Silicon carbide seed crystal and graphite paper bonding equipment and method

Abstract

The invention provides silicon carbide seed crystal and graphite paper bonding equipment and method, and belongs to the technical field of crystal bonding, the silicon carbide seed crystal and graphite paper bonding equipment comprises a bearing device used for bearing seed crystals, a limiting device used for limiting graphite paper and a pressing device, the pressing device is located on the side, away from the seed crystals, of the graphite paper, and the pressing device comprises a pressing platform; the lower end of the press-fit platform is rotationally connected with a press-fit mounting frame, a press-fit assembly is arranged at the lower end of the press-fit mounting frame, a press-fit line is formed at the bottom of the press-fit assembly, the press-fit device further comprises a driving device for driving the press-fit assembly to rotate around a preset axis, and the press-fit assembly abuts against the outer side surface of the graphite paper in the directional rotation process. And the pressing line moves in a virtual pressing plane. According to the method, the situation that bubbles cannot be discharged due to direct and comprehensive pressing is avoided, the pressing and bonding preparation time is short, the pressing and bonding efficiency is high, the glue distribution uniformity of a bonding layer is improved, and the subsequent silicon carbide seed crystal bonding effect and quality are improved.

Description

Technical Field

[0001] The invention relates to the technical field of crystal bonding, and in particular to a device and a method for bonding a silicon carbide seed crystal to graphite paper. Background Art

[0002] After the silicon carbide seed crystal is bonded to the graphite paper, a stable Si-C structure can be formed on the connecting surface through heat treatment, thus ensuring the stability of the silicon carbide crystal during high temperature growth.

[0003] Before high-temperature hot pressing, the silicon carbide seed crystal and the graphite paper need to be bonded with a high-temperature resistant inorganic glue. Common glues include but are not limited to ceramic glue, sulfate glue, etc.; during the bonding process with inorganic glue, a small amount of bubbles may exist in the bonding layer due to improper glue coating method, roughness of the material surface, etc.

[0004] In the prior art, bubbles in the bonding layer can be discharged in large quantities by gradient batch pressing bonding, single-sided or double-sided extrusion bonding, etc. However, the above bonding methods have problems including but not limited to a long pressing bonding preparation process, a short bubble discharge process, and poor uniformity of glue distribution in the bonding layer. Summary of the invention

[0005] In view of the above problems, the present invention provides a device and method for bonding silicon carbide seed crystals and graphite paper. The invention avoids the problem of direct and comprehensive pressing that results in the inability to discharge bubbles, shortens the preparation time for pressing and bonding, and increases the efficiency of pressing and bonding. It also improves the uniformity of glue distribution in the bonding layer and improves the effect and quality of subsequent silicon carbide seed crystal bonding.

[0006] To solve the above problems, the technical solution adopted by the present invention is: The device for bonding silicon carbide seed crystal and graphite paper comprises a bearing device for bearing the seed crystal, a limiting device for limiting the graphite paper, and a pressing device, wherein the pressing device is located on the side of the graphite paper away from the seed crystal, the pressing device comprises a pressing platform, the lower end of the pressing platform is rotatably connected to a pressing mounting frame, the lower end of the pressing mounting frame is provided with a pressing assembly, a pressing line is formed at the bottom of the pressing assembly, and a driving device for driving the pressing assembly to rotate around a predetermined axis, wherein the pressing assembly is pressed against the outer surface of the graphite paper during the directional rotation, and the pressing line moves in a virtual pressing plane, and the virtual pressing plane is parallel to the bonding surface of the seed crystal.

[0007] Preferably, the pressing assembly comprises a pressing positioning rod, a cylindrical pressing portion is sleeved on the outer side of the pressing positioning rod, and the pressing line is located at the bottom of the pressing portion and is parallel to the axis of the pressing portion.

[0008] Preferably, the pressing part comprises a first pressing cylinder sleeved on the outside of the pressing positioning rod, a second pressing cylinder sleeved on the outside of the first pressing cylinder, and a driving assembly is arranged between the first pressing cylinder and the second pressing cylinder for controlling the directional movement of the second pressing cylinder.

