Reflectivity test system and reflectivity comparison verification method

Abstract

The invention provides a reflectivity test system and a reflectivity comparison verification method. The system comprises a light source system, a collection mirror chamber and a sample test chamber which are sequentially arranged along a light path, a focusing collecting mirror is arranged in the collecting mirror chamber, and an optical filter, an energy normalization structure, a first energy detector, a displacement table and a second energy detector are arranged in the sample testing chamber. The reflectivity comparison verification method is used for verifying the test accuracy of the reflectivity test system. Compared with the prior art, the reflectivity test system provided by the invention is simple in structure, and the accuracy of the test result can be verified and improved through the reflectivity comparison verification method provided by the invention, so that the reflectivity test accuracy can be ensured under the condition that the reflectivity test system is miniaturized.

Description

Technical Field

[0001] The present disclosure relates to the technical field of optical measurement, and in particular to a reflectivity testing system and a reflectivity comparison and verification method. Background Art

[0002] With the development of lithography technology, higher requirements are put forward for the performance test of optical components. Reflectivity is a key parameter of optical component performance. The change of reflectivity has a huge impact on optical path transmission and even directly affects lithography yield. Therefore, high-precision reflectivity testing is the supporting foundation for the development of lithography technology.

[0003] Internationally, many institutions have built high-precision reflectivity testing devices based on synchrotron radiation sources, which has greatly promoted the development of lithography technology. However, in experimental research, reflectivity tests need to be carried out frequently, so the international community has also developed small reflectivity testing devices based on small plasma light sources such as DPP (Discharge Produced Plasma) and LPP (laser-produced plasma). Compared with the reflectivity testing device based on synchrotron radiation source, the small reflectivity testing device is small in size, low in maintenance cost, and flexible in placement, which is more suitable for daily research in the laboratory. However, the existing small reflectivity testing devices often have low reflectivity testing accuracy, and how to verify the accuracy of the reflectivity testing device is also a technical problem that needs to be solved urgently in this field. Summary of the invention

[0004] The purpose of the present disclosure is to provide a reflectivity testing system and a reflectivity comparison verification method to improve the reflectivity testing accuracy.

[0005] The present disclosure provides a reflectivity testing system, including:

[0006] A light source system, a collecting mirror chamber and a sample testing chamber are sequentially arranged along the optical path; the collecting mirror chamber is provided with a focusing collecting mirror, and the sample testing chamber is provided with a filter, an energy normalization structure, a first energy detector, a displacement stage and a second energy detector;

[0007] The light source system is used to generate a radiation source, and the light beam emitted by the radiation source is a broad spectrum light with a certain divergence angle;

[0008] The focusing collecting mirror is used to reflect and focus the light beam emitted by the irradiation source, and the focusing point is located in the sample testing chamber and between the filter and the energy normalization structure;

[0009] In the sample testing chamber, the light beam reflected and focused by the focusing collecting mirror is filtered by the filter and then focused at the focusing point. After passing through the focusing point, the light beam continues to propagate and enters the energy normalization structure. The energy normalization structure extracts two beams of light, namely a test beam and a monitoring beam. The monitoring beam enters the first energy detector, and the test beam is incident on the surface of the sample to be tested and enters the second energy detector after being reflected by the sample surface.

[0010] The translation stage is used to install the sample to be tested and the second energy detector, and can adjust the test position of the sample and the detection position of the second energy detector.

[0011] In a possible implementation, the surfaces of the focusing and collecting mirror, the filter, the first energy detector, and the second energy detector are coated with a filter film layer to obtain a light beam with a preset wavelength and a preset bandwidth.

[0012] In a possible implementation, the system further includes:

[0013] The vacuum pump set is used to evacuate the entire reflectivity test system.

[0014] In a possible implementation, the system further includes:

[0015] Vacuum gauge, used to monitor the vacuum degree of the entire reflectivity test system.

[0016] In a possible implementation manner, the light source system adopts an LPP light source or a DPP light source.

[0017] The present disclosure also provides a reflectivity testing method, based on the reflectivity testing system described in the above embodiment, the method includes:

[0018] Start the light source system, move the sample to be tested out of the light path before the sample reflectivity test, and use the first energy detector to detect the energy E of the monitoring light beam. 9i , use the second energy detector to detect the energy E of the test beam 11i ;

[0019] When testing the sample reflectivity, adjust the sample to be tested to a preset position in the light path, set the incident angle to θ, and adjust the second energy detector to the position of 2θ. At this time, use the second energy detector to detect the reflected light energy E of the sample. 11r , use the first energy detector to detect the energy E of the monitoring beam 9r ;

[0020] Calculate the energy normalization calibration factor F = E 9r / E 9i ;

[0021] By the formula R = E 11r / (E 11i *F) Calculate the sample reflectance R.

