823 results about "Scan electron microscopy" patented technology

The invention discloses a preparation method and application of a tension sensor for monitoring cortisol in sweat. According to the scheme, on the basis of a stretchable electrode (SWNTs / PDMS) which is prepared by patterning in a manner that a single-walled carbon nanotube is subjected to suction filtration and transfer printing on polydimethylsiloxane, cortisol is used as an imprinting molecular template by utilizing an electrochemical deposition technology, and Prussian blue (PB) and pyrrole (Py) are electrically polymerized to prepare an electrochemical sensor of a molecularly imprinted polymer (MIP), so that the change of the concentration of cortisol in sweat can be monitored in real time; a reliable and practical method is provided for rapid and pressure-free pressure monitoring. A scanning electron microscope is used for electrode modification morphology characterization, and an electrochemical workstation is used for electrode sensing performance characterization. The sensor realizes the function of dynamically monitoring the day and night change rule of cortisol in sweat, and has the characteristics of real-time detection, high sensitivity and selectivity and good stability.

Described herein are machine learning based system, method, and non-transitory computer readable medium for determining three-dimensional (3D) information of a structure of a patterned substrate. The 3D information can be determined using a neural network to convert a two-dimensional image to a 3D image. In a method, the neural network is trained by supplying simulated images of a sample with varied parameters to model a real fabricated IC structure. The trained network generates a depth map from newly supplied images of a sample to predict defect location The depth map may be converted to a binary map to predict defect dimension and location that may be used to guide inspection of a sample using an inspection tool.

A federated machine learning method is provided. The method includes providing, from a central model server, an initial trained machine learning (ML) model to a plurality of clients as a respective local ML model. The initial trained ML model is configured to identify defect features from scanning electron microscopy (SEM) images. The method additionally includes receiving, from at least one client by the central model server, information indicative of a respective updated local ML model. The method also includes determining, based on the information indicative of the respective updated local ML models, an updated global ML model.

The invention provides a preparation method of a bionic microfluidic device for researching fluid migration in carbonate rock micro-nano fractures, which comprises the following steps: step 1, analyzing and classifying scanning electron microscope images of carbonate rock core slices through a random forest algorithm to generate a chip design drawing; step 2, based on the chip design drawing, re-etching a crack structure through a photoresist template and polydimethylsiloxane by adopting a soft lithography technology, and bonding with a glass substrate to form a micro-fluidic chip; and step 3, injecting a precursor liquid containing the calcite nano seed crystal into the micro-fluidic chip flow channel, fixing the seed crystal through ultraviolet irradiation, and injecting a saturated equilibrium liquid to realize calcium carbonate mineral precipitation so as to form the bionic micro-fluidic device. The method can be used for coupling research of all fluids and carbonate rock fractures, and a method for recovering the carbonate rock fracture structure to the maximum extent and a rock surface property cloning method are provided.

The invention relates to a marine-source microbacterium laminae CJB-Jou02 strain capable of efficiently biodegrading PE (polyethylene) microplastics, and the degradation capability of the marine-source microbacterium laminae CJB-Jou02 strain is evaluated. According to the microbacterium capable of degrading the PE micro-plastic leaves, the microbacterium is screened out from a marine mud sample, the preservation number of the strain is CGMCC 29643, the strain treats high-density PE micro-plastic for 30 days, the weight loss rate reaches up to 16.6 + / -0.46%, and the microbacterium can be used for degrading the PE micro-plastic leaves. Based on test results of a scanning electron microscope, a Fourier transform infrared spectrum, a water contact angle instrument and an X-ray diffractometer, the strain is proved to have the capability of efficiently biodegrading the PE micro-plastic, the compact crystal structure of the PE micro-plastic is damaged, the particle diameter is obviously reduced, and the hydrophilicity is increased. Meanwhile, the invention also finds that the microbacterium leaf strain CJB-Jou02 has certain degradation capacity on PE (polyethylene) membranes and microplastic bacteria such as PA (polyamide), PP (polypropylene), PS (polystyrene), PET (polyethylene terephthalate) and the like, and a new solution is provided for solving the problem of environmental pollution of PE microplastics.

