533 results about "Scan electron microscopy" patented technology

Ion source and method of making and sharpening. The ion source is a single crystal metal conductor having a substantially conical tip portion with substantial rotational symmetry. The tip portion terminates with a tip radius of curvature in the range of 50–100 nanometers. The ion source is made by electrochemical etching so that a conical tip of a selected geometry is formed. The ion source is then sharpened to provide a source of ions from a volume near the size of a single atom. Further, this ion source makes possible a stable and practical light ion microscope which will have higher resolution than existing scanning electron microscopes and scanning metal-ion microscopes.

Nanowhiskers are grown in a non-preferential growth direction by regulation of nucleation conditions to inhibit growth in a preferential direction. In a preferred implementation, <001> III-V semiconductor nanowhiskers are grown on an (001) III-V semiconductor substrate surface by effectively inhibiting growth in the preferential <111>B direction. As one example, <001> InP nano-wires were grown by metal-organic vapor phase epitaxy directly on (001) InP substrates. Characterization by scanning electron microscopy and transmission electron microscopy revealed wires with nearly square cross sections and a perfect zincblende crystalline structure that is free of stacking faults.

An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or “slices” of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive “slices” is then used to determine the three-dimensional surface roughness for the feature.

Provided is a magnetic carrier giving a high quality image free of density variation without the occurrence of fogging or carrier adhesion and having excellent dot reproducibility even during long-term use. The magnetic carrier has magnetic carrier particles produced by filling pores of porous magnetic core particles with a resin. The magnetic carrier contains 80% by number or more of the magnetic carrier particles satisfying the specific conditions (a) and (b) when 18 straight lines passing through a reference point of a cross section of the magnetic carrier particle are drawn at intervals of 10° in a reflected electron image of the cross section of the magnetic carrier particle photographed by a scanning electron microscope.

A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordings, the positions of these marks are determined and are used to quantify the slice thickness removed between consecutive image recordings.

Disclosed are lens apparatus in which a beam of charged particles is brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscope as the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and / or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.

A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.

The invention discloses a method for preparing grapheme through organic amine solvothermal method, which comprises the following steps: 1) adopting the solvothermal method to lead expanded graphite to react with organic amine or organic amine solvent to obtain the semi-discrete liquid of grapheme; 2) implementing ultrasonic dispersion and then implementing centrifugation on the semi-discrete liquid of grapheme obtained from the step 1), and then collecting supernate, thus obtaining the grapheme. The invention obtains the grapheme by taking solvent thermal spalling as a means. A scanning electron microscope, a transmission electron microscope, and an atomic force microscope are adopted to represent the topogram of the grapheme; a Raman spectrum and an X-ray photoelectron spectroscopy are used to represent the density of imperfection and oxidation situation of the grapheme. The result shows that the grapheme synthesized by the method of the invention has the advantages of small size, high quality, less defects, light oxidation degree, etc. besides, the method for preparing grapheme through organic amine solvothermal method also has the advantages of simple synthetic route, low cost, high concentration and uneasy accumulation of the synthesized discrete liquid of grapheme, and excellent application prospect on the aspect of discrete liquid of grapheme materials.

The invention relates to composite core-shell particles wherein the core is a porous, carbon-based matrix which contains silicon particles enclosed in pores of the matrix; the pores containing the silicon particles have a diameter of not less than 60 nm as determined by scanning electron microscopy (SEM); the shell can be obtained by carbonizing one or more carbon precursors selected from among the group comprising tars, pitches, hard carbon, soft carbon and hydrocarbons having 1 to 20 carbon atoms, resulting in a non-porous shell.

The invention relates to an in-situ micro-nanometer mechanics testing and scoring machining integrated machine, belonging to a mechanical-electrical integration precision scientific instrument. A left side step motor drives a screw nut through a coupler; relative connecting pieces are driven by the screw nut, so that the rough feeding of a flexible hinge and a diamond pressing head can be realized; and a piezoelectric stack drives the flexible hinge to carry out precise feeding. A right side objective table and a precise force sensor are mounted on the flexible hinge, and is connected with a rotor through a screw; thin-sheet-shaped structures at the both sides of the rotor are in clearance fit with the output ends of the two flexible hinges; the rotor is connected with a guide rail sliding block; the two symmetrical flexible hinges and the guide rail are mounted on a tail base; and the tail base is mounted on the base. The in-situ micro-nanometer mechanics testing and scoring machining integrated machine has the advantages of small size and compact structure; and the in-situ micro-nanometer mechanics testing and scoring machining integrated machine can be mounted in a scanning electronic microscope for a micro-nanoindentation and scoring test. The in-situ micro-nanoindentation test of a material can be carried out at first; the scoring machining technique is optimized according to a test result; the scoring machining is realized according to an optimal technique parameter; and finally, the integrated testing and machining process can be finally realized.