Automatic uninterrupted recovery equipment for chemical waste liquid

Abstract

The invention discloses chemical waste liquid automatic uninterrupted recovery equipment which comprises a cabinet body, a waste liquid pool and a waste liquid barrel, the waste liquid pool is fixedly installed on the right side of the top of the cabinet body, moving tables are slidably connected to the two sides of the inner wall of the bottom of the cabinet body, a placing table is arranged on the tops of the moving tables, and a platform scale is arranged on the placing table. A waste liquid barrel is arranged on the platform scale, a second connecting pipe penetrating through and extending into the waste liquid barrel is fixedly installed at the bottom of the waste liquid pool, and a first connecting pipe is fixedly installed on one side of the second connecting pipe. According to the automatic uninterrupted recovery equipment for the chemical waste liquid, the chemical waste liquid can be continuously recovered, and the waste liquid barrel can be conveniently and safely replaced.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor production, and in particular to an automatic and uninterrupted recycling device for chemical waste liquid. Background Art

[0002] In the process of semiconductor production and manufacturing, a large amount of various waste liquids are often generated, which must be recycled and specially treated. In the process of semiconductor production, including wafer preparation, grinding and silicon wafer cleaning, all strong acids, strong alkalis and other similar liquids are required to be treated after use. These treatment liquids will easily become waste liquids after contact with other substances. Therefore, these waste liquids need to be recycled and professionally treated in an environmentally friendly manner to prevent pollution of the production environment.

[0003] In the production site, the recycling of these waste liquids often occurs because the single barrel for recycling waste liquid is full of waste liquid and the waste liquid barrel is not removed and replaced in time, or the waste liquid in the barrel is processed, which will cause waste liquid overflow. If it flows to the ground, it will cause serious pollution to the production environment and also cause harm to the health of the workers.

[0004] In the prior art, utility model 202222642487.6 discloses a waste liquid treatment device for gluing operations. A first accommodating chamber for accommodating a solvent is provided in a liquid storage tank, and a second accommodating chamber is provided in a processing tank, which correspond to the upstream section and the downstream section of the pipeline respectively, so that the upstream section is connected to the first accommodating chamber, and the downstream section is connected to the second accommodating chamber, so that the waste liquid treatment device can be used to clean the pipeline well and solve the problem of pipeline blockage. However, this type of waste liquid treatment is specifically used in the gluing device, and is used to treat viscous glue to avoid pipeline blockage. However, there is no way to automatically and harmlessly treat the continuously generated waste liquid, nor is there any mention of how to further treat the collected waste liquid. In order to solve the above-mentioned problem of safe treatment of continuously generated waste liquid, we propose an automatic and uninterrupted recovery device for chemical waste liquid. Summary of the invention

[0005] The purpose of the present invention is to provide an automatic and uninterrupted chemical waste liquid recovery device to address the deficiencies of the prior art. The chemical waste liquid automatic recovery device of the present invention should be able to safely recover the continuously generated chemical waste liquid, and ensure that there is no leakage or overflow during the recovery process, thereby avoiding pollution and damage to the production environment and facilities.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A kind of automatic and uninterrupted recovery equipment for chemical waste liquid, which includes a cabinet, a waste liquid pool and a waste liquid barrel. The waste liquid pool is fixedly installed on the top right side of the cabinet, and both sides of the bottom inner wall of the cabinet are slidably connected with a mobile platform, the top of the mobile platform is provided with a placement table, the placement table is provided with a platform scale, and the platform scale is provided with a waste liquid barrel, the bottom of the waste liquid pool is fixedly installed with a second connecting pipe that penetrates and extends to the inside of the waste liquid barrel, the first connecting pipe is fixedly installed on one side of the second connecting pipe, and a shielding cover is installed on the outer ring of one side of the first connecting pipe and the lower part of the outer ring of the second connecting pipe.

[0008] As a preferred technical solution of the present invention, support frames are fixedly installed on both sides of the bottom surface of the cabinet, and a servo motor is fixedly installed on the support frame by bolts, and a gear is installed on the output end of the servo motor.

[0009] As a preferred technical solution of the present invention, a support plate is fixedly installed in the middle of the bottom surface of the movable platform, a mounting groove is opened in the middle of the bottom surface of the support plate, and a rack is fixedly installed in the mounting groove, and the rack is meshed with the gear installed on the output end of the servo motor.

[0010] As a preferred technical solution of the present invention, two slide grooves are opened on both sides of the bottom inner wall of the cabinet, and sliders are placed in the slide grooves. The outer wall of the slider is fixedly connected to the bottom of the moving platform, and the vertical section of the slide groove is T-shaped.

