Substrate holding device and substrate chuck
By using spherical point contact support parts and clamps in the substrate holding device, the problem of back contamination on the substrate caused by the residue of the drug liquid is solved, and the yield rate is improved.
Patent Information
- Application Number
- CN202311414365.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-10-27
- Publication Date
- 2025-04-29
AI Technical Summary
In the single-piece wet process, the residue of the medicinal liquid on the substrate holding device will splash on the back of the substrate when the chuck rotates, causing corrosion and contamination and affecting the yield rate.
A substrate holding device is designed, using a spherical point contact support portion to contact the substrate, and the substrate is fixed in a preset position through a clamp and a guide column to reduce residues of the drug liquid.
It effectively reduces the residue of the drug liquid in the substrate holding device, prevents the risk of contamination on the back of the substrate, and improves the yield rate of substrate etching or cleaning.
Smart Images
Figure CN119905450A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor processing equipment, and further to a substrate holding device and a substrate chuck. Background Art
[0002] In the process of integrated circuit manufacturing, the wet process of the substrate is an important process that affects the product yield. Among them, the single-chip wet process has been increasingly widely used due to its good uniformity, repeatability and stability. In the current single-chip wet process, the substrate to be wet-etched or cleaned is generally fixed on a chuck through a substrate holding device, and the substrate is rotated by the chuck, and the surface of the substrate is processed by spraying a liquid.
[0003] However, during the above process, there is a splashing phenomenon, that is, the chemical liquid remaining on the surface of the substrate holding device will be thrown off the substrate holding device when the chuck rotates, and splash onto the back of the substrate, which can easily cause corrosion and contamination to the structure on the back of the substrate, thereby affecting the yield of substrate etching or cleaning.
[0004] In summary, the present application aims to provide a substrate holding device for preventing the risk of contamination on the back side of the substrate and improving the yield of etching or cleaning the substrate. Summary of the invention
[0005] In view of the above technical problems, the object of the present invention is to provide a substrate holding device to reduce the residual chemical solution in the substrate holding device, thereby preventing the risk of contamination on the back side of the substrate and improving the yield of substrate etching or cleaning.
[0006] In order to achieve the above-mentioned object, the present invention provides a substrate holding device and a substrate chuck.
[0007] In some embodiments, the substrate holding device is installed on a substrate chuck, and includes: a base, assembled on the edge of the substrate chuck; a support portion, fixed to the base, used to contact and support the substrate through a spherical point arranged on the top thereof; a guide column, fixed to the base, used to guide and limit the substrate to a preset position; a clamping member, which is movably connected to the base, used to clamp and fix the substrate from the side of the substrate after the substrate is guided and limited to the preset position.
[0008] In some embodiments, the substrate holding device is installed on a substrate chuck, and includes: a base body, which can be rotatably assembled on the edge of the substrate chuck; a supporting portion, constructed on the top of the base body, and used to contact and support the substrate through a spherical point arranged on the top of the base body; a clamping portion, constructed on the top of the supporting portion, the clamping portion is eccentrically arranged with the base body, and is used for, after the substrate is supported on the spherical surface, the base body drives the clamping portion to rotate in a preset direction to clamp and fix the substrate from the side of the substrate.
[0009] In some embodiments, the substrate holding device is mounted on a substrate chuck, and includes: a supporting portion, assembled on an edge of the substrate chuck, for contacting and supporting the substrate via a spherical point disposed on the top thereof.
[0010] In some embodiments, the substrate chuck includes: a chuck body, the edge of which is equipped with a plurality of the above-mentioned substrate holding devices; and a driving gear located inside the chuck body and used to drive each of the substrate holding devices.
[0011] The present invention provides a substrate holding device and a substrate chuck. The supporting surface of the substrate holding device for supporting the substrate is a spherical surface and is in point contact with the bottom surface of the substrate, so as to reduce the residual liquid of the substrate holding device, thereby preventing the risk of contamination on the back side of the substrate and improving the yield of etching or cleaning the substrate. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present invention.
