Testing method and testing device for efficiently detecting weak absorptivity value of optical element

Abstract

The invention relates to weak absorptivity detection, in particular to a test method and a test device for efficiently detecting a weak absorptivity value of an optical element, and the method comprises the following steps: building a heat insulation sample chamber with a plurality of same and relatively independent sub-chambers, and introducing a collimated high-power laser beam into the center of the same test sample placed in each sub-chamber; the method comprises the following steps: detecting the temperatures of a test sample irradiated by laser beams with different powers before irradiation, during irradiation and after irradiation in real time by using a temperature sensor to obtain a plurality of groups of temperature time sequences of the test sample under different irradiation powers; determining a temperature change formula of the test sample under different irradiation powers according to the plurality of groups of temperature time sequences; according to a temperature change formula, a weak absorptivity value calculation formula of the test sample under different irradiation powers is obtained through data fitting; according to the technical scheme provided by the invention, the defect of relatively low detection efficiency of the weak absorptivity of the optical element in the prior art can be effectively overcome.

Description

Technical Field

[0001] The invention relates to weak absorption rate detection, and in particular to a testing method and a testing device for efficiently detecting the weak absorption rate value of an optical element. Background Art

[0002] In the field of laser technology, with the continuous development and progress of related technologies, the output power of lasers has shown a significant growth trend. In order to ensure the high-quality output of high-power lasers and the efficient operation of high-energy laser systems, it is particularly important to improve the performance of optical components and reduce the absorption loss of optical components. At present, with the technical improvement of coating processes, the weak absorption rate of optical components can be further reduced through coating. High-quality and low-weak absorption coated optical components can effectively improve the transmission efficiency and beam quality of lasers, while avoiding deformation or damage of optical components due to thermal stress.

[0003] Most coatings are achieved by depositing one or more layers of specific functional materials on the component substrate according to usage requirements. The quality of optical components processed by different coating processes is unknown. At the same time, some special film layers will change their absorption characteristics under long-term irradiation of high-power lasers. Therefore, rapid detection of weak absorption rates of optical components is particularly important.

[0004] At present, the national standard for detecting the weak absorption rate of optical components is laser calorimetry (ISO11551:2003(E)–Test method for absorptance of optical laser components). Its advantage is that it can directly detect the absolute value of absorption loss (without calibration). Its disadvantage is that it has high requirements for ambient temperature and a long thermal stabilization time in the test chamber, resulting in low detection efficiency of the weak absorption rate of optical components. Summary of the invention

[0005] 1. Technical issues to be solved

[0006] In view of the above-mentioned shortcomings of the prior art, the present invention provides a testing method and a testing device for efficiently detecting the weak absorption rate value of an optical element, which can effectively overcome the defect of low detection efficiency of the weak absorption rate of an optical element in the prior art.

[0007] (II) Technical solution

[0008] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0009] A test method for efficiently detecting the weak absorption rate value of an optical element comprises the following steps:

[0010] S1. Build an insulated sample chamber with multiple identical and relatively independent sub-chambers, and introduce a collimated high-power laser beam into the center of the same test sample placed in each sub-chamber;

[0011] S2. Using a temperature sensor to detect the temperature of the test sample irradiated by laser beams of different powers before, during and after irradiation in real time, and obtain multiple groups of temperature time series of the test sample at different irradiation powers;

[0012] S3. Determine the temperature variation formula of the test sample under different irradiation powers according to multiple groups of temperature time series;

[0013] S4. According to the temperature change formula, the calculation formula of the weak absorption rate value of the test sample under different irradiation powers is obtained by data fitting;

[0014] S5. According to the weak absorption rate calculation formula, the weak absorption rate values ​​of the test samples under different irradiation powers are calculated and processed in a graphical form to finally obtain the weak absorption rate test results of the test samples.

[0015] Preferably, in S1, an insulated sample chamber having a plurality of identical and relatively independent sub-chambers is constructed, and a collimated high-power laser beam is introduced into the center of the same test sample placed in each sub-chamber, including:

[0016] S11, constructing an insulated sample chamber having a plurality of identical and relatively independent sub-chambers, evacuating and cooling the insulated sample chamber, and waiting for the internal temperature of each sub-chamber to stabilize;

[0017] S12, after the temperature inside each sub-chamber is stabilized, a collimated high-power laser beam is introduced into the center of the same test sample placed in each sub-chamber;

[0018] Among them, each sub-chamber is connected by a narrow channel at the bottom, and the heat exchange between the sub-chambers can be ignored, and it is considered that each sub-chamber is relatively independent.