[0022] The present disclosure also provides a reflectivity comparison verification method, which is used to verify the reflectivity test system described in the above embodiment. The method includes:

[0023] Determine a standard reflectivity test device for comparative verification, the standard reflectivity test device uses a synchrotron radiation source, and the test beam is highly monochromatic s-polarized light; the test beam of the reflectivity test system to be verified is non-monochromatic non-polarized light;

[0024] The reflectance spectrum R of the sample under non-polarized light is obtained by using the standard reflectance test device. n (λ), λ represents wavelength;

[0025] Calculate the test beam spectrum S of the reflectivity test system to be verified in (λ)=S(λ)×R(λ)×T(λ); wherein S(λ) represents the radiation spectrum distribution of the irradiation source generated by the light source system, R(λ) represents the reflection spectrum of the focusing collector, and T(λ) represents the transmission spectrum of the filter;

[0026] Calculate the reflected light spectrum S of the sample in the reflectivity test system to be verified r (λ) = S in (λ)

[0027] ×R n (λ);

[0028] Calculate the theoretical reflectivity of the sample Among them, the spectrum of the test beam incident on the sample is S in (λ) wavelength range is between λ1nm-λ2nm, S d (λ) represents the spectral response spectrum of the energy detector;

[0029] The reflectivity R of the sample is obtained by testing the reflectivity testing system to be verified. t =E 11r / (E 11i *F);

[0030] Compare the theoretical reflectivity R of the sample theory And the experimentally measured reflectivity R t The difference is determined by comparing the reflectivity of the image.

[0031] In a possible implementation, the reflectance spectrum R of the sample under non-polarized light is obtained by using the standard reflectance testing device. n(λ), including:

[0032] The reflectivity of the sample is tested using the standard reflectivity testing device, and the reflectivity R of the sample under non-polarized light is calculated based on the reflectivity of the sample under s-polarized light with two different polarization degrees. n =

[0033] (R s +R p ) / 2; where R s Represents the reflectivity under s-polarized light, R p represents the reflectivity under p-polarized light;

[0034] Scan the incident light wavelength to test and obtain the reflectance spectrum R of the sample under non-polarized light. n (λ).

[0035] The advantages of the present invention compared with the prior art are:

[0036] The reflectivity test system provided by the present disclosure includes: a light source system, a collecting mirror chamber and a sample test chamber arranged in sequence along the optical path; the collecting mirror chamber is provided with a focusing collecting mirror, and the sample test chamber is provided with a filter, an energy normalization structure, a first energy detector, a displacement stage and a second energy detector. Compared with the prior art, the reflectivity test system provided by the present application has a simple structure, and can verify and improve the accuracy of the test results through the reflectivity comparison verification method provided by the present application, so that the reflectivity test accuracy can be guaranteed while miniaturizing the reflectivity test system. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present disclosure. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0038] Figure 1 A schematic structural diagram of a reflectivity testing system provided by the present disclosure is shown;

[0039] Figure 2 A schematic structural diagram of another reflectivity testing system provided by the present disclosure is shown;

[0040] Figure 3 A schematic diagram of a reflectivity comparison verification process provided by the present disclosure is shown. DETAILED DESCRIPTION

[0041] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0042] Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clear expression. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may further design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0043] In the context of the present disclosure, when a layer / element is referred to as being "on" another layer / element, the layer / element may be directly on the other layer / element or an intervening layer / element may exist therebetween. In addition, if a layer / element is "on" another layer / element in one orientation, the layer / element may be "below" the other layer / element when the orientation is reversed.

[0044] In order to solve the problems existing in the prior art, the embodiments of the present disclosure provide a reflectivity testing system and method, and a reflectivity comparison and verification method, which are described below in conjunction with the accompanying drawings.

[0045] Figure 1 A schematic diagram of the structure of a reflectivity testing system provided in an embodiment of the present application is shown. Figure 1 As shown, the reflectivity testing system includes: a light source system 1, a collecting mirror chamber 2 and a sample testing chamber 3 which are sequentially arranged along the optical path; the light source system 1 generates an irradiation source 1, the collecting mirror chamber 2 is provided with a focusing collecting mirror 5, and the sample testing chamber 3 is provided with a filter 6, a focusing point 7, an energy normalization structure 8, a first energy detector 9, a sample to be tested 10, a displacement stage (not shown) and a second energy detector 11.

