Foreign matter maintenance method for silicon-based OLED (Organic Light Emitting Diode) product

Abstract

The invention discloses a foreign matter maintenance method for a silicon-based OLED (Organic Light Emitting Diode) product, which belongs to the technical field of foreign matter maintenance methods and can improve the yield of the product by maintaining foreign matters between a cathode and a cover plate. Foreign matters with different sizes in specifications acceptable by customers can be maintained; foreign matters on the evaporation film layer and the cathode film layer can also be maintained in the manner provided by the invention; the laser can maintain the laser from the front side, and also can avoid equipment hardware interference through a reflection mode; according to the silicon-based OLED, foreign matters are maintained between a cathode Sputter film layer and a glass cover plate CG film layer, the cathode film layer corresponding to the foreign matters can be damaged by adjusting a laser path, dark spots are formed at the positions of the foreign matters, then maintenance and repair upgrading can be achieved, meanwhile, the method can be compatible with an existing maintenance mode, a reflection maintenance mode is designed for avoiding equipment hardware interference, and the maintenance cost is reduced. The implementation and application of the method are ensured; the function of multi-directional automatic mobile detection is achieved, the reflecting mirror is of a spliced structure, and the equipment has the function of multifunctional operation.

Description

Technical Field

[0001] The invention relates to a foreign matter repair method for a silicon-based OLED product, belonging to the technical field of foreign matter repair methods. Background Art

[0002] Silicon-based OLED is the core component of near-eye display devices (VR, MR, AR). Light-emitting devices are manufactured on silicon-based substrates and eventually produced as light-emitting display units. In the production of silicon-based OLED, the cleanliness requirements for the production line are relatively high. Some small-sized um-level particles and foreign matter will fall into the production process, eventually affecting the display effect of the product. The defects caused by tiny particles are the main reason for yield loss in the silicon-based OLED display industry, resulting in a large number of defective process losses.

[0003] In the film layer structure, the anode (Anode) and the cathode (Cathode) are the light-emitting display units. When powered on, the anode and the cathode can drive the OLED in the middle to emit light and display the picture.

[0004] When foreign matter exists in the middle of the film layer, the laser is used to irradiate the OLED evaporated film layer and the cathode Sputter film layer and destroy the related film layer structure, so that the original anode-cathode energized light display will not emit light due to the destruction of the cathode and OLED film layer, making the visible tiny particles of foreign matter become dark spots.

[0005] The existing technology can only repair foreign matter in the OLED vapor-deposited film layer and the cathode Sputter film layer. Foreign matter between the cathode Sputter and the cover plate CG film layer cannot be repaired because the laser irradiates from top to bottom and the laser energy will be absorbed when encountering some foreign matter. This type of particulate foreign matter is usually directly scrapped, resulting in a large amount of yield loss.

[0006] Therefore, a method for repairing foreign matter in silicon-based OLED products is needed to improve the above-mentioned deficiencies. Summary of the invention

[0007] The main purpose of the present invention is to provide a method for repairing foreign matter in a silicon-based OLED product.

[0008] The purpose of the present invention can be achieved by adopting the following technical solutions:

[0009] A method for repairing foreign matter in a silicon-based OLED product, comprising a plane reflector, foreign matter, a laser lens and a repair screen;

[0010] The plane reflector is placed above the maintenance screen and is used to observe the position of foreign matter on the maintenance screen by adjusting the direction and position of the laser lens.

[0011] Preferably, the horizontal distance e between the laser lens and the foreign object is adjusted to ensure that e>e.

[0012] Preferably, the laser lens may be located above or on the side of the maintenance screen.

[0013] Preferably, the distance between the laser lens and the plane reflector is c, and the horizontal distance h between the laser reflection point and the laser and the horizontal distance e between the laser reflection point and the foreign object are adjusted.

[0014] Preferably, the best angle θ can be controlled and adjusted. When parameters such as c, d, e, h and angle θ are determined, the laser transmission distance f+g can be calculated.

