Micro-electro-mechanical system element

Abstract

The invention discloses a micro electro mechanical system element which comprises a sensing mass block, an anchor point, a main spring and an elastic stopper. The two ends of the main spring are connected with the sensing mass block and the anchor point respectively. One end of the elastic stopper is connected to the anchor point, and the other end of the elastic stopper extends toward the sensing mass block. Therefore, according to the invention, the influence on the sensing mass block caused by the additional arrangement of the elastic stopper is reduced, and the sensing sensitivity of the micro-electro-mechanical system element can be maintained.

Description

Technical Field

[0001] The present invention relates to a micro-electromechanical system component, in particular to a micro-electromechanical system component provided with a stopper. Background Art

[0002] Due to the development of Microelectromechanical Systems (MEMS) technology, MEMS components manufactured by integrating mechanical components and circuits using semiconductor technology have the advantages of low cost and compact size, and are widely used in today's consumer electronics industry.

[0003] MEMS components can be divided into many categories according to different sensing methods. For example, one basic MEMS component is an inertial sensor, which includes at least one sensing mass block. When the sensing mass block is subjected to acceleration and displaced, the distance between it and the sensing electrode will change. These changes are read by a capacitive sensing mechanism and converted into a signal representing the acceleration, so that the existing MEMS components can calculate multiple axial accelerations using a sensing mass block. The patent application with Chinese publication number CN115248034A or the patent application with publication number CN117647663A previously proposed by the applicant discloses the relevant inertial sensor structure and its actuation method.

[0004] Taking such inertial sensors as an example, they usually have a hard stopper to limit the displacement of the sensing mass. When high inertial force acts on the sensing mass, the sensing mass will hit the rigid stopper at high speed, and tiny particles may be generated in the process. These particles may be dispersed in the sensing area during subsequent collisions, causing the sensing signal to shift.

[0005] In order to solve this problem, some prior arts will set up additional stop structures to reduce the contact speed when the sensing mass hits the rigid stopper, in an attempt to eliminate the signal offset effect caused by tiny particles. However, such prior arts must set up additional anchors for the additional stop structures. An anchor is a fixed point in a MEMS component that is used to support other components of the component or as a fulcrum for the movement of other components. Setting up additional anchors will sacrifice the area of ​​the sensing mass, resulting in a reduction in equivalent mass, thereby reducing the sensing sensitivity.

[0006] In short, in order to improve the reliability of MEMS components, the prior art may need to sacrifice the sensing performance of the components. In view of this, there is still a need to improve the MEMS components with stoppers. Summary of the invention

[0007] The present invention proposes an improved MEMS component to solve the aforementioned problem that the sensing performance of the component must be sacrificed in order to improve the reliability of the MEMS component with a stopper.

[0008] To achieve the above-mentioned object, the present invention provides a micro-electromechanical system component, which includes a sensing mass block, an anchor point, a main spring and an elastic stopper. The two ends of the main spring are respectively connected to the sensing mass block and the anchor point. One end of the elastic stopper is connected to the anchor point, and the other end of the elastic stopper extends toward the sensing mass block. The micro-electromechanical system component may further include a rigid stopper, which is used to block the displacement of the sensing mass block in the first axial direction.

[0009] The micro-electromechanical system element of the present invention can provide an elastic buffering effect for the inertial force along at least one direction by setting an elastic stopper, effectively preventing the sensing mass block from colliding with the rigid stopper at high speed, thereby avoiding the generation of tiny particles during the high-speed collision, thereby eliminating the signal deviation effect that may be caused by the tiny particles.