[0046] Figure 2 FIG. 2 shows a schematic diagram of the structure of another reflectivity testing system provided in an embodiment of the present application. Figure 2 The reflectivity test system shown is Figure 1 The reflectivity test systems shown differ in that: Figure 1 The focusing and collecting mirror 5 is a focusing and collecting mirror for small-angle incidence. Figure 2 The focusing and collecting mirror 5 is a focusing and collecting mirror for large-angle incidence.

[0047] The light source system 1 is used to generate an irradiation source 2. The light beam emitted by the irradiation source 2 is a broad spectrum light with a certain divergence angle. The divergent light beam is reflected and focused after entering the focusing collection mirror 5. Specifically, the light source system can use various small plasma light sources such as LPP light source or DPP light source, which can miniaturize the reflectivity test system.

[0048] The focusing collecting mirror 5 is used to reflect and focus the light beam emitted by the irradiation source 4. The focusing point 7 is located in the sample testing chamber 3 and between the filter 6 and the energy normalization structure 8. The filter 6 is used to filter out long-wavelength light.

[0049] The translation stage is used to install the sample 10 to be tested and the second energy detector 11 , and can adjust the test position of the sample 10 and the detection position of the second energy detector 11 .

[0050] In the sample testing chamber 3, the light beam reflected and focused by the focusing collecting mirror 5 is filtered by the filter 6 and then focused on the focusing point 7. After passing through the focusing point 7, the light beam continues to propagate into the energy normalization structure 8; the energy normalization structure 8 extracts two beams of light, namely a test beam and a monitoring beam. The monitoring beam enters the first energy detector 9, and the test beam is incident on the surface of the sample to be tested 10, and enters the second energy detector 11 after being reflected by the sample surface.

[0051] It can be seen that in the present application, two beams of light are extracted through the energy normalization structure 8 for testing and energy monitoring respectively. The test beam is incident on the surface of the sample to be tested 10, and its reflected light energy is detected by the second energy detector 11, so that the reflectivity of the sample to be tested can be tested; the monitoring beam is detected by the first energy detector 9, which is used to monitor the energy fluctuation of the light source in real time to calibrate the energy fluctuation of the test beam, thereby reducing the impact of the incident light energy fluctuation on the reflectivity test. The sample to be tested 10 and the second energy detector 11 are mounted on a precision displacement table, which can realize the adjustment of the test position of the sample to be tested 10, as well as the linkage adjustment of the test beam incident angle θ and the reflected light angle 2θ.

[0052] In some embodiments, the surfaces of the focusing and collecting mirror 5, the filter 6, the first energy detector 9 and the second energy detector 11 are coated with a filter film layer to obtain a light beam with a preset wavelength and a preset bandwidth. For example, by obtaining a light beam with a wavelength of 13.5nm and a bandwidth of 4%, the reflectivity of the sample at 13.5nm (bandwidth 4%) can be tested. The light beam with a wavelength of 13.5nm belongs to the extreme ultraviolet (EUV) band. The light in this band has very high energy, because according to the photon energy formula, the shorter the wavelength, the higher the photon energy. The 4% bandwidth means that the wavelength of the light beam is not a single 13.5nm, but within a certain range. Therefore, the reflectivity testing system of the present application can provide high-precision EUV reflectivity testing.

[0053] In some embodiments, the reflectivity testing system of the present application further includes: an air pump group, which is used to vacuum the entire reflectivity testing system.

[0054] In some embodiments, the reflectivity testing system of the present application further includes: a vacuum gauge, which is used to monitor the vacuum degree of the entire reflectivity testing system to ensure that the vacuum degree meets the test requirements.

[0055] The embodiment of the present application also provides a reflectivity testing method based on the above reflectivity testing system, which can achieve high-precision testing of the reflectivity of optical components. The reflectivity testing method includes:

[0056] Before the sample reflectivity test, the sample to be tested 10 is loaded. Specifically, the vacuum pump group can be started to evacuate the entire reflectivity test system, and the vacuum gauge can be started to monitor the air pressure of each chamber in the entire reflectivity test system. When the system vacuum reaches the required vacuum, the light source system 1 can be started.