[0011] As a preferred technical solution of the present invention, grooves are provided on both sides of the bottom inner wall of the cabinet, the support plate is located in the groove and moves, limiting grooves are provided on both sides of the inner walls of the groove provided on the bottom inner wall of the cabinet, limiting blocks are welded on both sides of the support plate, and the limiting blocks are located in the limiting grooves provided on both sides of the inner walls of the groove provided on the bottom inner wall of the cabinet and move.

[0012] As a preferred technical solution of the present invention, a groove is provided on the top of the movable platform, and a hydraulic rod is fixedly installed on the bottom inner wall of the groove provided on the top of the movable platform.

[0013] As a preferred technical solution of the present invention, the placement table moves in a groove opened at the top of the movable table, a receiving groove is opened at the bottom of the placement table, and the output end of the hydraulic rod is connected to the top inner wall of the receiving groove opened at the bottom of the placement table.

[0014] As a preferred technical solution of the present invention, a groove is provided on the top of the placement table, and a platform scale is fixedly installed in the groove provided on the top of the placement table. The waste liquid barrel is placed on the platform scale, and lifting rings are installed on both sides of the waste liquid barrel.

[0015] As a preferred technical solution of the present invention, a manual valve and a pneumatic valve are respectively installed on the upper and lower parts of the second connecting pipe and located at the connection with the first connecting pipe. The first connecting pipe is L-shaped and a pneumatic valve is installed on the first connecting pipe. A mounting plate is fixedly installed on the left side of the top inner wall of the cabinet, and the first connecting pipe passes through the mounting plate.

[0016] As a preferred technical solution of the present invention, a PLC controller is installed at a corner of one side of the cabinet, and the PLC controller can control the pneumatic valve, servo motor and hydraulic rod. Support cabinet feet are fixedly installed on the bottom surface of the cabinet near the four corners.

[0017] Compared with the prior art, the present invention provides an automatic and uninterrupted chemical waste liquid recovery device, which has achieved the following beneficial effects through practical application:

[0018] 1. The automatic and uninterrupted chemical waste liquid recovery equipment of the present invention is provided with a waste liquid pool, a second connecting pipe and a waste liquid barrel, and the waste liquid generated by the production of semiconductors is poured into the waste liquid pool, the manual valve on the second connecting pipe can be opened, and the pneumatic valve on the second connecting pipe can also be opened through the PLC controller. At this time, the waste liquid in the waste liquid pool can enter the waste liquid barrel on the right side through the second connecting pipe, thereby achieving the purpose of safely recovering the chemical waste liquid.

[0019] 2. The automatic and uninterrupted chemical waste liquid recovery equipment of the present invention is provided with a second connecting pipe and a shielding cover, etc. The shielding cover installed on the second connecting pipe can shield the opening at the top of the waste liquid barrel on the right side, thereby preventing the waste liquid from splashing out.

[0020] 3. The automatic and uninterrupted chemical waste liquid recovery equipment of the present invention is equipped with a first connecting pipe, a second connecting pipe and a pneumatic valve. The platform scale arranged on the platform can be used to weigh the waste liquid barrel on the right side. The waste liquid in the waste liquid pool can enter the waste liquid barrel on the left side through the first connecting pipe through the control of the pipeline and the valve body. When the waste liquid barrel is full, another waste liquid barrel can be used to continue to recover the chemical waste liquid, thereby achieving continuous and uninterrupted collection of waste liquid and improving production efficiency.

[0021] 4. The automatic and uninterrupted chemical waste liquid recovery equipment of the present invention is equipped with a moving platform, a placement platform and a servo motor, etc., and the waste liquid barrel is automatically moved out of the cabinet through the moving platform. At this time, the waste liquid barrel can be moved from the placement platform through the lifting rings installed on both sides of the waste liquid barrel, which is convenient for replacing the waste liquid barrel, realizing the automatic removal of the waste liquid barrel, facilitating the replacement of the waste liquid barrel, and improving the replacement efficiency and replacement safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of an automatic and uninterrupted chemical waste liquid recovery device of the present invention;

[0023] Figure 2 It is a schematic diagram of the lowering structure of the waste liquid barrel in the automatic and uninterrupted recovery equipment for chemical waste liquid of the present invention;

[0024] Figure 3 This is a schematic cross-sectional structural diagram of a mobile platform in an automatic and uninterrupted chemical waste liquid recovery device of the present invention;

[0025] Figure 4 It is a schematic diagram of the cross-sectional structure of a placement table in an automatic and uninterrupted chemical waste liquid recovery device of the present invention;

[0026] Figure 5 This is a schematic diagram of the bottom structure of a support plate in an automatic and uninterrupted chemical waste liquid recovery device of the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of a first connecting pipe and a second connecting pipe in an automatic and uninterrupted chemical waste liquid recovery device of the present invention;

[0028] Figure 7 The present invention is a schematic diagram of a top view of the cabinet structure of an automatic and uninterrupted chemical waste liquid recovery device.

