Valve component

Abstract

The valve component is provided with: first metal plates (31, 33) having through-holes (3A3, 3B3); and a second metal plate (32) having a base part (32a) in which passage holes (3A4, 3B4) formed in a region overlapping the through holes (3A3, 3B3) are formed, valve bodies (3A5, 3B5) capable of closing the through holes (3A3, 3B3), and a pair of valve support parts (3A6, 3B6) for supporting the valve bodies (3A5, 3B5) on the base part (32a) so that the valve bodies (3A5, 3B5) are positioned within the passage holes (3A4, 3B4). The second metal plate (32) is joined to the first metal plates (31, 33) such that the valve bodies (3A5, 3B5) face the edges of the through holes (3A3, 3B3). Wherein the valve support portion (3A6, 3B6) has a base portion-side end portion (3A7, 3B7), an intermediate portion (3A8, 3B8), and a valve body-side end portion (3A9, 3B9), both end portions having center lines (C1, C2) in the width direction overlapping a reference center line (S) passing through the center (O) of the valve body (3A5, 3B5), and having a width dimension smaller than the valve body (3A5, 3B5) and the base portion (32a). The intermediate portions (3A8, 3B8) have a shape extending in a direction orthogonal to the reference center line (S) to a position away from the reference center line (S), and the first metal plates (31, 33) have a shape intersecting the reference center line (S) and have through portions (3A10) penetrating the intermediate portions (3A8, 3B8) in the plate thickness direction.

Description

Technical Field

[0001] The present invention relates to a valve component for constituting a valve structure formed of a plurality of metal plates stacked on each other. Background Art

[0002] As a valve structure formed of a plurality of metal plates stacked on each other, for example, a valve structure disclosed in Patent Document 1 and used in a micro pump is known.

[0003] The micro pump disclosed in Patent Document 1 comprises: a middle plate and a fixed plate, each of which has a hole for passing a fluid; and a valve plate, which has a valve mechanism disposed between the hole of the middle plate and the hole of the fixed plate, and is clamped between the middle plate and the fixed plate. In the micro pump, a valve structure is formed by the valve mechanism of the middle plate and the valve plate. According to the valve structure, the hole of the middle plate is closed based on the abutment of the valve mechanism with the middle plate, thereby limiting the flow of the fluid from the hole of the fixed plate to the hole of the middle plate, and allowing the fluid to flow in the opposite direction.

[0004] When manufacturing the micro pump, the valve plate is fixed to the middle plate and the fixing plate in a high temperature environment and then returns to a room temperature environment.

[0005] The valve plate comprises: a base with a through hole for passing fluid; a valve mechanism arranged in the through hole; an abutment portion for closing the hole of the middle plate; and two support portions connected to the base and supporting the abutment portion in the through hole.

[0006] In the micro pump described in Patent Document 1, a valve plate having a linear expansion coefficient larger than those of the fixed plate and the middle plate is used to generate a force for causing the abutment portion to abut against the periphery of the hole in the middle plate, and the mechanical rigidity of the fixed plate is made smaller than that of the middle plate by making the hole in the fixed plate larger than the hole in the middle plate.

[0007] Therefore, when the micro pump is manufactured, when the high temperature environment is restored to the room temperature environment, the valve plate shrinks more than the fixed plate and the middle plate due to the difference in linear expansion coefficient, thereby generating compressive stress. Here, since the mechanical rigidity of the fixed plate is smaller than that of the middle plate, the valve plate is deformed due to the compressive stress so that the abutting portion moves toward the hole of the middle plate. Patent document 1 describes that the force for causing the abutting portion to abut against the hole of the middle plate is obtained in this way.

[0008] However, in order to maintain the closed state of the hole of the middle plate when no opening force is applied to the valve mechanism, the abutment portion is sometimes configured to contact or approach the middle plate. In this case, in the high temperature environment during the manufacture of the micro pump, if the valve mechanism further expands when the abutment portion is in contact with the middle plate, the valve mechanism may be displaced in the direction away from the middle plate. In this case, when no opening force is applied to the valve mechanism, a gap is generated between the hole of the middle plate and the valve mechanism, resulting in useless fluid flow.

[0009] Prior art literature Patent Literature Patent Document 1: Japanese Patent Publication No. 2005-83212 Summary of the invention

[0010] The present invention is made in view of the above-mentioned problems, and its purpose is to provide a valve component for constituting the following valve structure, which can suppress the occurrence of a gap between the hole (through hole) of the middle plate and the valve mechanism (valve body) when no opening force is applied to the valve mechanism (valve body).

[0011] Solutions for solving problems

[0012] The valve component involved in the first invention is used to constitute a valve structure, which includes: a first metal plate having a through hole; and a second metal plate having a base, a valve body, and a pair of valve support parts, wherein the base is formed with a through hole formed in an area overlapping with the through hole, and the valve body is able to close the through hole based on contact with the edge of the through hole, and the pair of valve support parts support the valve body on the base in a manner such that the valve body is located in the through hole, and the second metal plate is joined to the first metal plate in a predetermined positional relationship in a manner such that the valve body is located opposite to the edge of the through hole; wherein the pair of valve support parts respectively have a base side end portion, an intermediate portion, and a valve body side end portion, the base side end portion extends from the edge of the through hole in the base toward the valve body, and the intermediate portion is arranged The distal end of the base side end portion, the valve body side end portion extends from the middle portion to the valve body, the base side end portion and the valve body side end portion respectively have a center line in the width direction that passes through the center of the valve body and overlaps with a reference center line extending along the surface of the second metal plate in a plate-orthogonal direction and at an orthogonal viewpoint of observing the second metal plate, and have a width dimension smaller than that of the valve body and the base, the middle portion has a shape that extends to a position away from the reference center line in an extension direction orthogonal to the reference center line relative to the base side end portion and the valve body side end portion at the orthogonal viewpoint, and a through portion having a shape that intersects the reference center line at the orthogonal viewpoint and penetrates the middle portion in the plate thickness direction is provided in the middle portion.

[0013] According to the present invention, it is possible to provide a valve structure capable of suppressing the occurrence of a gap between a through hole and a valve body in a state where no opening force is applied to the valve body.

