Double-sided staggered conical tooth-shaped traveling wave rotary ultrasonic motor

Abstract

The invention belongs to the technical field of ultrasonic motors, and relates to a double-sided staggered conical tooth-shaped traveling wave rotary ultrasonic motor, which comprises a shell, a stator assembly and a rotor, the rotor comprises a stator base body, a plurality of first piezoelectric ceramic pieces and a plurality of second piezoelectric ceramic pieces, the stator base body is annular, the plurality of first piezoelectric ceramic pieces are uniformly distributed on the inner circumferential surface of the stator base body, and the plurality of second piezoelectric ceramic pieces are uniformly distributed on the outer circumferential surface of the stator base body. The rotor comprises a cylinder and an output shaft, an annular groove is formed in the bottom face of the cylinder, the stator base body is sleeved with the annular groove, the side, away from the annular groove, of the cylinder is fixedly connected with the output shaft, and the output shaft is fixedly connected with the first piezoelectric ceramic piece and the second piezoelectric ceramic piece. The output shaft extends out of the shell and only applies an excitation signal to the first piezoelectric ceramic piece and only applies an excitation signal to the second piezoelectric ceramic piece, and when the excitation signals are applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece at the same time, the stator assembly drives the cylinder to rotate in different modes.

Description

Technical Field

[0001] The invention belongs to the technical field of ultrasonic motors, and in particular relates to a double-sided staggered bevel tooth traveling wave rotary ultrasonic motor. Background Art

[0002] Ultrasonic motors are different from traditional electromagnetic motors. They use the inverse piezoelectric effect of piezoelectric ceramic materials to make the motor stator generate micro-vibrations at ultrasonic frequencies under the action of electrical excitation signals, and transmit them to the rotor (motor) through friction coupling, thereby achieving macroscopic rotation, linear or multi-degree-of-freedom motion. Traveling wave ultrasonic motors are currently more mature in development and application, with advantages such as compact and simple structure, high torque density, fast response, power-off self-locking, and no electromagnetic radiation. As a new type of micro motor, it also has great development potential and very broad application prospects.

[0003] The existing ultrasonic motor includes a piezoelectric driver, a vibrator and a rotor. The piezoelectric driver drives the vibrator to vibrate, and the vibrator drives the rotor to rotate. When the ultrasonic motor operates at its resonant frequency, it can produce the maximum vibration amplitude and the best driving efficiency. Therefore, the driving mode usually needs to match the resonant frequency of the motor, which limits the diversity of the driving mode, resulting in the ultrasonic motor's driving mode usually being designed to be relatively simple. As the application of ultrasonic motors becomes more and more extensive, the existing driving mode of ultrasonic motors cannot meet the requirements of complex working conditions, dynamic changes in speed and torque, and long-term operation. Summary of the invention

[0004] In view of this, the present invention provides a double-sided staggered bevel-tooth traveling wave rotary ultrasonic motor, which can adapt to complex working conditions and dynamic changes in speed and torque.

[0005] The technical solution of the present invention is: A double-sided staggered bevel-toothed traveling wave rotary ultrasonic motor, comprising a housing, and further comprising: A stator assembly is arranged inside the housing, the stator assembly includes a stator matrix, a plurality of first piezoelectric ceramic sheets and a plurality of second piezoelectric ceramic sheets, the stator matrix is ​​annular, a plurality of the first piezoelectric ceramic sheets are evenly arranged on the inner circumference of the stator matrix, a plurality of the second piezoelectric ceramic sheets are evenly arranged on the outer circumference of the stator matrix, and the first piezoelectric ceramic sheets and the second piezoelectric ceramic sheets are both used to receive excitation signals; The rotor comprises a cylinder and an output shaft, wherein the cylinder is arranged inside the shell, an annular groove is formed on the bottom surface of the cylinder, the annular groove is sleeved on the stator assembly, the side of the cylinder facing away from the annular groove is fixedly connected to the output shaft, and the output shaft extends out of the shell; when an excitation signal is applied only to the first piezoelectric ceramic sheet, an excitation signal is applied only to the second piezoelectric ceramic sheet, or an excitation signal is applied to both the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet at the same time, the stator base drives the cylinder to rotate in different modes respectively, and the cylinder drives the output shaft to rotate synchronously.