[0029] Figure numerals: 1. cabinet body; 2. shielding cover; 3. placing table; 4. moving table; 5. servo motor; 6. supporting cabinet feet; 7. supporting frame; 8. gear; 9. supporting plate; 10. waste liquid barrel; 11. PLC controller; 12. mounting plate; 13. first connecting pipe; 14. waste liquid tank; 15. second connecting pipe; 16. limit block; 17. hydraulic rod; 18. platform scale; 19. lifting ring; 20. rack. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The present invention is an automatic and uninterrupted chemical waste liquid recovery device, which is mainly used in the production of semiconductor or other chemical industries. It mainly recovers waste liquids such as strong acids and strong alkalis generated on the production line, meets the safety, environmental protection and continuity requirements required in production, avoids damage to the production environment and related facilities, and can also realize the centralized collection and centralized harmless and safe treatment of waste liquids.

[0032] Example 1

[0033] See also Figure 1 , Figure 2 and Figure 3 The automatic and uninterrupted chemical waste liquid recovery equipment of this embodiment mainly includes a cabinet 1, a waste liquid pool 4 and a waste liquid barrel 10. Among them, a waste liquid pool 14 is fixedly installed on the top right side of the cabinet 1, and the waste liquid generated in the semiconductor production process is introduced into the waste liquid pool 14. The bottom inner wall of the cabinet 1 is slidably connected with a moving platform 4 on both sides, so that the cabinet 1 can move as a whole. A placement table 3 is arranged on the top of the moving platform 4. When the moving platform 4 moves, it can drive the placement table 3 to move. A platform scale 18 is arranged on the placement table 3. A waste liquid barrel 10 is arranged on the platform scale 18. The platform scale 18 can weigh the waste liquid barrel 10. According to different types of waste liquid, the above-mentioned waste liquid pool 14 may be open, semi-enclosed or fully enclosed, and the purpose is to serve as a temporary storage container for waste liquid, so that it can accumulate a certain amount before transmission, or a temporary buffer when the amount of waste liquid generated is too large.

[0034] In order to ensure that the waste liquid can be transported safely, a second connecting pipe 15 is fixedly installed at the bottom of the waste liquid pool 14, which penetrates and extends into the waste liquid barrel 10. The chemical waste liquid in the waste liquid pool 14 can be poured into the waste liquid barrel 10 through the second connecting pipe 15. A first connecting pipe 13 is fixedly installed on one side of the second connecting pipe 15. A shielding cover 2 is installed on the outer ring of one side of the first connecting pipe 13 and the lower part of the outer ring of the second connecting pipe 15, which can shield the through hole on the top of the waste liquid barrel 10 to prevent the waste liquid from splashing out.

[0035] See also Figure 1 , Figure 4 and Figure 5 A support frame 7 is fixedly installed on both sides of the bottom surface of the cabinet 1, which can facilitate the installation of the servo motor 5, and the servo motor 5 is fixedly installed on the support frame 7 by bolts, and a gear 8 is installed at the output end of the servo motor 5. When the servo motor 5 is started, the gear 8 can be rotated. A support plate 9 is fixedly installed in the middle of the bottom surface of the moving platform 4, which can support the moving platform 4. Correspondingly, a mounting groove is opened in the middle of the bottom surface of the support plate 9, and a rack 20 is fixedly installed in the mounting groove, and the rack 20 is meshed with the gear 8 installed at the output end of the servo motor 5.

[0036] The servo motor 5 can drive the gear 8 to rotate, and then drive the support plate 9 to move through the rack 20. In addition, two slide grooves are provided on both sides of the bottom inner wall of the cabinet 1, and sliders are placed in the slide grooves, and the outer wall of the slider is fixedly connected to the bottom of the moving platform 4, and the vertical section of the slide groove is T-shaped, which can facilitate the movement of the moving platform 4. Grooves are provided on both sides of the bottom inner wall of the cabinet 1, and the support plate 9 is located in the groove and moves. The inner walls on both sides of the groove provided by the bottom inner wall of the cabinet 1 are provided with limiting grooves, and limiting blocks 16 are welded on both sides of the support plate 9, which can play a role of limiting, and the limiting blocks 16 are located in the limiting grooves provided by the inner walls on both sides of the groove provided by the bottom inner wall of the cabinet 1 and move.