[0014] The objects, features and advantages of the present invention will become more apparent from the following detailed description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a longitudinal sectional view schematically showing the micro pump according to the first embodiment. Figure 2 This is a plan view of the valve structure according to the first embodiment when viewed from the +z direction toward the −z direction. Figure 3 It means in Figure 2 A three-dimensional diagram of the state when cut at line III-III. Figure 4 This is a top view when the ninth plate is viewed from the +z direction toward the -z direction. Figure 5 This is a top view of the 10th plate when viewed from the +z direction toward the -z direction. Figure 6 This is a top view of the 11th plate when viewed from the +z direction toward the -z direction. Figure 7 It is a plan view showing an enlarged view of the introduction valve of the tenth plate. Figure 8 yes Figure 4 Cross-sectional view taken along line VIII-VIII of FIG. Fig. 9 It is a perspective view showing an enlarged view of the introduction valve of the tenth plate. Fig.10 It is a plan view showing an enlarged view of the introduction valve of the tenth plate according to the second embodiment. Fig.11 It is a plan view showing an enlarged view of the introduction valve of the tenth plate according to the third embodiment. Fig.12 It is a plan view showing an enlarged view of the introduction valve of the tenth plate according to the fourth embodiment. DETAILED DESCRIPTION

[0016] Hereinafter, a valve structure formed of a valve component according to an embodiment of the present invention and a micro pump having the valve structure will be described with reference to the drawings.

[0017] [First embodiment]

[0018] Figure 1 It is a longitudinal sectional view schematically showing the micro pump according to the first embodiment.

[0019] Hereinafter, the overall structure and operation of the micro pump according to the present embodiment will be described in general terms first, and then the valve structure will be described in detail.

[0020] In this embodiment, Figure 1 To the right of Figure 1 The direction from the inlet valve structure 3A to the outlet valve structure 3B shown in FIG. 1 is taken as the +x direction, and the opposite direction is taken as the -x direction. The +x direction and the -x direction are collectively referred to as the first direction x. Figure 1 The direction in which each of the first plate 21 to the thirteenth plate 42 extends is perpendicular to the first direction x as the second direction y, and Figure 1 The paper depth direction is defined as the +y direction, and the paper front direction is defined as the -y direction. The direction perpendicular to each surface of the first plate 21 to the 13th plate 42 is defined as the third direction z, and the direction from the first plate 21 to the 13th plate 42 is defined as the +z direction, and the opposite direction is defined as the -z direction.

[0021] like Figure 1 As shown, the micro pump 1 comprises: a flow channel portion 2 having a flow channel for a fluid; a valve structure 3 that limits the flow direction of the fluid flowing in the flow channel portion 2 to one direction; a pump portion 4 that imparts flow force to the fluid; and a piezoelectric element 5 that drives the pump portion 4.

[0022] The flow channel portion 2 has: an inlet 2a for introducing fluid; a discharge port 2b for discharging fluid; an inlet flow channel 2c for guiding the fluid introduced from the inlet 2a to the valve structure 3; a discharge flow channel 2d for guiding the fluid discharged from the valve structure 3 to the discharge port 2b; a flow channel portion side diaphragm 2e for dividing the inlet flow channel 2c and the discharge flow channel 2d; and a flow channel portion valve seat 2f for being provided on the discharge flow channel 2d side of the flow channel portion side diaphragm 2e. The flow channel portion side diaphragm 2e is elastically deformable, and when the pressure of the fluid flowing in the inlet flow channel 2c is higher than the pressure of the fluid flowing in the discharge flow channel 2d by a specified pressure or more, as shown in FIG. Figure 1 As shown by the dotted line in the figure, it deforms in the +z direction to stop the fluid from being discharged.

[0023] The valve structure 3 includes an inlet-side valve structure 3A connected to the inlet flow path 2c and a discharge-side valve structure 3B connected to the discharge flow path 2d. The inlet-side valve structure 3A includes an inlet valve 3A1 and an inlet valve seat 3A2 for closing the inlet flow path 2c between the inlet valve 3A1 and the discharge-side valve structure 3B includes a discharge valve 3B1 and a discharge valve seat 3B2 for closing the discharge flow path 2d between the discharge valve 3B1 and the discharge valve structure 3B. Details of the inlet-side valve structure 3A and the discharge-side valve structure 3B will be described later.

[0024] The pump section 4 includes: a pump side diaphragm 4a, which is arranged to face the valve structure 3; a side wall 4b, which rises from the periphery of the pump side diaphragm 4a toward the valve structure 3; and a pump chamber 4c. The pump chamber 4c is a space surrounded by the pump side diaphragm 4a, the side wall 4b, and the valve structure 3, and is connected to the inlet flow channel 2c via the inlet side valve structure 3A, and is connected to the discharge flow channel 2d via the discharge side valve structure 3B. The pump side diaphragm 4a corresponds to the operation of the piezoelectric element 5. Figure 1 The pump chamber 4c elastically deforms in the +z direction as indicated by the dashed line or in the -z direction as indicated by the dotted line, thereby causing the pressure in the pump chamber 4c to change, causing the fluid in the inlet flow path 2c, the pump chamber 4c and the discharge flow path 2d to flow.

[0025] When the pressure on the upstream side of the introduction valve 3A1 in the introduction flow path 2c is lower than the pressure in the pump chamber 4c, the introduction valve 3A1 and the introduction valve seat 3A2 are in close contact with each other to close the introduction flow path 2c. On the other hand, when the pressure on the upstream side of the introduction valve 3A1 is higher than the pressure in the pump chamber 4c, the introduction valve 3A1 is closed. Figure 1 As shown by the dotted line in the figure, it elastically deforms in the +z direction and leaves the introduction valve seat 3A2, thereby opening the introduction flow path 2c.

[0026] When the pressure in the pump chamber 4c is lower than the pressure on the downstream side of the discharge valve 3B1 in the discharge flow path 2d, the discharge valve 3B1 is tightly fitted with the discharge valve seat 3B2 to close the discharge flow path 2d. On the other hand, when the pressure in the pump chamber 4c is higher than the pressure on the downstream side of the discharge valve 3B1, the discharge valve 3B1 is closed. Figure 1 As shown by the dot-dash line, the valve body 3B2 elastically deforms in the -z direction and leaves the discharge valve seat 3B2, thereby opening the discharge flow path 2d.

[0027] The flow channel portion 2, the valve structure 3, and the pump portion 4 of the micro pump 1 are formed by laminating a plurality of metal plates and bonding adjacent metal plates to each other. Figure 1 As shown, the flow channel portion 2 is formed by the first plate 21 to the eighth plate 28, the valve structure 3 is formed by the ninth plate 31 to the eleventh plate 33, and the pump portion 4 is formed by the twelfth plate 41 and the thirteenth plate 42. These metal plates are heated in a state where they are stacked in a predetermined positional relationship, and adjacent metal plates are diffusion-bonded to each other. These metal plates can be steel plates obtained by cold rolling austenitic stainless steel such as SUS316, and are heated to a temperature above the austenitizing temperature to be bonded.

