Radio frequency power supply generator

Abstract

The invention provides a radio frequency power generator, and relates to the technical field of radio frequency. The radio frequency power generator is characterized in that a first input end of an inverter module is connected with a second output end of an oscillation module; the first output end of the inverter module is connected with the second input end of the oscillation module; the power output end of the voltage stabilizing circuit is connected with the power supply voltage input end of the phase inverter module; the power supply input end of the voltage stabilizing circuit inputs external direct-current voltage; the voltage stabilizing circuit generates a target direct-current voltage according to the external direct-current voltage and the sine wave reference amplitude, and inputs the target direct-current voltage into the power supply voltage input end; the oscillation module performs self-oscillation and generates an initial sine wave signal; and the inverter module amplifies the initial sine wave signal according to the target DC voltage, and inputs the amplified initial sine wave signal to the oscillation module, so that the signal output end of the oscillation module outputs a target sine wave signal. According to the invention, the convenience of amplitude adjustment of the radio frequency signal is improved.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and more specifically, to a radio frequency power generator. Background Art

[0002] In the prior art, many components used in RF power generator circuits, such as vacuum tubes and transformers, hinder the miniaturization of RF power generator circuits, and the frequency adjustment of the RF signal output by the existing RF power generator is achieved by changing the coil tap position of the transformer, and the change in the amplitude of the RF signal is obtained by applying different high voltages outside the push-pull output. When the RF circuit is actually applied, the applied high voltage needs to be adjusted on site so that the amplitude of the RF signal output by the RF power generator meets the current amplitude requirements on site. Therefore, the existing RF power generator is not convenient enough to adjust the amplitude of the RF signal. Summary of the invention

[0003] In view of this, the present invention provides a radio frequency power generator.

[0004] One aspect of the present invention provides a radio frequency power generator, comprising: a voltage stabilizing circuit and a self-excited oscillation circuit; the self-excited oscillation circuit comprises an oscillation module and an inverter module; the inverter module comprises a first input terminal, a first output terminal and a power supply voltage input terminal; the oscillation module comprises a second input terminal, a second output terminal and a signal output terminal; the first input terminal is connected to the second output terminal; the first output terminal is connected to the second input terminal; the voltage stabilizing circuit comprises a power supply input terminal and a power supply output terminal; the power supply output terminal is connected to the power supply voltage input terminal; the power supply input terminal is used to input an external DC voltage; the voltage stabilizing circuit is used to generate a target DC voltage according to the external DC voltage and a sine wave reference amplitude, and input the target DC voltage to the power supply voltage input terminal; the oscillation module is used to perform self-excited oscillation and generate an initial sinusoidal wave signal; the inverter module is used to amplify the initial sinusoidal wave signal according to the target DC voltage, and input the amplified initial sinusoidal wave signal to the oscillation module, so that the signal output terminal of the oscillation module outputs the target sinusoidal wave signal.

[0005] According to an embodiment of the present invention, the inverter module includes a first inverter unit and a second inverter unit; the first inverter unit includes a third input terminal, a third output terminal and a first power supply voltage input terminal; the second inverter unit includes a fourth input terminal, a fourth output terminal and a second power supply voltage input terminal; the power supply output terminal is respectively connected to the first power supply voltage input terminal and the second power supply voltage input terminal; the voltage stabilizing circuit provides the target DC voltage for the first power supply voltage input terminal and the second power supply voltage input terminal; the oscillation module includes a feedback unit and an oscillation network unit; the feedback unit includes a fifth input terminal, a fifth output terminal and a sixth output terminal; the oscillation network unit includes a sixth input terminal, a seventh input terminal, a seventh output terminal and an eighth output terminal; the third input terminal is connected to the fifth output terminal; the fourth input terminal is connected to the sixth output terminal; the third output terminal is connected to the sixth input terminal; the fourth output terminal is connected to the seventh input terminal; the seventh output terminal or The eighth output terminal is connected to the fifth input terminal; the oscillation network unit is used to self-oscillate to generate the initial sinusoidal wave signal, and input the initial sinusoidal wave signal into the feedback unit; the feedback unit is used to feed back the initial sinusoidal wave signal to the first inverter unit, and is also used to invert the initial sinusoidal wave signal by 180°, and feed back the inverted initial sinusoidal wave signal to the second inverter unit; the first inverter unit is used to amplify the initial sinusoidal wave signal according to the target DC voltage, and input the amplified initial sinusoidal wave signal to the oscillation module, so that the seventh output terminal outputs the first target sinusoidal wave signal; the second inverter unit is used to amplify the inverted initial sinusoidal wave signal according to the target DC voltage, and input the amplified inverted initial sinusoidal wave signal to the oscillation module, so that the eighth output terminal outputs the second target sinusoidal wave signal; the first target sinusoidal wave signal and the second target sinusoidal wave signal constitute the target sinusoidal wave signal.

[0006] According to an embodiment of the present invention, the above-mentioned oscillation network unit includes a first inductor, a second inductor and an adjustable capacitance circuit; one end of the above-mentioned first inductor is the sixth input end of the above-mentioned oscillation network unit; the other end of the above-mentioned first inductor is connected to one end of the above-mentioned adjustable capacitance circuit; one end of the above-mentioned second inductor is the seventh input end of the above-mentioned oscillation network unit; the other end of the above-mentioned second inductor is connected to the other end of the above-mentioned adjustable capacitance circuit; one end of the above-mentioned adjustable capacitance circuit is the seventh output end of the above-mentioned oscillation network unit; the other end of the above-mentioned adjustable capacitance circuit is the eighth output end of the above-mentioned oscillation network unit; according to the target capacitance value output by the above-mentioned adjustable capacitance circuit, the frequency of the sinusoidal wave signal output by the seventh output end and the eighth output end of the above-mentioned oscillation network unit is made to be the target frequency.

[0007] According to an embodiment of the present invention, the above-mentioned adjustable capacitor circuit includes a varactor circuit and an oscillation capacitor; the above-mentioned varactor circuit includes a varactor diode and a voltage regulating circuit; the above-mentioned oscillation capacitor is connected in parallel with the above-mentioned varactor diode; the above-mentioned voltage regulating circuit is connected to the above-mentioned varactor diode; the above-mentioned voltage regulating circuit is used to adjust the voltage across the above-mentioned varactor diode so that the above-mentioned varactor diode outputs a preset capacitance value; wherein the sum of the above-mentioned preset capacitance value and the capacitance value of the above-mentioned oscillation capacitor is the above-mentioned target capacitance value.

[0008] According to an embodiment of the present invention, the feedback unit includes a feedback capacitor, a feedback resistor, a feedback oscillator and a feedback inverter; the feedback oscillator includes an odd number of inverters connected in series; the seventh output terminal or the eighth output terminal of the oscillation network unit is connected to one end of the feedback capacitor; the other end of the feedback capacitor is connected to one end of the feedback resistor; the other end of the feedback capacitor is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor; the connection point between the other end of the feedback oscillator and the other end of the feedback resistor serves as the fifth output terminal of the feedback unit; the fifth output terminal is connected to the input terminal of the feedback inverter; the output terminal of the feedback inverter serves as the sixth output terminal of the feedback unit.

