A radio frequency power generator

Abstract

The present invention provides a radio frequency power generator, which relates to the field of radio frequency technology. The radio frequency power generator includes: the first input end of the inverter module is connected to the second output end of the oscillation module; the first output end of the inverter module is connected to the second input end of the oscillation module; the power output end of the voltage stabilizing circuit is connected to the power supply voltage input end of the inverter module; the power input end of the voltage stabilizing circuit inputs an external DC voltage; the voltage stabilizing circuit generates a target DC voltage according to the external DC voltage and the sinusoidal wave reference amplitude, and inputs the target DC voltage to the power supply voltage input end; the oscillation module performs self-excited oscillation and generates an initial sinusoidal wave signal; the inverter module amplifies the initial sinusoidal wave signal according to the target DC voltage, and inputs the amplified initial sinusoidal wave signal to the oscillation module, so that the signal output end of the oscillation module outputs a target sinusoidal wave signal. The present invention improves the convenience of amplitude adjustment of radio frequency signals.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and more specifically, to a radio frequency power generator. Background Art

[0002] In the prior art, components used in many radio frequency power generator circuits, such as vacuum tubes and transformers, hinder the miniaturization of radio frequency power generator circuits. Moreover, the frequency adjustment of the radio frequency signal output by the existing radio frequency power generator is achieved by changing the tap position of the transformer coil, and the change in the amplitude of the radio frequency signal is obtained by applying different high voltages outside the push-pull output. When actually applying the radio frequency circuit, it is necessary to adjust the applied high voltage on-site so that the amplitude of the radio frequency signal output by the radio frequency power generator meets the current on-site requirements for the amplitude. Therefore, the amplitude adjustment of the radio frequency signal by the existing radio frequency power generator is not convenient enough. Summary of the Invention

[0003] In view of this, the present invention provides a radio frequency power generator.

[0004] One aspect of the present invention provides a radio frequency power generator, comprising: a voltage stabilizing circuit and a self-excited oscillation circuit; the self-excited oscillation circuit includes an oscillation module and an inverter module; the inverter module includes a first input terminal, a first output terminal, and a supply voltage input terminal; the oscillation module includes a second input terminal, a second output terminal, and a signal output terminal; the first input terminal is connected to the second output terminal; the first output terminal is connected to the second input terminal; the voltage stabilizing circuit includes a power input terminal and a power output terminal; the power output terminal is connected to the supply voltage input terminal; the power input terminal is used for inputting an external DC voltage; the voltage stabilizing circuit is used for generating a target DC voltage according to the external DC voltage and a sine wave reference amplitude, and inputting the target DC voltage into the supply voltage input terminal; the oscillation module is used for performing self-excited oscillation and generating an initial sine wave signal; the inverter module is used for amplifying the initial sine wave signal according to the target DC voltage and inputting the amplified initial sine wave signal into the oscillation module, so that the signal output terminal of the oscillation module outputs a target sine wave signal.

[0005] According to an embodiment of the present invention, the inverter module includes a first inverter unit and a second inverter unit; the first inverter unit includes a third input terminal, a third output terminal, and a first power supply voltage input terminal; the second inverter unit includes a fourth input terminal, a fourth output terminal, and a second power supply voltage input terminal; the power supply output terminal is respectively connected to the first power supply voltage input terminal and the second power supply voltage input terminal; the voltage stabilizing circuit provides the target DC voltage for the first power supply voltage input terminal and the second power supply voltage input terminal; the oscillation module includes a feedback unit and an oscillation network unit; the feedback unit includes a fifth input terminal, a fifth output terminal, and a sixth output terminal; the oscillation network unit includes a sixth input terminal, a seventh input terminal, a seventh output terminal, and an eighth output terminal; the third input terminal is connected to the fifth output terminal; the fourth input terminal is connected to the sixth output terminal; the third output terminal is connected to the sixth input terminal; the fourth output terminal is connected to the seventh input terminal; the seventh output terminal or the eighth output terminal is connected to the fifth input terminal; the oscillation network unit is configured to generate the initial sine wave signal by self-excitation oscillation and input the initial sine wave signal into the feedback unit; the feedback unit is configured to feedback the initial sine wave signal to the first inverter unit, and is further configured to invert the initial sine wave signal by 180° and feedback the inverted initial sine wave signal to the second inverter unit; the first inverter unit is configured to amplify the initial sine wave signal according to the target DC voltage and input the amplified initial sine wave signal into the oscillation module, so that the seventh output terminal outputs a first target sine wave signal; the second inverter unit is configured to amplify the inverted initial sine wave signal according to the target DC voltage and input the amplified inverted initial sine wave signal into the oscillation module, so that the eighth output terminal outputs a second target sine wave signal; the first target sine wave signal and the second target sine wave signal constitute the target sine wave signal.

[0006] According to an embodiment of the present invention, the oscillation network unit includes a first inductor, a second inductor, and an adjustable capacitor circuit; one end of the first inductor is the sixth input terminal of the oscillation network unit; the other end of the first inductor is connected to one end of the adjustable capacitor circuit; one end of the second inductor is the seventh input terminal of the oscillation network unit; the other end of the second inductor is connected to the other end of the adjustable capacitor circuit; one end of the adjustable capacitor circuit is the seventh output terminal of the oscillation network unit; the other end of the adjustable capacitor circuit is the eighth output terminal of the oscillation network unit; according to the target capacitance value output by the adjustable capacitor circuit, the frequencies of the sine wave signals output by the seventh output terminal and the eighth output terminal of the oscillation network unit are the target frequencies.

[0007] According to an embodiment of the present invention, the adjustable capacitance circuit includes a varactor circuit and an oscillating capacitor; the varactor circuit includes a varactor diode and a voltage regulating circuit; the oscillating capacitor is connected in parallel with the varactor diode; the voltage regulating circuit is connected to the varactor diode; the voltage regulating circuit is used to adjust the voltage across the varactor diode so that the varactor diode outputs a preset capacitance value; wherein, the sum of the preset capacitance value and the capacitance value of the oscillating capacitor is the target capacitance value.

[0008] According to an embodiment of the present invention, the feedback unit includes a feedback capacitor, a feedback resistor, a feedback oscillator, and a feedback inverter; the feedback oscillator includes an odd number of inverters connected in series; the seventh output terminal or the eighth output terminal of the oscillation network unit is connected to one end of the feedback capacitor; the other end of the feedback capacitor is connected to one end of the feedback resistor; the other end of the feedback capacitor is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor; the connection point of the other end of the feedback oscillator and the other end of the feedback resistor serves as the fifth output terminal of the feedback unit; the fifth output terminal is connected to the input terminal of the feedback inverter; the output terminal of the feedback inverter serves as the sixth output terminal of the feedback unit.

[0009] According to an embodiment of the present invention, both the first inverter unit and the second inverter unit are complementary metal-oxide-semiconductor inverters.