[0019] Preferably, in S2, a temperature sensor is used to detect the temperature of the test sample irradiated by laser beams of different powers before, during and after irradiation in real time, and multiple groups of temperature time series of the test sample at different irradiation powers are obtained, including:

[0020] The process of testing samples being irradiated by laser beams is divided into three stages:

[0021] Before irradiation, within the first T1 seconds based on the start time t1 of laser beam irradiation, T1>30s;

[0022] During irradiation, i.e., the irradiation heating stage, from the start time t1 of laser beam irradiation to the end time t2 of laser beam irradiation, according to the provisions of the national standard, 5s≤t2-t1≤300s;

[0023] After irradiation, i.e., the heating and cooling stage, within T2 seconds after the end time t2 of laser beam irradiation, according to the provisions of the national standard, T2>200s;

[0024] The temperature of the test sample irradiated by laser beams of different powers in the above three stages is detected in real time by using a temperature sensor, and multiple groups of temperature time series of the test sample under different irradiation powers are obtained.

[0025] Preferably, in S3, a temperature variation formula of the test sample under different irradiation powers is determined according to multiple groups of temperature time series, including:

[0026] The temperature change formula of the test sample under different irradiation powers is as follows:

[0027]

[0028] Where ΔT(t) is the temperature of the test sample at time t, α is the weak absorption rate of the test sample to the laser beam, P is the irradiation power, γ is the heat loss coefficient, m is the mass of the test sample and the sample fixture, C eff is the effective heat capacity of the test sample;

[0029] According to the provisions of the national standard, the corresponding formulas in the temperature change formula during and after irradiation are simplified as follows:

[0030] ΔT(t)=A{1-exp[-γ(t-t1)]}, t1≤t≤t2, that is, during irradiation

[0031] ΔT(t)=ΔT(t2)+B{1-exp[-γ(t-t2)]}, t>t2, that is, after irradiation

[0032] Wherein, ΔT(t2) is the temperature of the test sample at the end time t2 of the laser beam irradiation, and A and B are experimental test parameters.

[0033] Preferably, in S4, according to the temperature change formula, a calculation formula for the weak absorption rate value of the test sample at different irradiation powers is obtained by data fitting, including:

[0034] The calculation formula of the weak absorption rate of the test sample under different irradiation powers is as follows:

[0035]

[0036] Among them, α(P) is the weak absorption rate of the test sample to the laser beam with irradiation power P, f cThe correction factor used to correct the systematic error can be calibrated using a sample with a known weak absorbance value.

[0037] Preferably, in S5, the weak absorption rate value of the test sample under different irradiation powers is calculated according to the weak absorption rate value calculation formula, and is processed in a graphical form to finally obtain the weak absorption rate value test result of the test sample, including:

[0038] S51. Calculate the weak absorption rate value of the test sample at different irradiation powers according to the weak absorption rate value calculation formula combined with laser calorimetry;

[0039] S52, using the irradiation power as the horizontal axis and the calculated weak absorption rate value as the vertical axis, and performing a graphical processing to obtain a irradiation power-weak absorption rate value relationship table;

[0040] S53, analyzing the irradiation power-weak absorption rate value relationship table, and finally obtaining the weak absorption rate value test result of the test sample;

[0041] S54. According to the weak absorption rate value test result of the test sample, the processing quality of the test sample, the direction of processing technology improvement, and the corresponding optimal laser parameters are quickly determined.

[0042] Preferably, in S53, the irradiation power-weak absorption rate value relationship table is analyzed to finally obtain the weak absorption rate value test result of the test sample, including:

[0043] For the test samples with unstable weak absorption rate values, adjust the total input power through the power adjustment module in the test device, adjust the irradiation time through the optical switch in the test device, repeat S2 to S5, and re-test;

[0044] Before the next test, the insulated sample chamber needs to be cooled, and the next test can be carried out after the temperature inside the insulated sample chamber is stable;

[0045] The overall test time is shortened to t' / n of the test using an insulated sample chamber with only a single subchamber, where t' is the overall test time of the insulated sample chamber with a single subchamber, and n is the number of subchambers of the insulated sample chamber with multiple subchambers.

