Moving mirror motion control method and system

Abstract

An embodiment of the present invention discloses a moving mirror motion control method and system. The moving mirror motion control method includes: calibrating the actual assembly positions of a plurality of execution modules and a plurality of measurement modules through an adjustment module, and obtaining corresponding calibration relationships; wherein, the adjustment module is arranged at the actual assembly position of the execution module; establishing a motion model between the execution module and the measurement module according to the calibration relationship, and calculating the unit displacement amount when each execution module moves one step length based on the motion model; obtaining the target displacement amount of the execution module, and determining the step length of each execution module according to the unit displacement amount and the target displacement amount. The technical solution provided by the embodiment of the present invention can make the motion control of the moving mirror more accurate, and make the error of the moving mirror reaching the ideal attitude smaller. In addition, it can also save the iteration times of moving mirror adjustment, which is beneficial to improving the adjustment efficiency.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of lithography technology, and in particular, to a method and system for controlling the movement of a movable mirror. Background Art

[0002] As a core component of a lithography apparatus, the objective lens system plays a crucial role in whether the exposure imaging meets the requirements in the lithography process.

[0003] The objective lens system usually includes a part of the movable mirror and a movable mirror motion control system. The movable mirror is adjusted by the movable mirror motion control system to compensate for imaging errors. However, in the actual assembly process of the objective lens system, due to the assembly errors and manufacturing errors between system components, there is an error between the assembly points of the objective lens system and the positions of the ideal model, which further leads to a deviation in the actual adjustment result and cannot make the movable mirror reach the ideal posture. Summary of the Invention

[0004] Embodiments of the present invention provide a method and system for controlling the movement of a movable mirror to improve the accuracy of controlling the movement of the movable mirror.

[0005] According to one aspect of the present invention, there is provided a method for controlling the movement of a movable mirror, which is executed by a movable mirror motion control system. The movable mirror motion control system includes a plurality of execution modules and a plurality of measurement modules;

[0006] The method for controlling the movement of the movable mirror includes:

[0007] Calibrating the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through an adjustment module, and obtaining corresponding calibration relationships; wherein, the adjustment module is arranged at the actual assembly position of the execution module;

[0008] According to the calibration relationships, establishing a motion model between the execution module and the measurement module, and calculating the unit displacement amount when each execution module moves one step length based on the motion model;

[0009] Obtaining the target displacement amount of the execution module, and determining the step length of each execution module according to the unit displacement amount and the target displacement amount.

[0010] Optionally, the calibration relationships include the ratios of the perpendicular distances from each execution module to the corresponding same rotation axis of the plurality of measurement modules.

[0011] Optionally, the calibrating the actual assembly positions of the plurality of execution modules and the plurality of measurement modules through an adjustment module, and obtaining corresponding calibration relationships includes:

[0012] Obtain the adjustment value of the adjustment module and the measurement value of the measurement module corresponding to the adjustment value of the adjustment module;

[0013] According to the adjustment value of the adjustment module and the measurement value of the measurement module, calculate the ratio of the vertical distance from each execution module to the corresponding same rotation axis of the multiple measurement modules.

[0014] Optionally, the ratio of the vertical distance from the execution module to any one of the measurement modules to the corresponding same rotation axis is equal to the ratio of the adjustment value of the adjustment module corresponding to the execution module to the measurement value of the measurement module.

[0015] Optionally, according to the calibration relationship, establish a motion model between the execution module and the measurement module, and calculate the unit displacement amount when each execution module moves one step length based on the motion model, including:

[0016] Determine the total measurement values of the measurement modules corresponding to each execution module under a preset step length;

[0017] Based on the calibration relationship, combined with the total measurement values of the measurement modules, establish a motion model between the execution module and the measurement module, and determine the preset displacement amounts of the execution modules according to the motion model;

[0018] Determine the unit displacement amount according to the preset displacement amount of the execution module and the preset step length.

[0019] Optionally, the number of both the execution module and the measurement module is three;

[0020] The motion model includes: ; where N is equal to 1, 2, and 3 respectively, e1 is the displacement amount of the first execution module, e2 is the displacement amount of the second execution module, and e3 is the displacement amount of the third execution module, is the vertical distance from the Nth measurement module to the rotation axis corresponding to the first execution module, is the vertical distance from the Nth measurement module to the rotation axis corresponding to the second execution module, is the vertical distance from the Nth measurement module to the rotation axis corresponding to the third execution module, is the vertical distance from the first execution module to its own corresponding rotation axis, is the vertical distance from the second execution module to its own corresponding rotation axis, is the vertical distance from the third execution module to its own corresponding rotation axis, is the total measurement value of the Nth measurement module;

[0021] Wherein, the rotation axis corresponding to any one of the execution modules is the connection line of the assembly positions of the other two execution modules.

