Rotatably-liftable substrate processing apparatus

Abstract

The present application provides a rotatable lifting substrate processing device, comprising a driver, a transmission assembly, a second transmission wheel, a lifting mechanism, a lifting switching mechanism, a driven rod and a rotation switching mechanism, the transmission assembly and the second transmission wheel are respectively arranged at both ends of the driver, the lifting switching mechanism can switch positions to connect or separate the transmission assembly, the rotation switching mechanism can switch positions to connect or separate the second transmission wheel, the driver drives the transmission assembly and the lifting mechanism through the lifting switching mechanism to control the lifting of the driven rod, and the driver controls the rotation of the driven rod through the second transmission wheel and the rotation switching mechanism; thereby, by switching the positions of the lifting switching mechanism and the rotation switching mechanism respectively, the single driver can make the driven rod only rotate, only lift or rotate and lift at the same time, and the switching is independent and does not interfere with each other.

Description

Technical Field

[0001] The present invention relates to a substrate processing device capable of rotation and elevation, and in particular to a substrate processing device capable of rotation and elevation being independently operated and switched without mutual interference. Background Art

[0002] In automated or semi-automated equipment, actuators such as motors or pneumatic cylinders are essential for performing transfer, lifting, and rotation operations to achieve the desired functionality. In semiconductor manufacturing, spray nozzles are often used to apply chemicals. These motors or pneumatic cylinders are used to lift or rotate the nozzles, thereby increasing the range and intensity of the chemical spray.

[0003] However, when lifting and rotating are required, they are typically driven independently by separate actuators, such as a motor and a reducer for rotation and a pneumatic cylinder for lifting. This not only increases costs by requiring multiple actuators, but also reduces actuation efficiency due to backlash between the reducer and motor. Furthermore, the difficulty in adjusting the cushioning during lifting and lowering often creates difficulties during assembly and adjustment.

[0004] In view of this, the present invention aims at the above-mentioned shortcomings of the prior art, conducts intensive research and applies theoretical research to try to solve the above-mentioned problems, which become the improvement goals of the present invention. Summary of the Invention

[0005] The main purpose of the present invention is to enable the driven rod to only rotate, only rise and fall, or rotate and rise and fall simultaneously through a single driver, and to switch independently without causing mutual interference.

[0006] In order to achieve the above-mentioned objectives, the present invention provides a substrate processing device that can be rotatably lifted and lowered, including a driver, a transmission assembly, a second transmission wheel, a lifting mechanism, a lifting switching mechanism, a driven rod and a rotation switching mechanism, the driver having a rotating shaft, the rotating shaft having a first end and a second end protruding from both ends of the driver, the transmission assembly comprising a blocking ring and a first transmission wheel, the blocking ring being fixed to the driver and rotatably accommodating the first end, the first transmission wheel being rotatably sleeved on the blocking ring, the second transmission wheel being fixed to the second end and surrounding the rotating shaft, the lifting mechanism being arranged on one side of the driver, the lifting mechanism comprising a driven wheel and a linkage assembly, the driven wheel being dynamically connected to the first transmission wheel, one end of the linkage assembly being fixedly connected to the driven wheel, the lifting switching mechanism being connected to the first end and comprising a first movable portion, the first movable portion being capable of switching between a lifting separation position and a lifting connection position, the driven rod rotatably passing through the rotating shaft, one end of the driven rod protruding from the lifting switching mechanism, The other end of the driven rod is rotatably connected to the other end of the linkage assembly, and the rotation switching mechanism includes a second movable part, the second movable part is sleeved on the driven rod and can switch between a rotation separation position and a rotation connection position; when the first movable part is in the lifting separation position and the rotating shaft rotates, there is a gap between the first movable part and the first transmission wheel, so that the first movable part rotates idly; when the first movable part is in the lifting connection position and the rotating shaft rotates, the first movable part is connected to the first transmission wheel, and the first end drives the first transmission wheel to rotate via the first movable part, so that the driven wheel drives the linkage assembly to actuate so that the driven rod is lifted and lowered relative to the driver; when the second movable part is in the rotation separation position and the rotating shaft rotates, there is a gap between the second movable part and the second transmission wheel, so that the second transmission wheel rotates idly; when the second movable part is in the rotation connection position and the rotating shaft rotates, the second movable part is connected to the second transmission wheel, and the second end drives the second movable part to rotate via the second transmission wheel so that the driven rod rotates relative to the driver.