[0013] Figure 1 is a three-dimensional diagram of a substrate holding device according to an embodiment of the present application;
[0014] Figure 2 yes Figure 1 A top view of
[0015] Figure 3 yes Figure 1 The main view;
[0016] Figure 4 yes Figure 1 Left view of;
[0017] Figure 5 yes Figure 1 Cross-sectional views of the support portions of five implementations of the illustrated embodiment along the symmetry plane P1;
[0018] Figure 6 yes Figure 1 A perspective view of the substrate holding device of the illustrated embodiment assembled on a substrate chuck;
[0019] Figure 7 yes Figure 6 The main view;
[0020] Figure 8 is a three-dimensional diagram of a substrate holding device according to another embodiment of the present application;
[0021] Fig. 9 yes Figure 8 A top view of
[0022] Fig.10 yes Figure 8 The main view;
[0023] Fig.11 yes Figure 8 Bottom view of
[0024] Fig.12 is a three-dimensional diagram of a substrate holding device according to an embodiment of the present application;
[0025] Fig.13 This is a three-dimensional diagram of a transmission member of an embodiment of the present application;
[0026] Fig.14 is a three-dimensional diagram of a substrate holding device according to an embodiment of the present application assembled on a substrate chuck;
[0027] Fig.15 yes Fig.14 Cross-sectional view along dd direction;
[0028] Fig.16 yes Fig.15 A partial enlarged view of area a;
[0029] Fig.17 yes Fig.14 A top view of
[0030] Fig.18a Fig.17 A partial enlarged view of area b;
[0031] Fig.18b yes Fig.18a A schematic diagram of another embodiment of the present invention. DETAILED DESCRIPTION
[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.
[0033] In order to simplify the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".
[0034] In this document, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0036] The invention discloses a substrate clamping device which can be installed on a substrate chuck and is used for fixing the substrate.
[0037] like Figure 1 As shown in FIG. 1 , a substrate holding device 100 according to an embodiment of the present invention is disclosed, comprising a base 120, a support portion 130, a guide post 140 and a clamping member 150. Specifically, in combination with Figure 1 and Figure 6 The base 120 can be assembled on the edge of the substrate chuck 400. The support part 130 is fixed to the base 120 and is used to contact and support the substrate 300 through a spherical surface 1311 set on the top thereof. The guide column 140 is fixed to the base 120 and is used to guide and limit the substrate 300 to a preset position. The clamping member 150 is movably connected to the base 120 and is used to clamp and fix the substrate 300 from the side of the substrate 300 after the substrate 300 is guided and limited to the preset position. For example, the clamping member 150 is connected to the base 120 through a pin 160 (combined with reference Figure 3 ) is hingedly connected to the base 120. After the substrate 300 is guided and limited to a preset position, the top of the clamping member 150 rotates around the pin shaft 160 toward the edge of the substrate 300 to clamp and fix the substrate 300 from the side of the substrate 300.
[0038] Preferably, if Figures 1 to 4 As shown, the spherical surface 1311 is constructed as a plane-symmetrical structure, wherein the symmetry plane P1 is parallel to the radial direction d2 of the substrate chuck 400 and is symmetrical to the surface 401 of the substrate chuck 400 (combined with reference Figure 6) is perpendicular to the spherical surface 1311, and the highest point C of the spherical surface 1311 is located on the intersection line S of the symmetry plane P1 and the spherical surface 1311.
[0039] Specifically, Figure 5 (a) to Figure 5 (d) shows cross-sectional views of the support portion 130 along the symmetry plane P1 of five embodiments. In the above five embodiments, the highest point C of the spherical surface 1311 is located on the intersection line S between the symmetry plane P1 and the spherical surface 1311, and the radius of the spherical surface 1311 in each embodiment is the same, and the center O of the spherical surface 1311 is always located on the same vertical radius as the highest point C. The difference is that the position of the highest point C on the intersection line S is different.
