Grinding fluid spraying monitoring system and method based on intelligent sensor

Through intelligent sensors, the abrasive fluid coverage state and abnormal contact state between the grinding equipment and the workpiece surface is monitored, the grinding quality risk is evaluated and the abrasive fluid injection device is optimized, which solves the problem of insufficient monitoring of dynamic changes of the abrasive fluid during the workpiece grinding process in the prior art, improves grinding efficiency and reduces resource consumption.

CN119871204AActive Publication Date: 2025-04-25QINGDAO HUAXIN JINGDIAN TECH CO LTD +1
View PDF 5 Cites 0 Cited by

Patent Information

Application Number
CN202510343327.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-21
Publication Date
2025-04-25
Estimated Expiration
2045-03-21

AI Technical Summary

Technical Problem

In the prior art, when monitoring the abrasive liquid spray, the dynamic changes of the abrasive liquid during the workpiece grinding process cannot be effectively monitored, resulting in low grinding efficiency and excessive wear of the workpiece and the grinding head.

Method used

Using an intelligent sensor-based abrasive liquid spray monitoring system, by obtaining the grinding point characteristic data of the workpiece surface and the setting data of the abrasive liquid injection device, analyzing the grinding liquid coverage state and the contact abnormal state between the grinding equipment and the workpiece surface, evaluating the grinding quality risk, and optimizing the grinding liquid injection device.

Benefits of technology

The grinding efficiency of the workpiece is improved, over-processing losses of the workpiece and the grinding equipment are avoided, and excessive consumption of the abrasive liquid is reduced.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119871204A_ABST
    Figure CN119871204A_ABST
Patent Text Reader

Abstract

The invention relates to the technical field of grinding fluid monitoring, in particular to a grinding fluid spraying monitoring system and method based on an intelligent sensor, and the method comprises the steps that the grinding fluid covering state of the surface of a workpiece is analyzed based on grinding point feature data and grinding fluid spraying setting data; based on the grinding point feature data and the parameter control data of the grinding equipment, the abnormal contact state of the grinding equipment and the surface of the workpiece is analyzed; according to the grinding fluid covering state analysis result of the workpiece surface and the contact abnormal state analysis result of the grinding equipment and the workpiece surface, the grinding quality risk of the workpiece surface is evaluated; according to the workpiece surface grinding quality risk assessment result, optimization early warning is carried out on the grinding liquid spraying device, so that the grinding efficiency of the workpiece is improved, excessive machining loss of the workpiece and grinding equipment is avoided, and excessive consumption of the grinding liquid is reduced.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the technical field of grinding liquid monitoring, and in particular to a grinding liquid spray monitoring system and method based on an intelligent sensor. Background Art

[0002] With the continuous development of the manufacturing industry, workpiece grinding has become an indispensable process in the precision machining stage in the industrial field. Grinding fluid is the core medium in the workpiece grinding process, which can directly affect the workpiece machining accuracy, workpiece surface quality, and product production efficiency; traditional grinding fluid spray monitoring methods often rely on manual observation and experience judgment, which is not only inefficient, but also difficult to achieve real-time and accurate monitoring of the grinding fluid spray state. Therefore, the existing technology can monitor the grinding fluid spray by using sensors, and conduct a comprehensive analysis based on the monitoring results to ensure that the grinding fluid can be sprayed onto the workpiece surface in the best state, thereby achieving high-efficiency processing of the workpiece.

[0003] However, when monitoring the grinding liquid spray, the existing technology often focuses on how to optimize the state of the grinding liquid itself, without taking into account that the role of the grinding liquid in the grinding process is to enable the workpiece surface to be fully ground and evenly worn. It ignores the interaction mechanism between the grinding liquid spray and the workpiece material surface and the grinding head. There is a lack of monitoring and analysis of the dynamic changes of the grinding liquid during the workpiece grinding process, resulting in the grinding liquid being unable to fully act on the grinding area of ​​the workpiece in terms of spray volume or coverage angle, thereby resulting in low grinding efficiency and causing excessive wear of the workpiece and the grinding head.

[0004] In order to solve these problems, the present application designs a grinding liquid spray monitoring system and method based on intelligent sensors. Summary of the invention

[0005] The purpose of the present invention is to provide a grinding liquid spray monitoring system and method based on intelligent sensors, which comprehensively analyzes the grinding liquid coverage status of the workpiece surface and the abnormal contact status between the grinding equipment and the workpiece surface, and then evaluates the grinding quality risk of the workpiece surface, thereby improving the grinding efficiency of the workpiece, avoiding excessive processing losses of the workpiece and the grinding equipment, and reducing excessive consumption of grinding liquid.