[0028] The flow channel portion 2 has an inlet 2a and a discharge port 2b formed in the first plate 21, and an inlet flow channel 2c and a discharge flow channel 2d formed in the second plate 22 to the eighth plate 28. In addition, the portion between the inlet flow channel 2c and the discharge flow channel 2d of the fourth plate 24 constitutes a flow channel portion side diaphragm 2e, and a flow channel portion valve seat 2f is formed on the surface of the sixth plate 26 facing the fourth plate 24.

[0029] As for the valve structure 3, the inlet flow channel 2c, the inlet valve seat 3A2, and the discharge flow channel 2d are formed on the 9th plate 31, the inlet valve 3A1 and the discharge valve 3B1 are formed on the 10th plate 32, and the inlet flow channel 2c, the discharge flow channel 2d, and the discharge valve seat 3B2 are formed on the 11th plate 33.

[0030] In the pump unit 4 , the side wall 4 b is formed on the twelfth plate 41 , and a pump chamber 4 c is formed together with the thirteenth plate 42 .

[0031] Reference Figure 1 The specific operation of the micro pump 1 will be described.

[0032] When AC power is supplied to the piezoelectric element 5 in the stopped state of the micropump 1, the piezoelectric element 5 is operated, and accordingly, the pump-side diaphragm 4a vibrates in the +z direction and the −z direction.

[0033] If the pump-side diaphragm 4a is displaced in the +z direction, that is, in the direction of expansion toward the pump chamber 4c, as shown by the dotted line, the pressure on the upstream side of the introduction valve 3A1 becomes higher than the pressure in the pump chamber 4c, and therefore, the introduction valve 3A1 opens the introduction flow channel 2c as shown by the dotted line. At this time, since the pressure in the pump chamber 4c is lower than the pressure on the downstream side of the discharge valve 3B1, the discharge valve 3B1 closes the discharge flow channel 2d. As a result, the fluid is introduced from the outside of the micro pump 1 through the introduction port 2a and the introduction flow channel 2c into the pump chamber 4c.

[0034] Thereafter, if the pump side diaphragm 4a is displaced in the -z direction, that is, in the direction of shrinking the pump chamber 4c, as shown by the dotted line, the pressure on the upstream side of the inlet valve 3A1 is lower than the pressure in the pump chamber 4c, and therefore, the inlet valve 3A1 closes the inlet flow channel 2c. At this time, since the pressure in the pump chamber 4c is higher than the pressure on the downstream side of the discharge valve 3B1, the discharge valve 3B1 opens the discharge flow channel 2d as shown by the dotted line. Thus, the fluid is discharged from the pump chamber 4c through the discharge flow channel 2d and the discharge port 2b to the outside of the micro pump 1. By repeating this action, the fluid can flow in one direction in the micro pump 1. In addition, the flow rate of the fluid can be controlled by controlling the power supply time to the piezoelectric element 5 or the frequency of the supplied AC power.

[0035] When the pressure of the fluid flowing in the inlet flow channel 2c is higher than the pressure of the fluid flowing in the discharge flow channel 2d by a predetermined pressure or more, the flow channel side diaphragm 2e is elastically deformed in the +z direction as shown by the dotted line and contacts the flow channel valve seat 2f, thereby restricting the flow of the fluid through the discharge flow channel 2d.

[0036] Next, the valve structure 3 according to the present embodiment will be described in detail.

[0037] Figure 2 This is a top view of the valve structure 3 when viewed from the +z direction toward the -z direction. Figure 3 It means in Figure 2 A three-dimensional diagram of the state when cut at line III-III. Figure 4 This is a plan view of the ninth plate 31 as viewed from the +z direction toward the -z direction. Figure 5 This is a plan view when the tenth plate 32 is viewed from the +z direction toward the -z direction. Figure 6 This is a top view of the 11th plate 33 when viewed from the +z direction toward the -z direction. Figure 7 FIG. 1 is an enlarged plan view showing the introduction valve 3A1 of the tenth plate 32. Figure 8 yes Figure 4 Cross-sectional view taken along line VIII-VIII of FIG.

[0038] As described above, the valve structure 3 includes the inlet valve structure 3A and the outlet valve structure 3B. The inlet valve structure 3A includes the inlet valve 3A1 and the inlet valve seat 3A2, and the outlet valve structure 3B includes the outlet valve 3B1 and the outlet valve seat 3B2.

[0039] like Figures 2 to 5 As shown, the introduction side valve structure 3A comprises: a ninth plate 31 (first metal plate) having an introduction side through hole 3A3 (through hole); and a tenth plate 32 (second metal plate) joined to the ninth plate 31. The tenth plate 32 comprises: a base 32a having an introduction side through hole 3A4 (through hole) formed in a region overlapping with the introduction side through hole 3A3; and an introduction valve 3A1 disposed in the introduction side through hole 3A4. The introduction side through hole 3A3 constitutes a part of the introduction flow channel 2c.

[0040] like Figure 3 , 5 As shown, the inlet valve 3A1 includes: a valve body 3A5, which can close the inlet side through hole 3A3 by contacting the edge of the inlet side through hole 3A3; and a pair of valve support parts 3A6, which support the valve body 3A5 on the base 32a in a manner that the valve body 3A5 faces the edge of the inlet side through hole 3A3 (inlet valve seat 3A2) in the inlet side through hole 3A4.

[0041] like Figure 7 As shown, a pair of valve support portions 3A6 respectively include: a base side end portion 3A7, extending from the inlet side in the base 32a through the edge of the hole 3A4 toward the valve body 3A5; a middle portion 3A8, which is arranged at the distal end of the base side end portion 3A7; and a valve body side end portion 3A9, which extends from the middle portion 3A8 to the valve body 3A5.

[0042] In the present embodiment, when observing the tenth plate 32 from an orthogonal viewpoint (hereinafter sometimes referred to as a "z-direction viewpoint") in a plate-orthogonal direction (third direction z) orthogonal to the surface of the tenth plate 32, a line passing through the center O of the valve body 3A5 and extending in the second direction y along the surface of the tenth plate 32 is defined as a reference center line S. The base side end portion 3A7 and the valve body side end portion 3A9 have center lines C1 and C2 in the width direction overlapping the reference center line S, respectively.

[0043] In addition, the base side end portion 3A7 and the valve body side end portion 3A9 both have a smaller width dimension than the valve body 3A5 and the base 32a. Specifically, the width dimension W1 of the base side end portion 3A7 and the width dimension W2 of the valve body side end portion 3A9 are both smaller than the width dimension W3 of the valve body 3A5 and the width dimension W4 of the base 32a (see Figure 5 ) In addition, the width direction used as a reference for the width dimensions W1 to W4 is a direction (first direction x) orthogonal to the reference center line S from the z-direction viewpoint.

