Dry type automatic waste gas treatment device

Abstract

The invention discloses a dry type automatic waste gas treatment device which comprises a treatment cabinet (1), a waste gas pretreatment tank (2), a waste gas catalysis tank (3) and a waste gas adsorption tank (4), the waste gas pretreatment tank (2) is arranged in the left side space of the bottom of an inner cavity of the treatment cabinet (1), and the waste gas catalysis tank (3) is arranged in the right side space of the bottom of the inner cavity of the treatment cabinet (1); a waste gas adsorption tank (4) is arranged in the upper-layer space of an inner cavity of the treatment cabinet (1), a freezing dehumidification assembly (5) is arranged in the waste gas adsorption tank (4), waste gas is sucked into the waste gas pretreatment tank (2) through a centrifugal fan in the waste gas pretreatment tank (2), particulate matter and impurities mixed in the waste gas are removed through filtration of filter cotton, and then the waste gas is purified. And the waste gas is purified by utilizing the catalytic reaction between the chemicals in the two chemical liquid tanks in the waste gas catalysis tank (3) and the waste gas. According to the dry-type automatic waste gas treatment device, moisture in waste gas is condensed by means of freezing in the waste gas adsorption tank, so that the discharged waste gas is prevented from containing a catalytic solvent and polluting the environment.

Description

Technical Field

[0001] The invention relates to the field of energy conservation and environmental protection, and in particular to a dry automatic waste gas treatment device used in semiconductor production. Background Art

[0002] In the semiconductor industry and other chemical industries, waste gas is often involved. If these waste gases are not properly handled, they will not only pollute the production environment, but also cause harm to the atmosphere and even affect people's physical and mental health. Therefore, the waste gas generated must be properly handled during production to avoid leakage and harm.

[0003] For silicon wafer production and other chemical industries, dry automatic waste gas treatment processes are usually adopted, which mainly use methods such as adsorption and filtration. Among them, the adsorption method uses the microporous structure and large specific surface area of ​​the adsorbent (such as activated carbon) to adsorb harmful substances in the waste gas on the surface of the adsorbent. In some chemical industries, dry automatic waste gas treatment equipment can effectively remove volatile organic compounds and odors generated in production; in the hazardous chemical industry, it can be used to treat harmful gases generated in the production process of chemicals, etc.

[0004] In the prior art, the waste gas treatment process basically converts harmful substances in the waste gas into harmless substances by physical or chemical means, thereby achieving the purpose of purifying the waste gas. However, in the use of dry waste gas treatment equipment, it is found that the treatment equipment using adsorbent as a treatment method cannot effectively treat the chemical waste gas generated by the chemical industry. The contact reaction effect between the adsorbent and the chemical waste gas is not good. At the same time, the chemical waste gas generated by the chemical industry often contains a lot of impurities. If it is not treated in advance, the impurities in the waste gas may affect the subsequent catalytic treatment reaction. Summary of the invention

[0005] In view of the above background technology, it is proposed that the exhaust gas treatment equipment has no pre-treatment measures, and the purified exhaust gas contains a small amount of catalyst, and thus a technical solution of a dry automatic exhaust gas treatment device is provided.

[0006] In order to achieve the above invention purpose, the technical solution provided by the present invention is as follows:

[0007] A dry automatic exhaust gas treatment device, comprising a treatment cabinet, an exhaust gas pretreatment tank, an exhaust gas catalytic tank and an exhaust gas adsorption tank, wherein the exhaust gas pretreatment tank is arranged in the left space at the bottom of the inner cavity of the treatment cabinet, the exhaust gas catalytic tank is arranged in the right space at the bottom of the inner cavity of the treatment cabinet, and the exhaust gas adsorption tank is arranged in the upper space of the inner cavity of the treatment cabinet;

[0008] The processing cabinet comprises a cabinet body, a partition fixed in the middle section of the cabinet body cavity to divide the cabinet body cavity space into upper and lower parts, and two cabinet doors fixed on the rear end surface of the cabinet body;

[0009] The exhaust gas pretreatment tank includes a tank body, a conical jacket fixed in the inner cavity of the tank body, and filter cotton fixedly clamped in the inner cavity of the conical jacket. A centrifugal fan is arranged on the right side of the tank body, and the top of the tank body is connected to a manifold through a three-way pipe.

