A wafer wet cutting scriber

Abstract

The application discloses the technical fields of wafer slicing technology, and discloses a wafer wet cutting scriber, which comprises a mounting frame, a guide groove is formed in the mounting frame, an alternating mechanism is arranged in the mounting frame, two second racks are fixedly connected to the mounting frame, two workbenches are arranged on the alternating mechanism, a receiving groove and a slag discharge groove are formed in the workbench, the receiving groove is located on the upper side of the slag discharge groove, a pushing mechanism is arranged in the workbench, a discharging disc is arranged on the pushing mechanism, the discharging disc is located in the workbench, a speed regulating box is arranged on the workbench, the speed regulating box is in transmission connection with a closing mechanism and the pushing mechanism respectively, a moving mechanism is arranged in the workbench, the moving mechanism is in transmission connection with the speed regulating box, the moving mechanism is in movable engagement with the second rack, a cleaning mechanism is arranged in the workbench, a slicing assembly is arranged on the mounting frame, the wafer slicing is effectively guaranteed to be clean, the manual cleaning steps are reduced, and the efficiency of the equipment during processing is higher.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer dicing, in particular to a wafer wet cutting dicing machine. BACKGROUND

[0002] Wafer refers to the wafer used for semiconductor integrated circuit manufacturing, which is called wafer because of its circular shape. Various circuit element structures can be processed and manufactured on the wafer. Wafer is a crystal, including polycrystalline and single crystal. In recent years, silicon-based materials have also been gradually applied to high-speed optical communication. In the wafer processing technology, single crystal silicon rods are first obtained, then the silicon rods are cut to obtain wafers. After edge cutting and overall grinding and thinning of the wafers, the wafers are finally obtained. Wafer chip is a basic material for manufacturing semiconductor chips. Various circuit element structures can be processed and manufactured on the wafer chip to become IC products with specific electrical functions. At present, the cutting methods of wafer chip mainly include two kinds: one is to use diamond grinding wheel for cutting, and the other is to use laser cutting. The diamond wheel dicing machine is a precision numerical control equipment which integrates water, gas and electricity, air static pressure high-speed spindle, precision mechanical transmission, sensor and automatic control technology. In the processing process of wafer, in order to separate each chip on the wafer, the wafer is usually cut and processed by a dicing machine. However, the traditional dicing machine uses liquid to wet the wafer during cutting to avoid the material from cracking during cutting. However, the surface of the wafer will produce liquid during cutting, and the impurities generated during cutting will mix with the liquid, resulting in a rough and dirty material surface. After the material is cut, manual cleaning and drying are required, which reduces the cleaning efficiency of the equipment during use.

[0003] Therefore, the present application designs a wafer wet cutting dicing machine to solve the above problems. SUMMARY

[0004] The present application aims to provide a wafer wet cutting dicing machine to solve the problem of dirty surface of the material after dicing, which requires manual cleaning and drying.

[0005] To achieve the above purpose, the present application provides the following technical scheme:

[0006] The utility model provides a wafer wet cutting scriber, including mounting frame, be equipped with guide groove on the mounting frame, be equipped with alternate mechanism in the mounting frame, two second ratchets are fixedly connected on the mounting frame, two workstations are installed on the alternate mechanism, the receiving groove and the residue discharge groove are equipped with in the workstation, the receiving groove is located residue discharge groove upside, be equipped with pushing mechanism in the workstation, be equipped with material placing tray on the pushing mechanism, the material placing tray is located in the workstation, two closing mechanisms are installed on the workstation side, two closing mechanisms transmission connection, be equipped with drying fan on the closing mechanism, be equipped with speed regulation box on the workstation, speed regulation box is transmission connection with closing mechanism and pushing mechanism respectively, be equipped with moving mechanism in the workstation, moving mechanism and speed regulation box transmission connection, moving mechanism and second ratchets are in engagement, be equipped with cleaning mechanism in the workstation, be equipped with scriber assembly on the mounting frame.

[0007] As a further scheme of the utility model, the alternate mechanism comprises a driving motor, a first gear, a moving frame, a telescopic frame, a first rack and a guide wheel, the mounting frame is provided with the driving motor, two first gears are installed on the output end of the driving motor, the moving frame and the telescopic frame are slidably connected on the mounting frame, the first rack is fixedly connected on the moving frame and the telescopic frame, the first rack is in engagement with the first gear, the guide wheel is installed on the telescopic frame and slidably connected in the guide groove.

