Medium nanowire guided TEM wave radio frequency transmission line device

Abstract

The invention discloses a device of a radio frequency transmission line of a dielectric nanowire guided TEM (Transmission Electron Microscope) wave, and relates to the fields of nanotechnology and microwave technology. The device structurally comprises a substrate, a zinc oxide seed layer, a ground signal electrode, a transmission signal electrode and a zinc oxide nanowire, and is of a coplanar waveguide structure. A dielectric nanowire replaces a signal line in a traditional coplanar waveguide structure, TEM signals fed to an electrode at one end are guided to a signal electrode at the other end through the nanowire, an electric field is made to be in the surface normal direction of the nanowire, and a magnetic field is made to be in the tangential direction. Under the action of an external electric field and Lorentz force, motional polarization is generated in a space charge region of the nanowire, and internal zero field and surface electromagnetic shielding of the nanowire are realized, so that TEM waves are guided. The coplanar waveguide structural design ensures a good guiding effect under the frequency of more than 10 GHz.

Description

Technical Field

[0001] The invention relates to the fields of nanotechnology and microwave technology, and in particular to a device of a radio frequency transmission line of a dielectric nanowire guiding a TEM wave. Background Art

[0002] Technological progress stems from a deeper understanding of fundamental issues. Waveguides are the basic information carriers of modern communication technology. Although metal surfaces and different dielectric interfaces can guide the directional propagation of electromagnetic waves under certain conditions, a major disadvantage of metal materials at microwave frequencies is their high electrical conductivity, which limits the penetration of microwaves into the material and generates unnecessary losses. On the road to miniaturization of microwave circuits, there are two remedies: nanostructures or dielectric materials. When at least one dimension of the nanowire is smaller than the penetration depth, complete microwave penetration can be guaranteed, while dielectric ceramics have naturally low conductor losses and can greatly reduce the size of the waveguide due to the high dielectric constant. However, microwave transmission of a single dielectric nanowire (NW) has rarely been reported, especially in the ultra-high frequency (SHF, 3-30 GHz) band, which is crucial for wireless communications, sensing technology, and universal quantum interconnection.

[0003] The reason for this gap is that according to Maxwell's equations, a single conductor transmission line does not allow transverse electromagnetic (TEM) modes, but in fact TEM waves have no cutoff wavelength restrictions and are the best way to achieve subwavelength transmission. Electromagnetic power flow is transmitted through space. The guidance of electromagnetic waves is to find a space to confine it. Since electromagnetic waves cannot exist in metals but only in dielectric media, it is generally believed that there are only three ways for electromagnetic waves to be guided:

[0004] (1) Since metals reflect electromagnetic waves, the guiding effect of metals on electromagnetic waves occurs outside the metal itself and between metals. It can be seen that microwave transmission structures at the nanoscale always have high conductivity. For example, metal nanowire film (MnM) is a platform composed of a large number of metal nanowire arrays, which can be used to manufacture many microwave devices such as transformers, crossovers, interposers, etc. Although carbon nanotubes (CNTs) are superior to metal nanowires, they still exhibit ballistic flow of electrons, with an electron mean free path of several microns, and can carry large current densities, so carbon nanotubes can be used for slow wave transmission, which is very similar to the application of superconductors.

[0005] (2) The guiding effect of dielectric materials on electromagnetic waves occurs inside the dielectric, so microwave dielectric waveguides are not nanoscale. Under infinite boundary conditions, the operating wavelength is much smaller than the size of the dielectric material, and TEM waves can propagate in the dielectric material. Therefore, ray optics is often used to understand the transmission, reflection, and absorption of electromagnetic waves. When the operating wavelength is comparable to the size of the dielectric material, a common method is to confine the electromagnetic wave within the dielectric waveguide. In this case, due to the limited cutoff wavelength, the dielectric material can only guide the TE or TM mode through the waveguide. Therefore, classical microwave dielectric waveguides are generally several microns in size, while nano dielectric waveguides usually operate in the terahertz or optical band range.

