Graph grouping method for scanning electron microscope image and related product

Abstract

The invention provides a graph grouping method for scanning electron microscope images and a related product. The method comprises the following steps: acquiring scanning electron microscope images to be grouped and a design layout corresponding to the scanning electron microscope images; carrying out contour extraction on a graph in the scanning electron microscope image to obtain an image overall contour comprising a plurality of graph contours; establishing a corresponding relation between the graph contour and a design graph in the design layout; and grouping the graph contours according to the characteristic values of the design graphs. According to the method, grouping can be carried out by utilizing the one-to-one correspondence between the design graphs in the design layout and the graph contours in the scanning electron microscope image and utilizing the characteristic values of the design graphs instead of directly utilizing the own characteristics of the graph contours, so that automatic grouping of the graph contours is realized, and the problem of low manual grouping efficiency is solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a scanning electron microscope image graphics grouping method and related products. Background Art

[0002] In the manufacturing process of semiconductor integrated circuits, a large number of scanning electron microscope (SEM) images are generated, and these SEM images need to be analyzed to judge and evaluate the various processes in the manufacturing process. Among various SEM image analysis methods, contour extraction and contour analysis of graphics in SEM images are widely used in defect detection, critical dimension measurement, and simulation and modeling of optical proximity correction (OPC).

[0003] SEM images generated during the manufacturing process of semiconductor integrated circuits often have large image noise, which makes the contours extracted from the SEM images too rough and difficult to meet the needs of some application scenarios. Therefore, it is necessary to smooth the SEM image contours to remove burrs and noise in the image contours and reduce image errors caused by the optical proximity effect.

[0004] There are areas on silicon wafers that contain a large number of periodically repeated patterns (patterns or design layouts), such as SRAM (static random access memory) areas. The SEM images of these areas appear to be composed of similar periodically repeated graphics. Grouping the graphics in the SEM image and using the similarities between these graphics can help smooth the SEM image contour. Therefore, it is necessary to group the graphics in the existing SEM images.

[0005] In the prior art, there are usually two processing methods for SEM images composed of periodically repeated similar graphics: In the first processing method, the selected SEM image contains only one periodically repeated graphic, so generally no grouping is required, and the position of the complete graphic outline in the SEM image is determined by a given gauge file. In the second processing method, for SEM images containing periodically repeated graphics, manual methods are usually adopted to achieve the recognition and grouping of the complete graphic outline in the SEM image through manual designation.

[0006] In the prior art, when a complete graphic in a SEM image is identified through a given gauge file, it is necessary to ensure that the SEM image contains only one periodically repeated graphic and only supports translation operations. This method is no longer applicable when the SEM image contains multiple periodically repeated graphics, or the graphics are rotated, mirrored, and the like. When the graphics in the SEM image are grouped by a manually specified method, due to the limited manual recognition ability, it is impossible to distinguish the corresponding graphics in the SEM image of some different polygons in the design layout, resulting in incorrect grouping and reduced accuracy. In addition, manual recognition and grouping are also limited in efficiency, and multiple SEM images cannot be processed quickly. Summary of the invention

[0007] In view of the above problems, the present invention is proposed to provide a method for pattern grouping of scanning electron microscope images that overcomes the above problems or at least partially solves the above problems.

[0008] One purpose of the present invention is to automatically group graphics, especially for graphics that are repeated in a variety of cycles, or graphics that are rotated or mirrored.

[0009] A further object of the present invention is to improve grouping success and efficiency.

[0010] Another further object of the present invention is to avoid erroneous grouping caused by the difficulty in reflecting slight differences between design layout polygons on the SEM image.

[0011] A further object of the present invention is to prevent the incomplete graphic outline at the edge of the image from affecting the grouping.

[0012] A further object of the present invention is to reduce the number of groups and thereby increase the number of graphic outlines within each group, thereby enabling effective grouping even when the number of graphics in the SEM image is small.

[0013] In particular, the present invention provides a method for grouping graphics of a scanning electron microscope image, comprising:

[0014] Acquire scanning electron microscope images to be grouped and a design layout corresponding to the scanning electron microscope images;

[0015] Extracting contours of the graphics in the scanning electron microscope image to obtain an overall contour of the image including contours of multiple graphics;

[0016] Establishing a correspondence between the graphic outline and the design graphic in the design layout;

[0017] The graphic outlines are grouped according to the feature values ​​of the design graphics.