[0010] The exhaust gas catalytic tank comprises a first chemical tank and a second chemical tank, an air intake pipe respectively penetrating into the inner cavity of the first chemical tank and the second chemical tank, and an exhaust pipe respectively penetrating into the inner cavity of the first chemical tank and the second chemical tank, one end of the air intake pipe away from the first chemical tank and the second chemical tank is connected to the end of the manifold away from the tank body, and one end of the exhaust pipe away from the first chemical tank and the second chemical tank is connected to a manifold;

[0011] The exhaust gas adsorption tank comprises a hollow tank, a discharge groove penetrating from top to bottom into the inner cavity of the hollow tank, and a refrigeration and dehumidification component fixed on the outer ring surface of the discharge groove and located in the inner cavity of the hollow tank;

[0012] The refrigeration and dehumidification component includes a circular ring fixed in the inner cavity of the discharge groove, 7-12 equidistantly arranged V-shaped folded plates fixed in the inner cavity of the circular ring, and 6-11 cooling tubes between the V-shaped folded plates and passing through the discharge groove. The ends of the cooling tubes located outside the discharge groove are connected to heat conduction plates, and semiconductor cooling sheets are arranged on the outer surface of the heat conduction plates. Fins are installed on the side of the semiconductor cooling sheets away from the heat conduction plates, and a heat dissipation fan is installed on the side of the fins away from the semiconductor cooling sheets.

[0013] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: four universal rollers are fixedly connected to the four corners of the bottom surface of the cabinet by screws, the top surface of the cabinet is provided with a circular hole for the top end of the discharge trough to pass through, and two through holes are provided inside the partition for the exhaust pipe to pass through.

[0014] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the bottom surface of the tank body is fixedly connected to the bottom surface of the inner cavity of the cabinet body, the bottom surface of the centrifugal fan is fixedly connected to the bottom surface of the inner cavity of the cabinet body, the extraction port of the centrifugal fan is connected to the exhaust gas source pipeline, and the exhaust port of the centrifugal fan passes through a stainless steel pipe to the bottom space of the inner cavity of the tank body.

[0015] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: a manual main valve is provided at the connection position between the tank body and the manifold, and sub-valves and electric-controlled valves are installed at the connection positions between the manifold and the two intake pipes.

[0016] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the top port of the conical jacket is fixedly connected with a mesh plate, the top surface of the tank body is provided with a through hole for the manifold to pass through, and the rear end face of the tank body is provided with a tank door for providing a channel for replacing the filter cotton and cleaning the residual impurities at the bottom of the inner cavity of the tank body.

[0017] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the bottom surfaces of the first liquid medicine tank and the second liquid medicine tank are fixedly connected to the bottom surface of the inner cavity of the cabinet, and the top surfaces of the first liquid medicine tank and the second liquid medicine tank are provided with through holes for the air intake pipe and the exhaust pipe to pass through, and the bottom end of the air intake pipe is inserted into the bottom area of ​​the inner cavity of the first liquid medicine tank and the second liquid medicine tank.

[0018] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the bottom surface of the hollow tank is fixedly connected to the left side of the top surface of the partition, and the top surface of the hollow tank is provided with a circular hole for the top end of the discharge groove to pass through.

[0019] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the vertical section of the discharge groove is in the shape of an inverted funnel, and the bottom of the outer ring surface of the discharge groove is fixedly connected to the middle section of the inner cavity side wall of the hollow tank.

[0020] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the V-shaped folded plates have gaps between each other for exhaust gas to flow, and the cooling pipe is located in the gap between the V-shaped folded plates.

[0021] In the technical solution of the above-mentioned dry automatic exhaust gas treatment device, preferably: the cooling end surface of the semiconductor refrigeration plate is connected to the side of the heat conducting plate away from the ring through thermal conductive silicone grease, and the heat dissipation end surface of the semiconductor refrigeration plate is connected to the receiving surface of the fin through thermal conductive silicone grease.

