MHz frame frequency high-speed spectral measurement system and method

Abstract

The invention discloses a MHz frame frequency high-speed spectral measurement system and method, and mainly solves the technical problems that a traditional spectrometer is low in frame frequency, cannot capture spectral change in a high-speed dynamic process in real time, is limited in application scene and the like. The spectral measurement system comprises a slit, a first collimating mirror, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module and a data processing module, the slit is used for limiting an incident space of a light beam and changing a divergence angle of the light beam; the first collimating mirror is located on the side, away from the to-be-measured object, of the slit. The spectral dispersion element is located on a reflection light path of the first collimating mirror; the spectral signal amplification module is located on a diffraction light path of the spectral dispersion element; the spectrum coupling module, the spectrum acquisition module and the data processing module are sequentially arranged, the spectrum coupling module is used for focusing the spectrum band captured by the spectrum signal amplification module to form a spectrum image, and the spectrum image is acquired by the spectrum acquisition module and then transmitted to the data processing module.

Description

Technical Field

[0001] The invention belongs to the field of spectrum measurement, and in particular relates to a MHz frame rate high-speed spectrum measurement system and method. Background Art

[0002] As the core equipment in the field of spectral measurement, the performance of the spectrometer is directly related to the accuracy and timeliness of spectral analysis. Spectral analysis technology reveals the composition, structure and interaction mechanism of substances by measuring the spectral characteristics of substances at different wavelengths. This technology is currently widely used in many fields such as materials science, chemistry, biology, environmental monitoring, aerospace, etc.

[0003] Traditional spectrometers have made significant progress in spectral resolution, among which some spectrometers can even achieve spectral resolution of picometers, which is crucial for the advancement of scientific research tasks such as composition analysis and structural identification of fine substances. However, the frame rate of such spectrometers is generally low, usually only reaching tens of hertz (Hz) or even lower, which limits the real-time acquisition of spectra of high-speed dynamic processes. Based on this, researchers have improved the frame rate of spectral measurement by optimizing optical structures, using faster detectors, and post-processing sampled data, but this method often sacrifices spectral resolution or reduces the spectral window, and the effect is not ideal. In addition, even the existing high-speed spectrometers have a maximum frame rate limited to tens of kilohertz (kHz), far from the MHz level, so it is impossible to capture the spectral changes of materials in high-speed dynamic processes in real time, and it is difficult to simultaneously meet the application scenarios of high time resolution and high spectral resolution, thereby limiting its application in the fields of energetic material reaction process testing, engine combustion product analysis and efficiency evaluation. Summary of the invention

[0004] The purpose of the present invention is to solve the technical problems of low frame rate of traditional spectrometers, inability to capture spectral changes in high-speed dynamic processes in real time, and limited application scenarios, and to provide a MHz frame rate high-speed spectral measurement system and method.

[0005] To achieve the above objectives, the technical solutions provided by the present invention are: A MHz frame rate high-speed spectrum measurement system, which is special in that: It includes a slit, a first collimating reflector, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module and a data processing module; The slit is arranged on the optical path of the radiated light / transmitted light / reflected light of the object to be measured, and is used to limit the incident space of the light beam and change its divergence angle; the first collimating reflector is located on the side of the slit away from the object to be measured, and is used to convert the light beam entering through the slit into a parallel light beam; the spectral dispersion element is located on the reflected light path of the first collimating reflector, and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength; The spectral signal amplification module is located on the diffraction optical path of the spectral dispersion element, and is used to capture the spectral band and amplify the weak spectral signal therein; the spectral coupling module is arranged close to the spectral signal amplification module, and its output end is connected to the input end of the spectral acquisition module, and the output end of the spectral acquisition module is electrically connected to the input end of the data processing module; the spectral coupling module is used to focus the spectral band captured by the spectral signal amplification module to form a spectral image, and transmit it to the spectral acquisition module, and the spectral acquisition module is used to collect the spectral image and transmit it to the data processing module; the data processing module is used to process the received spectral image and output the spectral data information of the object to be tested.