[0007] In one embodiment of the present invention, the lifting switching mechanism also includes a fixed ring, a first substrate and a first cylinder. The fixed ring is fixed to the first end portion, the first movable part is slidably mounted on the fixed ring, the first movable part is rotatably accommodated in the first substrate, the first cylinder is connected to the first substrate and can drive the first substrate and the first movable part to switch between a lifting separation position and a lifting connection position.

[0008] In one embodiment of the present invention, the rotation switching mechanism also includes a second base plate and a second cylinder. The second movable part is rotatably accommodated in the second base plate. The second cylinder is connected to the second base plate and can drive the second base plate and the second movable part to switch between a lifting separation position and a lifting connection position.

[0009] In one embodiment of the present invention, the linkage assembly includes a groove cam, a cam follower, an extension rod and a connecting plate. The groove cam is coaxially fixed to the driven wheel. The groove cam has a lifting track. One end of the cam follower is accommodated in the lifting track. The other end of the cam follower is fixed to one end of the extension rod. The extension rod is parallel to the follower rod. The connecting plate connects the other end of the extension rod and the follower rod. When the driven wheel drives the groove cam to rotate, the cam follower slides along the lifting track to drive the extension rod to rise and fall.

[0010] In one embodiment of the present invention, the lifting mechanism further includes a shell, the groove cam is rotatably accommodated in the shell and passes through the shell to be connected to the driven wheel, the shell has a notch, when the groove cam rotates, the cam follower slides along the lifting track and rises and falls in the notch.

[0011] In one embodiment of the present invention, the first movable part and the second movable part respectively have a first connecting structure, and the first transmission wheel and the second transmission wheel respectively have a second connecting structure. The first connecting structure of the first movable part can be connected and fixed corresponding to the second connecting structure of the first transmission wheel, and the first connecting structure of the second movable part can be connected and fixed corresponding to the second connecting structure of the second transmission wheel.

[0012] In one embodiment of the present invention, the first connection structure is one of the magnetic element and the adsorption element, and the second connection structure is the other of the magnetic element and the adsorption element.

[0013] In one embodiment of the present invention, the first connection structure is one of the protrusion and the groove, and the second connection structure is the other of the protrusion and the groove.

[0014] In one embodiment of the present invention, the first transmission wheel and the driven wheel are gears, sprockets or pulleys that cooperate with each other.

[0015] In one embodiment of the present invention, the first transmission wheel and the driven wheel are pulleys that cooperate with each other, and the transmission assembly further includes a belt that is sleeved on the first transmission wheel and the driven wheel.

[0016] The rotatable and elevating substrate processing device of the present invention can independently switch to connect or disconnect the first transmission wheel through the first movable part of the lifting switching mechanism, so that the first movable part can drive the first transmission wheel to rotate or the first movable part can idle, and can independently switch to connect or disconnect the second transmission wheel through the second movable part of the rotation switching mechanism, so that the second transmission wheel can drive the second movable part to rotate or the second transmission wheel can idle, so that a single driver can make the driven rod only rotate, only elevate, or rotate and elevate simultaneously, and switch independently without causing mutual interference.

[0017] For further understanding of the technology, means and effects taken by the present application to achieve the predetermined purpose, please refer to the following detailed description and drawings of the present application. It is believed that the purpose, features and characteristics of the present application can be deeply and specifically understood from the above, however, the drawings are provided for reference and illustration only, and are not used to limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a sectional side view of the present application;

[0019] Figure 2 is a top view of the present application; Figure 1

[0020] Figure 3 is a 3-3 sectional view of the present application; Figure 1

[0021] Figure 4 is a 4-4 sectional view of the present application; Figure 1

[0022] Figure 5 is a 5-5 sectional view of the present application; Figure 1

[0023] Figure 6 is a use state diagram of the present application when the driven rod is only rotated;

[0024] Figure 7 is a use state diagram of the present application before the driven rod is only raised;

[0025] Figure 8 is a use state diagram of the present application when the driven rod is only raised;

[0026] Figure 9 is a use state diagram of the present application before the driven rod is rotated and raised at the same time;

[0027] Figure 10 is a use state diagram of the present application when the driven rod is rotated and raised at the same time;

[0028] In the drawings, reference signs are as follows:

