Power synthesis device and radio frequency power supply system

Abstract

The invention provides a power synthesis device and a radio frequency power supply system. The power synthesis device comprises an input end, an output end, a first radio frequency power amplifier unit, a power distribution unit, N second radio frequency power amplifier units and a power synthesis unit. The first radio frequency power amplifier unit is used for performing power amplification on the initial radio frequency signal to obtain first radio frequency electric energy. The power distribution unit is used for receiving the first radio frequency electric energy through the power input end and carrying out power distribution on the first radio frequency electric energy to obtain N first sub radio frequency electric energy with the same phase angle. And each second radio frequency power amplifier unit is used for performing power amplification on the first sub radio frequency electric energy output by the corresponding power output end again to obtain second sub radio frequency electric energy. And the power synthesis unit is connected with the output end and is used for performing power synthesis on the second sub radio frequency electric energy obtained by the N second radio frequency power amplifiers to obtain target radio frequency electric energy. According to the invention, synthesis of multiple sub radio frequency electric energy can be realized.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a power synthesis device and a radio frequency power supply system. Background Art

[0002] At present, with the rapid development of RF power technology, the requirements for RF power systems that provide power to loads are becoming more and more stringent. In actual applications, it is found that the initial RF signal will have different degrees of phase shift during the modulation process, resulting in the inability to synthesize the required high-power target RF power. Therefore, how to achieve power synthesis of multiple sub-RF power to obtain the high-power target RF power required by the load has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a power synthesis device and a radio frequency power supply system, which can realize power synthesis of multiple sub-radio frequency electric energies to obtain high-power target radio frequency electric energy required by a load.

[0004] In a first aspect, a power synthesis device is provided, the power synthesis device comprising an input end, an output end, a first RF power amplifier unit, a power distribution unit, N second RF power amplifier units and a power synthesis unit, the power distribution unit comprising a power input end and N power output ends, wherein N≥2. The input end is used to connect to a signal source to receive an initial RF signal output by the signal source. The first RF power amplifier unit is connected between the input end and the power input end, and the first RF power amplifier unit is used to power amplify the initial RF signal to obtain a first RF electric energy. The power distribution unit is used to receive the first RF electric energy through the power input end, and to power distribute the first RF electric energy to obtain N first sub-RF electric energies with the same phase angle, and output them respectively through the N power output ends. The N second RF power amplifier units are respectively connected between the N power output ends and the power synthesis unit, and each second RF power amplifier unit is used to power amplify the first sub-RF electric energy output by the corresponding power output end again to obtain a second sub-RF electric energy. The power synthesis unit is connected to the output end, and is used to synthesize the second sub-RF power energy obtained by the N second RF power amplifiers to obtain the target RF power. The output end is used to be connected to a load to output the target RF power to the load.

[0005] In a possible implementation, the first RF power amplifier unit includes a driver and a first RF power amplifier, wherein the driver and the first RF power amplifier are sequentially connected between the input terminal and the power input terminal. The driver is used to provide a driving RF signal to the first RF power amplifier under the power supply of the first DC power, and the first RF power amplifier is used to amplify the power of the driving RF signal under the power supply of the second DC power to obtain the first RF power.

[0006] In a possible implementation, each second RF power amplifier unit includes a second RF power amplifier, and the second RF power amplifier is connected between the corresponding power output terminal and the power synthesis unit. The second RF power amplifier is used to power amplify the first sub-RF power again under the power supply of the third DC power to obtain the second sub-RF power.

[0007] In a possible implementation manner, the voltage values ​​of the N third direct current powers are all the same, so that the amplitudes of the N second sub-radio power energies are all the same.

[0008] In one possible embodiment, the voltage value of at least one third DC power is different from the voltage values ​​of other third DC power, so that the amplitude of the second sub-RF power obtained by the second RF power amplifier corresponding to the voltage value of at least one third DC power is different from the amplitude of the second sub-RF power obtained by the second RF power amplifier corresponding to other third DC power.