[0006] Furthermore, it also includes a second collimating reflector, which is located on the diffraction light path of the spectral dispersion element, and the spectral signal amplification module is located on the reflection light path of the second collimating reflector.

[0007] Furthermore, the spectral dispersion element is a grating, and the center position of the grating diffraction surface is located at the focal position of the first collimating reflector; the distance between the center point of the grating diffraction surface and the center point of the surface of the first collimating reflector is L 1Satisfy:

[0008] in, is the divergence angle of the light beam after entering the slit; is the incident angle of the grating; f is the focal length of the first collimating mirror.

[0009] Furthermore, the spectral dispersion element is a dispersion prism, and the distance between the geometric center point of the dispersion prism and the center point of the surface of the first collimating reflector is L 2. Satisfy:

[0010] Among them, Δ x It is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; l is the wavelength of incident light, Represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

[0011] Furthermore, the width of the slit is 5 μm to 200 μm; The first collimating reflector is a concave reflector, and its incident angle is (5°±1°)~(15°±2°).

[0012] Furthermore, the spectral signal amplification module is a visible spectrum band image intensifier.

[0013] Furthermore, the spectral coupling module is a cylindrical lens focusing system.

[0014] Furthermore, the spectrum acquisition module selects an ultra-high-speed camera with a frame rate of millions, or a linear array CCD or CMOS detector with a frame rate of millions, or a high-speed linear array photomultiplier tube array with a frame rate of millions.

[0015] The present invention also provides a MHz frame rate high-speed spectrum measurement method, comprising the following steps: Step 1, assembling the above-mentioned MHz frame rate high-speed spectrum measurement system; Step 2, the radiation light / transmitted light / reflected light from the object to be measured passes through the slit, and then passes through the first collimating reflector and the spectral dispersion element in sequence to form a spectral band; Step 3: Capture the spectral band and amplify the weak spectral signal therein through the spectral signal amplification module to obtain a spectral band with enhanced intensity; Step 4: Correct the chromatic aberration and spherical aberration of the spectral band with enhanced intensity by the spectral coupling module, and focus the beam after beam shaping to obtain a spectral image, which is then collected by the spectral acquisition module and transmitted to the data processing module; the spectral image is a one-dimensional spectral image; Step 5: Process the spectral image through a data processing module and output spectral data of the object to be measured, thereby realizing MHz frame rate high-speed spectral measurement.

[0016] Furthermore, in step 5, the data processing module processes the spectral image specifically as follows: 5.1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix; 5.2. Use interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram; 5.3. The spectrum intensity distribution diagram is processed in sequence by spectrum smoothing, baseline correction and feature extraction to obtain the spectrum data of the object to be tested.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention provides a MHz frame rate high-speed spectral measurement system, which includes a slit, a first collimating reflector, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module and a data processing module which are arranged in sequence. The modular structural design makes the overall structure of the spectral measurement system more compact. At the same time, by introducing the spectral signal amplification module on the transmission path of the spectral signal, it can efficiently capture and amplify weak spectral signals, thereby significantly improving the intensity of the spectral signal and the sensitivity of the measurement system, and realizing accurate measurement of the spectral changes of substances in high-speed dynamic processes.

[0018] 2. In a MHz frame rate high-speed spectral measurement system provided by the present invention, a second collimating reflector is added to fold the optical path, thereby reducing the system volume while maintaining the required optical performance, thereby further improving the system integration.

[0019] 3. In the MHz frame rate high-speed spectrum measurement system provided by the present invention, the spectrum dispersion element can select a grating or a dispersion prism to ensure the accuracy and uniformity of the spectrum dispersion.

[0020] 4. In a MHz frame rate high-speed spectral measurement system provided by the present invention, the spectral coupling module selects a cylindrical lens focusing system, which can realize distortion-free compressed line imaging of the spectral band, thereby improving the optical coupling efficiency with the spectral acquisition module.

[0021] 5. In a MHz frame rate high-speed spectral measurement system provided by the present invention, the spectral acquisition module selects an ultra-high-speed camera with a million frame rate, or a linear array CCD or CMOS detector with a million frame rate, or a high-speed linear array photomultiplier tube array with a million frame rate, which can realize high-speed spectral data acquisition at the million frame rate (MHz) level, thereby improving the measurement accuracy and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The present invention is a schematic structural diagram of an embodiment of a MHz frame rate high-speed spectrum measurement system.

