Copper cylinder pickup detection device and detection method

Abstract

The invention discloses a copper column pickup detection device and method, the device comprises a flexible feeding unit, a rotary pickup unit and a first detection unit arranged at the top of the flexible feeding unit, the flexible feeding unit is used for placing a copper column, and the first detection unit is used for photographing and detecting the copper column; the rotary picking unit is arranged between the flexible feeding unit and the first detection unit and can move in the z-axis direction to pick up the copper columns on the flexible feeding unit. A second detection unit is arranged on the rotary pickup unit, and the second detection unit is used for photographing and detecting the copper column picked up by the rotary pickup unit; according to the device, the copper columns are flexibly fed, so that the damage to the copper columns is reduced; the first end face of the copper column is detected through the first detection unit, the position of the copper column is determined so that the rotary picking unit can pick up the copper column, and in the copper column picking process, the second detection unit can conduct photographing detection on the second end face, picked up by the rotary picking unit, of the copper column so that double-face detection of the copper column can be achieved; and the reject ratio of subsequent packaging products is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor mounting technology, and in particular to a copper pillar picking detection device and detection method. Background Art

[0002] Copper pillar packaging mainly establishes a copper pillar-based connection between the chip and the packaging substrate to achieve electrical connection, physical support and good heat dissipation channel between the chip and the external circuit. This packaging technology plays a key role in the manufacture of modern high-performance electronic devices, especially for integrated circuits and power devices.

[0003] The copper pillar is generally in the shape of a cylinder with a hole in the middle, and its height and diameter are determined according to specific packaging requirements. During the packaging process, there will be defective copper pillars. If the defective copper pillars are used for packaging, the defects may cause unstable connection between the copper pillar and the chip or substrate, increasing the risk of poor contact, thereby affecting the overall reliability of the package, affecting the transmission efficiency and quality of the signal, and reducing the reliability and life of the electronic product. The defects may also increase the defective rate in the packaging process, affecting production efficiency and cost control. Summary of the invention

[0004] In view of the above defects, the present application provides a copper pillar picking and detection device, which takes photos and detects both sides of the copper pillar before packaging to ensure the integrity of the copper pillar and reduce the defective rate of packaging. The following technical solutions are adopted: A copper column picking detection device comprises a flexible feeding unit and a first detection unit arranged on the top of the flexible feeding unit, wherein the flexible feeding unit is used to place the copper column; The first detection unit is used to take a photo of the first end surface of the copper column for detection, and determine the position of the copper column on the flexible loading unit; A rotating pickup unit, which is disposed between the flexible feeding unit and the first detection unit, and can move in a horizontal plane and move along the z-axis direction to pick up the copper column on the flexible feeding unit; The second detection unit is used to take photos and detect the second end surface of the copper column picked up by the rotating pickup unit.

[0005] Preferably, the rotary picking unit comprises a z-axis reciprocating mechanism and a picking mechanism, the z-axis reciprocating mechanism is provided with a mounting frame for mounting the picking mechanism, and the z-axis reciprocating mechanism is used to drive the picking mechanism to move.

[0006] Preferably, the picking mechanism comprises a rotating disk and a power component, a plurality of picking components are circumferentially distributed on the side wall of the rotating disk, the power component is used to drive the rotating disk to rotate, and the picking components pick up the copper columns by vacuum adsorption.

[0007] Preferably, it further comprises a rotary joint, which is mounted on the rotary pick-up unit and is used to connect the rotary pick-up unit with the vacuum generating device.

[0008] Preferably, the second detection unit is connected to the mounting frame, and the second detection unit is located on the top of the picking mechanism.

[0009] Preferably, the picked-up component includes a suction nozzle and a guide component arranged at the extended end of the suction nozzle, and the suction nozzle is provided with a plurality of suction holes for adsorbing the copper column.

[0010] Preferably, an elastic member is provided on the suction nozzle, and the suction nozzle can be telescopically moved along its own axis.