[0009] In a possible implementation, the amplitude of the first sub-RF power energy obtained by the first RF power amplifier varies according to the change of the voltage value of the second DC power energy, and the amplitude of the second sub-RF power energy obtained by each second RF power amplifier varies according to the change of the voltage value of the corresponding third DC power energy. The voltage value of the first DC power energy is different from the voltage value of the second DC power energy, and the voltage value of the second DC power energy is less than the voltage value of any third DC power energy.

[0010] In a possible implementation, N=2, and the voltage values ​​of the two third DC electric energies corresponding to the two second RF power amplifier units are different, so that the amplitudes of the two second sub-RF electric energies obtained by the two RF power amplifier units are different. The power synthesis unit includes a first power synthesis module and a second power synthesis module, the first power synthesis module is connected to the two second RF power amplifier units and the output end, the first power synthesis module is used to conduct in the positive half cycle of the two second sub-RF electric energies, and when conducting, the two second sub-RF electric energies are power synthesized to obtain positive half-cycle RF electric energy; the second power synthesis module is connected to the two second RF power amplifier units and the output end, the second power synthesis module is used to conduct in the negative half cycle of the two sub-RF electric energies, and when conducting, the two sub-RF electric energies are power synthesized to obtain negative half-cycle RF electric energy. Wherein, the positive half-cycle RF electric energy and the negative half-cycle RF electric energy are mixed at the output end to obtain the target RF electric energy.

[0011] In a possible implementation manner, the first power synthesis module is further used to disconnect in the negative half cycle of the two sub-RF electric energies, and stop inputting the two sub-RF electric energies when disconnected. The second power synthesis module is further used to disconnect in the positive half cycle of the two sub-RF electric energies, and stop inputting the two sub-RF electric energies when disconnected.

[0012] In a possible implementation manner, the amplitude of the positive half-cycle radio frequency power energy is the same as that of the negative half-cycle radio frequency power energy, and the amplitude of the positive half-cycle radio frequency power energy and the amplitude of the negative half-cycle radio frequency power energy are both the sum of the amplitudes of the two sub-radio frequency power energies.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a signal source and a power synthesis device. The power synthesis device comprises an input end, an output end, a first radio frequency power amplifier unit, a power distribution unit, N second radio frequency power amplifier units and a power synthesis unit, the power distribution unit comprising a power input end and N power output ends, wherein N≥2. The input end is used to connect to the signal source to receive the initial radio frequency signal output by the signal source. The first radio frequency power amplifier unit is connected between the input end and the power input end, and the first radio frequency power amplifier unit is used to power amplify the initial radio frequency signal to obtain a first radio frequency electric energy. The power distribution unit is used to receive the first radio frequency electric energy through the power input end, and to power distribute the first radio frequency electric energy to obtain N first sub-radio frequency electric energies with the same phase angle, and output them respectively through the N power output ends. The N second radio frequency power amplifier units are respectively connected between the N power output ends and the power synthesis unit, and each second radio frequency power amplifier unit is used to power amplify the first sub-radio frequency electric energy output by the corresponding power output end again to obtain a second sub-radio frequency electric energy. The power synthesis unit is connected to the output end, and is used to synthesize the second sub-RF power energy obtained by the N second RF power amplifiers to obtain the target RF power. The output end is used to be connected to a load to output the target RF power to the load.

[0014] The power synthesis device and RF power supply system of the present application, by setting a power distribution unit and distributing the power of the first RF electric energy to obtain N first sub-RF electric energies with the same phase angle, can avoid the different phase angles of the first sub-RF electric energies affecting subsequent power synthesis, and by setting N second RF power amplifier units for again power amplifying the first sub-RF electric energies output by the corresponding power output end to obtain N second sub-RF electric energies, and then by setting a power synthesis unit to power synthesize the second sub-RF electric energies obtained by the N second RF power amplifiers, power synthesis of multiple sub-RF electric energies is achieved to obtain the high-power target RF electric energy required by the load, and by setting the first RF power amplifier unit to power amplify the initial RF signal to obtain the first RF electric energy, it can also enable the power distribution unit, N second RF power amplifiers and the power synthesis unit to work normally to obtain the required target RF electric energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a power synthesis device in some embodiments of the present application.

