a second pneumatic valve, a third pneumatic valve, a fourth pneumatic valve, a fifth pneumatic valve, a sixth pneumatic valve, a seventh pneumatic valve, a filter bag, a defoaming device, a cooling mechanism, a circulating pump, a nanometer generating mechanism, a first three-way valve, a second three-way valve, a bottom liquid temperature controller and a liquid level gauge.

[0007] Further, the nanometer generating mechanism further comprises the first three-way valve, the second three-way valve, the bottom liquid temperature controller and the liquid level gauge, the tower body is further provided with a second side hole and a third side hole, the first three-way valve is fixedly connected with the first pneumatic valve and the second three-way valve, the bottom liquid temperature controller is connected with the first three-way valve, the second three-way valve and the second side hole through pipelines, the liquid level gauge is fixedly connected with the third side hole, the bottom liquid temperature controller is connected with the first three-way valve and the second three-way valve through electric signals, and the nanometer generating mechanism further comprises an ammonia gas distributor, and the first pneumatic valve is connected with the ammonia gas distributor through a pipeline.

[0008] The high-purity ammonia gas is introduced into the bottom of the tower body through the second three-way valve, the first three-way valve, the first pneumatic valve and the ammonia gas distributor, the temperature and the liquid level of the saturated ammonia water in the bottom of the tower body are recognized through the bottom liquid temperature controller and the liquid level gauge, electric signals are fed back to the second three-way valve and the first three-way valve, the temperature and the liquid level of the saturated ammonia water in the bottom of the tower body are feedback controlled through the pipeline connection between the bottom liquid temperature controller and the first three-way valve and the second three-way valve, and the ammonia gas distributor can make the high-purity ammonia gas uniformly diffuse into the saturated ammonia water in the bottom of the tower body, so that heat exchange is fully promoted and efficient diffusion contact is achieved.

[0009] Further, the nanometer generating mechanism further comprises the third pneumatic valve, the water bubble generator, a first side frame and a flow divider, the first side frame is fixedly connected with the circulating pump and the tower frame, the third pneumatic valve is fixedly connected with the second pneumatic valve, the water bubble generator is connected with the second pneumatic valve and the circulating pump through pipelines, and the flow divider is connected with the second pneumatic valve and the circulating pump through pipelines.

[0010] The saturated ammonia water in the bottom of the tower body flows out through the bottom opening and the second pneumatic valve, whether the flowing direction of the ammonia water passes through the water bubble generator is controlled through the opening and closing of the flow divider, the ultrasonic nanometer water bubbles are pumped to the fifth pneumatic valve through the circulating pump, and when it is needed to discharge the saturated ammonia water in the bottom of the tower body, the third pneumatic valve is opened, and the ammonia water is discharged from the bottom.

[0011] Further, the spraying mechanism further comprises a second side frame, a filter, a fourth pneumatic valve, a tee pipe, a rotary spraying mechanism and a detection mechanism, the rotary spraying mechanism comprises a right-angle pipe, and the detection mechanism comprises a spiral base, the second side frame is fixedly connected with the filter and the tower, the filter is connected with the fourth pneumatic valve through a pipeline, the tee pipe is connected with the fourth pneumatic valve, a fifth pneumatic valve and a sixth pneumatic valve through pipelines, the sixth pneumatic valve is connected with the right-angle pipe through a pipeline, and the spiral base is fixedly connected with the tower body.

[0012] The circulating pump draws the ultrasonic nanometer water bubbles to the tee pipe through the fifth pneumatic valve, the ultrapure water is introduced into the tee pipe through the filter and the fourth pneumatic valve, the ultrasonic nanometer water bubbles are mixed with the ultrapure water and introduced into the right-angle pipe through the sixth pneumatic valve, the rotary spraying mechanism uniformly sprays the ultrasonic nanometer water bubbles in the tower body, rapidly and fully mixes and contacts the ammonia gas, the detection mechanism identifies the range of downward spraying of the ultrasonic nanometer water bubbles, feeds back an electric signal to the rotary spraying mechanism, the rotary spraying mechanism adjusts the spraying rotation speed, the spraying angle and the spraying flow according to the electric signal, and the ultrasonic nanometer water bubbles are prevented from being sprayed to the inner wall of the tower body.

[0013] Further, the rotary spraying mechanism further comprises an assembly frame, a first motor, a first gear, a ring shell and a rocker mechanism, the assembly frame is fixedly connected with the right-angle pipe and the first motor, the output end of the first motor is fixedly connected with the first gear, the ring shell is provided with a ring gear pair, a hemispherical cavity and a hinged buckle, the first gear is in mesh with the ring gear pair, the ring shell is rotationally connected with the right-angle pipe, the hemispherical cavity, the hinged buckle and the rocker mechanism are provided with two groups, the two groups of hemispherical cavities, hinged buckles and rocker mechanisms are symmetrically arranged on the two sides of the right-angle pipe, the rocker mechanism comprises a servo air cylinder, a spherical shell pipe and a second motor, the spherical shell pipe is in contact with the hemispherical cavity, the servo air cylinder is hingedly connected with the hinged buckle, and the detection mechanism further comprises a humidity electrode, the humidity electrode is connected with the first motor, the servo air cylinder and the second motor through an electric signal.