[0010] Furthermore, the elastic stopper and the main spring adopt a common anchor point design. Thus, the effect of the additional elastic stopper on the sensing mass block is greatly reduced without excessively sacrificing the area and equivalent mass of the sensing mass block, thereby maintaining the sensing sensitivity of the MEMS element. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of a first embodiment of a micro-electromechanical system component of the present invention;

[0012] Figure 2 A schematic diagram of a partial operation of a first embodiment of a micro-electromechanical system component of the present invention;

[0013] Figure 3 A schematic structural diagram of a second embodiment of a micro-electromechanical system component of the present invention;

[0014] Figure 4 A schematic structural diagram of a third embodiment of a micro-electromechanical system component of the present invention;

[0015] Figure 5 A schematic structural diagram of a fourth embodiment of a micro-electromechanical system component of the present invention;

[0016] Figure 6 A schematic structural diagram of a fifth embodiment of a micro-electromechanical system component of the present invention;

[0017] Figure 7 A schematic structural diagram of a sixth embodiment of a micro-electromechanical system component of the present invention;

[0018] Figure 8A schematic structural diagram of a seventh embodiment of a micro-electromechanical system component of the present invention;

[0019] Fig. 9 FIG. 4 is a schematic structural diagram of an eighth embodiment of a micro-electromechanical system component according to the present invention.

[0020] Description of Figure Numbers:

[0021] 1 Sensing mass

[0022] 1a Part 1

[0023] 1b Part 2

[0024] 11, 11' First gap

[0025] 12, 12' Second slot

[0026] 121 Sensing electrodes

[0027] 13, 13' Third slot

[0028] 2 Anchor Point

[0029] 21 Surface

[0030] 3 Main spring

[0031] 31 Auxiliary elastic stopper

[0032] 311 Auxiliary stopper

[0033] 4 Elastic stopper

[0034] 4a First elastic stopper

[0035] 4b Second elastic stopper

[0036] 41 Stopper

[0037] 41a, 41b Stopper

[0038] 5 Rigid stop

[0039] 51 abutment

[0040] 6 Auxiliary elastic stopper

[0041] 61 Auxiliary stopper

[0042] X First Axis

[0043] Y Second Axis

[0044] Z third axis

[0045] A Rotation axis DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to have a further understanding and recognition of the features and effects achieved by the present invention, embodiments and accompanying descriptions are provided as follows:

[0047] See also Figure 1 , Figure 1 FIG. 1 is a schematic structural diagram of a first embodiment of a MEMS component of the present invention, which shows a device layer at the center of the MEMS component. As for the substrate layer at the bottom and the cap layer at the top of the MEMS component, since they cannot highlight the main improved features of the present invention, they are only described in words.

[0048] The micro-electromechanical system element includes a proofmass 1, an anchor 2, a main spring 3, a flexible stopper 4 and a hard stopper 5. The proofmass 1 may be provided with a first notch 11 and a second notch 12, and the anchor 2, the main spring 3 and the flexible stopper 4 may be disposed in the first notch 11. The second notch 12 may be provided with a sensing electrode 121, and the sensing electrode 121 is used to sense the movement of the proofmass 1 when it is subjected to a first axial X inertial force.

[0049] The anchor point 2 can be connected to the substrate layer; or the two sides of the anchor point 2 can be connected to the cover layer and the substrate layer respectively to form an anchor structure, which is used as a fixed point of the micro-electromechanical system component system architecture. In this embodiment, the main spring 3 can be a suspension spring, and the two ends of the main spring 3 are respectively connected to the sensing mass block 1 and the anchor point 2, and the main spring 3 is mainly used to generate a linear motion along a first axial direction X to allow the sensing mass block 1 to translate in the first axial direction X.

[0050] One end of the elastic stopper 4 is connected to the anchor point 2, and the other end of the elastic stopper 4 extends toward the sensing mass block. A stopper 41 is provided on the elastic stopper 4, and the stopper 41 is preferably provided at the other end of the elastic stopper 4 away from the anchor point 2. The elastic stopper 4 is composed of one or more structures, so that it has flexibility. In this embodiment, the elastic stopper 4 can be a member that is flexible in the first axial direction X but has better rigidity in a second axial direction Y perpendicular to the first axial direction X. For example, the elastic stopper 4 can be composed of a long beam structure, and the elastic stopper 4 extends along the second axial direction Y, so that it has better rigidity in the second axial direction Y and is flexible in a direction perpendicular to the second axial direction Y (including the first axial direction X). The elastic stopper 4 can control its overall flexibility or the flexibility of a specific section through the design of the cross section. For example, if the other end of the elastic stopper 4 away from the anchor point 2 needs to have better flexibility, the area of ​​its cross section can be gradually reduced from the anchor point 2 toward the other end.