[0006] Preferably, a plurality of groups of first conical teeth are fixedly provided on the inner circumferential surface of the stator base body, and the plurality of groups of first conical teeth and the plurality of first piezoelectric ceramic sheets are arranged at intervals; a plurality of groups of second conical teeth are fixedly provided on the outer circumferential surface of the stator base body, and the plurality of groups of second conical teeth and the plurality of second piezoelectric ceramic sheets are arranged at intervals; both inner side surfaces of the annular groove are arranged as conical surfaces, and the inner side surface of the annular groove close to the center contacts the first conical teeth, and the inner side surface of the annular groove away from the center contacts the second conical teeth.

[0007] Preferably, four first piezoelectric ceramic sheets are provided, and the polarization directions of two adjacent first piezoelectric ceramic sheets are respectively toward the center of the ring and away from the center of the ring, and the polarization directions of two opposite first piezoelectric ceramic sheets are the same.

[0008] Preferably, four second piezoelectric ceramic sheets are provided, and the polarization directions of two adjacent second piezoelectric ceramic sheets are respectively toward the center of the ring and away from the center of the ring, and the polarization directions of two opposite second piezoelectric ceramic sheets are the same.

[0009] Preferably, the angle between the first piezoelectric ceramic sheet and an adjacent second piezoelectric ceramic sheet is 30°.

[0010] Preferably, the first piezoelectric ceramic sheet or the second piezoelectric ceramic sheet includes one of a PZT-8 lead zirconate titanate piezoelectric ceramic, a PZT-4 lead zirconate titanate piezoelectric ceramic or a PZT-5H lead zirconate titanate piezoelectric ceramic.

[0011] Preferably, the inner circumferential surface and the outer circumferential surface of the stator matrix are both provided with a plurality of positioning grooves, and the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet are respectively fixed in the corresponding positioning grooves.

[0012] Preferably, the housing comprises a base and a motor cover, the motor cover and the base are detachably connected, a limiting groove is provided on the base, the stator base is arranged in the limiting groove, a bearing is provided on the motor cover, and the output shaft passes through the bearing.

[0013] Preferably, a gasket is provided between the stator matrix and the base, and the gasket is made of insulating material.

[0014] Compared with the prior art, the double-sided staggered bevel-toothed traveling wave rotary ultrasonic motor provided by the present invention has the following beneficial effects: By arranging a plurality of first piezoelectric ceramic sheets on the inner circumference of a stator substrate, arranging a plurality of second piezoelectric ceramic sheets on the outer circumference of the stator substrate, and sleeved the rotor on the stator substrate, when in use, an excitation signal is applied only to the first piezoelectric ceramic sheet, an excitation signal is applied only to the second piezoelectric ceramic sheet, and an excitation signal is applied to the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet at the same time. A total of three driving modes can be provided, which can excite the third-order vibration mode of the stator component, thereby synthesizing a traveling wave moving in a circumferential direction on the stator component, and through the friction coupling between the stator substrate and the column of the rotor, the micro-vibration of the stator substrate is transmitted to the column to realize the rotational motion of the output shaft. The three different driving modes can improve the application range of the motor, thereby improving the adaptability to complex working conditions and the driving mode with dynamic changes in speed and torque, and improving the working life of the motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is an exploded view of the overall structure of the present invention.

[0016] Figure 2 It is a schematic diagram of the overall structural assembly of the present invention.

[0017] Figure 3 It is a schematic diagram of the structure of the stator assembly of the present invention.

[0018] Figure 4 It is a schematic structural diagram of the rotor of the present invention.

[0019] Figure 5 Schematic diagram of polarization direction of the present invention.

[0020] Figure 6 This is the third-order vibration mode diagram of the stator assembly of the present invention.