[0015] Preferably, by adjusting the size of e and h, the repair of foreign objects of different sizes can also be covered. The distance between the laser lens and the center point of the foreign object is e. The distance f between the cathode film layer at the corresponding position of the foreign object, the Sputter film layer and the laser lens is calculated by the Pythagorean theorem.

[0016] Preferably, the foreign body repair of silicon-based OLED products also includes foreign body repair equipment;

[0017] The laser lens moves horizontally and vertically along the upper horizontal moving housing and the lower vertical moving housing, and the plane reflector is driven to open and close by the connecting plate, the upper connecting swing rod, the driving member, the connecting rod, the lifting plate and the L-shaped connecting block;

[0018] A connecting plate is installed in the upper transverse moving shell, and upper connecting swing rods are rotatably installed on both sides of the connecting plate. A plane reflecting mirror is installed in linkage with the outer end of the upper connecting swing rod. A connecting rod is pulled and installed on the lower side of the upper connecting swing rod. A lifting plate is installed on the outer end of the connecting rod. An L-shaped connecting block is installed on the lifting plate. The L-shaped connecting block is opened and closed by a pushing driving member.

[0019] Preferably, a driving member is installed in the upper horizontal movable housing and the lower vertical movable housing respectively, a piston rod is installed at the output end of the driving member, and the outer end of the piston rod is movably connected to the lens stopper and the lower vertical movable housing.

[0020] Preferably, the laser lens is installed in a lens stopper, and the outer side of the lens stopper is drivingly connected to a rotating drive member.

[0021] Preferably, the laser lens is a steering structure, the laser lens is a tiltable and refractable structure, and the maintenance screen is placed in a maintenance screen placement box.

[0022] Beneficial technical effects of the present invention:

[0023] The present invention provides a method for repairing foreign matter in a silicon-based OLED product.

[0024] 1. Yield improvement: By repairing foreign matter between the cathode and the cover plate, the yield of the product can be improved;

[0025] 2. Covering foreign bodies of different sizes: We can repair foreign bodies of different sizes within the specifications acceptable to customers;

[0026] 3. Compatible with existing foreign body repair methods: foreign bodies on the evaporation film layer and cathode film layer can also be repaired by the method proposed by the present invention;

[0027] 4. The laser position can be selected: the laser can be repaired directly facing the laser, or it can be repaired by reflection to avoid interference with the equipment hardware;

[0028] 5. When repairing foreign matter between the cathode Sputter film layer and the glass cover CG film layer of the silicon-based OLED, the cathode film layer corresponding to the foreign matter can be destroyed by adjusting the laser route, so that a dark spot is formed at the location of the foreign matter, which can then be repaired and upgraded. At the same time, the present invention is compatible with existing repair methods. In order to avoid interference with equipment hardware, a reflective repair method is designed to ensure the feasibility of the present invention;

[0029] 6. During the process of rising, the lifting plate pulls the connecting rod and the upper connecting rocker rod to work in conjunction. During the process of pushing the driving part back, the plane reflector covers the sliding position of the upper transverse moving shell. The laser lens and the plane reflector produce refraction and are used in conjunction with the maintenance screen. When the plane reflector is opened to both sides of the upper transverse moving shell, the laser lens brought by the driving part is started and moved to one side of the upper transverse moving shell above the maintenance screen placement box to realize the oblique shooting operation and the multi-directional automatic moving detection function. The reflector is a splicing structure, and this equipment has a multi-functional operation function. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of the refraction operation of a device according to a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product of the present invention;

[0031] Figure 2 A schematic diagram of a tilting operation of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0032] Figure 3 It is a schematic diagram of the overall structure of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0033] Figure 4 It is a schematic diagram of the interior of the horizontal and vertical moving structure of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0034] Figure 5It is a schematic diagram of the inner side of the horizontal and vertical moving structure of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0035] Figure 6 A schematic diagram of the horizontal and vertical moving structure of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0036] Figure 7 A schematic diagram of an opening and closing linkage structure of a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention;

[0037] Figure 8 A side view of an opening and closing linkage structure according to a preferred embodiment of a method for repairing foreign matter in a silicon-based OLED product according to the present invention.