[0006] (3) Surface waves provide a third way through field localization. In this case, electromagnetic waves are not completely confined to the solid when achieving subwavelength transmission. Surface waves can basically be divided into three types: (1) The first type is based on the interaction of electromagnetic waves with a large number of electrons in the solid, so surface plasmon polaritons (SPPs) at optical frequencies and artificial surface plasmon polaritons (SSPPs) at microwave frequencies both require metals. Although solid-state plasmas also appear in semiconductors, such as silicon in the microwave band, high conductivity is still required, and carriers are injected by pin diodes. (2) The second type of surface waves is based on the interaction of electromagnetic waves with lattice vibrations. Therefore, surface phonon polaritons (SPhPs) involving transverse optical phonons usually operate in the infrared to terahertz range. (3) The third type of waves belongs to elastic mechanical waves, such as surface acoustic waves (SAW), so the frequencies reported in the literature are usually limited to within a few GHz.

[0007] The present invention will provide a fourth method for guiding electromagnetic waves, namely, a device of a radio frequency transmission line that uses dielectric nanowires to guide TEM waves. Summary of the invention

[0008] In view of this, the purpose of the present invention is to provide a new electromagnetic waveguide structure, a device for a radio frequency transmission line that uses dielectric nanowires to guide TEM waves. The inherent electric dipole moment of the space charge region on the surface of the self-organized nanowire generates motional polarization under the action of an external electric field, and the Lorentz force of the magnetic field acts simultaneously, and the elastic displacement polarization of the space charge is used to achieve zero field inside the nanowire and electromagnetic shielding on the surface, and the electromagnetic wave is completely coupled to the space outside the nanowire. The space charge region is used to guide the electromagnetic wave, and the radio frequency transmission line that uses dielectric nanowires to guide TEM waves is realized. When the frequency is greater than 10GHz, the guiding effect is good.

[0009] By utilizing the localization of the electron wave function when the semiconductor surface state is occupied by electrons, a repulsive force is formed on the free electrons, maintaining the separation of positive and negative charges to form an electric dipole moment, thereby maintaining the existence of the surface electric field. This makes the electric field component on the surface of the nanowire have the same properties as the two-dimensional electrostatic field. Under the action of the Lorentz force, the magnetic field generated below the surface and the magnetic field above the surface cancel each other out, thereby maintaining the internal zero field and completely coupling the electromagnetic waves to the outside of the NW to achieve guidance.

[0010] A device for a radio frequency transmission line of a dielectric nanowire guiding a TEM wave, characterized in that the device structure is a coplanar waveguide structure, so that the TEM signal can be fed to the electrode and then transmitted to the nanowire, and the device structure includes: a substrate, a zinc oxide seed layer, a ground signal electrode, a transmission signal electrode, and a zinc oxide nanowire; on the substrate, there are two parallel rectangular zinc oxide seed layers with a spacing in the length direction (the spacing is related to the length of the nanowire, and there is no specific spacing restriction, and it can be adjusted according to the micro-nano process technology); on the outside and top of the two zinc oxide seed layers in the length direction are transmission signal electrodes, and the two zinc oxide seed layers correspond to two transmission signal electrodes, the two transmission signal electrodes are symmetrical, and the transmission signal electrodes The shape is a T-shaped structure polygon composed of a rectangle and an isosceles trapezoid (the wide base of the isosceles trapezoid is in contact with the outer edge of the transmission signal electrode in the length direction, and the narrow base of the isosceles trapezoid is connected with the short side of the rectangle to form a transmission signal electrode with an overall structure of a T-shaped polygon); a ground signal electrode with a rectangular structure is arranged on both end sides of the zinc oxide seed layer, and there is a gap between the ground signal electrode and the zinc oxide seed layer, and the length direction of the zinc oxide seed layer is perpendicular to the length direction of the ground signal electrode; the two ground signal electrodes are parallel, and the zinc oxide seed layer and the transmission signal electrode are both located between the two ground signal electrodes; a zinc oxide nanowire bridged together is grown between the two zinc oxide seed layers, and the zinc oxide nanowire is suspended relative to the substrate, that is, it does not contact the substrate. The zinc oxide seed layer, the ground signal electrode, and the transmission signal electrode are all located on the substrate.

