Plate-type bimodal inertial linear ultrasonic motor and operation method

Abstract

The invention relates to a plate-type bimodal inertial linear ultrasonic motor and an operation method, the plate-type bimodal inertial linear ultrasonic motor comprises a shell, a mobile platform is slidably connected to an opening at one side of the shell, and a mover is mounted at the bottom, opposite to the shell, of the mobile platform; the stator system comprises a stator base and a plurality of stator assemblies, the stator base is installed in the shell, the four side walls of the stator base are attached to the inner wall of the shell respectively, the stator assemblies are installed on the side, opposite to the rotor, of the stator base, each stator assembly comprises a stator and a piezoelectric ceramic piece, and the piezoelectric ceramic pieces are attached to the bottoms of stator tooth bases of the stators; the pre-pressure system is mounted on the other side of the stator seat and comprises a plurality of pre-pressure springs, a baffle and a pre-pressure bolt, the plurality of pre-pressure springs are sequentially stacked in a cavity on the other side of the stator seat, and the baffle covers an opening of the cavity; single-phase sawtooth wave voltage is applied to the piezoelectric ceramic piece, two bending modes with the frequency ratio of 1: 2 of the stator are excited, and the rotor is driven to move through asymmetric motion inertia of the stator after double-mode superposition. The overall structure is simple, single-phase circuit driving is achieved, the pre-pressure can be adjusted, and corresponding adjustment can be conducted according to different application scenes.

Description

Technical Field

[0001] The present invention relates to a plate-type dual-mode inertial linear ultrasonic motor and an operating method thereof, belonging to the technical field of ultrasonic motors. Background Art

[0002] Ultrasonic motor (also called "ultrasonic motor") is a piezoelectric motor that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into vibration energy of the ultrasonic motor stator, and then converts the vibration energy into rotation or linear motion of the moving parts through friction. Compared with traditional electromagnetic motors, ultrasonic motors have many characteristics and advantages, such as compact structure, low speed, fast response speed, power-off self-locking, good position and speed controllability, high resolution, no interference from external magnetic fields, quiet and noiseless, etc.

[0003] In ultrasonic motors, inertial ultrasonic motors are classified as a special type based on their unique driving principle. Unlike the elliptical motion of the stator of traditional ultrasonic motors, inertial ultrasonic motors rely on the asymmetric motion of the stator to drive the mover. The invention of piezoelectric inertial motors was first proposed at the first International Conference on Scanning Microscopy in 1986. After decades of research, this type of motor has developed rapidly. Inertial motors are usually divided into impact type and stick-slip type according to whether the stator slides. In particular, there are many studies on stick-slip motors. In the process of development, the main research on this type of motor focuses on how to increase the motion stroke of piezoelectric ceramic sheets. The solution is to provide different displacement amplification schemes. Based on the different amplification schemes, stick-slip motors are further refined into resonant and non-resonant types. Non-resonant is the current mainstream research direction of inertial motors. It achieves displacement amplification by stacking piezoelectric ceramics and special displacement amplification mechanisms. However, due to the capacitive characteristics of piezoelectric ceramic sheets and the existence of resonant modes in the amplification device, non-resonant motors cannot work under high-frequency voltages, so their moving speed will be limited. Therefore, resonant inertial motors provide new ideas for the development of inertial motors.

[0004] However, the existing resonant inertia motor has the following disadvantages: 1. Due to the filtering effect of resonance, two modes with a frequency of 1:2 of the stator need to be excited. Therefore, two sinusoidal voltages need to be applied to excite the modes, which puts higher requirements and loads on the motor drive device.

[0005] 2. The traditional resonant inertial piezoelectric actuator needs to excite two modes at the same time, and also requires two sets of piezoelectric ceramics that can excite the two modes. Therefore, it puts high requirements on the design complexity and production difficulty of piezoelectric ceramics.

[0006] 3. For the stator structure with a single drive foot, due to assembly errors and other reasons, the preload is precisely applied to the stator teeth, which inevitably leads to the generation of deflection torque. At the same time, the existing resonant inertial linear ultrasonic motors usually have fixed preload. Therefore, complex and precise clamping components are required to avoid the influence of torque on motor performance and stability, which undoubtedly makes the design and production of the motor more complicated, and has an adverse effect on the weight and processing difficulty of the motor.