[0044] The middle portion 3A8 has a shape extending to a position away from the reference center line S in the extension direction (first direction x) perpendicular to the reference center line S relative to the base side end portion 3A7 and the valve body side end portion 3A9 from the z-direction viewpoint. In addition, the middle portion 3A8 has a shape intersecting the reference center line S from the z-direction viewpoint, and has a through portion 3A10 penetrating the middle portion 3A8 in the plate thickness direction. In the present embodiment, the middle portion 3A8 has a shape extending only in one direction (-x direction) of the extension direction, and the through portion 3A10 has a shape opening toward the other direction (+x direction) of the extension direction.

[0045] like Figure 3 , 4 As shown in FIG. 7 , the ninth plate 31 has a limiting portion 3A12 that limits displacement of the middle portion 3A8 in a direction (−z direction) approaching the ninth plate 31 at a position facing the middle portion 3A8 in the third direction z.

[0046] The ninth plate 31 is provided with a recess 31a which opens toward the tenth plate 32 at a position facing the introduction side through hole 3A4 in the third direction z. The restricting portion 3A12 protrudes from the bottom surface of the recess 31a toward the tenth plate 32. In addition, the introduction valve seat 3A2 also protrudes from the bottom surface of the recess 31a toward the tenth plate 32. Figure 8 As shown, the restriction portion 3A12 and the introduction valve seat 3A2 have the same protrusion height. Such a restriction portion 3A12 and the introduction valve seat 3A2 can be formed by, for example, etching a metal plate.

[0047] like Figure 3 , 6As shown, in the 11th plate 33, an opening 33a is provided at a position facing the introduction side through hole 3A4 in the third direction z. The opening 33a forms a space that allows the introduction valve 3A1 to be elastically deformed in the +z direction. In addition, the opening 33a constitutes a part of the introduction flow channel 2c.

[0048] The discharge-side valve structure 3B has a structure in which the introduction-side valve structure 3A is reversed in the third direction z. Specifically, in the discharge-side valve structure 3B, the 11th plate 33 plays the role of the 9th plate 31 in the introduction-side valve structure 3A. The following mainly describes the differences between the discharge-side valve structure 3B and the introduction-side valve structure 3A.

[0049] like Figure 2 , 4 As shown in Fig. 6, the discharge side valve structure 3B includes: an 11th plate 33 (first metal plate) and a 10th plate 32 (second metal plate) joined to the 11th plate 33. That is, the discharge side valve structure 3B and the introduction side valve structure 3A share the 10th plate 32. In addition to the opening 33a, the 11th plate 33 is provided with a discharge side through hole 3B3 (through hole) constituting the discharge side valve structure 3B. The discharge side through hole 3B3 constitutes a part of the discharge flow path 2d.

[0050] like Figure 5 As shown, in the base 32a of the tenth plate 32 (second metal plate), in addition to the introduction side through hole 3A4 constituting the introduction side valve structure 3A, a discharge side through hole 3B4 (through hole) formed in a region overlapping with the discharge side through hole 3B3 is formed. The tenth plate 32 has a discharge valve 3B1 disposed in the discharge side through hole 3B4 in addition to the base 32a and the introduction valve 3A1.

[0051] The discharge valve 3B1 includes: a valve body 3B5, which can close the discharge side through hole 3B3 by contacting the edge of the discharge side through hole 3B3; and a pair of valve support parts 3B6, which support the valve body 3B5 on the base 32a in a manner that the valve body 3B5 faces the edge of the discharge side through hole 3B3 (discharge valve seat 3B2) in the discharge side through hole 3B4.

[0052] The pair of valve support parts 3B6 of the discharge valve 3B1 each have a base side end, a middle part, and a valve body side end. Figure 5 As shown, the valve support portion 3B6 has the same structure as the valve support portion 3A6 of the introduction side valve structure 3A except that it has a shape symmetrical to the introduction side valve structure 3A in the first direction x. Therefore, the description of the various parts of the valve support portion 3B6 is omitted.

[0053] like Figure 6As shown, the 11th plate 33 has, in addition to the opening 33a, a restriction portion 3B12 at a position facing the middle portion 3B8 in the third direction z for restricting displacement of the middle portion 3B8 in a direction approaching the 11th plate 33 (+z direction).

[0054] The 11th plate 33 is formed with a recessed portion 33b that opens toward the 10th plate 32. The restricting portion 3B12 protrudes from the bottom surface of the recessed portion 33b toward the 10th plate 32. In addition, the above-mentioned discharge valve seat 3B2 also protrudes from the bottom surface of the recessed portion 33b toward the 10th plate 32. The restricting portion 3B12 and the discharge valve seat 3B2 also have the same protruding height. Such a restricting portion 3B12 and the discharge valve seat 3B2 can be formed by, for example, etching a metal plate.

[0055] In addition, if Figure 4 As shown in FIG. 1 , in addition to the recess 31a, the ninth plate 31 is also provided with a recess 31b that opens toward the tenth plate 32 at a position that faces the discharge side through hole 3B4 in the third direction z. Two through holes 31c that penetrate in the third direction z are formed in the recess 31b. The region between the two through holes 31c is provided at a position that faces the valve body 3B5 in the third direction z, and when the discharge valve 3B1 is elastically deformed in the -z direction, the movement of the valve body 3B5 is restricted so that the valve body 3B5 does not excessively move in the -z direction.

[0056] When manufacturing the valve structure 3, the ninth plate 31, the tenth plate 32, and the eleventh plate 33 are diffusion-bonded in a state where they are positioned in a predetermined positional relationship. In a state where the ninth plate 31, the tenth plate 32, and the eleventh plate 33 are positioned in this positional relationship, in the third direction z, the valve body 3A5 faces the edge of the introduction-side through hole 3A3, the middle portion 3A8 faces the restriction portion 3A12, and the valve body 3B5 faces the edge of the discharge-side through hole 3B3, and the middle portion 3B8 faces the restriction portion 3B12. The ninth plate 31, the tenth plate 32, and the eleventh plate 33 are provided with through holes 31m, 32m, and 33m for alignment at their corners, respectively. By inserting pins or the like into the through holes 31m, 32m, 33m to position the through holes 31m, 32m, 33m, the ninth plate 31, the tenth plate 32, and the eleventh plate 33 can be easily stacked in a predetermined positional relationship.

[0057] The ninth plate 31 , the tenth plate 32 , and the eleventh plate 33 are heated in the stacked state, and the tenth plate 32 , the ninth plate 31 , and the eleventh plate 33 are bonded to each other.