[0011] The T-shaped transmission signal electrode refers to a rectangular side that overlaps with the short side of the two parallel sides in the isosceles trapezoid. The transmission signal electrode exposes the opposite side of the two zinc oxide seed layers to ensure that the zinc oxide nanowires can grow laterally in the middle of the two sub-layers relative to the substrate, and the number of nanowires is proportional to the length of the seed layer (the specific proportionality coefficient is related to the conditions for growing nanowires by micro-nano process and hydrothermal method); with the transmission electrode-seed layer-nanowire-seed layer-transmission electrode as the symmetry axis, there are two identical rectangular ground signal electrodes on both sides of the symmetry axis, the short side of the ground signal electrode is equal to the short side of the transmission signal electrode (the short side of the rectangle), and the long side of the ground signal electrode is the same as the overall length of "transmission electrode-seed layer-nanowire-seed layer-transmission electrode". The spacing between the midpoint perpendicular line of the short side of the ground signal electrode and the midpoint perpendicular line of the short side of the transmission signal electrode is determined according to the specifications of the GSG probe (a three-probe RF test probe, using a ground-signal-ground signal probe configuration) used in the test. In this way, the overall structure of the device is a ground-signal-ground coplanar waveguide structure, and the middle part of the transmission signal line is a zinc oxide nanowire array instead of a metal electrode.

[0012] Preferably, the distance between the two sublayers is 5 microns to 15 microns;

[0013] Preferably, the seed layer length is 100 microns to 180 microns;

[0014] Preferably, the distance between the perpendicular midline of the short side of the ground signal electrode and the perpendicular midline of the short side of the transmission signal electrode is 150 micrometers to 250 micrometers.

[0015] The complete propagation process of electromagnetic wave signals, the test instrument generates TEM signals and feeds them to the ground-signal-ground coplanar waveguide structure through the GSG probe used in the test. The ground signal probe of the probe corresponds to the ground signal electrode in the device structure, and the signal probe of the probe corresponds to the transmission signal electrode in the device structure. After the TEM signal is fed to the coplanar waveguide structure, it couples between the ground electrode and the signal electrode and propagates to the other end of the device structure. When the signal propagates to the nanowire part, the nanowire acts as a transmission signal line, and its number is proportional to the length of the seed layer. The zinc oxide nanowire is coupled with the ground signal lines on both sides. The TEM signal fed by the GSG probe to the coplanar waveguide electrode is now coupled between the nanowire and the ground signal line. The electric field direction is the normal direction of the nanowire surface, and the magnetic field direction is the tangent direction of the nanowire surface. The size and direction of the electric and magnetic fields are constantly changing. The charges in the space charge region of the nanowires produce motional polarization under the action of the external electric field. Combined with the Lorentz force of the magnetic field, the space charges undergo elastic displacement polarization and generate surface currents to maintain the tangential magnetic field, achieving electromagnetic shielding on the surface of the nanowires and zero field inside, thereby guiding TEM waves and realizing the RF transmission line structure of dielectric nanowire-guided TEM waves.

[0016] By utilizing the localization of the electron wave function when the semiconductor surface state is occupied by electrons, a repulsive force is formed on the free electrons, maintaining the separation of positive and negative charges to form an electric dipole moment, thereby maintaining the existence of the surface electric field. This makes the electric field component on the surface of the nanowire have the same properties as the two-dimensional electrostatic field. Under the action of the Lorentz force, the magnetic field generated below the surface and the magnetic field above the surface cancel each other out, thereby maintaining the internal zero field and completely coupling the electromagnetic waves to the outside of the NW to achieve guidance.

[0017] By utilizing the motional polarization of the inherent electric dipole moment of the space charge region on the surface of self-organized nanowires (NW) under the action of an external electric field and the simultaneous action of the Lorentz force of the magnetic field, the elastic displacement polarization of the space charge is used to achieve zero field inside the NW and electromagnetic shielding on the surface, and the electromagnetic waves are completely coupled in the space outside the NW. The space charge region is used to guide the electromagnetic waves, realizing a radio frequency transmission line for dielectric nanowire-guided TEM waves with a frequency greater than 10 GHz. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1A A top view of the coplanar waveguide structure of the radio frequency transmission line of the present invention;

[0019] Figure 1B A three-dimensional diagram of the coplanar waveguide structure of the radio frequency transmission line of the present invention;

[0020] Figure 2 Scanning electron microscope image of the coplanar waveguide structure of the radio frequency transmission line of the present invention;

[0021] Figure 3 Scanning electron microscope image of nanowire bridges in the coplanar waveguide structure of the radio frequency transmission line of the present invention;

[0022] Figure 4A S11 curves measured at different nanowire lengths in Example 1 of the present invention;

[0023] Figure 4B S21 curves measured at different nanowire lengths in Example 1 of the present invention;

[0024] Figure 5A S11 curves measured at different numbers of nanowires in Example 1 of the present invention;

[0025] Figure 5B S21 curves measured at different numbers of nanowires in Example 1 of the present invention;

[0026] Figure 1A , 1B Middle: 1 is substrate; 2 is ground signal electrode; 3 is transmission signal electrode; 4 is zinc oxide seed layer; 5 is zinc oxide nanowire

[0027] Figure 5A , 5BMiddle: The number of nanowires is proportional to the length of the seed layer. DETAILED DESCRIPTION

[0028] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is further described below by way of examples, but this should not be construed as limiting the scope of the above subject matter of the present invention to the following examples.