[0007] Therefore, it is urgent to design a new inertial ultrasonic motor to fundamentally solve the above problems. Summary of the invention

[0008] The present invention provides a plate-type dual-mode inertial linear ultrasonic motor and an operating method to solve the above-mentioned problems.

[0009] The technical solution adopted by the present invention to solve its technical problem is: A plate-type dual-mode inertial linear ultrasonic motor comprises a housing, a three-dimensional coordinate system is established with the center of the housing as the origin, the long side direction thereof as the X axis, the short side direction as the Y axis, the plane formed by the X axis and the Y axis as the XOY plane, and the direction perpendicular to the XOY plane as the Z axis; The mobile platform is slidably connected to the opening on one side of the shell, the mobile platform is arranged parallel to the XOY plane, and the mobile platform can only move along the X-axis direction; the mover is installed along the X-axis direction at the bottom of the mobile platform opposite to the shell; The stator system includes a stator seat and a plurality of stator assemblies installed in parallel on the stator seat. The stator seat is installed in the housing, and its four side walls are respectively arranged in contact with the inner wall of the housing, and can only move along the Z-axis direction; the stator assembly is installed on the side of the stator seat opposite to the mover, and each stator assembly includes a stator and a piezoelectric ceramic sheet, the piezoelectric ceramic sheet is attached to the bottom of the stator tooth base of the stator, and a plurality of piezoelectric ceramic sheets are distributed along the X-axis direction; The pre-stress system is installed on the other side of the stator seat, and includes a plurality of pre-stress springs, a baffle plate and a pre-stress bolt. The plurality of pre-stress springs are sequentially stacked in the cavity on the other side of the stator seat along the Z-axis direction, and the baffle plate is covered on the cavity opening. The base is continuously covered on the baffle to close the opening on the other side of the shell, and the closed end is also parallel to the XOY plane; a threaded hole is opened at the center of the base, and the pre-stress bolt is screwed into the threaded hole; Furthermore, a set of slide rails are respectively installed along the long side direction at the bottom of the mobile platform, and slide grooves are respectively installed at the position of the shell relative to the mobile platform, and the slide rails and the slide grooves are matched to realize the sliding of the mobile platform relative to the shell; Furthermore, the mover is arranged in an I-shaped shape, and a groove for embedding the mover is provided at an opening on one side of the housing, and when the moving platform is connected to the housing, the mover is placed in the groove; Pasting friction material at the bottom of the relative groove of the mover, wherein the friction material is a rectangular thin sheet; Furthermore, the piezoelectric ceramic sheet is a rectangular piezoelectric ceramic sheet based on the d31 effect; the surface of each piezoelectric ceramic sheet is divided into two areas, and the two areas have different lengths in the X-axis direction; Furthermore, the stator assembly is provided in two groups, and the stators are arranged in parallel; Further, the stator is a metal matrix of a rectangular disc structure, including stator teeth, a stator tooth base, a flexible web and a fixed web, the stator teeth are arranged on the stator tooth base, and the fixed web is connected to the long side of the stator tooth base through the flexible web respectively, the cross-sectional thickness of the stator tooth base and the fixed web is different, and there is a drop in the cross-sectional thickness formed by the connection of the stator tooth base, the flexible web and the fixed web; Furthermore, the mobile platform, housing, base, stator seat, baffle and mover are all made of aluminum alloy; wherein the stator is made of phosphor bronze, the piezoelectric ceramic sheet is made of PZT-8 material, and the friction material is made of polyimide; The operation method of the plate-type dual-mode inertial linear ultrasonic motor is to set the polarization along the thickness direction of the piezoelectric ceramic sheet, and the polarization directions are opposite; A single-phase sawtooth voltage is applied to each piezoelectric ceramic plate, and the driving voltage is separated to form harmonic components that excite two different-order bending modes of the stator. Through modal superposition, asymmetric vibrations are generated at the contact end of the stator teeth, and the mover is driven by inertia to perform linear motion. The frequency ratio of the first two orders of the harmonic components is 1:2.