[0017] Figure 2 This is a block diagram of a first radio frequency power amplifier unit in some embodiments of the present application.

[0018] Figure 3 This is a block diagram of a second radio frequency power amplifier unit in some embodiments of the present application.

[0019] Figure 4 It is a block diagram of a power synthesis unit in some embodiments of the present application.

[0020] Figure 5 Schematic diagram of a circuit of a power synthesis device in some embodiments of the present application.

[0021] Figure 6 It is a block diagram of a radio frequency power supply system in some embodiments of the present application.

[0022] Description of the accompanying drawings: 1000, RF power supply system, SS, signal source, RF1, initial RF signal, 10, power synthesis device, PA1, first RF power amplifier unit, 310, driver, DC1, first direct current power, 320, first RF power amplifier, DC2, second direct current power, RFd, driving RF signal, RF2, first RF power, 100, power distribution unit, RF3, first sub-RF power, PA2, second RF power amplifier unit, 410, second RF power amplifier, DC3, third direct current power, RF4, second sub-RF power Energy, 200, power synthesis unit, 210, first power synthesis module, D1, first diode, D2, second diode, T1, first transformer, W1, first winding, W2, second winding, 220, second power synthesis module, D3, third diode, D4, fourth diode, T2, second transformer, W3, third winding, W4, fourth winding, RF+, positive half-cycle RF power, RF-, negative half-cycle RF power, RF5, target RF power, In, input end, Out, output end, E1, first potential, E2, second potential, RL, load. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0027] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a power synthesis device in some embodiments of the present application. Figure 1As shown, the present application provides a power synthesis device 10, which includes an input terminal In, an output terminal Out, a first RF power amplifier unit PA1, a power distribution unit 100, N second RF power amplifier units PA2 and a power synthesis unit 200, wherein the power distribution unit 100 includes a power input terminal and N power output terminals, wherein N≥2. The input terminal In is used to connect to a signal source SS to receive an initial RF signal RF1 output by the signal source SS. The first RF power amplifier unit PA1 is connected between the input terminal In and the power input terminal, and the first RF power amplifier unit PA1 is used to amplify the power of the initial RF signal RF1 to obtain a first RF power RF2. The power distribution unit 100 is used to receive the first RF power RF2 through the power input terminal, and to distribute the power of the first RF power RF2 to obtain N first sub-RF power RF3 with the same phase angle, and to output them respectively through the N power output terminals. The N second RF power amplifier units PA2 are respectively connected between the N power output terminals and the power synthesis unit 200, and each second RF power amplifier unit PA2 is used to power-amplify the first sub-RF power RF3 output by the corresponding power output terminal again to obtain the second sub-RF power RF4. The power synthesis unit 200 is also connected to the output terminal Out, and the power synthesis unit 200 is used to power synthesize the second sub-RF power RF4 obtained by the N second RF power amplifiers 410 to obtain the target RF power RF5. The output terminal Out is used to connect to the load RL to output the target RF power RF5 to the load RL.

[0028] Thus, the above-mentioned power synthesis device 10 in the present application, by setting up a power distribution unit 100 and distributing the power of the first RF power RF2 to obtain N first sub-RF power RF3 with the same phase angle, can avoid the different phase angles of the first sub-RF power RF3 affecting the subsequent power synthesis, and by setting up N second RF power amplifier units PA2 for power amplifying the first sub-RF power RF3 output from the corresponding power output end again to obtain N second sub-RF power RF4, and then by setting up a power synthesis unit 200 to power synthesize the second sub-RF power RF4 obtained by the N second RF power amplifiers 410, power synthesis of multiple sub-RF power energies is achieved to obtain the high-power target RF power RF5 required by the load RL, and by setting the first RF power amplifier unit PA1 to power amplify the initial RF signal RF1 to obtain the first RF power RF2, it can also enable the power distribution unit 100, N second RF power amplifiers 410 and the power synthesis unit 200 to work normally to obtain the required target RF power RF5.