[0018] Optionally, the characteristic value of the design graphic is a hash value of the design graphic;

[0019] The step of grouping the graphic outlines according to the characteristic values ​​of the design graphics comprises:

[0020] Obtaining the hash value of each of the design graphics;

[0021] grouping the design graphics according to the hash values;

[0022] The graphic contours are grouped according to the corresponding relationship.

[0023] Optionally, the step of obtaining the hash value of each of the design graphics includes:

[0024] Selecting a coordinate origin on each of the design figures;

[0025] Performing geometric transformation on the corresponding design figure based on the selected coordinate origin;

[0026] The hash code is used to calculate the design graphic after the geometric transformation to obtain the hash value of the design graphic.

[0027] Optionally, the step of obtaining the hash value of each of the design graphics includes:

[0028] Rotating and / or mirroring the design graphic to obtain an auxiliary graphic;

[0029] Selecting coordinate origins on the design figure and the auxiliary figure respectively;

[0030] Performing geometric transformation on the corresponding design graphics and auxiliary graphics based on the selected coordinate origin;

[0031] Using hash codes to calculate the geometrically transformed design graphics and the auxiliary graphics to obtain multiple calculated values;

[0032] The smallest calculated value is selected as the hash value of the design graphic.

[0033] Optionally, the method for grouping graphics of a scanning electron microscope image, before the step of grouping the graphic contours according to the characteristic values ​​of the design graphics, further comprises:

[0034] Obtaining the graphic contours that need to be grouped in the overall contour of the image;

[0035] Determine the design graphics corresponding to the graphic outlines to be grouped according to the corresponding relationship;

[0036] The grouping of the graphic contours according to the characteristic values ​​of the design graphic specifically includes grouping the graphic contours to be grouped according to the characteristic values ​​of the design graphic corresponding to the graphic contours to be grouped.

[0037] Optionally, the step of obtaining the contours of the graphics that need to be grouped in the overall contour of the image includes:

[0038] Overlapping the graphic outline and the corresponding design graphic;

[0039] Determining whether the graphic outline is completely within the corresponding design graphic;

[0040] If so, it is determined that the graphic outline is a graphic outline that needs to be grouped.

[0041] Optionally, the method for grouping graphics in a scanning electron microscope image further comprises, after the step of extracting contours of the graphics in the scanning electron microscope image:

[0042] The overall outline of the image and the design layout are output as a file in OASIS format.

[0043] According to another aspect of the present invention, there is also provided a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the steps of any of the above-mentioned methods for grouping graphics of scanning electron microscope images are implemented.

[0044] According to another aspect of the present invention, a computer program product is provided, which includes a computer program, and when the computer program is executed by a processor, the steps of any one of the above-mentioned methods for grouping graphics of scanning electron microscope images are implemented.

[0045] According to another aspect of the present invention, a computer device is provided, which includes a memory, a processor and a computer program stored in the memory, and the processor executes the computer program to implement the steps of any one of the above-mentioned scanning electron microscope image graphic grouping methods.

[0046] The method for grouping graphics of scanning electron microscope images of the present invention can utilize the one-to-one correspondence between the design graphics in the design layout and the graphic contours in the scanning electron microscope image, and utilize the characteristic values ​​of the design graphics for grouping, instead of directly utilizing the characteristics of the graphic contours themselves for grouping, thereby realizing automatic grouping of the graphic contours and solving the problem of low efficiency of manual grouping. Moreover, the shapes of the design graphics are relatively standard, and when there are slight differences between the boundary boxes of the design graphics, they can be correctly identified, thereby preventing the phenomenon that slight differences between the graphic contours cannot be distinguished and grouping errors occur when the graphics are directly grouped, that is, the embodiment of the present invention can avoid the erroneous grouping caused by slight differences between the polygons of the design layout being difficult to reflect on the SEM image, and it is obvious that the embodiment of the present invention improves the success rate of grouping.