[0023] The reference numerals are as follows: 1- slit, 2- first collimating reflector, 3- spectral dispersion element, 4- second collimating reflector, 5- spectral signal amplification module, 6- spectral coupling module, 7- spectral acquisition module. DETAILED DESCRIPTION

[0024] In order to make the purpose, advantages and features of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0025] like Figure 1 As shown, this embodiment provides a MHz frame rate high-speed spectral measurement system, including a slit 1, a first collimating reflector 2, a spectral dispersion element 3, a spectral signal amplification module 5, a spectral coupling module 6, a spectral acquisition module 7 and a data processing module (not shown in the figure).

[0026] The slit 1 is arranged on the optical path of the radiation light / transmitted light / reflected light of the object to be measured, and is used to limit the incident space of the light beam and change its divergence angle. At the same time, the slit 1 can also define the spatial resolution and light flux of the spectral measurement system. In this embodiment, the width of the slit 1 is S for:

[0027] In the formula, is the wavelength of incident light; R is the spectral resolution; D is the linear dispersion rate (nm / mm) of the spectral dispersion element 3. To balance the system resolution and light flux, the width of the slit 1 is usually between 5 μm and 200 μm, and the height of the slit 1 matches the pixel height of the detector in the spectral acquisition module 7.

[0028] The first collimating reflector 2 is located on the side of the slit 1 away from the object to be measured, and is used to convert the light beam entering through the slit 1 into a parallel light beam. The first collimating reflector 2 of this embodiment is a concave reflector, and its reflective optical design can eliminate chromatic aberration, is suitable for the entire ultraviolet-visible-infrared band, and achieves a wide-spectrum reflection efficiency of > 95% (Al@250-2500nm, Au@2-20μm) through high-precision aluminum / gold coating. Based on the optimized balance between aberration suppression and light flux, the incident angle of the concave reflector is (5°±1°)~(15°±2°), and the selection of specific parameters can be adjusted accordingly in combination with system requirements.

[0029] The spectral dispersion element 3 is located on the reflection light path of the first collimating reflector 2 and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength.

[0030] Preferably, the spectral dispersion element 3 is a high-precision grating, and the selection of the grating is based on the target spectral range and resolution requirements to ensure the accuracy and uniformity of the spectral dispersion. In this embodiment, the selection of the grating must meet the following conditions: (a) The line density of the grating is between 300 lines / mm and 3600 lines / mm. Holographic gratings are used in high-resolution scenarios, while ruled gratings are used in wide-band scenarios.

[0031] (b) The blaze wavelength of the grating matches the central wavelength of the target band.

[0032] (c) The incident angle of the grating i iSatisfy the grating equation ml = d (sin i i +sin i m ),in m is the diffraction order, l is the wavelength of incident light, d is the grating constant, i m is the diffraction angle of the grating.

[0033] (d) The center of the grating is set at the focal position of the first collimating reflector 2, so that the incident light is collimated by the first collimating reflector 2 and then incident on the grating surface.

[0034] (e) The distance from the first collimating reflector 2 to the grating (i.e., the distance between the center point of the incident surface of the first collimating reflector 2 and the center point of the diffraction surface of the grating) Need to meet:

[0035] At the same time, the following conditions must also be met:

[0036] in, is the divergence angle of the light beam after entering slit 1; is the incident angle of the grating; f is the focal length of the first collimating reflector 2; W is the width of the grating being illuminated; N is the line density of the grating; R is the spectral resolution of the grating, m is the diffraction order.

[0037] Alternatively, the spectral dispersive element 3 may also be a dispersive prism, and the selection of the dispersive prism must meet the following conditions: (a) The material of the dispersion prism is selected according to the working band. Fused quartz is used in the ultraviolet band, BK7 glass is used in the visible light band, and calcium fluoride or zinc selenide is used in the infrared band.

[0038] (b) The top angle of the dispersion prism is 30° to 60° to balance dispersion efficiency and aberration.