[0051] The rigid stopper 5 is similar to the anchor point 2 and can be connected to the cover layer or the substrate layer to form a fixed structure. In this embodiment, in order to make the components compact and the shape easy to package, the sensing mass block 1 can be further provided with a third notch 13 for the rigid stopper 5 to be set. The rigid stopper 5 is provided to completely block the displacement of the sensing mass block 1 in the first axial direction X. Generally speaking, the surface of the rigid stopper 5 along the first axial direction X facing the sensing mass block 1 can be formed with a special shape (such as a convex point) or a special material (such as a material different from the rigid stopper 5 body) to form an abutment portion 51 to reduce the impact when the abutment portion 51 touches the sensing mass block 1.

[0052] Please refer to Figure 2 , Figure 2 It is a partial actuation schematic diagram of the first embodiment of the micro-electromechanical system element of the present invention. When the inertial force along the first axial direction X acts on the sensing mass block 1, the main spring 3 will expand and contract to allow the sensing mass block 1 to translate in the first axial direction X. When the inertial force reaches a certain level, the elastic stopper 4 can abut against the sensing mass block 1 through its stopper 41. Because the elastic stopper 4 is flexible in the first axial direction X, the displacement speed of the sensing mass block 1 can be slowed down, or even the displacement of the sensing mass block 1 can be stopped.

[0053] Furthermore, if the inertial force is too high, even if the elastic stopper 4 cannot stop the displacement of the sensing mass block 1, it can still effectively slow down the displacement speed of the sensing mass block 1. In this way, the displacement of the sensing mass block 1 will eventually stop when it touches the rigid stopper 5 or its abutment portion 51. However, since the elastic stopper 4 can slow down the displacement speed of the sensing mass block 1 during the process, it can effectively prevent the sensing mass block 1 from colliding with the rigid stopper at high speed, thereby avoiding the generation of tiny particles that may be generated during the high-speed collision, thereby eliminating the signal offset effect that may be caused by tiny particles.

[0054] More importantly, in the first embodiment of the micro-electromechanical system component of the present invention, the anchor point 2 to which the elastic stopper 4 is connected is the anchor point 2 to which the main spring 3 is connected. In other words, the elastic stopper 4 and the main spring 3 are designed with a common anchor point 2. In this way, compared with the prior art that requires an additional anchor point to be set for the additional stop structure, the first embodiment of the micro-electromechanical system component of the present invention only needs to add a space for accommodating the elastic stopper 4 in the first notch 11 of the sensing mass block 1 at most. Compared with the prior art that requires a space for accommodating an additional anchor point, the present invention has indeed greatly reduced the impact of adding the elastic stopper 4 on the sensing mass block 1, and does not need to excessively sacrifice the area and equivalent mass of the sensing mass block, thereby being able to maintain the sensing sensitivity of the micro-electromechanical system component.

[0055] What is not mentioned in the above description is that in order to form a fully differential system or simply for structural symmetry, the MEMS components can be actually designed to have the same structure at the corresponding position on the sensing mass block 1. For example, the sensing mass block 1 can have another first notch 11' to accommodate another set of main springs and elastic stoppers. Similarly, the sensing mass block 1 can have another second notch 12' to accommodate another sensing electrode; the sensing mass block 1 can have another third notch 13' to accommodate another rigid stopper.

[0056] It should be noted that in the present embodiment, the first notch 11, the second notch 12 or the third notch 13 are all located inside the sensing mass block 1. The more components are contained inside the sensing mass block 1, the larger the total area of ​​the notches to be opened. In this case, it is less feasible to set up additional anchor points for the additional stop structures. In other words, in such cases, the demand for improvement of the embodiment of the micro-electromechanical system component of the present invention is higher. Only by using the improved design of the common anchor point of the present invention, the influence of the additional elastic stopper on the sensing mass block can the sensing sensitivity of the micro-electromechanical system component be reduced, so as to ensure the sensing sensitivity of the micro-electromechanical system component.