[0046] A testing device for efficiently detecting the weak absorption rate value of an optical element, comprising an adiabatic sample chamber having a plurality of identical and relatively independent sub-chambers, a collimated high-power laser beam generating unit, a system control unit, and a laser beam introducing unit, a temperature detecting unit and a stray light influence eliminating unit adapted to each sub-chamber;

[0047] A collimated high-power laser beam generating unit generates a collimated high-power laser beam to the vicinity of the adiabatic sample chamber;

[0048] A laser beam introduction unit, which introduces a collimated high-power laser beam into the center of a test sample placed in the sub-chamber;

[0049] A temperature detection unit detects the temperature of the test sample introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit;

[0050] The stray light elimination unit collects stray light outside the main light path, and at the same time performs real-time detection of the temperature of the reference sample before, during and after irradiation, and sends the temperature detection signal to the system control unit;

[0051] The system control unit obtains the weak absorption rate value test results of the test samples according to the temperature detection signals of multiple groups of test samples and the temperature detection signals of reference samples, and simultaneously performs real-time power monitoring on the collimated high-power laser beam generating unit, and adjusts the input total power and irradiation time by controlling the collimated high-power laser beam generating unit.

[0052] Preferably, the collimated high-power laser beam generating unit comprises a laser, a beam shaping module, a power regulating module and an optical switch, wherein the beam shaping module adjusts the laser beam output by the laser into a collimated beam, the power regulating module is used to adjust the total input power, and the optical switch is used to adjust the irradiation time;

[0053] For the first sub-chamber in the adiabatic sample chamber, the structures of the laser beam introduction unit, temperature detection unit and stray light influence elimination unit adapted thereto are as follows:

[0054] The laser beam introduction unit includes a semi-transparent and semi-reflective mirror and a lens. The semi-transparent and semi-reflective mirror deflects and splits the collimated high-power laser beam generated by the collimated high-power laser beam generating unit. The reflected part of the laser beam is converged to the center of the test sample through the lens, and the transmitted part of the laser beam enters the laser beam introduction unit adapted to the next sub-chamber.

[0055] The temperature detection unit includes a test sample temperature sensor, which detects the temperature of the test sample introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit;

[0056] The stray light influence elimination unit includes a reference sample, a reference sample temperature sensor, a first reflector, a reflected light trap, a second reflector and a transmitted light trap. The reference sample temperature sensor detects the temperature of the reference sample before, during and after irradiation in real time, and sends a temperature detection signal to the system control unit to eliminate the influence of stray light; the first reflector and the reflected light trap are used to collect reflected light generated by the test sample, and the second reflector and the transmitted light trap are used to collect transmitted light generated by the test sample, so as to collect stray light outside the main light path;

[0057] The system control unit includes a host computer, a temperature acquisition module, a wedge mirror and a power detector. The temperature acquisition module acquires the temperature detection signal sent by each temperature sensor and sends the temperature detection signal to the host computer. The host computer obtains the weak absorption rate value test result of the test sample according to the temperature detection signal of multiple groups of test samples and the temperature detection signal of the reference sample. At the same time, the real-time power monitoring of the collimated high-power laser beam generating unit is performed through the wedge mirror and the power detector. The host computer adjusts the input total power by controlling the power adjustment module and adjusts the irradiation time by controlling the light opening;

[0058] Among them, for the remaining sub-chambers in the adiabatic sample chamber, except that the laser beam introduction unit adapted to the last sub-chamber uses a third reflector to introduce all of the transmitted part of the laser beam, the structures of the laser beam introduction unit, temperature detection unit and stray light influence elimination unit adapted to these sub-chambers are the same.

[0059] Preferably, the sub-chambers in the thermally insulated sample chamber have the same size, the test sample and the reference sample are placed at the same relative position, and the test sample temperature sensor and the reference sample temperature sensor are placed at the same relative position;

[0060] The irradiation power of the collimated high-power laser beam generated by the collimated high-power laser beam generating unit is not less than 20W;

[0061] The incident angle of the laser beam introduced by the laser beam introduction unit is 0 to 3°;

[0062] The distance between the test sample temperature sensor and the center of the test sample, and the distance between the reference sample temperature sensor and the center of the reference sample are both not less than 7 mm.

[0063] (III) Beneficial effects

[0064] Compared with the prior art, the test method and test device for efficiently detecting the weak absorption rate value of an optical element provided by the present invention have the following beneficial effects:

[0065] 1) It can quickly evaluate the stability of weak absorption rate values ​​of a batch of optical components to determine whether the coating process needs further optimization, thus reducing time costs;

[0066] 2) It can simultaneously measure the weak absorption rate values ​​of optical components under different irradiation powers, thereby obtaining the weak absorption rate values ​​under a variety of experimental parameters, and then quickly determine the coating quality of this batch of coated optical components (whether the weak absorption rate value is stable) and the corresponding optimal laser parameters;

[0067] 3) The insulated sample chamber composed of multiple sub-chambers can realize the simultaneous vacuuming and cooling of multiple chambers, effectively saving time and cost;