[0037] See also Figure 1 , Figure 3 and Figure 6 A groove is provided at the top of the movable platform 4, and a hydraulic rod 17 is fixedly installed on the bottom inner wall of the groove provided at the top of the movable platform 4. The placement platform 3 moves in the groove provided at the top of the movable platform 4. A receiving groove is provided at the bottom of the placement platform 3, and the output end of the hydraulic rod 17 is connected to the top inner wall of the receiving groove provided at the bottom of the placement platform 3.

[0038] By starting the hydraulic rod 17, the placing table 3 can be moved. A groove is provided on the top of the placing table 3, and a platform scale 18 is fixedly installed in the groove provided on the top of the placing table 3. The waste liquid barrel 10 is placed on the platform scale 18, and the platform scale 18 can weigh the weight of the waste liquid barrel 10, so as to grasp the amount of waste liquid in the waste liquid barrel 10 at any time, and provide an accurate measurement standard for the input control of the waste liquid in the waste liquid barrel 10 and the replacement of the waste liquid barrel.

[0039] Lifting rings 19 are installed on both sides of the waste liquid barrel 10 , and the waste liquid barrel 10 can be removed from the placement table 3 through the lifting rings 19 installed on both sides of the waste liquid barrel 10 .

[0040] In order to realize the replacement operation of the two waste liquid barrels 10, a manual valve and a pneumatic valve are respectively installed on the upper and lower parts of the second connecting pipe 15 and located at the connection of the first connecting pipe 13. The first connecting pipe 13 is L-shaped, and the pneumatic valve is installed on the first connecting pipe 13. A mounting plate 12 is fixedly installed on the left side of the top inner wall of the cabinet 1. The first connecting pipe 13 penetrates the mounting plate 12, and the waste liquid can be introduced into the waste liquid barrel 10 on the right or the waste liquid barrel 10 on the left through the first connecting pipe 13, the second connecting pipe 15 and the pneumatic valve. A PLC controller 11 is installed at a corner of one side of the cabinet 1. The PLC controller 11 can control the pneumatic valve, the servo motor 5 and the hydraulic rod 17 to realize the automatic replacement of the pipeline when the waste liquid is output, and realize continuous production.

[0041] In addition, supporting cabinet feet 6 are fixedly installed on the bottom surface of the cabinet body 1 and near the four corners, which can support the cabinet body 1.

[0042] Example 2

[0043] This embodiment takes the grinding of silicon wafers in semiconductor production as an example. After the grinding liquid is used, it contains a large amount of impurities and becomes waste liquid. The generated waste liquid is introduced into the waste liquid pool 14 through a dedicated pipeline or a dedicated container. After a certain amount of waste liquid accumulates in the waste liquid pool 14, the subsequent waste liquid discharge work is prepared;

[0044] The manual valve on the second connecting pipe 15 is opened, and the pneumatic valve on the second connecting pipe 15 is also opened through the PLC controller 11. At this time, the waste liquid in the waste liquid pool 14 can enter the waste liquid barrel 10 on the right side through the second connecting pipe 15.

[0045] Since the shielding cover 2 installed on the second connecting pipe 15 can shield the opening at the top of the waste liquid barrel 10 on the right side, it can prevent the waste liquid from splashing out. As the waste liquid continues to flow into the waste liquid barrel 10, the waste liquid barrel 10 on the right side can be weighed by the platform scale 18 set on the placement table 3. When a certain weight is reached, the PLC controller 11 can close the pneumatic valve on the second connecting pipe 15.

[0046] At this time, the pneumatic valve on the first connecting pipe 13 is opened, and the waste liquid in the waste liquid pool 14 can enter the waste liquid barrel 10 on the left side through the first connecting pipe 13;

[0047] When the waste liquid barrel 10 on the right side that is full of waste liquid needs to be cleaned and replaced, the hydraulic rod 17 is started by the PLC controller 11, and the output end of the hydraulic rod 17 can drive the placement table 3 to move downward, thereby enabling the platform scale 18 to move downward, and further enabling the waste liquid barrel 10 to move downward, at which time the second connecting pipe 15 will be removed from the waste liquid barrel 10;

[0048] Then start the servo motor 5 on the right side. At this time, the servo motor 5 on the right side starts to work. The output end of the servo motor 5 on the right side can rotate, and when the output end of the servo motor 5 rotates, it can drive the gear 8 to rotate, and then drive the moving platform 4 to move through the rack 20. The waste liquid barrel 10 can be moved out of the cabinet 1 through the moving platform 4. At this time, the waste liquid barrel 10 can be moved away from the placement platform 3 through the lifting rings 19 installed on both sides of the waste liquid barrel 10. If necessary, when moving the waste liquid barrel 10, a sealing cover can be installed on the waste liquid barrel 10 to improve safety;