[0029] Please also read Figure 2 , Figure 2FIG. 1 is a block diagram of a first radio frequency power amplifier unit in some embodiments of the present application. Figure 1 , Figure 2 As shown, the first RF power amplifier unit PA1 includes a driver 310 and a first RF power amplifier 320, and the driver 310 and the first RF power amplifier 320 are connected between the input terminal In and the power input terminal in sequence. The driver 310 is used to provide a driving RF signal RFd to the first RF power amplifier 320 under the power supply of the first DC power DC1, and the first RF power amplifier 320 is used to power amplify the driving RF signal RFd under the power supply of the second DC power DC2 to obtain the first RF power RF2.

[0030] Therefore, in the above-mentioned power synthesis device 10 in the present application, the power value of the initial RF signal RF1 output by the signal source SS is very small, and the driver 310 is set to provide the driving RF signal RFd to the first RF power amplifier 320 under the power supply of the first DC power DC1, so that the first RF power amplifier 320 can amplify the power of the driving RF signal RFd under the power supply of the second DC power DC2 to obtain the first RF power RF2.

[0031] The driver 310 is used for obtaining a driving RF signal RFd according to the initial RF signal RF1 under the supply of the first direct current power DC1 , and providing the driving RF signal RFd to the first RF power amplifier 320 .

[0032] Please also read Figure 3 , Figure 3 FIG. 1 is a block diagram of a second radio frequency power amplifier unit in some embodiments of the present application. Figure 1 , Figure 3 As shown, each second RF power amplifier unit PA2 includes a second RF power amplifier 410, and the second RF power amplifier 410 is connected between the corresponding power output terminal and the power synthesis unit 200. The second RF power amplifier 410 is used to further power amplify the first sub-RF power RF3 under the power supply of the third DC power DC3 to obtain the second sub-RF power RF4.

[0033] Therefore, in the above-mentioned power synthesis device 10 in the present application, since the first RF power amplifier 320 and the power distribution unit 100 have both modulated the initial RF signal RF1 to a certain extent, each second RF power amplifier unit PA2 may not include the driver 310 of the first RF power amplifier unit PA1, and can also directly power amplify the first sub-RF power RF3 again under the power supply of the third DC power DC3 to obtain the second sub-RF power RF4, thereby saving the use of the driver 310.

[0034] Furthermore, the power distribution unit 100 may include a connected transformer and a power divider, the transformer being used to couple the first RF power RF2 to the power divider, the power divider being used to distribute the power of the first RF power RF2 to obtain N first sub-RF power RF3 with the same phase angle, and output them respectively through N power output terminals.

[0035] In some embodiments, the voltage values ​​of the N third direct current powers DC3 are all the same, so that the amplitudes of the N second sub-radio power energies RF4 are all the same.

[0036] Therefore, the above-mentioned power synthesis device 10 in the present application configures the voltage values ​​of N third direct current powers DC3 to be the same so that the amplitudes of N second sub-radio power energies RF4 are the same, so that the power synthesis unit 200 has no loss when performing power synthesis on the N second sub-radio power energies RF4, in order to enable the power synthesis unit 200 to obtain the target RF power RF5.

[0037] Specifically, the amplitude of the target radio frequency power RF5 is the sum of the amplitudes of the target radio frequency power RF5.

[0038] In some embodiments, the voltage value of at least one third direct current power DC3 is different from the voltage values ​​of other third direct current power DC3, so that the amplitude of the second sub-RF power RF4 obtained by the second RF power amplifier 410 corresponding to the voltage value of at least one third direct current power DC3 is different from the amplitude of the second sub-RF power RF4 obtained by the second RF power amplifier 410 corresponding to other third direct current power DC3.