[0014] The ultrasonic nanobubbles mixed with ultrapure water are introduced into the right-angle pipe through the sixth pneumatic valve, the first motor outputs the fixed shaft torque to the first gear according to the electric signal, the gear surface of the first gear and the ring gear is engaged, the first gear torque is transmitted to the ring shell, the ring shell drives the two groups of rocker mechanisms to rotate around the axis, the rocker mechanisms spray the ultrasonic nanobubbles out and uniformly sprinkle them, due to the rotation of the ring shell, the ultrasonic nanobubbles downward will be subjected to horizontal component force, at the same time, when the ultrasonic nanobubbles are thrown out, they will collide with each other and cause splashing, so that the ultrasonic nanobubbles are sprayed into the tower body inner wall, which is difficult to clean, the servo cylinder changes the extension amount according to the electric signal output end, the servo cylinder main body is hingedly connected with the hinge buckle, the servo cylinder output end is hingedly connected with the spherical shell pipe, the servo cylinder output end drives the spherical shell pipe to rotate in the hemispherical cavity, changes the inclination angle of the spherical shell pipe, the falling point of the ultrasonic nanobubbles will not change due to the change of its own weight, the two groups of symmetrically arranged spherical shell pipes rotate towards each other, so that the water outlet point of the ultrasonic nanobubbles is close to the axis of the ring shell, the initial position of the ultrasonic nanobubbles changes, the redundant range of the ultrasonic nanobubble splashing increases, when the rotation speed of the ring shell is the same, the water outlet flow can be correspondingly increased, the second motor adjusts the spraying flow according to the torque output by the electric signal, which can prevent the ultrasonic nanobubbles from being sprayed into the tower body inner wall, at the same time, more ultrasonic nanobubbles can complete the washing, and the overall spraying efficiency is improved, when the ultrasonic nanobubbles are about to be sprayed into the tower body inner wall, the spraying flow needs to be reduced to avoid the ultrasonic nanobubbles from splashing into the tower body inner wall due to collision.

[0015] Further, the rocker mechanism further comprises a hinged seat, a sliding buckle, a spray head, a gear ring, an iris ring and a rack belt, the hinged seat is fixedly connected with the spherical shell pipe and the second motor, the servo cylinder output end is hingedly connected with the hinged seat, the sliding buckle, the spray head, the gear ring and the iris ring are provided in several groups, the several groups of sliding buckles, spray heads, gear rings and iris rings are linearly and uniformly arranged along the axis of the spherical shell pipe, the rack belt is in mesh with the second motor output end and the gear ring, the sliding buckle and the spray head are fixedly connected with the spherical shell pipe, the iris ring is fixedly connected with the spray head and the gear ring, the gear ring is rotatably connected with the spray head, and the rack belt is slidably connected with the sliding buckle.

[0016] The second motor outputs the torque rack belt through the meshing of the second motor output end and the rack belt, the gear rings linearly and uniformly arranged along the axis of the spherical shell pipe are in mesh with the rack belt, and the second motor drives the rack belt to reciprocate, when it is necessary to change the flow of the spray head, the intermittent rack on the rack belt drives the gear ring to rotate, the gear ring assembled on the spray head rotates to transmit torque to the iris ring, and the iris ring changes the flow cross section through the spray head.

[0017] Further, the detection mechanism further comprises parallel resistors and an electrode seat, the parallel resistors are provided in several groups, the several groups of parallel resistors are arranged adjacent to each other along the radius of the spiral base, and the humidity electrode is fixedly connected with the spiral base, the parallel resistors and the electrode seat.

[0018] The humidity electrode is evenly distributed in the form of vortex on the cross section of the tower body, the electrode seat serves as a power supply and signal emission source, and the humidity electrode serves as a circuit. When the rocker mechanism sprays the ultrasonic nanometer water bubbles, the liquid is sprayed onto the surface of the humidity electrode, the resistance of each section of the humidity electrode connected in parallel changes due to humidity, the range of the sprayed ultrasonic nanometer water bubbles is identified through a plurality of groups of parallel resistors arranged adjacent to the radius of the spiral base, and when the ultrasonic nanometer water bubbles are about to be sprayed to the inner wall of the tower body, the electrode seat sends an electric signal to feedback the rocker mechanism to reduce the inclination angle and increase the flow.

[0019] Further, the cooling mechanism includes a third three-way valve, a seventh pneumatic valve, an eighth pneumatic valve, a heat exchange coil, an outlet temperature controller, and a ninth pneumatic valve. The tower body is further provided with a top opening, a water inlet, and a water outlet. The heat exchange coil is fixedly connected with the water inlet and the water outlet. The heat exchange coil is connected with the seventh pneumatic valve and the eighth pneumatic valve through pipelines. The third three-way valve is fixedly connected with the seventh pneumatic valve. The outlet temperature controller is connected with the third three-way valve and the ninth pneumatic valve through pipelines. The outlet temperature controller is connected with the third three-way valve through an electric signal. The ninth pneumatic valve is fixedly connected with the top opening.