[0011] The present application also discloses a copper pillar detection method, including the above-mentioned copper pillar picking detection device, and further comprising the following steps: Loading: adding copper pillars into the flexible loading unit; Material swing: the flexible feeding unit places the copper column so that the rotating picking unit can pick up the copper column; First photo detection: the first detection unit takes a photo to detect the first end surface of the copper column placed by the flexible feeding unit, and determines the position of the copper column to be picked up; Copper pillar picking: the rotating picking unit picks up the copper pillars determined by the first detection unit in sequence by rotating and moving; Second photo inspection: the rotating pickup unit flips the picked-up copper column, and when the copper column passes under the second inspection unit, the second inspection unit sequentially photographs and inspects the second end surface of the copper column picked up by the rotating pickup unit.

[0012] The beneficial effects of this application are: The present application can flexibly load copper pillars to reduce damage to them; the first detection unit takes photos and detects the first end face of the copper pillar, and determines the position of the copper pillar for the rotating pickup unit to pick up the copper pillar. During the copper pillar picking process, the second detection unit can take photos and detect the second end face of the copper pillar picked up by the rotating pickup unit, thereby achieving double-sided detection of the copper pillar, thereby reducing the defective rate of subsequent packaging products. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of this application; Figure 2 It is a schematic diagram of the pickup unit structure of the present application; Figure 3 This application Figure 2 Left view of Figure 4 This application Figure 2 Rear view of Figure 5 This application Figure 4 Enlarged view of point B in the middle.

[0014] In the figure: 1. Flexible feeding unit, 11. Material bin, 12. Material tray, 13. Vibrating device; 2. Rotating pickup unit, 3. First detection unit, 4. Second detection unit, 5. Z-axis reciprocating mechanism 6. Pick-up mechanism, 61. Mounting frame, 62. Rotating disk, 63. Power component; 7. Rotary joint; 8. Pick-up component, 81. Suction nozzle, 82. Guide component, 83. Elastic component. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described in the present application are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0016] See also Figures 1 to 5 , further details of this application: A copper column picking and detecting device comprises a flexible feeding unit 1 and a rotating picking unit 2, and a first detecting unit 3 arranged on the top of the flexible feeding unit 1, wherein the first detecting unit is used to take a photo of the first end face of the copper column for detection, and determine the position of the copper column on the flexible feeding unit; wherein the flexible feeding device comprises a material bin 11 and a copper column placing mechanism, the first detecting unit 3 can adjust its own position to be arranged relative to the copper column placing mechanism, the material bin 11 is used to provide copper columns to the copper column placing mechanism, the copper column placing mechanism is used to place the copper columns, the first detecting unit 3 is used to take a photo of the copper column and detect the integrity of its first end face (upper surface); the rotating picking unit 2 is arranged between the flexible feeding unit 1 and the first detecting unit 3, and can move in a horizontal plane (x-axis and y-axis directions), and moves along the z-axis direction to pick up the copper column on the flexible loading unit 1; for example, it can be achieved by x-axis and y-axis moving modules; the rotating picking unit 2 is used to drive the rotating picking unit 2 to move to pick up the copper column at a determined position or to mount the picked copper column; the rotating picking unit 2 is provided with a second detection unit 4, and the second detection unit 4 is used to take a picture of the copper column picked up by the rotating picking unit 2, detect the second end face (lower surface) of the copper column, and determine the position of the picked copper column on the rotating picking unit 2 to avoid position deviation when picking up the copper column, so that the rotating picking unit 2 can compensate for the deviation when mounting the copper column; by taking pictures and detecting the two end faces of the copper column respectively, the overall integrity of the copper column is ensured to reduce the defective rate.

[0017] In this embodiment, the rotating picking unit 2 includes a z-axis reciprocating mechanism 5 and a picking mechanism 6; the z-axis reciprocating mechanism 5 can be a screw mechanism or a cylinder, etc.; the z-axis reciprocating mechanism 5 is provided with a mounting frame 61 for mounting the picking mechanism 6, and the z-axis reciprocating mechanism 5 drives the mounting frame 61 to move, thereby driving the picking mechanism 6 to move along the z-axis direction, so that the picking mechanism 6 can pick up the copper column placed by the copper column placing mechanism.