[0039] (c) The distance from the first collimating reflector 2 to the dispersive prism (i.e., the distance between the center point of the incident surface of the first collimating reflector 2 and the geometric center point of the dispersive prism) Need to meet:

[0040] Among them, Δ xIt is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; l is the wavelength of incident light, Represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

[0041] The spectral signal amplification module 5 is located on the diffraction optical path of the spectral dispersion element 3, and is used to capture the spectral band and amplify the weak spectral signal therein. The spectral signal amplification module 5 is an image intensifier, and a high-performance image intensifier is arranged on the output path of the dispersion spectrum. Based on the excellent optical gain, fast response time and wide spectral response of the image intensifier, it can efficiently capture and amplify the weak spectral signal in the spectral band, thereby significantly improving the spectral signal intensity and the sensitivity of the spectral measurement system.

[0042] The image intensifier needs to be selected according to the spectral band and resolution requirements. By accurately installing and debugging the image intensifier, it is ensured that it is closely fitted with the focusing surface of the spectral coupling module 6, thereby reducing light loss and improving measurement accuracy. The image intensifier of this embodiment is a visible spectrum image intensifier, and the size can be selected from any size between 18mm and 150mm; the fluorescent screen can be selected from P20, P24, P43, P46 or P47; the photocathode has a variety of materials such as cesium oxide (CsI), silver cesium oxide (Ag-O-Cs), and multi-alkali photocathode (Bi-alkali), and the shutter time can be selected from 200ps to 200ns.

[0043] The spectrum coupling module 6 is arranged close to the spectrum signal amplification module 5, and the spectrum coupling module 6 is used to focus the spectrum band captured by the spectrum signal amplification module 5 to form a spectrum image. In this embodiment, after the spectrum band is amplified, a lens group mainly composed of cylindrical lenses is precisely designed as the spectrum coupling module 6. By utilizing the unique line focusing characteristics of the cylindrical lens and adjusting the focal length and position of the cylindrical lens, the amplified spectrum band can be focused into a bright and clear one-dimensional spectrum image, and the selection of the lens group meets the following conditions: (a) The lens group must be able to correct spherical aberration and chromatic aberration; (b) The lens group needs to have beam shaping and coupling functions to reduce the image size of the spectral measurement system to D The spot size of 1 is enlarged / reduced to D 2 on the detector target surface, and the magnification / reduction ratio of the lens group is D 2 / D 1.

[0044] The input end of the spectrum acquisition module 7 is connected to the output end of the spectrum coupling module 6, and the output end is electrically connected to the input end of the data processing module. The spectrum acquisition module 7 is used to collect the spectrum image output by the spectrum coupling module 6 and transmit it to the data processing module. The spectrum acquisition module 7 can select an ultra-high-speed camera with a frame rate of one million, or a linear array CCD or CMOS detector with a frame rate of one million, or a high-speed linear array photomultiplier tube (PMT) array with a frame rate of one million. Through an ultra-high-speed camera with a frame rate of one million, spectral images can be captured at a very high speed, and spectral data acquisition at the level of one million frames (MHz) can be achieved. The selection of an ultra-high-speed camera needs to consider parameters such as its resolution, frame rate, spectral response range, and data output interface. At the same time, its position needs to be accurately adjusted during installation to ensure that the photosensitive surface of the ultra-high-speed camera is closely attached to the image surface of the one-dimensional spectrum image after focusing by the spectrum coupling module 6, so as to meet the needs of the corresponding application scenario and achieve the effect of capturing spectral images at a speed of one million frames.

[0045] The data processing module is used to process the received spectral image and output the spectral data information of the object to be tested. The data processing module can be implemented by using the calibration processing method and software equipped with a conventional spectrometer, calibrating the spectrum acquisition module 7 through wavelength calibration, spectral response correction, etc., and converting the collected spectral image into a spectral intensity distribution diagram to ensure the accuracy of the spectral data. After that, the spectral intensity distribution diagram is processed and analyzed using algorithms such as spectral smoothing, baseline correction, and feature extraction, and finally extracting and outputting spectral information with high time resolution and high spectral resolution.