[0038] In the figure: 1. plane reflector; 2. foreign matter; 3. laser lens; 4. maintenance screen; 5. upper horizontal movable shell; 6. lower vertical movable shell; 7. maintenance screen placement box; 501. connecting plate; 502. upper connecting swing rod; 503. pushing drive member; 504. connecting rod; 505. lifting plate; 506. L-shaped connecting block; 601. drive member; 602. piston rod; 603. rotating drive member; 604. lens limit member. DETAILED DESCRIPTION

[0039] In order to make the technical solution of the present invention more clear and specific to those skilled in the art, the present invention is further described in detail below in conjunction with embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0040] like Figure 1 - Figure 8 As shown, a foreign body repair method for a silicon-based OLED product provided in this embodiment includes a plane reflector 1, a foreign body 2, a laser lens 3 and a repair screen 4;

[0041] The plane reflector 1 is placed above the maintenance screen 4 and is used to observe the position of the foreign matter 2 on the maintenance screen 4 by adjusting the direction and position of the laser lens 3 .

[0042] Adjust the horizontal distance e between the laser lens 3 and the foreign object 2 to ensure that e1>e.

[0043] The laser lens 3 may be located above or at the side of the maintenance screen 4 .

[0044] The distance between the laser lens and the plane reflector is c, and the horizontal distance h between the laser reflection point and the laser and the horizontal distance e between the laser reflection point and the foreign object are adjusted.

[0045] The best angle θ can be controlled and adjusted. When the parameters such as c, d, e, h and angle θ are determined, the laser transmission distance f+g can be calculated.

[0046] By adjusting the size of e and h, it is also possible to repair foreign bodies 2 of different sizes. The distance between the laser lens 3 and the center point of the foreign body 2 is e. The distance f between the cathode film layer at the corresponding position of the foreign body, the Sputter film layer and the laser lens is calculated by the Pythagorean theorem.

[0047] Foreign matter repair for silicon-based OLED products also includes foreign matter repair equipment;

[0048] The laser lens 3 moves horizontally and vertically along the upper horizontal movable housing 5 and the lower vertical movable housing 6, and the plane reflector 1 is driven to open and close by the connecting plate 501, the upper connecting swing rod 502, the driving member 503, the connecting rod 504, the lifting plate 505 and the L-shaped connecting block 506;

[0049] A connecting plate 501 is installed in the upper transversely movable shell 5, and upper connecting rocker rods 502 are rotatably installed on both sides of the connecting plate 501. The outer end of the upper connecting rocker rod 502 is linked with a plane reflector 1. A connecting rod 504 is pulled and installed on the lower side of the upper connecting rocker rod 502. A lifting plate 505 is installed on the outer end of the connecting rod 504. An L-shaped connecting block 506 is installed on the lifting plate 505. The L-shaped connecting block 506 is pulled and opened and closed by the pushing driving member 503.

[0050] A driving member 601 is installed in the upper horizontal movable housing 5 and the lower vertical movable housing 6 respectively. A piston rod 602 is installed at the output end of the driving member 601. The outer end of the piston rod 602 is movably connected to the lens stopper 604 and the lower vertical movable housing 6.

[0051] The laser lens 3 is installed in the lens stopper 604 , and the outer side of the lens stopper 604 is drivingly connected to a rotation driving member 603 .

[0052] The laser lens 3 is a steering structure, the laser lens 3 is a tiltable and refractable structure, and the maintenance screen 4 is placed in the maintenance screen placement box 7.