[0040] It is assumed that the center of the substrate chuck 400 is located at Figure 5 The left side of each support portion 130 is shown. Figure 5 (a) indicates that the highest point C of the spherical surface 1311 is located on the side of the intersection line S close to the center of the substrate chuck 400, and the intersection line S gradually descends outward along the radial direction d2 of the substrate chuck 400, which is conducive to the chemical liquid sprayed on the top of the support part 130 to flow toward the side away from the center of the substrate chuck 400, thereby preventing the chemical liquid from being retained on the top of the support part 130; Figure 5 (b) to Figure 5 (d) indicates that the highest point C of the spherical surface 1311 is located in the middle of the intersection line S, and the intersection line S first rises and then falls along the radial direction d2 of the substrate chuck 400, which is conducive to a part of the chemical liquid sprayed on the top of the support part 130 flowing toward the side of the center of the substrate chuck 400, and the other part flowing toward the side away from the center of the substrate chuck 400, thereby avoiding the chemical liquid from being retained on the top of the support part 130, and the spherical surface 1311 gradually rises outward along the above-mentioned radial direction d2 at the side of its highest point C close to the center of the substrate chuck 400, and the point contact between this part of the spherical surface 1311 and the edge of the substrate 300 can reduce the friction resistance when the substrate 300 is reset, which is conducive to the reset of the substrate from an inclined state to a horizontal state; Figure 5 (e) indicates that the highest point C of the spherical surface 1311 is located on the side of the intersection line S away from the center of the substrate chuck 400, and the intersection line S gradually rises outward along the radial direction d2 of the substrate chuck 400, which is conducive to the chemical liquid sprayed on the top of the support part 130 to flow toward the side of the center of the substrate chuck 400, thereby avoiding the chemical liquid from being retained on the top of the support part 130.
[0041] Preferably, refer again to Figure 2 and Figure 6, the support portion 130 and the clamping member 150 are arranged in sequence along the radial direction d2 of the substrate chuck 400, and the support portion 130 is located on the side of the clamping member 150 close to the center of the substrate chuck 400. The guide posts 140 are arranged in pairs on both sides of the clamping member 150 in the circumferential direction d1 of the substrate chuck 400. In addition, the cross-sectional shape of the support portion 130 is preferably an isosceles triangle, and the base of the isosceles triangle is arranged close to the clamping member 150 to reduce the resistance of the support portion 130 to the liquid medicine, facilitate the liquid medicine to flow along the two sides of the support portion 130, and reduce the liquid medicine residue on the substrate holding device 200.
[0042] Figures 8 to 11 FIG. 2 shows another embodiment of a substrate holding device 200 of the present application. In practical applications, at least three substrate holding devices 100 or 200 are configured at the edge of the substrate chuck 400. For example, in this embodiment, Figure 6 and Figure 7 As shown, five substrate holding devices 100 are arranged at intervals on the edge of the substrate chuck 400; in the next embodiment, as shown in FIG. Fig.14 and Fig.15 As shown, six substrate holding devices 200 are arranged at intervals on the edge of the substrate chuck 400. In addition, the specific structures of the base 120, the guide column 140 and the clamping member 150 in this embodiment can be adaptively modified according to the prior art without departing from the technical concept of the present application, and will not be repeated here.
[0043] In this embodiment, a support portion 130 having a spherical surface 1311 is introduced to support the substrate 300 in a point contact manner, thereby reducing the contact area between the substrate 300 and the support portion 130, thereby avoiding the accumulation of residual liquid at the position where the back side of the substrate 300 contacts the support portion 130, thereby reducing the risk of contamination on the back side of the substrate 300 and improving the yield of etching or cleaning the substrate 300.
[0044] like Figure 8 2, another substrate holding device 200 according to an embodiment of the present invention is disclosed, comprising a base body 210, a supporting portion 230 and a clamping portion 240. Specifically, in combination with Figure 8 and Fig.14 The base body 210 can be rotatably assembled on the edge of the substrate chuck 400. The support portion 230 is configured at the top of the base body 210, and is used to point-contact and support the substrate 300 through the spherical surface 2311 disposed on the top thereof. The clamping portion 240 is configured at the top of the support portion 230, and the clamping portion 240 is eccentrically disposed with the base body 210, and is used for the base body 210 to drive the clamping portion 240 to rotate toward a preset direction d3 after the substrate 300 is supported on the spherical surface 2311, so as to clamp and fix the substrate 300 from the side of the substrate 300.