[0009] When the second pressing cylinder is located on the inner side, a virtual circle can be formed on the inner side. When the second pressing cylinder is located on the outer side, a virtual ring can be formed on the outer side. By controlling the size relationship between the virtual circle and the ring, large-sized silicon carbide seed crystals can be fully covered, thereby realizing the pressing and bonding of large-sized silicon carbide seed crystals without replacing the pressing part.

[0010] Preferably, two groups of pressing parts are sleeved on the outer side of the pressing and positioning rod, and the two groups of pressing parts are symmetrically arranged.

[0011] The vertical axis of rotation of the two sets of pressing parts is located on the vertical plane of symmetry of the two pressing parts. Through the above-mentioned structural setting, by setting two sets of pressing parts, the deflection angle of the pressing part can be shortened, and the pressing and bonding efficiency is doubled.

[0012] Preferably, the first pressing cylinder includes a large head end and a guide end, a guide rod is fixed to the side wall of the large head end, a guide groove matching the guide rod is opened inside the second pressing cylinder, the end of the guide rod is sealed and slidably connected to the guide groove to form a control chamber, and the driving assembly is a hydraulic driving mechanism, which is connected to the control chamber.

[0013] Preferably, a first hollow channel is opened inside the guide rod and communicated with the control chamber, a second hollow channel is opened inside the compression positioning rod and communicated with the first hollow channel, and the second hollow channel is communicated with the hydraulic drive structure.

[0014] Through the above-mentioned structural design, the channel for controlling the oil delivery can be set inside the pressing assembly. Through the above-mentioned structural setting, it is only necessary to connect the outer side of the pressing positioning rod with the hydraulic drive mechanism, and there is no need to arrange the corresponding control pipeline on the outer side of the first pressing cylinder and the second pressing cylinder, thereby ensuring the simplicity of the outside of the relevant structure and avoiding the introduction of pollutants. In addition, the first pressing cylinder and the second pressing cylinder designed as above can have more freedom of movement, thereby improving the effect and efficiency of pressing and bonding.

[0015] Preferably, the first pressing cylinder is rotatably connected to the pressing positioning rod, an annular distribution groove communicating with the first hollow channel is formed inside the large end, and a pumping opening is also formed inside the pressing positioning rod.

[0016] Preferably, the bearing device comprises a relatively fixed first bearing part and a relatively movable second bearing part, and a lifting assembly is arranged between the first bearing part and the second bearing part.

[0017] Preferably, the limiting device comprises a clamping assembly for clamping the graphite paper, and also comprises a limiting rope bolted to the side wall of the clamping assembly and an adjusting column for adjusting the tightness of the limiting rope.

[0018] A method for bonding a silicon carbide seed crystal to graphite paper uses the above-mentioned device for bonding a silicon carbide seed crystal to graphite paper, comprising the following steps: S1, preparing a silicon carbide seed crystal and graphite paper and applying glue on the surface of the silicon carbide seed crystal and / or the graphite paper; S2, limiting the position of the silicon carbide seed crystal by a supporting device and limiting the position of the graphite paper by a limiting device; S3, positioning a pressing device according to the positions of the silicon carbide seed crystal and the graphite paper, controlling a pressing component of the pressing device to press against the outer surface of the graphite paper, and driving the pressing component to rotate around a predetermined axis after pressing, and completing the bonding of the silicon carbide seed crystal and the graphite paper after the pressing component rotates a predetermined angle.

[0019] The beneficial effects of the present invention are: Compared with traditional bonding methods, the above method can gradually press the graphite paper onto the surface of the seed crystal during the directional rotation of the pressing assembly around the vertical axis, and the bubble discharge time is long, thus avoiding direct full pressing that causes the bubbles to be unable to be discharged. At the same time, the pressing assembly can complete the all-round pressing of the seed crystal and the graphite paper after one rotation, and the pressing and bonding preparation time is short and the pressing and bonding efficiency is high. Moreover, the pressing assembly can rotate multiple times to re-glue the glue, thereby improving the uniformity of the glue distribution in the bonding layer and improving the effect and quality of the subsequent silicon carbide seed crystal bonding. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0021] Figure 2 For the present invention Figure 1 Schematic diagram of the top view structure.

[0022] Figure 3 For the present invention Figure 1 Schematic diagram of the main structure.

[0023] Figure 4 For the present invention Figure 3 AA section structure schematic diagram.