The invention relates to the technical field of secondary batteries, in particular to a lithium ion secondary battery, a positive electrode active material, a preparation method and electric equipment, the positive electrode active material of the lithium ion secondary battery comprises a first part and a second part, in the positive electrode active material, the content of a nickel element in a transition element is greater than or equal to 0.85, and the content of a nickel element in the transition element is greater than or equal to 0.85. In a scanning electron microscope picture with the magnification factor of 2K, the ratio of the longest diameter to the shortest diameter of the secondary particles of the first part is greater than or equal to 1.1, and the ratio of the longest diameter to the shortest diameter of the secondary particles of the second part is greater than or equal to 1 and less than 1.1; based on the total number of the secondary particles of the positive electrode active material, the number ratio of the secondary particles of the first part is 70%-85%, and the number ratio of the secondary particles of the second part is 15%-30%. Therefore, the volume energy density and the stability of the lithium ion secondary battery are improved.

A ternary polycrystalline positive electrode material is a secondary ball formed by agglomerating primary particles, the secondary ball is equally divided into four parts in the direction from the center to the surface of the secondary ball, the four parts are an inner core layer, a first middle layer, a second middle layer and a shell layer, and the section of the ternary polycrystalline positive electrode material is observed through a scanning electron microscope. The porosity is sequentially reduced from inside to outside. The preparation method comprises the following steps: mixing a positive electrode material precursor, a lithium source and a Li-containing polyanion compound, and sintering at a high temperature to obtain a primary sintered matrix; and washing and drying the primary sintering substrate, mixing the primary sintering substrate with a coating agent, and sintering to obtain the ternary polycrystalline positive electrode material. The invention also discloses a lithium ion battery. The porosity of the section of the positive electrode material is sequentially reduced from inside to outside, so that the positive electrode material can be in more sufficient contact with an electrolyte, more diffusion paths are formed, the transmission obstruction of lithium ions is reduced, and the transmission rate of the lithium ions is effectively improved, so that the discharge performance of the positive electrode material is improved, and the cycle performance of the material is improved.

The invention discloses a scanning electron microscope. The scanning electron microscope comprises a scanning electron microscope main body and a sample table located in a sample cavity, the scanning electron microscope main body is fixedly connected with the upper cover of the sample cavity, so that a closed space is formed in the sample cavity; a closed-loop groove is formed in an upper cover of the sample cavity; wherein the groove is located outside the connection position of the upper cover of the sample cavity and the scanning electron microscope main body, and the bottom of the groove is not higher than the supporting surface of the sample table; a magnetic shielding layer is arranged in the groove; wherein the length of the magnetic shielding layer is not less than the distance from the objective lens of the scanning electron microscope main body to the supporting surface of the sample stage.

The invention provides a simulation image generation method for simulating a scanning electron microscope and related equipment, and the method comprises the steps: constructing a first imaging feature mapping table and a second imaging feature mapping table based on the scanning electron microscope image data of a real wafer; respectively making a standard imaging script and a defect imaging script based on the two imaging feature mapping tables; obtaining a wafer three-dimensional model and analyzing associated process attribute information in each structural unit; determining a corresponding standard imaging script based on the process attribute information, and performing surface characteristic adjustment on the structural unit to generate a defect-free simulation model; determining a corresponding defect imaging script according to a preset defect introduction condition, and adding a defect on a specified structural unit to generate a simulation model with a defect; and finally, generating a simulation image for simulating the scanning electron microscope. High-simulation scanning electron microscope images are manufactured in batches through a virtual simulation means, and the diversity and coverage of a simulation image data set are improved.

The invention provides a positive electrode material, a positive plate thereof and a secondary battery, the positive electrode material comprises a plurality of particles, at least part of the particles have microcracks, the size of the microcracks is 0.5 nm to 30 nm, the number of the particles with the microcracks accounts for 1.5% to 13% of the total number of the particles of the positive electrode material, and the number of the particles with the microcracks accounts for 1.5% to 13% of the total number of the particles of the positive electrode material. The number ratio testing method comprises the following steps: carrying out scanning electron microscope testing on the positive electrode material to obtain a scanning electron microscope image, selecting 300 positive electrode material particles from the scanning electron microscope image, and counting the number of the positive electrode material particles with microcracks to obtain the number ratio. When the positive electrode material or the positive plate applying the positive electrode material is applied to the secondary battery, the gas production behavior is obviously reduced, and the capacity is relatively high, so that the cycle stability and the safety of the secondary battery are favorably improved.