[0021] Description of reference numerals: 1. bearing, 2. motor cover, 3. rotor, 4. stator assembly, 41. stator base, 42. first piezoelectric ceramic sheet, 43. second piezoelectric ceramic sheet, 5. gasket, 6. base. DETAILED DESCRIPTION

[0022] It should be noted that, in the description of the present invention, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0023] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0024] In addition, it should be noted that the connections involved in the present invention can be achieved by using conventional connection methods and do not involve any innovation.

[0025] The subject of the present invention is a double-sided staggered bevel tooth traveling wave rotary ultrasonic motor. The ultrasonic motor is different from the traditional electromagnetic motor. It is a new type of micro motor that uses the inverse piezoelectric effect of piezoelectric ceramic materials to make the motor stator generate a micro-vibration of ultrasonic frequency under the action of an electrical excitation signal, and transmits it to the rotor (motor) through friction coupling, thereby realizing macroscopic rotation, linear or multi-degree-of-freedom motion. The traveling wave ultrasonic motor is currently a relatively mature development and application, with the advantages of compact and simple structure, high torque density, fast response, power-off self-locking, and no electromagnetic radiation. As a new type of micro motor, it also has great development potential and a very broad application prospect.

[0026] The existing ultrasonic motor driving mode is single. As the application of ultrasonic motors becomes more and more extensive, the existing ultrasonic motor driving mode cannot meet the requirements of complex working conditions, dynamic changes in speed and torque, and long-term operation.

[0027] Based on the above reasons, the present invention provides a double-sided staggered bevel tooth traveling wave rotary ultrasonic motor to solve the above-mentioned technical problems. Figures 1 to 6 , the present invention is described in detail.

[0028] Example 1 See also Figure 1-4 This specific embodiment discloses a double-sided staggered bevel tooth traveling wave rotary ultrasonic motor, including a housing, a stator assembly 4, and a rotor 3.

[0029] The stator assembly 4 is arranged in the shell, and the stator assembly 4 includes a stator base 41, a plurality of first piezoelectric ceramic sheets 42 and a plurality of second piezoelectric ceramic sheets 43. The plurality of first piezoelectric ceramic sheets 42 are an inner ring piezoelectric ceramic sheet group, and the plurality of second piezoelectric ceramic sheets 43 are an outer ring piezoelectric ceramic sheet group. The stator base 41 is annular, and the plurality of first piezoelectric ceramic sheets 42 are evenly distributed on the inner circumference of the stator base 41, and the plurality of second piezoelectric ceramic sheets 43 are evenly distributed on the outer circumference of the stator base 41. The first piezoelectric ceramic sheets 42 and the second piezoelectric ceramic sheets 43 are both used to receive excitation signals, and the excitation signals are applied to the first piezoelectric ceramic sheets 42 or the second piezoelectric ceramic sheets 43 through wires. The rotor 3 includes a cylinder and an output shaft. The cylinder is arranged inside the shell. An annular groove is opened on the bottom surface of the cylinder. The annular groove is sleeved on the stator assembly 4. The inner side surface of the annular groove close to the center contacts the inner peripheral surface of the stator base 41, and the inner side surface of the annular groove away from the center contacts the outer peripheral surface of the stator base 41. The side of the cylinder facing away from the annular groove is fixedly connected to the output shaft, and the output shaft extends out of the shell.

[0030] The first piezoelectric ceramic sheet 42 and the second piezoelectric ceramic sheet 43 are both bonded and fixed to the stator matrix 41 by an adhesive, and the adhesive is a mixture of epoxy resin and polyamide resin in a ratio of 1:1.

[0031] The excitation signal is input through the wires connecting the first piezoelectric ceramic plate 42 and the second piezoelectric ceramic plate 43 respectively, and the stator base 41 serves as a common grounding electrode.

[0032] When an excitation signal is applied only to the first piezoelectric ceramic plate 42, an excitation signal is applied only to the second piezoelectric ceramic plate 43, or an excitation signal is applied to both the first piezoelectric ceramic plate 42 and the second piezoelectric ceramic plate 43, the stator assembly 4 drives the cylinder to rotate in different modes respectively, and the cylinder drives the output shaft to rotate synchronously.