[0010] Through the above technical solution, compared with the prior art, the present invention has the following beneficial effects: 1. The plate-type dual-mode inertial linear ultrasonic motor provided by the present invention is designed by partitioning each piezoelectric ceramic sheet, and the partition lengths are designed to be different, so that the piezoelectric ceramic sheet can be excited in two working modes under a unidirectional voltage, and provides conditions for exciting the two working modes by a unidirectional sawtooth wave voltage; 2. The plate-type dual-mode inertial linear ultrasonic motor provided by the present invention adopts a dual-stator parallel structural design, which can not only effectively avoid the generation of interference torque caused by uneven pre-pressure loading, but also increase the output performance of the motor; 3. The plate-type dual-mode inertial linear ultrasonic motor provided by the present invention is provided with a pre-pressure system to ensure that the pre-pressure can act evenly on the stator teeth, thereby avoiding the deflection torque from affecting the motor performance and stability; 4. The operating method of the plate-type dual-mode inertial linear ultrasonic motor provided by the present invention applies a suitable sawtooth voltage to the piezoelectric ceramic, and the two-order harmonic components decomposed by the sawtooth wave respectively excite the two-order modes of the stator. Since only a single-phase voltage needs to be input, the requirements and load on the driver are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0012] Figure 1 It is a schematic diagram of the structure of the whole machine of the preferred embodiment provided by the present invention; Figure 2 It is an exploded schematic diagram of the structure of the whole machine according to the preferred embodiment provided by the present invention; Figure 3 It is a structural schematic diagram of a stator according to a preferred embodiment of the present invention; Figure 4 It is a schematic diagram of polarization distribution of piezoelectric ceramic sheets and corresponding sawtooth voltage excitation according to a preferred embodiment of the present invention; Figure 5 It is a working principle diagram of the polarization area of ​​a piezoelectric ceramic sheet in a preferred embodiment provided by the present invention; Figure 6 It is a schematic diagram of the vibration mode of the first-order working mode of the preferred embodiment provided by the present invention; Figure 7 It is a schematic diagram of the vibration shape of the second-order working mode of the preferred embodiment provided by the present invention.

[0013] In the figure: 1 is a stator assembly, 2 is a mover, 3 is a mobile platform, 4 is a housing, 5 is a friction material, 6 is a slide rail, 7 is a piezoelectric ceramic sheet, 8 is a stator seat, 9 is a pre-stress spring, 10 is a baffle, 11 is a base, 12 is a pre-stress bolt, 13 is a stator tooth, 14 is a stator tooth base, 15 is a flexible web, and 16 is a fixed web. DETAILED DESCRIPTION

[0014] The present invention will now be described in further detail with reference to the accompanying drawings. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "left side", "right side", "upper part", "lower part", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and "first", "second", etc. do not indicate the importance of the components, and therefore cannot be understood as a limitation on the present invention. The specific dimensions used in this embodiment are only for illustrating the technical solution by example, and do not limit the scope of protection of the present invention.

[0015] Resonant inertial motors are widely used due to their high energy conversion efficiency, simple and compact structure, fast response speed, and anti-electromagnetic interference performance. However, as explained in the background, in order to achieve resonance, the structure of the motor needs to be precisely designed and manufactured to ensure that its natural frequency matches the operating frequency. However, the current design and manufacture of resonant inertial motors cannot fully meet this high requirement. In addition, the preload of the current resonant inertial motor is fixed, the adjustment process is cumbersome, and the stator structure for a single drive foot causes the preload to be unable to accurately act on the mover teeth, generating a deflection torque.

[0016] Therefore, in order to overcome the above-mentioned difficulties, the present application provides a plate-type dual-mode inertial linear ultrasonic motor. Figure 1 As shown, there is a shell 4. For the convenience of description, a three-dimensional coordinate system is established with the center of the shell as the origin, the long side direction as the X-axis, the short side direction as the Y-axis, the plane formed by the X-axis and the Y-axis as the XOY plane, and the direction perpendicular to the XOY plane as the Z-axis.

[0017] The linear ultrasonic motor of the present application is exploded for analysis, such as Figure 2 As shown, there are several parts: a mobile platform 3, a mover 2, a stator system and a pre-pressure system. As for the mobile platform, it is slidably connected to the opening on one side of the shell. The mobile platform is arranged parallel to the XOY plane, and the mobile platform can only move along the X-axis direction. The mover is installed along the X-axis direction at the bottom of the mobile platform opposite to the shell. A set of slide rails 6 are installed along the long side direction at the bottom of the mobile platform, and slide grooves are installed at the position of the shell relative to the mobile platform. The slide rails match the slide grooves. That is to say, two sets of slide rails are fixed between the mobile platform and the shell by bolts, so that the mobile platform can only achieve single-phase sliding.