[0009] According to an embodiment of the present invention, both the first inverter unit and the second inverter unit are complementary metal oxide semiconductor inverters.

[0010] According to an embodiment of the present invention, the complementary metal oxide semiconductor inverter includes a PNP type transistor, an NPN type transistor, a first diode, a second diode and a capacitor; the emitter of the PNP type transistor is connected to the cathode of the first diode; the cathode of the first diode is connected to the positive electrode of the power output end of the voltage stabilizing circuit; the cathode of the first diode is connected to the base of the PNP type transistor; the base of the PNP type transistor is connected to one end of the capacitor; the other end of the capacitor is connected to the base of the NPN type transistor; the collector of the PNP type transistor is connected to the collector of the NPN type transistor; the base of the NPN type transistor is respectively connected to the cathode of the second diode and the fifth output end; the anode of the second diode is connected to the emitter of the NPN type transistor; the emitter of the NPN type transistor is connected to the negative electrode of the power output end of the voltage stabilizing circuit.

[0011] According to an embodiment of the present invention, the voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module; the voltage stabilizing circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the signal output terminal of the oscillation module, and obtain a DC reference voltage according to a voltage regulation algorithm based on the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and output a target DC voltage based on the DC reference voltage and the external DC voltage.

[0012] According to an embodiment of the present invention, the voltage stabilizing circuit includes a reference voltage output circuit and a series voltage stabilizing circuit; the output end of the reference voltage output circuit is connected to the input end of the series voltage stabilizing circuit; the input end of the reference voltage output circuit is connected to the signal output end of the oscillation module; the reference voltage output circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the oscillation module, and output a DC reference voltage according to a voltage regulation algorithm based on the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and input the DC reference voltage into the series voltage stabilizing circuit; the series voltage stabilizing circuit includes an external voltage input end and a reference voltage input end; the external voltage input end is connected to a power supply; the reference voltage input end is connected to the output end of the reference voltage output circuit; the output end of the series voltage stabilizing circuit is connected to the power supply voltage input end of the inverter module; the series voltage stabilizing circuit is used to provide a target DC voltage to the inverter module based on the DC reference voltage and the external DC voltage output by the power supply.

[0013] According to an embodiment of the present invention, the reference voltage output circuit includes a voltage conditioning circuit, a control circuit and an adjustable potentiometer; the input end of the voltage conditioning circuit is connected to the signal output end of the oscillation module; the output end of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is used to collect the amplitude of the initial sinusoidal wave signal, and input the amplitude of the initial sinusoidal wave signal to the control circuit; the control circuit is connected to the adjustable potentiometer; the control circuit is used to generate a control signal according to the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and send the control signal to the adjustable potentiometer; the adjustable potentiometer outputs the DC reference voltage according to the control signal.

[0014] According to an embodiment of the present invention, a voltage stabilizing circuit generates a target DC voltage based on an external DC voltage inputted from a power input terminal and a reference amplitude of a sine wave, and directly inputs the target DC voltage into a power supply voltage input terminal of an inverter module, thereby directly adjusting the power supply voltage of the inverter module through the voltage stabilizing circuit, thereby achieving an effect of amplifying the amplitude of an initial sinusoidal wave signal outputted by an oscillation module, thereby improving the convenience of adjusting the amplitude of the RF signal, and thus at least partially overcoming the technical problem in the prior art of inconvenient use of an RF power generator caused by adjusting the amplitude of the RF signal by adjusting the high voltage applied by a push-pull output. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0016] Figure 1 A schematic structural diagram of a radio frequency power generator according to an embodiment of the present invention is shown.

[0017] Figure 2 A schematic structural diagram of a radio frequency power generator according to another embodiment of the present invention is shown.

[0018] Figure 3 A schematic structural diagram of an oscillating network unit according to an embodiment of the present invention is shown.

[0019] Figure 4 A schematic structural diagram of an adjustable capacitor circuit according to an embodiment of the present invention is shown.

[0020] Figure 5 A structural schematic diagram of a feedback unit according to an embodiment of the present invention is shown.

[0021] Figure 6 A schematic structural diagram of a self-excited oscillation circuit according to another embodiment of the present invention is shown.

[0022] Figure 7 A schematic structural diagram of a radio frequency power generator according to yet another embodiment of the present invention is shown.

[0023] Figure 8 A schematic structural diagram of a voltage conditioning circuit according to an embodiment of the present invention is shown.

[0024] Fig. 9 The structure block diagram of the series voltage stabilization circuit according to an embodiment of the present invention is shown.

[0025] Fig. 10A A schematic diagram showing the principle of a self-excited oscillation circuit according to yet another embodiment of the present invention is shown.

[0026] Fig. 10BFIG. 4 is a waveform diagram showing measurement points of a self-excited oscillation circuit according to yet another embodiment of the present invention.

[0027] Fig.11 A flow chart of a method for controlling a radio frequency power generator according to an embodiment of the present invention is shown.

[0028] Fig. 12A A performance test comparison diagram of output voltages of different inverters under different power supply voltages according to an embodiment of the present invention is shown.

[0029] Fig. 12B A schematic diagram showing a comparison of starting voltage performance tests of different inverters at different supply voltages according to an embodiment of the present invention is shown.

[0030] Fig. 12C A schematic diagram showing comparison of current values ​​of different inverters under the same supply voltage according to an embodiment of the present invention is shown.

[0031] Fig.12D A schematic diagram showing power comparison of different inverters under the same supply voltage according to an embodiment of the present invention is shown.

[0032] Fig.13 A stability test result diagram of a radio frequency power generator according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0033] Below, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of concepts of the present invention.

[0034] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0035] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0036] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0037] In the embodiments of the present invention, the collection, updating, analysis, processing, use, transmission, provision, disclosure, storage and other aspects of the data involved (for example, including but not limited to user personal information) are in compliance with the provisions of relevant laws and regulations, are used for legitimate purposes, and do not violate public order and good morals. In particular, necessary measures are taken for user personal information to prevent illegal access to user personal information data and maintain the security of user personal information and network security.

[0038] In the embodiment of the present invention, before obtaining or collecting the user's personal information, the user's authorization or consent is obtained.

[0039] Figure 1 A schematic structural diagram of a radio frequency power generator according to an embodiment of the present invention is shown.

[0040] like Figure 1 As shown, the RF power generator includes: a voltage stabilizing circuit and a self-excited oscillation circuit. The self-excited oscillation circuit includes an oscillation module and an inverter module. The inverter module includes a first input terminal 102, a first output terminal 107 and a power supply voltage input terminal 104; the oscillation module includes a second input terminal 108, a second output terminal 101 and a signal output terminal 103; the first input terminal 102 is connected to the second output terminal 101; the first output terminal 107 is connected to the second input terminal 108.

