Efficient source measurement unit adjusting and measuring device and method

Abstract

The invention belongs to the technical field of source measurement unit debugging, and particularly relates to an efficient source measurement unit debugging device and method. The device comprises a source measuring unit, a debugging and testing device, a testing instrument and an upper computer, the method comprises an automatic calibration method of the adjusting and measuring device and an automatic measurement method of the adjusting and measuring device. According to the invention, by developing the adjusting and testing device capable of automatically switching channels, equipment required by testing is connected with the channels of the source measuring unit, so that automatic construction of the channels of the testing equipment and the source measuring unit is realized, and then automatic calibration and automatic testing of indexes are completed; meanwhile, a test database is constructed, automatic gathering of key information such as models, batch numbers, serial numbers, test numbers, test functions, test standard values and actual test values is achieved, the product debugging and testing efficiency is greatly improved, and the testing personnel and time cost is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of source measurement unit debugging, and in particular relates to an efficient source measurement unit debugging device and method. Background Art

[0002] As a key component of semiconductor parameter testing, the source measurement unit mainly implements four types of functions: voltage measurement, current measurement, voltage output, and current output. The source measurement unit integrates four instruments: voltmeter, ammeter, voltage source, and current source. Its current output / measurement accuracy reaches the fA level, and its voltage output / measurement accuracy reaches the nV level. High-precision instruments are required for calibration and measurement. During the whole machine commissioning process, a single module needs to be tested hundreds or thousands of times. Currently, it mainly relies on manual calibration and testing by testers. There are problems such as long test time, incomplete test point coverage, and inability to effectively record test data, resulting in low commissioning efficiency of the source measurement unit. Summary of the invention

[0003] In view of the various deficiencies in the prior art, the inventors have researched and designed an efficient source measurement unit debugging device and method through long-term practice. Through the debugging device with automatic channel switching, the equipment required for the test is connected to the channel of the source measurement unit to realize automatic calibration and automatic measurement functions.

[0004] An efficient source measurement unit debugging device of the present invention comprises a source measurement unit, a debugging device, a test instrument and a host computer. The test channel of the source measurement unit is connected to the debugging device, and each test port of the test instrument is connected to the debugging device, so that the IV signal flow is transferred between the source measurement unit and the test instrument; the host computer is connected to the test instrument, the debugging device and the source measurement unit through a bus to realize instrument control and data acquisition.

[0005] Furthermore, the host computer is communicatively connected with the test instrument, the debugging device, and the source measurement unit via LAN, PCIe, USB, and GPIB.

[0006] Furthermore, the test instrument includes a multimeter, a calibration source, an oscilloscope and an electronic load.

[0007] Furthermore, the debugging device at least includes 4 signal ports of the source measurement unit, 8 signal ports of the test instrument, 1 power supply interface, and 1 communication interface.

[0008] Furthermore, the debugging device also includes a signal switching matrix to achieve arbitrary conduction from the signal port of the source measurement unit to the signal port of the test instrument.

[0009] The present invention discloses an efficient automatic calibration method for a source measurement unit debugging device, and the specific method is as follows: first, a test instrument and a source measurement unit are connected, the test instrument and the source measurement unit are initialized, and the basic information of the source measurement unit is read, and then one of the channels of the source measurement unit is set to a voltage measurement mode, and the calibration source output voltage value is set. The calibration software reads the calibration source output value and the source measurement unit measurement value, calculates the calibration algorithm in the debugging platform software, and finally saves the measurement mode and gear calculation results of the channel into the FPGA of the source measurement unit. Repeat the above two steps to test and save the results of each other channel of the source measurement unit, each measurement mode of each channel, and each gear of each measurement mode.

[0010] Furthermore, one of the channels of the source measurement unit is set to a voltage measurement mode, switched to a 600mV position, and the calibration source output voltage value is set.

[0011] The present invention discloses an efficient automatic measurement method for a source measurement unit debugging device, and the specific method is as follows: first, connect a test instrument and a source measurement unit, initialize the test instrument and the source measurement unit, read the basic information of the source measurement unit, set one of the channels of the source measurement unit to a voltage measurement mode, switch to a 600mV gear, and set the calibration source output voltage value. The debugging software reads the calibration source output value and the source measurement unit measurement value, compares whether |calibration source output value - source measurement unit measurement value| is within the range of ±0.44mV, and then saves the test information to a test database for search and data analysis. Repeat the above measurement steps, and test and save the results for each other channel of the source measurement unit, each measurement mode of each channel, and each gear of each measurement mode.