[0045] Preferably, if Fig. 9As shown, the highest point C of the clamping portion 240 and the spherical surface 2311 is sequentially constructed on the top of the support portion 230 along the preset direction d3. It should be noted that in the drawings of this embodiment, the counterclockwise rotation of the substrate holding device 200 can make the base body 210 drive the clamping portion 240 to clamp and fix the substrate 300 from the side of the substrate 300, so the preset direction d3 in this embodiment is the counterclockwise direction. Similarly, in implementations other than this embodiment, the clockwise rotation of the substrate holding device 200 can make the base body 210 drive the clamping portion 240 to clamp and fix the substrate 300 from the side of the substrate 300, and the preset direction d3 is the clockwise direction.
[0046] Preferably, a first inclined surface 2313 is provided on the top of the support portion 230, and the first inclined surface 2313 is arranged to be inclined downward and intersect with the spherical surface 2311. The first inclined surface 2313 is conducive to the flow of the chemical liquid from the top of the support portion 230, thereby preventing the chemical liquid retained on the top of the support portion 230 from contaminating the back of the substrate 300 during the period when the substrate holding device 200 fixes the substrate 300.
[0047] Preferably, the first inclined surface 2313 forms an acute angle with the tangent direction d5 of the preset direction d3 passing through the highest point C. The above-mentioned arrangement of the first inclined surface 2313 is conducive to reducing the surface area of the spherical surface 2311 and reducing the residual liquid medicine on the surface of the spherical surface 2311. In addition, when the substrate holding device 200 rotates along the preset direction d3, the liquid medicine retained on the surface of the first inclined surface 2313 is thrown off the first inclined surface 2313 under the action of centrifugal force. It should be noted that if a circle passing through the highest point C is made with a point on the rotation axis of the base body 210 as the center (the point must be in the same horizontal plane as the highest point C), the preset direction d3 coincides with the circle, and the tangent direction d5 coincides with the tangent of the circle passing through the highest point C.
[0048] Preferably, refer again to Figure 8 and Fig. 9 The top of the support portion 230 is also provided with a second inclined surface 2312, which is arranged to be inclined downward and intersects with the spherical surface 2311. The first inclined surface 2313 and the second inclined surface 2312 are located on both sides of the spherical surface 2311. In addition, the first inclined surface 2313 is located on the side of the spherical surface 2311 away from the base body 210, and the second inclined surface 2312 is located on the side of the spherical surface 2311 close to the base body 210.
[0049] Preferably, the support portion 230 is configured such that, when the substrate holding device 200 is in a clamping state, the first inclined surface 2313 and the second inclined surface 2312 are respectively parallel to or at an acute angle to the radial direction d2 of the substrate chuck. Fig.17 , Fig.18a , Fig.18bAs shown, the substrate holding device 200 is installed at the edge of the substrate chuck 400. When the substrate holding device 200 is in the clamping state, the substrate holding device 200 rotates along the preset direction d3 so that its clamping portion 240 clamps and fixes the substrate 300 from the side of the substrate 300. Fig.18a As shown, the first inclined surface 2313 forms an acute angle inward with the radial direction d2 of the substrate chuck, and the second inclined surface 2312 forms an acute angle outward with the radial direction d2 of the substrate chuck; Fig.18b As shown, the first inclined surface 2313 and the second inclined surface 2312 are parallel to the radial direction d2 of the substrate chuck respectively. The above arrangement is conducive to the liquid medicine retained on the first inclined surface 2313 and the second inclined surface 2312 being thrown off from the surface under the action of centrifugal force when the substrate holding device 200 rotates along the circumferential direction d1 with the substrate chuck 400.