[0041] The voltage stabilizing circuit includes a power input terminal 106 and a power output terminal 105; the power output terminal 105 is connected to the power supply voltage input terminal 104; the power input terminal 106 is used to input an external DC voltage; the voltage stabilizing circuit is used to generate a target DC voltage based on the external DC voltage and the sinusoidal wave reference amplitude, and input the target DC voltage into the power supply voltage input terminal 104.

[0042] The oscillation module is used to perform self-excited oscillation and generate an initial sinusoidal wave signal. The inverter module is used to amplify the initial sinusoidal wave signal according to the target DC voltage and input the amplified initial sinusoidal wave signal to the oscillation module so that the signal output terminal 103 of the oscillation module outputs the target sinusoidal wave signal.

[0043] According to an embodiment of the present invention, a first correspondence between the sine wave reference amplitude and the target DC voltage output by the voltage stabilizing circuit can be obtained through multiple tests, and a second correspondence between the target DC voltage and the amplitude of the target sine wave signal can be obtained. The first correspondence and the second correspondence can be corresponding curves, corresponding tables or piecewise functions, so that the correspondence between the sine wave reference amplitude and the amplitude of the target sine wave signal can be obtained. By inputting a sine wave reference amplitude corresponding to the amplitude of the target sine wave signal, the signal output terminal 103 of the oscillation module outputs the target sine wave signal.

[0044] According to an embodiment of the present invention, the voltage stabilizing circuit generates a target DC voltage based on the external DC voltage input from the power input terminal 106 and the reference amplitude of the sine wave, and directly inputs the target DC voltage into the power supply voltage input terminal 104 of the inverter module, thereby directly adjusting the power supply voltage of the inverter module through the voltage stabilizing circuit, thereby achieving the effect of amplifying the amplitude of the initial sinusoidal wave signal output by the oscillation module, thereby at least partially overcoming the technical problem that the high voltage applied to the push-pull output is not convenient enough to obtain in the actual RF circuit application site, thereby improving the convenience of adjusting the amplitude of the RF signal.

[0045] Figure 2 A schematic structural diagram of a radio frequency power generator according to another embodiment of the present invention is shown.

[0046] like Figure 2 As shown, the inverter module includes a first inverter unit and a second inverter unit; the first inverter unit includes a third input terminal 203, a third output terminal 209 and a first power supply voltage input terminal 201; the second inverter unit includes a fourth input terminal 210, a fourth output terminal 211 and a second power supply voltage input terminal 202. The power supply output terminal 105 is connected to the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202 respectively; the voltage stabilizing circuit provides a target DC voltage for the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202.

[0047] The oscillation module includes a feedback unit and an oscillation network unit; the feedback unit includes a fifth input terminal 206, a fifth output terminal 207 and a sixth output terminal 204; the oscillation network unit includes a sixth input terminal 208, a seventh input terminal 212, a seventh output terminal 205 and an eighth output terminal 213. The third input terminal 203 is connected to the fifth output terminal 207; the fourth input terminal 210 is connected to the sixth output terminal 204; the third output terminal 209 is connected to the sixth input terminal 208; the fourth output terminal 211 is connected to the seventh input terminal 212; and the seventh output terminal 205 is connected to the fifth input terminal 206. It is also possible to select that the seventh output terminal 205 is not connected to the fifth input terminal 206, but the eighth output terminal 213 is connected to the fifth input terminal 206, that is, the seventh output terminal 205 or the eighth output terminal 213 is connected to the fifth input terminal 206. The voltage stabilizing circuit generates a target DC voltage according to the external DC voltage input from the power input terminal 106 and the sine wave reference amplitude. The target DC voltage is output from the power output terminal 105 and input to the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202 respectively.

[0048] The oscillation network unit is used for self-excited oscillation to generate an initial sinusoidal wave signal, and input the initial sinusoidal wave signal into the feedback unit; the feedback unit is used for feeding back the initial sinusoidal wave signal to the first inverter unit, and is also used for inverting the initial sinusoidal wave signal by 180°, and feeding back the inverted initial sinusoidal wave signal to the second inverter unit.

[0049] The first inverter unit is used to amplify the initial sine wave signal according to the target DC voltage, and input the amplified initial sine wave signal to the oscillation module, so that the seventh output terminal 205 outputs the first target sine wave signal; the second inverter unit is used to amplify the inverted initial sine wave signal according to the target DC voltage, and input the amplified inverted initial sine wave signal to the oscillation module, so that the eighth output terminal 213 outputs the second target sine wave signal; the first target sine wave signal and the second target sine wave signal constitute the target sine wave signal.

[0050] According to an embodiment of the present invention, a target DC voltage is provided to the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202 respectively through a voltage stabilizing circuit, and the magnitude of the output current is increased through the first inverter unit and the second inverter unit. Since the first inverter unit and the second inverter unit have the same structure, when wiring on a PCB (Printed Circuit Board), the two paths are distributed symmetrically as much as possible to obtain a larger flyback voltage, and impedance matching is not required.

[0051] like Figure 1 and Figure 2As shown, the signal output terminal includes a seventh output terminal 205 and an eighth output terminal 213. The seventh output terminal 205 can be connected to the fifth input terminal 206. There is another connection mode, the seventh output terminal 205 is not connected to the fifth input terminal 206 but the eighth output terminal 213 is connected to the fifth input terminal 206. The second output terminal 101 includes a sixth output terminal 204 and a fifth output terminal 207. The second input terminal 108 includes a sixth input terminal 208 and a seventh input terminal 212. The first input terminal 102 includes a third input terminal 203 and a fourth input terminal 210. The first output terminal 107 includes a third output terminal 209 and a fourth output terminal 211. The power supply voltage input terminal 104 includes a first power supply voltage input terminal 201 and a second power supply voltage input terminal 202.

[0052] According to the embodiment of the present invention, the feedback unit outputs the amplified initial sinusoidal wave signal and the inverted initial sinusoidal wave signal, so that two sinusoidal wave signals with equal amplitudes but a phase difference of 180 degrees can be obtained.

[0053] Figure 3 A schematic structural diagram of an oscillating network unit according to an embodiment of the present invention is shown.

[0054] like Figure 3 As shown, the oscillation network unit includes a first inductor 301, a second inductor 302 and an adjustable capacitor circuit; one end of the first inductor 301 is the sixth input terminal 208 of the oscillation network unit; the other end of the first inductor 301 is connected to one end of the adjustable capacitor circuit; one end of the second inductor 302 is the seventh input terminal 212 of the oscillation network unit; the other end of the second inductor 302 is connected to the other end of the adjustable capacitor circuit; one end of the adjustable capacitor circuit is the seventh output terminal 205 of the oscillation network unit; the other end of the adjustable capacitor circuit is the eighth output terminal 213 of the oscillation network unit; according to the target capacitance value output by the adjustable capacitor circuit, the frequency of the sinusoidal wave signal output by the seventh output terminal 205 and the eighth output terminal 213 of the oscillation network unit is the target frequency.