[0039] Therefore, in order to modulate and obtain the required target RF power RF5, the above-mentioned power synthesis device 10 in the present application can also make the voltage value of at least one third DC power DC3 different from the voltage values ​​of other third DC power DC3, so that the amplitude of the second sub-RF power RF4 obtained by the second RF power amplifier 410 corresponding to the voltage value of at least one third DC power DC3 can be different from the amplitude of the second sub-RF power RF4 obtained by the second RF power amplifier 410 corresponding to other third DC power DC3.

[0040] In some embodiments, the amplitude of the first sub-RF power RF3 obtained by the first RF power amplifier 320 varies according to the change of the voltage value of the second DC power DC2, and the amplitude of the second sub-RF power RF4 obtained by each second RF power amplifier 410 varies according to the change of the voltage value of the corresponding third DC power DC3. The voltage value of the first DC power DC1 is different from the voltage value of the second DC power DC2, and the voltage value of the second DC power DC2 is less than the voltage value of any third DC power DC3.

[0041] Thus, the above-mentioned power synthesis device 10 in the present application, by controlling the voltage value of the DC power, and specifically by making the voltage value of the first DC power DC1 different from the voltage value of the second DC power DC2, and the voltage value of the second DC power DC2 is less than any voltage value of the third DC power DC3, can make the driver 310 a driving source, the first RF power amplifier 320 an excitation source, and the second RF power amplifier 410 an amplification source.

[0042] Specifically, the first RF power amplifier 320 is set to power amplify the initial RF signal RF1 to obtain the first RF power RF2, thereby mainly playing the role of voltage reduction and excitation, so that the power distribution unit 100 can work normally and obtain N first sub-RF powers RF3 with the same phase angle, and the second RF power amplifier 410 power-amplifies the first sub-RF power RF3 outputted from the corresponding power output end again, thereby mainly playing the role of power amplification, saving electric energy and electronic components, and also being able to obtain the required target RF power RF5.

[0043] In some embodiments, the first RF power amplifier 320 has a corresponding first amplification factor according to the voltage value of the second DC power DC2, so that the amplitude of the first sub-RF power RF3 obtained by the first RF power amplifier 320 changes according to the change of the voltage value of the second DC power DC2. Each second RF power amplifier 410 has a corresponding second amplification factor according to the voltage value of the third DC power DC3, so that the amplitude of the second sub-RF power RF4 obtained by each second RF power amplifier 410 changes according to the change of the corresponding voltage value of the third DC power DC3.

[0044] In some embodiments, the power synthesis unit 200 may include a power synthesis circuit composed of passive components such as inductors and capacitors, or may include a power synthesis circuit composed of other passive components, but the present application is not limited thereto.

[0045] Please also read Figure 4 , Figure 4 FIG. 1 is a block diagram of a power synthesis unit in some embodiments of the present application. Figure 1 , Figure 4As shown, N=2, the voltage values ​​of the two third direct current electric energies DC3 corresponding to the two second RF power amplifier units PA2 are different, so that the amplitudes of the two second sub-RF electric energies RF4 obtained by the two RF power amplifier units are different. The power synthesis unit 200 includes a first power synthesis module 210 and a second power synthesis module 220. The first power synthesis module 210 is connected to the two second RF power amplifier units PA2 and the output terminal Out. The first power synthesis module 210 is used to conduct in the positive half cycle of the two second sub-RF electric energies RF4, and when conducting, the two second sub-RF electric energies RF4 are power synthesized to obtain positive half-cycle RF electric energy RF+; the second power synthesis module 220 is connected to the two second RF power amplifier units PA2 and the output terminal Out. The second power synthesis module 220 is used to conduct in the negative half cycle of the two sub-RF electric energies, and when conducting, the two sub-RF electric energies are power synthesized to obtain negative half-cycle RF electric energy RF-. The positive half-cycle radio frequency power RF+ and the negative half-cycle radio frequency power RF- are mixed at the output end Out to obtain the target radio frequency power RF5.