The invention discloses a heating structure used in a scanning electron microscope and a use method of the heating structure, and relates to the technical field of scanning electron microscope high-temperature performance tests.The heating structure comprises a laser, a shell module, a laser clamping module and an electron back scattering diffraction scanning fixing module, and the upper surface of the electron back scattering diffraction scanning fixing module is obliquely arranged; the laser clamping module is installed on the electron back scattering diffraction scanning fixing module, the shell module is installed above the laser clamping module, a heating dodging plate used for placing a sample to be tested is arranged in the shell module, and the laser clamping module is used for clamping a laser lens of a laser. Laser beams output by the laser lens are irradiated on the heating dodging plate, the two ends of the to-be-tested sample extend out of the shell module and are connected with the stretching table, and an observation hole for observing the sample is formed in the upper end of the shell module. According to the invention, the imaging definition of the scanning electron microscope can be improved, and the in-situ high-temperature mechanical property test and the EBSD high-temperature analysis experiment in the scanning electron microscope can be smoothly carried out.

The invention discloses a multi-scale performance evaluation and optimization method and device for well cementation cement stone, and relates to the technical field of oil exploitation, the well cementation cement stone is subjected to nanoindentation test and scanning electron microscope microstructure test, and a mechanical property-microstructure test result is obtained; performing electronic computer tomography and mercury injection test on the well cementation cement stone, and constructing a pore network three-dimensional model; performing triaxial mechanical property test, thermogravimetric analysis and thermal expansion test on the well cementation cement stone to obtain a thermal-mechanical coupling test result; performing X-ray diffraction and X-ray fluorescence spectrum analysis on the well cementation cement stone to obtain mineral phase information and element information of the cement stone; according to the method, a mechanical property-microstructure test result, topological parameters, a thermal-mechanical coupling test result, cement stone mineral phase information and element information are fused, an optimal design scheme for target well conditions is generated, multi-dimensional performance testing and characterization are achieved, and an accurate basis is provided for well cementation cement stone optimal design and quality control.

The invention provides a contour extraction method for a graph in a scanning electron microscope image and a related product. The method comprises the following steps: acquiring a scanning electron microscope image of a to-be-extracted contour and a design layout corresponding to the scanning electron microscope image; carrying out contour extraction on a graph in the scanning electron microscope image to obtain an initial graph contour; according to the initial graph contour, a design graph on the design layout is zoomed out or zoomed in, and a zoomed design graph is obtained; and performing contour extraction on a graph in the scanning electron microscope image by using the scaled design graph to obtain a target graph contour. After the design graph is scaled according to the proportion, the size of the design graph is quite close to the size of the actual graph. On the basis, contour extraction of the scanning electron microscope image is carried out, the success rate and the precision of graph contour extraction can be improved, and wrong contour extraction caused by image noise and signal intensity is avoided.

Provided is a pattern inspection system, including a scanning electron microscope (SEM) including an electron gun configured to generate a first electron beam and emit the generated first electron beam toward a first wafer, a detector configured to detect electrons emitted from the first wafer based on the first electron beam emitted toward the first wafer, and at least one processor configured to generate a first SEM image including a plurality of pixels based on the detected electrons, and determine, based on a period of a pattern extracted from the first SEM image, a pixel size of a second SEM image to be generated by the SEM with respect to a second wafer.

The invention provides a semiconductor wafer surface detection method and device and a scanning electron microscope, and the method comprises the steps: collecting a to-be-detected wafer surface two-dimensional image through the scanning electron microscope, inputting the to-be-detected wafer surface two-dimensional image into a surface detection model, determining a wafer surface three-dimensional image related to the to-be-detected wafer surface two-dimensional image, identifying and outputting wafer surface parameters of the wafer surface three-dimensional image; the surface detection model is obtained by pre-training a wafer surface parameter sample and a sample pair associated with a wafer surface two-dimensional image sample and a wafer surface three-dimensional image sample, and the wafer surface two-dimensional image sample is obtained by scanning a wafer sample through a scanning electron microscope; the wafer surface three-dimensional image sample is obtained by scanning the same wafer sample through three-dimensional detection equipment, and the wafer surface three-dimensional image sample is bound with wafer surface parameters. Compared with a pure two-dimensional image of the wafer surface, the accuracy of surface data detection is improved while the detection speed is ensured.

The invention discloses a micro-positive pressure hydrogen environment in-situ stress-strain testing device and method. The device comprises a sealed reaction cavity which can be placed in a scanning electron microscope sample cabin; the loading device is arranged in the cavity and is used for fixing and applying a load; the atmosphere control system is communicated with the cavity and is used for introducing gas and maintaining a micro-positive pressure state; an electron transmission window arranged on the cavity, wherein an electronic transparent film packaged by the electron transmission window can maintain air tightness under micro-positive pressure and allows electron beams to penetrate through; and the heating module is arranged in the cavity. The method comprises the following steps: loading and sealing a sample, establishing a micro-positive pressure atmosphere, heating the sample, starting loading, and synchronously carrying out SEM real-time imaging and data recording. The problem that a traditional SEM in-situ device cannot work in a real micro-positive pressure hydrogen and high-temperature environment is solved, and synchronous visual in-situ observation of material microstructure evolution and macromechanical response under the gas-heat-force multi-physics field coupling condition is achieved.