[0010] According to an embodiment of the present invention, the complementary metal-oxide-semiconductor inverter includes a PNP type transistor, an NPN type transistor, a first diode, a second diode, and a capacitor; the emitter of the PNP type transistor is connected to the cathode of the first diode; the cathode of the first diode is connected to the positive pole of the power output terminal of the voltage stabilizing circuit; the cathode of the first diode is connected to the base of the PNP type transistor; the base of the PNP type transistor is connected to one end of the capacitor; the other end of the capacitor is connected to the base of the NPN type transistor; the collector of the PNP type transistor is connected to the collector of the NPN type transistor; the base of the NPN type transistor is respectively connected to the cathode of the second diode and the fifth output terminal; the anode of the second diode is connected to the emitter of the NPN type transistor; the emitter of the NPN type transistor is connected to the negative pole of the power output terminal of the voltage stabilizing circuit.

[0011] According to an embodiment of the present invention, the above voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module; the voltage stabilizing circuit is configured to collect the amplitude of the initial sine wave signal output by the signal output terminal of the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, obtain a DC reference voltage according to a voltage regulation algorithm, and output a target DC voltage according to the DC reference voltage and the external DC voltage.

[0012] According to an embodiment of the present invention, the above voltage stabilizing circuit includes a reference voltage output circuit and a series voltage stabilizing circuit; the output terminal of the reference voltage output circuit is connected to the input terminal of the series voltage stabilizing circuit; the input terminal of the reference voltage output circuit is connected to the signal output terminal of the oscillation module; the reference voltage output circuit is configured to collect the amplitude of the initial sine wave signal output by the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, output a DC reference voltage according to a voltage regulation algorithm, and input the DC reference voltage into the series voltage stabilizing circuit; the series voltage stabilizing circuit includes an external voltage input terminal and a reference voltage input terminal; the external voltage input terminal is connected to a power supply; the reference voltage input terminal is connected to the output terminal of the reference voltage output circuit; the output terminal of the series voltage stabilizing circuit is connected to the power supply voltage input terminal of the inverter module; the series voltage stabilizing circuit is configured to provide a target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply.

[0013] According to an embodiment of the present invention, the above reference voltage output circuit includes a voltage conditioning circuit, a control circuit, and a variable potentiometer; the input terminal of the voltage conditioning circuit is connected to the signal output terminal of the oscillation module; the output terminal of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is configured to collect the amplitude of the initial sine wave signal, and input the amplitude of the initial sine wave signal into the control circuit; the control circuit is connected to the variable potentiometer; the control circuit is configured to generate a control signal according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the variable potentiometer; the variable potentiometer outputs the DC reference voltage according to the control signal.

[0014] According to an embodiment of the present invention, a voltage stabilizing circuit generates a target DC voltage based on an external DC voltage input at a power input terminal and a sinusoidal wave reference amplitude, and directly inputs the target DC voltage to a power supply voltage input terminal of an inverter module. Thus, the power supply voltage of the inverter module is directly regulated by the voltage stabilizing circuit, achieving the effect of amplifying the amplitude of the initial sinusoidal wave signal output by an oscillation module, improving the convenience of amplitude regulation of a radio frequency signal, and thus at least partially overcoming the technical problem in the prior art that the use of a radio frequency power generator is not sufficiently convenient due to adjusting the amplitude of the radio frequency signal by adjusting the high voltage applied by a push-pull output. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Through the following description of embodiments of the present invention with reference to the drawings, the above and other objects, features, and advantages of the present invention will become clearer. In the drawings:

[0016] Figure 1 A schematic structural diagram of a radio frequency power generator according to an embodiment of the present invention is shown.

[0017] Figure 2 A schematic structural diagram of a radio frequency power generator according to another embodiment of the present invention is shown.

[0018] Figure 3 A schematic structural diagram of an oscillation network unit according to an embodiment of the present invention is shown.

[0019] Figure 4 A schematic structural diagram of an adjustable capacitor circuit according to an embodiment of the present invention is shown.

[0020] Figure 5 A schematic structural diagram of a feedback unit according to an embodiment of the present invention is shown.

[0021] Figure 6 A schematic structural diagram of a self-excited oscillation circuit according to another embodiment of the present invention is shown.

[0022] Figure 7 A schematic structural diagram of a radio frequency power generator according to still another embodiment of the present invention is shown.

[0023] Figure 8 A schematic structural diagram of a voltage conditioning circuit according to an embodiment of the present invention is shown.

[0024] Figure 9 A schematic block diagram of a series voltage stabilizing circuit according to an embodiment of the present invention is shown.

[0025] Figure 10A A schematic diagram of the principle of a self-excited oscillation circuit according to still another embodiment of the present invention is shown.

[0026] Figure 10BShows a waveform diagram of measurement points of a self-oscillating circuit according to another embodiment of the present invention.

[0027] Figure 11 Shows a flowchart of a control method for a radio frequency power generator according to an embodiment of the present invention.

[0028] Figure 12A Shows a schematic diagram for comparing the performance test of the output voltage of different inverters at different supply voltages according to an embodiment of the present invention.

[0029] Figure 12B Shows a schematic diagram for comparing the start-up voltage performance test of different inverters at different supply voltages according to an embodiment of the present invention.

[0030] Figure 12C Shows a schematic diagram for comparing the current values of different inverters at the same supply voltage according to an embodiment of the present invention.

[0031] Figure 12D Shows a schematic diagram for comparing the power of different inverters at the same supply voltage according to an embodiment of the present invention.

[0032] Figure 13 Shows a test result diagram of the stability of a radio frequency power generator according to an embodiment of the present invention. Detailed implementation manners

[0033] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present invention. In the following detailed description, for the sake of explanation, many specific details are set forth to provide a thorough understanding of the embodiments of the present invention. However, obviously, one or more embodiments can also be implemented without these specific details. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessarily obscuring the concepts of the present invention.

[0034] The terms used herein are merely for describing specific embodiments and are not intended to limit the present invention. The terms "including", "comprising", etc. used herein indicate the presence of the described features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0035] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0036] In the case of using expressions such as "at least one of A, B, and C, etc.", generally, it should be interpreted according to the meaning that those skilled in the art usually understand this expression (for example, "a system having at least one of A, B, and C" should include, but not be limited to, a system having only A, only B, only C, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0037] In the embodiments of the present invention, in aspects such as the collection, update, analysis, processing, use, transmission, provision, disclosure, storage, etc. of the involved data (for example, including but not limited to user personal information), they all comply with the provisions of relevant laws and regulations, are used for legal purposes, and do not violate public order and good customs. In particular, necessary measures are taken for user personal information to prevent illegal access to user personal information data and to safeguard user personal information security and network security.

[0038] In the embodiments of the present invention, before obtaining or collecting user personal information, the authorization or consent of the user is obtained.

[0039] Figure 1 The structural schematic diagram of the radio frequency power generator according to the embodiment of the present invention is shown.

[0040] As Figure 1 shown, the radio frequency power generator includes: a voltage stabilizing circuit and a self-excited oscillation circuit. The self-excited oscillation circuit includes an oscillation module and an inverter module. The inverter module includes a first input terminal 102, a first output terminal 107, and a supply voltage input terminal 104; the oscillation module includes a second input terminal 108, a second output terminal 101, and a signal output terminal 103; the first input terminal 102 is connected to the second output terminal 101; the first output terminal 107 is connected to the second input terminal 108.