[0020] After the defoaming layer further filters out impurities such as foam bubbles, the heat exchange coil cools the high-purity ammonia gas to fifty to sixty degrees Celsius and flows to the outlet temperature controller through the top opening. The outlet temperature controller detects the temperature of the high-purity ammonia gas and feeds back an electric signal when the temperature does not meet the requirements. The third three-way valve adjusts the flow of cold water into the heat exchange coil according to the electric signal, achieving the effect of controlling the heat exchange coil to cool the high-purity ammonia gas to a specified temperature. The high-purity ammonia gas that meets the cooling effect is discharged through the ninth pneumatic valve.

[0021] Compared with the prior art, the beneficial effects of the present application are that the present application designs a nano generating mechanism, high-purity ammonia gas can be uniformly diffused into saturated ammonia water at the bottom of the tower body through the ammonia gas distributor, so as to promote sufficient and efficient diffusion contact of heat exchange, the ultrasonic nano water bubble has extremely high specific surface area and surface energy, after being uniformly sprayed by the sprayer, the ultrasonic nano water bubble is fully mixed and contacted with the rising ammonia gas in the filler layer, the contact area is effectively increased, and the washing effect is more sufficient and obvious; the present application designs a spraying mechanism, two groups of rocker mechanisms are driven by the first motor to rotate around the axis, the rocker mechanisms spray the ultrasonic nano water bubble to be uniformly scattered, the servo cylinder changes the extension amount according to the electric signal output end, the inclination angle of the spherical shell pipe is changed, the falling point of the ultrasonic nano water bubble cannot be changed due to the change of the weight, the two groups of symmetrically arranged spherical shell pipes move towards each other, so that the water outlet point of the ultrasonic nano water bubble is close to the ring shell axis, the initial position of the ultrasonic nano water bubble is changed, the redundant range of the ultrasonic nano water bubble sputtering is increased, when the rotation speed of the ring shell is the same, the water outlet flow can be correspondingly increased, the second motor adjusts the spraying flow according to the electric signal output torque, while avoiding that the ultrasonic nano water bubble is sprayed to the inner wall of the tower body, more ultrasonic nano water bubbles complete washing, and the overall spraying efficiency is improved; the present application uses the ultrasonic nano foaming washing technology, integrates washing, defoaming, heat exchange and cooling, and carries out multi-layer superposition to form multi-stage washing, greatly improves the quality and product recovery rate, and avoids that the ultrasonic nano water bubble is sprayed to the inner wall of the tower body, so that the inner wall of the tower body is difficult to clean. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0023] Figure 2 It is a partial sectional view of the overall structure of the present application;

[0024] Figure 3 It is a partial sectional view of the overall structure of the present application; Figure 2

[0025] Figure 4 It is a partial sectional view of the overall structure of the present application; Figure 2

[0026] Figure 5 Figure 2

[0027] Figure 6 It is a schematic diagram of the rotary spraying mechanism structure of the present application;

[0028] Figure 7 It is a schematic diagram of the rocker mechanism structure of the present application;

[0029] Figure 8 It is a partial sectional view of the rocker mechanism of the present application;

[0030] ​​​​Figure 9 Structure diagram of detecting mechanism of the application;

[0031] Figure 10 Structure diagram of cooling mechanism of the application.

[0032] In the figure: 1, tower; 2, tower body; 21, first side hole; 22, second side hole; 23, third side hole; 24, flange hole; 25, bottom opening; 26, top opening; 27, water inlet; 28, water outlet; 3, temperature control mechanism; 31, first pneumatic valve; 32, first three-way valve; 33, second three-way valve; 34, bottom liquid temperature controller; 35, liquid level gauge; 4, nano generating mechanism; 41, ammonia gas distributor; 42, second pneumatic valve; 43, third pneumatic valve; 44, water bubble generator; 45, shunt valve; 46, first side frame; 47, circulating pump; 5, spraying mechanism; 51, second side frame; 52, filter; 53, fourth pneumatic valve; 54, three-way pipe; 55, fifth pneumatic valve; 56, sixth pneumatic valve; 57, rotary spraying mechanism; 571, right-angle pipe; 572, assembly frame; 573, first motor; 574, first gear; 575, ring shell; 5751, ring gear pair; 5752, hemispherical cavity; 5753, hinged buckle; 576, rocker mechanism; 5761, servo cylinder; 5762, spherical shell pipe; 5763, hinged seat; 5764, second motor; 5765, sliding buckle; 5766, spray head; 5767, tooth ring; 5768, iris ring; 5769, rack belt; 58, detecting mechanism; 581, spiral base; 582, humidity electrode; 583, electrode seat; 584, parallel resistance; 6, filter bag; 7, demister; 8, cooling mechanism; 81, third three-way valve; 82, seventh pneumatic valve; 83, eighth pneumatic valve; 84, heat exchange coil; 85, outlet temperature controller; 86, ninth pneumatic valve; 9, multi-stage filler layer. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0034] As Figure 1 , Figure 2 , Figure 3As shown, the present application provides a multifunctional multi-stage ammonia washing tower technical scheme, which comprises a tower 1, a tower body 2, a temperature control mechanism 3, a nano generating mechanism 4, a spraying mechanism 5, a filter bag 6, a demister 7, a cooling mechanism 8 and a multi-stage filler layer 9. The tower body 2 is fixedly connected with the tower 1, the filter bag 6, the demister 7, the cooling mechanism 8 and the multi-stage filler layer 9. The tower body 2 is provided with a first side hole 21, a flange hole 24 and a bottom opening 25. The temperature control mechanism 3 comprises a first pneumatic valve 31. The nano generating mechanism 4 comprises a second pneumatic valve 42 and a circulating pump 47. The spraying mechanism 5 comprises a fifth pneumatic valve 55 and a sixth pneumatic valve 56. The first pneumatic valve 31 is connected with the first side hole 21 through a pipeline. The second pneumatic valve 42 is fixedly connected with the bottom opening 25. The sixth pneumatic valve 56 is connected with the flange hole 24 through a pipeline. The circulating pump 47 is connected with the fifth pneumatic valve 55 through a pipeline.