[0046] Thus, in the above-mentioned power synthesis device 10 in the present application, when N=2, the voltage values ​​of the two third direct current powers DC3 corresponding to the two second RF power amplifier units PA2 are different, so that the amplitudes of the two second sub-RF powers RF4 obtained by the two RF power amplifier units are different, that is, the power values ​​of the two second sub-RF powers RF4 obtained by the two RF power amplifier units are not equal, and power amplification cannot be performed through a power synthesis circuit composed of passive devices such as inductors and capacitors. By configuring the first power synthesis module 210, the second power synthesis module 220 and the corresponding functions, the power synthesis of the two sub-RF powers can be achieved.

[0047] In some embodiments, the first power synthesis module 210 is further used to disconnect in the negative half cycle of the two sub-RF electric energies, and stop inputting the two sub-RF electric energies when disconnected. The second power synthesis module 220 is further used to disconnect in the positive half cycle of the two sub-RF electric energies, and stop inputting the two sub-RF electric energies when disconnected.

[0048] In some embodiments, the amplitudes of the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- are the same, and the amplitudes of the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- are both the sum of the amplitudes of the two sub-RF power energies.

[0049] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a power synthesis device in some embodiments of the present application. Figure 4 , Figure 5As shown, the first power synthesis module 210 includes a first diode D1, a second diode D2 and a first transformer T1. The first transformer T1 includes a first winding W1 and a second winding W2. The anode of the first diode D1 is connected to one of the second RF power amplifier units PA2, the cathode of the first diode D1 is connected to the same-name end of the first winding W1, the anode of the second diode D2 is connected to the other second RF power amplifier unit PA2, the cathode of the second diode D2 is connected to the opposite-name end of the second winding W2, the opposite-name end of the first winding W1 is connected to the output end Out, and the same-name end of the second winding W2 is connected to the first potential E1.

[0050] like Figure 4 , Figure 5 As shown, the second power synthesis module 220 includes a third diode D3, a fourth diode D4 and a second transformer T2, the second transformer T2 includes a third winding W3 and a fourth winding W4, the cathode of the third diode D3 is connected to one of the second RF power amplifier units PA2, the anode of the third diode D3 is connected to the same-name end of the third winding W3, the cathode of the fourth diode D4 is connected to the other second RF power amplifier unit PA2, the anode of the fourth diode D4 is connected to the opposite-name end of the fourth winding W4, the opposite-name end of the third winding W3 is connected to the output end Out, and the same-name end of the fourth winding W4 is connected to the first potential E1.

[0051] like Figure 4 , Figure 5 As shown, the end of the load RL that is not connected to the output end Out is used to connect to the second potential E2. The voltage values ​​of the first potential E1 and the second potential E2 are different.

[0052] In some embodiments, the voltage value of the first potential E1 is smaller than the voltage value of the second potential E2 .

[0053] Furthermore, the difference between the voltage value of the second potential E2 and the voltage value of the first potential E1 is greater than the first voltage threshold.

[0054] Therefore, it is possible to avoid the power synthesis unit 200 composed of electronic devices such as diodes and transformers from raising the voltage value of the load RL, thereby preventing the target radio frequency power RF5 from being normally transmitted to the load RL.

[0055] In some embodiments, both the first transformer T1 and the second transformer T2 may be balun transformers.

[0056] In some embodiments, the load RL may be a plasma load RL.

[0057] In some embodiments, the first RF power amplifier 320 and each second RF power amplifier 410 may include a Class D RF power amplifier, a Class E RF power amplifier, or other types of RF power amplifiers, but the present application is not limited thereto.