[0022] Optionally, when determining the step size of each execution module according to the unit displacement amount and the target displacement amount, it further includes:

[0023] Based on the motion model, determine the target measurement values of the respective measurement modules corresponding to each execution module when adjusting the target displacement amount.

[0024] Optionally, the moving mirror motion control method further includes:

[0025] After each execution module is adjusted according to the determined step size, obtain the actual measurement values of the respective measurement modules, and calculate the measurement errors of the respective measurement modules according to the actual measurement values and the target measurement values of the measurement modules;

[0026] When the measurement error is greater than the preset error, calculate the adjustment values of the respective execution modules that satisfy the measurement error based on the motion model.

[0027] According to another aspect of the present invention, there is provided a moving mirror motion control system for implementing the moving mirror motion control method provided in any embodiment of the present invention. The moving mirror motion control system includes a plurality of execution modules and a plurality of measurement modules. The plurality of execution modules and the plurality of measurement modules are assembled on the same circular plane. One execution module is disposed opposite to one measurement module. The execution module is used to drive the moving mirror to move in the vertical direction, and the measurement module is used to measure the displacement amount of the execution module.

[0028] Optionally, the number of both the execution modules and the measurement modules is three, and the execution modules and the measurement modules divide the circular plane into six equal parts;

[0029] The execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

[0030] The moving mirror motion control method provided by the embodiment of the present invention calibrates the actual assembly positions of multiple execution modules and multiple measurement modules through an adjustment module to obtain corresponding calibration relationships, and based on the calibration relationships, establishes a motion model between the execution modules and the measurement modules. Based on the motion model, the unit displacement amount when each execution module moves one step is calculated, so that the step lengths of each execution module can be determined according to the unit displacement amount and the obtained target displacement amount. Compared with the solutions in the related art, the technical solution provided by the embodiment of the present invention estimates the displacement amount corresponding to each execution module moving one step based on the calibration relationship. Since the calibration relationship is obtained by calibrating the actual positions of the execution modules and the measurement modules, the accuracy of the estimated displacement amount corresponding to each execution module moving one step is relatively high, making the motion control of the moving mirror more precise and reducing the error when the moving mirror reaches the ideal posture. In addition, the number of iterations for adjusting the moving mirror can be saved, which is beneficial to improving the adjustment efficiency.

[0031] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0033] Figure 1 It is a schematic structural diagram of the assembly points of a moving mirror motion control system provided by the embodiment of the present invention;

[0034] Figure 2 It is a flowchart of a moving mirror motion control method provided by the embodiment of the present invention;

[0035] Figure 3 It is a schematic diagram of the curve relationship between the displacement amount corresponding to one step of a peristaltic motor and the pressure at the vertex of the hinge ball provided by the embodiment of the present invention;

[0036] Figure 4 It is a schematic diagram of the calibration of a moving mirror motion control system provided by the embodiment of the present invention;

[0037] Figure 5 It is a flowchart of another moving mirror motion control method provided by the embodiment of the present invention;

[0038] Figure 6 It is a schematic diagram of another calibration of a moving mirror motion control system provided by the embodiment of the present invention;

[0039] Figure 7 It is a flowchart of another moving mirror motion control method provided by an embodiment of the present invention;

[0040] Figure 8 It is a flowchart of another moving mirror motion control method provided by an embodiment of the present invention. Detailed implementation manners