[0057] Start the light source system 1, and before the sample reflectivity test, move the sample to be tested out of the light path, and use the first energy detector to detect the energy E of the monitoring light beam. 9i , use the second energy detector to detect the energy E of the test beam 11i .

[0058] When testing the sample reflectivity, the sample 10 to be tested is adjusted to a preset position (x, y, z) in the optical path, the incident angle of the test beam is set to θ, and the second energy detector 11 is adjusted to a position of 2θ. At this time, the second energy detector 11 is used to detect the reflected light energy E of the sample. 11r , using the first energy detector 9 to detect the energy E of the monitoring beam 9r , then the energy normalization calibration factor F=E is obtained by calculation 9r / E 9i ; then E 11i *F is the energy of the calibrated test beam.

[0059] Finally, through the formula R = E 11r / (E 11i *F) Calculate the sample reflectance R, then the reflectance R is the reflectance after calibration.

[0060] In order to verify the reflectivity test accuracy of the above reflectivity test system and continuously improve the above reflectivity test system according to the verification results, the embodiment of the present application also provides a reflectivity comparison verification method, the method comprising:

[0061] Step 1: Determine a standard reflectivity test device for comparison and verification, the standard reflectivity test device uses a synchrotron radiation source, and the test beam is highly monochromatic s-polarized light; the test beam of the reflectivity test system to be verified is non-monochromatic non-polarized light;

[0062] Since the reflectivity test system of the present application is not provided with a monochromator, it is impossible to scan the incident spectrum to obtain a reflectivity spectrum in which the reflectivity varies with the incident wavelength. In the reflectivity test system of the present application, by focusing the collecting mirror 5, the filter 6, and the filter film layer plated on the surface of the second energy detector 11 and the first energy detector 9, a light beam with a wavelength of 13.5nm and a bandwidth of 4% is obtained, and the reflectivity of the sample at 13.5nm (bandwidth 4%) can be tested. In order to evaluate the test accuracy of the reflectivity, it is necessary to compare and verify with the test results of the standard reflectivity test device. The standard reflectivity test device can be an internationally recognized reflectivity test device with more accurate test results. The reflectivity test system proposed in the present application uses a DPP light source as an example, and the test beam is non-monochromatic non-polarized light. The standard reflectivity test device uses a synchrotron radiation source, and the test beam is a highly monochromatic s-polarized light. In view of the different test light source parameters of the reflectivity test device, the present application proposes the above-mentioned reflectivity comparison and verification method.

[0063] Step 2: Use the standard reflectivity test device to obtain the reflectance spectrum R of the sample under non-polarized light. n (λ), λ represents wavelength;

[0064] Reflectance spectrum refers to the curve of the reflectivity of materials or optical elements to light of different wavelengths as the wavelength changes. It describes how the degree of reflection of light after it hits the surface of an object changes with the wavelength within a specific wavelength range.

[0065] Specifically, the reflectivity of the sample is tested using the standard reflectivity testing device, and the reflectivity R of the sample under non-polarized light is calculated based on the reflectivity of the sample under s-polarized light with two different polarization degrees. n =(R s +R p ) / 2; where R s Represents the reflectivity under s-polarized light, R pRepresents the reflectivity under p-polarized light; scanning the incident light wavelength to test the reflectance spectrum R of the sample under non-polarized light n (λ).

[0066] This application is described by taking the s-polarized light test with polarization degree of 98% and 50% as an example. s and R p are the reflectance of the sample 10 under s-polarized light and p-polarized light, I s is the intensity of the s-polarization component in the test beam, I p is the intensity of the p-polarized component in the test beam, I = I s +I p is the total intensity of the test beam.

[0067] When tested with s-polarized light with a polarization degree of 98%, I s =0.99I,I p =0.01I, then:

[0068] I s ×R s +I p ×R p =R 98％ ×I, that is: 0.99×R s +0.01×R p =R 98％ (Formula 1); When using s-polarized light with a polarization degree of 50%, I s =0.75I,I p =0.25I, then:

[0069] I s ×R s +I s ×R p =R 50％ ×I, that is: 0.75×R s +0.25×R p =R 50％ (Formula 2).

[0070] The reflectivity R of the sample 10 to be tested under s-polarized light with polarization degrees of 98% and 50% is measured on a standard reflectivity test device. 98％ and R 50％ , R can be calculated using Formula 1 and Formula 2 s and R p , thus the reflectivity R of the sample 10 under non-polarized light can be calculated n =(R s +R p ) / 2. Scanning the incident light wavelength for testing can obtain the reflection spectrum R of the sample 10 to be tested.n (λ).