[0058] (Function, Effect)

[0059] In the valve components constituting the valve structure 3 involved in the first embodiment, the first example has the ninth plate 31 and the tenth plate 32, and the second example has the tenth plate 32 and the eleventh plate 33. The inlet-side valve structure 3A is constituted by the valve components of the first example. In addition, the discharge-side valve structure 3B is constituted by the valve components of the second example. The following describes the effects of the valve components involved in the first example and the second example.

[0060] When manufacturing the micro pump 1, the ninth plate 31, the tenth plate 32, and the eleventh plate 33 are heated and bonded in a stacked state. At this time, each metal plate thermally expands, and crystal grains constituting the metal plate grow.

[0061] During heating, in the introduction-side valve structure 3A, the pair of valve support portions 3A6 and the valve body 3A5 are constrained in the direction along the reference center line S based on the base 32a, and in the discharge-side valve structure 3B, the pair of valve support portions 3B6 and the valve body 3B5 are constrained in the direction along the reference center line S based on the base 32a. Therefore, in either the introduction-side valve structure 3A or the discharge-side valve structure 3B, the pair of valve support portions 3A6, 3B6 and the valve bodies 3A5, 3B5 receive a compressive force from the base 32a in the direction along the reference center line S due to thermal expansion.

[0062] At this time, the middle portion 3A8 of the valve support portion 3A6 is deformed in the direction of reducing the gap formed by the through portion 3A10 based on the compressive force, and can absorb the compressive force received by the base side end portion 3A7 of the valve support portion 3A6, the valve body side end portion 3A9, and the valve body 3A5. Therefore, the effect of bending and deforming the valve support portion 3A6 and the valve body 3A5 in the thickness direction due to the compressive force can be suppressed. In the discharge side valve structure 3B, the effect of bending and deforming the valve support portion 3B6 and the valve body 3B5 in the thickness direction due to the compressive force can also be suppressed.

[0063] Furthermore, during the above heating, the temperature of the surface of the pair of valve support parts 3A6 and the valve body 3A5 facing the ninth plate 31 is higher than the temperature of the surface on the opposite side of the surface facing the ninth plate 31, and the temperature of the surface of the pair of valve support parts 3B6 and the valve body 3B5 facing the eleventh plate 33 is higher than the temperature of the surface on the opposite side of the surface facing the eleventh plate 33. The reason is as follows.

[0064] The valve body 3A5 is arranged to contact or approach the 9th plate 31 in order to close the introduction side through hole 3A3 without receiving external force. On the other hand, in order to allow the valve body 3A5 to move in the opening direction, a larger space is ensured in the direction of the valve body 3A5 away from the 9th plate 31 than the space relative to the 9th plate 31. Moreover, based on the above-mentioned heating, heat is transferred from the 9th plate 31 to the valve body 3A5, whereby the temperature of the surface of the pair of valve support parts 3A6 and the valve body 3A5 facing the 9th plate 31 is higher than the temperature of the surface on the opposite side of the surface facing the 9th plate 31. As for the temperature of the surface of the pair of valve support parts 3B6 and the valve body 3B5 facing the 11th plate 33, it is also higher than the temperature of the surface on the opposite side of the surface facing the 11th plate 33 for the same reason.

[0065] Here, in the inlet-side valve structure 3A, the middle portion 3A8 provided between the base-side end portion 3A7 and the valve body-side end portion 3A9 has a shape extending to a position away from the reference center line S in the extension direction (first direction x) perpendicular to the reference center line S relative to the base-side end portion 3A7 and the valve body-side end portion 3A9 in the orthogonal viewpoint, and is not constrained in the extension direction perpendicular to the reference center line. Therefore, during the above-mentioned heating, the middle portion 3A8 is deformed in a manner that the further away from the reference center line S in the extension direction, the further away from the ninth plate 31.

[0066] Specifically, if Fig. 9 As shown by arrow A in the figure, the middle portion 3A8 is deformed from the connection position with the base side end portion 3A7 in the middle portion 3A8 toward the distal end portion in the extension direction so as to be away from the ninth plate 31. On the other hand, the middle portion 3A8 is deformed from the distal end portion in the extension direction in the middle portion 3A8 toward the valve body side end portion 3A9 so as to be close to the ninth plate 31. In this way, by deforming the portion of the middle portion 3A8 connected to the valve body side end portion 3A9 in the direction close to the ninth plate 31, a force for maintaining the closed state of the introduction side through hole 3A3 can be applied to the valve body 3A5. Fig. 9 3A1 of the introduction valve 3A1 of the tenth plate 32 is enlarged. The deformation of the middle portion 3A8 is very small and cannot be seen with the naked eye. In the discharge side valve structure 3B, as in the introduction side valve structure 3A, during the heating, the middle portion 3B8 deforms and a force for maintaining the closed state of the discharge side through hole 3B3 can be applied to the valve body 3B5.

[0067] When the deformation of the tenth plate 32 is caused only by thermal expansion, the tenth plate 32 returns to its original shape due to thermal contraction after cooling. However, when the grains of the tenth plate 32 grow during heating, it is confirmed that the deformation of the tenth plate 32 is maintained. It is believed that the reason for this is that the grown grains are maintained in this state even after cooling.

[0068] Therefore, in the case of the 10th plate 32 having the shape as described above, in the inlet side valve structure 3A, even after cooling, the shape of the 10th plate 32 (valve body 3A5 and valve support portion 3A6) is maintained in a state where the middle portion 3A8 is displaced in a direction away from the 9th plate 31.

[0069] Therefore, according to the valve component of the first example, in the introduction side valve structure 3A, based on the displacement of the intermediate portion 3A8 as described above, a holding force ( ) for maintaining the closed state of the introduction side through hole 3A3 can be given to the valve body 3A5 from the valve support portion 3A6. Fig. 9 The retaining force is used to suppress the occurrence of a gap between the inlet-side through hole 3A3 and the valve body 3A5.

[0070] Similarly, in the valve component of the second example, after the discharge side valve structure 3B is cooled, the shape of the 10th plate 32 (valve support portion 3B6) is maintained in a state where the middle portion 3B8 is displaced in a direction away from the 11th plate 33, and a holding force for maintaining the closed state of the discharge side through hole 3B3 can be given to the valve body 3B5 from the support portion 3B6, thereby suppressing the occurrence of a gap between the discharge side through hole 3B3 and the valve body 3B5.

[0071] In the introduction side valve structure 3A involved in the first embodiment, the ninth plate 31 has a restricting portion 3A12. In the introduction side valve structure 3A, if the introduction side through hole 3A3 is opened and closed in a short cycle in order to increase the flow rate of the fluid, resonance may occur between the valve support portion 3A6 and the valve body 3A5. At this time, if the middle portion 3A8 of the valve support portion 3A6 excessively displaces toward the ninth plate 31 due to the momentum of the vibration, the valve body 3A5 is lifted, and the introduction side through hole 3A3 may be opened even in a state where the valve body 3A5 must close the introduction side through hole 3A3.