[0012] Furthermore, the test information includes model number, batch number, serial number, test number, test function, test standard value, actual test value, and test conclusion.

[0013] Furthermore, the source measurement unit has 4 channels, 4 measurement modes, 13 measurement gears, and 3 measurement values, which are tested and recorded respectively.

[0014] The beneficial effects of the present invention are:

[0015] By developing a debugging and testing device with automatic channel switching, the equipment required for the test is connected to the channel of the source measurement unit, the automatic construction of the test equipment and the source measurement unit channel is realized, and then the automatic calibration and automatic testing of the indicators are completed; at the same time, a test database is built to realize the automatic aggregation of key information such as model, batch number, serial number, test number, test function, test standard value, actual test value, etc., which greatly improves the debugging efficiency of the product and reduces the cost of test personnel and time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a principle block diagram of the debugging device of the present invention.

[0017] Figure 2 It is a flow chart of automatic calibration of source measurement unit of the present invention.

[0018] Figure 3 It is a flow chart of automatic measurement of the source measurement unit of the present invention. DETAILED DESCRIPTION

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. These implementation examples are described in sufficient detail so that those skilled in the art can understand and practice the present invention. Without departing from the spirit and scope of the present invention, logical, achievable and other changes may be made to the implementation. Therefore, the following detailed description should not be construed as limiting, and the scope of the present invention is limited only by the claims.

[0020] See also Figure 1 The present invention proposes an efficient source measurement unit debugging device, including a source measurement unit, a debugging device, a test instrument and a host computer (i.e., a debugging control platform / database in the figure).

[0021] The test channel of the source measurement unit is connected to the test device, and the test ports of the test instrument are connected to the test device to realize the IV signal flow between the source measurement unit and the test instrument. At the same time, the host computer communicates with the test instrument, the test device, and the source measurement unit through LAN, PCIe, USB, GPIB and other buses to realize instrument control and data acquisition. The test instruments include four types of instruments: multimeter, calibration source, oscilloscope and electronic load.

[0022] The commissioning and testing device should include at least 4 signal ports of the source measurement unit, 8 signal ports of the test instrument, 1 power supply interface, and 1 communication interface. The signal ports of the test instrument should cover at least four types of instruments, including multimeter, calibration source, oscilloscope, and electronic load.

[0023] The signal port adopts BNC interface, and uses shielded cable to interconnect the instrument signal port to ensure the quality of small signal and shield the interference of external noise on IV signal. The debugging device also includes a signal switching matrix to realize arbitrary conduction from the signal port of the source measurement unit to the signal port of the test instrument, that is, a 4*8 full matrix, so as to realize arbitrary switching of signal channels.

[0024] See also Figure 2 The present invention also provides an efficient automatic calibration method for a source measurement unit debugging device. First, according to Figure 1As shown, the test instrument and source measurement unit are connected, the test instrument and source measurement unit are initialized, and the basic information of the source measurement unit is read. Then, channel 1 is set to voltage measurement mode, switched to 600mV gear, and the calibration source output voltage value V1 is set. The calibration software reads the calibration source output value V1 and the source measurement unit measurement value V2. Then, the calibration algorithm is calculated in the debugging platform software. Finally, the measurement mode and gear calculation results of channel 1 are saved in the FPGA of the source measurement unit. The above calibration operation is repeated to test each gear of each channel and each measurement mode and save the results.

[0025] See also Figure 3 The present invention also provides an efficient automatic measurement method for a source measurement unit debugging device, first according to Figure 1 As shown, connect the test instrument and source measurement unit, initialize the test instrument and source measurement unit, read the basic information of the source measurement unit, then set channel 1 to voltage measurement mode, switch to 600mV gear, set the calibration source output voltage value V1, and the commissioning software reads the calibration source output value V2 and the source measurement unit measurement value V3, and compares whether |V2-V3| is within the range of ±0.44mV. Then save the key information of this test such as model, batch number, serial number, test number, test function, test standard value, actual test value, test conclusion, etc. into the test database for easy search and data analysis. Repeat the above measurement steps to test and record 4 channels, 4 measurement modes, 13 measurement gears, and 3 measurement values.