[0018] As for the mover, it is arranged in an I-shape, and a groove for embedding the mover is provided at an opening on one side of the shell. When the moving platform is connected to the shell, the long side portion of the mover along the X-axis direction is placed in the groove; a friction material 5 is pasted at the bottom of the groove relative to the mover, and the friction material is a rectangular thin sheet.

[0019] The following stator system and pre-pressure system are the more prominent innovations of this application. First, the stator system includes a stator seat 8 and a plurality of stator assemblies 1 installed in parallel on the stator seat. The stator seat is installed in the outer shell, and its four side walls are respectively arranged to fit the inner wall of the outer shell, that is, the stator seat is accurately sleeved inside the outer shell through the four surrounding surfaces, so that the stator can move along the Z-axis direction to ensure that the pre-pressure provided by the subsequent pre-pressure system can be accurately and stably perpendicular to the friction surface.

[0020] The stator assembly is installed on the side of the stator seat opposite to the mover. Each stator assembly includes a stator (plate-type stator) and a piezoelectric ceramic sheet 7. The piezoelectric ceramic sheet is pasted on the bottom of the stator tooth base 14 of the stator and completely overlaps with the bottom surface of the stator tooth base. Preferably, the present application sets two groups of stator assemblies, and the stators are arranged in parallel. The structural design of selecting two groups of stator assemblies and connecting them in parallel can not only effectively avoid the generation of interference torque caused by uneven pre-pressure loading, but also increase the output performance of the motor. When one group of stator assemblies has problems such as short circuit or open circuit, the other group can maintain the basic operation of the motor, avoid sudden shutdown of the entire system, and improve the reliability and availability of the system. Two groups are the most preferred, and more than two groups will increase the manufacturing cost.

[0021] Of course, the purpose of adopting a dual-stator parallel design is to eliminate the torque generated by pre-pressure under single-tooth contact, but when the working environment of the motor requires a larger output force, more stators can be connected in parallel to improve the overall output performance of the motor; by arranging multiple stators along the long side direction of the flexible web 15 and connecting piezoelectric ceramic sheets in parallel, the motor output performance can be enhanced.

[0022] The piezoelectric ceramic sheet pasted on the stator tooth base is a rectangular piezoelectric ceramic sheet based on the d31 effect. Through the d31 effect of the rectangular piezoelectric ceramic sheet, its expansion and contraction in the X-axis direction is realized. Since it is far away from the neutral layer of the stator tooth matrix, the bending deformation of the matrix is ​​stimulated, thereby more efficiently stimulating the bending mode of the stator. Unlike traditional drive devices, the rectangular piezoelectric ceramic sheet based on the d31 effect does not generate a magnetic field during operation, nor is it disturbed by the external magnetic field. It has good electromagnetic compatibility and can work stably and reliably in a strong electromagnetic environment or in equipment sensitive to electromagnetic interference. Figure 3 As shown, the stator is a metal matrix of rectangular disc structure, including stator teeth 13, stator tooth base, flexible web and fixed web 16. The stator teeth are arranged on the stator tooth base, and the fixed web is connected by flexible webs on the long sides of the stator tooth base. Among them, the cross-sectional thickness of the stator tooth base and the fixed web is different, and there is a drop in the cross-sectional thickness formed by the stator tooth base, the flexible web and the fixed web. The design of the cross-sectional thickness drop enables the stator component to play a vibration isolation role through the principle of cross-sectional area mutation. A plurality of through holes (corresponding to in the preferred embodiment) are opened on the fixed web. Figure 3 There are 4 through holes), and fixed constraints are imposed on the stator through the through holes.

[0023] In the present application, the surface of each piezoelectric ceramic sheet is divided into two areas, and the two areas have different lengths in the X-axis direction. For the connection system between the stator and the piezoelectric ceramic sheet, different modes correspond to different vibration types and frequencies. When the external excitation frequency matches a certain natural frequency (mode) of the piezoelectric ceramic sheet, the vibration of the mode will be excited. By setting areas of different lengths, multiple modes can be excited at the same time. The present application divides the surface of each piezoelectric ceramic sheet into two areas, ensuring that the piezoelectric ceramic sheet can excite two working modes under a unidirectional voltage, and provides conditions for exciting two working modes (i.e., dual-mode) by a unidirectional sawtooth voltage.