[0047] Furthermore, in the method for grouping graphics of scanning electron microscope images of the present invention, for hash calculation, if the input is different, that is, the design graphics are different, the obtained hash values ​​are completely different. If the input is the same, the obtained hash values ​​must be the same, which provides accuracy for grouping. At the same time, hash value calculation is relatively efficient, which also improves the efficiency of graphic grouping. By obtaining hash values ​​for grouping through hash calculation, it is not necessary to ensure that the SEM image contains only one periodically repeated graphic. When the SEM image contains only multiple periodically repeated graphics, grouping can also be performed. That is, the embodiment of the present invention can also quickly and efficiently perform graphic grouping for the presence of multiple periodically repeated graphics, or when the graphics are rotated, mirrored, etc.

[0048] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0050] Figure 1 is a schematic diagram of a SEM image according to one embodiment of the present invention;

[0051] Figure 2 is a schematic flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0052] Figure 3 is a schematic flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0053] Figure 4is a partial flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0054] Figure 5 is to use Figure 4 A schematic diagram of obtaining grouping results of a scanning electron microscope image graphic grouping method shown;

[0055] Figure 6 is a partial flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0056] Figure 7 is to use Figure 6 A schematic diagram of obtaining grouping results of a scanning electron microscope image graphic grouping method shown;

[0057] Figure 8 is a partial flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0058] Fig. 9 is a schematic flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0059] Fig.10 is a schematic diagram of the relationship between a graphic outline and a corresponding design graphic in a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0060] Fig.11 is a schematic diagram of the overlapping relationship between a graphic outline and a corresponding design graphic in a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0061] Fig.12 is a schematic diagram of the overlapping relationship between a graphic outline and a corresponding design graphic in a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention;

[0062] Fig.13 is a schematic diagram of a computer program product according to an embodiment of the present invention;

[0063] Fig.14 is a schematic diagram of a computer-readable storage medium according to an embodiment of the present invention; and

[0064] Fig.15 is a schematic diagram of a computer device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0065] This embodiment provides a method for grouping graphics of a scanning electron microscope image. Figure 2FIG. 1 is a flow chart of a method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention. The method may generally include:

[0066] Step S100, obtaining a scanning electron microscope image to be grouped and a design layout corresponding to the scanning electron microscope image. The scanning electron microscope image is also called a SEM image, such as Figure 1 As shown. The SEM image usually has a plurality of graphics, and the graphics have corresponding graphic outlines. The SEM image has a corresponding design layout 40, so that each graphic outline 42 corresponds to a design graphic 41 in the design layout 40 one by one.

[0067] Step S200 , extracting the contour of the graphics in the scanning electron microscope image to obtain the overall contour of the image including a plurality of graphic contours 42 .

[0068] Step S300, establishing a correspondence between the graphic outline 42 and the design graphic 41 in the design layout 40. By establishing the correspondence, each graphic outline 42 is associated with the corresponding design graphic 41.

[0069] Step S400, grouping the graphic outlines 42 according to the characteristic values ​​of the design graphics 41. In this step, the characteristics of the graphic outlines 42 are not directly used for grouping, but the characteristic values ​​of the design graphics 41 corresponding to the graphic outlines are used for grouping. The design graphics 41 are relatively standard, which is conducive to improving the accuracy of grouping.

[0070] In the embodiment of the present invention, the one-to-one correspondence between the design graphics 41 in the design layout 40 and the graphics in the scanning electron microscope image is used, and the characteristic values ​​of the design graphics 41 are used for grouping, instead of directly using the characteristics of the graphic outline itself for grouping, so as to realize automatic grouping of the graphic outline, and solve the problem of low efficiency of manual grouping. Moreover, the shape of the design graphics 41 is relatively standard, and when there are slight differences between the boundary boxes of the design graphics, they can be correctly identified, so as to prevent the phenomenon that the slight differences between the graphic outlines cannot be distinguished when the graphics are directly grouped, and the grouping error occurs, that is, the embodiment of the present invention can avoid the erroneous grouping caused by the slight differences between the polygons of the design layout being difficult to reflect on the SEM image, and it is obvious that the embodiment of the present invention improves the success rate of grouping.