[0041] In order to enable those skilled in the art of the present technology to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0042] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0043] Figure 1 It is a structural schematic diagram of the assembly points of a moving mirror motion control system provided by an embodiment of the present invention, as Figure 1As shown in the figure, the moving mirror motion control system includes multiple execution modules and multiple measurement modules. For example, it includes three execution modules and three measurement modules. The execution modules are used to drive the moving mirror to move in the vertical direction, and the measurement modules are used to measure the displacement of the execution modules. When the moving mirror motion control system is installed, in an ideal situation, it is desired that the three execution modules and the three measurement modules are on the same circular plane and divide the circle into six equal parts. At this time, the connections of the three execution modules and the connections of the three measurement modules are two equilateral triangles that are equally divided. Among them, M1’, M2’ and M3’ are the ideal assembly positions of the three execution modules respectively, and S1’, S2’ and S3’ are the ideal assembly positions of the three measurement modules respectively. However, due to the existence of assembly errors and manufacturing errors, the actual assembly positions of the execution modules and the measurement modules are different from the ideal assembly positions. M1, M2 and M3 are the actual assembly positions of the three execution modules respectively, and S1, S2 and S3 are the actual assembly positions of the three measurement modules respectively, thus affecting the adjustment accuracy of the moving mirror.

[0044] Figure 2 The figure is a flowchart of a moving mirror motion control method provided by an embodiment of the present invention. This moving mirror motion control method can be executed by a moving mirror motion control system. Refer to Figure 2 , the moving mirror motion control method provided in this embodiment includes:

[0045] S110. Calibrate the actual assembly positions of multiple execution modules and multiple measurement modules through an adjustment module, and obtain the corresponding calibration relationship; among them, the adjustment module is arranged at the actual assembly position of the execution module.

[0046] Specifically, the adjustment module is arranged at the actual assembly position of the execution module to replace the execution module. Through the adjustment module, the actual assembly positions of the execution module and the measurement module can be calibrated. Here, the calibration relationship can be the positional relationship between the execution module and the measurement module.

[0047] Among them, the adjustment module can be a micrometer. By adjusting the micrometer, the adjustment value can be directly obtained.

[0048] S120. According to the calibration relationship, establish a motion model between the execution module and the measurement module, and calculate the unit displacement amount when each execution module moves one step length based on the motion model.

[0049] Specifically, during the movement of a certain execution module among the multiple execution modules, it moves with the connection line of the other two execution modules opposite to it as the rotation axis. As Figure 1As shown, for example, when the first execution module (whose assembly point is M1) moves, its rotation axis is the line connecting M2 and M3; when the second execution module (whose assembly point is M2) moves, its rotation axis is the line connecting M1 and M3; when the third execution module (whose assembly point is M3) moves, its rotation axis is the line connecting M2 and M1.

[0050] When a certain execution module moves, the measurement values of the three measurement modules all change. According to the calibration relationship determined in step S110, the motion relationship between the execution module and the measurement module can be obtained, such as the relationship between displacement amounts. By modeling the motion relationship between the execution module and the measurement module, a corresponding motion model can be obtained.

[0051] Among them, during the movement of the execution module, it is impossible to know the specific displacement amount of each step of the execution module. Therefore, when adjusting the movable mirror subsequently, it is impossible to know how many steps should be adjusted to make the movable mirror reach the target attitude. In this embodiment, since the motion model can represent the motion relationship between the execution module and the measurement module, the displacement amounts of each execution module can be obtained through the established motion model above, and thus the unit displacement amount corresponding to one step of movement can be obtained.

[0052] S130. Obtain the target displacement amounts of the execution modules, and determine the steps of each execution module according to the unit displacement amount and the target displacement amounts.

[0053] Specifically, when actually controlling the movement process of the movable mirror, according to the obtained target displacement amounts of each execution module, by calculating the ratio of the target displacement amount to the unit displacement amount, the steps of each execution module can be determined.

[0054] The movable mirror motion control method provided by the embodiment of the present invention calibrates the actual assembly positions of multiple execution modules and multiple measurement modules through an adjustment module to obtain corresponding calibration relationships, and based on the calibration relationships, establishes a motion model between the execution module and the measurement module. Based on the motion model, the unit displacement amount of each execution module when moving one step is calculated, so that the steps of each execution module can be determined according to the unit displacement amount and the obtained target displacement amounts. Compared with the solutions in the related art, the technical solution provided by the embodiment of the present invention estimates the displacement amount corresponding to each execution module moving one step based on the calibration relationship. Since the calibration relationship is obtained by calibrating the actual positions of the execution module and the measurement module, the estimated displacement amount corresponding to each execution module moving one step has a higher accuracy, making the motion control of the movable mirror more accurate and the error of the movable mirror reaching the ideal attitude smaller. In addition, it can also save the iteration times of the movable mirror adjustment, which is beneficial to improving the adjustment efficiency.