[0035] The present application is an integrated device for ammonia washing purification. The ammonia gas is introduced into the tower body 2 through the first pneumatic valve 31, so that the high-purity ammonia gas uniformly diffuses into the saturated ammonia water at the bottom of the tower body 2. The saturated ammonia water at the bottom of the tower body 2 is dispersed into nano-sized water bubbles through the second pneumatic valve 42. The nano-sized water bubbles are uniformly sprayed through the fifth pneumatic valve 55 and the sixth pneumatic valve 56 by the circulating pump 47, and then fully mixed and contacted with the rising ammonia gas in the multi-stage filler layer 9, so as to release ammonia gas with higher purity. The fine water droplets in the ammonia gas are separated and filtered through the filter bag 6. After the impurities such as foam bubbles are further filtered out through the demister 7, the high-purity ammonia gas is cooled and discharged by the cooling mechanism 8.

[0036] As shown in the drawings, Figure 3 The temperature control mechanism 3 further comprises a first three-way valve 32, a second three-way valve 33, a bottom liquid temperature controller 34 and a liquid level meter 35. The tower body 2 is further provided with a second side hole 22 and a third side hole 23. The first three-way valve 32 is fixedly connected with the first pneumatic valve 31 and the second three-way valve 33. The bottom liquid temperature controller 34 is connected with the first three-way valve 32, the second three-way valve 33 and the second side hole 22 through a pipeline. The liquid level meter 35 is fixedly connected with the third side hole 23. The bottom liquid temperature controller 34 is connected with the first three-way valve 32 and the second three-way valve 33 through an electrical signal. The nano generating mechanism 4 further comprises an ammonia gas distributor 41. The first pneumatic valve 31 is connected with the ammonia gas distributor 41 through a pipeline.

[0037] The high-purity ammonia gas is introduced into the bottom of the tower body 2 through the second three-way valve 33, the first three-way valve 32, the first pneumatic valve 31 and the ammonia gas distributor 41. The temperature and liquid level of the saturated ammonia water at the bottom of the tower body 2 are identified by the bottom liquid temperature controller 34 and the liquid level meter 35, and the electrical signal is fed back to the second three-way valve 33 and the first three-way valve 32. The temperature and liquid level of the saturated ammonia water at the bottom of the tower body 2 are feedback controlled through the pipeline connection between the bottom liquid temperature controller 34 and the first three-way valve 32 and the second three-way valve 33. The ammonia gas distributor 41 can make the high-purity ammonia gas uniformly diffuse into the saturated ammonia water at the bottom of the tower body 2, so as to promote the heat exchange and efficient diffusion contact.

[0038] As Figure 3 shown, the nanometer generating mechanism 4 further comprises a third pneumatic valve 43, a water bubble generator 44, a first side frame 46 and a shunt valve 45, the first side frame 46 is fixedly connected with the circulating pump 47 and the tower 1, the third pneumatic valve 43 is fixedly connected with the second pneumatic valve 42, the water bubble generator 44 is connected with the second pneumatic valve 42 and the circulating pump 47 through pipelines, and the shunt valve 45 is connected with the second pneumatic valve 42 and the circulating pump 47 through pipelines.

[0039] The saturated ammonia water at the bottom of the tower body 2 flows out through the bottom opening 25 and the second pneumatic valve 42, and whether the flowing direction of the ammonia water passes through the water bubble generator 44 is controlled by opening and closing of the shunt valve 45, and the ultrasonic nanometer water bubble is drawn to the fifth pneumatic valve 55 by the circulating pump 47, when the saturated ammonia water at the bottom of the tower body 2 needs to be discharged, the third pneumatic valve 43 is opened, and the ammonia water is discharged from the bottom.