[0071] In some embodiments of the present invention, Figure 3 As shown, the characteristic value of the design graphic is the hash value of the design graphic. Step S400, the step of grouping the graphic outlines according to the characteristic value of the design graphic, specifically includes:

[0072] Step S410 , obtaining a hash value of each design graphic 41 .

[0073] Step S420: grouping the design graphics 41 according to the hash value. Specifically, the design graphics 41 with the same hash value may be grouped into one group.

[0074] Step S430: grouping the graphic outlines 42 according to the corresponding relationship.

[0075] Hash, also known as hashing, is a process of converting input data of any length (pre-mapping) into a fixed-length output (hash value) through a specific algorithm. Hash has the following characteristics: high efficiency, the hash algorithm can quickly calculate the hash value of the input data, and can maintain high efficiency even for the processing of large amounts of data. Determinism, the same input data always produces the same hash value, which ensures the consistency and predictability of the algorithm. Anti-collision, it is very difficult to find two different input data so that they produce the same hash value (i.e., a collision occurs). It can be seen that for hash calculation, if the input is different, that is, the design graphics 41 is different, the hash value obtained is completely different. If the input is the same, the hash value obtained must be the same, which provides accuracy for grouping. At the same time, hash value calculation is more efficient, which also improves the efficiency of graphic grouping. By obtaining hash values ​​through hash calculation for grouping, it is not necessary to ensure that the SEM image contains only one periodically repeated graphic. When the SEM image contains only multiple periodically repeated graphics, it can also be grouped. That is, the embodiment of the present invention can also quickly and efficiently group graphics when there are multiple periodically repeated graphics, or when the graphics have rotation, mirroring, etc. The grouping results can be Figure 5 and Figure 7 As shown, the numbers in the figure can represent the grouping of the graphics, and the design graphics 41 with equal numbers are in the same group.

[0076] Moreover, since the design graphics 41 in the design layout 40 correspond to the graphic contours to be grouped, the grouping result of the design graphics 41 to be grouped is the grouping result of the graphics in the scanning electron microscope image, that is, the grouping result of the graphic contours in the scanning electron microscope image.

[0077] In some embodiments of the present invention, Figure 4 As shown, step S410, obtaining the hash value of each design graphic, includes:

[0078] Step S411 , selecting a coordinate origin on each design figure 41 .

[0079] Step S412: performing geometric transformation on the corresponding design figure 41 based on the selected coordinate origin.

[0080] Step S413, using hash coding to calculate the geometrically transformed design graphic 41 to obtain a hash value of the design graphic.

[0081] In the embodiment of the present invention, by selecting the coordinate origin and re-transforming the coordinate system, it is possible to prevent two design graphics 41 from belonging to the same group, but with different coordinate origin positions, resulting in different inputs during hash calculation, thereby preventing the occurrence of grouping errors due to different calculation results. By replacing the coordinate origin, the embodiment of the present invention ensures the uniformity of input data during hash calculation and improves the accuracy of graphic grouping. The obtained grouping results can be shown as follows: Figure 5 For example, the point at the lower left corner of each design graphic 41 can be used as the new coordinate origin.

[0082] In other embodiments of the present invention, Figure 6 As shown, step S410, obtaining the hash value of each design graphic, includes:

[0083] Step S414, rotating and / or mirroring the design graphic 41 to obtain an auxiliary graphic.

[0084] Step S415, selecting coordinate origins on the design graphic 41 and the auxiliary graphic respectively.

[0085] Step S416, performing geometric transformation on the corresponding design graphics 41 and auxiliary graphics based on the selected coordinate origin.

[0086] Step S417, using hash codes to calculate the geometrically transformed design graphics 41 and the auxiliary graphics to obtain multiple calculated values.

[0087] Step S418 , selecting the smallest calculated value as the hash value of the design pattern 41 .