[0055] Optionally, in this embodiment, the execution module may be a peristaltic motor, and the measurement module may be a displacement sensor. The number of both the execution module and the measurement module is three. The hinge ball vertices of the three peristaltic motors and the three displacement sensors are located on the same circular plane, and this circular plane is equally divided into six parts. Among them, according to the attributes of the peristaltic motor, the input parameter of the peristaltic motor is the step size it adjusts. Figure 3 It is a schematic diagram of the curve relationship between the displacement corresponding to one step of a peristaltic motor provided by an embodiment of the present invention and the pressure at the hinge ball vertex. Refer to Figure 3 , the displacement corresponding to one step of the peristaltic motor (specifically, the displacement of the hinge ball) is related to the pressure value at its hinge ball vertex, and the displacement corresponding to one step is not a fixed value, but is related to the pressure value received by the hinge ball vertex. Among them, the hinge ball is a mechanical connection component used to contact the mirror surface. If the step of the peristaltic motor is converted into the movement of the hinge ball through a transmission mechanism. Therefore, in this embodiment, by accurately predicting the displacement of the hinge ball corresponding to one step through a motion model, the adjustment result can be made closer to the ideal adjustment value, and it is beneficial to reduce the number of adjustments and the workload.

[0056] Optionally, the calibration relationship includes the ratio of the perpendicular distance from each execution module to the corresponding same rotation axis to multiple measurement modules respectively.

[0057] Specifically, according to the control process of the moving mirror motion control system and its own attributes, the attribute of the moving mirror motion control system is a rigid system, which has a high anti-deformation ability to external interference and fast response characteristics. When the peristaltic motor rotates around the rotation axis, the angle between the perpendicular line from any point on the current mirror surface to this rotation axis and the original mirror surface (the mirror surface before the peristaltic motor rotates) is equal. In addition, when a certain peristaltic motor (hereinafter, the peristaltic motor is used to represent the execution module, and the displacement sensor is used to represent the measurement module) rotates around the rotation axis, the rotation axis is the connection line of the hinge ball vertices of the other two peristaltic motors. Therefore, the ratio of the displacement of the hinge ball of the peristaltic motor in the vertical direction to the change amount of the corresponding micrometer (adjustment module) is a fixed value, that is to say, the change amount of the micrometer can be used to represent the displacement of the hinge ball of the peristaltic motor in the vertical direction.

[0058] Figure 4 It is a schematic diagram of calibrating a moving mirror motion control system provided by an embodiment of the present invention. Among them, Figure 4 Only the schematic diagram when the first peristaltic motor at point M1 is adjusted by one step is shown. Combining Figure 4, the assembly point of the second peristaltic motor is M2, the assembly point of the third peristaltic motor is M3, and the assembly point of the second displacement sensor is S2. When the first peristaltic motor rotates around the rotation axis M2M3, the circular plane where the peristaltic motor and the displacement sensor are located changes from the black circular plane to the orange-red circular plane. In the vertical direction, the displacement of the first peristaltic motor is , the measured value of the second displacement sensor is . According to the above principle, the angle between the perpendicular line M11AX1 from M11 to the rotation axis M2M3 and the black original plane is equal to the angle between the perpendicular line S22A2 from S22 to the rotation axis M2M3 and the black circular plane, and both M1M11 and S2S22 are perpendicular to the black circular plane. Therefore, Figure 4 The two pink triangles shown in are similar triangles. According to the principle of similar triangles, the ratio of the perpendicular distance from the execution module and any measurement module to the corresponding same rotation axis is equal to the ratio of the adjustment value of the adjustment module corresponding to the execution module to the measured value of the measurement module. That is to say, and The ratio of is equal to and The ratio of, and the ratio of the displacement of the hinge ball of the peristaltic motor in the vertical direction to the change amount of the corresponding micrometer (adjustment module) is a fixed value. Therefore, the ratio between the adjustment value of the micrometer and the measured value of the displacement sensor can be used to equivalently and The ratio of, and then the calibration of the first peristaltic motor and the second displacement sensor can be realized. Similarly, the positional relationship between the first peristaltic motor and other displacement sensors can also be calibrated in the above manner.

[0059] Figure 5 is the flowchart of another moving mirror motion control method provided by the embodiment of the present invention. Refer to Figure 5 , on the basis of the above embodiments, optionally, the moving mirror motion control method provided in this embodiment includes:

[0060] S1101. Obtain the adjustment value of the adjustment module and the measured value of the measurement module corresponding to the adjustment value of the adjustment module.