The invention provides a fuzzy knowledge graph construction method related to a wafer manufacturing process, and relates to the technical field of fuzzy knowledge graphs, and the method comprises the steps: employing a three-dimensional convolutional network to extract a spatial defect feature X of a scanning electron microscope image, carrying out the coding of sensor time series data through a bidirectional LSTM, and obtaining a feature set Y, obtaining electrical performance parameters of the wafer based on impedance spectroscopy analysis from the text to obtain a feature set Z; building fuzzy knowledge based on the text to reinforce the feature sets X, Y and Z, building a fuzzy feature set and a time sequence feature set, building a weighted scoring model, and screening a candidate set from the text according to the weighted scoring model; information is extracted from the candidate set, and a tetrad structure G = (entities, relationships, time attributes and fuzzy rules) is constructed; and taking G as input, generating a time sequence fuzzy rule through a recursive reconstruction contribution method, and incrementally updating the knowledge graph. According to the method, the characterization bottleneck of space-time coupling and uncertainty correlation in a traditional method is broken through.

The invention relates to the technical field of nickel-based superalloy grain segmentation and extraction, in particular to a nickel-based superalloy grain segmentation and extraction method based on a VGG and U-Net fusion model. The method comprises the following steps: preparing an Inconel 740H high-temperature alloy sample; carrying out an in-situ tensile experiment according to the manufactured sample, and observing the microstructure by using a scanning electron microscope in the experiment process; acquiring image data according to different stages of the experiment; performing data enhancement on the acquired image according to the brightness contrast; marking according to the characteristics of the crystal grains to be segmented; obtaining a reference image data set according to the annotation file; performing normalization processing according to the reference image data set to obtain a data set; designing a feature extraction module according to the VGG network model; designing a feature fusion module according to the U-Net network model; carrying out fusion according to the two designed modules to obtain a V-Unet fusion model; designing a loss function according to gray information and structural information of the grain boundary area of the reference image grain relative to other areas, and obtaining a loss function weight of the grain boundary area of the reference image grain; calculating according to the weight of the loss function to obtain model feedback; training according to the V-Unet fusion model to obtain a model; carrying out grain segmentation extraction on an Inconel 740H high-temperature alloy scanning electron microscope image according to the model; performing morphological post-processing according to a segmentation extraction result to obtain a grain image result; and performing statistics and data analysis according to a grain image result. The method can be used for segmenting, extracting and counting the same type of grains at different positions of the nickel-based superalloy and refining the grains to improve the mechanical property of the superalloy, and has great significance.

4, 4 '-bipyridine (Bpy), 2, 5-thiophenedicarboxylic acid (Tdc), FeCl3. 6H2O, NiCl2. 6H2O, urea and tetrabutylammonium bromide are used as raw materials, a simple hydrothermal-calcination method is adopted to prepare the Fe2O3-coated Ni-MOF composite nanomaterial catalyst, X-ray diffraction (XRD), a scanning electron microscope (SEM) and a N2 adsorption and desorption technology are adopted to characterize a prepared sample, and the electro-catalytic oxygen evolution reaction (OER) activity of the Fe2O3-coated Ni-MOF composite nanomaterial catalyst is tested. Results show that compared with a single component, the activity of the composite nano-material catalyst is greatly improved, especially the composition-optimized Fe2O3-coated Ni-MOF-1 composite nano-material catalyst shows the highest catalytic activity, the composite nano-material catalyst catalyzes OER in 1M KOH, and the overpotential (eta 10) is only 330mV when the current density is 10mA / cm < 2 > and is close to the overpotential 291mV of a noble metal catalyst RuO2.

A method for training a local machine learning model is provided. The method includes receiving a scanning electron microscope (SEM) image of semiconductor features. The method additionally includes determining a location and dimensions of a bounding box within the SEM image. The method yet further includes determining, whether a defect feature exists within the bounding box, based on an unsupervised object detection process. The method also includes, if the defect feature exists within the bounding box, receiving positive rewards. The method also includes, if the defect feature does not exist within the bounding box, receiving negative rewards.