[0072] However, in the introduction-side valve structure 3A, since the limiting portion 3A12 provided on the ninth plate 31 limits the displacement of the intermediate portion 3A8 in the direction approaching the ninth plate 31, it is possible to suppress the valve body 3A5 from opening the introduction-side through hole 3A3 when the introduction-side through hole 3A3 must be closed. Similarly, in the discharge-side valve structure 3B, based on the limiting portion 3B12 provided on the eleventh plate 33, it is possible to suppress the valve body 3B5 from opening the discharge-side through hole 3B3 when the discharge-side through hole 3B3 must be closed.

[0073] [Second embodiment]

[0074] In the introduction valve 3A1 of the first embodiment, both of the pair of valve support portions 3A6 extend in the same direction (-x direction) of the extension direction with reference to the reference center line S. On the other hand, in the introduction valve 3A1 of the second embodiment, the pair of valve support portions 3A6 extend in directions different from each other. Hereinafter, the second embodiment of the present invention will mainly describe the configuration different from the first embodiment.

[0075] Fig.10 FIG. 1 is an enlarged plan view showing the introduction valve 3A1 of the tenth plate 32 according to the second embodiment. Figures 1 to 9 Components that are substantially the same as those described in the accompanying drawings are denoted by the same reference numerals, and description thereof is omitted.

[0076] In the second embodiment, Fig.10 As shown, the middle portion 3A8 of the valve support portion 3A6 on the +y direction side has a shape extending only in the -x direction among the extending directions, and the middle portion 3A8 of the valve support portion 3A6 on the -y direction side has a shape extending only in the +x direction.

[0077] The pair of valve support parts 3A6 are respectively displaced in the direction away from the ninth plate 31, and the holding force for maintaining the closed state of the introduction side through hole 3A3 can be applied to the portion on the +x direction side based on the reference center line S of the valve body 3A5 from the valve support part 3A6 on the +y direction side. In addition, the holding force for maintaining the closed state of the introduction side through hole 3A3 can be applied to the portion on the -x direction side based on the reference center line S of the valve body 3A5 from the valve support part 3A6 on the -y direction side.

[0078] Furthermore, from the viewpoint of facilitating control of the flow direction of the fluid, the first embodiment is considered to be more advantageous than the second embodiment.

[0079] Specifically, in the second embodiment, since the extension directions of the valve support portion 3A6 on the +y direction side and the valve support portion 3A6 on the -y direction side are different, when the valve body 3A5 opens the introduction side through hole 3A3, the valve body 3A5 does not open obliquely, and the end of the valve body 3A5 in the -x direction and the end of the +x direction become the same degree of opening. Therefore, the fluid that flows in from the introduction side through hole 3A3 and collides with the valve body 3A5 does not flow biasedly in the -x direction or biased in the +x direction.

[0080] On the other hand, in the first embodiment, both of the pair of valve support parts 3A6 extend in the same direction (-x direction) of the extension direction with reference to the reference center line S, and the arrangement with reference to the reference center line S of both of the pair of valve support parts 3A6 is uniform. Therefore, when the valve body 3A5 opens the introduction side through hole 3A3, the valve body 3A5 rotates around the distal end of the middle part 3A8 of the pair of valve support parts 3A6 in the extension direction (-x direction). As a result, the part on the +x direction side with reference to the reference center line S in the valve body 3A5 is opened more than the part on the -x direction side, so that the flow direction of the fluid can be controlled to the +x direction side.

[0081] [Third embodiment]

[0082] Fig.11 FIG. 2 is an enlarged plan view showing the introduction valve 3A1 of the tenth plate 32 of the valve structure according to the third embodiment. Fig.11 As shown, in the introduction-side valve structure 3A according to the present embodiment, the introduction valve 3A1 has a pair of valve support portions 3A6 and further has another pair of valve support portions 3A16 (other valve support portions) different from the pair of valve support portions 3A6.

[0083] The pair of valve support parts 3A6 is the same as the valve support part 3A6 involved in the second embodiment. In addition, the other pair of valve support parts 3A16 is a valve support part obtained by rotating the valve support part 3A6 involved in the second embodiment by 90 degrees around the center O of the valve body 3A5 in the z direction viewpoint.

[0084] The pair of valve support portions 3A16 each includes a base-side end portion 3A17 (other base-side end portion), an intermediate portion 3A18 (other intermediate portion), and a valve body-side end portion 3A19 (other valve body-side end portion).

[0085] In this embodiment, a line that passes through the center O of the valve body 3A5 and extends in the first direction x along the surface of the tenth plate 32 from the z-direction viewpoint is used as a reference center line T (another reference center line) different from the reference center line S. The base side end 3A17 and the valve body side end 3A19 have center lines C3 and C4 in the width direction that overlap with the reference center line T, respectively. The reference center line S and the reference center line T intersect each other, and a plurality of intersection angles formed between the two lines are the same angle (right angle).

[0086] The middle portion 3A18 has a shape extending in an extension direction orthogonal to the reference center line T to a position away from the reference center line T relative to the base side end portion 3A17 and the valve body side end portion 3A19 from a viewpoint in the z direction. In the present embodiment, the middle portion 3A18 of the valve support portion 3A16 on the +x direction side extends in the +y direction, and the middle portion 3A18 of the valve support portion 3A16 on the -x direction side extends in the -y direction.

[0087] like Fig.11 As shown, in this embodiment, similarly to the first embodiment, the ninth plate 31 has a limiting portion 3A12 at a position facing the middle portion 3A8 in the third direction z for limiting the displacement of the middle portion 3A8 in a direction (-z direction) approaching the ninth plate 31. In addition, it also has another limiting portion 3A22 (other limiting portion) at a position facing the middle portion 3A18 for limiting the displacement of the middle portion 3A18 in the -z direction.

[0088] In the introduction side valve structure 3A of this embodiment, in addition to the valve support portion 3A6 and the restriction portion 3A12, another valve support portion 3A16 and another restriction portion 3A22 are also provided. Furthermore, a plurality of intersection angles formed between two adjacent lines of the reference center line S and another reference center line T are the same angle.

[0089] Therefore, compared with a case where the valve body is supported by only a pair of valve support portions 3A6, the valve body 3A5 can be stably held at the position on the ninth plate 31 side and the opening and closing operations of the valve body 3A5 can be stably performed.