[0061] The adjustment value of the adjustment module is the adjustment value of the micrometer, and the measured value of the measurement module is the measured value measured by the displacement sensor during the adjustment of the micrometer. Here, when each peristaltic motor rotates around the rotation axis, the three displacement sensors can all measure the measured values of the corresponding assembly points. Therefore, in this embodiment, after each adjustment module is adjusted, the measured values corresponding to the three displacement sensors can be obtained. For example, in combination with Figure 1 and Figure 4 , the micrometer assembled at point M1 is adjusted, and the adjustment value is , at this time, the measured values of the corresponding three displacement sensors are: ρ s1 , ρ s2 , ρ s3 ; adjust the micrometer assembled at point M2, and the adjustment value is , at this time, the measured values of the corresponding three displacement sensors are: , , ; adjust the micrometer assembled at point M3, and the adjustment value is , at this time, the measured values of the corresponding three displacement sensors are: , , .

[0062] S1102. Calculate the ratio of the vertical distance from each execution module to the corresponding same rotation axis to that of multiple measurement modules according to the adjustment value of the adjustment module and the measurement value of the measurement module.

[0063] Specifically, Figure 6 is a schematic diagram of another calibration of the moving mirror motion control system provided by the embodiment of the present invention. Among them, M11, M22, and M33 are the assembly points after adjustment of the three micrometers respectively, and S11, S22, and S33 are the assembly points of the three displacement sensors after adjustment of the micrometers. Combining Figure 6 , the perpendicular line from the first micrometer to the rotation axis M2M3 (at this time, the second and third micrometers are not adjusted, and the rotation axis is M2M3) is M11AX1, the perpendicular line from the first displacement sensor to the rotation axis M2M3 is S11A1, the perpendicular line from the second displacement sensor to the rotation axis M2M3 is S22A2, and the perpendicular line from the third displacement sensor to the rotation axis M2M3 is S33A3. The perpendicular line from the second micrometer to the rotation axis M11M3 (at this time, the first micrometer has been adjusted and the third micrometer has not been adjusted, and the rotation axis is M11M3) is M22AX2, the perpendicular line from the first displacement sensor to the rotation axis M11M3 is S11B1, the perpendicular line from the second displacement sensor to the rotation axis M11M3 is S22B2, and the perpendicular line from the third displacement sensor to the rotation axis M22M3 is S33B3. The perpendicular line from the third micrometer to the rotation axis M11M22 (at this time, both the first and second micrometers have been adjusted, and the rotation axis is M11M22) is M33AX3, the perpendicular line from the first displacement sensor to the rotation axis M11M22 is S11C1, the perpendicular line from the second displacement sensor to the rotation axis M11M22 is S22C2, and the perpendicular line from the third displacement sensor to the rotation axis M11M22 is S33C3.

[0064] According to the above, the adjustment value of the micrometer and the measured value of the displacement sensor are obtained, and the ratio of the vertical distance from each plumb line to the corresponding same rotation axis is obtained. Among them, the proportional relationships between the vertical distances from the three displacement sensors and the three micrometers to the three corresponding rotation axes are as follows:

[0065]

[0066]

[0067]

[0068] S120. According to the calibration relationship, establish a motion model between the execution module and the measurement module, and calculate the unit displacement when each execution module moves one step length based on the motion model.

[0069] S130. Obtain the target displacement of the execution module, and determine the step length of each execution module according to the unit displacement and the target displacement.

[0070] The technical solution provided in the embodiment of the present invention combines the rigid attributes of the moving mirror motion control system, sets three micrometers at the assembly positions of three peristaltic motors respectively, and calculates the ratio of the vertical distances from each peristaltic motor and any displacement sensor to the corresponding same rotation axis, so as to calibrate the actual assembly positions of each peristaltic motor and displacement sensor, thereby making the accuracy of the moving mirror motion control more accurate and the error between the moving mirror and the ideal posture smaller.

[0071] Figure 7 This is a flowchart of another moving mirror motion control method provided in the embodiment of the present invention. Refer to Figure 7 , on the basis of the above embodiment, optionally, the moving mirror motion control method provided in this embodiment includes:

[0072] S1101. Obtain the adjustment value of the adjustment module and the measured value of the measurement module corresponding to the adjustment value of the adjustment module.