[0068] 4) The test device can be used to simultaneously detect weak absorption rate values ​​through multiple channels and quickly obtain weak absorption rate values ​​of different optical elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0070] Figure 1 It is a schematic diagram of the process of the present invention;

[0071] Figure 2 It is a structural schematic diagram of the present invention;

[0072] Figure 3 The following is a relationship table of irradiation power-weak absorption rate values ​​obtained by testing specific test samples using the technical solution of the present invention. DETAILED DESCRIPTION

[0073] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0074] Test methods for efficiently detecting weak absorption values ​​of optical components, such as Figure 1 As shown, S1, building an insulated sample chamber with multiple identical and relatively independent sub-chambers, introducing a collimated high-power laser beam into the center of the same test sample placed in each sub-chamber, specifically including:

[0075] S11, constructing an insulated sample chamber having a plurality of identical and relatively independent sub-chambers, evacuating and cooling the insulated sample chamber, and waiting for the internal temperature of each sub-chamber to stabilize;

[0076] S12, after the temperature inside each sub-chamber is stabilized, a collimated high-power laser beam is introduced into the center of the same test sample placed in each sub-chamber;

[0077] Among them, each sub-chamber is connected by a narrow channel at the bottom, and the heat exchange between the sub-chambers can be ignored, and it is considered that each sub-chamber is relatively independent.

[0078] S2. Use a temperature sensor to detect the temperature of the test sample irradiated by laser beams of different powers before, during and after irradiation in real time, and obtain multiple groups of temperature time series of the test sample at different irradiation powers, specifically including:

[0079] The process of testing samples being irradiated by laser beams is divided into three stages:

[0080] Before irradiation, within the first T1 seconds based on the start time t1 of laser beam irradiation, T1>30s;

[0081] During irradiation, i.e., the irradiation heating stage, from the start time t1 of laser beam irradiation to the end time t2 of laser beam irradiation, according to the provisions of the national standard, 5s≤t2-t1≤300s;

[0082] After irradiation, i.e., the heating and cooling stage, within T2 seconds after the end time t2 of laser beam irradiation, according to the provisions of the national standard, T2>200s;

[0083] The temperature of the test sample irradiated by laser beams of different powers in the above three stages is detected in real time by using a temperature sensor, and multiple groups of temperature time series of the test sample under different irradiation powers are obtained.

[0084] S3. According to multiple groups of temperature time series, determine the temperature change formula of the test sample under different irradiation powers, including:

[0085] The temperature change formula of the test sample under different irradiation powers is as follows:

[0086]

[0087] Where ΔT(t) is the temperature of the test sample at time t, α is the weak absorption rate of the test sample to the laser beam, P is the irradiation power, γ is the heat loss coefficient, m is the mass of the test sample and the sample fixture, C eff is the effective heat capacity of the test sample;

[0088] According to the provisions of the national standard, the corresponding formulas in the temperature change formula during and after irradiation are simplified as follows:

[0089] ΔT(t)=A{1-exp[-γ(t-t1)]}, t1≤t≤t2, that is, during irradiation

[0090] ΔT(t)=ΔT(t2)+B{1-exp[-γ(t-t2)]}, t>t2, that is, after irradiation

[0091] Wherein, ΔT(t2) is the temperature of the test sample at the end time t2 of the laser beam irradiation, and A and B are experimental test parameters.

[0092] S4. According to the temperature change formula, the calculation formula of the weak absorption rate value of the test sample under different irradiation powers is obtained by data fitting, which specifically includes:

[0093] The calculation formula of the weak absorption rate of the test sample under different irradiation powers is as follows:

[0094]

[0095] Among them, α(P) is the weak absorption rate of the test sample to the laser beam with irradiation power P, f c The correction factor used to correct the systematic error can be calibrated using a sample with a known weak absorbance value.

[0096] S5. According to the weak absorption rate calculation formula, calculate the weak absorption rate value of the test sample under different irradiation powers, and perform graphical processing to finally obtain the weak absorption rate value test results of the test sample, including:

[0097] S51. Calculate the weak absorption rate value of the test sample at different irradiation powers according to the weak absorption rate value calculation formula combined with laser calorimetry;

[0098] S52, using the irradiation power as the horizontal axis and the calculated weak absorption rate value as the vertical axis, and performing a graphical processing to obtain a irradiation power-weak absorption rate value relationship table;

[0099] S53, analyzing the irradiation power-weak absorption rate value relationship table, and finally obtaining the weak absorption rate value test result of the test sample;

[0100] S54. According to the weak absorption rate value test result of the test sample, the processing quality of the test sample, the direction of processing technology improvement, and the corresponding optimal laser parameters are quickly determined.