[0008] As a further scheme of the utility model, the pushing mechanism comprises a rotating sleeve, a lead screw and a limiting rod, the rotating sleeve is rotatably connected in the workstation, the lead screw is threadedly connected in the rotating sleeve, and the limiting rod is arranged between the lead screw and the workstation.

[0009] As a further scheme of the utility model, the closing mechanism comprises a shell, a gear ring, a closing plate, a pull rod, a rotating column and a second gear, the shell is installed on the workstation, the gear ring is rotatably connected in the shell, a plurality of closing plates are rotatably connected in the shell, the pull rod is arranged between the closing plate and the gear ring, the rotating column is rotatably connected in the shell, the second gear is installed on the rotating column and in engagement with the gear ring.

[0010] As a further scheme of the utility model, the moving mechanism is located in the receiving groove, and the moving mechanism comprises a threaded rod, a sliding block, a water-absorbing sponge, a first torsional spring, a second torsional spring and a third gear, two threaded rods are rotatably connected in the workstation, the two threaded rods are in transmission connection, the sliding block is threadedly connected between the two threaded rods, the sliding block is slidably connected in the receiving groove, the water-absorbing sponge is rotatably connected between the two sliding blocks, the water-absorbing sponge is movably connected with the material placing tray, the first torsional spring is arranged on the two sides of the water-absorbing sponge, the second torsional spring is sleeved on one of the threaded rods, and the third gear is installed on one of the threaded rods and is a one-way wheel.

[0011] As a further scheme of the present application, the receiving groove is internally provided with a pressing assembly, which comprises two arc-shaped plates, and the water-absorbing cotton is movably connected between the two arc-shaped plates.

[0012] As a further scheme of the present application, the cleaning mechanism comprises a pump, a liquid delivery pipe and a plurality of spray heads, the pump is mounted on the workbench, the pump is throughly connected with the liquid delivery pipe at one end, the liquid delivery pipe is throughly connected with the plurality of spray heads, the spray heads are located in the workbench, and the plurality of spray heads are arranged in a ring shape.

[0013] As a further scheme of the present application, the workbench is throughly connected with a liquid discharge pipe at the lower side, and the liquid discharge pipe is connected with a collecting box at one end.

[0014] Compared with the prior art, the present application has the following beneficial effects:

[0015] 1. The material to be scribed is placed in the two workbenches, and the material is fixed on the material placing disc, and then the alternating mechanism is controlled to work, and since the third gear in the moving mechanism is a one-way gear, the third gear does not rotate when the workbench moves to the scribing assembly side, and when the scribing assembly completes the scribing of the material, the alternating mechanism controls the two workbenches to move alternately, so that the scribing efficiency of the material can be improved when the device is working, and one piece of material can be processed, another piece of material can be taken out and placed in, and the working efficiency of the device is ensured.

[0016] 2. When the workbench moves away from the scribing assembly, the second rack controls the moving mechanism to move, and at the same time, the cleaning mechanism sprays liquid to wash the surface of the material, so as to ensure the cleanliness of the surface of the material, and at the same time, the material pushing mechanism pushes the material up through the material placing disc, so as to move the material placing disc away from the inner wall bottom surface of the workbench, and at the same time, the material is moved to one side of the residue discharge groove, and at this time, the water-absorbing cotton in the moving mechanism moves, so as to absorb the liquid on the surface of the material, and at the same time, the residue on the surface is cleaned into the residue discharge groove, so as to ensure the cleanliness of the surface of the material, and at the same time, the material surface is prevented from containing a large amount of liquid.

[0017] 3. When the moving mechanism moves, the moving mechanism controls the closing mechanism to open through the speed regulation box, at this time, the airflow generated by the drying fan acts on the surface of the material, so that the material can be quickly dried, and when the moving mechanism and the second rack are disengaged, the moving mechanism is reset, at this time, the extrusion assembly extrudes the liquid in the water absorption cotton, so that the water absorption cotton can be used repeatedly, so as to guarantee the use effect of the equipment, and when the closing mechanism and the pushing mechanism are reset again, people can take out the material, and put the unprocessed material again, so as to repeat, which can effectively guarantee the working efficiency of the equipment, make the equipment more convenient when working, reduce manual cleaning, avoid the unclean material, thereby affecting the use of the equipment, and further improve the practicability and use convenience of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0019] Figure 1 It is a front side view structure schematic diagram of the present application.