[0073] S1102. According to the adjustment value of the adjustment module and the measured value of the measurement module, calculate the ratio of the vertical distances from each execution module to the corresponding same rotation axis of multiple measurement modules respectively.

[0074] S1201. Determine the total measured values of the measurement modules corresponding to each execution module when adjusting a preset step length.

[0075] S1202. Based on the calibration relationship and combined with the total measurement values of each measurement module, establish a motion model between the execution module and the measurement module, and determine the preset displacement of each execution module according to the motion model.

[0076] Among them, the motion model includes: ; where N is equal to 1, 2, 3 respectively, e1 is the displacement of the first execution module, e2 is the displacement of the second execution module, and e3 is the displacement of the third execution module. is the perpendicular distance from the Nth measurement module to the rotation axis corresponding to the first execution module. is the perpendicular distance from the Nth measurement module to the rotation axis corresponding to the second execution module. is the perpendicular distance from the Nth measurement module to the rotation axis corresponding to the third execution module. is the perpendicular distance from the first execution module to its corresponding rotation axis. is the perpendicular distance from the second execution module to its corresponding rotation axis. is the perpendicular distance from the third execution module to its corresponding rotation axis. is the total measurement value of the Nth measurement module. Here, the total measurement value of the measurement module refers to the measurement value corresponding to the measurement module when the three execution modules are all adjusted.

[0077] Specifically, assume that the first peristaltic motor has adjusted a number of steps, the second peristaltic motor has adjusted b number of steps, and the third peristaltic motor has adjusted c number of steps. At this time, the measurement values of the three displacement sensors are respectively , and . When the displacement amounts of the hinge balls of the three peristaltic motors are e1, e2, and e3 respectively, and the measurement values of the three displacement sensors can be satisfied, then according to the proportional relationship obtained above, the motion model is established as follows:

[0078]

[0079] Specifically, on the basis of knowing the measurement values , and obtained by the three displacement sensors, the values of e1, e2, and e3 can be obtained according to the above motion model, that is, the preset displacement of the hinge ball of the first peristaltic motor when it adjusts a number of steps, the preset displacement of the hinge ball of the second peristaltic motor when it adjusts b number of steps, and the preset displacement of the hinge ball of the third peristaltic motor when it adjusts c number of steps are respectively obtained.

[0080] S1203. Determine the unit displacement according to the preset displacement and the preset step of the execution module.

[0081] Specifically, after obtaining the preset displacement of each peristaltic motor, the unit displacement of the peristaltic motor can be determined according to the ratio of the preset displacement to the corresponding preset step size.

[0082] Among them, the unit displacement of the first peristaltic motor is e1 / a, the unit displacement of the second peristaltic motor is e2 / b, and the unit displacement of the third peristaltic motor is e3 / c.

[0083] S130. Obtain the target displacement of the execution module, and determine the step size of each execution module according to the unit displacement and the target displacement.

[0084] The technical solution provided by the embodiment of the present invention, after calibrating the actual positions of each peristaltic motor and each displacement sensor, according to the calibration relationship, by estimating the displacement of the hinge ball corresponding to each peristaltic motor moving one step, the accuracy of the estimated value can be improved, thereby improving the adjustment accuracy of the moving mirror motion control, and effectively reducing the iteration times of the moving mirror adjustment, which is beneficial to improving the adjustment efficiency.

[0085] Figure 8 It is a flowchart of another moving mirror motion control method provided by the embodiment of the present invention. Refer to Figure 8 , on the basis of the above embodiments, optionally, the moving mirror motion control method provided in this embodiment includes:

[0086] S1101. Obtain the adjustment value of the adjustment module and the measurement value of the measurement module corresponding to the adjustment value of the adjustment module.

[0087] S1102. According to the adjustment value of the adjustment module and the measurement value of the measurement module, calculate the ratio of the vertical distance from each execution module to the corresponding same rotation axis of multiple measurement modules respectively.

[0088] S1201. Determine the total measurement value of each measurement module corresponding to each execution module adjusting the preset step size.

[0089] S1202. Based on the calibration relationship, combined with the total measurement value of each measurement module, establish a motion model between the execution module and the measurement module, and determine the preset displacement of each execution module according to the motion model.

[0090] S1203. Determine the unit displacement according to the preset displacement and the preset step size of the execution module.