[0101] Specifically, in S53, the irradiation power-weak absorption rate value relationship table is analyzed, and finally the weak absorption rate value test result of the test sample is obtained, including:

[0102] For the test sample with unstable weak absorption rate value, the total input power is adjusted by the power adjustment module 3 in the test device, and the irradiation time is adjusted by the optical switch 5 in the test device, and S2 to S5 are repeated to re-test;

[0103] Before the next test, the insulated sample chamber needs to be cooled, and the next test can be carried out after the temperature inside the insulated sample chamber is stable;

[0104] The overall test time is shortened to t' / n of the test using an insulated sample chamber with only a single subchamber, where t' is the overall test time of the insulated sample chamber with a single subchamber, and n is the number of subchambers of the insulated sample chamber with multiple subchambers.

[0105] On the basis of the above-mentioned test method for efficiently detecting the weak absorption rate value of an optical element, the technical solution of the present application also discloses a test device for efficiently detecting the weak absorption rate value of an optical element, such as Figure 2 As shown ( Figure 2 The solid line in the middle represents the optical path, and the dotted line represents the signal line), including an insulated sample chamber 37 having a plurality of identical and relatively independent sub-chambers, a collimated high-power laser beam generating unit, a system control unit, and a laser beam introducing unit, a temperature detecting unit, and a stray light influence eliminating unit adapted to each sub-chamber;

[0106] A collimated high-power laser beam generating unit generates a collimated high-power laser beam to the vicinity of the adiabatic sample chamber 37;

[0107] A laser beam introduction unit, which introduces a collimated high-power laser beam into the center of a test sample placed in the sub-chamber;

[0108] A temperature detection unit detects the temperature of the test sample introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit;

[0109] The stray light elimination unit collects stray light outside the main light path, and at the same time performs real-time detection of the temperature of the reference sample before, during and after irradiation, and sends the temperature detection signal to the system control unit;

[0110] The system control unit obtains the weak absorption rate value test results of the test samples according to the temperature detection signals of multiple groups of test samples and the temperature detection signals of reference samples, and simultaneously performs real-time power monitoring on the collimated high-power laser beam generating unit, and adjusts the input total power and irradiation time by controlling the collimated high-power laser beam generating unit.

[0111] like Figure 2As shown, the collimated high-power laser beam generating unit includes a laser 1, a beam shaping module 2, a power regulating module 3 and an optical switch 5. The beam shaping module 2 adjusts the laser beam output by the laser 1 into a collimated beam, the power regulating module 3 is used to adjust the input total power, and the optical switch 5 is used to adjust the irradiation time;

[0112] For the first sub-chamber in the adiabatic sample chamber 37, the structures of the laser beam introduction unit, the temperature detection unit and the stray light influence elimination unit adapted thereto are as follows:

[0113] The laser beam introduction unit includes a semi-transparent and semi-reflective mirror 7 (a semi-transparent and semi-reflective mirror 17 for the second sub-chamber and a third reflective mirror 27 for the last sub-chamber) and a lens 8 (a lens 18 for the second sub-chamber and a lens 28 for the last sub-chamber). The semi-transparent and semi-reflective mirror 7 deflects and splits the collimated high-power laser beam generated by the collimated high-power laser beam generating unit. The reflected part of the laser beam is converged to the center of the test sample 11 through the lens 8, and the transmitted part of the laser beam enters the laser beam introduction unit adapted to the next sub-chamber.

[0114] The temperature detection unit includes a test sample temperature sensor 13 (a test sample temperature sensor 23 for the second sub-chamber and a test sample temperature sensor 33 for the last sub-chamber), the test sample temperature sensor 13 detects the temperature of the test sample 11 introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit;

[0115] The stray light influence elimination unit includes a reference sample 12 (reference sample 22 for the second sub-chamber and reference sample 32 for the last sub-chamber), a reference sample temperature sensor 14 (reference sample temperature sensor 24 for the second sub-chamber and reference sample temperature sensor 34 for the last sub-chamber), a first reflector 9 (first reflector 19 for the second sub-chamber and first reflector 29 for the last sub-chamber), a reflected light trap 10 (reflected light trap 20 for the second sub-chamber and reflected light trap 30 for the last sub-chamber), a second reflector 16 (reflected light trap 20 for the second sub-chamber and reflected light trap 30 for the last sub-chamber), and a second reflector 17 (reflected light trap 20 for the second sub-chamber and reflected light trap 30 for the last sub-chamber). The second reflector 26 (for the last sub-chamber, the second reflector 36) and the transmitted light trap 15 (for the second sub-chamber, the transmitted light trap 25, for the last sub-chamber, the transmitted light trap 35), the reference sample temperature sensor 14 detects the temperature of the reference sample 12 before, during and after irradiation in real time, and sends the temperature detection signal to the system control unit to eliminate the influence of stray light; the first reflector 9 and the reflected light trap 10 are used to collect the reflected light generated by the test sample 11, and the second reflector 16 and the transmitted light trap 15 are used to collect the transmitted light generated by the test sample 11, so as to collect the stray light outside the main light path;