[0049] After the waste liquid in the waste liquid barrel 10 on the right is processed, a new empty waste liquid barrel 10 can be placed on the placement table 3, and the movable table 4 can be moved into the cabinet 1 by the servo motor 5. Then the hydraulic rod 17 can be started to move the placement table 3 upward and allow the bottom of the second connecting pipe 15 to be inserted into the waste liquid barrel 10. At this time, the shielding cover 2 can shield the upper opening of the waste liquid barrel 10 to prevent the waste liquid from splashing out. The installed waste liquid barrel 10 is ready for use.

[0050] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An automatic and uninterrupted chemical waste liquid recovery device, characterized in that: The structure of the equipment comprises a cabinet (1), a waste liquid pool (14) and a waste liquid barrel (10); the waste liquid pool (14) is fixedly installed on the right side of the top of the cabinet (1); both sides of the bottom inner wall of the cabinet (1) are slidably connected with a moving platform (4); a placement platform (3) is arranged on the top of the moving platform (4); a platform scale (18) is arranged on the placement platform (3); a waste liquid barrel (10) is arranged on the platform scale (18); a second connecting pipe (15) penetrating and extending into the waste liquid barrel (10) is fixedly installed at the bottom of the waste liquid pool (14); a first connecting pipe (13) is fixedly installed on one side of the second connecting pipe (15); a shielding cover (2) is installed on the outer ring of one side of the first connecting pipe (13) and the lower part of the outer ring of the second connecting pipe (15).

2. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: Support frames (7) are fixedly mounted on both sides of the bottom surface of the cabinet (1), and a servo motor (5) is fixedly mounted on the support frame (7) by means of bolts, and a gear (8) is mounted on the output end of the servo motor (5).

3. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: A support plate (9) is fixedly mounted in the middle of the bottom surface of the movable platform (4), a mounting groove is provided in the middle of the bottom surface of the support plate (9), and a rack (20) is fixedly mounted in the mounting groove, and the rack (20) is meshed with a gear (8) mounted on the output end of the servo motor (5).

4. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: Two slide grooves are provided on both sides of the inner wall at the bottom of the cabinet (1), and sliders are placed in the slide grooves. The outer wall of the slider is fixedly connected to the bottom of the moving platform (4), and the vertical section of the slide groove is T-shaped.

5. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 3 is characterized by: Grooves are provided on both sides of the bottom inner wall of the cabinet (1), and the support plate (9) is located and moves in the grooves. Limiting grooves are provided on both sides of the inner walls of the groove provided on the bottom inner wall of the cabinet (1). Limiting blocks (16) are welded on both sides of the support plate (9), and the limiting blocks (16) are located and move in the limiting grooves provided on both sides of the inner walls of the groove provided on the bottom inner wall of the cabinet (1).

6. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: A groove is provided on the top of the movable platform (4), and a hydraulic rod (17) is fixedly mounted on the bottom inner wall of the groove provided on the top of the movable platform (4).

7. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 6 is characterized by: The placement platform (3) is located and moves in a groove formed at the top of the moving platform (4); a receiving groove is formed at the bottom of the placement platform (3); and the output end of the hydraulic rod (17) is connected to the top inner wall of the receiving groove formed at the bottom of the placement platform (3).

8. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: A groove is provided on the top of the placing platform (3), and a platform scale (18) is fixedly installed in the groove provided on the top of the placing platform (3). The waste liquid barrel (10) is placed on the platform scale (18), and lifting rings (19) are installed on both sides of the waste liquid barrel (10).

9. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1 is characterized by: A manual valve and a pneumatic valve are respectively installed on the upper and lower parts of the second connecting pipe (15) at the connection point with the first connecting pipe (13); the first connecting pipe (13) is L-shaped, and the pneumatic valve is installed on the first connecting pipe (13); a mounting plate (12) is fixedly installed on the left side of the top inner wall of the cabinet (1); and the first connecting pipe (13) passes through the mounting plate (12).

10. The automatic and uninterrupted chemical waste liquid recovery equipment according to claim 1, characterized in that: A PLC controller (11) is installed at a corner of one side of the cabinet (1), and the PLC controller (11) can control the pneumatic valve, the servo motor (5) and the hydraulic rod (17). Supporting cabinet feet (6) are fixedly installed on the bottom surface of the cabinet (1) and near the four corners.

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