[0057] Based on the inventive spirit of the first embodiment of the micro-electromechanical system component of the present invention, the micro-electromechanical system component of the present invention can have the following various variations and implementations:

[0058] First, please refer to Figure 1 In practical applications, electromechanical system components may be used to form a three-axis accelerometer. In other words, in addition to translation along the first axis X, the sensing mass block 1 may also be driven by other mechanisms (not shown in the figure, because there are many ways to design a three-axis accelerometer, and it is not within the scope of improvement of the present invention) to translate along other directions (such as the second axis Y). In this case, by changing the design of the elastic stopper 4, the elastic stopper 4 can also be made flexible in the second axis Y, thereby providing an elastic buffering effect for the inertial force along the second axis Y.

[0059] Specifically, by replacing the elastic stopper 4 from a long beam structure to a design including a zigzag structure (such as the aforementioned suspension spring), the elastic stopper 4 can also be flexible in the second axial direction Y. Thus, when the inertial force along the second axial direction Y is too high, the elastic stopper 4 can abut against the sensing mass 1 through its stopper 41 to provide an elastic buffering effect.

[0060] Alternatively, please refer to Figure 3 , Figure 3 Schematic diagram of the structure of the second embodiment of the micro-electromechanical system element of the present invention. The difference from the first embodiment is that the micro-electromechanical system element further includes an auxiliary elastic stopper 6. The auxiliary elastic stopper 6 can also be arranged in the first notch 11, and one end of the auxiliary elastic stopper 6 is also connected to the anchor point 2. The auxiliary elastic stopper 6 is provided with an auxiliary stopper 61, and the auxiliary stopper 6 is preferably arranged at the other end of the auxiliary elastic stopper 6 away from the anchor point 2. The auxiliary elastic stopper 6 can be a component that is flexible in the second axial direction Y but has better rigidity in the first axial direction X. For example, the auxiliary elastic stopper 6 can also be composed of a long beam structure, and the auxiliary elastic stopper 6 extends along the first axial direction X, so that it has better rigidity in the first axial direction X and is flexible perpendicular to the second axial direction Y.

[0061] Without changing the design of the elastic stopper 4, by additionally providing a flexible auxiliary elastic stopper 6 on the second axial direction Y, when the inertial force along the second axial direction Y is too high, the auxiliary elastic stopper 6 can abut against the sensing mass block 1 through its auxiliary stopper 61 to provide an elastic buffering effect.

[0062] Alternatively, please refer to Figure 4 , Figure 4Schematic diagram of the structure of the third embodiment of the micro-electromechanical system element of the present invention. The difference from the first embodiment is that by allowing the long beam structure of the elastic stopper 4 to extend in a specific direction that is not parallel to the first axial direction X and the second axial direction Y on the XY plane formed by the first axial direction X and the second axial direction Y, the elastic stopper 4 can be made flexible in the first axial direction X and the second axial direction Y. In this way, when the inertial force along the first axial direction X or the second axial direction Y is too high, the elastic stopper 4 can contact the sensing mass block 1 through its stopper 41 to provide an elastic buffering effect.

[0063] Among them, although Figure 4 The long beam structure of the elastic stopper 4 has an angle of approximately 45° with the first axial direction X and the second axial direction Y, respectively, but the present invention is not limited thereto. In fact, by designing the long beam structure of the elastic stopper 4 to have a larger angle with the first axial direction X, it can be ensured that the elastic stopper 4 has better flexibility in the first axial direction X. In this way, when the stopper 41 abuts against the sensing mass block 1 along the first axial direction X, the elastic stopper 4 is more likely to deform to achieve a buffering effect. On the contrary, if the long beam structure of the elastic stopper 4 has a smaller angle with the first axial direction X, the elastic stopper 4 has poorer flexibility in the first axial direction X. In this way, when the stopper 41 abuts against the sensing mass block 1 along the first axial direction X, the displacement speed of the sensing mass block 1 can be greatly slowed down, thereby preventing the sensing mass block 1 from touching the rigid stopper 5.