[0029] Embodiment 1:

[0030] This embodiment provides a radio frequency transmission line for TEM wave guided by dielectric nanowires, and its coplanar waveguide structure is shown in FIG. Figure 1A and Figure 1B , including top view and stereogram; scanning electron microscope image of the overall coplanar waveguide structure is shown in Figure 2 ; For scanning electron microscopy images of the nanowire bridge portion in the coplanar waveguide structure, see Figure 3 .

[0031] A radio frequency transmission line for TEM waves guided by dielectric nanowires utilizes the motional polarization of the inherent electric dipole moment of the space charge region on the surface of a self-organized nanowire (NW) under the action of an external electric field, and the simultaneous action of the Lorentz force of the magnetic field, and realizes zero field inside the NW and electromagnetic shielding on the surface through the elastic displacement polarization of the space charge, completely couples the electromagnetic waves in the space outside the NW, and utilizes the space charge region to guide the electromagnetic waves, thereby realizing a radio frequency transmission line for TEM waves guided by dielectric nanowires, with a frequency greater than 10 GHz.

[0032] The device structure includes: a substrate, a zinc oxide seed layer, a ground signal electrode, a transmission signal electrode, and zinc oxide nanowires; there are two parallel rectangular zinc oxide seed layers with a certain spacing on the substrate (the seed layer spacing in this embodiment is 5 microns and 10 microns). On the outside and top of the two zinc oxide seed layers are two symmetrical transmission signal electrodes, the electrode shape is a polygon composed of a rectangle and an isosceles trapezoid (specifically, a polygon obtained by coinciding the short side of the rectangle with the short side of two parallel sides in the isosceles trapezoid). The transmission signal electrode exposes the opposite sides of a pair of zinc oxide seed layers to ensure that the zinc oxide nanowires can grow laterally in the middle of the two sub-layers relative to the substrate. The number of nanowires is proportional to the length of the seed layer (the seed layer length in this embodiment is 100 microns and 140 microns). The transmission electrode-seed layer-nanowire-seed layer-transmission electrode is used as the symmetry axis, and on both sides of the symmetry axis are two identical rectangular ground signal electrodes. The short side of the ground signal electrode is equal to the short side of the transmission signal electrode, and the long side of the ground signal electrode is the same as the overall length of "transmission electrode-seed layer-nanowire-seed layer-transmission electrode". The distance between the midline of the short side of the ground signal electrode and the midline of the short side of the transmission signal electrode is determined according to the specifications of the GSG probe (a three-probe RF test probe, using a ground-signal-ground signal probe configuration) used in the test. In this way, the overall structure of the device is a ground-signal-ground coplanar waveguide structure, and the middle part of the transmission signal line is a zinc oxide nanowire array instead of a metal electrode.

[0033] The method for preparing the above structure comprises the following steps:

[0034] Step 1: Use 500um thick BF glass as substrate, clean and dry the substrate;

[0035] Step 2: patterning the substrate in step 1 using a photolithography process;

[0036] Step 3: Prepare a zinc oxide seed layer on the substrate patterned in the above step 2 by using sputtering and ultrasonic stripping process;

[0037] Step 4: clean and dry the sample in step 3 again;

[0038] Step 5: Perform secondary patterning on the sample in step 4 using a photolithography process;

[0039] Step 6: Using sputtering and ultrasonic stripping processes, a ground signal electrode and a transmission signal electrode are prepared on the substrate that has been secondarily patterned in the above step 5;

[0040] Step 7: Using a hydrothermal method, generate zinc oxide nanowires on the sample prepared in step 6 above.

[0041] TEM waves, or transverse electromagnetic waves, cannot be effectively transmitted in a single-wire structure. Therefore, the coplanar waveguide structure designed in the present invention plays a prerequisite role in transmitting TEM. The coplanar waveguide electrode structure couples TEM between the transmission signal electrode and the ground signal electrode. TEM propagates forward in the electrode part until the zinc oxide nanowire part. Since the nanowire is suspended relative to the substrate, the magnetic field can surround the nanowire, that is, along the tangent direction of the nanowire surface, while the electric field is along the normal direction of the nanowire surface. The electric field and the magnetic field act simultaneously, causing the space charge region on the surface of the nanowire to undergo motional polarization, generating a polarized current, thereby continuing to maintain the zero field inside the nanowire and the propagation of TEM along the surface of the nanowire, thereby realizing a radio frequency transmission line that uses dielectric nanowires to guide TEM waves.