[0091] S1301. Obtain the target displacement of the execution module, determine the step size of each execution module according to the unit displacement and the target displacement, and based on the motion model, determine the target measurement value of each measurement module corresponding to each execution module adjusting the target displacement.

[0092] Specifically, the target displacement of each peristaltic motor can be obtained through the moving mirror motion control system. For example, it can be pre-stored in the moving mirror motion control system and directly called during the acquisition phase. Among them, the target displacement is the actual displacement that the peristaltic motor needs to adjust. By calculating the ratio between the target displacement of each peristaltic motor and the corresponding unit displacement, the adjustment step of each peristaltic motor can be determined.

[0093] S140. After each execution module adjusts according to the determined step, obtain the actual measurement values of each measurement module, and calculate the measurement error of each measurement module based on the actual measurement value and the target measurement value of the measurement module.

[0094] Specifically, in this embodiment, after determining the adjustment step of each peristaltic motor, each peristaltic motor can be controlled to adjust according to the determined step. After the adjustment is completed, the actual measurement values of each displacement sensor can also be obtained. It should be understood that after each peristaltic motor adjusts according to the determined step, each displacement sensor corresponds to a measurement value, and this measurement value is the actual displacement of the hinge ball corresponding to the peristaltic motor when adjusting according to the determined step. Due to the existence of assembly errors and manufacturing errors, the actual measurement values of each displacement sensor may not be the same as the target measurement value, and there is an error between the two. Among them, the target measurement value is the theoretically measured value of the displacement sensor after the peristaltic motor adjusts the step.

[0095] Here, the error of each displacement sensor from the target measurement value is equal to the absolute value of the difference between the target measurement value and the actual measurement value.

[0096] S150. When the measurement error is greater than the preset error, calculate the adjustment values of each execution module that satisfy the measurement error based on the motion model.

[0097] Specifically, the preset error can be the minimum allowable error between the target measurement value and the actual measurement value of the displacement sensor, and can be set according to actual design requirements. When it is detected that the measurement error is greater than the preset error, calculate the adjustment values of each execution module in the next iteration based on the above motion model.

[0098] Exemplarily, assume that when the displacement amounts of the hinge balls of three peristaltic motors are adjusted by x, y, and z respectively, the errors of the three displacement sensors can meet the requirements of the preset error. Then, according to the motion model, it can be obtained that:

[0099]

[0100] Among them, is the measurement value when the measurement error of the first displacement sensor meets the preset error, is the measurement value when the measurement error of the second displacement sensor meets the preset error, It is the measured value when the measurement error of the third displacement sensor meets the preset error.

[0101] After determining the values of x, y, and z, assign the values of x, y, and z to e1, e2, and e3 respectively, and repeat the control process of steps S1203 - S150 to complete the precise adjustment of the moving mirror's attitude. In the technical solution provided in this embodiment, since the unit displacement of each peristaltic motor hinge ball is estimated more accurately, the measurement error of the displacement sensor is small, which can save the iteration times of moving mirror adjustment and improve the efficiency of the control system during the adjustment process.

[0102] Optionally, an embodiment of the present invention further provides a moving mirror motion control system, which can be used to execute the moving mirror motion control method provided in any embodiment of the present invention. This moving mirror motion control system can be applied to a lithography machine. The moving mirror motion control system includes a plurality of execution modules and a plurality of measurement modules. The plurality of execution modules and the plurality of measurement modules are assembled on the same circular plane. An execution module and a measurement module are arranged opposite to each other. The execution module is used to drive the moving mirror to move in the vertical direction, and the measurement module is used to measure the displacement of the execution module.

[0103] Optionally, the number of both the execution module and the measurement module is three, and the execution module and the measurement module divide the circular plane into six equal parts; the execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

[0104] Among them, the specific working principle and control process of the moving mirror motion control system provided in this embodiment can refer to the relevant descriptions in any of the above embodiments, and will not be elaborated here. Since this moving mirror motion control system is used to execute the moving mirror motion control method provided in any of the above embodiments, this moving mirror motion control system also has the beneficial effects described in any of the above embodiments.

[0105] It should be understood that various forms of the flow shown above can be used, reordering, adding, or deleting steps. For example, the steps recorded in the present invention can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. There is no limitation here.