[0041] The voltage stabilizing circuit includes a power input terminal 106 and a power output terminal 105; the power output terminal 105 is connected to the supply voltage input terminal 104; the power input terminal 106 is used to input an external DC voltage; the voltage stabilizing circuit is used to generate a target DC voltage according to the external DC voltage and the sine wave reference amplitude, and input the target DC voltage to the supply voltage input terminal 104.

[0042] The oscillation module is used to perform self-excited oscillation and generate an initial sine wave signal. The inverter module is used to amplify the initial sine wave signal according to the target DC voltage and input the amplified initial sine wave signal to the oscillation module, so that the signal output terminal 103 of the oscillation module outputs a target sine wave signal.

[0043] According to an embodiment of the present invention, through multiple experiments, a first correspondence relationship between the sine wave reference amplitude and the target DC voltage output by the voltage stabilizing circuit can be obtained, and a second correspondence relationship between the target DC voltage and the amplitude of the target sine wave signal can be obtained. The first correspondence relationship and the second correspondence relationship can be corresponding curves, corresponding tables, or piecewise functions, so that the correspondence relationship between the sine wave reference amplitude and the amplitude of the target sine wave signal can be obtained. By inputting the sine wave reference amplitude corresponding to the amplitude of the target sine wave signal, the signal output terminal 103 of the oscillation module outputs the target sine wave signal.

[0044] According to an embodiment of the present invention, the voltage stabilizing circuit generates a target DC voltage based on the external DC voltage input by the power supply input terminal 106 and the sine wave reference amplitude, and directly inputs the target DC voltage to the power supply voltage input terminal 104 of the inverter module, so as to directly adjust the power supply voltage of the inverter module through the voltage stabilizing circuit, achieving the effect of amplifying the amplitude of the initial sine wave signal output by the oscillation module. Therefore, at least partially, it overcomes the technical problem that the high voltage applied to the push-pull output is not convenient enough to obtain in the actual radio frequency circuit application site, and further improves the convenience of amplitude adjustment of the radio frequency signal.

[0045] Figure 2 Fig. shows a structural schematic diagram of a radio frequency power generator according to another embodiment of the present invention.

[0046] As Figure 2 shown, the inverter module includes a first inverter unit and a second inverter unit; the first inverter unit includes a third input terminal 203, a third output terminal 209, and a first power supply voltage input terminal 201; the second inverter unit includes a fourth input terminal 210, a fourth output terminal 211, and a second power supply voltage input terminal 202. The power output terminal 105 is respectively connected to the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202; the voltage stabilizing circuit provides the target DC voltage for the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202.

[0047] The oscillation module includes a feedback unit and an oscillation network unit; the feedback unit includes a fifth input terminal 206, a fifth output terminal 207, and a sixth output terminal 204; the oscillation network unit includes a sixth input terminal 208, a seventh input terminal 212, a seventh output terminal 205, and an eighth output terminal 213. The third input terminal 203 is connected to the fifth output terminal 207; the fourth input terminal 210 is connected to the sixth output terminal 204; the third output terminal 209 is connected to the sixth input terminal 208; the fourth output terminal 211 is connected to the seventh input terminal 212; the seventh output terminal 205 is connected to the fifth input terminal 206. Optionally, the seventh output terminal 205 may not be connected to the fifth input terminal 206, but instead the eighth output terminal 213 is connected to the fifth input terminal 206, that is, either the seventh output terminal 205 or the eighth output terminal 213 is connected to the fifth input terminal 206. The voltage stabilizing circuit generates a target DC voltage based on the external DC voltage input from the power supply input terminal 106 and the sine wave reference amplitude, and the target DC voltage is output from the power supply output terminal 105 and input to the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202 respectively.

[0048] The oscillation network unit is used for self-excited oscillation to generate an initial sine wave signal and input the initial sine wave signal into the feedback unit; the feedback unit is used for feeding back the initial sine wave signal to the first inverter unit, and is also used for inverting the initial sine wave signal by 180° and feeding back the inverted initial sine wave signal to the second inverter unit.

[0049] The first inverter unit is used for amplifying the initial sine wave signal according to the target DC voltage and inputting the amplified initial sine wave signal into the oscillation module, so that the seventh output terminal 205 outputs a first target sine wave signal; the second inverter unit is used for amplifying the inverted initial sine wave signal according to the target DC voltage and inputting the amplified inverted initial sine wave signal into the oscillation module, so that the eighth output terminal 213 outputs a second target sine wave signal; the first target sine wave signal and the second target sine wave signal constitute the target sine wave signal.

[0050] According to the embodiments of the present invention, the voltage stabilizing circuit provides the target DC voltage for the first power supply voltage input terminal 201 and the second power supply voltage input terminal 202 respectively, and the first inverter unit and the second inverter unit are used to increase the magnitude of the output current. Since the structures of the first inverter unit and the second inverter unit are the same, when wiring on the PCB (Printed Circuit Board), the two paths are preferably symmetrically distributed as much as possible to obtain a larger flyback voltage, and impedance matching is not required at the same time.

[0051] Such as Figure 1 and Figure 2As shown, the signal output terminals include a seventh output terminal 205 and an eighth output terminal 213. The seventh output terminal 205 can be connected to the fifth input terminal 206. There is also a connection method where the seventh output terminal 205 is not connected to the fifth input terminal 206 but the eighth output terminal 213 is connected to the fifth input terminal 206. The second output terminal 101 includes a sixth output terminal 204 and a fifth output terminal 207. The second input terminal 108 includes a sixth input terminal 208 and a seventh input terminal 212. The first input terminal 102 includes a third input terminal 203 and a fourth input terminal 210. The first output terminal 107 includes a third output terminal 209 and a fourth output terminal 211. The power supply voltage input terminal 104 includes a first power supply voltage input terminal 201 and a second power supply voltage input terminal 202.

[0052] According to an embodiment of the present invention, by outputting an amplified initial sine wave signal and an inverted initial sine wave signal through the feedback unit, two sine wave signals with equal amplitudes but a phase difference of 180 degrees can be obtained.

[0053] Figure 3 The structural schematic diagram of the oscillation network unit according to an embodiment of the present invention is shown.

[0054] As Figure 3 shown, the oscillation network unit includes a first inductor 301, a second inductor 302, and an adjustable capacitor circuit; one end of the first inductor 301 is the sixth input terminal 208 of the oscillation network unit; the other end of the first inductor 301 is connected to one end of the adjustable capacitor circuit; one end of the second inductor 302 is the seventh input terminal 212 of the oscillation network unit; the other end of the second inductor 302 is connected to the other end of the adjustable capacitor circuit; one end of the adjustable capacitor circuit is the seventh output terminal 205 of the oscillation network unit; the other end of the adjustable capacitor circuit is the eighth output terminal 213 of the oscillation network unit; according to the target capacitance value output by the adjustable capacitor circuit, the frequencies of the sine wave signals output by the seventh output terminal 205 and the eighth output terminal 213 of the oscillation network unit are the target frequencies.