[0042] The S parameter is an important parameter in the field of microwave technology. The S parameter curve can indicate the absorption and transmission capabilities of the device to a certain extent. S11 is the input return loss, that is, the reflection coefficient of one port when the two ports are matched; S21 is the forward transmission coefficient, that is, the transmission coefficient from one port to the second port when the two ports are matched. There are many ways to express these two parameters. When expressed in dB, the values ​​are all negative. The smaller the value of S11 (the lower the curve), the smaller the reflection coefficient of the curve, which means that there are relatively more successfully incident signals; and the larger the value of S21 (the higher the curve), the larger the transmission coefficient of the curve, which means that there are more signals transmitted from one port to the second port. Generally, -10dB is used as an observation point. When S11 is less than this value, it is considered that 90% of the electromagnetic wave signals are successfully incident; when S21 is greater than this value, it is considered that 90% of the electromagnetic wave signals are successfully transmitted. In view of this, from Figure 4A , 4B It is not difficult to see that when the length of the nanowire is shorter, the S11 curve is lower and the S21 curve is higher, indicating that it has a better transmission effect on electromagnetic wave signals. The longer the transmission line, the worse the transmission effect, and the shorter the transmission line, the better the transmission effect. This is also easy to understand. Figure 5A , 5B It can be found that when the seed layer is longer (more nanowires), the S11 curve is very low and the S21 curve is very high. Based on the -10dB standard, the transmission effect of the zinc oxide nanowires with a 140-micron seed layer is very good and the effective bandwidth is very wide. It can be predicted that the more nanowires there are and the shorter the length, the more obvious their guiding effect on electromagnetic waves.

[0043] The present invention replaces the signal wire in the traditional coplanar waveguide structure with a dielectric nanowire. The TEM signal fed to the electrode at one end is guided to the signal electrode at the other end by the nanowire, so that the electric field is along the normal direction of the nanowire surface and the magnetic field is along the tangent direction. Under the action of the external electric field and the Lorentz force, the space charge region of the nanowire generates motional polarization, realizing the internal zero field and surface electromagnetic shielding of the nanowire, thereby guiding the TEM wave. The coplanar waveguide structure design of the present invention ensures a good guiding effect at a frequency greater than 10GHz.

Claims

1. A device of a radio frequency transmission line for conducting TEM waves using dielectric nanowires, characterized in that: The device structure is a coplanar waveguide structure, and the device structure includes: a substrate, a zinc oxide seed layer, a ground signal electrode, a transmission signal electrode, and a zinc oxide nanowire; on the substrate, there are two parallel rectangular zinc oxide seed layers with a spacing in the length direction; on the outside and top of the two zinc oxide seed layers in the length direction are transmission signal electrodes, and the two zinc oxide seed layers correspond to two transmission signal electrodes, the two transmission signal electrodes are symmetrical, and the transmission signal electrode is a T-shaped structure polygon composed of a rectangle and an isosceles trapezoid, and the isosceles trapezoid is in contact with the outer edge of the transmission signal electrode in the length direction. The wide bottom side of the isosceles trapezoid is connected with the short side of the rectangle to form a transmission signal electrode with a T-shaped polygonal structure; a ground signal electrode with a rectangular structure is arranged on both ends of the zinc oxide seed layer, and there is a gap between the ground signal electrode and the zinc oxide seed layer, and the length direction of the zinc oxide seed layer is perpendicular to the length direction of the ground signal electrode; the two ground signal electrodes are parallel, and the zinc oxide seed layer and the transmission signal electrode are both located between the two ground signal electrodes; zinc oxide nanowires overlapped and grown between the two zinc oxide seed layers, and the zinc oxide nanowires are suspended relative to the bottom of the sink, that is, they do not contact the bottom of the sink. The zinc oxide seed layer, the ground signal electrode, and the transmission signal electrode are all located on the bottom of the sink.