[0022] It can be seen from the above technical solution that the dry automatic exhaust gas treatment device provided by the present invention has the following beneficial effects compared with the prior art:

[0023] 1. The dry automatic exhaust gas treatment device of the present invention arranges an exhaust gas pretreatment tank, an exhaust gas catalytic tank and an exhaust gas adsorption tank inside the treatment cabinet, draws the exhaust gas into the tank through the centrifugal fan in the exhaust gas pretreatment tank, removes the mixed particulate matter and debris in the exhaust gas through filtering with filter cotton, and utilizes the internal reagents of the two liquid medicine tanks in the exhaust gas catalytic tank to catalyze the reaction with the exhaust gas, thereby achieving purification of the exhaust gas.

[0024] 2. The dry automatic waste gas treatment device of the present invention also utilizes the waste gas adsorption tank to condense the moisture in the waste gas by means of freezing, thereby preventing the discharged waste gas from containing catalytic solvents and polluting the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces and describes the drawings required for use in the embodiments of the present invention or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 It is a schematic diagram of the overall structure of the dry automatic exhaust gas treatment device of the present invention;

[0027] Figure 2 It is a partial exploded schematic diagram of the waste gas treatment cabinet in the dry type automatic waste gas treatment device of the present invention;

[0028] Figure 3 It is a schematic diagram of the exhaust gas pretreatment tank in the dry automatic exhaust gas treatment device of the present invention;

[0029] Figure 4 It is a schematic diagram of the exhaust gas catalytic tank in the dry type automatic exhaust gas treatment device of the present invention;

[0030] Figure 5 It is a schematic diagram of the exhaust gas adsorption tank in the dry automatic exhaust gas treatment device of the present invention;

[0031] Figure 6 It is a schematic diagram of the refrigeration and dehumidification component in the exhaust gas adsorption tank in the dry automatic exhaust gas treatment device of the present invention.

[0032] Attached Figure 1 -Attached Figure 6 The corresponding relationship of the parts is as follows:

[0033] 1. Processing cabinet; 11. Cabinet body; 12. Partition; 13. Universal roller; 14. Cabinet door; 2. Waste gas pretreatment tank; 21. Tank body; 22. Conical jacket; 23. Manual main valve; 24. Manifold; 25. Sub-valve; 26. Electric control valve; 27. Screen; 28. Centrifugal fan; 29. ​​Tank door; 210. Filter cotton; 3. Waste gas catalytic tank; 31. First liquid medicine tank; 32. Inlet pipe; 33. Manifold; 34. Exhaust pipe; 35. Second liquid medicine tank; 4. Waste gas adsorption tank; 41. Hollow tank; 42. Discharge trough; 5. Refrigeration and dehumidification assembly; 51. Ring; 52. Cooling pipe; 53. V-shaped folded plate; 54. Semiconductor refrigeration plate; 55. Fin; 56. Heat dissipation fan; 57. Heat conduction plate. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] In order to more clearly explain and illustrate the technical solution and implementation of the present invention, preferred specific embodiments for implementing the technical solution of the present invention are introduced below.

[0036] Embodiment 1;

[0037] The better technical solution:

[0038] Refer to the instruction manual Figure 1 As shown: The present invention proposes a novel dry automatic exhaust gas treatment device, which comprises a treatment cabinet 1, an exhaust gas pretreatment tank 2, an exhaust gas catalytic tank 3 and an exhaust gas adsorption tank 4. The exhaust gas pretreatment tank 2 is arranged in the left space at the bottom of the inner cavity of the treatment cabinet 1, the exhaust gas catalytic tank 3 is arranged in the right space at the bottom of the inner cavity of the treatment cabinet 1, and the exhaust gas adsorption tank 4 is arranged in the upper space of the inner cavity of the treatment cabinet 1.

[0039] Refer to the instruction manual Figure 2 As shown: the processing cabinet 1 includes a cabinet body 11, a partition 12 fixed to the middle section of the inner cavity of the cabinet body 11 to divide the inner cavity space of the cabinet body 11 into upper and lower parts, and two cabinet doors 14 fixed to the rear end surface of the cabinet body 11;

[0040] Refer to the instruction manual Figure 3 As shown: the exhaust gas pretreatment tank 2 includes a tank body 21, a conical jacket 22 fixed in the inner cavity of the tank body 21, and a filter cotton 210 fixedly clamped in the inner cavity of the conical jacket 22. A centrifugal fan 28 is arranged on the right side of the tank body 21, and the top of the tank body 21 is connected to a manifold 24 through a three-way pipe;