[0040] As Figure 4 , Figure 5 , Figure 6 shown, the spraying mechanism 5 further comprises a second side frame 51, a filter 52, a fourth pneumatic valve 53, a tee pipe 54, a rotary spraying mechanism 57 and a detection mechanism 58, the rotary spraying mechanism 57 comprises a right-angle pipe 571, and the detection mechanism 58 comprises a spiral base 581, the second side frame 51 is fixedly connected with the filter 52 and the tower 1, the filter 52 is connected with the fourth pneumatic valve 53 through a pipeline, the tee pipe 54 is connected with the fourth pneumatic valve 53, the fifth pneumatic valve 55 and the sixth pneumatic valve 56 through pipelines, the sixth pneumatic valve 56 is connected with the right-angle pipe 571 through a pipeline, and the spiral base 581 is fixedly connected with the tower body 2.

[0041] The circulating pump 47 draws the ultrasonic nanometer water bubble to the tee pipe 54 through the fifth pneumatic valve 55, the ultrapure water passes through the filter 52 and the fourth pneumatic valve 53 and enters the tee pipe 54, the ultrasonic nanometer water bubble and the ultrapure water are mixed and enter the right-angle pipe 571 through the sixth pneumatic valve 56, the rotary spraying mechanism 57 uniformly sprays the ultrasonic nanometer water bubble in the tower body 2, rapidly and fully mixes and contacts with the ammonia gas, the detection mechanism 58 identifies the downward spraying range of the ultrasonic nanometer water bubble, feeds back an electric signal to the rotary spraying mechanism 57, the rotary spraying mechanism 57 adjusts the spraying rotation speed, the spraying angle and the spraying flow according to the electric signal, and avoids that the ultrasonic nanometer water bubble is sprayed to the inner wall of the tower body 2.

[0042] As Figure 6 , Figure 7 , Figure 8As shown, the rotary spraying mechanism 57 further comprises a mounting frame 572, a first motor 573, a first gear 574, a ring shell 575, and a rocker mechanism 576. The mounting frame 572 is fixedly connected with the right-angle pipe 571 and the first motor 573. The output end of the first motor 573 is fixedly connected with the first gear 574. The ring shell 575 is provided with a ring gear pair 5751, a hemispherical cavity 5752, and a hinged buckle 5753. The first gear 574 is in mesh with the ring gear pair 5751. The ring shell 575 is rotationally connected with the right-angle pipe 571. The hemispherical cavity 5752, the hinged buckle 5753, and the rocker mechanism 576 are each provided with two groups. The two groups of hemispherical cavities 5752, hinged buckles 5753, and rocker mechanisms 576 are symmetrically arranged on both sides of the right-angle pipe 571. The rocker mechanism 576 comprises a servo air cylinder 5761, a spherical shell pipe 5762, and a second motor 5764. The spherical shell pipe 5762 is in contact with the hemispherical cavity 5752. The servo air cylinder 5761 is hingedly connected with the hinged buckle 5753. The detection mechanism 58 further comprises a humidity electrode 582. The humidity electrode 582 is connected with the first motor 573, the servo air cylinder 5761, and the second motor 5764 through electrical signals.

[0043] The ultrasonic nanobubbles mixed with ultrapure water pass through the sixth pneumatic valve 56 into the right-angle pipe 571. The first motor 573 outputs a fixed shaft torque to the first gear 574 according to an electrical signal. The torque of the first gear 574 is transmitted to the ring shell 575 through the meshing of the first gear 574 and the ring gear pair 5751. The ring shell 575 drives the two groups of rocker mechanisms 576 to rotate around their axes. The rocker mechanisms 576 spray the ultrasonic nanobubbles out and uniformly sprinkle them. Due to the rotation of the ring shell 575, the ultrasonic nanobubbles falling downward will be subjected to a horizontal component force. At the same time, when the ultrasonic nanobubbles are thrown out, they will collide with each other, causing splashing. As a result, the ultrasonic nanobubbles are sprayed into the inner wall of the tower body 2, making it difficult to clean the inner wall of the tower body 2. The servo air cylinder 5761 changes the extension amount according to the output end of the electrical signal. The main body of the servo air cylinder 5761 is hingedly connected with the hinged buckle 5753. The output end of the servo air cylinder 5761 is hingedly connected with the spherical shell pipe 5762. The output end of the servo air cylinder 5761 pulls the spherical shell pipe 5762 to rotate in the hemispherical cavity 5752, changing the inclination angle of the spherical shell pipe 5762. The falling point of the ultrasonic nanobubbles will not change due to the change of their own weight. The two groups of symmetrically arranged spherical shell pipes 5762 rotate towards each other, making the water outlet point of the ultrasonic nanobubbles close to the axis of the ring shell 575. The initial position of the ultrasonic nanobubbles changes, and the redundant range of the splashing of the ultrasonic nanobubbles increases. When the rotation speed of the ring shell 575 is the same, the water outlet flow can be correspondingly increased. The second motor 5764 adjusts the spraying flow according to the output torque of the electrical signal. At the same time of avoiding the ultrasonic nanobubbles from being sprayed into the inner wall of the tower body 2, more ultrasonic nanobubbles complete the washing, improving the overall spraying efficiency. When the ultrasonic nanobubbles are about to be sprayed into the inner wall of the tower body 2, the spraying flow needs to be reduced to avoid the ultrasonic nanobubbles from splashing into the inner wall of the tower body 2 due to collision.