[0055] According to an embodiment of the present invention, the oscillation network unit can be an LCL circuit, where L represents inductor and C represents capacitor. The LCL circuit is composed of two inductors and one capacitor, and the capacitor in the LCL circuit has an adjustable capacitance value. According to different capacitance values and the inductance values of the first inductor 301 and the second inductor 302, a target sine wave signal with a preset frequency can be obtained. Further, the capacitor in the LCL circuit can select an adjustable capacitor with a suitable capacitance value according to actual application needs, as well as the first inductor 301 and the second inductor 302 with suitable inductance values, to obtain a target sine wave signal with a preset frequency.

[0056] Figure 4 The structural schematic diagram of the adjustable capacitor circuit according to an embodiment of the present invention is shown.

[0057] As Figure 4 shown, the adjustable capacitance circuit includes a varactor circuit and an oscillating capacitor 401; the varactor circuit includes a varactor diode and a voltage regulating circuit; the oscillating capacitor 401 is connected in parallel with the varactor diode; the voltage regulating circuit is connected to the varactor diode; the voltage regulating circuit is used to adjust the voltage across the varactor diode so that the varactor diode outputs a preset capacitance value; wherein, the sum of the preset capacitance value and the capacitance value of the oscillating capacitor 401 is the target capacitance value.

[0058] According to an embodiment of the present invention, one end of the oscillating capacitor is one end of the adjustable capacitance circuit and serves as the seventh output terminal 205 of the oscillating network unit, and the other end of the oscillating capacitor is the other end of the adjustable capacitance circuit and serves as the eighth output terminal 213 of the oscillating network unit. The size of the output capacitance of the adjustable capacitance circuit can be adjusted by directly changing the capacitance value of the varactor diode to complete the tuning of the frequency of the sine wave signal output by the self-excited oscillation circuit, so that the frequency of the sine wave signal is the frequency of the target sine wave signal. The voltage regulating circuit makes the varactor diode operate in the reverse bias state.

[0059] Figure 5 The structural schematic diagram of the feedback unit according to an embodiment of the present invention is shown.

[0060] As Figure 5 shown, the feedback unit includes a feedback capacitor 501, a feedback resistor 502, a feedback oscillator, and a feedback inverter; the feedback oscillator includes an odd number of inverters connected in series; the seventh output terminal or the eighth output terminal of the oscillating network unit is connected to one end of the feedback capacitor 501; one end of the feedback capacitor 501 is the fifth input terminal 206; the other end of the feedback capacitor 501 is connected to one end of the feedback resistor 502; the other end of the feedback capacitor 501 is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor 502; the connection point of the other end of the feedback oscillator and the other end of the feedback resistor 502 serves as the fifth output terminal 207 of the feedback unit; the fifth output terminal 207 is connected to the input terminal of the feedback inverter; the output terminal of the feedback inverter serves as the sixth output terminal 204 of the feedback unit.

[0061] According to an embodiment of the present invention, the feedback inverter can be composed of one inverter or an odd number of inverters connected in series. The feedback oscillator can be selected as 3 inverters connected in series.

[0062] Figure 6 The structural schematic diagram of the self-excited oscillation circuit according to another embodiment of the present invention is shown.

[0063] As Figure 6As shown, both the first inverter unit 601 and the second inverter unit 602 are CMOS (Complementary Metal Oxide Semiconductor) inverters. Taking the first inverter unit 601 as an example, the CMOS inverter includes a PNP-type bipolar junction transistor 6011, an NPN-type bipolar junction transistor 6012, a first diode 6013, a second diode 6015, and a capacitor 6014; the emitter of the PNP-type bipolar junction transistor 6011 is connected to the cathode of the first diode 6013; the cathode of the first diode 6013 is connected to the positive pole of the power output terminal of the voltage stabilizing circuit; the anode of the first diode 6013 is connected to the base of the PNP-type bipolar junction transistor 6011; the base of the PNP-type bipolar junction transistor 6011 is connected to one end of the capacitor 6014; the other end of the capacitor 6014 is connected to the base of the NPN-type bipolar junction transistor 6012; the collector of the PNP-type bipolar junction transistor 6011 is connected to the collector of the NPN-type bipolar junction transistor 6012; the base of the NPN-type bipolar junction transistor 6012 is respectively connected to the cathode of the second diode 6015 and the fifth output terminal; the anode of the second diode 6015 is connected to the emitter of the NPN-type bipolar junction transistor 6012; the emitter of the NPN-type bipolar junction transistor 6012 is connected to the negative pole of the power output terminal of the voltage stabilizing circuit. The second inverter unit 602 is also a CMOS inverter, which will not be elaborated here.

[0064] According to an embodiment of the present invention, the PNP bipolar transistor in the CMOS inverter can be replaced by a PMOS transistor (P-channel Metal-Oxide-Semiconductor Field-Effect Transistor), and the NPN bipolar transistor can be replaced by an NMOS transistor (N-channel Metal-Oxide-Semiconductor Field-Effect Transistor). Taking the first inverter unit 601 as an example, the PNP bipolar transistor 6011 in the CMOS inverter is replaced by a PMOS transistor, and the NPN bipolar transistor 6012 is replaced by an NMOS transistor. The connection method after replacement can be: the source of the PMOS transistor is connected to the cathode of the first diode 6013; the cathode of the first diode 6013 is connected to the positive pole of the power output terminal of the voltage stabilizing circuit; the anode of the first diode 6013 is connected to the gate of the PMOS transistor; the gate of the PMOS transistor is connected to one end of the capacitor 6014; the other end of the capacitor 6014 is connected to the gate of the NMOS transistor; the drain of the PMOS transistor is connected to the drain of the NMOS transistor; the gate of the NMOS transistor is respectively connected to the cathode of the second diode 6015 and the fifth output terminal; the anode of the second diode 6015 is connected to the source of the NMOS transistor; the source of the NMOS transistor is connected to the negative pole of the power output terminal of the voltage stabilizing circuit. The second inverter unit 602 is also a CMOS inverter, which will not be elaborated here.

[0065] According to an embodiment of the present invention, the CMOS inverter amplifies the input current. As Figure 6 shown, the first inverter unit 601 amplifies the current output by the feedback oscillator 603, and the second inverter unit 602 amplifies the current output by the feedback inverter 606. The adjustment of the threshold current magnitude of the CMOS inverter can be performed through the feedback resistor 605. In order to maximize the induced flyback voltage, make the currents passing through the first inductor 601 and the second inductor 302 as large as possible and switch as fast as possible, therefore, the output of the feedback oscillator 603 is fed to the first inverter unit 601, and the output of the feedback oscillator 603 is fed to the second inverter unit 602 through the feedback inverter 606, and the first inverter unit 601 and the second inverter unit 602 amplify this current. In addition, when one end of the feedback capacitor 604 is connected to the eighth output terminal 213, in order to drive the seventh output terminal 205 of the oscillation network unit not sampled by the feedback capacitor 604, the signal at the fifth output terminal of the feedback unit is inverted by 180 degrees through an additional feedback inverter 606 and then drives the second inverter unit 602.