[0064] Please refer to Figure 5 , which is a schematic diagram of the structure of the fourth embodiment of the micro-electromechanical system element of the present invention. The difference from the above embodiments is that: although it is described in the above description that the micro-electromechanical system element is for structural symmetry, the same structure can be set at the corresponding position on the sensing mass block 1 in actual design. For this reason, a total of four elastic stoppers 4 are set in the above embodiments, and two auxiliary elastic stoppers 6 are even added in the second embodiment. However, under the spirit of the present invention, if it is confirmed by simulation or actual measurement that the elastic buffering effect of the elastic stopper has been satisfied, the number of elastic stoppers should be reduced to minimize the space for accommodating the elastic stopper in the first slot 11 of the sensing mass block 1. For example, in this embodiment, two elastic stoppers 4 can also be used to abut against the sensing mass block 1 through their stoppers 41 when the inertial force along the first axial direction X or the second axial direction Y is too high, so as to provide an elastic buffering effect, and also meet the structural symmetry. In fact, if the user does not pursue structural symmetry, a single elastic stopper 4 can achieve the above technical effects.

[0065] Please refer to Figure 6 , Figure 6: is a structural schematic diagram of the fifth embodiment of the micro-electromechanical system element of the present invention. The difference from the above embodiments is that: if the elastic buffering effect of the elastic stopper 4 is not satisfied after simulation or actual measurement, in addition to changing the design of the elastic stopper 4, another way is to try to add an auxiliary elastic stopper 31 to the main spring 3. Among them, since the main spring 3 in this embodiment is also a suspension spring, it can generate linear motion along the first axial direction X. Therefore, by selecting a section of the main spring 3 as the auxiliary elastic stopper 31, and setting an auxiliary stopper 311 on the auxiliary elastic stopper 31 as appropriate, the auxiliary elastic stopper 31 can also abut against the sensing mass block 1 through its auxiliary stopper 311 when the inertial force along the first axial direction X is too high, so as to provide an elastic buffering effect. Among them, similar to the elastic stopper 4, the auxiliary elastic stopper 31 can control its overall or specific section flexibility through the design of the cross section. For example, if the auxiliary elastic stopper 31 section needs to have better flexibility than the remaining sections of the main spring 3, the cross-sectional area of ​​the auxiliary elastic stopper 31 can be made smaller than the cross-sectional area of ​​the remaining sections of the main spring 3; vice versa.

[0066] Please refer to Figure 7 , Figure 7 Schematic diagram of the structure of the sixth embodiment of the micro-electromechanical system element of the present invention. The difference from the aforementioned embodiments is that after an elastic stopper 4 is provided in the embodiments of the present invention, the sensing mass block 1 can be effectively prevented from colliding with the rigid stopper 5 at high speed. Accordingly, under certain application conditions, it is not necessary to provide a large-sized rigid stopper 5 similar to that in the aforementioned embodiments. In this embodiment, the rigid stopper 5 can be replaced by a smaller convex point, and can be directly provided on an exposed surface 21 of the anchor point 2 along the first axial direction X toward the sensing mass block 1. Thereby, the sensing mass block 1 does not need to be provided with the aforementioned third notch 13 for the rigid stopper 5 to be provided.

[0067] In fact, in this embodiment, by providing the elastic stopper 4 and changing the rigid stopper 5 to be connected to the anchor point 2, the total area of ​​the slot required to be opened in the sensing mass block 1 is even smaller than that of the prior art without the elastic stopper. In other words, this embodiment is not only equivalent to increasing the area and equivalent mass of the sensing mass block, but also can enhance the sensing sensitivity of the micro-electromechanical system components.

[0068] Please refer to Figure 8 , Figure 8Schematic diagram of the structure of the seventh embodiment of the micro-electromechanical system element of the present invention. The difference from the previous embodiments is that the previous embodiments disclose how to make the elastic stopper 4 flexible in both the first axial direction X and the second axial direction Y, thereby providing an elastic buffering effect for the inertial forces in different directions along the XY plane. However, the displacements on the XY plane are all in-plane displacements, and in fact, the improvement of the present invention is also applicable to providing a buffering effect for out-of-plane displacements.