[0018] It can be understood that when the picking-up mechanism 6 picks up the copper column, the picking-up mechanism 6 picks up the copper column by contacting the first end surface (upper surface) of the copper column, and the copper column can be picked up by suction or grabbing.

[0019] Combination Figure 3 The picking mechanism 6 includes a rotating disk 62 and a power component 63, and a plurality of picking components 8 evenly distributed along the circumferential direction of the rotating disk 62, for picking up the copper column; the power component may be a motor; in this embodiment, the picking components 8 are evenly distributed on the outer side wall of the rotating disk 62 and extend outward, and the copper column is picked up by vacuum adsorption; the number of the picking components 8 can be adjusted as needed; Figure 4In this embodiment, there are 12 picking components 8, and the angle between adjacent picking components 8 is A; the power component 63 drives the rotating disk 62 to rotate A each time, so that the corresponding picking component 8 rotates to the picking position (perpendicular to the flexible loading unit) to adsorb and pick up the copper column.

[0020] Combination Figure 5 The picking component 8 includes a suction nozzle 81 and a guide component 82, wherein the guide component 82 may be a guide needle, and the guide component 82 is arranged on the protruding end of the suction nozzle 81 to match the hole in the middle of the copper column; the suction nozzle 81 is provided with a plurality of adsorption holes for adsorbing the copper column, and the adsorption holes may be distributed around the guide component 82; wherein, the guide component 82 is provided with a guide portion for guiding itself to be inserted into the hole in the middle of the copper column, which plays a guiding role; the suction nozzle 81 is provided with an elastic member 83, and the suction nozzle 81 can be telescopically moved along its own axial direction. In this embodiment, the elastic member 83 may be a spring to protect the picking component 8; the elastic member 83 may be sleeved on the outside of the suction nozzle 81, but is not limited to this.

[0021] In this embodiment, the second detection unit 4 is connected to the mounting frame 61, and the second detection unit 4 is located at the top of the picking mechanism 6. The rotating picking unit 2 drives the picked-up copper column to rotate, and the second detection unit 4 can take a picture of each of the picking components 8 passing thereunder, and detect the second end surface (lower surface) of the copper column picked up by the picking component 8.

[0022] The copper column placement mechanism includes a material tray 12 and a vibration device 13 supporting the material tray 12. The material tray 12 is located on one side of the discharge end of the material bin 11, and the material tray 12 is detachably connected to the top of the vibration device 13. The material tray 12 is provided with placement holes for placing the copper columns. The vibration device 13 drives the material tray 12 to vibrate, and the copper columns are placed in the placement holes.

[0023] The first detection unit 3 includes a bracket and a fixed plate, and a first camera assembly and a first light source are provided on the fixed plate; the fixed plate can adjust its position on the bracket to ensure that it corresponds to the flexible feeding unit; the second detection unit includes a connecting plate, and a second camera assembly and a second light source provided on the connecting plate.

[0024] In some embodiments, a rotary joint 7 is also included, and the rotary joint 7 is installed on the rotating pickup unit 2; the rotary joint 7 is used to connect the pickup component 8 with the vacuum generating device, and when the power component 63 drives the rotating disk 62 to rotate and pick up the copper column, the rotary joint 7 can ensure that the vacuum generating device continues to provide negative pressure vacuum for each pickup component 8; the rotary joint 7 can be an air slip ring.

[0025] The present application also provides a copper pillar detection method, which uses the above-mentioned copper pillar picking detection device and also includes the following steps: Loading: adding copper columns into the flexible loading unit 1; providing copper columns into the copper column placement mechanism through the silo 11.

[0026] Material placement: the flexible loading unit 1 places the copper columns so that the rotating picking unit 2 can pick up the copper columns; the copper column placing mechanism can place the copper columns in the placing holes on the material tray 12 so that the rotating picking unit 2 can pick up the copper columns in the placing holes.

[0027] First photo inspection: the first detection unit 3 takes a photo inspection of the first end face (upper surface) of the copper column placed by the flexible loading unit 1, and determines the position of the copper column to be picked up; the first detection unit 3 takes a photo of the copper column in the material tray 12, and then completes the integrity inspection of the first end face (upper surface) of the copper column, and determines the positions of the 12 copper columns on the material tray 12, so that the picking component 8 can pick them up one by one.