[0055] According to an embodiment of the present invention, the oscillation network unit may be an LCL circuit, wherein L represents an inductor, C represents a capacitor, and the LCL circuit is composed of two inductors and one capacitor. The capacitor in the LCL circuit is adjustable in capacitance, and a target sinusoidal wave signal of a preset frequency can be obtained according to different capacitances and the inductances of the first inductor 301 and the second inductor 302. Further, the capacitor in the LCL circuit may select an adjustable capacitor with a suitable capacitance, and the first inductor 301 and the second inductor 302 with a suitable inductance according to actual application needs, so as to obtain a target sinusoidal wave signal of a preset frequency.

[0056] Figure 4 A schematic structural diagram of an adjustable capacitor circuit according to an embodiment of the present invention is shown.

[0057] like Figure 4 As shown, the adjustable capacitor circuit includes a varactor circuit and an oscillating capacitor 401; the varactor circuit includes a varactor diode and a voltage regulating circuit; the oscillating capacitor 401 is connected in parallel with the varactor diode; the voltage regulating circuit is connected to the varactor diode; the voltage regulating circuit is used to adjust the voltage across the varactor diode so that the varactor diode outputs a preset capacitance value; wherein the sum of the preset capacitance value and the capacitance value of the oscillating capacitor 401 is the target capacitance value.

[0058] According to an embodiment of the present invention, one end of the oscillation capacitor is one end of the adjustable capacitance circuit, serving as the seventh output terminal 205 of the oscillation network unit, and the other end of the oscillation capacitor is the other end of the adjustable capacitance circuit, serving as the eighth output terminal 213 of the oscillation network unit. The output capacitance of the adjustable capacitance circuit can be adjusted by directly changing the capacitance of the varactor diode to complete the tuning of the frequency of the sinusoidal wave signal output by the self-excited oscillation circuit, so that the frequency of the sinusoidal wave signal is the frequency of the target sinusoidal wave signal. The voltage regulating circuit enables the varactor diode to operate in a reverse bias state.

[0059] Figure 5 A structural schematic diagram of a feedback unit according to an embodiment of the present invention is shown.

[0060] like Figure 5 As shown, the feedback unit includes a feedback capacitor 501, a feedback resistor 502, a feedback oscillator and a feedback inverter; the feedback oscillator includes an odd number of inverters connected in series; the seventh output terminal or the eighth output terminal of the oscillation network unit is connected to one end of the feedback capacitor 501; one end of the feedback capacitor 501 is the fifth input terminal 206; the other end of the feedback capacitor 501 is connected to one end of the feedback resistor 502; the other end of the feedback capacitor 501 is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor 502; the connection point between the other end of the feedback oscillator and the other end of the feedback resistor 502 serves as the fifth output terminal 207 of the feedback unit; the fifth output terminal 207 is connected to the input end of the feedback inverter; the output end of the feedback inverter serves as the sixth output terminal 204 of the feedback unit.

[0061] According to an embodiment of the present invention, the feedback inverter may be composed of one inverter or more than one odd number of inverters connected in series. The feedback oscillator may be selected to be obtained by connecting three inverters in series.

[0062] Figure 6 A schematic structural diagram of a self-excited oscillation circuit according to another embodiment of the present invention is shown.

[0063] like Figure 6As shown, the first inverter unit 601 and the second inverter unit 602 are both CMOS (Complementary Metal Oxide Semiconductor) inverters. Taking the first inverter unit 601 as an example, the CMOS inverter includes a PNP-type transistor 6011, an NPN-type transistor 6012, a first diode 6013, a second diode 6015 and a capacitor 6014; the emitter of the PNP-type transistor 6011 is connected to the cathode of the first diode 6013; the cathode of the first diode 6013 is connected to the positive electrode of the power supply output end of the voltage stabilizing circuit; the anode of the first diode 6013 is connected to the base of the PNP-type transistor 6011; the base ... base of the PNP-type transistor The first output terminal of the second inverter unit 602 is connected to the cathode of the second diode 6015 and the fifth output terminal; the anode of the second diode 6015 is connected to the emitter of the NPN transistor 6012; the emitter of the NPN transistor 6012 is connected to the negative electrode of the power supply output terminal of the voltage stabilizing circuit. The second inverter unit 602 is also a CMOS inverter, which will not be described in detail here.

[0064] According to an embodiment of the present invention, the PNP transistor in the CMOS inverter can be replaced by a PMOS transistor (P-channel Metal-Oxide-Semiconductor Field-Effect Transistor), and the NPN transistor can be replaced by an NMOS transistor (N-channel Metal-Oxide-Semiconductor Field-Effect Transistor). Taking the first inverter unit 601 as an example, the PNP transistor 6011 in the CMOS inverter is replaced by a PMOS transistor, and the NPN transistor 6012 is replaced by an NMOS transistor. The connection mode after replacement can be: the source of the PMOS tube is connected to the cathode of the first diode 6013; the cathode of the first diode 6013 is connected to the positive electrode of the power output terminal of the voltage stabilizing circuit; the anode of the first diode 6013 is connected to the gate of the PMOS tube; the gate of the PMOS tube is connected to one end of the capacitor 6014; the other end of the capacitor 6014 is connected to the gate of the NMOS tube; the drain of the PMOS tube is connected to the drain of the NMOS tube; the gate of the NMOS tube is respectively connected to the cathode of the second diode 6015 and the fifth output terminal; the anode of the second diode 6015 is connected to the source of the NMOS tube; the source of the NMOS tube is connected to the negative electrode of the power output terminal of the voltage stabilizing circuit. The second inverter unit 602 is also a CMOS inverter, which will not be repeated here.

[0065] According to an embodiment of the present invention, the CMOS inverter amplifies the input current. Figure 6 As shown, the first inverter unit 601 amplifies the current output by the feedback oscillator 603, and the second inverter unit 602 amplifies the current output by the feedback inverter 606. The threshold current of the CMOS inverter can be adjusted by the feedback resistor 605. In order to maximize the induced flyback voltage, the current passing through the first inductor 601 and the second inductor 302 is as large as possible and switched as quickly as possible. Therefore, the output of the feedback oscillator 603 is fed to the first inverter unit 601, and the output of the feedback oscillator 603 is fed to the second inverter unit 602 through the feedback inverter 606, and the first inverter unit 601 and the second inverter unit 602 amplify the current. In addition, when one end of the feedback capacitor 604 is connected to the eighth output terminal 213, in order to drive the seventh output terminal 205 of the oscillation network unit that is not sampled by the feedback capacitor 604, the signal of the fifth output terminal of the feedback unit is inverted by 180 degrees through an additional feedback inverter 606 to drive the second inverter unit 602.