[0020] Figure 2 It is a rear side view structure schematic diagram of the present application.

[0021] Figure 3 It is a left side view structure schematic diagram of the present application.

[0022] Figure 4 It is a partial upper side view structure schematic diagram of the present application.

[0023] Figure 5 It is a partial lower side view structure schematic diagram of the present application.

[0024] Figure 6 It is a partial right side view structure schematic diagram of the present application.

[0025] Figure 7 It is a closing mechanism internal structure schematic diagram of the present application.

[0026] In the drawings, the component list represented by each sign is as follows:

[0027] 1, mounting frame; 2, guide groove; 3, alternating mechanism; 4, driving motor; 5, first gear; 6, moving frame; 7, telescopic frame; 8, first rack; 9, guide wheel; 10, second rack; 11, workbench; 12, storage groove; 13, slag discharge groove; 14, pushing mechanism; 15, rotating sleeve; 16, lead screw; 17, limiting rod; 18, discharging disc; 19, closing mechanism; 20, shell; 21, gear ring; 22, closing plate; 23, pull rod; 24, rotating column; 25, second gear; 26, drying fan; 27, speed regulation box; 28, moving mechanism; 29, threaded rod; 30, sliding block; 31, water-absorbing sponge; 32, first torsional spring; 33, second torsional spring; 34, third gear; 35, cleaning mechanism; 36, pump; 37, infusion tube; 38, spray head; 39, liquid discharge pipe; 40, collection box; 41, slicing assembly; 42, extrusion assembly. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0029] Please refer to Figures 1-7 The present application provides a technical solution:

[0030] A wafer wet cutting slicer, comprising a mounting frame 1, a guide groove 2 is formed in the mounting frame 1, an alternating mechanism 3 is arranged in the mounting frame 1, two second racks 10 are fixedly connected to the mounting frame 1, two workbenches 11 are arranged on the alternating mechanism 3, a storage groove 12 and a slag discharge groove 13 are formed in the workbench 11, the storage groove 12 is located on the upper side of the slag discharge groove 13, a pushing mechanism 14 is arranged in the workbench 11, a discharging disc 18 is arranged on the pushing mechanism 14, the discharging disc 18 is located in the workbench 11, two closing mechanisms 19 are arranged on one side of the workbench 11, the two closing mechanisms 19 are drivingly connected, a drying fan 26 is arranged on the closing mechanism 19, a speed regulation box 27 is arranged on the workbench 11, the speed regulation box 27 is drivingly connected with the closing mechanism 19 and the pushing mechanism 14 respectively, a moving mechanism 28 is arranged in the workbench 11, the moving mechanism 28 is drivingly connected with the speed regulation box 27, the moving mechanism 28 and the second rack 10 are movably engaged, a cleaning mechanism 35 is arranged in the workbench 11, and a slicing assembly 41 is arranged on the mounting frame 1;

[0031] When working, the material to be scribed is placed in the two worktables 11, and the material is fixed on the material placing disc 18, and then the alternating mechanism 3 is controlled to work. Since the third gear 34 in the moving mechanism 28 is a one-way gear, when the worktable 11 moves to the side of the scribing assembly 41, the third gear 34 does not rotate. When the scribing assembly 41 completes the scribing of the material, the alternating mechanism 3 controls the two worktables 11 to move alternately, so that the device can speed up the scribing efficiency of the material when working, and one piece of material can be processed, and another piece of material is taken out and placed in, and the process is repeated to ensure the working efficiency of the device. When the worktable 11 moves away from the scribing assembly 41, the second rack 10 controls the moving mechanism 28 to move, and at the same time, the cleaning mechanism 35 sprays liquid to wash the surface of the material, so as to ensure the cleanliness of the surface of the material. At the same time, the material pushing mechanism 14 pushes the material up through the material placing disc 18, so that the material placing disc 18 moves away from the inner wall bottom surface of the worktable 11, and at the same time, the material moves to one side of the residue discharge groove 13. At this time, the water-absorbing cotton 31 in the moving mechanism 28 moves, so that the water-absorbing cotton 31 absorbs the liquid on the surface of the material and cleans the residue on the surface into the residue discharge groove 13, so as to ensure the cleanliness of the surface of the material and avoid the presence of a large amount of liquid on the surface of the material. When the moving mechanism 28 moves, the moving mechanism 28 controls the closing mechanism 19 to open through the speed regulating box 27. At this time, the airflow generated by the drying fan 26 acts on the surface of the material, so that the material can be quickly dried. When the moving mechanism 28 and the second rack 10 are separated, the moving mechanism 28 is reset. At this time, the squeezing assembly 42 squeezes the liquid in the water-absorbing cotton 31, so that the water-absorbing cotton 31 can be used repeatedly to ensure the use effect of the device. At the same time, when the closing mechanism 19 and the material pushing mechanism 14 are reset again, people can take out the material and place the unprocessed material again to repeat the process, which can effectively ensure the working efficiency of the device, and make the device work more conveniently, reduce manual cleaning, avoid the unclean material, and thus affect the use of the device, and further improve the practicality and use convenience of the device.