[0044] As Figure 6 , Figure 7 , Figure 8 shown, rocker mechanism 576 also includes a hinged seat 5763, a sliding buckle 5765, a spray head 5766, a gear ring 5767, an iris ring 5768 and a rack belt 5769, the hinged seat 5763 is fixedly connected with the spherical shell tube 5762 and the second motor 5764, the output end of the servo cylinder 5761 is hinged with the hinged seat 5763, the sliding buckle 5765, the spray head 5766, the gear ring 5767 and the iris ring 5768 are provided with several groups, the several groups of sliding buckle 5765, spray head 5766, gear ring 5767 and iris ring 5768 are linearly and uniformly arranged along the axis of the spherical shell tube 5762, the rack belt 5769 is in meshing engagement with the output end of the second motor 5764 and the gear ring 5767, the sliding buckle 5765 and the spray head 5766 are fixedly connected with the spherical shell tube 5762, the iris ring 5768 is fixedly connected with the spray head 5766 and the gear ring 5767, the gear ring 5767 is rotatably connected with the spray head 5766, and the rack belt 5769 is slidably connected with the sliding buckle 5765.

[0045] The second motor 5764 outputs torque to the rack belt 5769 according to the electrical signal, the output end of the second motor 5764 is in meshing engagement with the rack belt 5769, the several gear rings 5767 linearly and uniformly arranged along the axis of the spherical shell tube 5762 are in meshing engagement with the rack belt 5769, the second motor 5764 drives the rack belt 5769 to reciprocate, when it is needed to change the flow of the spray head 5766, the gear rings 5767 are driven to rotate by the intermittent rack belt 5769, the gear rings 5767 assembled on the spray head 5766 transmit torque to the iris ring 5768 by rotating, and the iris ring 5768 changes the flow cross section through the spray head 5766.

[0046] As Figure 9 shown, the detection mechanism 58 also includes a parallel resistance 584 and an electrode seat 583, the parallel resistance 584 is provided with several groups, the several groups of parallel resistance 584 are arranged adjacent along the radius of the spiral base 581, and the humidity electrode 582 is fixedly connected with the spiral base 581, the parallel resistance 584 and the electrode seat 583.

[0047] The humidity electrode 582 is uniformly arranged in a vortex shape on the cross section of the tower body 2, the electrode seat 583 serves as a power source and a signal emission source, and the humidity electrode 582 serves as a circuit, when the rocker mechanism 576 sprays the ultrasonic nanometer water bubbles to be evenly scattered, the liquid is scattered to the surface of the humidity electrode 582, the resistance of each section of the humidity electrode 582 connected in parallel by the parallel resistance 584 is changed due to humidity, the range of the scattered ultrasonic nanometer water bubbles is identified by the several groups of parallel resistance 584 arranged adjacent along the radius of the spiral base 581, and the electrode seat 583 sends an electrical signal to feedback the rocker mechanism 576 to reduce the inclination angle and increase the flow when the ultrasonic nanometer water bubbles are about to be sprayed to the inner wall of the tower body 2.

[0048] As shown in Figure 10 cooling mechanism 8 includes a third three-way valve 81, a seventh pneumatic valve 82, an eighth pneumatic valve 83, a heat exchange coil 84, an outlet temperature controller 85 and a ninth pneumatic valve 86, the tower body 2 is also provided with a top opening 26, a water inlet 27 and a water outlet 28, the heat exchange coil 84 is fixedly connected with the water inlet 27 and the water outlet 28, the heat exchange coil 84 is connected with the seventh pneumatic valve 82 and the eighth pneumatic valve 83 through pipelines, the third three-way valve 81 is fixedly connected with the seventh pneumatic valve 82, the outlet temperature controller 85 is connected with the third three-way valve 81 and the ninth pneumatic valve 86 through pipelines, the outlet temperature controller 85 is connected with the third three-way valve 81 through electrical signals, and the ninth pneumatic valve 86 is fixedly connected with the top opening 26.

[0049] After the defoaming layer further filters out impurities such as foam bubbles, the heat exchange coil 84 cools the high-purity ammonia gas to fifty to sixty degrees Celsius and flows to the outlet temperature controller 85 through the top opening 26, the outlet temperature controller 85 detects the temperature of the high-purity ammonia gas, and feeds back an electrical signal when the temperature does not meet the requirements, the third three-way valve 81 adjusts the flow of cold water into the heat exchange coil 84 according to the electrical signal, achieves the effect of controlling the heat exchange coil 84 to cool the high-purity ammonia gas to a specified temperature, and the high-purity ammonia gas meeting the cooling effect is discharged through the ninth pneumatic valve 86.