2. A device of a radio frequency transmission line for guiding TEM waves through dielectric nanowires according to claim 1, characterized in that: The T-shaped transmission signal electrode refers to a transmission signal electrode whose side is overlapped with the short side of the two parallel sides in the isosceles trapezoid. The transmission signal electrode exposes the opposite side of the two zinc oxide seed layers to ensure that the zinc oxide nanowires can grow laterally in the middle of the two sub-layers relative to the substrate, and the number of nanowires is proportional to the length of the seed layer; the transmission electrode-seed layer-nanowire-seed layer-transmission electrode is used as the symmetry axis, and two identical rectangular ground signal electrodes are located on both sides of the symmetry axis. The short side of the ground signal electrode is equal to the short side of the transmission signal electrode, that is, the short side of the rectangle, and the long side of the ground signal electrode is the same as the overall length of the "transmission electrode-seed layer-nanowire-seed layer-transmission electrode".

3. A device of a radio frequency transmission line for guiding TEM waves through dielectric nanowires according to claim 1, characterized in that: The distance between the perpendicular midline of the short side of the ground signal electrode and the perpendicular midline of the short side of the transmission signal electrode is determined according to the specification of the GSG probe used in the test.

4. A device of a radio frequency transmission line for guiding TEM waves through dielectric nanowires according to claim 1, characterized in that: The distance between the two sub-layers is 5 microns to 15 microns; the length of the seed layer is 100 microns to 180 microns; The distance between the midline of the short side of the ground signal electrode and the midline of the short side of the transmission signal electrode is 150 micrometers to 250 micrometers.

5. A device of a radio frequency transmission line for conducting TEM waves using dielectric nanowires according to claim 1, characterized in that: The electromagnetic waves are completely coupled to the outside of the nanowires to achieve guidance.

6. A device of a radio frequency transmission line for conducting TEM waves using dielectric nanowires according to claim 1, characterized in that: A radio frequency transmission line that realizes TEM waves guided by dielectric nanowires with a frequency greater than 10 GHz.

7. A device of a radio frequency transmission line for guiding TEM waves through dielectric nanowires according to any one of claims 1 to 6, characterized in that: The complete propagation process of the electromagnetic wave signal: the test instrument generates a TEM signal which is fed to the ground-signal-ground coplanar waveguide structure through the GSG probe used in the test. The ground signal probe of the probe corresponds to the ground signal electrode in the device structure, and the signal probe of the probe corresponds to the transmission signal electrode in the device structure. After the TEM signal is fed to the coplanar waveguide structure, it couples between the ground electrode and the signal electrode and propagates to the other end of the device structure. When the signal propagates to the nanowire part, the nanowire acts as a transmission signal line, and its number is proportional to the length of the seed layer. The zinc oxide nanowire is coupled with the ground signal lines on both sides. The TEM signal fed to the coplanar waveguide electrode by the GSG probe is now coupled between the nanowire and the ground signal line. The direction of the electric field is the normal direction of the nanowire surface, and the direction of the magnetic field is the tangential direction of the nanowire surface. The magnitude and direction of the electric field and the magnetic field are constantly changing. The charges in the space charge region of the nanowire generate motional polarization under the action of the external electric field. Combined with the Lorentz force of the magnetic field, the space charges are elastically displaced and polarized, and surface currents are generated to maintain the tangential magnetic field, thereby realizing electromagnetic shielding on the nanowire surface and internal zero field, and then being able to guide the TEM wave, realizing the RF transmission line structure of dielectric nanowire-guided TEM waves.

8. A method for preparing a device of a radio frequency transmission line for guiding TEM waves using dielectric nanowires according to any one of claims 1 to 6, characterized in that: Including the following corrections: Step 1: Use BF glass as substrate, clean and dry the substrate; Step 2: patterning the seed layer on the substrate in step 1 using a photolithography process, wherein the spacing between a pair of seed layers is 5 microns to 15 microns; Step 3: Using sputtering and ultrasonic stripping process, a ZnO seed layer with a thickness of 80 nanometers to 200 nanometers is prepared on the substrate patterned in the above step 2; Step 4: clean and dry the sample in step 3 again; Step 5: Using a photolithography process, electrode patterning is performed on the sample in the above step 4; Step 6: Using sputtering and ultrasonic stripping processes, Au ground signal electrodes and transmission signal electrodes are prepared on the substrate that has been secondarily patterned in the above step 5, and the electrode thickness is 150 microns to 600 microns; Step 7: Using a hydrothermal method, generate zinc oxide nanowires on the sample prepared in step 6 above.

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