[0071] Step 3: Calculate the test beam spectrum S of the reflectivity test system to be verified in (λ)=S(λ)×R(λ)×T(λ); wherein S(λ) represents the radiation spectrum distribution of the irradiation source 4 generated by the light source system, R(λ) represents the reflection spectrum of the focusing collection mirror 5, and T(λ) represents the transmission spectrum of the filter 6;

[0072] Specifically, the radiation spectrum distribution S(λ) of the irradiation source 4, the reflection spectrum R(λ) of the focusing collector 5 under non-polarized light, and the transmission spectrum T(λ) of the filter 6 are obtained, and the test beam spectrum S under non-monochromatic light for reflectivity test is obtained. in (λ) = S(λ) × R(λ) × T(λ).

[0073] Step 4: Calculate the reflected light spectrum S of the sample in the reflectivity test system to be verified r (λ) = S in (λ)×R n (λ);

[0074] Specifically, the reflectance spectrum of the sample 10 to be tested under non-polarized light can be obtained from the second step as R n (λ), the reflectivity test beam spectrum of the radiation source 4 after passing through the focusing collection mirror 5 and the filter 6 is obtained from the third step: S in (λ), the second energy detector 11 detects the reflected light spectrum S of the sample 10 under non-monochromatic light. r (λ) = S in (λ)×R n (λ).

[0075] Step 5: Calculate the theoretical reflectivity of the sample Among them, the spectrum of the test beam incident on the sample is S in (λ) wavelength range is between λ1nm-λ2nm, S d (λ) represents the spectral response spectrum of the energy detector;

[0076] Specifically, the wide spectrum radiation light radiated by the radiation source 4 passes through the focusing collection mirror 5 and the filter 6, and then is incident on the test beam spectrum S of the sample to be tested 10. in The wavelength range of (λ) is between λ1nm-λ2nm, and the spectral energy outside the wavelength range of λ1nm-λ2nm has been filtered out. The reflectance spectrum of the sample 10 to be tested and calculated on the standard reflectance test device based on high monochromaticity under non-polarized light in the wavelength range of λ1nm-λ2nm is R n (λ), the spectral response spectrum of the energy detector is S d(λ), then it can be calculated that in the small reflectivity test system based on DPP light source proposed in this application, the theoretical reflectivity of the test sample 10 is

[0077]

[0078] Step 6: Obtain the reflectivity R of the sample based on the reflectivity test system to be verified t =E 11r / (E 11i *F);

[0079] Step 7: Compare the theoretical reflectivity R of the sample theory And the experimentally measured reflectivity R t The difference is measured, and a reflectivity comparison verification is performed based on the difference to evaluate the accuracy of the test results of the narrow-band small reflectivity test system based on the DPP light source.

[0080] For ease of understanding, this application provides Figure 3 Schematic diagram of the reflectivity comparison verification process shown.

[0081] The inventor of the present application established a small reflectivity test system based on the DPP light source according to the reflectivity test system proposed in the present application, and used the above-mentioned reflectivity comparison verification method to compare and verify the reflectivity of the MoSi multilayer film reflector processed by OptixFab in Germany as the sample to be tested 10, and finally obtained the theoretical reflectivity R theory The reflectivity R of the experimental test is 50.22%. t It is 49.43%, and the absolute value of the reflectivity differs by 0.79%, which can indicate that the reflectivity testing system of the present application has a high testing accuracy.

[0082] The advantages of the present invention compared with the prior art are:

[0083] Compared with the prior art, the reflectivity testing system provided in the present application has a simple structure, and can verify and improve the accuracy of the test results through the reflectivity comparison verification method provided in the present application. Therefore, the accuracy of the reflectivity test can be guaranteed while miniaturizing the reflectivity testing system.

[0084] In order to form the same structure, those skilled in the art may also design a method that is not completely the same as the method described above. In addition, although the various embodiments are described above, this does not mean that the measures in the various embodiments cannot be used in combination advantageously.