[0116] The system control unit includes a host computer 39, a temperature acquisition module 38, a wedge mirror 4 and a power detector 6. The temperature acquisition module 38 acquires the temperature detection signal sent by each temperature sensor, and sends the temperature detection signal to the host computer 39. The host computer 39 obtains the weak absorption rate value test result of the test sample according to the temperature detection signal of multiple groups of test samples and the temperature detection signal of the reference sample. At the same time, the wedge mirror 4 and the power detector 6 are used to perform real-time power monitoring on the collimated high-power laser beam generating unit. The host computer 39 adjusts the input total power by controlling the power adjustment module 3, and adjusts the irradiation time by controlling the light switch 5;

[0117] Among them, for the remaining sub-chambers in the adiabatic sample chamber 37, except that the laser beam introduction unit adapted to the last sub-chamber uses the third reflector 27 to introduce all the transmitted part of the laser beam, the structures of the laser beam introduction unit, temperature detection unit and stray light influence elimination unit adapted to these sub-chambers are the same.

[0118] In the technical solution of the present application, the sub-chambers in the adiabatic sample chamber 37 have the same size, the test sample and the reference sample are placed at the same relative position, and the test sample temperature sensor and the reference sample temperature sensor are placed at the same relative position;

[0119] The irradiation power of the collimated high-power laser beam generated by the collimated high-power laser beam generating unit shall not be less than 20W;

[0120] The incident angle of the laser beam introduced by the laser beam introduction unit is 0 to 3°;

[0121] The distance between the test sample temperature sensor and the center of the test sample, and the distance between the reference sample temperature sensor and the center of the reference sample shall not be less than 7 mm.

[0122] In actual implementation, test samples produced by different coating processes can be placed in each sub-chamber in the thermal insulation sample chamber 37 to quickly obtain the weak absorption rate test results of the test samples to improve the coating process. In addition, the test device can also be used to conduct a more detailed study on the relationship between the experimental parameters such as laboratory ambient temperature, temperature sensor position, and test sample size and the accuracy of the weak absorption rate test results.

[0123] The coating test sample with a size of φ25mm and a thickness of 3mm was tested using the technical solution of this application, and the following results were obtained: Figure 3 The irradiation power-weak absorption rate relationship table is shown in the figure. Figure 3 It can be seen that the weak absorption rate value of the coating test sample fluctuates less with the change of irradiation power and is relatively stable, which indicates that the coating quality of the coating test sample is good.

[0124] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A test method for efficiently detecting the weak absorption rate value of an optical element, characterized in that: The following steps are involved: S1. Build an insulated sample chamber with multiple identical and relatively independent sub-chambers, and introduce a collimated high-power laser beam into the center of the same test sample placed in each sub-chamber; S2. Using a temperature sensor to detect the temperature of the test sample irradiated by laser beams of different powers before, during and after irradiation in real time, and obtain multiple groups of temperature time series of the test sample at different irradiation powers; S3. Determine the temperature variation formula of the test sample under different irradiation powers according to multiple groups of temperature time series; S4. According to the temperature change formula, the calculation formula of the weak absorption rate value of the test sample under different irradiation powers is obtained by data fitting; S5. According to the weak absorption rate calculation formula, the weak absorption rate values ​​of the test samples under different irradiation powers are calculated and processed in a graphical form to finally obtain the weak absorption rate test results of the test samples.

2. The test method for efficiently detecting weak absorption rate values ​​of optical components according to claim 1, characterized in that: In S1, an insulated sample chamber with multiple identical and relatively independent sub-chambers is built, and a collimated high-power laser beam is introduced into the center of the same test sample placed in each sub-chamber, including: S11, constructing an insulated sample chamber having a plurality of identical and relatively independent sub-chambers, evacuating and cooling the insulated sample chamber, and waiting for the internal temperature of each sub-chamber to stabilize; S12, after the temperature inside each sub-chamber is stabilized, a collimated high-power laser beam is introduced into the center of the same test sample placed in each sub-chamber; Among them, each sub-chamber is connected by a narrow channel at the bottom, and the heat exchange between the sub-chambers can be ignored, and it is considered that each sub-chamber is relatively independent.