[0066] According to an embodiment of the present invention, asFigure 2 , Figure 3 and Figure 6 As shown in Figure 2 , Figure 3 and Figure 6 , taking the CMOS inverter including the PNP type bipolar transistor 6011 and the NPN type bipolar transistor 6012 as an example, the third output terminal is connected to the sixth input terminal. The sixth input terminal is one end of the first inductor 301, and the third output terminal is the connection point of the collectors of the PNP type bipolar transistor 6011 and the NPN type bipolar transistor 6012 in the first inverter unit; the fourth output terminal is the connection point of the collectors of the PNP type bipolar transistor and the NPN type bipolar transistor in the second inverter unit; the seventh input terminal is one end of the second inductor 302. The third input terminal is the connection point of the base of the NPN type bipolar transistor 6012, the cathode of the second diode 6015 and the other end of the capacitor 6014 in the first inverter unit 601; the fourth input terminal is the connection point of the base of the NPN type bipolar transistor 6012, the cathode of the second diode 6015 and the other end of the capacitor 6014 in the second inverter unit 602. When the PNP type bipolar transistor in the CMOS inverter is replaced by a PMOS transistor and the NPN type bipolar transistor is replaced by an NMOS transistor, the connection relationship is correspondingly modified and will not be elaborated here.

[0067] According to an embodiment of the present invention, the voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module; the voltage stabilizing circuit is used to collect the amplitude of the initial sine wave signal output by the signal output terminal of the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, obtain a DC reference voltage according to a voltage regulation algorithm, and output a target DC voltage according to the DC reference voltage and the external DC voltage. The signal output terminal of the oscillation module includes a seventh output terminal 205 and an eighth output terminal 213, and the feedback input terminal is connected to the seventh output terminal 205 or the eighth output terminal 213.

[0068] According to an embodiment of the present invention, when the voltage stabilizing circuit collects the signal output by the signal output terminal of the oscillation module as a feedback signal, the sine wave reference amplitude can be used as the preset amplitude of the target sine wave signal. By means of feedback, the signal output terminal of the oscillation module outputs the target sine wave signal, and the voltage regulation algorithm can adopt the PID (Proportional-Integral-Derivative) algorithm.

[0069] Figure 7 Fig. shows a schematic structural diagram of a radio frequency power generator according to another embodiment of the present invention.

[0070] As Figure 7As shown in the figure, the voltage stabilizing circuit includes a reference voltage output circuit and a series voltage stabilizing circuit; the output end of the reference voltage output circuit is connected to the input end of the series voltage stabilizing circuit; the input end of the reference voltage output circuit is connected to the signal output end of the oscillation module; the reference voltage output circuit is used to collect the amplitude of the initial sine wave signal output by the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, output a DC reference voltage according to the voltage regulation algorithm, and input the DC reference voltage into the series voltage stabilizing circuit; the series voltage stabilizing circuit includes an external voltage input end and a reference voltage input end; the external voltage input end is connected to the power supply; the reference voltage input end is connected to the output end of the reference voltage output circuit; the output end of the series voltage stabilizing circuit is connected to the power supply voltage input end of the inverter module in the self-excited oscillation circuit; the series voltage stabilizing circuit is used to provide a target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply. The radio frequency power generator further includes a display circuit; the display circuit is connected to the control circuit; the display circuit is used to display the performance indicators of the radio frequency power generator in real time; optionally, the display circuit is used to display preset parameters; the preset parameters at least include the sine wave reference amplitude, the amplitude and frequency of the initial sine wave signal.

[0071] According to an embodiment of the present invention, the reference voltage output circuit includes a voltage conditioning circuit, a control circuit and a variable potentiometer; the input end of the voltage conditioning circuit is connected to the signal output end of the oscillation module; the output end of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is used to collect the amplitude of the initial sine wave signal and input the amplitude of the initial sine wave signal into the control circuit; the control circuit is connected to the variable potentiometer; the control circuit is used to generate a control signal according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the variable potentiometer; the variable potentiometer outputs a DC reference voltage according to the control signal.

[0072] According to an embodiment of the present invention, the control circuit includes a controller and an input circuit; for example, the control circuit includes a microprocessor and an input circuit, the controller is connected to the output end of the voltage conditioning circuit; the controller is also connected to the input end of the variable potentiometer; the controller is also connected to the output end of the input circuit; the input circuit is used to input the sine wave reference amplitude to the controller; the controller is used to generate a control signal according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the variable potentiometer.

[0073] According to an embodiment of the present invention, the adjustable potentiometer can be a digital potentiometer; the controller can be a microprocessor; the input circuit can input the sine wave reference amplitude to the microprocessor by means of keys, or by means of Bluetooth connection, or communicate with the microprocessor through UART (Universal Asynchronous Receiver / Transmitter). The input circuit can be a readable and writable device, including but not limited to mobile phones, computers, and other devices or apparatuses that input through keys. The sine wave reference amplitude is controlled by the serial port of the microprocessor to adjust the voltage magnitude of the sine wave signal output by the signal output terminal of the oscillation module, so that the signal output terminal of the oscillation module finally outputs the target sine wave signal. The voltage conditioning circuit converts the signal to be collected into a stable signal with an amplitude within the range that can be collected by the microprocessor, so as to facilitate the sampling process of the ADC (Analog to Digital Converter) and detect and display the waveform in real time.

[0074] According to an embodiment of the present invention, an external DC power supply is connected to the series adjustable circuit to output a corresponding proportional voltage for power supply to the inverter module. Through the feedback unit and the inverter module, a balanced state is quickly established to output a radio frequency signal with the same amplitude and opposite phase. Communicate with the microprocessor through keys or Bluetooth serial port to adjust the amplitude of the radio frequency signal, and change the resonant frequency of the radio frequency signal by changing the reverse voltage applied to the varactor diode. The performance indicators of the dual-channel radio frequency power supply are displayed in real time through the acquisition and processing of the microprocessor ADC.

[0075] Figure 8 The structural schematic diagram of the voltage conditioning circuit according to an embodiment of the present invention is shown.

[0076] As Figure 8As shown in the figure, the voltage conditioning circuit includes a peak detection circuit and a voltage adjustment circuit; the peak detection circuit is used to detect the peak value of the radio frequency power generator. By utilizing the charging and discharging of the detection capacitor 803, during a period of the positive half-cycle of the AC signal, the detection diode 802 is equivalent to a short circuit, and the positive half-cycle of the AC signal is directly applied to the detection capacitor 803 for charging, and the voltage on the detection capacitor 803 will quickly reach the peak value of the AC signal. After reaching the peak value, since the voltage of the AC signal starts to decrease, the voltage on the detection resistor 801 cannot be maintained, and the detection capacitor 803 starts to discharge to the detection resistor 801, and this discharging process is very slow. During the negative half-cycle of the AC signal, since the detection diode 802 is cut off and the voltage of the detection capacitor 803 cannot change suddenly, a part of the voltage is still maintained on the detection capacitor 803. In order to make the output close to a straight line (with a small ripple voltage), the discharging speed must be made very slow. Since the discharging time constant T = RC, where R is the resistance value of the detection resistor; C is the capacitance value of the detection capacitor, a very large detection resistor 801 must be selected to ensure a very slow discharging speed. This process is to first charge to the peak value, then discharge a small amount, then quickly charge to the peak value again, and then discharge a small amount. At the same time, in order to avoid the influence of the subsequent circuit on the peak detection circuit, a voltage follower is added as the isolation between the peak detection circuit and the voltage adjustment circuit to improve the anti-interference ability of the circuit.