[0050] Preferably, refer again to Figure 8 and Fig. 9 The substrate holding device 200 further includes a connecting portion 220, which is configured at the top of the base body 210 and extends along the radial direction d4 of the base body 210 in a direction away from the base body 210. The supporting portion 230 is configured at the top of the connecting portion 220 and is located at an end of the connecting portion 220 away from the base body 210, so that the clamping portion 240 is eccentrically arranged with respect to the base body 210.
[0051] Preferably, if Fig.10 As shown, the clamping portion 240 is an inverted frustum structure, so that when the clamping portion 240 clamps and fixes the substrate 300 from the side, the side of the clamping portion 240 is in point contact with the edge of the substrate 300, and the side of the clamping portion 240 can simultaneously apply a radial force to clamp the substrate 300 and a vertical force to press the substrate 300 to the edge of the substrate 300.
[0052] In addition, the base body 210 has a mounting hole 270 extending along the direction of the rotation axis d6, which is used to rotatably assemble the base body 210 to the edge of the substrate chuck 400. Fig.12 and Fig.13 As shown, the substrate holding device 200 further includes a transmission member 260, which is detachably mounted on the bottom of the base body 200. The transmission member 260 includes a gear portion 262 and a transmission shaft 261, one end of the transmission shaft 261 is mounted in the mounting hole 270, and the other end of the transmission shaft 261 is coaxially connected to the gear portion 262.
[0053] Preferably, the substrate holding device 200 also includes a fixing member 250, and the fixing member 250 and the transmission shaft 261 are mounted at both ends of the mounting hole 270 facing each other and connected in the mounting hole 270, and are used to fix the gear part 262 along the direction of the rotation axis d6. Specifically, when the above-mentioned fixing member 250 is a screw, the end of the transmission shaft 261 away from the gear part 262 is constructed as a threaded hole 2611 that matches the above-mentioned screw. In addition, the transmission shaft 261 and the mounting hole 270 have mutually matching non-circular cross-sections, which are used to fix the gear part 262 along a preset direction. The above-mentioned non-circular cross-section includes a rectangular cross-section, a triangular cross-section, an elliptical cross-section, etc., for example Fig.13 In the structure of the transmission member 260 shown, the cross section of the end of the transmission shaft 261 away from the gear portion 262 is configured as a rectangle.
[0054] In another embodiment of the present application, a substrate holding device is disclosed, which can be installed on a substrate chuck for carrying a substrate. Specifically, the substrate holding device includes a support portion, which is assembled on the edge of the substrate chuck and is used to point-contact and support the substrate through a spherical surface arranged on the top thereof. It should be noted that the substrate holding device may include only a support portion, or may include the base, guide post and clamp in the previous embodiment, or a component with similar functions to the base, guide post and clamp. This embodiment introduces a support portion with a spherical surface to support the substrate in a point-contact manner, thereby avoiding the presence of residual liquid at the position where the back of the substrate contacts the support portion, thereby preventing the risk of contamination on the back of the substrate and improving the yield of etching or cleaning the substrate.
[0055] like Fig.14 , Fig.15 and Fig.16 As shown, in another embodiment of the present application, a substrate chuck 400 is disclosed, comprising a chuck body 430 and a driving gear 420. The edge of the chuck body 430 is equipped with a plurality of substrate holding devices 200 disclosed in any of the above embodiments. The driving gear 420 is located inside the chuck body 430 and is used to drive each substrate holding device 200.
[0056] Preferably, a plurality of through holes 410 are spaced apart on the edge of the chuck body 430, and the transmission shaft 261 can be rotatably installed in the through hole 410 so that the base body 210 can be rotatably installed on the surface 401 of the chuck body 430, and the gear part 262 is installed inside the chuck body 210, and the gear part 262 is meshed with the driving gear 420.