[0024] Figure 5 For the present invention Figure 3 Schematic diagram of the enlarged structure at B.

[0025] Figure 6 This is a schematic diagram of the first state of embodiment 1 of the press-fit assembly of the present invention.

[0026] Figure 7 This is a schematic diagram of the second state of Example 1 of the press-fit assembly of the present invention.

[0027] Figure 8 For the present invention Figure 6 Schematic diagram of the side structure.

[0028] Fig. 9 For the present invention Figure 8 Schematic diagram of the CC cross-sectional structure.

[0029] Fig.10 For the present invention Fig. 9 Enlarged structural diagram at D.

[0030] Fig.11 For the present invention Fig. 9 Enlarged structural diagram at E.

[0031] Fig.12 This is a schematic diagram of the first state of Example 2 of the press-fit assembly of the present invention.

[0032] Fig.13 This is a schematic diagram of the second state of embodiment 2 of the press-fit assembly of the present invention.

[0033] In the figure: 100, seed crystal; 200, graphite paper; 300, bearing device; 310, second bearing part; 320, first bearing part; 330, lifting assembly; 400, limiting device; 410, adjusting column; 420, limiting rope; 430, clamping assembly; 431, clamping seat; 432, clamping part; 500, pressing device; 510, pressing platform; 520, driving device; 530, pressing assembly; 531, pressing positioning rod; 5311, pumping opening; 5312, second hollow channel; 532, first pressing cylinder; 5321, annular distribution groove; 5322, guide rod; 5323, first hollow channel; 5324, big head end; 5325, guide end; 533, second pressing cylinder; 5331, guide groove; 5332, accommodating gap; 540, pressing mounting frame. DETAILED DESCRIPTION

[0034] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0035] In order to solve the technical problems existing in the background technology, Figure 1 -Attached Fig.13 The device for bonding silicon carbide seed crystal to graphite paper includes a carrying device 300 for carrying the seed crystal 100, a limiting device 400 for limiting the graphite paper 200, and a pressing device 500. The pressing device 500 is used to apply adhesive glue between the seed crystal 100 and the graphite paper 200. After the adhesive glue is applied, the seed crystal 100 and the graphite paper 200 are pressed tightly by the pressing device 500 to facilitate subsequent hot pressing treatment.

[0036] Specifically, the pressing device 500 is located on the side of the graphite paper 200 away from the seed crystal 100, and the pressing device 500 includes a pressing platform 510, and the lower end of the pressing platform 510 is rotatably connected to a pressing mounting frame 540, and a pressing assembly 530 is arranged at the lower end of the pressing mounting frame 540, and a pressing line is formed at the bottom of the pressing assembly 530. During the pressing and bonding process, the pressing line contacts and presses against the surface of the graphite paper 200, thereby completing the pressing, bonding and fixation of the seed crystal 100 and the graphite paper 200.

[0037] It also includes a driving device 520 for driving the pressing assembly 530 to rotate around a predetermined axis. When the seed crystal 100 and the graphite paper 200 are placed horizontally, the predetermined axis is selected as a vertical axis, which is perpendicular to the plane where the seed crystal 100 is located; during the directional rotation of the pressing assembly 530, it is pressed against the outer surface of the graphite paper 200, and the pressing line moves in a virtual pressing plane, which is parallel to the bonding surface of the seed crystal 100; the pressing line forms a circular virtual pressing plane during the directional rotation, and the virtual pressing plane can correspond to the seed crystal 100 and the graphite paper 200 at the lower end, and the pressing and bonding of the seed crystal 100 and the graphite paper 200 are gradually completed during the rotation of the pressing assembly 530 around the vertical axis.

[0038] Compared with traditional bonding methods, the above method can gradually press the graphite paper 200 onto the surface of the seed crystal 100 during the directional rotation of the pressing component 530 around the vertical axis, and the bubble discharge time is long, thereby avoiding direct full pressing that causes the bubbles to be unable to be discharged. At the same time, the pressing component 530 can complete the all-round pressing of the seed crystal 100 and the graphite paper 200 after rotating one circle, and the pressing and bonding preparation time is short and the pressing and bonding efficiency is high. Moreover, the pressing component 530 can rotate multiple circles to re-glue the glue, thereby improving the uniformity of the glue distribution in the bonding layer and improving the effect and quality of the subsequent silicon carbide seed crystal bonding.