[0041] Refer to the instruction manual Figure 4 As shown: the exhaust gas catalytic tank 3 includes a first liquid medicine tank 31 and a second liquid medicine tank 35, an intake pipe 32 respectively penetrating into the inner cavity of the first liquid medicine tank 31 and the second liquid medicine tank 35, and an exhaust pipe 34 respectively penetrating into the inner cavity of the first liquid medicine tank 31 and the second liquid medicine tank 35, one end of the intake pipe 32 away from the first liquid medicine tank 31 and the second liquid medicine tank 35 is connected to the end of the manifold 24 away from the tank body 21, and one end of the exhaust pipe 34 away from the first liquid medicine tank 31 and the second liquid medicine tank 35 is connected to the manifold 33;

[0042] Refer to the instruction manual Figure 5As shown: the exhaust gas adsorption tank 4 includes a hollow tank 41, a discharge groove 42 that penetrates from top to bottom into the inner cavity of the hollow tank 41, and a refrigeration and dehumidification component 5 that is fixed on the outer ring surface of the discharge groove 42 and located in the inner cavity of the hollow tank 41;

[0043] Refer to the instruction manual Figure 6 As shown: the refrigeration and dehumidification component 5 includes a circular ring 51 fixed in the inner cavity of the discharge groove 42, 7-12 V-shaped folded plates 53 fixed in the inner cavity of the circular ring 51 and arranged at equal distances, and 6-11 cooling tubes 52 between the V-shaped folded plates 53 and passing through the discharge groove 42, the end of the cooling tube 52 located on the outer side of the discharge groove 42 is connected to a heat conducting plate 57, a semiconductor cooling sheet 54 is arranged on the outer surface of the heat conducting plate 57, a fin 55 is installed on the side of the semiconductor cooling sheet 54 away from the heat conducting plate 57, and a heat dissipation fan 56 is installed on the side of the fin 55 away from the semiconductor cooling sheet 54.

[0044] Refer to the instruction manual Figure 2 As shown: four universal rollers 13 are fixedly connected to the four corners of the bottom surface of the cabinet 11 by screws, a round hole is provided on the top surface of the cabinet 11 for the top end of the discharge slot 42 to pass through, two through holes are provided inside the partition 12 for the exhaust pipe 34 to pass through, the bottom surface of the tank 21 is fixedly connected to the bottom surface of the inner cavity of the cabinet 11, the bottom surface of the centrifugal fan 28 is fixedly connected to the bottom surface of the inner cavity of the cabinet 11, the extraction port of the centrifugal fan 28 is connected to the exhaust gas source pipeline, and the exhaust port of the centrifugal fan 28 passes through the bottom space of the inner cavity of the tank 21 through a stainless steel pipe.

[0045] Refer to the instruction manual Figure 3 As shown: a manual main valve 23 is provided at the connection position between the tank body 21 and the manifold 24, and a sub-valve 25 and an electric control valve 26 are installed at the connection position between the manifold 24 and the two air inlet pipes 32; a mesh plate 27 is fixedly connected to the top port of the conical jacket 22, a through hole for the manifold 24 to pass through is opened on the top surface of the tank body 21, and a tank door 29 is provided on the rear end face of the tank body 21, which is used to provide a channel for replacing the filter cotton 210 and cleaning the residual impurities at the bottom of the inner cavity of the tank body 21.

[0046] Refer to the instruction manual Figure 4 As shown: the bottom surfaces of the first medicine liquid tank 31 and the second medicine liquid tank 35 are fixedly connected to the bottom surface of the inner cavity of the cabinet 11, and the top surfaces of the first medicine liquid tank 31 and the second medicine liquid tank 35 are provided with through holes for the air inlet pipe 32 and the exhaust pipe 34 to pass through, and the bottom end of the air inlet pipe 32 is inserted into the bottom area of ​​the inner cavity of the first medicine liquid tank 31 and the second medicine liquid tank 35.

[0047] Refer to the instruction manual Figure 5As shown: the bottom surface of the hollow tank 41 is fixedly connected to the left side of the top surface of the partition 12, and the top surface of the hollow tank 41 is provided with a circular hole for the top end of the discharge groove 42 to pass through; the vertical section of the discharge groove 42 is in the shape of an inverted funnel, and the bottom of the outer ring surface of the discharge groove 42 is fixedly connected to the middle section of the inner cavity side wall of the hollow tank 41.