[0069] Specifically, in this embodiment, the main spring 3 may be a torsion spring, with two ends of the main spring 3 connected to the sensing mass block 1 and the anchor point 2 respectively, and the main spring 3 may also generate a rotational motion relative to a rotation axis A to allow the sensing mass block 1 to rotate around the rotation axis A. The rotation axis A passes through the anchor point 2.

[0070] The sensing mass block 1 has a first part 1a and a second part 1b on both sides of the rotation axis A. In this embodiment, the micro-electromechanical system component is provided with a first elastic stopper 4a and a second elastic stopper 4b. The first elastic stopper 4a can be arranged in the space where the first notch 11 falls on the first part 1a, and the second elastic stopper 4b can be arranged in the space where the first notch 11 falls on the second part b. The remaining features of the first elastic stopper 4a and the second elastic stopper 4b are the same as the elastic stopper 4 in the first embodiment. Therefore, when the inertial force along the first axial direction X is too high, the first elastic stopper 4a and the second elastic stopper 4b can abut against the sensing mass block 1 through their stoppers 41a and 41b to provide an elastic buffering effect. Since the operating principle of this part is the same, it will not be repeated.

[0071] However, when the sensing mass 1 rotates around the rotation axis A, causing the first portion 1a to move out of the plane along a third axial direction Z, the second portion 1b will move out of the plane in a direction opposite to the third axial direction Z. The third axial direction Z is perpendicular to the first axial direction X and the second axial direction Z. At this time, if the inertial force causing the rotation is too high, the stoppers 41a and 41b of the first elastic stopper 4a or the second elastic stopper 4b can abut against the structure on the cover layer or the component layer alone or separately to provide an elastic buffering effect.

[0072] Accordingly, through the seventh embodiment of the micro-electromechanical system element of the present invention, the first elastic stopper 4a or the second elastic stopper 4b can not only provide an elastic buffering effect for the inertial force along the first axial direction X, but also provide an elastic buffering effect for the inertial force causing out-of-plane motion perpendicular to the XY plane.

[0073] Please refer to Fig. 9 , Fig. 9 Schematic diagram of the structure of the seventh embodiment of the micro-electromechanical system component of the present invention. The difference from the above embodiments is that: in fact, because the application range of micro-electromechanical system components such as inertial sensors is very wide, in some applications, when the inertial force that may be borne is too small, the above elastic stopper 4 may not be needed to provide an elastic buffering effect. In this case, only an auxiliary elastic stopper 31 can be added to the main spring 3. Among them, since the main spring 3 in this embodiment is also a suspension spring, it can be used to generate linear motion along the first axial direction X. Therefore, by selecting a section of the main spring 3 as the auxiliary elastic stopper 31, and optionally setting an auxiliary stopper 311 on the auxiliary elastic stopper 31 along the first axial direction X toward the sensing mass block 1, the auxiliary elastic stopper 31 can be in contact with the sensing mass block 1 through its auxiliary stopper 311 when the inertial force along the first axial direction X is too high, so as to provide an elastic buffering effect.

[0074] The auxiliary elastic stopper 31 and the main spring 3 can still be equivalently regarded as a design with a common anchor point 2. In this way, compared with the prior art that requires an additional anchor point to be set for an additional stopper structure, the seventh embodiment of the micro-electro-mechanical system component of the present invention does not need to add a space for accommodating the elastic stopper in the first notch 11, so that the area and equivalent mass of the sensing mass block can be maintained, thereby maintaining the sensing sensitivity of the micro-electro-mechanical system component.

[0075] In summary, the embodiments of the micro-electromechanical system components of the present invention can provide an elastic buffering effect for the inertial force along at least one direction by setting an elastic stopper, and even if the elastic stopper cannot stop the displacement of the sensing mass block, it can still effectively slow down the displacement speed of the sensing mass block. In this way, it can effectively prevent the sensing mass block from colliding with the rigid stopper at high speed, thereby avoiding the generation of tiny particles that may be generated during the high-speed collision, thereby eliminating the signal deviation effect that may be caused by the tiny particles.