[0029] 10: driver

[0030] 11: rotating shaft

[0031] 111: first end portion

[0032] 112: second end portion

[0033] 20: transmission assembly

[0034] 21: blocking ring

[0035] 22: first transmission wheel

[0036] ​​​​23: Belt

[0037] 30: Second transmission wheel

[0038] 40: Lifting mechanism

[0039] 41: driven wheel

[0040] 42: Linkage components

[0041] 421: Groove Cam

[0042] 4211:Fixed shaft

[0043] 4212: Lifting track

[0044] 422: Cam follower

[0045] 423: Extension rod

[0046] 424:Connecting plate

[0047] 43: Shell

[0048] 431: Gap

[0049] 50: Lifting and switching mechanism

[0050] 501: lifting and separation position

[0051] 502: Lifting connection position

[0052] 51: First Activity Department

[0053] 52: Fixed ring

[0054] 53: first substrate

[0055] 54: First cylinder

[0056] 60: follower rod

[0057] 61: Limit section

[0058] 70: Rotary switching mechanism

[0059] 701: Rotation separation position

[0060] 702: Rotation connection position

[0061] 71: Second Activity Department

[0062] 72: Second substrate

[0063] 73: Second cylinder

[0064] 80: First connection structure

[0065] 90: Second connection structure. DETAILED DESCRIPTION

[0066] The technical content and detailed description of this application are as follows, with accompanying drawings:

[0067] The present invention provides a substrate processing device that can be rotated and lifted. Figures 1 to 5 As shown, it includes a driver 10 , a transmission assembly 20 , a second transmission wheel 30 , a lifting mechanism 40 , a lifting switching mechanism 50 , a driven rod 60 and a rotation switching mechanism 70 .

[0068] The driver 10 has a hollow shaft 11. The shaft 11 has a first end 111 and a second end 112 that protrude from both ends of the driver 10. Specifically, the first end 111 of the shaft 11 protrudes from the top of the driver 10, while the second end 112 of the shaft 11 protrudes from the bottom of the driver 10. In this embodiment, the driver 10 is a dual-shaft motor, but the present invention is not limited to this.

[0069] The transmission assembly 20 primarily comprises a barrier ring 21 and a first transmission wheel 22. The barrier ring 21 is fixed to the top of the driver 10 and rotatably accommodates the first end portion 111 therein. The first transmission wheel 22 is rotatably mounted on the outer edge of the barrier ring 21. Specifically, the barrier ring 21 and the first transmission wheel 22 are both generally annular, allowing the first end portion 111 of the rotating shaft 11 to pass through the barrier ring 21 and for the first transmission wheel 22 to be mounted on the barrier ring 21. In other words, the barrier ring 21 is fixed to the top of the driver 10 and is blocked between the rotating shaft 11 and the first transmission wheel 22, and both the rotating shaft 11 and the first transmission wheel 22 can rotate coaxially relative to the barrier ring 21.

[0070] The second transmission wheel 30 is fixed to the second end portion 112 and surrounds the rotating shaft 11. In this embodiment, the second transmission wheel 30 is sleeved and fixed to the outer edge of the second end portion 112, but the present invention is not limited to this. For example, the second transmission wheel 30 can also be fixed to a side of the second end portion 112 away from the first end portion 111 (i.e., the end surface / bottom surface of the second end portion 112). Specifically, the second transmission wheel 30 can be fixed to the second end portion 112 by clamping, snapping, bonding, or locking, etc., although the present invention does not impose any further limitations on this. Accordingly, when the driver 10 drives the rotating shaft 11 to rotate, the second end portion 112 can drive the second transmission wheel 30 to rotate.

[0071] The lifting mechanism 40 is disposed on one side of the driver 10. In this embodiment, the lifting mechanism 40 is disposed on the left side of the driver 10, but the present invention is not limited thereto. The lifting mechanism 40 primarily comprises a driven pulley 41 and a linkage assembly 42. The driven pulley 41 is power-connected to the first transmission pulley 22, thereby driving the driven pulley 41 to rotate. In this embodiment, the first transmission pulley 22 and the driven pulley 41 are mutually cooperating pulleys, and the transmission assembly 20 further comprises a belt 23, which is sleeved around the first transmission pulley 22 and the driven pulley 41 to enable the two to rotate in conjunction. However, the present invention is not limited thereto. For example, the first transmission pulley 22 and the driven pulley 41 may alternatively be cooperating gears or sprockets, as long as they are power-connected and can rotate in conjunction. One end of the linkage assembly 42 is fixedly connected to the driven pulley 41, so that the rotation of the driven pulley 41 drives the linkage assembly 42. The specific structure and operation of the linkage assembly 42 will be described later, so they will not be described here in detail.