[0032] As a further scheme of the present application, the alternating mechanism 3 comprises a driving motor 4, a first gear 5, a moving frame 6, a telescopic frame 7, a first rack 8 and a guide wheel 9. The driving motor 4 is installed on the mounting frame 1, and two first gears 5 are installed on the output end of the driving motor 4. The moving frame 6 and the telescopic frame 7 are slidably connected to the mounting frame 1. The first rack 8 is fixedly connected to the moving frame 6 and the telescopic frame 7. The first rack 8 is in meshing connection with the first gear 5. The guide wheel 9 is installed on the telescopic frame 7 and slidably connected in the guide groove 2.

[0033] When the driving motor 4 works, the first gear 5 starts to rotate, when the first gear 5 rotates, the first gear 5 controls the first rack 8 to move, when the first rack 8 moves, the moving frame 6 and the telescopic frame 7 move simultaneously, when the telescopic frame 7 moves, the guide wheel 9 on the telescopic frame 7 moves in the guide groove 2, and the telescopic frame 7 shortens following the shape of the guide groove 2, so that the two worktables 11 can complete alternation and reposition on the same horizontal plane, so as to facilitate the material unloading and feeding, and the efficiency of the equipment is higher during work, and the working efficiency of the equipment is further improved.

[0034] As a further scheme of the application, the pushing mechanism 14 comprises a rotating sleeve 15, a lead screw 16 and a limiting rod 17, the rotating sleeve 15 is rotatably connected in the worktable 11, the lead screw 16 is threadedly connected in the rotating sleeve 15, and the limiting rod 17 is arranged between the lead screw 16 and the worktable 11.

[0035] When the alternating mechanism 3 moves, the moving mechanism 28 and the second rack 10 are engaged, at this time the speed regulating box 27 works under the driving of the moving mechanism 28, so that the rotating sleeve 15 rotates, when the rotating sleeve 15 rotates, the limiting rod 17 limits the lead screw 16, so that the lead screw 16 moves, when the lead screw 16 moves, the lead screw 16 pushes the discharging disc 18 upwards, so that the discharging disc 18 and the ground of the worktable 11 form a gap, and at the same time the discharging disc 18 can move to one side of the slag discharge groove 13, thereby ensuring the slag discharge of the equipment and speeding up the liquid discharge of the equipment, and ensuring the cleanliness of the material.

[0036] As a further scheme of the application, the closing mechanism 19 comprises an outer shell 20, a gear ring 21, a closing plate 22, a pull rod 23, a rotating column 24 and a second gear 25, the outer shell 20 is installed on the worktable 11, the gear ring 21 is rotatably connected in the outer shell 20, a plurality of closing plates 22 are rotatably connected in the outer shell 20, the pull rod 23 is arranged between the closing plate 22 and the gear ring 21, the rotating column 24 is rotatably connected in the outer shell 20, and the second gear 25 is installed on the rotating column 24 and is in meshing connection with the gear ring 21.

[0037] When the equipment works, the initial state of the equipment is closed, and the plurality of closing plates 22 are mutually environmental, thereby effectively avoiding the liquid from entering the drying fan 26, and ensuring the sealing property of the drying fan 26, when the speed regulating box 27 works, the speed regulating box 27 controls the rotating column 24 to rotate, and then the second gear 25 drives the gear ring 21 to rotate, at this time the gear ring 21 controls the plurality of closing plates 22 to move away from each other through the pull rod 23, thereby making the closing mechanism 19 in an open state, at this time the airflow of the drying fan 26 can act on the surface of the material through the gap, thereby making the surface of the equipment dry faster, and further improving the cleaning efficiency of the equipment.