[0050] The working principle of the present application: the present application passes ammonia into the tower body 2 through the first pneumatic valve 31, feedbacks and controls the temperature and liquid level of saturated ammonia water at the bottom of the tower body 2, the ammonia distributor 41 can make high-purity ammonia uniformly diffuse into the saturated ammonia water at the bottom of the tower body 2, promote sufficient heat exchange and efficient diffusion contact, the saturated ammonia water at the bottom of the tower body 2 is dispersed into nanoscale water bubbles through the second pneumatic valve 42, the opening and closing of the shunt valve 45 controls whether the flowing ammonia water passes through the water bubble generator 44, the ultrasonic nanoscale water bubbles are passed into the right-angle pipe 571 through the circulating pump 47, the first motor 573 outputs a fixed shaft torque to drive two groups of rocker mechanisms 576 to rotate around their axes, the ultrasonic nanoscale water bubbles are sprayed out and uniformly sprinkled, the downward ultrasonic nanoscale water bubbles will be subjected to horizontal component force, the ultrasonic nanoscale water bubbles will collide with each other when being thrown out, resulting in sputtering, so that the ultrasonic nanoscale water bubbles are sprayed to the inner wall of the tower body 2, causing the inner wall of the tower body 2 to be difficult to clean, the output end of the servo cylinder 5761 changes the extension amount, the inclination angle of the spherical shell pipe 5762 is changed, the falling point of the ultrasonic nanoscale water bubbles will not change due to the change of its own weight, the two groups of symmetrically arranged spherical shell pipes 5762 approach each other, so that the water outlet point of the ultrasonic nanoscale water bubbles is close to the axis of the ring shell 575, the initial position of the ultrasonic nanoscale water bubbles is changed, the redundant range of sputtering of the ultrasonic nanoscale water bubbles is increased, when the self-rotation speed of the ring shell 575 is the same, the water outlet flow can be correspondingly increased, while avoiding the ultrasonic nanoscale water bubbles being sprayed to the inner wall of the tower body 2, more ultrasonic nanoscale water bubbles complete washing, the overall spraying efficiency is improved, the intermittent rack on the rack belt 5769 drives the gear ring 5767 to rotate, the torque is transmitted to the iris ring 5768 to change the flow cross section passing through the nozzle 5766, after the ultrasonic nanoscale water bubbles are uniformly sprayed, they are fully mixed and contacted with the rising ammonia in the multi-stage filler layer 9, higher-purity ammonia is released, the fine water droplets in the ammonia are separated and filtered through the filter bag 6, after the impurities such as foam bubbles are further filtered out through the defoaming device 7, the high-purity ammonia is cooled by the cooling mechanism 8 and then discharged.

[0051] It will be obvious to a person skilled in the art that, without departing from the spirit or essential characteristics of the application, the present application can be implemented in other specific forms. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the description given above, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A multifunctional multi-stage ammonia scrubber, characterized by: The washing tower comprises a tower frame (1), a tower body (2), a temperature control mechanism (3), a nanometer generating mechanism (4), a spraying mechanism (5), a filter bag (6), a demister (7), a cooling mechanism (8) and a multi-stage packing layer (9); the tower body (2) is fixedly connected to the tower frame (1), the filter bag (6), the demister (7), the cooling mechanism (8) and the multi-stage packing layer (9); the tower body (2) is provided with a first side hole (21), a flange hole (24) and a bottom opening (25); the temperature control mechanism (3) comprises a first side hole (21), a flange hole (24) and a bottom opening (25); a pneumatic valve (31), the nanometer generating mechanism (4) includes a second pneumatic valve (42) and a circulation pump (47), the spraying mechanism (5) includes a fifth pneumatic valve (55) and a sixth pneumatic valve (56), the first pneumatic valve (31) is connected to the first side hole (21) via a pipeline, the second pneumatic valve (42) is fixedly connected to the bottom port (25), the sixth pneumatic valve (56) is connected to the flange hole (24) via a pipeline, and the circulation pump (47) is connected to the fifth pneumatic valve (55) via a pipeline; The nanometer generating mechanism (4) further comprises a third pneumatic valve (43), a water bubble generator (44), a first side frame (46) and a diverter valve (45); the first side frame (46) is fixedly connected to the circulation pump (47) and the tower (1); the third pneumatic valve (43) is fixedly connected to the second pneumatic valve (42); the water bubble generator (44) is connected to the second pneumatic valve (42) and the circulation pump (47) via a pipeline; and the diverter valve (45) is connected to the second pneumatic valve (42) and the circulation pump (47) via a pipeline. The spray mechanism (5) further comprises a second side frame (51), a filter (52), a fourth pneumatic valve (53), a three-way pipe (54), a rotary spray mechanism (57) and a detection mechanism (58), wherein the rotary spray mechanism (57) comprises a right-angle pipe (571), and the detection mechanism (58) comprises a spiral base (581). The second side frame (51) is fixedly connected to the filter (52) and the tower frame (1), the filter (52) is connected to the fourth pneumatic valve (53) via a pipeline, the three-way pipe (54) is connected to the fourth pneumatic valve (53), the fifth pneumatic valve (55) and the sixth pneumatic valve (56) via a pipeline, the sixth pneumatic valve (56) is connected to the right-angle pipe (571) via a pipeline, and the spiral base (581) is fixedly connected to the tower body (2).