[0006] The present invention is achieved in that:

[0007] In a first aspect, the present invention provides a method for monitoring abrasive liquid spraying based on an intelligent sensor, comprising the following steps:

[0008] S1, obtaining grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device, and obtaining parameter control data of the grinding equipment;

[0009] S2, analyzing the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data;

[0010] S3, analyzing the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device;

[0011] S4. Evaluate the risk of workpiece surface grinding quality based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface;

[0012] S5. According to the risk assessment results of workpiece surface grinding quality, the grinding liquid injection device is optimized and warned.

[0013] Preferably, based on the above scheme, in step S2, the grinding liquid coverage state of the workpiece surface is analyzed based on the grinding point feature data and the grinding liquid spray setting data, which specifically includes:

[0014] S21, extracting grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device;

[0015] S22. Based on the grinding point feature data and the grinding liquid spray setting data, the grinding liquid coverage state of the workpiece surface is analyzed to obtain the grinding liquid coverage state analysis result of the workpiece surface.

[0016] Preferably, based on the above solution, the grinding liquid coverage state of the workpiece surface is analyzed in step S22, which specifically includes:

[0017] S221, analyzing the uniformity of the grinding liquid coverage on the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data, and obtaining a grinding liquid coverage uniformity analysis result on the workpiece surface;

[0018] S222, analyzing the fluid dynamics efficiency of the grinding liquid on the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data, and obtaining the analysis result of the fluid dynamics efficiency of the grinding liquid on the workpiece surface;

[0019] S223, performing weighted summation on the grinding liquid coverage uniformity analysis result and the grinding liquid fluid dynamic efficiency analysis result on the workpiece surface to obtain the grinding liquid coverage state analysis result on the workpiece surface.

[0020] Preferably, based on the above scheme, in step S3, based on the grinding point feature data and the parameter control data of the grinding equipment, the abnormal contact state between the grinding equipment and the workpiece surface is analyzed, which specifically includes the following steps:

[0021] S31, extracting grinding point feature data of the workpiece surface and parameter control data of the grinding equipment;

[0022] S32. Based on the grinding point characteristic data and the parameter control data, an abnormal contact state between the grinding device and the workpiece surface is analyzed to obtain an analysis result of the abnormal contact state between the grinding device and the workpiece surface.

[0023] Preferably, based on the above solution, the abnormal contact state between the grinding device and the workpiece surface is analyzed in step S32, including the following specific steps:

[0024] S321, based on the grinding point characteristic data and the parameter control data, analyzing the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface, and obtaining a result of the mechanical imbalance analysis when the grinding head in the grinding equipment contacts the workpiece surface;

[0025] S322, analyzing the over-grinding risk of the workpiece surface during the grinding process of the grinding head based on the grinding point feature data and the parameter control data, and obtaining the over-grinding risk analysis result of the workpiece surface during the grinding process of the grinding head;

[0026] S323. Perform weighted summation on the mechanical imbalance degree analysis results and the over-grinding risk analysis results to obtain an analysis result of an abnormal contact state between the grinding equipment and the workpiece surface.

[0027] Preferably, based on the above scheme, in step S4, the risk of workpiece surface grinding quality is evaluated according to the analysis results of the grinding liquid coverage state of the workpiece surface and the analysis results of the abnormal contact state between the grinding device and the workpiece surface, including the following specific steps:

[0028] S41, obtaining the analysis result of the grinding liquid coverage state of the workpiece surface obtained by analysis, and simultaneously obtaining the analysis result of the abnormal contact state between the grinding device and the workpiece surface obtained by analysis;

[0029] S42. The ratio of the abnormal contact state analysis result to the grinding fluid coverage state analysis result is used as the workpiece surface grinding quality risk assessment result.

[0030] Preferably, based on the above scheme, in step S5, the grinding liquid injection device is optimized and warned according to the workpiece surface grinding quality risk assessment result, which specifically includes:

[0031] S51, obtaining the workpiece surface grinding quality risk assessment result obtained by assessment;

[0032] S52, presetting a grinding quality risk threshold, and when the workpiece surface grinding quality risk assessment result is greater than the grinding quality risk threshold, optimizing the grinding liquid injection device for early warning.