[0038] As a further scheme of the present application, the moving mechanism 28 is located in the receiving groove 12, and the moving mechanism 28 comprises a threaded rod 29, a sliding block 30, a water-absorbing sponge 31, a first torsional spring 32, a second torsional spring 33 and a third gear 34, two threaded rods 29 are rotationally connected in the workbench 11, the two threaded rods 29 are drivingly connected, the sliding block 30 is threadedly connected between the two threaded rods 29, the sliding block 30 is slidingly connected in the receiving groove 12, the water-absorbing sponge 31 is rotationally connected between the two sliding blocks 30, the water-absorbing sponge 31 is movably connected with the material placing disc 18, the first torsional spring 32 is arranged on both sides of the water-absorbing sponge 31, the second torsional spring 33 is sleeved on one of the threaded rods 29, and the third gear 34 is installed on one of the threaded rods 29, and the third gear 34 is a one-way wheel;

[0039] When the workbench 11 moves away from the scribing assembly 41, the second rack 10 drives the third gear 34 to rotate, at this time, the third gear 34 drives the threaded rod 29 to rotate, when the threaded rod 29 rotates, the sliding block 30 moves at the same time, at this time, the water-absorbing sponge 31 installed on the sliding block 30 moves, when the water-absorbing sponge 31 moves, because the first torsional spring 32 is arranged on both sides of the water-absorbing sponge 31, the torsion of the first torsional spring 32 keeps the water-absorbing sponge 31 adhered to the upper side of the material, so that the liquid on the surface of the material is absorbed, and the residues on the material are swept into the residue discharging groove 13 at the same time, when the second rack 10 and the third gear 34 are disengaged, the second torsional spring 33 controls the threaded rod 29 to rotate reversely, at this time, the water-absorbing sponge 31 is washed and moves into the receiving groove 12, and then the liquid absorption on the surface of the material can be completed, which avoids that too much liquid on the surface of the material affects the subsequent use of the material, and the water-absorbing sponge 31 can replace manpower to absorb the liquid on the material, thereby ensuring the cleanliness and dryness of the material.

[0040] As a further scheme of the present application, the receiving groove 12 is internally provided with an extrusion assembly 42, and the extrusion assembly 42 comprises two arc-shaped plates, and the water-absorbing sponge 31 is movably connected between the two arc-shaped plates;

[0041] When the water-absorbing sponge 31 is reset, the water-absorbing sponge 31 moves between the two arc-shaped plates, at this time, the extrusion force of the arc-shaped plates cooperates with the movement of the threaded rod 29, so that the liquid in the water-absorbing sponge 31 is extruded and discharged through the liquid discharging pipe 39, thereby ensuring the dryness of the water-absorbing sponge 31, so that the water-absorbing sponge 31 can be repeatedly used for many times, and the practicability and use convenience of the equipment are further improved.

[0042] As a further scheme of the present application, the cleaning mechanism 35 comprises a pump 36, a liquid conveying pipe 37 and a plurality of nozzles 38, the pump 36 is installed on the workbench 11, one end of the pump 36 is throughly connected with the liquid conveying pipe 37, the liquid conveying pipe 37 is throughly connected with the plurality of nozzles 38, the nozzles 38 are located in the workbench 11, and the plurality of nozzles 38 are arranged in a ring shape;

[0043] When the workbench 11 is away from the scribing assembly 41, the pump 36 sucks the liquid and sends it to the spray head 38 through the liquid delivery pipe 37, and the spray head 38 washes the surface of the material, so that the impurities move to the edge of the material, and finally the material is discharged by the moving mechanism 28, thereby effectively ensuring the cleanliness of the material and reducing manual cleaning and drying.

[0044] As a further scheme of the present application, the workbench 11 is connected with a liquid discharge pipe 39 at the lower side, and the liquid discharge pipe 39 is connected with a collection tank 40 at one end;

[0045] When the liquid enters the slag discharge groove 13, the impurities and the liquid enter the liquid discharge pipe 39 through the slag discharge groove 13, and finally enter the collection tank 40, thereby completing the collection of the liquid and the impurities, preventing the overflow of the impurities, and facilitating the collection of the impurities.