[0024] Regarding the prestress system, it is installed on the other side of the stator seat, including a number of prestress springs 9, a baffle 10 and a prestress bolt 12. The prestress springs are stacked in sequence along the Z-axis direction in the cavity on the other side of the stator seat, and the baffle is covered on the cavity opening to ensure that the prestress can act evenly; when the motor needs to adjust the prestress to adapt to different application scenarios, the prestress can be adjusted by rotating the prestress bolt to squeeze the baffle, or by increasing or decreasing the number of prestress springs or replacing prestress springs with different stiffnesses.

[0025] Finally, the base 11 is covered on the baffle to close the opening on the other side of the shell, and the closed end is also parallel to the XOY plane; a threaded hole is opened at the center of the base, and the pre-stress bolt is screwed into the threaded hole to complete the design of the entire system. The mobile platform, shell, base, stator seat, baffle and mover are all made of aluminum alloy; among them, the stator is made of phosphor bronze, the piezoelectric ceramic sheet is made of PZT-8 material, and the friction material is made of polyimide.

[0026] In addition to the above-mentioned structure, the plate-type dual-mode inertial linear ultrasonic motor also needs to be combined with a corresponding operating method to achieve the relevant purposes of this application. Specifically, the polarization is set along the thickness direction of the piezoelectric ceramic sheet, and the polarization direction is opposite; a single-phase sawtooth wave voltage is applied to each piezoelectric ceramic sheet, and the first two order harmonic components with a frequency ratio of 1:2 separated by the sawtooth wave are used to excite two different orders of bending modes of the stator respectively, and the contact end of the stator tooth produces asymmetric vibration through modal superposition, thereby inertially driving the linear motion of the mover.

[0027] like Figure 4 As shown in FIG. 1 , it is a diagram of polarization distribution and electric excitation scheme of piezoelectric ceramic sheets of a preferred embodiment provided by the present application. Here, it is necessary to combine the aforementioned structure with the principle of dividing the surface of each piezoelectric ceramic sheet into two regions with different lengths to explain, such as Figure 5As shown in the figure, it is a working principle diagram of the polarization area of ​​the piezoelectric ceramic piece. The piezoelectric ceramic piece is divided into two parts from the middle, one part is responsible for exciting the B30 mode, and the other part is responsible for exciting the B50 mode. Since the vibration form of the B30 mode only appears as half a wavelength on half of the stator, only one polarization area is required for effective excitation. In contrast, the B50 mode appears as a full wavelength on half of the stator, so two partitions are required to achieve the best excitation effect. On the piezoelectric ceramic piece that excites the B50 mode, the polarization area near the middle is consistent with the polarization direction of the piezoelectric ceramic piece that excites the B30 mode, so these two partitions can be set as one partition. Therefore, the entire piezoelectric ceramic piece only needs to set two polarization areas to simultaneously excite the B30 and B50 modes. The stator is grounded, and a sawtooth voltage is applied to the lower surface of the piezoelectric ceramic piece, thereby simultaneously exciting the stator to produce two-order bending vibrations.

[0028] This application provides relevant specific embodiments. Figure 6 As shown, it is a schematic diagram of the vibration mode of the first-order working mode provided, and its working mode is a vibration mode of the third-order bending vibration with a frequency of 33449 Hz; Figure 7 The figure shows the vibration mode diagram of the second-order working mode, whose working mode is the vibration mode of the fifth-order bending vibration with a frequency of 66876Hz; the frequency of the stator working mode is 1:2. By applying a sawtooth wave with a frequency close to 33449Hz to the piezoelectric ceramic, the two-order harmonic components with a frequency ratio of 1:2 respectively excite the two working modes, and the stator tooth contact end generates asymmetric vibration through mode superposition, thereby inertia driving the linear motion of the mover.

[0029] In summary, the plate-type dual-mode inertial linear ultrasonic motor provided in the present application has low manufacturing cost, simple processing technology, adjustable pre-pressure, high precision and short response time. When it is operated, only a single driving source needs to be controlled to drive and adjust the movement speed of the motor, and it can be widely used in precision instruments.

[0030] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless defined as herein.

[0031] The meaning of "and / or" described in this application means that the situations where each exists alone or both exist at the same time are included.