[0039] It should be noted that the bonding process of the seed crystal 100 and the graphite paper 200 can be carried out in a vacuum negative pressure environment. During the rotation and gradual pressing process of the pressing assembly 530, the bubble discharge efficiency is higher and fewer bubbles remain in the bonding layer.

[0040] As Example 1 of the pressing assembly 530, the pressing assembly 530 includes a pressing positioning rod 531, and a cylindrical pressing portion is sleeved on the outer side of the pressing positioning rod 531. The pressing line is located at the bottom of the pressing portion and is parallel to the axis of the pressing portion. Here, the pressing positioning rod 531 is in a relatively fixed state relative to the pressing portion, and the pressing portion can be linearly moved and deflected on the pressing positioning rod 531. In the process of the pressing assembly 530 rotating around the vertical axis, the pressing line at the bottom of the pressing assembly 530 can be pressed against the surface of the graphite paper 200, thereby gradually completing efficient pressing.

[0041] During the rotation, the pressing positioning rod 531 rotates in a directional manner with the first end of the pressing positioning rod 531 as the axis. The pressing line can be used as the radius of the virtual circle. During the rotation of the pressing line, the graphite paper 200 and the seed crystal 100 below can be pressed and bonded. After the pressing line rotates one circle, the seed crystal 100 and the graphite paper 200 can be fully pressed.

[0042] For a small-sized silicon carbide seed crystal, the pressing line at the lower end of the pressing part can be larger than the radius of the silicon carbide seed crystal, and the seed crystal 100 and the graphite paper 200 can be fully pressed after the pressing line rotates one circle.

[0043] Large-sized silicon carbide seed crystals can be pressed and bonded without replacing the pressing part; the pressing part includes a first pressing cylinder 532 which is sleeved on the outside of the pressing positioning rod 531, and a second pressing cylinder 533 is sleeved on the outside of the first pressing cylinder 532. A driving component is arranged between the first pressing cylinder 532 and the second pressing cylinder 533 to control the directional movement of the second pressing cylinder 533. The driving component can push the second pressing cylinder 533 to move along the axial direction of the first pressing cylinder 532. When the second pressing cylinder 533 is located on the inner side, a virtual circle can be formed on the inner side. When the second pressing cylinder 533 is located on the outer side, a virtual ring can be formed on the outer side. The size relationship between the virtual circle and the ring can be controlled to fully cover large-sized silicon carbide seed crystals, thereby realizing the pressing and bonding of large-sized silicon carbide seed crystals without replacing the pressing part.

[0044] It should be noted that in the process of the second pressing cylinder 533 moving linearly along the first pressing cylinder 532, the second pressing cylinder 533 can be controlled to move away from the graphite paper 200 first, and after the second pressing cylinder 533 moves to the predetermined position, the second pressing cylinder 533 is controlled to be pressed against the graphite paper 200, and then the second pressing cylinder 533 is deflected along the vertical axis to achieve pressing and bonding of the seed crystal 100 and the outer area of ​​the graphite paper 200.

[0045] The small-sized second pressing cylinder 533 can reduce the size of the pressing line, and the batch rotation pressing can also accelerate the discharge of bubbles in the center of the large-sized seed crystal 100, further reducing the residual bubbles in the bonding layer and improving the quality of the final product.

[0046] As Example 2 of the pressing assembly 530, two groups of pressing parts are provided on the outer side of the pressing positioning rod 531, and the two groups of pressing parts are symmetrically arranged. The vertical axes of rotation of the two groups of pressing parts are located on the vertical planes of symmetry of the two pressing parts. Through the above-mentioned structural setting, by setting two groups of pressing parts, the deflection angle of the pressing part can be shortened, and the efficiency of the pressing and bonding is doubled.

[0047] At the same time, the pressing parts on both sides are always in a symmetrical state during the bonding and pressing process, and the force applied to the seed crystal 100 and the graphite paper 200 during the bonding process is more uniform, which also improves the final bonding effect.