[0033] In order to increase the output torque of the rotor 3, a plurality of groups of first conical teeth are fixedly provided on the inner circumference of the stator base 41, and the plurality of first conical teeth and the plurality of first piezoelectric ceramic sheets 42 are arranged at intervals. A plurality of groups of second conical teeth are fixedly provided on the outer circumference of the stator base 41, and the plurality of second conical teeth and the plurality of second piezoelectric ceramic sheets 43 are arranged at intervals. Both inner side surfaces of the annular groove are arranged as conical surfaces, and the inner side surface of the annular groove close to the center contacts the first conical teeth, and the inner side surface of the annular groove away from the center contacts the second conical teeth.

[0034] The conical teeth are beneficial to amplifying the amplitude of the inner and outer circumferential surfaces of the annular stator base 41 in the circumferential direction, and the tooth gap of the conical teeth can accommodate fine chips generated by friction when the ultrasonic motor is running and play a role in heat dissipation.

[0035] The pre-pressure (about 0.4 N in this specific embodiment) is applied by the deadweight of the rotor 3 , and the slight vibration of the stator base 41 is transmitted to the rotor 3 through the friction coupling between the stator base 41 and the rotor 3 , thereby realizing the rotational motion of the rotor 3 .

[0036] The rotor 3 of the present invention is a double inner cone structure, and both inner cones of the structure can be in contact with the stator base 41 to increase the output torque.

[0037] Figure 5 It is a schematic diagram of the polarization direction of the piezoelectric ceramic sheet on the stator substrate in the present invention.

[0038] Considering the spatial structure and the position of the excitation point, the first piezoelectric ceramic sheet 42 is provided with four, such as Figure 5 As shown, the polarization directions of two adjacent first piezoelectric ceramic sheets 42 are opposite, one is toward the center of the ring and the other is away from the center of the ring, and the polarization directions of the two first piezoelectric ceramic sheets 42 are the same. Two groups of piezoelectric ceramic sheets with the same polarization direction can excite a single-phase standing wave.

[0039] Also considering the spatial structure and the position of the excitation point, the second piezoelectric ceramic plate 43 is provided with four Figure 5 As shown, the polarization directions of two adjacent second piezoelectric ceramic sheets 43 are opposite, namely, a direction toward the center of the ring and a direction away from the center of the ring, and the polarization directions of the two second piezoelectric ceramic sheets 43 are the same.

[0040] In order to meet the conditions for synthesizing traveling waves, the first piezoelectric ceramic sheet 42 and an adjacent second piezoelectric ceramic sheet 43 are separated by a quarter wavelength, that is, the angle between the first piezoelectric ceramic sheet 42 and an adjacent second piezoelectric ceramic sheet 43 is 30°, which meets the conditions for synthesizing traveling waves by several first piezoelectric ceramic sheets 42 and several second piezoelectric ceramic sheets 43.

[0041] In this embodiment, the first piezoelectric ceramic sheet 42 can be selected from one of PZT-8 lead zirconate titanate piezoelectric ceramics, PZT-4 lead zirconate titanate piezoelectric ceramics, or PZT-5H lead zirconate titanate piezoelectric ceramics. And the second piezoelectric ceramic sheet 43 can be selected from one of PZT-8 lead zirconate titanate piezoelectric ceramics, PZT-4 lead zirconate titanate piezoelectric ceramics, or PZT-5H lead zirconate titanate piezoelectric ceramics. The working mode d31 of the piezoelectric ceramic sheet is used to realize the traveling wave excitation of the stator component 4.

[0042] In order to achieve the positioning of the piezoelectric ceramic sheets, the inner and outer circumferential surfaces of the stator base 41 are both provided with a plurality of positioning grooves, and the first piezoelectric ceramic sheet 42 and the second piezoelectric ceramic sheet 43 are respectively fixed in the corresponding positioning grooves.

[0043] In order to improve the stability of the output torque, a base 6 is provided at the bottom of the stator base 41. A limiting groove is provided on the base 6. The stator base 41 is arranged in the limiting groove. A gasket 5 is provided between the stator base 41 and the base 6. The gasket 5 is made of insulating material, and a rubber insulating gasket can be selected.