[0066] According to an embodiment of the present invention, Figure 2 , Figure 3 and Figure 6 As shown, taking the CMOS inverter including a PNP transistor 6011 and an NPN transistor 6012 as an example, the third output terminal is connected to the sixth input terminal, the sixth input terminal is one end of the first inductor 301, the third output terminal is the connection point between the collector of the PNP transistor 6011 in the first inverter unit and the collector of the NPN transistor 6012; the fourth output terminal is the connection point between the collector of the PNP transistor and the collector of the NPN transistor in the second inverter unit; the seventh input terminal is one end of the second inductor 302. The third input terminal is the connection point between the base of the NPN transistor 6012 in the first inverter unit 601, the cathode of the second diode 6015 and the other end of the capacitor 6014; the fourth input terminal is the connection point between the base of the NPN transistor 6012 in the second inverter unit 602, the cathode of the second diode 6015 and the other end of the capacitor 6014. When the PNP transistor in the CMOS inverter is replaced by a PMOS transistor, and the NPN transistor is replaced by an NMOS transistor, the connection relationship is modified accordingly and will not be described in detail.

[0067] According to an embodiment of the present invention, the voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module; the voltage stabilizing circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the signal output terminal of the oscillation module, and obtain a DC reference voltage according to the voltage regulation algorithm based on the difference between the sine wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and output a target DC voltage based on the DC reference voltage and the external DC voltage. The signal output terminal of the oscillation module includes a seventh output terminal 205 and an eighth output terminal 213, and the feedback input terminal is connected to the seventh output terminal 205 or the eighth output terminal 213.

[0068] According to an embodiment of the present invention, when the voltage stabilizing circuit collects the signal output by the signal output end of the oscillation module as a feedback signal, the sine wave reference amplitude can be used as the preset amplitude of the target sine wave signal. By means of feedback, the signal output end of the oscillation module outputs the target sine wave signal, and the voltage regulation algorithm can adopt a PID (Proportional-Integral-Derivative) algorithm.

[0069] Figure 7 A schematic structural diagram of a radio frequency power generator according to yet another embodiment of the present invention is shown.

[0070] like Figure 7As shown, the voltage stabilizing circuit includes a reference voltage output circuit and a series voltage stabilizing circuit; the output end of the reference voltage output circuit is connected to the input end of the series voltage stabilizing circuit; the input end of the reference voltage output circuit is connected to the signal output end of the oscillation module; the reference voltage output circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the oscillation module, and output a DC reference voltage according to the voltage regulation algorithm based on the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and input the DC reference voltage into the series voltage stabilizing circuit; the series voltage stabilizing circuit includes an external voltage input end and a reference voltage input end; the external voltage input end is connected to the power supply; the reference voltage input end is connected to the output end of the reference voltage output circuit; the output end of the series voltage stabilizing circuit is connected to the power supply voltage input end of the inverter module in the self-excited oscillation circuit; the series voltage stabilizing circuit is used to provide a target DC voltage to the inverter module based on the DC reference voltage and the external DC voltage output by the power supply. The RF power generator also includes a display circuit; the display circuit is connected to the control circuit; the display circuit is used to display the performance indicators of the RF power generator in real time; optionally, the display circuit is used to display preset parameters; the preset parameters at least include a sine wave reference amplitude, an amplitude and a frequency of an initial sine wave signal.

[0071] According to an embodiment of the present invention, a reference voltage output circuit includes a voltage conditioning circuit, a control circuit and an adjustable potentiometer; the input end of the voltage conditioning circuit is connected to the signal output end of the oscillation module; the output end of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is used to collect the amplitude of the initial sinusoidal wave signal, and input the amplitude of the initial sinusoidal wave signal to the control circuit; the control circuit is connected to the adjustable potentiometer; the control circuit is used to generate a control signal according to the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and send the control signal to the adjustable potentiometer; the adjustable potentiometer outputs a DC reference voltage according to the control signal.

[0072] According to an embodiment of the present invention, the control circuit includes a controller and an input circuit; for example, the control circuit includes a microprocessor and an input circuit, the controller is connected to the output end of the voltage conditioning circuit; the controller is also connected to the input end of the adjustable potentiometer; the controller is also connected to the output end of the input circuit; the input circuit is used to input a sine wave reference amplitude to the controller; the controller is used to generate a control signal based on the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the adjustable potentiometer.

[0073] According to an embodiment of the present invention, the adjustable potentiometer can be a digital potentiometer; the controller can be a microprocessor; the input circuit can input the sine wave reference amplitude to the microprocessor by pressing a button, or can input the sine wave reference amplitude to the microprocessor by connecting via Bluetooth, or can communicate with the microprocessor via UART (Universal Asynchronous Receiver / Transmitter). The input circuit can be a readable and writable device, including but not limited to a mobile phone, a computer, and other devices or devices that input through a button. The sine wave reference amplitude is controlled by the microprocessor serial port to adjust the voltage of the sine wave signal output by the signal output end of the oscillation module, so that the signal output end of the oscillation module outputs the final target sine wave signal. The voltage conditioning circuit converts the signal to be collected into a stable signal with an amplitude within the range that the microprocessor can collect, so as to facilitate ADC (Analog to Digital Converter) sampling and processing, and detect and display the waveform in real time.

[0074] According to an embodiment of the present invention, an external DC power supply is connected to a series adjustable circuit, a voltage of a corresponding proportion is output, and the voltage is provided to the inverter module for power supply. A balanced state is quickly established through a feedback unit and the inverter module to output a radio frequency signal with the same amplitude and opposite phase, and the amplitude of the radio frequency signal is adjusted by communicating with a microprocessor through a key or a Bluetooth serial port, and the resonant frequency of the radio frequency signal is changed by changing the reverse voltage applied to the varactor diode. The performance indicators of the dual-channel radio frequency power supply are displayed in real time through the microprocessor ADC acquisition and processing.

[0075] Figure 8 A schematic structural diagram of a voltage conditioning circuit according to an embodiment of the present invention is shown.

[0076] like Figure 8As shown, the voltage conditioning circuit includes a peak detection circuit and a voltage adjustment circuit; the peak detection circuit is to detect the peak value of the RF power generator. By using the charging and discharging of the detection capacitor 803, during a period of time in the positive half cycle of the AC signal, the detection diode 802 is equivalent to a short circuit, and the positive half cycle of the AC signal is directly added to the detection capacitor 803 for charging, and the voltage on the detection capacitor 803 will soon reach the peak value of the AC signal. After reaching the peak value, since the AC signal voltage begins to decrease, the voltage on the detection resistor 801 cannot be maintained, and the detection capacitor 803 begins to discharge to the detection resistor 801, and the discharge process is very slow. In the negative half cycle of the AC signal, since the detection diode 802 is cut off, the voltage of the detection capacitor 803 cannot change suddenly, so a part of the voltage is still maintained on the detection capacitor 803. In order to make the output close to a straight line (small ripple voltage), the discharge speed must be very slow. Since the discharge time constant T=RC, where R is the resistance value of the detection resistor; C is the capacitance value of the detection capacitor, a large detection resistor 801 must be selected to ensure a very slow discharge speed. The process is to charge to the peak value first, then discharge a small amount, then quickly charge to the peak value again, and discharge a small amount again. At the same time, in order to avoid the influence of subsequent circuits on the peak detection circuit, a voltage follower is added as isolation between the peak detection circuit and the voltage adjustment circuit to improve the circuit's anti-interference ability.