[0048] It should also be noted that during the bonding process, the seed crystal 100 and the graphite paper 200 are in a very stable state under the limitation of the supporting device 300 and the limiting device 400 respectively. The friction force generated by the pressing assembly 530 on the graphite paper 200 during the movement will not have any effect on the position of the graphite paper 200, thereby ensuring the stability of the subsequent bonding state of the seed crystal 100 and the graphite paper 200.

[0049] As the same part of implementation 1 and implementation 2 of the pressing assembly 530, the first pressing cylinder 532 includes a large head end 5324 and a guide end 5325, and the outer diameter of the large head end 5324 is larger than the outer diameter of the guide end 5325; a guide rod 5322 is fixed to the side wall of the large head end 5324, and a guide groove 5331 matching the guide rod 5322 is opened inside the second pressing cylinder 533, and the second pressing cylinder 533 can be guided by the guide rod 5322 to control the linear movement of the second pressing cylinder 533 along the axis of the first pressing cylinder 532; the end of the guide rod 5322 is sealed and slidably connected with the guide groove 5331 to form a control chamber, and the driving assembly is a hydraulic driving mechanism, which is connected to the control chamber.

[0050] An accommodating gap 5332 matching with the big head end 5324 is opened on the inner side of the second pressing cylinder 533. Through the above-mentioned structural design, the big head end 5324 can be completely accommodated inside. For the two sets of pressing parts, the two can be completely pressed against each other, avoiding the existence of a gap in the middle that causes the area that cannot be covered by the pressing, thereby increasing the range of the pressing.

[0051] The second pressing cylinder 533 can be controlled to move linearly through the hydraulic drive mechanism. Specifically, squeezing the control oil into the control chamber can increase the pressure in the control chamber. Here, the first pressing cylinder 532 is in a relatively fixed state in the axial direction. The second pressing cylinder 533 moves toward the outside along the axis of the first pressing cylinder 532 after being pressurized. The control oil in the control chamber is discharged through the hydraulic drive mechanism, so that the pressure in the control chamber can be reduced. At this time, the second pressing cylinder 533 moves toward the inside along the axis of the first pressing cylinder 532 after being pressurized. The above method realizes efficient and precise control of the position of the second pressing cylinder 533.

[0052] A first hollow channel 5323 is opened inside the guide rod 5322 and communicates with the control chamber. A second hollow channel 5312 is opened inside the compression positioning rod 531 and communicates with the first hollow channel 5323. The second hollow channel 5312 is communicated with the hydraulic drive structure.

[0053] Through the above-mentioned structural design, the channel for controlling the oil delivery can be set inside the pressing component 530. Through the above-mentioned structural setting, it is only necessary to connect the outer side of the pressing positioning rod 531 with the hydraulic drive mechanism, and there is no need to arrange corresponding control pipelines on the outer sides of the first pressing cylinder 532 and the second pressing cylinder 533, thereby ensuring the simplicity of the exterior of the relevant structure and avoiding the introduction of pollutants. In addition, the first pressing cylinder 532 and the second pressing cylinder 533 designed as above can have more freedom of movement, thereby improving the effect and efficiency of pressing and bonding.

[0054] Preferably, the first pressing cylinder 532 is rotatably connected to the pressing positioning rod 531, and the rotatably connected first pressing cylinder 532 has less friction and exerts less reaction force on the graphite paper 200; an annular distribution groove 5321 connected to the first hollow channel 5323 is opened inside the big head end 5324, and a pumping opening 5311 is also opened inside the pressing positioning rod 531. Through the cooperation of the annular distribution groove 5321 and the pumping opening 5311, the first pressing cylinder 532 here can be deflected around the axis at a constant position. No matter where the first pressing cylinder 532 rotates to, the pumping opening 5311 here can pump the control oil into the annular distribution groove 5321 to ensure the stability of the control oil delivery.

[0055] By controlling the first pressing cylinder 532 and the second pressing cylinder 533 to rotate, the friction on the graphite paper 200 can be reduced. It can be expected that the second pressing cylinder 533 here can be an integrated cylindrical design, or can be selected as a design of multiple coaxial circular rings. The mutual influence of the rotation between the multiple circular rings is small, which meets the needs of bonding large-span seed crystals 100 and graphite paper 200.