[0057] Preferably, a shielding structure 411 is provided at the edge of the through hole 410 to prevent the liquid medicine on the surface 401 of the chuck body 430 from penetrating into the inside of the chuck body 430 along the gap between the through hole 410 and the transmission shaft 261. Specifically, the shielding structure 411 is configured as an annular boss 4111 surrounding the through hole 410, and one end of the mounting hole 270 close to the chuck body 430 cooperates with the side wall of the annular boss 4111. The cross-sectional shape of the side wall of the annular boss 4111 is circular. The above-mentioned matching structure of the annular boss 4111 and the mounting hole 270 is, on the one hand, that the annular boss 4111 is arranged around the through hole 410, which is beneficial to prevent the medicine liquid on the surface 401 of the chuck body 430 from penetrating into the interior of the chuck body 430 along the through hole 410; on the other hand, the mounting hole 270 and the annular boss 4111 are arranged in cooperation with each other, which is beneficial to guide the medicine liquid on the surface of the base body 210 to the outside of the annular boss 4111, thereby preventing the medicine liquid on the surface of the base body 210 from penetrating into the interior of the chuck body 430 along the through hole 410 and affecting the normal operation of the equipment.
[0058] Specifically, refer again to Fig.10 The mounting hole 270 is provided along the direction of the rotation axis d6 and penetrates the base body 210 and the connecting portion 220 located at the top of the base body 210. The mounting hole 270 includes a connecting section 272, a non-circular cross-sectional section 271 and a shielding section 273 from top to bottom. Fig.11 As shown, in the bottom view of the substrate holding device 200, the cross-sectional boundaries of the connecting section 272, the non-circular cross-sectional section 271 and the shielding section 273 in the mounting hole 270 are arranged in sequence from the inside to the outside. Among them, the cross-sectional shape of the mounting hole 270 located in the connecting section 272 is circular, which is used to install the fixing member 250, and the length of the fixing member 250 is greater than the length of the connecting section 272, so that the fixing member 250 can be installed in the threaded hole 2611 at the end of the transmission shaft 261. The cross-sectional shape of the mounting hole 270 located in the non-circular cross-sectional section 271 is a non-circular shape that matches the transmission shaft 261. The cross-sectional shape of the mounting hole 270 located in the shielding section 273 is a circular shape that matches the side wall of the annular boss 4111.
[0059] In the assembled state, the shielding structure 411 is assembled in the shielding section 273 of the mounting hole 270, the transmission shaft 261 is assembled from bottom to top through the shielding section 273 of the mounting hole 270 and is assembled in the non-circular cross-sectional section 271, and the fixing member 250 is assembled from top to bottom through the connecting section 272 of the mounting hole 270 and is fixed in the threaded hole 2611 of the transmission shaft 261. Thus, the substrate holding device 200 is fixed at the through hole 410, and the driving gear 420 is meshed with the gear portion 262 to drive the substrate holding device 200 to rotate.
[0060] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred embodiments of the present invention. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. A substrate holding device, mounted on a substrate chuck, characterized in that: include: A base, mounted on an edge of the substrate chuck; A support portion, fixed to the base, for contacting and supporting the substrate through a spherical point disposed on the top thereof; A guide column, fixed to the base, for guiding and limiting the substrate to a preset position; The clamping member is movably connected to the base and is used to clamp and fix the substrate from the side of the substrate after the substrate is guided and limited to the preset position.
2. The substrate holding device according to claim 1, characterized in that: The spherical surface is constructed as a plane-symmetrical structure, wherein the symmetry plane is parallel to the radial direction of the substrate chuck and perpendicular to the upper surface of the substrate chuck, and the highest point of the spherical surface is located on the intersection line of the symmetry plane and the spherical surface.
3. The substrate holding device according to claim 2, characterized in that: The highest point is located on a side of the intersection line close to the center of the substrate chuck; or the highest point is located on a side of the intersection line away from the center of the substrate chuck; Or the highest point is located in the middle of the intersection line.
4. The substrate holding device according to claim 1, characterized in that: The support portion and the clamping member are arranged in sequence along the radial direction of the substrate chuck, and the support portion is located on a side of the clamping member close to the center of the substrate chuck; The guide posts are arranged in pairs on both sides of the clamping member in the circumferential direction of the substrate chuck.