[0046] In order to improve the integration of the system, the present embodiment also includes a second collimating reflector 4, which is located on the diffraction light path of the spectral dispersion element 3, and the spectral signal amplification module 5 is located on the reflection light path of the second collimating reflector 4. The setting of the second collimating reflector 4 can adjust the light path structure and fold the light path. Under the premise of maintaining the required optical performance, the system volume is reduced, thereby further improving the integration of the system.

[0047] In addition, in this embodiment, the spectral dispersion element 3 can be replaced with a Raman spectrometer or a micro-spectrometer while other designs remain unchanged, thereby realizing MHz frame rate high-speed Raman spectroscopy measurement or MHz frame rate high-speed micro-spectroscopy measurement.

[0048] The present invention aims at the trade-off problem between frame rate and spectral resolution in existing spectral measurement systems, and provides a MHz frame rate high-speed spectral measurement system with a modular design. On the basis of high-precision grating spectral dispersion, by introducing a high-performance image intensifier, effective amplification of spectral signals is achieved in the transmission path of spectral signals, and the spectral signal intensity and system sensitivity are significantly improved; at the same time, by accurately adjusting the cylindrical lens focusing system, distortion-free compressed line imaging of the spectral band is achieved, and the optical coupling efficiency with the subsequent ultra-high-speed camera or ultra-high-speed linear array detector is improved. Finally, through an ultra-high-speed camera with a frame rate of one million, high-speed spectral data acquisition at the level of one million frame rate (MHz) is achieved.

[0049] In addition, this embodiment also provides a MHz frame rate high-speed spectrum measurement method, comprising the following steps: Step 1: According to the application scenario, various components are selected and assembled to obtain the MHz frame rate high-speed spectrum measurement system described in this embodiment.

[0050] Step 2: After the radiated light / transmitted light / reflected light from the object to be measured passes through the slit 1, it passes through the first collimating reflector 2 and the spectral dispersion element 3 in sequence to form spectral bands of different angles.

[0051] Step 3: The spectral band is captured by the spectral signal amplification module 5 after passing through the second collimating reflector 4. At the same time, the spectral signal amplification module 5 amplifies the weak spectral signal in the spectral band, thereby obtaining a spectral band with enhanced intensity.

[0052] Step 4: The spectral coupling module 6 corrects the chromatic aberration and spherical aberration of the spectral band with enhanced intensity, and focuses the beam after beam shaping to obtain a one-dimensional spectral image, which is then collected and transmitted to the data processing module by the spectral acquisition module 7. In this process, the focal length and position of the cylindrical lens in the spectral coupling module 6 can be adjusted to achieve distortion-free compressed line imaging of the spectral band, thereby improving the optical coupling efficiency with the subsequent spectral acquisition module 7.

[0053] Step 5: Process the spectral image through a data processing module and output spectral data of the object to be measured, thereby realizing MHz frame rate high-speed spectral measurement.

[0054] In this embodiment, the spectral image is processed by the data processing module specifically as follows: 5.1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix.

[0055] 5.2. Use the interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram.

[0056] 5.3. The spectrum intensity distribution diagram is processed in sequence by spectrum smoothing, baseline correction and feature extraction to obtain the spectrum data of the object to be tested.

[0057] Based on the above implementation mode, the present invention realizes a MHz frame rate high-speed spectral measurement method, which amplifies weak spectral signals while maintaining high spectral resolution, realizes MHz high frame rate (high time resolution) high-speed spectral acquisition, and can capture spectral changes in high-speed dynamic processes in real time. It has broad application prospects in the fields of energetic material reaction history testing, engine combustion product analysis and efficiency evaluation.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the present invention.