The invention discloses a method for identifying the binding form of heavy metals on soil particles based on image superposition and machine learning. The method comprises the following steps: S1, establishing a method for classifying soil particles by taking composition elements as standards; s2, eliminating background noise of an element distribution situation graph obtained by the electron microscope energy spectrum; s3, the types of soil particles under the scanning electron microscope are determined, a plurality of soil particles are contained in an image of the scanning electron microscope, boundaries among the particles are obvious, and the soil particles are generally analyzed one by one in sequence; and S4, calculating the distribution condition of the heavy metals among the soil particle components. According to the method, the change of the biotoxicity of the Cu in the soil after the exogenous microorganisms are added can be indicated by a lossless and in-situ method, and the adsorption condition of the Cu in the heavy metal contaminated soil on each component after the exogenous microorganisms are added can be analyzed, so that the influence generated by the Cu can be obtained; the method has great potential for reducing the heavy metal biotoxicity of the polluted soil, and has great significance for follow-up guide practice.

The present invention comprises a computer-implemented method for automating the co-registration of SEM and 3D microtomography images in rock sample cylinders, characterized by comprising three main steps: (i) image pre-processing; (ii) internal orthogonal search; (iii) external multi-angle search. The method plays a fundamental role in the creation of image pairs. These pairs capture the same region of the rock, but with different analytical properties. Thus, the co-registration between 2D microscopy and 3D tomographic data provides a fundamental basis for the application of machine learning techniques and the expansion of the originally planar mineralogy to the entire three-dimensional volume. The three-dimensional mineralogical model generated from this co-registration has fundamental implications for the creation of digital rock models. The automation of the co-registration process between these acquisitions contributes to the advancement of petroleum engineering, since co-registration accelerates the process of generating image pairs for the use of machine learning algorithms in the generation of the three-dimensional mineralogical model. This method, in its turn, has direct application both in oil reservoir engineering and in geological interpretation.

The present invention relates to a colloidal composition comprising unmodified, discrete cellulose microparticles, such as a colloidal emulsion or colloidal gel, a method of preparing the colloidal composition and uses of the colloidal composition and cellulose particles The colloidal composition comprises a continuous phase and a dispersed phase, wherein the continuous phase is a liquid; wherein the dispersed phase comprises cellulose microparticles which are dispersed in the continuous phase of the colloidal composition, wherein the cellulose microparticles have a mean average particle length of from 0.1 to 20 µm a mean average particle width from 0.05 to 1.3 µm, and a maximum thickness not exceeding 0.2 µm determined by scanning electron microscopy; and an aspect ratio of length / width of 1 to 25, and wherein the colloidal composition has a flow index n of ≤ 1 determined by a rheometer at NTP (normal temperature (25°C) and pressure (1 atm)).

The invention relates to the technical field of carbon fiber microstructure detection, in particular to a carbon fiber skin-core structure detection method, device and equipment and a storage medium. The carbon fiber skin-core structure detection method comprises the steps that a scanning electron microscope morphology graph of a carbon fiber skin-core structure is obtained; performing Raman spectrum scanning on the carbon fiber skin-core structure based on the scanning electron microscope morphology graph; overlapping the scanning electron microscope morphology graph and the Raman spectrum, and constructing a correlation graph of the chemical components and the microstructure of the carbon fiber skin-core structure; and carrying out gradient detection on the chemical component and microstructure correlation map to obtain a detection result of the carbon fiber skin-core structure. According to the invention, synchronous visualization of the morphology and the chemical structure of the carbon fiber skin-core structure can be realized, and the carbon fiber skin-core structure can be visually and quantitatively detected.

The invention provides an argon ion beam scanning electron microscope double-beam system and an in-situ sample analysis method, an electron optical lens barrel of the system generates a high-energy electron beam for scanning the surface of a sample for imaging; the ion optical lens cone generates a high-energy argon ion beam for sample surface polishing; the sample chamber is used for accommodating samples and providing a vacuum environment; the sample table is used for accurately controlling the position and angle of a sample; and the detector is used for collecting signals generated by interaction of the electron beam and the sample for imaging analysis. According to the invention, a sample transfer step is eliminated, so that the sample preparation and analysis efficiency is greatly improved; a millimeter-scale large-size sample can be treated, and a sample with a flat and smooth surface can be obtained; sample polishing and imaging are carried out in the same vacuum environment, so that sample pollution is reduced to the greatest extent, and the accuracy of an analysis result is improved; by combining argon ion beam polishing and scanning electron microscope imaging technologies, efficient, high-precision and in-situ analysis of the sample is realized, so that more comprehensive and more accurate microstructure information is obtained.