[0106] The above specific embodiments do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A moving mirror motion control method, characterized in that: The moving mirror motion control method is executed by a moving mirror motion control system, and the moving mirror motion control system includes a plurality of execution modules and a plurality of measurement modules; The moving mirror motion control method comprises: The actual assembly positions of the plurality of execution modules and the plurality of measurement modules are calibrated by the adjustment module, and a corresponding calibration relationship is obtained; wherein the adjustment module is arranged at the actual assembly position of the execution module; the calibration relationship includes the ratio of the vertical distances of each of the execution modules and the plurality of measurement modules to the corresponding same rotation axis; According to the calibration relationship, a motion model between the execution module and the measurement module is established, and based on the motion model, a unit displacement when each execution module moves one step is calculated; The target displacement of the execution module is obtained, and the step size of each execution module is determined according to the unit displacement and the target displacement.

2. The moving mirror motion control method according to claim 1, characterized in that: The actual assembly positions of the plurality of execution modules and the plurality of measurement modules are calibrated by the adjustment module, and corresponding calibration relationships are obtained, including: Acquire an adjustment value of the adjustment module and a measurement value of the measurement module corresponding to the adjustment value of the adjustment module; The ratio of the vertical distance between each of the execution modules and the plurality of measurement modules to the corresponding same rotation axis is calculated according to the adjustment value of the adjustment module and the measurement value of the measurement module.

3. The moving mirror motion control method according to claim 2, characterized in that: The ratio of the vertical distances between the execution module and any of the measurement modules and the corresponding same rotation axis is equal to the ratio of the adjustment value of the adjustment module corresponding to the execution module to the measurement value of the measurement module.

4. The moving mirror motion control method according to claim 1, characterized in that: The step of establishing a motion model between the execution module and the measurement module according to the calibration relationship, and calculating a unit displacement when each execution module moves one step based on the motion model, comprises: Determine the total measurement value of each of the measurement modules corresponding to each of the execution modules adjusting the preset step size; Based on the calibration relationship and in combination with the total measurement value of each of the measurement modules, a motion model between the execution module and the measurement module is established, and a preset displacement of each of the execution modules is determined according to the motion model; The unit displacement is determined according to a preset displacement of the execution module and the preset step size.

5. The moving mirror motion control method according to claim 4, characterized in that: The number of the execution modules and the number of the measurement modules are both three; The motion model includes: ; Wherein, N is equal to 1, 2, and 3 respectively, e1 is the displacement of the first execution module, e2 is the displacement of the second execution module, and e3 is the displacement of the third execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the first execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the second execution module, is the vertical distance from the Nth measuring module to the rotation axis corresponding to the third execution module, is the vertical distance from the first execution module to its corresponding rotation axis, is the vertical distance from the second execution module to its corresponding rotation axis, is the vertical distance from the third execution module to its corresponding rotation axis, is the total measurement value of the Nth measurement module; Wherein, the rotation axis corresponding to any one of the execution modules is a line connecting the assembly positions of the other two execution modules.

6. The moving mirror motion control method according to claim 1, characterized in that: While determining the step size of each execution module according to the unit displacement and the target displacement, the method further includes: Based on the motion model, target measurement values ​​of the measurement modules corresponding to each of the execution modules when adjusting the target displacement are determined.

7. The moving mirror motion control method according to claim 6, characterized in that: The moving mirror motion control method further comprises: After each of the execution modules is adjusted according to the determined step length, an actual measurement value of each of the measurement modules is obtained, and a measurement error of each of the measurement modules is calculated according to the actual measurement value of the measurement module and the target measurement value; When the measurement error is greater than a preset error, an adjustment value of each of the execution modules that satisfies the measurement error is calculated based on the motion model.

8. A moving mirror motion control system, characterized in that: Used to execute the moving mirror motion control method described in any one of claims 1 to 7, the moving mirror motion control system includes multiple execution modules and multiple measurement modules, the multiple execution modules and the multiple measurement modules are assembled on the same circular plane, one execution module and one measurement module are arranged opposite to each other, the execution module is used to drive the moving mirror to move in a vertical direction, and the measurement module is used to measure the displacement of the execution module.

9. The moving mirror motion control system according to claim 8, characterized in that: The number of the execution modules and the number of the measurement modules are both three, and the execution modules and the measurement modules divide the circular plane into six equal parts; The execution module includes a peristaltic motor, and the measurement module includes a displacement sensor.

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