[0077] According to an embodiment of the present invention, the external input voltage of the series voltage regulator circuit is 12V, and the adjustable voltage range is 0V - 10V. Communication between the microprocessor and the digital potentiometer is carried out through the SPI (Serial Peripheral Interface) protocol to change the input voltage applied to the power supply voltage input terminals of the first inverter unit and the second inverter unit, so as to change the output current magnitudes of the first inverter unit and the second inverter unit. Resonance is generated by the subsequent oscillation module, and the peak-to-peak voltage of the resonance is converted and collected through the voltage conditioning circuit and displayed in real time.

[0078] According to an embodiment of the present invention, the voltage adjustment circuit converts the parameter data collected by the peak detection circuit into data that can be processed by the microprocessor I / O (Input / Output) port through ADC sampling, and sends it to the microprocessor I / O port for processing; the microprocessor processes the parameter data, including: determining the value of the preset parameter according to the parameter data, and giving real-time display to the OLED (Organic Electroluminescence Display) of the display circuit through the IIC (Inter-Integrated Circuit) protocol. For example, the performance indicators of the radio frequency power generator include the voltage magnitude of the supply voltage Vs of the inverter module, ranging from 0V to 10V, with the unit of volt; the unit of the current magnitude in the self-excited oscillation circuit is mA, milliamperes; the peak-to-peak value of the radio frequency signal.

[0079] According to an embodiment of the present invention, the radio frequency power generator may further include a protection circuit with output short circuit and overcurrent protection.

[0080] Figure 9 The structural block diagram of the series voltage regulator circuit according to an embodiment of the present invention is shown.

[0081] As Figure 9 shown, the series voltage regulator circuit consists of an adjustment transistor, a comparator, a sampling circuit, and a filtering circuit. The DC reference voltage Vref is changed through a digital potentiometer. When the external DC voltage Vin output by the power supply changes, that is, the voltage input by the external power supply changes, or when the capacitive load changes and causes the adjustable DC voltage Vdc at the output to increase, the sampling voltage of the sampling circuit also increases accordingly. Since the DC reference voltage Vref remains unchanged, the input difference signal of the comparator decreases. After being amplified by the comparator, the base potential of the adjustment transistor decreases, and the voltage drop of the adjustment transistor increases, so that the output adjustable DC voltage Vdc remains basically unchanged. Similarly, when the power supply voltage or the load changes and causes the output voltage to decrease, the output voltage can also be kept basically unchanged.

[0082] According to an embodiment of the present invention, the DC voltage range input by the external power supply is 5V to 32V, and 12V DC is selected. Without special instructions, the test results of the present invention are all measured under the condition of 12V. The voltage input by the external power supply enters through the adjustment transistor and then outputs the voltage, which is feedback to the reverse input terminal of the comparator through voltage division sampling and compared with the co-directional input Vref. The voltage drop of the adjustment transistor is continuously adjusted until the sampling voltage is equal to Vref, and the output voltage is kept stable. The DC reference voltage Vref is output by the digital potentiometer. The microcontroller communicates with the digital potentiometer through the SPI protocol to adjust the DC reference voltage Vref, and the magnitude of Vref is between 0V and 5V.

[0083] Figure 10AShows a schematic diagram of the principle of a self-excited oscillation circuit according to another embodiment of the present invention. Figure 10B Shows a waveform diagram of the measurement points of a self-excited oscillation circuit according to another embodiment of the present invention.

[0084] As Figure 10A shown, the self-excited oscillation circuit includes a current amplification and feedback oscillation circuit, a feedback resistor R1, a feedback capacitor C1, and an LCL circuit; wherein, the current amplification and feedback oscillation circuit includes a feedback oscillator, a feedback inverter, a first inverter unit, and a second inverter unit; the current amplification and feedback oscillation circuit is responsible for regulating the phase of the oscillating radio frequency energy in the LCL circuit and switching the current through the second inductor L1 and the first inductor L2 at the zero crossing of the radio frequency signal. The L in the LCL circuit refers to an inductor, the C refers to a capacitor, the LCL circuit is a circuit with an oscillating function composed of an inductor and a capacitor, and the inductor L1, the capacitor C0, and the inductor L2 are connected in series to form the LCL circuit. The feedback oscillator is composed of three inverters, and the feedback oscillator and a feedback resistor R1 are used to increase the gain. Compared with the feedback oscillator including a single inverter in the prior art, the feedback oscillator enables the circuit to reach its balanced operating state faster. In order to maximize the induced flyback voltage, the current through the inductor is made as large as possible and switched as fast as possible. The equivalent capacitor C0 of the adjustable capacitor circuit samples the voltage in the tank of the LCL circuit of the oscillation network unit, drives the input of the feedback unit together with the feedback resistor R1 and the feedback capacitor C1, and tests the waveforms corresponding to points A, B, C, and D, as Figure 10B shown. The waveform at point A is opposite in phase and the same in amplitude as the waveform at point C; the waveform at point B is opposite in phase and the same in amplitude as the waveform at point D; the peak-to-peak value of the waveforms at points A and C is -150V to 150V; the waveforms at points B and D show that the value of Vs is 5V.

[0085] Figure 11 Shows a flowchart of a control method for a radio frequency power generator according to an embodiment of the present invention.

[0086] As Figure 11 shown, the method includes operations S1101 to S1102.

[0087] In operation S1101, obtain the amplitude of the initial sine wave signal output by the signal output terminal of the oscillation module and the sine wave reference amplitude.

[0088] In operation S1102, according to the difference between the amplitude of the initial sine wave signal and the sine wave reference amplitude, calculate the DC reference voltage according to the voltage regulation algorithm, so that the voltage stabilization circuit provides the target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply; the target DC voltage enables the self-excited oscillation circuit to output the target sine wave signal.

[0089] According to an embodiment of the present invention, the voltage regulation algorithm can adopt the PID algorithm or can also adopt the following method: preset the unit amount of a single adjustment of the digital potentiometer. When the amplitude of the initial sine wave signal is greater than the sine wave reference amplitude, the digital potentiometer adjusts by one unit amount according to the preset method. When the amplitude of the initial sine wave signal is still greater than the sine wave reference amplitude, the digital potentiometer continues to adjust by one unit amount according to the preset method until the amplitude of the initial sine wave signal is equal to the sine wave reference amplitude. When the amplitude of the initial sine wave signal is less than the sine wave reference amplitude, the digital potentiometer adjusts by one unit amount according to the preset method. When the amplitude of the initial sine wave signal is still less than the sine wave reference amplitude, the digital potentiometer continues to adjust by one unit amount according to the preset method until the amplitude of the initial sine wave signal is equal to the sine wave reference amplitude.

[0090] The following refers to Figures 12A to 12D to further illustrate the performance test comparison of multiple inverters in the embodiments of the present invention.