[0085] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, a person skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A reflectivity testing system, characterized in that: include: A light source system, a collecting mirror chamber and a sample testing chamber are sequentially arranged along the optical path; the collecting mirror chamber is provided with a focusing collecting mirror, and the sample testing chamber is provided with a filter, an energy normalization structure, a first energy detector, a displacement stage and a second energy detector; The light source system is used to generate a radiation source, and the light beam emitted by the radiation source is a broad spectrum light with a certain divergence angle; The focusing collecting mirror is used to reflect and focus the light beam emitted by the irradiation source, and the focusing point is located in the sample testing chamber and between the filter and the energy normalization structure; In the sample testing chamber, the light beam reflected and focused by the focusing collecting mirror is filtered by the filter and then focused at the focusing point. After passing through the focusing point, the light beam continues to propagate and enters the energy normalization structure. The energy normalization structure extracts two beams of light, namely a test beam and a monitoring beam. The monitoring beam enters the first energy detector, and the test beam is incident on the surface of the sample to be tested and enters the second energy detector after being reflected by the sample surface. The translation stage is used to install the sample to be tested and the second energy detector, and can adjust the test position of the sample and the detection position of the second energy detector.

2. The reflectivity testing system according to claim 1, characterized in that: The surfaces of the focusing and collecting mirror, the filter, the first energy detector and the second energy detector are coated with a filter film layer to obtain a light beam with a preset wavelength and a preset bandwidth.

3. The reflectivity testing system according to claim 1, characterized in that: The system further comprises: The vacuum pump set is used to evacuate the entire reflectivity test system.

4. The reflectivity testing system according to claim 3, characterized in that: The system further comprises: Vacuum gauge, used to monitor the vacuum degree of the entire reflectivity test system.

5. The reflectivity testing system according to claim 1, characterized in that: The light source system adopts an LPP light source or a DPP light source.

6. A reflectivity testing method, characterized in that: Based on the reflectivity testing system described in any one of claims 1 to 5, the method comprises: Start the light source system, move the sample to be tested out of the light path before the sample reflectivity test, and use the first energy detector to detect the energy E of the monitoring light beam. 9i , use the second energy detector to detect the energy E of the test beam 11i ; When testing the sample reflectivity, adjust the sample to be tested to a preset position in the light path, set the incident angle to θ, and adjust the second energy detector to the position of 2θ. At this time, use the second energy detector to detect the reflected light energy E of the sample. 11r , use the first energy detector to detect the energy E of the monitoring beam 9r ; Calculate the energy normalization calibration factor F = E 9r / E 9i ; By the formula R = E 11r / (E 11i *F) Calculate the sample reflectance R.

7. A reflectivity comparison verification method, used to verify the reflectivity test system according to any one of claims 1 to 5, characterized in that: The method comprises: Determine a standard reflectivity test device for comparative verification, the standard reflectivity test device uses a synchrotron radiation source, and the test beam is highly monochromatic s-polarized light; the test beam of the reflectivity test system to be verified is non-monochromatic non-polarized light; The reflectance spectrum R of the sample under non-polarized light is obtained by using the standard reflectance test device. n (λ), λ represents wavelength; Calculate the test beam spectrum S of the reflectivity test system to be verified in (λ)=S(λ)×R(λ)×T(λ); wherein S(λ) represents the radiation spectrum distribution of the irradiation source generated by the light source system, R(λ) represents the reflection spectrum of the focusing collector, and T(λ) represents the transmission spectrum of the filter; Calculate the reflected light spectrum S of the sample in the reflectivity test system to be verified r (λ) = S in (λ)×R n (λ); Calculate the theoretical reflectivity of the sample Among them, the spectrum of the test beam incident on the sample is S in (λ) wavelength range is between λ1nm-λ2nm, S d (λ) represents the spectral response spectrum of the energy detector; The reflectivity R of the sample is obtained by testing the reflectivity testing system to be verified. t =E 11r / (E 11i *F); Compare the theoretical reflectivity R of the sample theory And the experimentally measured reflectivity R t The difference is determined by comparing the reflectivity of the image.

8. The reflectivity comparison verification method according to claim 7, characterized in that: The reflectance spectrum R of the sample under non-polarized light is obtained by using the standard reflectance testing device. n (λ), including: The reflectivity of the sample is tested using the standard reflectivity testing device, and the reflectivity R of the sample under non-polarized light is calculated based on the reflectivity of the sample under s-polarized light with two different polarization degrees. n =(R s +R p ) / 2; among them, R s Represents the reflectivity under s-polarized light, R p represents the reflectivity under p-polarized light; Scan the incident light wavelength to test and obtain the reflectance spectrum R of the sample under non-polarized light. n (λ).

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