[0044] In this embodiment, the motor cover 2 is detachably connected to the base 6 , and the motor cover 2 is provided with a bearing 1 . The rotor 3 also includes an output shaft, which is fixedly connected to the top of the column and passes through the bearing 1 .

[0045] Working principle of this embodiment In this specific embodiment, the driving mode of the inner ring piezoelectric ceramic sheet group is used to excite the inner ring piezoelectric ceramic sheet group separately. The sine signal of the third-order vibration mode (about 20kHz in this specific embodiment) is abbreviated as sin(wt), and the cosine signal is abbreviated as cos(wt). When the two-way input signals of the inner ring piezoelectric ceramic sheet group are sin(wt) and cos(wt), the stator is excited by the inner ring piezoelectric ceramic sheet group separately to generate a two-phase standing wave of the third-order vibration mode (such as Figure 6 As shown), both the two-phase standing waves satisfy the difference between the spatial phase and the temporal phase of π / 2, so that a traveling wave moving in a circumferential direction can be synthesized on the stator assembly 4, meeting the normal working requirements of the traveling wave rotary ultrasonic motor.

[0046] The standard mode is when the inner ring piezoelectric ceramic plate group is used for independent excitation. The maximum no-load speed is 51.3rpm and the maximum load torque is 1.06N·mm. It is suitable for working environments with moderate speed and torque requirements or large-scale dynamic adjustment of output speed and torque.

[0047] Example 2 Different from Example 1, this specific embodiment uses a driving mode of separately exciting the outer ring piezoelectric ceramic sheet group, and the sine signal of the third-order vibration mode (about 20kHz in this specific embodiment) is abbreviated as sin(wt), and the cosine signal is abbreviated as cos(wt); when the two-way input signals of the outer ring piezoelectric ceramic sheet group are sin(wt) and cos(wt), the stator is excited by the separate excitation of the outer ring piezoelectric ceramic sheet group to generate a two-phase standing wave of the third-order vibration mode (such as Figure 6 As shown), both the two-phase standing waves satisfy the difference between the spatial phase and the temporal phase of π / 2, so that a traveling wave moving in a circumferential direction can be synthesized on the stator assembly 4, meeting the normal working requirements of the traveling wave rotary ultrasonic motor.

[0048] The drive mode using the inner ring piezoelectric ceramic plate group alone for excitation is the standby mode, with a maximum no-load speed of 38.4rpm and a maximum load torque of 0.82N·mm. It is suitable for working environments with low speed and torque requirements or large-scale dynamic adjustment of output speed and torque.

[0049] Example 3 Different from Example 1, this specific embodiment uses a driving mode of jointly exciting the inner and outer piezoelectric ceramic sheet groups, and the sine signal of the third-order vibration mode (about 20kHz in this specific embodiment) is abbreviated as sin(wt), and the cosine signal is abbreviated as cos(wt); when the two-way input signals of the inner and outer piezoelectric ceramic sheet groups are sin(wt) and cos(wt), the stator is excited by the joint excitation of the inner and outer piezoelectric ceramic sheet groups to generate a two-phase standing wave of the third-order vibration mode (such as Figure 6 As shown), both the two-phase standing waves satisfy the difference between the spatial phase and the temporal phase of π / 2, so that a traveling wave moving in a circumferential direction can be synthesized on the stator assembly 4, meeting the normal working requirements of the traveling wave rotary ultrasonic motor.

[0050] When the driving mode of using the inner and outer piezoelectric ceramic plate groups to excite separately is the enhanced mode, the maximum no-load speed is 96.4rpm, and the maximum load torque is 1.82N·mm. It is suitable for working environments with high speed and torque requirements or large-scale dynamic adjustment of output speed and torque.

[0051] The above disclosure is only a preferred specific embodiment of the present invention, but the embodiments of the present invention are not limited thereto, and any changes that can be conceived by those skilled in the art should fall within the protection scope of the present invention.