[0091] Figure 12A Fig. shows a schematic diagram of the performance test comparison of the output voltages of different inverters according to the embodiments of the present invention under different supply voltages. Figure 12B Fig. shows a schematic diagram of the performance test comparison of the oscillation starting voltages of different inverters according to the embodiments of the present invention under different supply voltages. Figure 12C Fig. shows a schematic diagram of the comparison of current values of different inverters according to the embodiments of the present invention under the same supply voltage. Figure 12D Fig. shows a schematic diagram of the comparison of powers of different inverters according to the embodiments of the present invention under the same supply voltage.

[0092] In Figure 12A , Figure 12B , Figure 12C and Figure 12D , the model of inverter chip 1 is 74HC04D, 653; the model of inverter chip 2 is SN74AHC14DR, the model of inverter chip 3 is SN74HCT04DR, the model of inverter chip 4 is SN74HC04DR, the model of inverter chip 5 is SN74HCT14DR, and the model of inverter chip 6 is SN74AHCT04DR. As Figure 12AAs shown, the figure shows the maximum output voltage curve and the minimum output voltage curve. The maximum output voltage curve represents the maximum value of the output voltage of the RF power generator corresponding to each inverter chip, and the minimum output voltage curve represents the minimum value of the output voltage of the RF power generator corresponding to each inverter chip. When the supply voltage Vs of the voltage applied across the inverter increases, the peak-to-peak value Vpp of the output voltage of the RF power generator will increase accordingly, but the increase in the peak-to-peak voltage of the output voltage of the RF power generator corresponding to inverter chip 4 is not obvious; when the supply voltage Vs = 10V, the peak-to-peak value of the output voltage of the RF power generator corresponding to inverter chip 2 is the largest; as Figure 12B shown, the vertical axis is voltage, and the unit is V; in Figure 12B , each inverter chip corresponds to two quantities. The quantity on the left is the supply voltage of the inverter chip, and the quantity on the right is the starting oscillation voltage corresponding to the inverter chip. The minimum starting oscillation voltages of these inverters are about 2V. At the same time, the maximum supply voltage Vs of inverter chip 4 and inverter chip 3 is 6V, and the other inverter chips can work stably for a long time when the supply voltage Vs = 10V; as Figure 12C and Figure 12D shown, when the supply voltage Vs = 10V, the current consumed by the dual-channel RF power supply loop generated by the RF power generator corresponding to inverter chip 2 and the RF power generator of inverter chip 6 is as high as 30mA, and the corresponding power consumption is more than 3W, while the power consumption of other types of inverter chips does not exceed 2W. Considering comprehensively that the peak-to-peak value is as large as possible and the power consumption is small, inverter chip 5 is the optimal choice.

[0093] Figure 13 shows the stability test result diagram of the RF power generator according to the embodiment of the present invention.

[0094] A mass spectrometer is an instrument for measuring the mass-to-charge ratio of ions, with characteristics such as high sensitivity and high specificity, and is widely used in fields such as national defense, medical treatment, materials, and food safety. A dual-channel RF power generator is a key component of mass spectrometry equipment, mainly used for ion transmission focusing and even trapping in capacitive load devices such as poles, ion traps, and ion funnels. The maximum output peak-to-peak voltage of the RF power generator depends on the maximum current that the inverter can provide, and the resonance frequency is jointly determined by the inherent properties L1, L2, and C0 of the circuit and the load capacitance. Both the amplitude and the frequency will affect the movement trajectory of ions, thereby affecting the sensitivity of the mass spectrometer.

[0095] A common method for driving RF electrodes is to combine a frequency synthesizer, an RF amplifier, and a high-quality factor resonator. It is necessary to solve the frequency and impedance matching problems between the RF source and the resonator to resonantly drive capacitive mass spectrometry components such as ion traps and ion guides. These RF driving methods (usually consuming several watts to dozens of watts) are designed for desktop systems, rather than for low-power designs.

[0096] According to an embodiment of the present invention, the maximum peak-to-peak value of the target sine wave signal output by the radio frequency power generator can reach 290V, and the radio frequency signal has a resonance frequency range of 0.5 MHz - 2.5 MHz. Moreover, the phase difference between the two sine wave signals output by the radio frequency power generator is 179 ± 1°, and the maximum relative error of the peak-to-peak value is 1.64V. As Figure 13 shown, the figure shows a voltage curve and a frequency curve, where the voltage curve represents the voltage of the target sine wave signal output by the radio frequency power generator, and the frequency curve represents the frequency of the target sine wave signal output by the radio frequency power generator. When the supply voltage Vs = 5V and a quadrupole capacitive load is added, the circuit of the radio frequency power generator provided by the present invention reaches a stable state after continuous operation for two hours. The maximum peak-to-peak value of the target sine wave signal output by the radio frequency power generator reaches 203.42V. After reaching the stable state, the voltage of the target sine wave signal output by the radio frequency power generator is about 201.46V, and the frequency of the target sine wave signal is about 1.46 MHz.

[0097] Therefore, the radio frequency power generator according to the embodiment of the present invention can simultaneously output two-way radio frequency signals with equal amplitudes and opposite phases, and both the amplitude size and the frequency can be programmatically controlled. Moreover, it has a small volume and is easy to carry. It can be used to drive capacitive loads such as pole rods, ion traps, and ion funnels, and can be applied to uses such as the transmission focusing and even trapping of different ions, improving the sensitivity and application range of the mass spectrometer. The embodiment of the present invention provides a realization method for the new trend of miniaturization, intelligence, and portability of mass spectrometry.

[0098] The above describes the embodiments of the present invention. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described separately above, this does not mean that the measures in each embodiment cannot be used advantageously in combination. Without departing from the scope of the present invention, those skilled in the art can make various substitutions and modifications, and these substitutions and modifications should all fall within the scope of the present invention.

Claims

1. A radio frequency power generator, characterized in that, The radio frequency power generator includes: a voltage stabilizing circuit and a self-excited oscillation circuit; The self-excited oscillation circuit includes an oscillation module and an inverter module; The inverter module includes a first input terminal, a first output terminal, and a supply voltage input terminal; the oscillation module includes a second input terminal, a second output terminal, and a signal output terminal; the first input terminal is connected to the second output terminal; the first output terminal is connected to the second input terminal; The voltage stabilizing circuit includes a power input terminal and a power output terminal; the power output terminal is connected to the supply voltage input terminal; the power input terminal is used to input an external DC voltage; the voltage stabilizing circuit is used to generate a target DC voltage according to the external DC voltage and a sine wave reference amplitude, and input the target DC voltage into the supply voltage input terminal; The oscillation module is used to perform self-excited oscillation and generate an initial sine wave signal; The inverter module is used to amplify the initial sine wave signal according to the target DC voltage, and input the amplified initial sine wave signal into the oscillation module, so that the signal output terminal of the oscillation module outputs a target sine wave signal; The inverter module includes a first inverter unit and a second inverter unit; the oscillation module includes a feedback unit and an oscillation network unit; The oscillation network unit is used to perform self-excited oscillation to generate the initial sine wave signal, and input the initial sine wave signal into the feedback unit; the feedback unit is used to feedback the initial sine wave signal to the first inverter unit, and is also used to invert the initial sine wave signal by 180°, and feedback the inverted initial sine wave signal to the second inverter unit.