[0088] In an embodiment of the present invention, when the graphics contained in the SEM image are rotated, mirrored, etc., such graphics are essentially the same type of scanning electron microscope images and belong to the same group. However, after being directly hashed, they are divided into different groups, which will increase the number of groups, and the graphics between the two groups cannot be used at the same time to help smooth the contour of the SEM image. Based on this, in order to reduce the number of groups, each graphic to be grouped is geometrically transformed to form a graphic group based on the graphics to be grouped. When two essentially the same graphics form two graphic groups respectively, the minimum hash values ​​in the two graphic groups must be the same, so that the two graphics are divided into one group, which can reduce the number of groups and increase the number of graphic contours in each group, which is helpful for the smoothing of the contour of the scanning electron microscope image. Moreover, when the number of graphics in the SEM image is small, it can also be effectively grouped to prevent the number of graphic contours in each group from being too small. Moreover, the embodiment of the present invention also takes into account the situation that such design graphics 41 will appear in the design layout 40. The obtained grouping result can be as follows Figure 7 As shown, it is obvious that the number of groups is smaller and the number of graphic contours within a group is increased.

[0089] In some embodiments of the present invention, after the step of extracting the contour of the graphics in the scanning electron microscope image, the method further includes: outputting the overall contour of the image and the design layout in an OASIS format file. The OASIS (OpenArtwork System Interchange Standard) format file plays a vital role in integrated circuit design and can be used to represent a photolithography layout on which the photolithography pattern is recorded, and is conducive to improving design and manufacturing efficiency.

[0090] In some embodiments of the present invention, Figure 8 As shown, the method for grouping graphics of a scanning electron microscope image, before the step of grouping the graphic contours according to the characteristic values ​​of the designed graphics, further comprises:

[0091] Step S500, obtaining the graphic contour 42 that needs to be grouped in the overall contour of the image;

[0092] Step S600, determining the design graphics 41 corresponding to the graphic contours 42 to be grouped according to the corresponding relationship. Grouping the graphic contours 42 according to the characteristic values ​​of the design graphics 41 specifically includes grouping the graphic contours 42 to be grouped according to the characteristic values ​​of the design graphics 41 corresponding to the graphic contours 42 to be grouped.

[0093] In an embodiment of the present invention, in view of the characteristics of the graphic contours themselves, some graphic contours do not make sense to group, and some graphic contours do not need to be grouped. Only the graphic contours that need to be grouped can be screened out, and the design graphics corresponding to the graphic contours that need to be grouped can be screened out, thereby reducing the amount of calculation and improving the grouping efficiency.

[0094] In some embodiments of the present invention, Fig. 9 As shown, step S500, obtaining the graphic contours that need to be grouped in the overall contour of the image, includes:

[0095] Step S510, overlapping the graphic outline 42 and the corresponding design graphic 41; Fig.10 , Fig.11 , Fig.12 shown.

[0096] Step S520 , determining whether the graphic outline 42 is completely within the corresponding design graphic 41 .

[0097] If yes, proceed to step S530 to determine that the graphic outline 42 is a graphic outline that needs to be grouped. Then the design graphic 41 corresponding to the graphic outline 42 is the design graphic 41 that needs to be grouped. Fig.11 The graphic outline 42 and the design graphic 41 in FIG.

[0098] If not, the process proceeds to step S540 to discard the graphic outline 42, that is, also discard the design graphic 41 corresponding to the graphic outline 42. Fig.12 The graphic outline 42 and the design graphic 41 in FIG.

[0099] In the embodiment of the present invention, the graphic outline 42 is completely within the corresponding design graphic 41, such as Fig.11 As shown, the surface graphic outline 42 belongs to a complete graphic outline. Such a graphic selection is conducive to other operations on the scanning electron microscope image. If the graphic outline 42 is partially or completely within the corresponding design graphic 41, such as Fig.12 As shown, these graphic contours can be considered as graphic contours with incomplete edges in the scanning electron microscope image, which are not graphic contours that need to be grouped, that is, they do not need to be grouped and should be discarded. Therefore, the embodiment of the present invention can avoid the influence of the graphic contour 42 with incomplete edges in the scanning electron microscope image on the grouping.