Claims

1. A double-sided staggered bevel tooth traveling wave rotary ultrasonic motor, comprising a housing, characterized in that: Also includes: A stator assembly (4) is arranged inside the housing, the stator assembly (4) comprising a stator base (41), a plurality of first piezoelectric ceramic sheets (42) and a plurality of second piezoelectric ceramic sheets (43), the stator base (41) being annular, the plurality of first piezoelectric ceramic sheets (42) being evenly distributed on the inner circumference of the stator base (41), the plurality of second piezoelectric ceramic sheets (43) being evenly distributed on the outer circumference of the stator base (41), the first piezoelectric ceramic sheets (42) and the second piezoelectric ceramic sheets (43) both being used to receive excitation signals; A rotor (3) comprising a column and an output shaft, wherein the column is arranged inside the shell, an annular groove is formed on the bottom surface of the column, the annular groove is sleeved on the stator assembly (4), a side of the column away from the annular groove is fixedly connected to the output shaft, and the output shaft extends out of the shell; when an excitation signal is applied only to the first piezoelectric ceramic sheet (42), when an excitation signal is applied only to the second piezoelectric ceramic sheet (43), or when an excitation signal is applied to both the first piezoelectric ceramic sheet (42) and the second piezoelectric ceramic sheet (43), the stator base (41) drives the column to rotate in different modes respectively, and the column drives the output shaft to rotate synchronously.

2. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 1, characterized in that: The inner circumferential surface of the stator base (41) is fixedly provided with a plurality of groups of first conical teeth, and the plurality of groups of first conical teeth and the plurality of first piezoelectric ceramic sheets (42) are arranged at intervals; the outer circumferential surface of the stator base (41) is fixedly provided with a plurality of groups of second conical teeth, and the plurality of groups of second conical teeth and the plurality of second piezoelectric ceramic sheets (43) are arranged at intervals; the two inner side surfaces of the annular groove are both arranged as conical surfaces, the inner side surface of the annular groove close to the center contacts the first conical teeth, and the inner side surface of the annular groove away from the center contacts the second conical teeth.

3. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 1, characterized in that: Four first piezoelectric ceramic sheets (42) are provided, and the polarization directions of two adjacent first piezoelectric ceramic sheets (42) are respectively a direction towards the center of the ring and a direction away from the center of the ring, and the polarization directions of two first piezoelectric ceramic sheets (42) relative to each other are the same.

4. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 3, characterized in that: Four second piezoelectric ceramic sheets (43) are provided, and the polarization directions of two adjacent second piezoelectric ceramic sheets (43) are respectively a direction towards the center of the ring and a direction away from the center of the ring, and the polarization directions of two relative second piezoelectric ceramic sheets (43) are the same.

5. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 4, characterized in that: The angle between the first piezoelectric ceramic sheet (42) and an adjacent second piezoelectric ceramic sheet (43) is 30°.

6. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 1, characterized in that: The first piezoelectric ceramic sheet (42) or the second piezoelectric ceramic sheet (43) comprises one of a PZT-8 type lead zirconate titanate piezoelectric ceramic, a PZT-4 type lead zirconate titanate piezoelectric ceramic or a PZT-5H type lead zirconate titanate piezoelectric ceramic.

7. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 1, characterized in that: The inner circumferential surface and the outer circumferential surface of the stator base body (41) are both provided with a plurality of positioning grooves, and the first piezoelectric ceramic sheet (42) and the second piezoelectric ceramic sheet (43) are respectively fixed in the corresponding positioning grooves.

8. The double-sided staggered bevel-toothed traveling wave rotary ultrasonic motor according to claim 1, characterized in that: The housing comprises a base (6) and a motor cover (2); the motor cover (2) and the base (6) are detachably connected; a limiting groove is provided on the base (6); the stator base (41) is arranged in the limiting groove; a bearing (1) is provided on the motor cover (2); and the output shaft passes through the bearing (1).

9. The double-sided staggered bevel tooth traveling wave rotary ultrasonic motor according to claim 8, characterized in that: A gasket (5) is provided between the stator base (41) and the base (6), and the gasket (5) is made of insulating material.

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