[0026] The present invention realizes "one-button" automatic calibration and automatic measurement of multiple test channels, four working modes, and 13 measurement gears of the source measurement unit, greatly improving the debugging efficiency of the product and reducing the test personnel and time costs.

[0027] The invention breaks the traditional manual calibration and testing method. After adopting the invention, after connecting the test equipment cable, only one tester is needed to realize "one-click" automatic calibration in the debugging software, and then perform "one-click" automatic testing. Finally, the test results can be viewed in the database, which improves the production efficiency of the source measurement unit and saves debugging time and cost for the production of the source measurement unit.

[0028] It is not possible to describe all possible combinations of components or methods for the purpose of describing the above-described embodiments, but it should be recognized by those skilled in the art that the various embodiments may be further combined and arranged. Therefore, the embodiments described herein are intended to cover all such changes, modifications and variations that fall within the scope of protection of the appended claims. In addition, with respect to the term "comprising" used in the specification or claims, the word is encompassed in a manner similar to the term "including," as explained by "including," used as a transitional word in the claims. In addition, any term "or" used in the specification of the claims is intended to mean "non-exclusive or."

Claims

1. An efficient source measurement unit debugging device, characterized in that: It includes source measurement unit, debugging device, test instrument and host computer; The test channel of the source measurement unit is connected to the debugging device, and each test port of the test instrument is connected to the debugging device, so that the IV signal flow is transferred between the source measurement unit and the test instrument; the host computer communicates with the test instrument, the debugging device, and the source measurement unit through a bus to realize instrument control and data acquisition.

2. The device according to claim 1, characterized in that The host computer is connected to the test instrument, the debugging device and the source measurement unit through LAN, PCIe, USB and GPIB.

3. The device according to claim 1, characterized in that The test instrument includes a multimeter, a calibration source, an oscilloscope and an electronic load.

4. The device according to claim 1, characterized in that The debugging device at least includes 4 signal ports of a source measurement unit, 8 signal ports of a test instrument, 1 power supply interface, and 1 communication interface.

5. The device according to claim 1, characterized in that The debugging device also includes a signal switching matrix to achieve arbitrary conduction from the signal port of the source measurement unit to the signal port of the test instrument.

6. An efficient automatic calibration method for a source measurement unit debugging device, characterized in that: The method is: First, connect the test instrument and the source measurement unit, initialize the test instrument and the source measurement unit, and read the basic information of the source measurement unit. Then, set one channel of the source measurement unit to voltage measurement mode and set the calibration source output voltage value. The calibration software reads the calibration source output value and the source measurement unit measurement value, calculates the calibration algorithm in the commissioning platform software, and finally saves the measurement mode and gear calculation results of the channel into the FPGA of the source measurement unit; Repeat the above two steps to test and save the results for each other channel of the source measurement unit, each measurement mode of each channel, and each gear of each measurement mode.

7. The method according to claim 6, characterized in that Set one of the channels of the source measurement unit to voltage measurement mode, switch to the 600mV position, and set the calibration source output voltage value.

8. An efficient automatic measurement method for a source measurement unit debugging device, characterized in that: The method is: First, connect the test instrument and source measurement unit, initialize the test instrument and source measurement unit, read the basic information of the source measurement unit, set one channel of the source measurement unit to voltage measurement mode, switch to 600mV, and set the calibration source output voltage value; The commissioning software reads the calibration source output value and the source measurement unit measurement value, compares |calibration source output value - source measurement unit measurement value| to see if it is within the range of ±0.44mV, and then saves the test information into the test database for easy search and data analysis; Repeat the above measurement steps to test and save the results for each other channel of the source measurement unit, each measurement mode of each channel, and each gear of each measurement mode.

9. The method according to claim 8, characterized in that The test information includes model number, batch number, serial number, test number, test function, test standard value, actual test value, and test conclusion.

10. The method according to claim 8, characterized in that The source measurement unit has 4 channels, 4 measurement modes, 13 measurement gears, and 3 measurement values, which are tested and recorded respectively.

Images