[0053] like Figure 1 - Figure 8 As shown, the working process of a foreign body repair method for silicon-based OLED products provided by this embodiment is as follows: before the AOI station, the existing process is unchanged, the AOI station detects foreign body defects and marks the defective position and measures the size of the foreign body 2, the distance between the laser lens 3 and the product surface is c, the distance between the product cover surface and the cathode film layer Sputter is d, and the distance between the laser lens 3 and the center point of the foreign body 2 is e, then the two sides c+d and e of the triangle are determined, and the distance f between the cathode film layer Sputter film layer at the corresponding position of the foreign body and the laser lens can be calculated by the Pythagorean theorem, and the defective screen can be repaired by adjusting the laser energy;

[0054] The maintenance screen 4 is placed in a maintenance screen placement box 7, wherein the outer side cover of the maintenance screen placement box 7 is provided with a plane reflector 1, an upper lateral movable housing 5 and a lower vertical movable housing 6, and the lens stopper 604 and the rotation drive member 603 are driven to lift and move horizontally by starting the drive member 601 in the upper lateral movable housing 5 and the lower vertical movable housing 6, and the corresponding path of the laser lens 3 is changed during the movement, and when the laser lens 3 moves to the upper side of the maintenance screen placement box 7 on the lower vertical movable housing 6, the driving member 503 is started, and the driving member 503 is pulled by the driving member 503. The lifting plate 505 rises, and in the process of rising, the lifting plate 505 pulls the connecting rod 504 and the upper connecting rocker rod 502 to work in conjunction. In the process of pushing the driving member 503 back, the plane reflector 1 covers the sliding position of the upper transverse movable shell 5, and the laser lens 3 and the plane reflector 1 produce refraction and are used in conjunction with the maintenance screen 4. When the plane reflector 1 is opened to both sides of the upper transverse movable shell 5, the laser lens 3 brought by the driving member 601 is started and moved to the position on one side of the upper transverse movable shell 5 above the maintenance screen placement box 7 to realize the function of oblique shooting operation.

[0055] Example

[0056] like Figure 1 - Figure 2 As shown, the plane reflector 1 is placed above the maintenance screen 4. The direction and position of the laser lens 3 are adjusted to observe the position of the foreign body 2 on the maintenance screen 4. The existing process is unchanged before the AOI station. The AOI station detects foreign body defects and marks the defective position and measures the size of the foreign body 2. The distance between the laser lens 3 and the product surface is c, the distance between the product cover surface and the cathode film layer Sputter is d, and the distance between the laser lens 3 and the center point of the foreign body 2 is e. The two sides of the triangle c+d and e are determined, and the distance f between the cathode film layer Sputter film layer at the corresponding position of the foreign body and the laser lens can be calculated by the Pythagorean theorem. The defective screen can be repaired by adjusting the laser energy.

[0057] Embodiment 2

[0058] like Figure 3 - Figure 8As shown, the maintenance screen 4 is placed in the maintenance screen placement box 7, the outer side cover of the maintenance screen placement box 7 is provided with a plane reflector 1, an upper horizontal movable housing 5 and a lower vertical movable housing 6, and the lens stopper 604 and the rotation drive member 603 are driven to lift and move horizontally by starting the drive member 601 in the upper horizontal movable housing 5 and the lower vertical movable housing 6, and the corresponding path of the laser lens 3 is changed during the movement, and when the laser lens 3 moves to the upper side of the maintenance screen placement box 7 on the lower vertical movable housing 6, the driving member 503 is started to push the driving member 503. Pull the lifting plate 505 to rise. During the rising process, the lifting plate 505 pulls the connecting rod 504 and the upper connecting rocker rod 502 to work in conjunction. During the process of pushing the driving member 503 back, the plane reflector 1 covers the sliding position of the upper transverse movable shell 5. The laser lens 3 and the plane reflector 1 produce refraction and are used in conjunction with the maintenance screen 4. When the plane reflector 1 is opened to both sides of the upper transverse movable shell 5, the laser lens 3 brought by the driving member 601 is started to move to the position on one side of the upper transverse movable shell 5 above the maintenance screen placement box 7 to realize the function of oblique shooting operation.