[0033] In a second aspect, the present invention provides a grinding liquid spray monitoring system based on an intelligent sensor, comprising:

[0034] A data acquisition module, used to acquire the grinding point feature data of the workpiece surface and the grinding liquid spray setting data of the grinding liquid spray device, and simultaneously acquire the parameter control data of the grinding equipment;

[0035] A grinding liquid coverage state analysis module, used to analyze the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data;

[0036] The abnormal contact state analysis module is used to analyze the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device;

[0037] The grinding quality risk assessment module is used to assess the grinding quality risk of the workpiece surface based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface;

[0038] The grinding liquid injection device optimization and early warning module is used to optimize and early warning the grinding liquid injection device according to the workpiece surface grinding quality risk assessment results;

[0039] The control module is used to control the operation of the data acquisition module, the grinding liquid coverage status analysis module, the contact abnormality status analysis module, the grinding quality risk assessment module, and the grinding liquid injection device optimization early warning module.

[0040] In a third aspect, the present invention provides an electronic device comprising: a processor and a memory, wherein the memory stores a computer program that can be called by the processor, and the processor executes a grinding liquid spray monitoring method based on an intelligent sensor by calling the computer program stored in the memory.

[0041] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0042] The present invention analyzes the grinding liquid coverage state of the workpiece surface based on grinding point characteristic data and grinding liquid spray setting data; analyzes the abnormal contact state between the grinding device and the workpiece surface based on the grinding point characteristic data and parameter control data of the grinding device; evaluates the grinding quality risk of the workpiece surface according to the analysis results of the grinding liquid coverage state of the workpiece surface and the analysis results of the abnormal contact state between the grinding device and the workpiece surface; optimizes and warns the grinding liquid spray device according to the evaluation results of the grinding quality risk of the workpiece surface, thereby improving the grinding efficiency of the workpiece, avoiding excessive processing loss of the workpiece and the grinding device, and reducing excessive consumption of the grinding liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0044] Figure 1 The figure is a schematic diagram of the overall process of the grinding liquid spray monitoring method based on the intelligent sensor of the present invention;

[0045] Figure 2 It is a structural schematic diagram of the grinding liquid spray monitoring system based on the intelligent sensor of the present invention;

[0046] Figure 3 The present invention is a flowchart for analyzing each step of the grinding liquid spray monitoring method based on intelligent sensors. DETAILED DESCRIPTION

[0047] The technical solution of the present invention is described in detail below through the accompanying drawings and specific embodiments. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solution of the present invention, rather than limitations on the technical solution of the present invention. The embodiments of the present invention and the technical features in the embodiments may be combined with each other unless there is a conflict.

[0048] Example 1 The intelligent sensor-based grinding liquid spray monitoring method provided in this embodiment can be applied to a variety of specific high-precision and high-quality grinding processing fields, for example, in chemical mechanical polishing of semiconductor wafers. This embodiment can accurately warn of defects such as over-grinding, scratches, and thermal damage by real-time monitoring of the grinding liquid coverage uniformity and contact mechanical state, optimize the grinding liquid spray device, and ensure that the surface roughness is controlled at the sub-nanometer level; in the field of optical glass lens grinding, this embodiment can dynamically optimize the nozzle layout and spray parameters to avoid surface ripples or uneven finish caused by insufficient local coverage, and can also prevent microcracks caused by grinding head vibration through contact abnormality analysis.

[0049] like Figure 1 , Figure 3 As shown, this embodiment provides a method for monitoring the spraying of a grinding liquid based on an intelligent sensor, which specifically includes the following steps:

[0050] S1, obtaining grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device, and obtaining parameter control data of the grinding equipment;

[0051] S2, analyzing the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data;

[0052] S3, analyzing the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device;

[0053] S4. Evaluate the risk of workpiece surface grinding quality based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface;

[0054] S5. According to the risk assessment results of workpiece surface grinding quality, the grinding liquid injection device is optimized and warned.

[0055] As a preferred technical solution of the present invention, in step S2, the grinding liquid coverage state of the workpiece surface is analyzed based on the grinding point feature data and the grinding liquid spray setting data, which specifically includes:

[0056] S21, extracting grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device;

[0057] S22. Based on the grinding point feature data and the grinding liquid spray setting data, the grinding liquid coverage state of the workpiece surface is analyzed to obtain the grinding liquid coverage state analysis result of the workpiece surface.