5. A substrate holding device, mounted on a substrate chuck, characterized in that: include: A base body, rotatably mounted on the edge of the substrate chuck; A support portion, constructed on the top of the base body, for contacting and supporting the substrate through a spherical point arranged on the top thereof; The clamping part is constructed on the top of the supporting part. The clamping part is eccentrically arranged with respect to the base body. After the substrate is supported on the spherical surface, the base body drives the clamping part to rotate along a preset direction so that the clamping part clamps and fixes the substrate from the side of the substrate.
6. The substrate holding device according to claim 5, characterized in that: The clamping portion and the highest point of the spherical surface are sequentially constructed on the top of the supporting portion along the preset direction.
7. The substrate holding device according to claim 6, characterized in that: A first inclined surface is disposed on the top of the support portion, and the first inclined surface is arranged to be inclined downward and intersect with the spherical surface.
8. The substrate holding device according to claim 7, characterized in that: The first inclined surface forms an acute angle with a tangent direction of the preset direction passing through the highest point.
9. The substrate holding device according to claim 7, characterized in that: A second inclined surface is also provided on the top of the support portion. The second inclined surface is arranged to be inclined downward and intersects with the spherical surface. The first inclined surface and the second inclined surface are located on both sides of the spherical surface.
10. The substrate holding device according to claim 9, characterized in that: The first inclined surface is located at a side of the spherical surface away from the base body, and the second inclined surface is located at a side of the spherical surface close to the base body.
11. The substrate holding device according to claim 9, characterized in that: The supporting portion is configured such that, when the substrate holding device is in a clamping state, the first inclined surface and the second inclined surface are respectively parallel to or at an acute angle to a radial direction of the substrate chuck.
12. The substrate holding device according to claim 5, characterized in that: The clamping portion is in an inverted truncated cone structure.
13. The substrate holding device according to claim 5, characterized in that: Also includes: The connecting portion is constructed on the top of the base body and extends along the radial direction of the base body toward a direction away from the base body. The supporting portion is constructed on the top of the connecting portion and is located at an end of the connecting portion away from the base body.
14. The substrate holding device according to claim 5, characterized in that: The base body has a mounting hole inside that is connected along the direction of its rotation axis, and the substrate holding device also includes: The transmission member is detachably mounted on the bottom of the base body, and comprises a gear portion and a transmission shaft, one end of the transmission shaft is mounted in the mounting hole, and the other end of the transmission shaft is coaxially connected to the gear portion.
15. The substrate holding device according to claim 14, characterized in that: Also includes: A fixing member, wherein the fixing member and the transmission shaft are mounted at two ends of the mounting hole facing each other and connected in the mounting hole, and are used to fix the gear part along the direction of the rotation axis.
16. The substrate holding device according to claim 14, characterized in that: The transmission shaft and the mounting hole have mutually matching non-circular cross sections for fixing the gear portion along the preset direction.
17. A substrate holding device, mounted on a substrate chuck, characterized in that: include: The supporting part is assembled on the edge of the substrate chuck and is used for contacting and supporting the substrate through a spherical point arranged on the top thereof.
18. A substrate chuck, characterized in that: include: A chuck body, the edge of which is equipped with a plurality of substrate holding devices according to any one of claims 14 to 16; A driving gear is located inside the chuck body and is used to drive each of the substrate holding devices.
19. The substrate chuck according to claim 18, wherein: The edge of the chuck body is provided with a plurality of through holes at intervals, and the transmission shaft can be rotatably installed in the through holes so that the base body is assembled on the surface of the chuck body, and the gear part is assembled inside the chuck body and meshes with the driving gear.
20. The substrate chuck according to claim 19, wherein: The edge of the through hole is provided with a shielding structure for preventing the drug liquid on the surface of the chuck body from penetrating into the interior of the substrate chuck along the gap between the through hole and the transmission shaft.
21. The substrate chuck according to claim 20, wherein: The shielding structure is constructed as an annular boss surrounding the through hole, and one end of the mounting hole close to the chuck body cooperates with the side wall of the annular boss.