[0077] According to an embodiment of the present invention, the external input voltage of the series voltage regulator circuit is 12V, and the adjustable voltage range is 0V-10V. The communication between the microprocessor and the digital potentiometer is carried out through the SPI (Serial Peripheral Interface‌, serial peripheral interface) protocol to change the input voltage applied to the power supply voltage input terminal of the first inverter unit and the second inverter unit, thereby changing the output current of the first inverter unit and the second inverter unit, and generating resonance through the subsequent oscillation module. The peak-to-peak voltage of the resonance is converted and collected by the voltage conditioning circuit and displayed in real time.

[0078] According to an embodiment of the present invention, the voltage adjustment circuit converts the parameter data collected by the peak detection circuit into data that can be processed by the microprocessor I / O (Input / Output) port through ADC sampling, and sends it to the microprocessor I / O port for processing; the microprocessor processes the parameter data, including: determining the value of the preset parameter according to the parameter data, and displaying it in real time to the OLED (Organic Electroluminescence Display) of the display circuit through the IIC (Inter-Integrated Circuit) protocol. For example, the performance indicators of the RF power generator include the voltage magnitude of the power supply voltage Vs of the inverter module, ranging from 0V-10V, in volts; the unit of the current magnitude in the self-excited oscillation circuit is mA, milliamperes; the peak-to-peak value of the RF signal.

[0079] According to an embodiment of the present invention, the radio frequency power generator may further include a protection circuit with output short circuit and overcurrent.

[0080] Fig. 9 The structure block diagram of the series voltage stabilization circuit according to an embodiment of the present invention is shown.

[0081] like Fig. 9 As shown in the figure, the series voltage regulator circuit consists of an adjustment tube, a comparator, a sampling circuit, and a filter circuit. The DC reference voltage Vref is changed by a digital potentiometer. When the external DC voltage Vin output by the power supply changes, that is, the voltage of the external power input changes, or the capacitive load changes and causes the output adjustable DC voltage Vdc to increase, the sampling voltage of the sampling circuit also increases. Since the DC reference voltage Vref remains unchanged, the input difference signal of the comparator decreases, and after amplification by the comparator, the base potential of the adjustment tube decreases, and the voltage drop of the adjustment tube increases, so that the output Vdc adjustable DC voltage remains basically unchanged. Similarly, when the power supply voltage or load changes and causes the output voltage to decrease, the output voltage can also be kept basically unchanged.

[0082] According to the embodiment of the present invention, the DC voltage range of the external power supply input is 5V~32V, and 12V DC is selected. Unless otherwise specified, the test results of the present invention are all measured under 12V conditions. The voltage input by the external power supply enters the adjustment tube and then outputs the voltage, which is fed back to the reverse input terminal of the comparator through voltage division sampling, and compared with the same-direction input Vref, and the tube voltage drop is continuously adjusted until the sampling voltage is equal to Vref, so as to keep the output voltage stable. The DC reference voltage Vref is output by the digital potentiometer, and the microcontroller communicates with the digital potentiometer through the SPI protocol to adjust the DC reference voltage Vref, and the Vref value is between 0V-5V.

[0083] Fig. 10AA schematic diagram showing the principle of a self-excited oscillation circuit according to yet another embodiment of the present invention is shown. Fig. 10B FIG. 4 is a waveform diagram showing measurement points of a self-excited oscillation circuit according to yet another embodiment of the present invention.

[0084] like Fig. 10A As shown, the self-excited oscillation circuit includes a current amplification and feedback oscillation circuit, a feedback resistor R1, a feedback capacitor C1 and an LCL circuit; wherein the current amplification and feedback oscillation circuit includes a feedback oscillator, a feedback inverter, a first inverter unit and a second inverter unit; the current amplification and feedback oscillation circuit is responsible for regulating the phase of the oscillating radio frequency energy in the LCL circuit, and switching the current through the second inductor L1 and the first inductor L2 at the zero crossing point of the radio frequency signal. The L of the LCL circuit refers to the inductor, and C refers to the capacitor. The LCL circuit is a circuit with an oscillation function composed of an inductor and a capacitor. The inductor L1, the capacitor C0 and the inductor L2 are connected in series to form the LCL circuit. The feedback oscillator consists of three inverters, and the feedback oscillator and a feedback resistor R1 are used to increase the gain. Compared with the feedback oscillator containing a single inverter in the prior art, the feedback oscillator enables the circuit to reach its balanced working state faster. In order to maximize the induced flyback voltage, the current passing through the inductor is as large as possible and switched as quickly as possible. The capacitor C0 equivalent to the adjustable capacitor circuit samples the voltage in the slot of the LCL circuit of the oscillation network unit, and drives the input of the feedback unit together with the feedback resistor R1 and the feedback capacitor C1, and tests the waveforms corresponding to the four points ABCD, such as Fig. 10B As shown. The waveform at point A and the waveform at point C are opposite in phase and have the same amplitude; the waveform at point B and the waveform at point D are opposite in phase and have the same amplitude; the peak-to-peak values ​​of the waveform at point A and the waveform at point C are -150V~150V; the waveform at point B and the waveform at point D show that the Vs value is 5V.

[0085] Fig.11 A flow chart of a method for controlling a radio frequency power generator according to an embodiment of the present invention is shown.

[0086] like Fig.11 As shown, the method includes operations S1101~S1102.

[0087] In operation S1101, the amplitude of the initial sinusoidal wave signal outputted from the signal output terminal of the oscillation module and the sinusoidal wave reference amplitude are acquired.

[0088] In operation S1102, according to the difference between the amplitude of the initial sinusoidal wave signal and the sinusoidal wave reference amplitude, a DC reference voltage is calculated according to a voltage regulation algorithm, so that the voltage stabilizing circuit provides a target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply; the target DC voltage causes the self-excited oscillation circuit to output a target sinusoidal wave signal.

[0089] According to an embodiment of the present invention, the voltage regulation algorithm may adopt a PID algorithm, or may adopt the following method: a unit amount of a single adjustment of a digital potentiometer is preset, and when the amplitude of the initial sinusoidal wave signal is greater than the sinusoidal wave reference amplitude, the digital potentiometer adjusts a unit amount in a preset manner, and when the amplitude of the initial sinusoidal wave signal is still greater than the sinusoidal wave reference amplitude, the digital potentiometer continues to adjust another unit amount in a preset manner until the amplitude of the initial sinusoidal wave signal is still equal to the sinusoidal wave reference amplitude. When the amplitude of the initial sinusoidal wave signal is less than the sinusoidal wave reference amplitude, the digital potentiometer adjusts a unit amount in a preset manner, and when the amplitude of the initial sinusoidal wave signal is still less than the sinusoidal wave reference amplitude, the digital potentiometer continues to adjust another unit amount in a preset manner until the amplitude of the initial sinusoidal wave signal is still equal to the sinusoidal wave reference amplitude.

