Quartz tube shaping processing device

Abstract

A quartz tube shaping processing device relates to the related technical field of quartz tube processing and comprises a quartz tube, a quartz sealing head, a quartz tube clamping hand, a flame heating ring, a heating cylinder and a shaping mold. The quartz sealing heads and the quartz tube are adhered together after being heated, so that a sealed space is formed on the inner side of the quartz tube, each quartz sealing head is provided with a quartz short tube, one quartz short tube is communicated with the quartz sealing head, inert gas can be introduced into the quartz tube through the quartz short tubes, so that the air pressure in the quartz tube is increased, and the quartz tube is forced to expand outwards; the purpose of shaping is achieved; the shaping mold comprises a cylindrical shell, a plug is arranged on the inner side of the shell in a sliding mode, the end face of the plug is matched with the outer contour of the quartz end socket, a flange is arranged at the end, away from the plug, of the shell, and the end face of the flange is matched with the outer contour of the quartz end socket. The whole shaping process does not need to manually use a supporting plate for shaping, so that the surface uniformity is good, the roundness is good, and the shaping power is very high.

Description

Technical Field

[0001] The invention belongs to the technical field related to quartz tube processing, and in particular relates to a quartz tube shaping processing device. Background Art

[0002] After the quartz tubes are processed into fixed shapes, they are sold to some users. Many users need to perform secondary processing on the quartz tubes when using them. Secondary shaping of quartz tubes is widely used in various fields that require high precision and high temperature resistance, such as semiconductor manufacturing, single crystal furnaces, gas refining tubes, etc. At present, when the quartz tubes are processed twice, the tubes to be processed are softened by hydrogen and oxygen flames, and then plastic processing is performed manually using graphite pallets. The consistency of the finished products processed each time is not good, and there will always be uneven surfaces and insufficient roundness, which will lead to various problems when the quartz tubes are used in the next process. At this time, the quartz tubes have to be reshaped, resulting in a waste of cost and time. Summary of the invention

[0003] In order to improve the success rate of secondary shaping of quartz tubes, the present invention provides a quartz tube shaping device. The finished product obtained by the shaping process of the present invention has good consistency, uniform surface and good roundness.

[0004] The technical solution provided by the present invention is: a quartz tube shaping processing device, a quartz tube, a quartz end cap, a quartz tube clamping hand, a flame heating ring, a heating cylinder and a shaping mold; the quartz end caps are provided with two, which are respectively arranged at the two ends of the quartz tube, the quartz tube clamping hand is clamped in the middle of the quartz tube, the flame heating rings are provided with two, which are respectively arranged at the two ends of the quartz tube, the flame heating ring is used to heat the end of the quartz tube and the ends of the two quartz end caps at the same time, the quartz end cap and the quartz tube are bonded together after being heated, so that a sealed space is formed inside the quartz tube, and each quartz end cap is provided with a A quartz short tube coaxial with a quartz tube, wherein only one quartz short tube is connected to a quartz head, and an inert gas can be introduced into the quartz tube through the quartz short tube to increase the air pressure in the quartz tube, forcing the quartz tube to expand outward, thereby achieving the purpose of shaping; the shaping mold comprises a cylindrical shell, a plug is slidably provided on the inner side of the shell, the end face of the plug is matched with the outer contour of the quartz head, a flange is provided at the end of the shell away from the plug, the end face of the flange is matched with the outer contour of the quartz head, the quartz tube with the quartz head is loaded into the shaping mold, and the quartz tube connected to the quartz flange extends out of the flange.

[0005] A further technical solution is: a limiting ring is arranged at the end of the shell body close to the plug, and an adjusting bolt is screwed on the central thread of the limiting ring, and the adjusting bolt is pressed against the plug to limit the plug.

[0006] A further technical solution is: the quartz tube shaping processing device also includes a mounting frame, on which a mounting shaft is fixedly arranged, and the quartz tube clamping hand, the heating cylinder and the shaping mold are all arranged on the mounting shaft, wherein the quartz tube clamping hand and the shaping mold are respectively fixedly mounted on the mounting shaft, and the heating cylinder is rotatably mounted on the mounting shaft, and the heating cylinder can also slide relative to the mounting shaft. The axes of the quartz tube clamping hand, the heating cylinder and the shaping mold are located on the same virtual cylinder.

[0007] A further technical solution is: the material of the shell is graphite.

[0008] A further technical solution is: two annular brackets are arranged in the heating tube, and the annular hole in the center of the annular bracket is adapted to the outer diameter of the quartz short tube.