[0059] The above description is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the scope disclosed by the present invention, which belong to the protection scope of the present invention.

Claims

1. A method for repairing foreign matter in a silicon-based OLED product, characterized in that: It comprises a plane reflector (1), a foreign object (2), a laser lens (3) and a maintenance screen (4); The plane reflector (1) is placed above the maintenance screen (4) and is used to observe the position of the foreign matter (2) on the maintenance screen (4) by adjusting the direction and position of the laser lens (3).

2. A method for repairing foreign matter in a silicon-based OLED product according to claim 1, characterized in that: Adjust the horizontal distance e between the laser lens (3) and the foreign object (2) to ensure that e1>e.

3. The method for repairing foreign matter in a silicon-based OLED product according to claim 2, characterized in that: The laser lens (3) can be located above or on the side of the maintenance screen (4).

4. The method for repairing foreign matter in a silicon-based OLED product according to claim 3, characterized in that: The distance between the laser lens and the plane reflector is c, and the horizontal distance h between the laser reflection point and the laser and the horizontal distance e between the laser reflection point and the foreign object are adjusted.

5. The method for repairing foreign matter in a silicon-based OLED product according to claim 4, characterized in that: The best angle θ can be controlled and adjusted. When the parameters such as c, d, e, h and angle θ are determined, the laser transmission distance f+g can be calculated.

6. The method for repairing foreign matter in a silicon-based OLED product according to claim 5, characterized in that: By adjusting the size of e and h, it is also possible to cover the maintenance of foreign bodies (2) of different sizes. The distance between the laser lens (3) and the center point of the foreign body (2) is e. The distance f between the cathode film layer Sputter film layer at the corresponding position of the foreign body and the laser lens is calculated by the Pythagorean theorem.

7. The method for repairing foreign matter in a silicon-based OLED product according to claim 1, characterized in that: Foreign matter repair for silicon-based OLED products also includes foreign matter repair equipment; The laser lens (3) moves horizontally and vertically along the upper horizontal movable housing (5) and the lower vertical movable housing (6), and the plane reflector (1) is driven to open and close by the connecting plate (501), the upper connecting swing rod (502), the driving member (503), the connecting rod (504), the lifting plate (505) and the L-shaped connecting block (506); A connecting plate (501) is installed in the upper transverse movable housing (5), upper connecting swing rods (502) are rotatably installed on both sides of the connecting plate (501), a plane reflector (1) is installed in linkage at the outer end of the upper connecting swing rod (502), a connecting rod (504) is pulled and installed on the lower side of the upper connecting swing rod (502), a lifting plate (505) is installed on the outer end of the connecting rod (504), an L-shaped connecting block (506) is installed on the lifting plate (505), and the L-shaped connecting block (506) is pulled and opened and closed by the pushing driving member (503).

8. The method for repairing foreign matter in a silicon-based OLED product according to claim 7, characterized in that: A driving member (601) is installed in the upper horizontal movable housing (5) and the lower vertical movable housing (6) respectively. A piston rod (602) is installed at the output end of the driving member (601). The outer end of the piston rod (602) is movably connected to the lens stopper (604) and the lower vertical movable housing (6).

9. The method for repairing foreign matter in a silicon-based OLED product according to claim 8, characterized in that: The laser lens (3) is installed in the lens stopper (604), and the outer side of the lens stopper (604) is drivingly connected to a rotating driving member (603).

10. The method for repairing foreign matter in a silicon-based OLED product according to claim 9, characterized in that: The laser lens (3) is a steering structure, the laser lens (3) is a tiltable and refractable structure, and the maintenance screen (4) is placed in a maintenance screen placement box (7).

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