[0100] In the method for grouping graphics of a scanning electron microscope image according to an embodiment of the present invention, the design layout 40 information is used to identify the complete graphic outline 42 in the SEM image, a corresponding relationship between the graphic outline 42 and the design graphics 41 (also referred to as polygons) in the design layout 40 is established, and grouping is performed using a hash value-based method. The use of this method has the following beneficial effects:

[0101] High accuracy: This method utilizes the information of the design layout 40 to avoid erroneous grouping caused by the difficulty in reflecting the slight differences between polygons in the design layout 40 on the SEM image; This method identifies the complete graphic outline 42 in the SEM image outline to avoid the influence of the incomplete graphic outline 42 on the image edge on the grouping.

[0102] Fully automated: The entire process of identifying and grouping the complete graphic outline 42 of the SEM image is achieved through an automated algorithm, which is faster and more efficient than manual methods when processing a large number of SEM images.

[0103] Wide range of applications: This method realizes the grouping of similar graphics in SEM images, so it can be applied to areas on silicon wafers with multiple periodically repeated patterns; this method takes rotation and mirroring into account when performing grouping, so that the number of groups is reduced and the number of graphic contours 42 in each group is increased, so that effective grouping can be achieved even when the number of graphics in the SEM image is small.

[0104] The flow chart provided by the present embodiment is not intended to indicate that the operation of the method will be performed in any particular order, or that all operations of the method are included in all every case. In addition, the method may include additional operations. Within the scope of the technical thinking provided by the present embodiment method, additional changes may be made to the above method.

[0105] It should be understood that in some embodiments, each part can be implemented by hardware, software, firmware or a combination thereof. In the above embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system.

[0106] This embodiment also provides a computer program product 10 , a computer readable storage medium 20 , and a computer device 30 . Fig.13 is a schematic diagram of a computer program product 10 according to an embodiment of the present invention, Fig.14 is a schematic diagram of a computer-readable storage medium 20 according to an embodiment of the present invention, Fig.15 is a schematic diagram of a computer device 30 according to an embodiment of the present invention. The computer program product 10 includes a computer program 11, which implements the steps of any of the above-mentioned methods for grouping images of scanning electron microscope images when the computer program 11 is executed by a processor 32. The computer readable storage medium 20 stores the above-mentioned computer program 11, which implements the steps of any of the above-mentioned methods for grouping images of scanning electron microscope images when the computer program 11 is executed by the processor 32. The computer device 30 may include a memory 31, a processor 32, and the computer program 11 stored in the memory 31 and running on the processor 32.

[0107] The computer program 11 for performing the operation of the present invention may be an assembly instruction, an instruction set architecture (ISA) instruction, a machine instruction, a machine-related instruction, a microcode, a firmware instruction, a state setting data, a configuration data of an integrated circuit, or a source code or an object code written in any combination of one or more programming languages ​​and process programming languages. The computer program 11 may be executed entirely on the user's computer, partially on the user's computer, as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the latter case, the remote computer may be connected to the user's computer via any type of network (including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer. In some embodiments, in order to perform various aspects of the present invention, an electronic circuit including, for example, a programmable logic circuit, a field programmable gate array (FPGA) or a programmable logic array (PLA) may execute computer-readable program instructions by utilizing the state information of the computer-readable program instructions to personalize the electronic circuit.

[0108] In the description of this embodiment, the computer program product 10 is a related product including the computer program 11 .

[0109] For the purpose of the description of the present embodiment, the computer readable storage medium 20 is a tangible device capable of retaining and storing the computer program 11, which can be any device that can contain, store, communicate, propagate or transmit the computer program 11 for use with an instruction execution system, device or apparatus or in conjunction with these instruction execution systems, devices or apparatuses. More specific examples (a non-exhaustive list) of the computer readable storage medium 20 include the following: a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a static random access memory (SRAM), a portable compact disk read-only memory (CD-ROM), a digital versatile disk (DVD), a memory stick, a floppy disk, a mechanical encoding device, and any suitable combination of the above.

[0110] The computer device 30 may be, for example, a server, a desktop computer, a notebook computer, a tablet computer, or a smart phone. In some examples, the computer device 30 may be a cloud computing node. The computer device 30 may be described in the general context of computer system executable instructions (such as program modules) executed by a computer system. Typically, a program module may include routines, programs, target programs, components, logic, data structures, etc. that perform specific tasks or implement specific abstract data types. The computer device 30 may be implemented in a distributed cloud computing environment where remote processing devices linked via a communication network perform tasks. In a distributed cloud computing environment, program modules may be located on a local or remote computing system storage medium including a storage device.