[0090] Similarly, the discharge-side valve structure 3B can stably hold the valve body 3B5 at the position on the 11th plate 33 side and can stably perform the opening and closing operations of the valve body 3B5.

[0091] In the third embodiment, the case where a pair of valve support parts 3A16 different from the pair of valve support parts 3A6 is provided is described. However, in the third embodiment, two or more pairs of valve support parts different from the pair of valve support parts 3A6 may be provided. In this case, the plurality of intersection angles formed between the reference center line S and two mutually connected lines of the reference center lines of the two or more pairs of valve support parts may be set to the same angle.

[0092] In the third embodiment, each of a pair of valve support portions 3A6 extends in different directions of extension with respect to a reference center line S, and each of a pair of valve support portions 3A16 also extends in different directions with respect to a reference center line T, but both of a pair of valve support portions 3A6 may extend in the same direction, and both of a pair of valve support portions 3A16 may extend in the same direction.

[0093] [Fourth embodiment]

[0094] Fig.12 1 is an enlarged top view showing the inlet valve of the tenth plate involved in the fourth embodiment. In the first embodiment, the middle portion 3A8 has a shape extending only in one direction of the extension direction, but in the fourth embodiment, as shown in FIG. Fig.12 As shown, the middle portion 3A8 has a shape extending in both directions of the extending direction. Fig.12 The intermediate portion 3A8 shown is annular, and the through portion 3A10 is not open in either direction in the extending direction but has a closed shape.

[0095] The valve component according to the fourth embodiment can also suppress the occurrence of a gap between the introduction-side through hole 3A3 and the valve body 3A5.

[0096] In addition, in the valve structure 3 involved in the first embodiment, the discharge valve 3B1 in the discharge side valve structure 3B can also be set to the shape of the inlet valve 3A1 involved in the second to fourth embodiments, or the inlet valve 3A1 and the discharge valve 3B1 can be set to any shape in the first to fourth embodiments, respectively, and the inlet side valve structure 3A and the discharge side valve structure 3B can be set to different shapes.

[0097] The above-mentioned specific embodiments mainly include the invention having the following configurations.

[0098] 4. The valve structure of claim 1, wherein the valve body has a first portion, the second portion being a bottom portion, the second portion being a bottom portion, the second portion being a bottom portion, and the second portion being a bottom portion. It is arranged at the distal end of the base side end portion, the valve body side end portion extends from the middle portion to the valve body, the base side end portion and the valve body side end portion respectively have a center line in the width direction that passes through the center of the valve body and overlaps with a reference center line extending along the surface of the second metal plate in a plate-orthogonal direction and at an orthogonal viewpoint of observing the second metal plate, and has a width dimension smaller than that of the valve body and the base, the middle portion has a shape that extends to a position away from the reference center line in an extension direction orthogonal to the reference center line relative to the base side end portion and the valve body side end portion at the orthogonal viewpoint, and a through portion having a shape that intersects the reference center line at the orthogonal viewpoint and penetrates the middle portion in the plate thickness direction is provided in the middle portion.

[0099] When manufacturing a micro pump having a valve structure formed by the valve component according to the first invention, the first metal plate and the second metal plate are heated and joined in an overlapped state. At this time, each metal plate undergoes thermal expansion and the grains constituting the metal plates grow.

[0100] In the first invention, during heating, the pair of valve support parts and the valve body are constrained in the direction along the reference center line based on the base, so the pair of valve support parts and the valve body receive a compressive force from the base in the direction along the reference center line based on thermal expansion. At this time, the middle part of the valve support part is deformed in the direction of reducing the gap formed by the through part based on the compressive force, and can absorb the compressive force received by the two end parts of the valve support part and the valve body. Therefore, the effect of bending and deforming the valve support part and the valve body in the thickness direction due to the compressive force can be suppressed.

[0101] Furthermore, during the heating, the temperature of the surface of the valve structure facing the first metal plate is higher than the temperature of the surface opposite to the surface facing the first metal plate. The reason for this is as follows.

[0102] The valve body is arranged to contact or approach the first metal plate in order to close the through hole without receiving external force. On the other hand, in order to allow the valve body to move in the direction of opening, a space larger than the space relative to the first metal plate is ensured in the direction of the valve body away from the first metal plate. Moreover, based on the above-mentioned heating, heat is transferred from the first metal plate to the valve body, whereby the temperature of the valve support portion and the surface of the valve body facing the first metal plate is higher than the temperature of the surface on the opposite side of the surface facing the first metal plate.

[0103] Here, in the first invention, the middle portion provided between the base side end portion and the valve body side end portion has a shape extending to a position away from the reference center line in the extension direction orthogonal to the reference center line relative to the base side end portion and the valve body side end portion in the orthogonal viewpoint (z direction viewpoint), and is not constrained in the extension direction orthogonal to the reference center line. Therefore, during the above-mentioned heating, the middle portion is deformed in a manner that it moves away from the first metal plate further away from the reference center line in the extension direction based on the difference in the amount of expansion of both surfaces thereof.

[0104] Specifically, the middle portion is deformed from the connection position with the base side end portion in the middle portion toward the distal end portion in the extension direction so as to be away from the first metal plate. On the other hand, the middle portion is deformed from the distal end portion in the extension direction in the middle portion toward the valve body side end portion so as to be close to the first metal plate. In this way, by deforming the portion of the middle portion connected to the valve body side end portion in the direction close to the first metal plate, a force for maintaining the closed state of the through hole can be applied to the valve body.

[0105] In the case where the deformation of the second metal plate is caused only by thermal expansion, the second metal plate returns to its original shape due to thermal contraction after cooling. However, when the grains of the second metal plate grow during heating, it is confirmed that the deformation of the second metal plate is maintained. It is believed that the reason is that the grown grains are maintained in this state even after cooling. Therefore, in the second metal plate having the above-mentioned shape, even after cooling, the shape of the second metal plate (valve body and valve support portion) is maintained in a state where the middle portion is displaced in the direction away from the first metal plate.

[0106] Therefore, according to the first invention, due to the deformation of the intermediate portion as described above, the valve support portion can provide the valve body with a holding force for maintaining the closed state of the through hole, and the occurrence of a gap between the through hole and the valve body can be suppressed due to the holding force.

[0107] The valve component according to the second invention is preferably such that in the first invention, the intermediate portion has a shape extending only in one direction of the extending direction based on the reference center line, and the through portion has a shape opening toward the other direction of the extending direction.

[0108] According to the second invention, the middle portion that is thermally expanded by heating generates a compressive force in the direction along the reference center line, and based on this compressive force, the valve support portion is deformed in the direction of reducing the gap formed by the through portion. At this time, the portion adjacent to the through portion of the middle portion is displaced in the direction away from the first metal plate. As a result, a holding force for maintaining the closed state of the through hole can be applied to the portion opposite to the middle portion based on the reference center line of the valve body.