[0009] Compared with the prior art, the beneficial effects of the present invention are: 1. This application first connects quartz heads at both ends of the quartz tube to form a sealed space inside the quartz tube, then heats the quartz tube to a soft plastic state and puts it into a mold, and finally introduces air pressure into the sealed space through a quartz short tube. Under the action of the air pressure, the quartz tube expands outward and fits on the mold wall to achieve the purpose of shaping. The entire shaping process no longer requires manpower to use a pallet to shape, so not only is the surface uniformity good, but the roundness is also good, and the shaping success rate is very high.

[0010] 2. The plug of the present application can slide in the shell, so the equipment can shape quartz tubes of different lengths under the same diameter specification, and has a wide range of applications.

[0011] 3. In the present application, the quartz tube clamping hand, the heating cylinder and the shaping mold are all arranged on the mounting shaft, and the axes of the three are located on the same virtual cylinder. Therefore, the transfer of the quartz tube among the three can be achieved by only rotating the heating cylinder circumferentially and moving the heating cylinder axially, which greatly facilitates the transfer of the quartz tube, and alignment is very easy during the transfer process, which is conducive to improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0013] Figure 2 It is a structural schematic diagram of the heating cylinder in the present invention.

[0014] In the figure: 1. mounting shaft; 2. mounting frame; 3. heating tube; 4. flame heating ring; 5. quartz tube clamping hand; 6. quartz tube; 7. quartz head; 8. quartz short tube; 9. limit ring; 10. adjusting bolt; 11. plug; 12. shell; 13. flange; 14. ring bracket. DETAILED DESCRIPTION

[0015] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0016] like Figure 1 As shown, the present invention includes a quartz tube 6, a quartz seal 7, a quartz tube clamping hand 5, a flame heating ring 4, a heating cylinder 3 and a shaping mold. There are two quartz seals 7, which are respectively arranged at the two ends of the quartz tube 6. The shape of the quartz seal 7 can be flat, circular or elliptical, preferably elliptical. The quartz tube clamping hand 5 is clamped in the middle of the quartz tube 6. There are two flame heating rings 4, which are respectively arranged at the two ends of the quartz tube 6. The flame heating ring 4 is used to heat the ends of the quartz tube 6 and the ends of the two quartz seals 7 at the same time, so that the quartz seals 7 and the quartz tube 6 are bonded together after being heated, so that a sealed space is formed inside the quartz tube 6.

[0017] A quartz short tube 8 coaxial with the quartz tube 6 is arranged on each quartz head 7, wherein only one quartz short tube 8 is connected to the quartz head 7, and an inert gas can be introduced into the quartz tube 6 through the quartz short tube 8 to increase the air pressure in the quartz tube 6, forcing the quartz tube 6 to expand outward and fit with the inner wall of the mold to achieve the purpose of shaping.

[0018] From the above, it can be seen that in the shaping process of the present application, manpower is no longer required to use a pallet to shape the surface, so not only is the surface uniformity good, but the roundness is also good, and the shaping success rate is very high.

[0019] The shaping mold comprises a cylindrical shell 12, a plug 11 is slidably provided inside the shell 12, the end face of the plug 11 is adapted to the outer contour of the quartz head 7, a flange 13 is provided at the end of the shell 12 away from the plug 11, the end face of the flange 13 is adapted to the outer contour of the quartz head 7, the quartz tube 6 with the quartz head 7 is loaded into the shaping mold, and the quartz tube 6 connected to the quartz flange 13 extends out of the flange 13. A limiting ring 9 is provided at the end of the shell 12 close to the plug 11, and an adjusting bolt 10 is screwed on the central thread of the limiting ring 9, and the adjusting bolt 10 abuts against the plug 11 to limit the plug 11.

[0020] As can be seen from the above paragraph, the equipment can shape quartz tubes 6 of different lengths under the same diameter specification, and has a wide range of applications.

[0021] The quartz tube 6 shaping processing device also includes a mounting frame 2, on which a mounting shaft 1 is fixedly arranged, and the quartz tube clamping hand 5, the heating cylinder 3 and the shaping mold are all arranged on the mounting shaft 1, wherein the quartz tube clamping hand 5 and the shaping mold are respectively fixedly mounted on the mounting shaft 1 and will not rotate relative to the mounting shaft 1, and the heating cylinder 3 is rotatably mounted on the mounting shaft 1, and the heating cylinder 3 can also slide relative to the mounting shaft 1. The axes of the quartz tube clamping hand 5, the heating cylinder 3 and the shaping mold are located on the same virtual cylinder.

[0022] As can be seen from the above paragraph, the transfer of the quartz tube 6 among the three can be achieved by only rotating the heating tube 3 circumferentially and moving the heating tube 3 axially, which greatly facilitates the transfer of the quartz tube 6, and alignment is very easy during the transfer process, which is conducive to improving work efficiency.

[0023] The shell 12 is made of graphite because graphite has strong high temperature resistance and pressure bearing capacity.