[0058] As a preferred technical solution of the present invention, the grinding liquid coverage state of the workpiece surface is analyzed in step S22, which specifically includes:

[0059] S221. Based on the grinding point feature data and the grinding liquid spray setting data, the grinding liquid coverage uniformity on the workpiece surface is analyzed to obtain the grinding liquid coverage uniformity analysis result on the workpiece surface. This embodiment takes into account the physical law that the grinding liquid fluid is strong in the center and weak on the surface when diffusing on the workpiece surface. Therefore, this step uses an exponential function to quantify the spatial attenuation characteristics of the grinding liquid on the workpiece surface, and realizes the quantification of the coverage density when multiple nozzle grinding liquids act together by summing, and by calculating the absolute deviation between the coverage density of different grinding points and the average coverage density, it can accurately reflect the distribution unevenness of the grinding liquid, thereby evaluating the uniformity of the overall coverage, wherein the grinding liquid coverage uniformity calculation formula can be: , where Uy is the uniformity of the grinding fluid coverage on the workpiece surface, pavg is the average coverage density of the workpiece surface in the grinding point feature data, , where A is the surface area of ​​the workpiece, Q is the coordinate range set of the grinding points on the workpiece surface in the grinding point feature data, is the grinding fluid coverage density at the grinding point (x, y) on the workpiece surface in the grinding point feature data, , where Qi is the set flow rate of the i-th grinding liquid nozzle in the grinding liquid spray setting data, di(x, y) is the Euclidean distance from the grinding point (x, y) on the workpiece surface to the i-th grinding liquid nozzle in the grinding liquid spray setting data, and s is the surface tension of the grinding liquid in the grinding liquid spray setting data;

[0060] S222, based on the grinding point feature data and the grinding liquid spray setting data, the grinding liquid fluid dynamic efficiency of the workpiece surface is analyzed to obtain the grinding liquid fluid dynamic efficiency analysis result of the workpiece surface; this step can reflect the effective removal ability of the grinding liquid on the workpiece material by quantifying the ratio of the fluid shear force to the material shear resistance, and quantifies the influence of the workpiece surface chip retention on the surface quality by comparing the chip retention state on the workpiece surface and the maximum value of the chip allowed to exist on the workpiece, wherein the calculation formula of the grinding liquid fluid dynamic efficiency on the workpiece surface can be: , where Xn is the hydrodynamic efficiency of the grinding fluid on the workpiece surface, t(x,y) is the shear stress of the grinding fluid at the grinding point (x,y) on the workpiece surface in the grinding fluid spray setting data, wg is the yield strength of the workpiece material in the grinding point feature data, C(x,y) is the wear debris concentration at the grinding point (x,y) on the workpiece surface measured by the optical sensor in the grinding point feature data, and Cmax is the maximum threshold of the wear debris concentration allowed in the grinding point feature data;

[0061] S223, weighted sum the analysis results of the uniformity of the grinding liquid coverage on the workpiece surface and the analysis results of the fluid dynamics efficiency of the grinding liquid to obtain the analysis results of the grinding liquid coverage state on the workpiece surface. This step comprehensively considers the different degrees of influence of the uniformity of the grinding liquid coverage and the fluid dynamics efficiency on the grinding liquid coverage state. Compared with the prior art that only considers the uniformity of coverage, this embodiment can more comprehensively quantify the actual coverage state of the grinding liquid when it is sprayed onto the workpiece surface, wherein the calculation formula of the grinding liquid coverage state is: , where FG is the grinding fluid coverage state of the workpiece surface, a1 and a2 are the coverage uniformity influence weight and fluid dynamic efficiency influence weight, respectively.

[0062] As a preferred technical solution of the present invention, in step S3, based on the grinding point feature data and the parameter control data of the grinding equipment, the abnormal contact state between the grinding equipment and the workpiece surface is analyzed, which specifically includes the following steps:

[0063] S31, extracting grinding point feature data of the workpiece surface and parameter control data of the grinding equipment;

[0064] S32. Based on the grinding point characteristic data and the parameter control data, an abnormal contact state between the grinding device and the workpiece surface is analyzed to obtain an analysis result of the abnormal contact state between the grinding device and the workpiece surface.