[0072] The lift switching mechanism 50 is connected to the first end portion 111 and primarily includes a first movable portion 51. The first movable portion 51 is switchable between a lift-disconnected position 501 and a lift-connected position 502. The specific structure and operation of the lift switching mechanism 50 will be described later and will not be detailed here.

[0073] In this embodiment, the driven rod 60 is a hollow rod body to reduce weight, but the present invention is not limited to this. The driven rod 60 is rotatably connected to the rotating shaft 11. One end of the driven rod 60 protrudes from the lifting switching mechanism 50 and can be connected to a work object (not shown). For example, the work object can be a tool such as a nozzle or a stirrer, so that when the driven rod 60 is rotated, lifted, or rotated and lifted at the same time under different requirements, the work object can be rotated, lifted, or rotated and lifted at the same time to enhance its use effect. The other end of the driven rod 60 is rotatably connected to the other end of the linkage component 42, so that the linkage component 42 can drive the driven rod 60 to rise or fall together when it is actuated, and the driven member will not drive the linkage component 42 to rotate when it rotates.

[0074] The rotation switching mechanism 70 mainly includes a second movable part 71. The second movable part 71 can be slidably mounted on the outer edge of the driven rod 60 and can switch between a rotationally separated position 701 and a rotationally connected position 702. Specifically, the second movable part 71 is mounted between the second end 112 and the end of the driven rod 60 connected to the linkage assembly 42. In this embodiment, the driven rod 60 has a limiting section 61. The limiting section 61 is located adjacent to the end of the driven rod 60 connected to the linkage assembly 42 and is provided for the second movable part 71 to be slidably mounted up and down, and the outer shape of the limiting section 61 is non-circular so that the second movable part 71 can drive the limiting section 61 to rotate. More specifically, the length of the limiting section 61 is greater than or equal to the maximum length that the driven rod 60 can rise or fall. The specific structure and actuation method of the rotation switching mechanism 70 will be explained later, so they will not be repeated here.

[0075] See also Figure 6 As shown, when the first movable part 51 is located at the lifting and separation position 501 and the driver 10 drives the rotating shaft 11 to rotate, there is a gap between the first movable part 51 and the first transmission wheel 22, so that the first movable part 51 rotates idly, that is, the first movable part 51 does not drive the first transmission wheel 22 to rotate.

[0076] Please see next Figure 7 and Figure 8 As shown, when the first movable portion 51 is located at the lifting connection position 502 and the driver 10 drives the rotating shaft 11 to rotate, the first movable portion 51 is connected to the first transmission wheel 22, and the first end portion 111 of the rotating shaft 11 drives the first transmission wheel 22 to rotate via the first movable portion 51, and drives the driven wheel 41 to rotate via the first transmission wheel 22, so that the driven wheel 41 drives the linkage assembly 42 to operate, thereby causing the driven rod 60 to rise or fall relative to the driver 10.

[0077] Further reading Figure 7 As shown, when the second movable portion 71 is located at the rotationally separated position 701 and the driver 10 drives the rotating shaft 11 to rotate, there is a gap between the second movable portion 71 and the second transmission wheel 30 so that the second transmission wheel 30 rotates idly, that is, the second transmission wheel 30 does not drive the second movable portion 71 to rotate.

[0078] Further reading Figure 6 As shown, when the second movable portion 71 is located at the rotational connection position 702 and the driver 10 drives the rotating shaft 11 to rotate, the second movable portion 71 is connected to the second transmission wheel 30, and the second end portion 112 of the rotating shaft 11 drives the second movable portion 71 to rotate via the second transmission wheel 30, thereby allowing the second movable portion 71 to drive the limiting section 61 of the driven rod 60 to rotate, thereby causing the entire driven rod 60 to rotate relative to the driver 10.