[0111] The computer device 30 may include a processor 32 adapted to execute stored instructions, and a memory 31 providing temporary storage space for the operation of instructions during operation. The processor 32 may be a single-core processor, a multi-core processor, a computing cluster, or any number of other configurations. The memory 31 may include a random access memory (RAM), a read-only memory, a flash memory, or any other suitable storage system.

[0112] The computer device 30 may also include a network adapter / interface and an input / output (I / O) interface. The I / O interface allows data to be input and output with external devices that may be connected to the computer device. The network adapter / interface may provide communication between the computer device and a network, which is typically shown as a communication network.

[0113] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all these other variations or modifications.

Claims

1. A method for grouping graphics of scanning electron microscope images, characterized in that: include: Acquire scanning electron microscope images to be grouped and a design layout corresponding to the scanning electron microscope images; Extracting contours of the graphics in the scanning electron microscope image to obtain an overall contour of the image including contours of multiple graphics; Establishing a correspondence between the graphic outline and the design graphic in the design layout; The graphic outlines are grouped according to the feature values ​​of the design graphics.

2. The method for grouping graphics of scanning electron microscope images according to claim 1, characterized in that: The characteristic value of the design graphic is a hash value of the design graphic; The step of grouping the graphic outlines according to the characteristic values ​​of the design graphics comprises: Obtaining the hash value of each of the design graphics; grouping the design graphics according to the hash values; The graphic contours are grouped according to the corresponding relationship.

3. The method for grouping graphics of scanning electron microscope images according to claim 2, characterized in that: The step of obtaining the hash value of each of the design graphics comprises: Selecting a coordinate origin on each of the design figures; Performing geometric transformation on the corresponding design figure based on the selected coordinate origin; The hash code is used to calculate the design graphic after the geometric transformation to obtain the hash value of the design graphic.

4. The method for grouping graphics of scanning electron microscope images according to claim 2, characterized in that: The step of obtaining the hash value of each of the design graphics comprises: Rotating and / or mirroring the design graphic to obtain an auxiliary graphic; Selecting coordinate origins on the design figure and the auxiliary figure respectively; Performing geometric transformation on the corresponding design graphics and auxiliary graphics based on the selected coordinate origin; Using hash codes to calculate the geometrically transformed design graphics and the auxiliary graphics to obtain multiple calculated values; The smallest calculated value is selected as the hash value of the design graphic.

5. The method for grouping graphics of scanning electron microscope images according to claim 1, characterized in that: Before the step of grouping the graphic outlines according to the characteristic values ​​of the design graphics, the method further comprises: Obtaining the graphic contours that need to be grouped in the overall contour of the image; Determine the design graphics corresponding to the graphic outlines to be grouped according to the corresponding relationship; The grouping of the graphic contours according to the characteristic values ​​of the design graphic specifically includes grouping the graphic contours to be grouped according to the characteristic values ​​of the design graphic corresponding to the graphic contours to be grouped.

6. The method for grouping graphics of scanning electron microscope images according to claim 5, characterized in that: The step of obtaining the graphic contours that need to be grouped in the overall contour of the image includes: Overlapping the graphic outline and the corresponding design graphic; Determining whether the graphic outline is completely within the corresponding design graphic; If so, it is determined that the graphic outline is a graphic outline that needs to be grouped.

7. The method for grouping graphics of scanning electron microscope images according to claim 1, characterized in that: After the step of extracting the contour of the graphics in the scanning electron microscope image, the method further comprises: The overall outline of the image and the design layout are output as a file in OASIS format.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method for grouping patterns of scanning electron microscope images according to any one of claims 1 to 7 are implemented.

9. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the steps of the method for grouping patterns of scanning electron microscope images according to any one of claims 1 to 7 are implemented.

10. A computer device, characterized in that: The method comprises a memory, a processor and a computer program stored in the memory, wherein the processor executes the computer program to implement the steps of the method for grouping patterns of scanning electron microscope images according to any one of claims 1 to 7.

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