Claims

1. A MHz frame rate high-speed spectrum measurement system, characterized in that: It comprises a slit (1), a first collimating reflector (2), a spectral dispersion element (3), a spectral signal amplification module (5), a spectral coupling module (6), a spectral acquisition module (7) and a data processing module; The slit (1) is arranged on the optical path of the radiated light / transmitted light / reflected light of the object to be measured, and is used to limit the incident space of the light beam and change its divergence angle; the first collimating reflector (2) is located on the side of the slit (1) away from the object to be measured, and is used to convert the light beam entering through the slit (1) into a parallel light beam; the spectral dispersion element (3) is located on the reflected light path of the first collimating reflector (2), and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength; The spectral signal amplification module (5) is located on the diffraction light path of the spectral dispersion element (3) and is used to capture the spectral band and amplify the weak spectral signal therein; the spectral coupling module (6) is arranged close to the spectral signal amplification module (5), and its output end is connected to the input end of the spectral acquisition module (7); the output end of the spectral acquisition module (7) is connected to the input end of the data processing module via an optical fiber; the spectral coupling module (6) is used to focus the spectral band captured by the spectral signal amplification module (5) to form a spectral image, and transmit it to the spectral acquisition module (7); the spectral acquisition module (7) is used to acquire the spectral image and transmit it to the data processing module; the data processing module is used to process the received spectral image and output spectral data information of the object to be tested.

2. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: It also comprises a second collimating reflector (4), wherein the second collimating reflector (4) is located on the diffraction light path of the spectral dispersion element (3), and the spectral signal amplification module (5) is located on the reflection light path of the second collimating reflector (4).

3. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: The spectral dispersion element (3) is a grating, and the center position of the grating diffraction surface is located at the focal position of the first collimating reflector (2); the distance between the center point of the grating diffraction surface and the center point of the surface of the first collimating reflector (2) is L 1Satisfy: ； in, is the divergence angle of the light beam after entering the slit (1); is the incident angle of the grating; f is the focal length of the first collimating reflector (2).

4. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: The spectral dispersion element (3) is a dispersion prism, and the distance between the geometric center point of the dispersion prism and the center point of the surface of the first collimating reflector (2) is L 2. Satisfy: ； Among them, Δ x It is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; λ is the wavelength of incident light, Represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

5. The MHz frame rate high-speed spectrum measurement system according to any one of claims 1 to 4, characterized in that: The width of the slit (1) is 5 μm to 200 μm; The first collimating reflector (2) is a concave reflector, and its incident angle is (5°±1°) to (15°±2°).

6. The MHz frame rate high-speed spectrum measurement system according to claim 5, characterized in that: The spectral signal amplification module (5) is a visible spectrum band image intensifier.

7. The MHz frame rate high-speed spectrum measurement system according to claim 6, characterized in that: The spectral coupling module (6) is a cylindrical lens focusing system.

8. The MHz frame rate high-speed spectrum measurement system according to claim 7, characterized in that: The spectrum acquisition module (7) is an ultra-high-speed camera with a frame rate of one million, or a linear array CCD or CMOS detector with a frame rate of one million, or a high-speed linear array photomultiplier tube array with a frame rate of one million.

9. A MHz frame rate high-speed spectrum measurement method, characterized in that: The following steps are involved: Step 1, assembling the MHz frame rate high-speed spectrum measurement system according to any one of claims 1 to 8; Step 2, the radiation light / transmitted light / reflected light from the object to be measured passes through the slit (1), and then passes through the first collimating reflector (2) and the spectral dispersion element (3) to form a spectral band; Step 3: Capture the spectral band and amplify the weak spectral signal therein through the spectral signal amplification module (5) to obtain a spectral band with enhanced intensity; Step 4: Correct the chromatic aberration and spherical aberration of the spectral band with enhanced intensity by the spectral coupling module (6), and focus the beam after beam shaping to obtain a spectral image, which is then collected by the spectral acquisition module (7) and transmitted to the data processing module; the spectral image is a one-dimensional spectral image; Step 5: Process the spectral image through a data processing module and output spectral data of the object to be measured, thereby realizing MHz frame rate high-speed spectral measurement.

10. The MHz frame rate high-speed spectrum measurement method according to claim 9, characterized in that: In step 5, the data processing module processes the spectral image specifically as follows: 5.

1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix; 5.

2. Use interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram; 5.

3. The spectrum intensity distribution diagram is processed in sequence by spectrum smoothing, baseline correction and feature extraction to obtain the spectrum data of the object to be tested.

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