The invention discloses a microcapsule as well as a preparation method and application thereof. The microcapsule comprises a capsule core and a capsule wall, the capsule core is wrapped in the capsule wall, the capsule core contains an active component, the elastic modulus of the microcapsule and the thickness of the capsule wall meet the following formula: Y = 0.42 X < 2 >-0.92 X + T, Y is the elastic modulus of the microcapsule, and the unit is GPa; x is the thickness of the capsule wall, and the unit is [mu] m; t is 1 + / -0.1; the elastic modulus of the microcapsule is obtained by testing the mechanical property of the microcapsule by adopting a nanoindentor, and the thickness of the capsule wall is obtained by testing the frozen section of the microcapsule by adopting a scanning electron microscope. The microcapsule provided by the invention is suitable for pavement asphalt, and can effectively improve the self-repairing efficiency of a pavement asphalt material; in addition, in the asphalt construction process, the emission of asphalt smoke can be effectively reduced, and the pollution to the environment is reduced.

A method and system for calibrating a tilt angle of an electron beam of a backscatter scanning electron microscope is disclosed, the method comprising: scanning a bare wafer at a plurality of electron beam tilt angles and azimuth angles, thereby obtaining a calibration map representing a crystal orientation of the bare wafer; selecting a tilt angle based on the calibration map and defining an expected diffraction pattern associated with the tilt angle; scanning the patterned wafer at the selected tilt angle; comparing a diffraction pattern of an image obtained from the scanning of the patterned wafer at the selected tilt angle with an expected diffraction pattern; a tilt angle of an electron beam of the BSEM tool is corrected such that a diffraction pattern of an image obtained during scanning of the patterned wafer will align with an expected diffraction pattern.

Disclosed are a method of forming an optical proximity correction (OPC) model and / or a method of fabricating a semiconductor device using the same. The method of forming the OPC model may include obtaining a scanning electron microscope (SEM) image, which is an average image of a plurality of images taken using one or more scanning electron microscopes, and a graphic data system (GDS) image, which is obtained by imaging a designed layout, aligning the SEM image and the GDS image, performing an image filtering process on the SEM image, extracting a contour from the SEM image, and verifying the contour. The verifying of the contour may be performed using a genetic algorithm. Variables in the genetic algorithm may include first parameters related to the image alignment process, second parameters related to the image filtering process, and third parameters related to a critical dimension (CD) measurement process.

The invention relates to an optimization method for FIB-SEM double-beam synchronous controllable processing of a flexible material and application of the optimization method. The optimization method for FIB-SEM double-beam synchronous controllable processing of the flexible material comprises a surface cleaning step, a scanning electron microscope imaging step, a double-beam centering adjustment step and an etching step, in the etching step, ion beam processing and electron beam imaging work at the same time, and in the etching step, ion beam processing and electron beam imaging work at the same time; and the electron beam is started after the preset processing pattern and before the ion beam starts processing, and is quickly turned off after the processing is completed. According to the optimization method for the FIB-SEM double-beam synchronous controllable processing of the flexible material, the situation that the performance of the material is reduced due to deformation caused by bombardment and heat generation of the high-energy particle beam can be avoided, and meanwhile the reliability of the etching process is kept.

The invention relates to the technical field of mineral analysis, and discloses a rock alternating temperature and pressure characteristic analysis method, system and equipment and a storage medium, a plurality of pressure values and a plurality of temperature values of a spherical cavity are obtained to simulate different actual environmental conditions, and a micro scanning electron microscope, an X-ray diffractometer and an X-ray fluorescence spectrometer are combined to simulate the temperature and pressure characteristics of the spherical cavity. The rock sample to be analyzed can be comprehensively tested and analyzed from multiple angles. Furthermore, the detector is used for collecting the test data set of the rock sample to be analyzed generated by the test, so that the automatic collection of the data is realized, and the test efficiency is improved. Finally, alternating temperature and pressure characteristic analysis is carried out through the data processing subsystem, and characteristic changes of the rock under different temperature and pressure conditions can be obtained. Therefore, by implementing the method, the rock sample to be analyzed is comprehensively tested and analyzed from multiple angles, the limitation that the conventional research method is single is overcome, and meanwhile, the obtained alternating temperature and pressure characteristic analysis result is more comprehensive.