3. The test method for efficiently detecting weak absorption rate values ​​of optical elements according to claim 2, characterized in that: In S2, a temperature sensor is used to detect the temperature of the test sample irradiated by laser beams of different powers before, during and after irradiation in real time, and multiple groups of temperature time series of the test sample at different irradiation powers are obtained, including: The process of testing samples being irradiated by laser beams is divided into three stages: Before irradiation, within the first T1 seconds based on the start time t1 of laser beam irradiation, T1>30s; During irradiation, i.e., the irradiation heating stage, from the start time t1 of laser beam irradiation to the end time t2 of laser beam irradiation, according to the provisions of the national standard, 5s≤t2-t1≤300s; After irradiation, i.e., the heating and cooling stage, within T2 seconds after the end time t2 of laser beam irradiation, according to the provisions of the national standard, T2>200s; The temperature of the test sample irradiated by laser beams of different powers in the above three stages is detected in real time by using a temperature sensor, and multiple groups of temperature time series of the test sample under different irradiation powers are obtained.

4. The test method for efficiently detecting weak absorption rate values ​​of optical components according to claim 3, characterized in that: In S3, the temperature change formula of the test sample under different irradiation powers is determined according to multiple groups of temperature time series, including: The temperature change formula of the test sample under different irradiation powers is as follows: Where ΔT(t) is the temperature of the test sample at time t, α is the weak absorption rate of the test sample to the laser beam, P is the irradiation power, γ is the heat loss coefficient, m is the mass of the test sample and the sample fixture, C eff is the effective heat capacity of the test sample; According to the provisions of the national standard, the corresponding formulas in the temperature change formula during and after irradiation are simplified as follows: ΔT(t)=A{1-exp[-γ(t-t1)]}, t1≤t≤t2, that is, during irradiation ΔT(t)=ΔT(t2)+B{1-exp[-γ(t-t2)]}, t>t2, that is, after irradiation Wherein, ΔT(t2) is the temperature of the test sample at the end time t2 of the laser beam irradiation, and A and B are experimental test parameters.

5. The test method for efficiently detecting weak absorption rate values ​​of optical components according to claim 4, characterized in that: In S4, according to the temperature change formula, the calculation formula of the weak absorption rate value of the test sample under different irradiation powers is obtained by data fitting, including: The calculation formula of the weak absorption rate of the test sample under different irradiation powers is as follows: Among them, α(P) is the weak absorption rate of the test sample to the laser beam with irradiation power P, f c The correction factor used to correct the systematic error can be calibrated using a sample with a known weak absorbance value.

6. The test method for efficiently detecting weak absorption rate values ​​of optical components according to claim 5, characterized in that: In S5, the weak absorption rate value of the test sample under different irradiation powers is calculated according to the weak absorption rate value calculation formula, and the weak absorption rate value test results of the test sample are finally obtained, including: S51. Calculate the weak absorption rate value of the test sample at different irradiation powers according to the weak absorption rate value calculation formula combined with laser calorimetry; S52, using the irradiation power as the horizontal axis and the calculated weak absorption rate value as the vertical axis, and performing a graphical processing to obtain a irradiation power-weak absorption rate value relationship table; S53, analyzing the irradiation power-weak absorption rate value relationship table, and finally obtaining the weak absorption rate value test result of the test sample; S54. According to the weak absorption rate value test result of the test sample, the processing quality of the test sample, the direction of processing technology improvement, and the corresponding optimal laser parameters are quickly determined.

7. The test method for efficiently detecting weak absorption rate values ​​of optical components according to claim 6, characterized in that: In S53, the irradiation power-weak absorption rate value relationship table is analyzed, and finally the weak absorption rate value test results of the test sample are obtained, including: For the test sample with unstable weak absorption rate value, the total input power is adjusted by the power adjustment module (3) in the test device, and the irradiation time is adjusted by the optical switch (5) in the test device, and S2 to S5 are repeated to re-test; Before the next test, the insulated sample chamber needs to be cooled, and the next test can be carried out after the temperature inside the insulated sample chamber is stable; The overall test time is shortened to t' / n of the test using an insulated sample chamber with only a single subchamber, where t' is the overall test time of the insulated sample chamber with a single subchamber, and n is the number of subchambers of the insulated sample chamber with multiple subchambers.