2. The radio frequency power generator according to claim 1, wherein The first inverter unit includes a third input terminal, a third output terminal, and a first supply voltage input terminal; the second inverter unit includes a fourth input terminal, a fourth output terminal, and a second supply voltage input terminal; The power output terminal is respectively connected to the first supply voltage input terminal and the second supply voltage input terminal; the voltage stabilizing circuit provides the target DC voltage for the first supply voltage input terminal and the second supply voltage input terminal; The feedback unit includes a fifth input terminal, a fifth output terminal, and a sixth output terminal; the oscillation network unit includes a sixth input terminal, a seventh input terminal, a seventh output terminal, and an eighth output terminal; The third input terminal is connected to the fifth output terminal; the fourth input terminal is connected to the sixth output terminal; the third output terminal is connected to the sixth input terminal; The fourth output terminal is connected to the seventh input terminal; The seventh output terminal or the eighth output terminal is connected to the fifth input terminal; The first inverter unit is configured to amplify the initial sine wave signal according to the target DC voltage, and input the amplified initial sine wave signal into the oscillation module, so that a first target sine wave signal is output from the seventh output terminal; the second inverter unit is configured to amplify the inverted initial sine wave signal according to the target DC voltage, and input the amplified inverted initial sine wave signal into the oscillation module, so that a second target sine wave signal is output from the eighth output terminal; the first target sine wave signal and the second target sine wave signal constitute the target sine wave signal.

3. The radio frequency power generator according to claim 2, wherein, The oscillation network unit includes a first inductor, a second inductor, and an adjustable capacitor circuit; One end of the first inductor is the sixth input terminal of the oscillation network unit; the other end of the first inductor is connected to one end of the adjustable capacitor circuit; one end of the second inductor is the seventh input terminal of the oscillation network unit; the other end of the second inductor is connected to the other end of the adjustable capacitor circuit; one end of the adjustable capacitor circuit is the seventh output terminal of the oscillation network unit; the other end of the adjustable capacitor circuit is the eighth output terminal of the oscillation network unit; According to the target capacitance value output by the adjustable capacitor circuit, the frequencies of the sine wave signals output from the seventh output terminal and the eighth output terminal of the oscillation network unit are the target frequencies.

4. The radio frequency power generator according to claim 3, wherein The adjustable capacitor circuit includes a varactor circuit and an oscillation capacitor; The varactor circuit includes a varactor diode and a voltage regulating circuit; the oscillation capacitor is connected in parallel with the varactor diode; The voltage regulating circuit is connected to the varactor diode; the voltage regulating circuit is configured to adjust the voltage across the varactor diode, so that the varactor diode outputs a preset capacitance value; wherein, the sum of the preset capacitance value and the capacitance value of the oscillation capacitor is the target capacitance value.

5. The radio frequency power generator according to claim 2, wherein The feedback unit includes a feedback capacitor, a feedback resistor, a feedback oscillator, and a feedback inverter; The feedback oscillator includes an odd number of inverters connected in series; The seventh output terminal or the eighth output terminal of the oscillation network unit is connected to one end of the feedback capacitor; the other end of the feedback capacitor is connected to one end of the feedback resistor; the other end of the feedback capacitor is also connected to one end of the feedback oscillator; the other end of the feedback oscillator is connected to the other end of the feedback resistor; the connection point of the other end of the feedback oscillator and the other end of the feedback resistor is used as the fifth output terminal of the feedback unit; The fifth output terminal is connected to the input terminal of the feedback inverter; the output terminal of the feedback inverter is used as the sixth output terminal of the feedback unit.

6. The radio frequency power supply generator according to claim 2, wherein Both the first inverter unit and the second inverter unit are complementary metal-oxide-semiconductor inverters.

7. The radio frequency power generator according to claim 6, characterized in that, The complementary metal-oxide-semiconductor inverter includes a PNP type bipolar junction transistor, an NPN type bipolar junction transistor, a first diode, a second diode, and a capacitor; The emitter of the PNP type bipolar transistor is connected to the cathode of the first diode; the cathode of the first diode is connected to the positive pole of the power output terminal of the voltage stabilizing circuit; the anode of the first diode is connected to the base of the PNP type bipolar transistor; the base of the PNP type bipolar transistor is connected to one end of the capacitor; the other end of the capacitor is connected to the base of the NPN type bipolar transistor; the collector of the PNP type bipolar transistor is connected to the collector of the NPN type bipolar transistor; the base of the NPN type bipolar transistor is respectively connected to the cathode of the second diode and the fifth output terminal; the anode of the second diode is connected to the emitter of the NPN type bipolar transistor; the emitter of the NPN type bipolar transistor is connected to the negative pole of the power output terminal of the voltage stabilizing circuit.

8. The radio frequency power generator according to claim 1, wherein, The voltage stabilizing circuit further includes a feedback input terminal; the feedback input terminal is connected to the signal output terminal of the oscillation module. The voltage stabilizing circuit is used to collect the amplitude of the initial sine wave signal output by the signal output terminal of the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, obtain a DC reference voltage according to a voltage regulation algorithm, and output a target DC voltage according to the DC reference voltage and the external DC voltage.

9. The radio frequency power generator according to claim 8, wherein The voltage stabilizing circuit includes a reference voltage output circuit and a series voltage stabilizing circuit. The output terminal of the reference voltage output circuit is connected to the input terminal of the series voltage stabilizing circuit; the input terminal of the reference voltage output circuit is connected to the signal output terminal of the oscillation module; the reference voltage output circuit is used to collect the amplitude of the initial sine wave signal output by the oscillation module, and according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, output a DC reference voltage according to a voltage regulation algorithm, and input the DC reference voltage into the series voltage stabilizing circuit. The series voltage stabilizing circuit includes an external voltage input terminal and a reference voltage input terminal; the external voltage input terminal is connected to a power supply; the reference voltage input terminal is connected to the output terminal of the reference voltage output circuit; the output terminal of the series voltage stabilizing circuit is connected to the power supply voltage input terminal of the inverter module; the series voltage stabilizing circuit is used to provide a target DC voltage to the inverter module according to the DC reference voltage and the external DC voltage output by the power supply.

10. The radio frequency power generator according to claim 9, characterized in that, The reference voltage output circuit includes a voltage conditioning circuit, a control circuit and a variable potentiometer. The input terminal of the voltage conditioning circuit is connected to the signal output terminal of the oscillation module; the output terminal of the voltage conditioning circuit is connected to the control circuit; the voltage conditioning circuit is used to collect the amplitude of the initial sine wave signal, and input the amplitude of the initial sine wave signal into the control circuit. The control circuit is connected to the variable potentiometer; the control circuit is used to generate a control signal according to the difference between the sine wave reference amplitude and the amplitude of the initial sine wave signal, and send the control signal to the variable potentiometer. The variable potentiometer outputs the DC reference voltage according to the control signal.

Images