[0090] Reference below Figure 12A to Figure 12D , a comparison of the performance tests of multiple inverters according to the embodiments of the present invention is further described.

[0091] Fig. 12A A performance test comparison diagram of output voltages of different inverters under different power supply voltages according to an embodiment of the present invention is shown. Fig. 12B A schematic diagram showing a comparison of starting voltage performance tests of different inverters at different supply voltages according to an embodiment of the present invention is shown. Fig. 12C A schematic diagram showing comparison of current values ​​of different inverters under the same supply voltage according to an embodiment of the present invention is shown. Fig.12D A schematic diagram showing power comparison of different inverters under the same supply voltage according to an embodiment of the present invention is shown.

[0092] exist Fig. 12A , Fig. 12B , Fig. 12C and Fig.12D In the figure, the model of inverter chip 1 is 74HC04D,653; the model of inverter chip 2 is SN74AHC14DR, the model of inverter chip 3 is SN74HCT04DR, the model of inverter chip 4 is SN74HC04DR, the model of inverter chip 5 is SN74HCT14DR, and the model of inverter chip 6 is SN74AHCT04DR. Fig. 12AAs shown in the figure, there are maximum output voltage curve and minimum output voltage curve. The maximum output voltage curve represents the maximum value of the output voltage of the RF power generator corresponding to each inverter chip, and the minimum output voltage curve represents the minimum value of the output voltage of the RF power generator corresponding to each inverter chip. When the supply voltage Vs applied to the voltage at both ends of the inverter increases, the peak-to-peak value Vpp of the output voltage of the RF power generator will increase accordingly, but the peak-to-peak value of the output voltage of the RF power generator corresponding to the inverter chip 4 does not increase significantly; when the supply voltage Vs=10V, the peak-to-peak value of the output voltage of the RF power generator corresponding to the inverter chip 2 is the largest; as shown in the figure, Fig. 12B As shown, the vertical axis is voltage, the unit is V; Fig. 12B In the figure, each inverter chip corresponds to two quantities. The quantity on the left is the power supply voltage of the inverter chip, and the quantity on the right is the corresponding starting voltage of the inverter chip. The minimum starting voltage of these inverters is about 2V. At the same time, the maximum power supply voltage Vs of inverter chip 4 and inverter chip 3 is 6V. The other inverter chips can work stably for a long time when the power supply voltage Vs=10V. Fig. 12C and Fig.12D As shown, when the supply voltage Vs=10V, the current consumed by the dual-path RF power supply loop generated by the RF power supply generator corresponding to the inverter chip 2 and the RF power supply generator of the inverter chip 6 is as high as 30mA, and the corresponding power consumption is more than 3W, while the power consumption of other types of inverter chips does not exceed 2W. Considering the peak-to-peak value as large as possible and the power consumption as small as possible, the inverter chip 5 is the best choice.

[0093] Fig.13 A stability test result diagram of a radio frequency power generator according to an embodiment of the present invention is shown.

[0094] A mass spectrometer is an instrument used to measure the mass-to-charge ratio of ions. It has the characteristics of high sensitivity and high specificity, and is widely used in defense, medical, materials, food safety and other fields. The dual-channel RF power generator is a key component of mass spectrometry equipment. It is mainly used for the transmission, focusing and even trapping of ions in capacitive load devices such as poles, ion traps and ion funnels. The maximum output peak-to-peak voltage of the RF power generator depends on the maximum current that the inverter can provide, and the resonant frequency is determined by the inherent properties of the circuit L1, L2 and C0 and the load capacitance. The amplitude and frequency will affect the trajectory of the ions and thus affect the sensitivity of the mass spectrometer.

[0095] A common method to drive RF electrodes is to combine a frequency synthesizer, RF amplifier, and a high quality factor resonator. Frequency and impedance matching issues between the RF source and the resonator need to be addressed to resonantly drive capacitive mass spectrometry components such as ion traps and ion guides. These RF drive methods (usually consuming a few watts to tens of watts) are designed for desktop systems, not for low power consumption.

[0096] According to an embodiment of the present invention, the maximum peak-to-peak value of the target sinusoidal signal output by the RF power generator can reach 290V, and the resonant frequency range is 0.5MHz-2.5MHz. In addition, the phase difference between the two sinusoidal signals output by the RF power generator is 179±1°, and the maximum relative peak-to-peak error is 1.64V. Fig.13 As shown, the figure shows a voltage curve and a frequency curve, wherein the voltage curve represents the voltage of the target sinusoidal signal output by the RF power generator, and the frequency curve represents the frequency of the target sinusoidal signal output by the RF power generator. When the power supply voltage Vs=5V, a quadrupole capacitive load is added, and the RF power generator provided by the present invention works continuously for two hours until the circuit reaches a stable state, and the maximum peak-to-peak value of the target sinusoidal signal output by the RF power generator reaches 203.42V. After reaching a stable state, the voltage of the target sinusoidal signal output by the RF power generator is about 201.46V, and the frequency of the target sinusoidal signal is about 1.46MHz.

[0097] Therefore, the RF power generator of the embodiment of the present invention can simultaneously output dual-channel RF signals with equal amplitude and opposite phase, and the amplitude and frequency can be programmably controlled, and is small in size and easy to carry. It can be used to drive capacitive loads such as poles, ion traps, and ion funnels, and can be used for transmission, focusing, and even trapping of different ions, thereby improving the sensitivity and scope of use of mass spectrometers. The embodiment of the present invention provides a way to realize the new trend of mass spectrometry towards miniaturization, intelligence, and portability.

[0098] The embodiments of the present invention are described above. However, these embodiments are only for the purpose of illustration, and are not intended to limit the scope of the present invention. Although each embodiment is described above, it does not mean that the measures in each embodiment cannot be used in combination advantageously. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A radio frequency power generator, characterized in that: The radio frequency power generator comprises: a voltage stabilizing circuit and a self-excited oscillation circuit; The self-excited oscillation circuit comprises an oscillation module and an inverter module; The inverter module includes a first input terminal, a first output terminal and a power supply voltage input terminal; the oscillation module includes a second input terminal, a second output terminal and a signal output terminal; the first input terminal is connected to the second output terminal; the first output terminal is connected to the second input terminal; The voltage stabilizing circuit comprises a power input terminal and a power output terminal; the power output terminal is connected to the power supply voltage input terminal; the power input terminal is used to input an external DC voltage; the voltage stabilizing circuit is used to generate a target DC voltage according to the external DC voltage and a sine wave reference amplitude, and input the target DC voltage into the power supply voltage input terminal; The oscillation module is used to perform self-excited oscillation and generate an initial sinusoidal wave signal; The inverter module is used to amplify the initial sinusoidal wave signal according to the target DC voltage, and input the amplified initial sinusoidal wave signal to the oscillation module, so that the signal output end of the oscillation module outputs the target sinusoidal wave signal.