[0024] Two annular brackets 14 are arranged in the heating tube 3 , and the annular hole in the center of the annular bracket 14 is adapted to the outer diameter of the quartz short tube 8 . Therefore, in the present application, the two quartz short tubes 8 play a supporting role to ensure that the quartz tube is in a centered state in the heating tube 3 .

[0025] The shaping process of this application is: The first step is to clamp the middle of the quartz tube 6 with the quartz tube clamping hand 5, place two quartz heads 7 at both ends of the quartz tube 6, use the flame heating ring 4 to heat the quartz heads 7 and the ends of the quartz tube 6 to a soft and sticky state, and bond the quartz heads 7 to the ends of the quartz tube 6 to form a sealed space inside the quartz tube 6. The quartz tube 6 connected with the quartz heads 7 is naturally cooled.

[0026] The second step is to rotate the heating tube 3 on the installation shaft 1 to align it with the quartz tube clamping hand 5, move the heating tube 3 axially, and send the quartz tube 6 with the quartz head 7 into the heating tube 3. Before sending it in, first take out the two annular brackets 14 in the heating tube 3, and set the two annular brackets 14 on the two quartz short tubes 8, and then push the quartz tube 6 with the annular brackets 14 into the heating tube 3 together, so that the heating tube 3 generates heat corresponding to the quartz tube 6 section, and the quartz head 7 and the quartz short tube 8 section do not need to be heated, and the quartz tube 6 is heated to a soft and sticky state.

[0027] The third step is to rotate the heating cylinder 3 on the mounting shaft 1 so that it is aligned with the molding die, and axially move the heating cylinder 3 so that it is sent into the molding die. Figure 1 As shown, high-temperature inert gas is introduced into the quartz tube 6 through the quartz short tube 8. Under the action of the inert gas pressure, the soft quartz tube 6 is expanded outward and fits against the inner wall of the shell 12 to achieve the purpose of shaping.

[0028] The fourth step is to remove the naturally cooled quartz tube 6 and cut off the quartz heads 7 at both ends using a cutting device to obtain an ideal quartz tube 6.

Claims

1. A quartz tube shaping processing device, a quartz tube (6), characterized in that: It also includes a quartz sealing head (7), a quartz tube clamping hand (5), a flame heating ring (4), a heating cylinder (3) and a shaping mold. The quartz sealing head (7) is provided with two pieces, which are respectively arranged at the two ends of the quartz tube (6). The quartz tube clamping hand (5) is clamped in the middle of the quartz tube (6). The flame heating ring (4) is provided with two pieces, which are respectively arranged at the two ends of the quartz tube (6). The quartz sealing head (7) is heated by the flame heating ring (4) and then bonded to the two ends of the quartz tube (6). A quartz short tube (8) coaxial with the quartz tube (6) is provided on each quartz sealing head (7). Only one quartz short tube (8) is connected to the quartz head (7), and the molding mold comprises a cylindrical shell (12), a plug (11) is slidably arranged on the inner side of the shell (12), the end face of the plug (11) is adapted to the outer contour of the quartz head (7), and a flange (13) is arranged at the end of the shell (12) away from the plug (11), and the end face of the flange (13) is adapted to the outer contour of the quartz head (7). The quartz tube (6) with the quartz head (7) is installed in the molding mold, and the quartz tube (6) connected to the quartz flange (13) extends out of the flange (13).

2. A quartz tube shaping processing device according to claim 1, characterized in that: A limiting ring (9) is provided at the end of the housing (12) close to the plug (11); an adjusting bolt (10) is screwed onto the central thread of the limiting ring (9); the adjusting bolt (10) abuts against the plug (11) to limit the position of the plug (11).

3. A quartz tube shaping processing device according to claim 1, characterized in that: The quartz tube shaping processing device further comprises a mounting frame (2), on which a mounting shaft (1) is fixedly arranged, and the quartz tube clamping hand (5), the heating cylinder (3) and the shaping mold are all arranged on the mounting shaft (1), wherein the quartz tube clamping hand (5) and the shaping mold are respectively fixedly mounted on the mounting shaft (1), and the heating cylinder (3) is rotatably mounted on the mounting shaft (1), and the heating cylinder (3) can also slide relative to the mounting shaft (1). The axes of the quartz tube clamping hand (5), the heating cylinder (3) and the shaping mold are located on the same virtual cylinder.

4. A quartz tube shaping processing device according to claim 1, characterized in that: The shell (12) is made of graphite.

5. The quartz tube shaping processing device according to claim 1, characterized in that: Two annular supports (14) are arranged inside the heating tube (3), and the annular hole in the center of the annular support (14) is adapted to the outer diameter of the quartz short tube (8).

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