[0076] More importantly, in each embodiment of the MEMS device of the present invention, the elastic stopper and the main spring adopt a common anchor point design. Thus, compared with the prior art which requires a space to accommodate an additional anchor point, the impact of the additional elastic stopper on the sensing mass block of the present invention is indeed greatly reduced, without excessively sacrificing the area and equivalent mass of the sensing mass block, thereby maintaining the sensing sensitivity of the MEMS device.

[0077] However, what is described above is only an embodiment of the present invention and is not intended to limit the scope of implementation of the present invention. Therefore, all equivalent changes and modifications to the shape, structure, characteristics and spirit described in the scope of the claims of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A micro-electromechanical system component, characterized in that: Include: a sensing mass; An anchor point; a main spring, two ends of which are respectively connected to the sensing mass block and the anchor point; and An elastic stopper, one end of which is connected to the anchor point, and the other end of which extends toward the sensing mass block.

2. The micro-electromechanical system component according to claim 1, characterized in that: A rigid stopper is also included, and the rigid stopper is used to block the displacement of the sensing mass block in the first axial direction.

3. The micro-electromechanical system component according to claim 2, characterized in that: The rigid stopper forms an abutment portion on a surface along the first axial direction facing the sensing mass block.

4. The micro-electromechanical system component according to claim 1, characterized in that: The sensing mass block is provided with a first notch, and the anchor point, the main spring and the elastic stopper are arranged in the first notch.

5. The micro-electromechanical system component according to claim 4, characterized in that: The first notch is located inside the sensing mass block.

6. The micro-electromechanical system component according to claim 1, characterized in that: The sensing mass block is provided with a second notch, and a sensing electrode is provided in the second notch.

7. The micro-electromechanical system component according to claim 2, characterized in that: The sensing mass block is provided with a third notch, and the third notch is provided for the rigid stopper to be disposed.

8. The micro-electromechanical system component according to claim 1, characterized in that: The elastic stopper is provided with a stopper, and the stopper is arranged at the other end of the elastic stopper away from the anchor point.

9. The micro-electromechanical system component according to claim 2, characterized in that: The elastic stopper is flexible in the first axial direction.

10. The micro-electromechanical system component according to claim 9, characterized in that: The elastic stopper is flexible in a second axial direction perpendicular to the first axial direction.

11. The micro-electromechanical system component according to claim 10, characterized in that: The elastic stopper extends along a direction that is not parallel to the first axial direction and the second axial direction.

12. The micro-electromechanical system component according to claim 9, characterized in that: The invention further comprises an auxiliary elastic stopper, one end of which is also connected to the anchor point. The auxiliary elastic stopper is a component which is flexible in a second axial direction perpendicular to the first axial direction.

13. The micro-electromechanical system component according to claim 2, characterized in that: The main spring is a suspension spring to allow the sensing mass to translate in the first axial direction.

14. The micro-electromechanical system component according to claim 13, characterized in that: The main spring is provided with an auxiliary elastic stopper, and the auxiliary elastic stopper is provided with an auxiliary stopper.

15. The micro-electromechanical system component according to claim 2, characterized in that: The rigid stopper is disposed on a surface of the anchor point along the first axial direction toward the sensing mass.

16. The micro-electromechanical system component according to claim 1, characterized in that: The main spring is a torsion spring to allow the sensing mass to rotate around a rotation axis.

17. The micro-electromechanical system component according to claim 16, characterized in that: The sensing mass block has a first part and a second part on both sides of the rotating axis. The elastic stopper includes a first elastic stopper and a second elastic stopper. The first elastic stopper is arranged at the first part, and the second elastic stopper is arranged at the second part.

18. A micro-electromechanical system component, characterized in that: Include: a sensing mass; An anchor point; a main spring, two ends of which are respectively connected to the sensing mass block and the anchor point, and the main spring allows the sensing mass block to translate in a first axial direction; Wherein, an auxiliary elastic stopper is arranged on the main spring, and an auxiliary stopper is arranged on one side of the auxiliary elastic stopper along the first axial direction toward the sensing mass block.

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