[0058] It should be noted that the first sub-RF power RF3, the second sub-RF power RF4 and the target RF power RF5 can also be regarded as RF signals with target power values. However, compared with the initial RF signal RF1 and the driving RF signal RFd, the first sub-RF power RF3, the second sub-RF power RF4 and the target RF power RF5 have undergone power amplification, distribution and re-amplification, and thus have larger power values.

[0059] The power synthesis device 10 of the present application, through the above-mentioned structure, effectively solves the phase shift problem and amplitude difference problem of the initial RF signal RF1 during the power amplification process, and can better perform subsequent power synthesis, thereby realizing the power synthesis of multiple sub-RF electric energies to obtain the high-power target RF electric energy RF5 required by the load RL, and then better provide the target RF electric energy RF5 to the load RL such as the plasma load RL.

[0060] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a signal source SS and a power synthesis device 10 in any of the aforementioned embodiments.

[0061] Please refer again Figure 1 .like Figure 1As shown, the power synthesis device 10 includes an input terminal In, an output terminal Out, a first RF power amplifier unit PA1, a power distribution unit 100, N second RF power amplifier units PA2 and a power synthesis unit 200, and the power distribution unit 100 includes a power input terminal and N power output terminals, wherein N≥2. The input terminal In is used to connect to the signal source SS to receive the initial RF signal RF1 output by the signal source SS. The first RF power amplifier unit PA1 is connected between the input terminal In and the power input terminal, and the first RF power amplifier unit PA1 is used to amplify the power of the initial RF signal RF1 to obtain the first RF power RF2. The power distribution unit 100 is used to receive the first RF power RF2 through the power input terminal, and to distribute the power of the first RF power RF2 to obtain N first sub-RF power RF3 with the same phase angle, and output them respectively through the N power output terminals. The N second RF power amplifier units PA2 are respectively connected between the N power output terminals and the power synthesis unit 200, and each second RF power amplifier unit PA2 is used to power-amplify the first sub-RF power RF3 output by the corresponding power output terminal again to obtain the second sub-RF power RF4. The power synthesis unit 200 is also connected to the output terminal Out, and the power synthesis unit 200 is used to power synthesize the second sub-RF power RF4 obtained by the N second RF power amplifiers 410 to obtain the target RF power RF5. The output terminal Out is used to connect to the load RL to output the target RF power RF5 to the load RL.

[0062] The more specific structure of the power synthesis device 10 can refer to the relevant content of the power synthesis device 10 in any of the above embodiments, which will not be repeated here.

[0063] Specifically, the signal source SS can be a crystal oscillator source, so that the waveform of the output initial RF signal RF1 is a sine wave, and the waveform of the first RF power RF2 obtained according to the initial RF signal RF1 is also a sine wave, and then the waveforms of the first sub-RF power RF3, the second sub-RF power RF4 and the target RF power RF5 obtained in the process of power distribution, re-amplification and synthesis are also sine waves.

[0064] The power synthesis device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, effectively solve the phase shift problem and amplitude difference problem of the initial RF signal RF1 during the power amplification process, and can better perform subsequent power synthesis, thereby realizing the power synthesis of multiple sub-RF electric energies to obtain the high-power target RF electric energy RF5 required by the load RL, and then better provide the target RF electric energy RF5 to the load RL such as the plasma load RL.

[0065] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A power synthesis device, characterized in that: It includes an input end, an output end, a first radio frequency power amplifier unit, a power distribution unit, N second radio frequency power amplifier units and a power synthesis unit, wherein the power distribution unit includes a power input end and N power output ends, wherein N≥2; The input end is used to connect to a signal source to receive an initial radio frequency signal output by the signal source; The first RF power amplifier unit is connected between the input end and the power input end, and is used to amplify the power of the initial RF signal to obtain first RF power; The power distribution unit is used to receive the first radio frequency electric energy through the power input end, and distribute the first radio frequency electric energy to obtain N first sub-radio frequency electric energies with the same phase angle, and output them respectively through the N power output ends; The N second RF power amplifier units are respectively connected between the N power output ends and the power synthesis unit, and each second RF power amplifier unit is used to power-amplify the first sub-RF power energy output by the corresponding power output end again to obtain the second sub-RF power energy; The power synthesis unit is connected to the output end, and is used for synthesizing the second sub-RF electric energy obtained by the N second RF power amplifiers to obtain the target RF electric energy; The output end is used to be connected to a load so as to output target radio frequency electrical energy to the load.