[0065] As a preferred technical solution of the present invention, the abnormal contact state between the grinding device and the workpiece surface is analyzed in step S32, including the following specific steps:

[0066] S321. Based on the grinding point characteristic data and parameter control data, the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface is analyzed to obtain the analysis result of the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface. In the implementation process of this embodiment, it is considered that pressure fluctuations will directly lead to uneven distribution of stress when the grinding head and the workpiece contact, thereby causing scratches or over-grinding on the workpiece surface. Therefore, this step quantifies the degree of deviation between the actual pressure and the set pressure, the wear state of the grinding head, and the risk of damage to the surface integrity caused by abnormal vibration of the grinding head, so as to directly reflect the stability of pressure control during the grinding process. The calculation formula of the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface can be: , where Ds is the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface, P is the real-time contact pressure measured by the pressure sensor in the parameter control data, Po is the preset contact pressure in the parameter control data, Rc is the current surface roughness of the grinding head measured by the roughness monitor in the parameter control data, Ro is the initial surface roughness of the grinding head in the parameter control data, Ev is the vibration energy of the grinding head measured by the high-frequency vibration sensor in the parameter control data, and Eo is the vibration energy safety threshold of the workpiece surface in the grinding point feature data;

[0067] S322, based on the grinding point feature data and the parameter control data, the over-grinding risk of the workpiece surface during the grinding process of the grinding head is analyzed to obtain the over-grinding risk analysis result of the workpiece surface during the grinding process of the grinding head; this step takes into account that when grinding the workpiece surface, it is necessary to ensure that the roughness deviation value between different grinding areas during the grinding process is as small as possible, and when the temperature exceeds the safety value, the sensitivity of the workpiece material to temperature will increase exponentially. Therefore, by quantifying the difference in roughness and the sensitivity to temperature, it is quantified whether there is an over-grinding risk on the workpiece surface during the grinding process, wherein the calculation formula for the over-grinding risk can be: , where Gy is the risk of over-grinding of the workpiece surface during the grinding process of the grinding head, max() is the maximum value of the data in the brackets, and rmax is the maximum roughness deviation allowed on the workpiece surface in the grinding point feature data. is the real-time maximum change in the roughness of all grinding points on the workpiece surface measured by the roughness monitor in the grinding point feature data, Ts is the thermal deformation temperature of the workpiece material in the grinding point feature data, and Tmax is the maximum temperature of the workpiece surface measured by the infrared thermal imager in the parameter control data;

[0068] S323, weighted summing the mechanical imbalance degree analysis results and the over-grinding risk analysis results is performed to obtain the abnormal contact state analysis results between the grinding equipment and the workpiece surface. This step comprehensively considers that the mechanical imbalance degree and the over-grinding risk will have different degrees of influence on the abnormal state when the grinding head and the workpiece surface are in contact, thereby realizing the quantification of the abnormal contact state, wherein the calculation formula of the abnormal contact state is: , where YC is the abnormal contact state between the grinding equipment and the workpiece surface, b1 and b2 are the influence weights of the mechanical imbalance degree and the over-grinding risk, respectively.

[0069] As a preferred technical solution of the present invention, in step S4, the risk of workpiece surface grinding quality is evaluated according to the analysis results of the grinding liquid coverage state of the workpiece surface and the analysis results of the abnormal contact state between the grinding equipment and the workpiece surface, including the following specific steps:

[0070] S41, obtaining the analysis result of the grinding liquid coverage state of the workpiece surface obtained by analysis, and simultaneously obtaining the analysis result of the abnormal contact state between the grinding device and the workpiece surface obtained by analysis;

[0071] S42, taking the ratio of the abnormal contact state analysis result to the grinding fluid coverage state analysis result as the workpiece surface grinding quality risk assessment result. In this step, the ratio of the abnormal contact state to the grinding fluid coverage state is used as a quality risk assessment indicator, thereby evaluating the grinding quality risk by quantifying the coordination between mechanical contact and fluid coverage, which can avoid the limitation of analyzing the grinding quality through a single indicator; it is convenient to adjust the process parameters in real time, wherein the workpiece surface grinding quality risk assessment formula is: .