[0048] Refer to the instruction manual Figure 6 As shown: there is a gap between the V-shaped folded plates 53 for exhaust gas to flow, the cooling tube 52 is located in the gap between the V-shaped folded plates 53, the cooling end surface of the semiconductor refrigeration plate 54 is connected to the side of the heat conducting plate 57 away from the ring 51 through thermal grease, and the heat dissipation end surface of the semiconductor refrigeration plate 54 is connected to the receiving surface of the fin 55 through thermal grease.

[0049] Example 2

[0050] According to the above-mentioned preferred technical solution, this embodiment intends to explain the workflow of the technical solution:

[0051] In the first step, the chemical waste gas is extracted into the bottom space of the inner cavity of the tank body 21 by using the centrifugal fan 28. In the process of continuously transporting the waste gas into the tank body 21, the waste gas passes through the filter cotton 210, and the impurities and particulate matter entrained in the waste gas are filtered in the filter cotton 210. The waste gas enters the intake pipe 32 along the manifold 24 and the manual main valve 23, the sub-valve 25 and the electric control valve 26.

[0052] In the second step, the air intake pipe 32 transports the filtered exhaust gas to the first liquid medicine tank 31 and the second liquid medicine tank 35. The exhaust gas reacts with the reagents inside the first liquid medicine tank 31 and the second liquid medicine tank 35 at the same time. The harmful substances in the catalytic exhaust gas are reduced and enter the bottom space of the inner cavity of the hollow tank 41 along the exhaust pipe 34 and the manifold 33.

[0053] In the third step, after the catalytic exhaust gas enters the hollow tank 41, the exhaust gas will be discharged to the outside along the discharge groove 42. During the discharge stage, the exhaust gas needs to flow through the gap between the V-shaped folded plates 53, and the low temperature of the semiconductor refrigeration sheet 54 is transferred to the cooling tube 52 through the heat conduction plate 57, so that the exhaust gas contacts the cooling tube 52. After the exhaust gas entrained with the agent contacts the cooling tube 52, the low temperature dries the exhaust gas to prevent the moisture of the agent in the exhaust gas from being discharged.

[0054] The present invention is not limited to the above-mentioned optimal implementation mode. Anyone should be aware that any structural changes made under the inspiration of the present invention, and any technical solutions that are the same or similar to the present invention, fall within the protection scope of the present invention.

[0055] Finally, it should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the effects and purposes that can be achieved by this application.

Claims

1. A dry automatic exhaust gas treatment device, characterized in that: The invention comprises a treatment cabinet (1), an exhaust gas pretreatment tank (2), an exhaust gas catalytic tank (3) and an exhaust gas adsorption tank (4); the exhaust gas pretreatment tank (2) is arranged in the left space at the bottom of the inner cavity of the treatment cabinet (1); the exhaust gas catalytic tank (3) is arranged in the right space at the bottom of the inner cavity of the treatment cabinet (1); and the exhaust gas adsorption tank (4) is arranged in the upper space of the inner cavity of the treatment cabinet (1); The processing cabinet (1) comprises a cabinet body (11), a partition (12) fixed to the middle section of the inner cavity of the cabinet body (11) to divide the inner cavity space of the cabinet body (11) into upper and lower parts, and two cabinet doors (14) fixed to the rear end surface of the cabinet body (11); The exhaust gas pretreatment tank (2) comprises a tank body (21), a conical jacket (22) fixed in the inner cavity of the tank body (21), and filter cotton (210) fixedly clamped in the inner cavity of the conical jacket (22); a centrifugal fan (28) is arranged on the right side of the tank body (21); and the top of the tank body (21) is connected to a manifold (24) via a three-way pipe; The exhaust gas catalytic tank (3) comprises a first liquid medicine tank (31) and a second liquid medicine tank (35), an air intake pipe (32) respectively penetrating into the inner cavities of the first liquid medicine tank (31) and the second liquid medicine tank (35), and an exhaust pipe (34) respectively penetrating into the inner cavities of the first liquid medicine tank (31) and the second liquid medicine tank (35), wherein one end of the air intake pipe (32) away from the first liquid medicine tank (31) and the second liquid medicine tank (35) is connected to the end of the manifold (24) away from the tank body (21), and one end of the exhaust pipe (34) away from the first liquid medicine tank (31) and the second liquid medicine tank (35) is connected to a confluence pipe (33); The exhaust gas adsorption tank (4) comprises a hollow tank (41), a discharge groove (42) extending from top to bottom into the inner cavity of the hollow tank (41), and a refrigeration and dehumidification component (5) fixed on the outer ring surface of the discharge groove (42) and located in the inner cavity of the hollow tank (41); The freezing and dehumidification component (5) includes a circular ring (51) fixed in the inner cavity of the discharge groove (42), 7-12 V-shaped folded plates (53) fixed in the inner cavity of the circular ring (51) and arranged at equal distances, and 6-11 cooling tubes (52) between the V-shaped folded plates (53) and passing through the discharge groove (42), wherein the end of the cooling tube (52) located outside the discharge groove (42) is connected to a heat conducting plate (57), a semiconductor cooling plate (54) is arranged on the outer surface of the heat conducting plate (57), a fin (55) is installed on the side of the semiconductor cooling plate (54) away from the heat conducting plate (57), and a heat dissipation fan (56) is installed on the side of the fin (55) away from the semiconductor cooling plate (54).

2. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: Four universal rollers (13) are fixedly connected to the four corners of the bottom surface of the cabinet (11) by screws, and a circular hole is provided on the top surface of the cabinet (11) for the top end of the discharge groove (42) to pass through, and two through holes are provided inside the partition (12) for the exhaust pipe (34) to pass through.

3. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The bottom surface of the tank body (21) is fixedly connected to the bottom surface of the inner cavity of the cabinet body (11); the bottom surface of the centrifugal fan (28) is fixedly connected to the bottom surface of the inner cavity of the cabinet body (11); the extraction port of the centrifugal fan (28) is connected to the exhaust gas source pipeline; the exhaust port of the centrifugal fan (28) penetrates into the bottom space of the inner cavity of the tank body (21) through a stainless steel pipe.

4. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: A manual main valve (23) is provided at the connection position between the tank body (21) and the manifold (24), and a sub-valve (25) and an electric control valve (26) are installed at the connection position between the manifold (24) and the two air intake pipes (32).

5. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The top port of the conical jacket (22) is fixedly connected to a mesh plate (27), the top surface of the tank body (21) is provided with a through hole for the manifold (24) to pass through, and the rear end surface of the tank body (21) is provided with a tank door (29) for providing a passage for replacing the filter cotton (210) and cleaning the residual impurities at the bottom of the inner cavity of the tank body (21).

6. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The bottom surfaces of the first liquid medicine tank (31) and the second liquid medicine tank (35) are fixedly connected to the bottom surface of the inner cavity of the cabinet (11); the top surfaces of the first liquid medicine tank (31) and the second liquid medicine tank (35) are provided with through holes for the air inlet pipe (32) and the air outlet pipe (34) to pass through and insert; the bottom end of the air inlet pipe (32) is inserted into the bottom area of ​​the inner cavity of the first liquid medicine tank (31) and the second liquid medicine tank (35).

7. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The bottom surface of the hollow tank (41) is fixedly connected to the left side of the top surface of the partition (12), and the top surface of the hollow tank (41) is provided with a circular hole for the top end of the discharge groove (42) to pass through.

8. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The vertical section of the discharge groove (42) is in the shape of an inverted funnel, and the bottom of the outer ring surface of the discharge groove (42) is fixedly connected to the middle section of the inner cavity side wall of the hollow tank (41).

9. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: There are gaps between the V-shaped folded plates (53) for exhaust gas to flow through, and the cooling pipe (52) is located in the gap between the V-shaped folded plates (53).

10. The dry type automatic exhaust gas treatment device according to claim 1, characterized in that: The cooling end surface of the semiconductor cooling plate (54) is connected to the side of the heat conducting plate (57) away from the ring (51) via thermal grease, and the heat dissipation end surface of the semiconductor cooling plate (54) is connected to the receiving surface of the fin (55) via thermal grease.

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