[0079] Please see next Figure 9 andFigure 10 As shown, when the first movable portion 51 is located at the lifting connection position 502, the second movable portion 71 is located at the rotation connection position 702, and the driver 10 drives the rotating shaft 11 to rotate, the first movable portion 51 is connected to the first transmission wheel 22, and the second movable portion 71 is connected to the second transmission wheel 30. The first end portion 111 of the rotating shaft 11 drives the first transmission wheel 22 to rotate via the first movable portion 51, thereby driving the driven wheel 41 to drive the linkage assembly 42 to operate. The second end portion 112 of the rotating shaft 11 drives the second movable portion 71 to rotate via the second transmission wheel 30, thereby driving the limiting section 61 of the driven rod 60 to rotate, thereby allowing the driven rod 60 to be simultaneously lifted and rotated relative to the driver 10.

[0080] In this way, the first movable portion 51 of the lifting switching mechanism 50 can be switched independently between the lifting connection position 502 and the lifting separation position 501, thereby connecting or disconnecting the first transmission wheel 22, so that the first movable portion 51 can drive the first transmission wheel 22 to rotate together or only the first movable portion 51 can idle on its own, and the second movable portion 71 of the rotation switching mechanism 70 can be switched independently between the rotation connection position 702 and the rotation separation position 701, thereby connecting or disconnecting the second transmission wheel 30, so that the second transmission wheel 30 can drive the second movable portion 71 to rotate together or only the second transmission wheel 30 can idle on its own, so that a single driver 10 can enable the driven rod 60 to achieve the functions of only rotating, only lifting, or simultaneously rotating and lifting, and perform separate switching without causing mutual interference.

[0081] For further explanation, see Figure 1 As shown, the lifting and switching mechanism 50 also includes a fixed ring 52, a first base plate 53 and a first cylinder 54. The fixed ring 52 is fixed to a side surface of the first end portion 111 away from the second end portion 112 (i.e., the end surface / top surface of the first end portion 111). Specifically, the fixed ring 52 can be fixed to the first end portion 111 by clamping, snapping, bonding or locking, etc., and the present invention does not impose any further restrictions on this. The first movable portion 51 can be slidably mounted on the fixed ring 52 up and down, thereby switching between a lifting connection position 502 and a lifting separation position 501. The fixed ring 52 has a non-circular shape so that the fixed ring 52 can drive the first movable portion 51 to rotate. The first movable portion 51 is rotatably accommodated in the first base plate 53 to prevent the entire lifting and switching mechanism 50 from rotating when the first movable portion 51 rotates. The push rod of the first cylinder 54 is connected to the first base plate 53. The first cylinder 54 can drive the first base plate 53 and the first movable part 51 through its push rod, so that the first base plate 53 and the first movable part 51 can slide up and down relative to the fixing ring 52 and switch between the lifting separation position 501 and the lifting connection position 502.

[0082] Please continue reading Figure 1As shown, the rotation switching mechanism 70 also includes a second base plate 72 and a second cylinder 73. The second movable portion 71 is rotatably accommodated within the second base plate 72, preventing the entire rotation switching mechanism 70 from rotating when the second movable portion 71 rotates. The push rod of the second cylinder 73 is connected to the second base plate 72. The second cylinder 73 can use its push rod to drive the second base plate 72 and the second movable portion 71, thereby causing the second base plate 72 and the second movable portion 71 to rise and fall, switching between a rotationally separated position 701 and a rotationally connected position 702.

[0083] Further reading Figure 1 As shown, the linkage assembly 42 in this embodiment includes a grooved cam 421, a cam follower 422, an extension rod 423, and a connecting plate 424. However, the present invention is not limited to this embodiment; other linkage structures may be used to link the follower wheel 41 with the follower rod 60 for elevation. The grooved cam 421 is cylindrical and coaxially fixed to the follower wheel 41. In this embodiment, a fixed shaft 4211 extends from the end surface of the grooved cam 421 and is fixed to the center of the follower wheel 41. A lifting track 4212 is spirally arranged around the axis of the grooved cam 421 on its outer edge. One end of the cam follower 422 is accommodated in the lifting track 4212, while the other end of the cam follower 422 is fixed to the top of the extension rod 423. The extension rod 423 is parallel to the follower rod 60 and extends away from the follower wheel 41. The connecting plate 424 is perpendicularly connected to the other end of the extension rod 423 and is rotatably connected to the bottom end of the driven rod 60. As a result, when the driven wheel 41 rotates the fixed shaft 4211 of the grooved cam 421, the cam follower 422 is driven by the grooved cam 421 to slide up and down along the lifting track 4212, thereby driving the driven rod 60 up and down through the extension rods 423, 423 and the connecting plate 424.