[0028] Picking up copper pillars: the rotating picking unit 2 picks up the copper pillars at determined positions in the flexible loading unit 1 in turn by rotating and moving the first end face (upper surface) of the adsorbed copper pillar; when picking up the copper pillars, the picking mechanism 6 is driven by the z-axis reciprocating mechanism 5 to move close to the material tray 12, the guide component 82 is inserted into the hole in the middle of the copper pillar, the corresponding copper pillar is adsorbed and picked up, and the picking mechanism 6 is driven away from the material tray 12 again, and the power component 63 drives the rotating disk 62 to rotate by an angle A to replace the next picking component 8 for picking up again.

[0029] Second photo inspection: The second inspection unit 4 takes photos of the second end surface of the copper column picked up by the rotating pickup unit 2. In the process of rotating and picking up the copper column, the second inspection unit 4 can take photos of the second end surface (lower surface) of the copper column picked up by each of the pickup components 8 passing thereunder, and inspect the integrity of the second end surface of the copper column, thereby realizing double-sided inspection of the copper column.

Claims

1. A copper column picking detection device, characterized in that: It includes a flexible loading unit and a first detection unit arranged on the top of the flexible loading unit, wherein the flexible loading unit is used to place the copper column; The first detection unit is used to take a photo of the first end surface of the copper column placed by the flexible loading unit and determine the position of the copper column on the flexible loading unit; A rotating pickup unit, which is disposed between the flexible feeding unit and the first detection unit, and can move in a horizontal plane and move along the z-axis direction to pick up the copper column on the flexible feeding unit; The second detection unit is used to take photos of the second end face of the copper column picked up by the rotating pickup unit and determine the position of the picked copper column on the rotating pickup unit; the second detection unit is provided on the rotating pickup unit.

2. The copper column pickup detection device according to claim 1, characterized in that: The rotary pickup unit comprises a z-axis reciprocating mechanism and a pickup mechanism. A mounting frame for mounting the pickup mechanism is provided on the z-axis reciprocating mechanism. The z-axis reciprocating mechanism is used to drive the pickup mechanism to move.

3. The copper column pickup detection device according to claim 2, characterized in that: The picking mechanism comprises a rotating disk and a power component. A plurality of picking components are circumferentially distributed on the side wall of the rotating disk. The power component is used to drive the rotating disk to rotate. The picking components pick up the copper column by vacuum adsorption.

4. The copper column pickup detection device according to claim 2, characterized in that: It also includes a rotary joint, which is installed on the rotary pick-up unit and is used to connect the rotary pick-up unit with a vacuum generating device.

5. The copper pillar pickup detection device according to claim 2, characterized in that: The second detection unit is connected to the mounting frame, and the second detection unit is located on the top of the picking mechanism.

6. The copper pillar pickup detection device according to claim 3, characterized in that: The pickup assembly comprises a suction nozzle and a guide component arranged at the protruding end of the suction nozzle. The suction nozzle is provided with a plurality of suction holes for adsorbing copper columns.

7. The copper pillar pickup detection device according to claim 6, characterized in that: An elastic piece is arranged on the suction nozzle, and the suction nozzle can be telescopically moved along its own axis.

8. A copper pillar detection method, characterized in that: The copper pillar pickup detection device according to any one of claims 1 to 7 further comprises the following steps: Loading: adding copper pillars into the flexible loading unit; Material placement: the flexible loading unit places the copper column so that the rotating picking unit can pick up the copper column; First photo detection: the first detection unit takes a photo to detect the first end surface of the copper column placed by the flexible feeding unit, and determines the position of the copper column to be picked up; Copper pillar picking: the rotating picking unit picks up the copper pillars determined by the first detection unit in sequence by rotating and moving; Second photo inspection: the rotating pickup unit flips the picked-up copper column, and when the copper column passes under the second inspection unit, the second inspection unit sequentially photographs and inspects the second end surface of the copper column picked up by the rotating pickup unit.

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