2. The radio frequency power generator according to claim 1, characterized in that: The inverter module includes a first inverter unit and a second inverter unit; the first inverter unit includes a third input terminal, a third output terminal and a first power supply voltage input terminal; the second inverter unit includes a fourth input terminal, a fourth output terminal and a second power supply voltage input terminal; The power supply output terminal is connected to the first power supply voltage input terminal and the second power supply voltage input terminal respectively; the voltage stabilizing circuit provides the target DC voltage to the first power supply voltage input terminal and the second power supply voltage input terminal; The oscillation module includes a feedback unit and an oscillation network unit; the feedback unit includes a fifth input terminal, a fifth output terminal and a sixth output terminal; the oscillation network unit includes a sixth input terminal, a seventh input terminal, a seventh output terminal and an eighth output terminal; The third input terminal is connected to the fifth output terminal; the fourth input terminal is connected to the sixth output terminal; the third output terminal is connected to the sixth input terminal; the fourth output terminal is connected to the seventh input terminal; The seventh output terminal or the eighth output terminal is connected to the fifth input terminal; The oscillation network unit is used to generate the initial sine wave signal by self-excited oscillation, and input the initial sine wave signal into the feedback unit; the feedback unit is used to feed back the initial sine wave signal to the first inverter unit, and is also used to invert the initial sine wave signal by 180°, and feed back the inverted initial sine wave signal to the second inverter unit; The first inverter unit is used to amplify the initial sinusoidal wave signal according to the target DC voltage, and input the amplified initial sinusoidal wave signal to the oscillation module, so that the seventh output terminal outputs the first target sinusoidal wave signal; the second inverter unit is used to amplify the inverted initial sinusoidal wave signal according to the target DC voltage, and input the amplified inverted initial sinusoidal wave signal to the oscillation module, so that the eighth output terminal outputs the second target sinusoidal wave signal; the first target sinusoidal wave signal and the second target sinusoidal wave signal constitute the target sinusoidal wave signal.

3. The radio frequency power generator according to claim 2, characterized in that: The oscillation network unit includes a first inductor, a second inductor and an adjustable capacitance circuit; One end of the first inductor is the sixth input end of the oscillation network unit; the other end of the first inductor is connected to one end of the adjustable capacitor circuit; one end of the second inductor is the seventh input end of the oscillation network unit; the other end of the second inductor is connected to the other end of the adjustable capacitor circuit; one end of the adjustable capacitor circuit is the seventh output end of the oscillation network unit; the other end of the adjustable capacitor circuit is the eighth output end of the oscillation network unit; The frequency of the sinusoidal wave signal outputted from the seventh output terminal and the eighth output terminal of the oscillation network unit is set to the target frequency according to the target capacitance value outputted by the adjustable capacitance circuit.

4. The radio frequency power generator according to claim 3, characterized in that: The adjustable capacitance circuit includes a variable capacitance circuit and an oscillating capacitor; The variable capacitance circuit includes a variable capacitance diode and a voltage regulating circuit; the oscillation capacitor is connected in parallel with the variable capacitance diode; The voltage regulating circuit is connected to the varactor; the voltage regulating circuit is used to adjust the voltage across the varactor so that the varactor outputs a preset capacitance value; wherein the sum of the preset capacitance value and the capacitance value of the oscillation capacitor is the target capacitance value.

5. The radio frequency power generator according to claim 2, characterized in that: The feedback unit includes a feedback capacitor, a feedback resistor, a feedback oscillator and a feedback inverter; The feedback oscillator comprises an odd number of inverters connected in series; The seventh output terminal or the eighth output terminal of the oscillation network unit is connected to one end of the feedback capacitor; the other end of the feedback capacitor is connected to one end of the feedback resistor; the other end of the feedback capacitor is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor; the connection point between the other end of the feedback oscillator and the other end of the feedback resistor serves as the fifth output terminal of the feedback unit; The fifth output terminal is connected to the input terminal of the feedback inverter; the output terminal of the feedback inverter serves as the sixth output terminal of the feedback unit.

6. The radio frequency power generator according to claim 2, characterized in that: The first inverter unit and the second inverter unit are both complementary metal oxide semiconductor inverters.

7. The radio frequency power generator according to claim 6, characterized in that: The complementary metal oxide semiconductor inverter includes a PNP type transistor, an NPN type transistor, a first diode, a second diode and a capacitor; The emitter of the PNP type crystal transistor is connected to the cathode of the first diode; the cathode of the first diode is connected to the positive electrode of the power output end of the voltage stabilizing circuit; the anode of the first diode is connected to the base of the PNP type crystal transistor; the base of the PNP type crystal transistor is connected to one end of the capacitor; the other end of the capacitor is connected to the base of the NPN type crystal transistor; the collector of the PNP type crystal transistor is connected to the collector of the NPN type crystal transistor; the base of the NPN type crystal transistor is respectively connected to the cathode of the second diode and the fifth output end; the anode of the second diode is connected to the emitter of the NPN type crystal transistor; the emitter of the NPN type crystal transistor is connected to the negative electrode of the power output end of the voltage stabilizing circuit.

8. The radio frequency power generator according to claim 1, characterized in that: The voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module; The voltage stabilizing circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the signal output end of the oscillation module, and obtain a DC reference voltage according to a voltage regulation algorithm based on the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and output a target DC voltage based on the DC reference voltage and the external DC voltage.

9. The radio frequency power generator according to claim 8, characterized in that: The voltage stabilizing circuit comprises a reference voltage output circuit and a series voltage stabilizing circuit; The output end of the reference voltage output circuit is connected to the input end of the series voltage stabilization circuit; the input end of the reference voltage output circuit is connected to the signal output end of the oscillation module; the reference voltage output circuit is used to collect the amplitude of the initial sinusoidal wave signal output by the oscillation module, and output a DC reference voltage according to the voltage regulation algorithm based on the difference between the sinusoidal wave reference amplitude and the amplitude of the initial sinusoidal wave signal, and input the DC reference voltage into the series voltage stabilization circuit; The series voltage regulator circuit includes an external voltage input terminal and a reference voltage input terminal; the external voltage input terminal is connected to a power supply; the reference voltage input terminal is connected to an output terminal of the reference voltage output circuit; the output terminal of the series voltage regulator circuit is connected to a power supply voltage input terminal of the inverter module; the series voltage regulator circuit is used to provide a target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply.

10. The radio frequency power generator according to claim 9, characterized in that: The reference voltage output circuit includes a voltage conditioning circuit, a control circuit and an adjustable potentiometer; The input end of the voltage conditioning circuit is connected to the signal output end of the oscillation module; the output end of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is used to collect the amplitude of the initial sinusoidal wave signal and input the amplitude of the initial sinusoidal wave signal to the control circuit; The control circuit is connected to the adjustable potentiometer; the control circuit is used to generate a control signal according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the adjustable potentiometer; The adjustable potentiometer outputs the DC reference voltage according to the control signal.

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