[0084] The lifting mechanism 40 in this embodiment further includes a housing 43 to house the grooved cam 421 without exposing it to the outside, but this is not a necessary limitation of the present invention. The grooved cam 421 is rotatably housed within the housing 43, and a fixed shaft 4211 of the grooved cam 421 extends through the top of the housing 43 and connects to the driven wheel 41. A notch 431 is formed on the side of the housing 43 to accommodate the cam follower 422. As the grooved cam 421 rotates, driving the cam follower 422, the cam follower 422 slides up and down along the lifting track 4212, thereby rising and falling within the notch 431.

[0085] Further reading Figure 1As shown, the first movable portion 51 and the second movable portion 71 each have at least one first connecting structure 80, and the first transmission wheel 22 and the second transmission wheel 30 each have at least one second connecting structure 90. Specifically, the first connecting structure 80 is provided on the side of the first movable portion 51 facing the first transmission wheel 22 and the side of the second movable portion 71 facing the second driving wheel, respectively. The second connecting structure 90 is provided on the side of the first transmission wheel 22 facing the first movable portion 51 and the side of the second transmission wheel 30 facing the second movable portion 71, respectively. The first connecting structure 80 of the first movable portion 51 can be connected and fixedly coupled to the second connecting structure 90 of the first transmission wheel 22, and the first connecting structure 80 of the second movable portion 71 can be connected and fixedly coupled to the second connecting structure 90 of the second transmission wheel 30, thereby enabling the first movable portion 51 to drive the first transmission wheel 22 to rotate, and the second transmission wheel 30 to drive the second movable portion 71 to rotate.

[0086] In this embodiment, the first connecting structure 80 is one of a magnetic member and an adsorbing member, and the second connecting structure 90 is the other of the magnetic member and the adsorbing member. However, the present invention is not limited thereto. For example, the first connecting structure 80 may also be one of a protrusion (e.g., a positioning pin or key) and a groove (e.g., a positioning hole or keyway), and the second connecting structure 90 may be the other of the protrusion and the groove. Specifically, the magnetic member is a magnetic member such as a magnet, and the adsorbing member is another magnetic member having opposite polarity, or a magnetic material member such as an iron member that is magnetically attracted to the magnet. In this way, the first movable portion 51 and the first transmission wheel 22 are temporarily connected, or the second movable portion 71 and the second transmission wheel 30 are temporarily connected, through magnetic attraction. The first movable portion 51 or the second movable portion 71 is then pushed away to the lifting separation position 501 or the rotational separation position 701 by the first cylinder 54 or the second cylinder 73 to disconnect the first movable portion 51 or the second movable portion 71.

[0087] In the rotatable and elevating substrate processing apparatus of the present invention, the first movable portion 51 of the lift switching mechanism 50 can be switched independently between a lift connection position 502 and a lift separation position 501 to connect or disconnect the first transmission wheel 22, so that the first movable portion 51 can drive the first transmission wheel 22 to rotate together, or the first movable portion 51 can only rotate idly. Furthermore, the second movable portion 71 of the rotation switching mechanism 70 can be switched independently between a rotation connection position 702 and a rotation separation position 701 to connect or disconnect the second transmission wheel 30, so that the second transmission wheel 30 can drive the second movable portion 71 to rotate together, or the second transmission wheel 30 can only rotate idly. Thus, a single driver 10 can enable the driven rod 60 to achieve the functions of only rotation, only elevation, or simultaneous rotation and elevation, and the independent switching can be performed without causing mutual interference.

[0088] The above description is merely a preferred embodiment of the present application and should not limit the scope of implementation of the present application. That is, all equivalent changes and modifications made based on the present application should still fall within the scope of protection intended by the patent coverage of the present application. The present application may also have many other embodiments. Without departing from the spirit and essence of the present application, those skilled in the art should be able to make various corresponding changes and modifications based on the present application, and these corresponding changes and modifications should fall within the scope of protection of the claims attached to the present application.