[0056] Specifically, the supporting device 300 includes a relatively fixed first supporting part 320 and a relatively movable second supporting part 310. A lifting assembly 330 is arranged between the first supporting part 320 and the second supporting part 310. The lifting assembly 330 can be used to adjust the height position of the seed crystal 100 and the graphite paper 200, and finally adjust the gap between the graphite paper 200 and the pressing assembly 530 to ensure that the pressing assembly 530 and the graphite paper 200 are in a predetermined pressing effect, avoiding excessive pressing pressure that causes the glue to be completely moved and squeezed out, and also avoiding too small pressing pressure that cannot generate the predetermined pressure, affecting the bubble discharge and the final bonding effect.

[0057] The pressing device 500 here is also height-controlled by a lifting structure or a manipulator, and its control range is relatively large. Controlling the pressing device 500 away from the graphite paper 200 can facilitate the loading and unloading of the seed crystal 100 and the graphite paper 200; controlling the pressing assembly 530 to be close to the graphite paper 200, and subsequently cooperating with the lifting assembly 330 to adjust the extrusion gap.

[0058] Specifically, the limiting device 400 includes a clamping assembly 430 for clamping the graphite paper 200, and also includes a limiting rope 420 bolted to the side wall of the clamping assembly 430 and an adjusting column 410 for adjusting the tightness of the limiting rope 420. The size of the graphite paper 200 here is reserved to be larger, and a blank area is formed on the outside to cooperate with the clamping assembly 430. There are multiple limiting devices 400 here arranged circumferentially around the graphite paper 200, which can limit the graphite paper 200 from different directions, ensure the stability of the graphite paper 200 during the bonding process, and avoid displacement between the seed crystal 100 and the graphite paper 200.

[0059] The clamping assembly 430 here includes a U-shaped clamping seat 431 and a clamping portion 432 disposed inside the clamping seat 431 . The edges of the graphite paper 200 can be clamped from both sides by controlling the expansion or position of the clamping portion 432 .

[0060] After the clamping assembly 430 is clamped, the tightness and height position of the limiting rope 420 can be adjusted by adjusting the column 410, and the graphite paper 200 can be controlled to be located in a relatively horizontal position on the upper end of the seed crystal 100, ensuring the efficiency and stability of the subsequent rotation pressing of the pressing assembly 530.

[0061] A method for bonding a silicon carbide seed crystal to graphite paper, using the above-mentioned device for bonding a silicon carbide seed crystal to graphite paper, comprises the following steps: S1. Prepare silicon carbide seed crystal 100 and graphite paper 200 and apply glue on the surface of silicon carbide seed crystal 100 and / or graphite paper 200; apply glue on the surface where silicon carbide seed crystal 100 and graphite paper 200 are bonded, and the area of ​​glue application should not be less than the surface area of ​​seed crystal 100.

[0062] S2. The silicon carbide seed crystal 100 is limited by the supporting device 300, and the graphite paper 200 is limited by the limiting device 400; after being limited, the seed crystal 100 and the graphite paper 200 are in a relatively horizontal state, and the seed crystal 100 and the graphite paper 200 are in a pre-bonded state, with a tiny gap between them, which can achieve subsequent pressing while ensuring that bubbles can be discharged from the tiny gap during the rotation pressing process.

[0063] S3. Position the pressing device 500 according to the positions of the silicon carbide seed crystal 100 and the graphite paper 200, control the pressing component 530 of the pressing device 500 to press against the outer surface of the graphite paper 200, and drive the pressing component 530 to rotate around a predetermined axis after pressing. After the pressing component 530 rotates a predetermined angle, the bonding of the silicon carbide seed crystal 100 and the graphite paper 200 is completed.

[0064] The above-mentioned predetermined axis is controlled to be consistent with the axis of the seed crystal 100. During the rotation, one end of the pressing line here coincides with the center of the circle on the surface of the seed crystal 100. The pressing line can be used as the radius of the virtual circle for directional rotation. One circle of rotation can complete the entire pressing. Multiple circles of rotation can further improve the pressing effect and can also evenly spread the glue, thereby ensuring the stability of the bonding layer and improving the final bonding effect of the seed crystal 100 and the graphite paper 200.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for bonding a silicon carbide seed crystal to graphite paper, comprising a carrying device (300) for carrying a seed crystal (100) and a limiting device (400) for limiting a graphite paper (200), characterized in that: The invention also includes a pressing device (500), the pressing device (500) being located on a side of the graphite paper (200) away from the seed crystal (100), the pressing device (500) comprising a pressing platform (510), the lower end of the pressing platform (510) being rotatably connected to a pressing mounting frame (540), the lower end of the pressing mounting frame (540) being provided with a pressing assembly (530), a pressing line being formed at the bottom of the pressing assembly (530), and a driving device (520) for driving the pressing assembly (530) to rotate around a predetermined axis; During the directional rotation of the pressing component (530), it is pressed against the outer surface of the graphite paper (200), and the pressing line moves in a virtual pressing plane, which is parallel to the bonding surface of the seed crystal (100).

2. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The pressing assembly (530) comprises a pressing positioning rod (531), a cylindrical pressing portion is sleeved on the outside of the pressing positioning rod (531), and the pressing line is located at the bottom of the pressing portion and is parallel to the axis of the pressing portion.

3. The device for bonding silicon carbide seed crystals and graphite paper according to claim 2, characterized in that: The pressing part comprises a first pressing cylinder (532) sleeved on the outside of the pressing positioning rod (531), a second pressing cylinder (533) sleeved on the outside of the first pressing cylinder (532), and a driving component is arranged between the first pressing cylinder (532) and the second pressing cylinder (533) for controlling the directional movement of the second pressing cylinder (533).

4. The device for bonding silicon carbide seed crystals and graphite paper according to claim 3, characterized in that: Two groups of pressing parts are sleeved on the outer side of the pressing and positioning rod (531), and the two groups of pressing parts are symmetrically arranged.

5. The device for bonding silicon carbide seed crystals to graphite paper according to claim 3 or 4, characterized in that: The first pressing cylinder (532) comprises a large head end (5324) and a guide end (5325), a guide rod (5322) being fixed to the side wall of the large head end (5324), a guide groove (5331) matching with the guide rod (5322) being opened inside the second pressing cylinder (533), the end of the guide rod (5322) being sealingly and slidingly connected with the guide groove (5331) to form a control chamber, and the driving assembly is a hydraulic driving mechanism, which is connected with the control chamber.

6. The device for bonding silicon carbide seed crystals and graphite paper according to claim 5, characterized in that: The guide rod (5322) has a first hollow channel (5323) inside, which is connected to the control chamber; the press-fit positioning rod (531) has a second hollow channel (5312) inside, which is connected to the first hollow channel (5323); and the second hollow channel (5312) is connected to the hydraulic drive structure.

7. The device for bonding silicon carbide seed crystals and graphite paper according to claim 6, characterized in that: The first pressing cylinder (532) is rotatably connected to the pressing positioning rod (531); an annular distribution groove (5321) communicating with the first hollow channel (5323) is formed inside the large end (5324); and a pumping opening (5311) is also formed inside the pressing positioning rod (531).

8. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The bearing device (300) comprises a relatively fixed first bearing part (320) and a relatively movable second bearing part (310), and a lifting assembly (330) is arranged between the first bearing part (320) and the second bearing part (310).

9. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The limiting device (400) comprises a clamping assembly (430) for clamping the graphite paper (200), a limiting rope (420) bolted to a side wall of the clamping assembly (430), and an adjusting column (410) for adjusting the tightness of the limiting rope (420).

10. A method for bonding silicon carbide seed crystals to graphite paper, characterized in that: The device for bonding silicon carbide seed crystals and graphite paper according to any one of claims 1 to 9 comprises the following steps: S1, preparing a silicon carbide seed crystal (100) and a graphite paper (200) and applying glue on the surface of the silicon carbide seed crystal (100) and / or the graphite paper (200); S2, limiting the position of the silicon carbide seed crystal (100) by means of a carrying device (300), and limiting the position of the graphite paper (200) by means of a limiting device (400); S3, positioning the pressing device (500) according to the positions of the silicon carbide seed crystal (100) and the graphite paper (200), controlling the pressing component (530) of the pressing device (500) to press against the outer surface of the graphite paper (200), and driving the pressing component (530) to rotate around a predetermined axis after pressing against each other, and completing the bonding of the silicon carbide seed crystal (100) and the graphite paper (200) after the pressing component (530) rotates by a predetermined angle.

Images