[0032] The term “connection” as used in this application may mean a direct connection between components or an indirect connection between components via other components.

[0033] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A plate-type dual-mode inertial linear ultrasonic motor, characterized in that: A three-dimensional coordinate system is established, including a shell, with the center of the shell as the origin, the long side direction thereof as the X axis, the short side direction as the Y axis, the plane formed by the X axis and the Y axis as the XOY plane, and the direction perpendicular to the XOY plane as the Z axis; The mobile platform is slidably connected to the opening on one side of the shell, the mobile platform is arranged parallel to the XOY plane, and the mobile platform can only move along the X-axis direction; the mover is installed along the X-axis direction at the bottom of the mobile platform opposite to the shell; The stator system includes a stator seat and a plurality of stator assemblies installed in parallel on the stator seat. The stator seat is installed in the housing, and its four side walls are respectively arranged in contact with the inner wall of the housing, and can only move along the Z-axis direction; the stator assembly is installed on the side of the stator seat opposite to the mover, and each stator assembly includes a stator and a piezoelectric ceramic sheet, the piezoelectric ceramic sheet is attached to the bottom of the stator tooth base of the stator, and a plurality of piezoelectric ceramic sheets are distributed along the X-axis direction; The pre-stress system is installed on the other side of the stator seat, and includes a plurality of pre-stress springs, a baffle plate and a pre-stress bolt. The plurality of pre-stress springs are sequentially stacked in the cavity on the other side of the stator seat along the Z-axis direction, and the baffle plate is covered on the cavity opening. The base is continuously covered on the baffle to close the opening on the other side of the shell, and the closed end is also parallel to the XOY plane; a threaded hole is opened at the center of the base, and a pre-stress bolt is screwed into the threaded hole.

2. The plate-type dual-mode inertial linear ultrasonic motor according to claim 1, characterized in that: A set of slide rails are respectively installed along the long side direction at the bottom of the mobile platform, and slide grooves are respectively installed at the position of the shell relative to the mobile platform. The slide rails and the slide grooves are matched to realize the sliding of the mobile platform relative to the shell.

3. The plate-type dual-mode inertial linear ultrasonic motor according to claim 2, characterized in that: The mover is arranged in an I-shaped shape, and a groove for embedding the mover is provided at an opening on one side of the housing. When the moving platform is connected to the housing, the mover is placed in the groove; The friction material is pasted on the bottom of the relative groove of the mover, and the friction material is a rectangular thin sheet.

4. The plate-type dual-mode inertial linear ultrasonic motor according to claim 1, characterized in that: The piezoelectric ceramic sheets are rectangular piezoelectric ceramic sheets based on the d31 effect; the surface of each piezoelectric ceramic sheet is divided into two areas, and the two areas have different lengths in the X-axis direction.

5. The plate-type dual-mode inertial linear ultrasonic motor according to claim 4, characterized in that: The stator components are provided in two groups, and the stators are arranged in parallel.

6. The plate-type dual-mode inertial linear ultrasonic motor according to claim 5, characterized in that: The stator is a metal matrix with a rectangular disc structure, including stator teeth, a stator tooth base, a flexible web and a fixed web. The stator teeth are arranged on the stator tooth base, and the fixed web is connected to the long side of the stator tooth base through the flexible web. The cross-sectional thickness of the stator tooth base and the fixed web is different, and there is a drop in the cross-sectional thickness formed by the connection of the stator tooth base, the flexible web and the fixed web.

7. The plate-type dual-mode inertial linear ultrasonic motor according to claim 1 or 3, characterized in that: The mobile platform, housing, base, stator seat, baffle and mover are all made of aluminum alloy; the stator is made of phosphor bronze, the piezoelectric ceramic sheet is made of PZT-8 material, and the friction material is made of polyimide.

8. The operating method of the plate-type dual-mode inertial linear ultrasonic motor according to any one of claims 1 to 6, characterized in that: The polarization is set along the thickness direction of the piezoelectric ceramic sheet, and the polarization directions are opposite; A single-phase sawtooth voltage is applied to each piezoelectric ceramic plate, and the driving voltage is separated to form harmonic components that excite two different-order bending modes of the stator. Through modal superposition, asymmetric vibrations are generated at the contact end of the stator teeth, and the mover is driven by inertia to perform linear motion. The frequency ratio of the first two orders of the harmonic components is 1:2.

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