Claims

1. A substrate processing device capable of rotating and lifting, characterized in that: include: A driver having a rotating shaft, wherein the rotating shaft has a first end and a second end protruding from both ends of the driver; a transmission assembly comprising a blocking ring and a first transmission wheel, wherein the blocking ring is fixed to the driver and rotatably receives the first end portion, and the first transmission wheel is rotatably sleeved on the blocking ring; a second transmission wheel fixed to the second end portion and surrounding the rotating shaft; a lifting mechanism disposed on one side of the driver, the lifting mechanism comprising a driven wheel and a linkage assembly, the driven wheel being connected to the first transmission wheel by power, and one end of the linkage assembly being fixedly connected to the driven wheel; a lifting switching mechanism connected to the first end portion and comprising a first movable portion, wherein the first movable portion is switchable between a lifting separation position and a lifting connection position; a driven rod rotatably connected to the rotating shaft, one end of the driven rod protruding from the lifting switching mechanism, and the other end of the driven rod rotatably connected to the other end of the linkage assembly; and a rotation switching mechanism, comprising a second movable portion, the second movable portion being sleeved on the driven rod and capable of switching between a rotationally disengaged position and a rotationally connected position; When the first movable part is located at the lifting and separating position and the rotating shaft rotates, a gap exists between the first movable part and the first transmission wheel, causing the first movable part to idle. When the first movable portion is located at the lifting connection position and the rotating shaft rotates, the first movable portion is connected to the first transmission wheel, and the first end portion drives the first transmission wheel to rotate via the first movable portion, thereby causing the driven wheel to drive the linkage assembly to actuate so that the driven rod can be lifted or lowered relative to the driver; When the second movable portion is located at the rotationally separated position and the rotating shaft rotates, a gap exists between the second movable portion and the second transmission wheel, causing the second transmission wheel to idle. When the second movable part is located at the rotation connection position and the rotating shaft rotates, the second movable part is connected to the second transmission wheel, and the second end drives the second movable part to rotate via the second transmission wheel to rotate the driven rod relative to the driver.

2. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The lifting switching mechanism also includes a fixed ring, a first base plate and a first cylinder. The fixed ring is fixed to the first end portion. The first movable part is slidably mounted on the fixed ring. The first movable part is rotatably accommodated in the first base plate. The first cylinder is connected to the first base plate and can drive the first base plate and the first movable part to switch between the lifting separation position and the lifting connection position.

3. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The rotation switching mechanism also includes a second base plate and a second cylinder. The second movable part is rotatably accommodated in the second base plate. The second cylinder is connected to the second base plate and can drive the second base plate and the second movable part to switch between the lifting separation position and the lifting connection position.

4. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The linkage assembly includes a groove cam, a cam follower, an extension rod and a connecting plate. The groove cam is coaxially fixed to the driven wheel. The groove cam has a lifting track. One end of the cam follower is accommodated in the lifting track. The other end of the cam follower is fixed to one end of the extension rod. The extension rod is parallel to the follower rod. The connecting plate connects the other end of the extension rod and the follower rod. When the driven wheel drives the groove cam to rotate, the cam follower slides along the lifting track to drive the extension rod to rise and fall.

5. The rotatable and elevating substrate processing apparatus according to claim 4, wherein: The lifting mechanism also includes a shell, the groove cam is rotatably accommodated in the shell and passes through the shell to be connected to the driven wheel, the shell has a notch, when the groove cam rotates, the cam follower slides along the lifting track and rises and falls in the notch.

6. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The first movable part and the second movable part respectively have a first connecting structure, and the first transmission wheel and the second transmission wheel respectively have a second connecting structure. The first connecting structure of the first movable part can be connected and fixed corresponding to the second connecting structure of the first transmission wheel, and the first connecting structure of the second movable part can be connected and fixed corresponding to the second connecting structure of the second transmission wheel.

7. The rotatable and elevating substrate processing apparatus according to claim 6, wherein: The first connection structure is one of the magnetic element and the adsorption element, and the second connection structure is the other of the magnetic element and the adsorption element.

8. The rotatable and elevating substrate processing apparatus according to claim 6, wherein: The first connection structure is one of the protrusion and the groove, and the second connection structure is the other of the protrusion and the groove.

9. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The first transmission wheel and the driven wheel are gears, sprockets or pulleys that cooperate with each other.

10. The rotatable and elevating substrate processing apparatus according to claim 1, wherein: The first transmission wheel and the driven wheel are pulleys that cooperate with each other. The transmission assembly further includes a belt, and the belt is sleeved on the first transmission wheel and the driven wheel.

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