2. A multifunctional multi-stage ammonia scrubber according to claim 1, characterized in that: The temperature control mechanism (3) further comprises a first three-way valve (32), a second three-way valve (33), a bottom liquid temperature controller (34) and a liquid level gauge (35); a second side hole (22) and a third side hole (23) are further provided on the tower body (2); the first three-way valve (32) is fixedly connected to the first pneumatic valve (31) and the second three-way valve (33); the bottom liquid temperature controller (34) is connected to the first three-way valve (32), the second three-way valve (33) and the second side hole (22) via a pipeline; the liquid level gauge (35) is fixedly connected to the third side hole (23); the bottom liquid temperature controller (34) is connected to the first three-way valve (32) and the second three-way valve (33) via an electrical signal; the nanometer generating mechanism (4) further comprises an ammonia distributor (41); the first pneumatic valve (31) is connected to the ammonia distributor (41) via a pipeline.

3. A multifunctional multi-stage ammonia scrubber according to claim 2, characterized in that: The rotary spray mechanism (57) further comprises an assembly frame (572), a first motor (573), a first gear (574), an annular shell (575) and a rocker mechanism (576). The assembly frame (572) is fixedly connected to the right-angle tube (571) and the first motor (573). The output end of the first motor (573) is fixedly connected to the first gear (574). The annular shell (575) is provided with an annular gear pair (5751), a hemispherical cavity (5752) and a hinge buckle (5753). The first gear (574) meshes with the tooth surface of the annular gear pair (5751). The annular shell (575) is rotatably connected to the right-angle tube (571). The hemispherical cavity (5752), the hinge buckle (5753) and the hinge buckle (5753) are fixedly connected to the right-angle tube (571). 3) There are two groups of rocker mechanisms (576). The two groups of hemispherical cavities (5752), hinge buckles (5753), and rocker mechanisms (576) are symmetrically arranged on both sides of the right-angle tube (571). The rocker mechanism (576) includes a servo cylinder (5761), a spherical shell tube (5762), and a second motor (5764). The spherical shell tube (5762) is in contact with the hemispherical cavity (5752). The servo cylinder (5761) is hinged to the hinge buckle (5753). The detection mechanism (58) also includes a humidity electrode (582). The humidity electrode (582) is connected to the first motor (573), the servo cylinder (5761), and the second motor (5764) through electrical signals.

4. A multifunctional multi-stage ammonia scrubber according to claim 3, characterized in that: The rocker mechanism (576) further comprises an articulated seat (5763), a slide buckle (5765), a nozzle (5766), a gear ring (5767), an iris ring (5768) and a rack belt (5769), wherein the articulated seat (5763) is fixedly connected to the ball shell tube (5762) and the second motor (5764), and the output end of the servo cylinder (5761) is articulated to the articulated seat (5763), the slide buckle (5765), the nozzle (5766), the gear ring (5767) and the iris ring (5768) are provided in a plurality of groups, wherein the plurality of groups of the slide buckle (5765), the nozzle (5766) and the second motor (5764) are fixedly connected to the ball shell tube (5762) and the second motor (5764), and the output end of the servo cylinder (5761) is articulated to the articulated seat (5763). 766), the gear ring (5767), and the iris ring (5768) are linearly and evenly distributed along the axis of the spherical shell tube (5762); the rack belt (5769) is meshed with the tooth surfaces of the output end of the second motor (5764) and the gear ring (5767); the slide buckle (5765) and the nozzle (5766) are fixedly connected to the spherical shell tube (5762); the iris ring (5768) is fixedly connected to the nozzle (5766) and the gear ring (5767); the gear ring (5767) is rotatably connected to the nozzle (5766); and the rack belt (5769) is slidably connected to the slide buckle (5765).

5. The multifunctional multi-stage ammonia scrubbing tower according to claim 4, characterized in that: The detection mechanism (58) further includes an electrode base (583) and a parallel resistor (584). The parallel resistors (584) are provided in a plurality of groups. The plurality of groups of parallel resistors (584) are arranged adjacent to each other along the radius of the spiral base (581). The humidity electrode (582) is fixedly connected to the spiral base (581), the parallel resistors (584), and the electrode base (583).

6. The multifunctional multi-stage ammonia scrubber according to claim 1, characterized in that: The cooling mechanism (8) includes a third three-way valve (81), a seventh pneumatic valve (82), an eighth pneumatic valve (83), a heat exchange coil (84), an outlet temperature controller (85) and a ninth pneumatic valve (86). The tower body (2) is further provided with a top port (26), a water inlet (27) and a water outlet (28). The heat exchange coil (84) is fixedly connected to the water inlet (27) and the water outlet (28). The heat exchange coil (84) is connected to the seventh pneumatic valve (82) and the eighth pneumatic valve (83) via a pipeline. The third three-way valve (81) is fixedly connected to the seventh pneumatic valve (82). The outlet temperature controller (85) is connected to the third three-way valve (81) and the ninth pneumatic valve (86) via a pipeline. The outlet temperature controller (85) is connected to the third three-way valve (81) via an electrical signal. The ninth pneumatic valve (86) is fixedly connected to the top port (26).

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