2. The power synthesis device according to claim 1, characterized in that: The first RF power amplifier unit comprises a driver and a first RF power amplifier, wherein the driver and the first RF power amplifier are sequentially connected between the input terminal and the power input terminal; The driver is used to provide a driving RF signal to the first RF power amplifier under the supply of a first DC power, and the first RF power amplifier is used to amplify the power of the driving RF signal under the supply of a second DC power to obtain the first RF power.

3. The power synthesis device according to claim 2, characterized in that: Each second RF power amplifier unit includes a second RF power amplifier, and the second RF power amplifier is connected between the corresponding power output terminal and the power synthesis unit; The second RF power amplifier is used to power-amplify the first sub-RF power again under the supply of third DC power to obtain the second sub-RF power.

4. The power synthesis device according to claim 3, characterized in that: The voltage values ​​of the N third direct current powers are all the same, so that the amplitudes of the N second sub-radio frequency powers are all the same.

5. The power synthesis device according to claim 3, characterized in that: The voltage value of at least one third DC power is different from the voltage values ​​of other third DC power, so that the amplitude of the second sub-RF power obtained by the second RF power amplifier corresponding to the voltage value of at least one third DC power is different from the amplitude of the second sub-RF power obtained by the second RF power amplifier corresponding to other third DC power.

6. The power synthesis device according to claim 4 or 5, characterized in that: The amplitude of the first sub-RF power energy obtained by the first RF power amplifier changes according to the change of the voltage value of the second DC power energy, and the amplitude of the second sub-RF power energy obtained by each second RF power amplifier changes according to the change of the voltage value of the corresponding third DC power energy; The voltage value of the first DC power is different from the voltage value of the second DC power, and the voltage value of the second DC power is less than any voltage value of the third DC power.

7. The power synthesis device according to claim 5, characterized in that: N=2, the voltage values ​​of the two third DC electric energies corresponding to the two second RF power amplifier units are different, so that the amplitudes of the two second sub-RF electric energies obtained by the two RF power amplifier units are different; The power synthesis unit includes a first power synthesis module and a second power synthesis module, the first power synthesis module is connected to the two second RF power amplifier units and the output end, the first power synthesis module is used to conduct in the positive half cycle of the two second sub-RF electric energies, and when conducting, the two second sub-RF electric energies are power synthesized to obtain positive half cycle RF electric energy; The second power synthesis module is connected to the two second RF power amplifier units and the output end, and the second power synthesis module is used to conduct in the negative half cycle of the two sub-RF electric energies, and when conducting, the two sub-RF electric energies are power synthesized to obtain negative half cycle RF electric energy; The positive half-cycle radio frequency power and the negative half-cycle radio frequency power are mixed at the output end to obtain the target radio frequency power.

8. The power synthesis device according to claim 7, characterized in that: The first power synthesis module is also used to disconnect in the negative half cycle of the two sub-RF electric energies, and stop inputting the two sub-RF electric energies when disconnected; The second power synthesis module is further used for disconnecting in the positive half cycle of the two sub-RF electric energies, and stopping inputting the two sub-RF electric energies when disconnected.

9. The power synthesis device according to claim 8, characterized in that: The amplitude of the positive half-cycle radio frequency power is the same as that of the negative half-cycle radio frequency power, and the amplitude of the positive half-cycle radio frequency power and the amplitude of the negative half-cycle radio frequency power are both the sum of the amplitudes of the two sub-radio frequency power energies.

10. A radio frequency power supply system, characterized in that: It comprises a signal source and a power synthesis device as claimed in any one of claims 1 to 9.

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