8. A testing device for efficiently detecting the weak absorption rate value of an optical element, used to perform the testing method for efficiently detecting the weak absorption rate value of an optical element as claimed in claim 1, characterized in that: It comprises an insulated sample chamber (37) having a plurality of identical and relatively independent sub-chambers, a collimated high-power laser beam generating unit, a system control unit, and a laser beam introducing unit, a temperature detecting unit and a stray light influence eliminating unit adapted to each sub-chamber; A collimated high-power laser beam generating unit generates a collimated high-power laser beam to the vicinity of the adiabatic sample chamber (37); A laser beam introduction unit, which introduces a collimated high-power laser beam into the center of a test sample placed in the sub-chamber; A temperature detection unit detects the temperature of the test sample introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit; The stray light elimination unit collects stray light outside the main light path, and at the same time performs real-time detection of the temperature of the reference sample before, during and after irradiation, and sends the temperature detection signal to the system control unit; The system control unit obtains the weak absorption rate value test results of the test samples according to the temperature detection signals of multiple groups of test samples and the temperature detection signals of reference samples, and simultaneously performs real-time power monitoring on the collimated high-power laser beam generating unit, and adjusts the input total power and irradiation time by controlling the collimated high-power laser beam generating unit.

9. The testing device for efficiently detecting weak absorption rate values ​​of optical elements according to claim 8, characterized in that: The collimated high-power laser beam generating unit comprises a laser (1), a beam shaping module (2), a power regulating module (3) and an optical switch (5), wherein the beam shaping module (2) adjusts the laser beam output by the laser (1) into a collimated beam, the power regulating module (3) is used to regulate the total input power, and the optical switch (5) is used to regulate the irradiation time; For the first sub-chamber in the adiabatic sample chamber (37), the structures of the laser beam introduction unit, the temperature detection unit and the stray light influence elimination unit adapted thereto are as follows: The laser beam introduction unit comprises a semi-transparent and semi-reflective mirror (7) and a lens (8); the semi-transparent and semi-reflective mirror (7) deflects and splits the collimated high-power laser beam generated by the collimated high-power laser beam generating unit; the reflected laser beam is converged to the center of the test sample (11) through the lens (8); and the transmitted laser beam enters the laser beam introduction unit adapted to the next sub-chamber; The temperature detection unit comprises a test sample temperature sensor (13), which detects the temperature of the test sample (11) introduced into the laser beam irradiation before, during and after the irradiation in real time, and sends a temperature detection signal to the system control unit; The stray light influence elimination unit comprises a reference sample (12), a reference sample temperature sensor (14), a first reflector (9), a reflected light trap (10), a second reflector (16) and a transmitted light trap (15); the reference sample temperature sensor (14) detects the temperature of the reference sample (12) before, during and after irradiation in real time, and sends a temperature detection signal to a system control unit to eliminate the influence of stray light; the first reflector (9) and the reflected light trap (10) are used to collect reflected light generated by the test sample (11); the second reflector (16) and the transmitted light trap (15) are used to collect transmitted light generated by the test sample (11) to collect stray light outside the main light path; The system control unit comprises a host computer (39), a temperature acquisition module (38), a wedge mirror (4) and a power detector (6); the temperature acquisition module (38) acquires temperature detection signals sent by each temperature sensor and sends the temperature detection signals to the host computer (39); the host computer (39) obtains weak absorption rate value test results of the test samples according to the temperature detection signals of multiple groups of test samples and the temperature detection signals of reference samples, and simultaneously performs real-time power monitoring on the collimated high-power laser beam generating unit through the wedge mirror (4) and the power detector (6); the host computer (39) adjusts the total input power by controlling the power adjustment module (3) and adjusts the irradiation time by controlling the light switch (5); Among them, for the remaining sub-chambers in the adiabatic sample chamber (37), except that the laser beam introduction unit adapted to the last sub-chamber uses a third reflector (27) to introduce all of the transmitted laser beam, the structures of the laser beam introduction units, temperature detection units and stray light influence elimination units adapted to these sub-chambers are the same.

10. The testing device for efficiently detecting weak absorption rate values ​​of optical elements according to claim 9, characterized in that: The sub-chambers in the thermally insulated sample chamber (37) have the same size, the test sample and the reference sample are placed at the same relative position, and the test sample temperature sensor and the reference sample temperature sensor are placed at the same relative position; The irradiation power of the collimated high-power laser beam generated by the collimated high-power laser beam generating unit is not less than 20W; The incident angle of the laser beam introduced by the laser beam introduction unit is 0 to 3°; The distance between the test sample temperature sensor and the center of the test sample, and the distance between the reference sample temperature sensor and the center of the reference sample are both not less than 7 mm.

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