[0046] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A wafer dicing machine for wet cutting, comprising a mounting frame (1), characterized in that: The mounting frame (1) is provided with a guide groove (2), the mounting frame (1) is provided with an alternating mechanism (3), the mounting frame (1) is fixedly connected with two second ratchets (10), the alternating mechanism (3) is provided with two workbenches (11), the workbench (11) is provided with a receiving groove (12) and a deslagging groove (13), the receiving groove (12) is located on the upper side of the deslagging groove (13), the workbench (11) is provided with a pushing mechanism (14), the pushing mechanism (14) is provided with a discharging disc (18), the discharging disc (18) is located in the workbench (11), the workbench (11) is provided with two closing mechanisms (19), the two closing mechanisms (19) are drivingly connected, the closing mechanism (19) is provided with a drying fan (26), the workbench (11) is provided with a speed regulating box (27), the speed regulating box (27) is drivingly connected with the closing mechanism (19) and the pushing mechanism (14), the workbench (11) is provided with a moving mechanism (28), the moving mechanism (28) and the speed regulating box (27) are drivingly connected, the moving mechanism (28) and the second ratchet (10) are movably engaged, the workbench (11) is provided with a cleaning mechanism (35), and the mounting frame (1) is provided with a slicing assembly (41); The alternating mechanism (3) comprises a driving motor (4), a first gear (5), a moving frame (6), an extension frame (7), a first ratchet (8) and a guide wheel (9), the mounting frame (1) is provided with the driving motor (4), the driving motor (4) is provided with two first gears (5), the mounting frame (1) is slidingly connected with the moving frame (6) and the extension frame (7), the moving frame (6) and the extension frame (7) are fixedly connected with the first ratchet (8), the first ratchet (8) is movably connected with the first gear (5), and the extension frame (7) is provided with the guide wheel (9); the guide wheel (9) is slidingly connected in the guide groove (2); The pushing mechanism (14) comprises a rotating sleeve (15), a lead screw (16) and a limiting rod (17), the workbench (11) is rotatably connected with the rotating sleeve (15), the rotating sleeve (15) is threadedly connected with the lead screw (16), and the lead screw (16) and the workbench (11) are provided with the limiting rod (17); The closing mechanism (19) comprises an outer shell (20), a tooth ring (21), a closing plate (22), a pull rod (23), a rotating column (24) and a second gear (25), the workbench (11) is provided with the outer shell (20), the outer shell (20) is rotatably connected with the tooth ring (21), a plurality of closing plates (22) are rotatably connected in the outer shell (20), the closing plate (22) and the tooth ring (21) are provided with the pull rod (23), the outer shell (20) is rotatably connected with the rotating column (24), the rotating column (24) is provided with the second gear (25), and the second gear (25) and the tooth ring (21) are movably connected. The moving mechanism (28) is located in the storage groove (12), the moving mechanism (28) includes a threaded rod (29), a sliding block (30), a water absorbing sponge (31), a first torsional spring (32), a second torsional spring (33) and a third gear (34), two threaded rods (29) are rotatably connected in the workbench (11), the two threaded rods (29) are drivingly connected, the sliding block (30) is threadedly connected between the two threaded rods (29), the sliding block (30) is slidingly connected in the storage groove (12), the water absorbing sponge (31) is rotatably connected between the two sliding blocks (30), the water absorbing sponge (31) is movably connected with the discharging disc (18), the water absorbing sponge (31) is provided with the first torsional spring (32) on both sides, the second torsional spring (33) is sleeved on one of the threaded rods (29), and the third gear (34) is installed on one of the threaded rods (29). The third gear (34) is a one-way wheel.

2. The wafer dicing machine for wet dicing according to claim 1, wherein: The inside of the storage groove (12) is provided with an extrusion assembly (42), the extrusion assembly (42) comprises two arc-shaped plates, and the water absorbing sponge (31) is movably connected between the two arc-shaped plates.

3. The wafer dicing machine for wet dicing according to claim 1, wherein: The cleaning mechanism (35) comprises a pump (36), a liquid delivery pipe (37) and a spray head (38), the pump (36) is installed on the workbench (11), one end of the pump (36) is penetratingly connected with the liquid delivery pipe (37), a plurality of spray heads (38) are penetratingly connected on the liquid delivery pipe (37), the spray head (38) is located in the workbench (11), and a plurality of the spray heads (38) are arranged in a ring shape.

4. The wafer dicing machine for wet dicing according to claim 1, wherein: The lower side of the workbench (11) is penetratingly connected with a liquid discharge pipe (39), and one end of the liquid discharge pipe (39) is connected with a collecting box (40).

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