[0072] As a preferred technical solution of the present invention, in step S5, the grinding liquid injection device is optimized and warned according to the workpiece surface grinding quality risk assessment result, which specifically includes:

[0073] S51, obtaining the workpiece surface grinding quality risk assessment result obtained by assessment;

[0074] S52, preset a grinding quality risk threshold, and when the workpiece surface grinding quality risk assessment result is greater than the grinding quality risk threshold, optimize the grinding liquid injection device for early warning. Among them, the setting parameters (such as weights and thresholds) in this embodiment are obtained by experiments by technicians in this field, and the specific experimental method is: obtain the grinding point feature data of multiple workpiece surfaces in history and the grinding liquid injection setting data of the grinding liquid injection device, and obtain the parameter control data of the corresponding grinding equipment at the same time; substitute the grinding point feature data, the grinding liquid injection setting data and the parameter control data of the corresponding grinding equipment into each step in this embodiment to obtain the historical grinding quality risk assessment results of multiple workpiece surfaces; obtain the judgment results of whether the grinding quality of multiple workpiece surfaces in history is qualified, substitute the historical grinding quality risk assessment results of multiple workpiece surfaces obtained in each step in this embodiment and the corresponding grinding quality judgment results into the fitting software, and output the setting parameters (such as weights and thresholds) that meet the highest grinding quality judgment accuracy.

[0075] Example 2 like Figure 2 As shown, this embodiment provides a grinding liquid spray monitoring system based on an intelligent sensor, comprising:

[0076] A data acquisition module, used to acquire the grinding point feature data of the workpiece surface and the grinding liquid spray setting data of the grinding liquid spray device, and simultaneously acquire the parameter control data of the grinding equipment;

[0077] A grinding liquid coverage state analysis module, used to analyze the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data;

[0078] The abnormal contact state analysis module is used to analyze the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device;

[0079] The grinding quality risk assessment module is used to assess the grinding quality risk of the workpiece surface based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface;

[0080] The grinding liquid injection device optimization and early warning module is used to optimize and early warning the grinding liquid injection device according to the workpiece surface grinding quality risk assessment results;

[0081] The control module is used to control the operation of the data acquisition module, the grinding liquid coverage status analysis module, the contact abnormality status analysis module, the grinding quality risk assessment module, and the grinding liquid injection device optimization early warning module.

[0082] The above-mentioned parameters and steps for each unit module to achieve corresponding functions in the grinding liquid spray monitoring system based on intelligent sensors of the present invention can refer to the parameters and steps in the embodiment of the grinding liquid spray monitoring method based on intelligent sensors above, and will not be repeated here.

[0083] Example 3 An electronic device according to an embodiment of the present invention comprises: a processor and a memory, wherein the memory stores a computer program that can be called by the processor, and the processor executes a grinding liquid spray monitoring method based on an intelligent sensor by calling the computer program stored in the memory. It should be noted that all computer programs of the grinding liquid spray monitoring method based on an intelligent sensor are implemented using C language, wherein a data acquisition module, a grinding liquid coverage state analysis module, a contact abnormality state analysis module, a grinding quality risk assessment module, a grinding liquid spray device optimization warning module, and a control module are all controlled by a remote server.

[0084] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0085] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A method for monitoring the spraying of grinding liquid based on an intelligent sensor, characterized in that: The steps include: S1, obtaining grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device, and obtaining parameter control data of the grinding equipment; S2, analyzing the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data; S3, analyzing the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device; S4. Evaluate the risk of workpiece surface grinding quality based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface; S5. According to the risk assessment results of workpiece surface grinding quality, the grinding liquid injection device is optimized and warned.

2. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 1, characterized in that: In step S2, the grinding liquid coverage state of the workpiece surface is analyzed based on the grinding point feature data and the grinding liquid spray setting data, which specifically includes: S21, extracting grinding point feature data of the workpiece surface and grinding liquid spray setting data of the grinding liquid spray device; S22. Based on the grinding point feature data and the grinding liquid spray setting data, the grinding liquid coverage state of the workpiece surface is analyzed to obtain the grinding liquid coverage state analysis result of the workpiece surface.

3. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 2, characterized in that: The step S22 analyzes the grinding liquid coverage state of the workpiece surface, specifically including: S221, analyzing the uniformity of the grinding liquid coverage on the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data, and obtaining a grinding liquid coverage uniformity analysis result on the workpiece surface; S222, analyzing the fluid dynamics efficiency of the grinding liquid on the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data, and obtaining the analysis result of the fluid dynamics efficiency of the grinding liquid on the workpiece surface; S223, performing weighted summation on the grinding liquid coverage uniformity analysis result and the grinding liquid fluid dynamic efficiency analysis result on the workpiece surface to obtain the grinding liquid coverage state analysis result on the workpiece surface.

4. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 3, characterized in that: In step S3, based on the grinding point feature data and the parameter control data of the grinding equipment, the abnormal contact state between the grinding equipment and the workpiece surface is analyzed, which specifically includes the following steps: S31, extracting grinding point feature data of the workpiece surface and parameter control data of the grinding equipment; S32. Based on the grinding point characteristic data and the parameter control data, an abnormal contact state between the grinding device and the workpiece surface is analyzed to obtain an analysis result of the abnormal contact state between the grinding device and the workpiece surface.

5. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 4, characterized in that: The abnormal contact state between the grinding device and the workpiece surface is analyzed in step S32, and includes the following specific steps: S321, based on the grinding point characteristic data and the parameter control data, analyzing the degree of mechanical imbalance when the grinding head in the grinding equipment contacts the workpiece surface, and obtaining a result of the mechanical imbalance analysis when the grinding head in the grinding equipment contacts the workpiece surface; S322, analyzing the over-grinding risk of the workpiece surface during the grinding process of the grinding head based on the grinding point feature data and the parameter control data, and obtaining the over-grinding risk analysis result of the workpiece surface during the grinding process of the grinding head; S323. Perform weighted summation on the mechanical imbalance degree analysis results and the over-grinding risk analysis results to obtain an analysis result of an abnormal contact state between the grinding equipment and the workpiece surface.

6. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 5, characterized in that: In step S4, the risk of workpiece surface grinding quality is evaluated according to the analysis results of the grinding liquid coverage state of the workpiece surface and the analysis results of the abnormal contact state between the grinding device and the workpiece surface, including the following specific steps: S41, obtaining the analysis result of the grinding liquid coverage state of the workpiece surface obtained by analysis, and simultaneously obtaining the analysis result of the abnormal contact state between the grinding device and the workpiece surface obtained by analysis; S42. The ratio of the abnormal contact state analysis result to the grinding fluid coverage state analysis result is used as the workpiece surface grinding quality risk assessment result.

7. The method for monitoring the spraying of grinding liquid based on intelligent sensor according to claim 6, characterized in that: In step S5, according to the workpiece surface grinding quality risk assessment result, the grinding liquid injection device is optimized and warned, specifically including: S51, obtaining the workpiece surface grinding quality risk assessment result obtained by assessment; S52, presetting a grinding quality risk threshold, and when the workpiece surface grinding quality risk assessment result is greater than the grinding quality risk threshold, optimizing the grinding liquid injection device for early warning.

8. A grinding liquid spray monitoring system based on an intelligent sensor, used to implement the grinding liquid spray monitoring method based on an intelligent sensor according to any one of claims 1 to 7, characterized in that: The system comprises: A data acquisition module, used to acquire the grinding point feature data of the workpiece surface and the grinding liquid spray setting data of the grinding liquid spray device, and simultaneously acquire the parameter control data of the grinding equipment; A grinding liquid coverage state analysis module, used to analyze the grinding liquid coverage state of the workpiece surface based on the grinding point feature data and the grinding liquid spray setting data; The abnormal contact state analysis module is used to analyze the abnormal contact state between the grinding device and the workpiece surface based on the grinding point feature data and the parameter control data of the grinding device; The grinding quality risk assessment module is used to assess the grinding quality risk of the workpiece surface based on the analysis results of the grinding fluid coverage status of the workpiece surface and the abnormal contact status analysis results between the grinding equipment and the workpiece surface; The grinding liquid injection device optimization and early warning module is used to optimize and early warning the grinding liquid injection device according to the workpiece surface grinding quality risk assessment results; The control module is used to control the operation of the data acquisition module, the grinding liquid coverage status analysis module, the contact abnormality status analysis module, the grinding quality risk assessment module, and the grinding liquid injection device optimization early warning module.

9. An electronic device, comprising: A processor and a memory, wherein the memory stores a computer program that can be called by the processor; characterized in that the processor executes the grinding liquid spray monitoring method based on the intelligent sensor as described in any one of claims 1-7 by calling the computer program stored in the memory.

Citation Information

Patent Citations

  • Method for optimizing preparation of chemical mechanical polishing fluid

    CN103231311A

  • A method and a system for establishing a CMP simulation model

    CN109299485A

  • Grinding fluid performance optimization method and system based on data analysis

    CN119567102A

  • CMP (chemical mechanical polishing) device

    CN204149005U

  • Polishing measuring method and polishing device

    JP2006194800A