[0109] The valve component according to the third invention is preferably such that in the second invention, the intermediate portions of the valve support portions constituting the pair of valve support portions have shapes extending in the same direction of the extending direction with reference to the reference center line.

[0110] According to the third invention, since the arrangement of the valve support parts constituting a pair of valve support parts is uniform based on the reference center line, when the valve body opens the through hole, the valve body rotates around the distal end of the extending direction of the middle part of each valve support part. As a result, the part opposite to the middle part based on the reference center line in the valve body is opened more than the part on the middle part side, so it is easy to make the fluid flow to the opposite side of the middle part of the valve body. That is, it is easy to make the fluid flow in a desired direction.

[0111] The valve component involved in the fourth invention is preferably: in any one of the first to third inventions, the first metal plate has a limiting portion that limits the displacement of the middle portion in a direction approaching the first metal plate in a direction orthogonal to the plate and at a position facing the middle portion when the first metal plate is positioned relative to the second metal plate in the positional relationship.

[0112] In a micro pump, if the through hole is opened and closed in a short cycle in order to increase the flow rate of the fluid, resonance may occur between the valve support and the valve body. At this time, if the middle part of the valve support excessively moves toward the first metal plate due to the momentum of the vibration, the valve body will be lifted, and the through hole may be opened even if the through hole must be closed by the valve body.

[0113] According to the fourth invention, the restriction portion provided on the first metal plate can restrict the displacement of the intermediate portion in the direction approaching the first metal plate, and the valve body can be prevented from opening the through hole when the through hole must be closed.

[0114] The valve component involved in the fifth invention is preferably: in any one of the inventions from the first invention to the third invention, the second metal plate has at least one pair of other valve support parts different from the pair of valve support parts, and each pair of the at least one pair of other valve support parts respectively has other base side end parts extending from the edge of the through hole in the base toward the valve body, other middle parts arranged at the far end of the other base side end parts, and other valve body side end parts extending from the other middle parts to the valve body, and the other base side end parts and the other valve body side end parts respectively have a center in the width direction that passes through the center of the valve body at the orthogonal viewpoint and extends along the surface of the second metal plate and overlaps with other reference center lines different from the reference center line. line, and each has a smaller width dimension than the valve body and the base, the other intermediate portion has a shape extending to a position away from the other reference center line in other extension directions orthogonal to the other reference center line relative to the other base side end and the other valve body side end at the orthogonal viewpoint, and a plurality of intersection angles formed between two adjacent lines of the reference center line and the other reference center line of at least one pair of valve support portions are the same angles, and the first metal plate has other limiting portions for limiting the displacement of the other intermediate portion in a direction orthogonal to the plate and at a position facing the other intermediate portion when the second metal plate is positioned in the positional relationship.

[0115] In the fifth invention, in addition to the valve support portion and the restriction portion, another valve support portion and another restriction portion are further provided. Furthermore, a plurality of intersection angles formed between two adjacent lines of the reference center line and another reference center line are the same angle.

[0116] Therefore, compared with a case where the valve body is supported by only a pair of valve support portions, the valve body can be stably maintained in a state of closing the through hole, and the opening and closing operation of the valve body can be stably performed.

Claims

1. A valve component, used to form a valve structure, characterized in that include: a first metal plate having a through hole; and The second metal plate has a base, a valve body, and a pair of valve support parts, wherein the base is formed with a through hole formed in a region overlapping with the through hole, the valve body is capable of closing the through hole based on contact with the edge of the through hole, the pair of valve support parts support the valve body on the base in such a manner that the valve body is located in the through hole, and the second metal plate is joined to the first metal plate in a predetermined positional relationship in such a manner that the valve body is located opposite to the edge of the through hole; wherein, The pair of valve support parts respectively include a base side end portion, a middle portion, and a valve body side end portion, the base side end portion extending from the edge of the through hole in the base toward the valve body, the middle portion being arranged at the distal end of the base side end portion, and the valve body side end portion extending from the middle portion to the valve body, The base side end portion and the valve body side end portion each have a center line in the width direction that passes through the center of the valve body in the plate-orthogonal direction orthogonal to the surface of the second metal plate and when observing the second metal plate from an orthogonal viewpoint and overlaps with a reference center line extending along the surface of the second metal plate, and have a smaller width dimension than the valve body and the base portion, The intermediate portion has a shape extending in an extending direction orthogonal to the reference center line relative to the base side end portion and the valve body side end portion at the orthogonal viewpoint to a position away from the reference center line, The intermediate portion is provided with a through portion having a shape intersecting with the reference center line at the orthogonal viewpoint and penetrating the intermediate portion in the plate thickness direction.

2. The valve component according to claim 1, characterized in that: The intermediate portion has a shape extending only in one direction of the extending direction with reference to the reference center line, and the through portion has a shape opening toward the other direction of the extending direction.

3. The valve component according to claim 2, characterized in that: The intermediate portions of the valve support portions constituting the pair of valve support portions each have a shape extending in the same direction of the extending direction with reference to the reference center line.

4. The valve component according to claim 1, characterized in that: The first metal plate has a restriction portion that restricts displacement of the middle portion in a direction approaching the first metal plate at a position facing the middle portion in a direction perpendicular to the plates when the first metal plate is positioned relative to the second metal plate in the positional relationship.

5. The valve component according to any one of claims 1 to 4, characterized in that: The second metal plate has at least one pair of other valve support portions different from the pair of valve support portions, Each pair of the at least one other valve support portion has another base side end portion extending from the edge of the through hole in the base toward the valve body, another middle portion disposed at the distal end of the other base side end portion, and another valve body side end portion extending from the other middle portion to the valve body, The other base side end portion and the other valve body side end portion each have a center line in the width direction that passes through the center of the valve body at the orthogonal viewpoint and extends along the surface of the second metal plate and overlaps with another reference center line different from the reference center line, and each has a smaller width dimension than the valve body and the base. The other intermediate portion has a shape extending in another extending direction orthogonal to the other reference center line relative to the other base side end portion and the other valve body side end portion at the orthogonal viewpoint to a position away from the other reference center line, A plurality of intersection angles respectively formed between two mutually adjacent lines of the reference center line and the other reference center lines of the at least one pair of valve support parts are the same angle, The first metal plate has another restricting portion for restricting displacement of the other intermediate portion toward the first metal plate at a position facing the other intermediate portion in a direction perpendicular to the plate when the first metal plate is positioned relative to the second metal plate in the positional relationship.

Images