FOUP picking and placing device and FOUP picking and placing method used during FOUP automatic storage bin failure

Abstract

The invention relates to the technical field of taking and placing equipment, in particular to an FOUP taking and placing device and an FOUP taking and placing method when an FOUP automatic storage bin breaks down. The ladder is arranged on one side of a base of an electric taking and placing device in the FOUP automatic storage bin, the lifting hanging device is detachably arranged on a cross rod of the ladder, the handheld FOUP clamping device is arranged on a lifting rope of the lifting hanging device, and the top end of the ladder is connected with a sky rail of the FOUP automatic storage bin in a sliding mode. According to the invention, an operator can stand on the ladder to take out and hang down FOUP stored in the FOUP automatic storage bin in a power failure or fault state or hang up the FOUP and place the FOUP in the FOUP automatic storage bin in the power failure or fault state through the cooperation of the lifting and hanging device and the handheld FOUP clamping device, so that the efficiency of taking and placing the FOUP is greatly improved; and the safety of taking and placing the FOUP by an operator is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fetching and placing equipment, and in particular to a fetching and placing device and a fetching and placing method for FOUP when a FOUP automatic storage bin fails. Background Art

[0002] FOUP (Front Opening Unified Pod) is a standard container for carrying and protecting wafers, and is widely used in semiconductor manufacturing plants. FOUP automatic storage bin is a device used for automatically storing and managing FOUPs in the semiconductor manufacturing process; the FOUP automatic storage bin automatically picks and places FOUPs to the storage rack through an electric pick-and-place device, for example: in the existing patents, the Chinese patent documents with application numbers 202322326130.1, 202310605406.1 and 202310605406.1; however, when the FOUP automatic storage bin is in a power outage or fault state, the electric pick-and-place device cannot realize the pick-and-place of FOUPs, and it is necessary to manually pick and place FOUPs to the storage rack of the FOUP automatic storage bin. In the process of manually picking and placing FOUPs, the operator needs to climb up and down the ladder back and forth, which makes the efficiency of picking and placing FOUPs low, and the operator needs to climb up and down the ladder frequently, the labor intensity of the operator is high, and it is easy to cause safety accidents due to factors such as dismantling. Therefore, the defects are very obvious and a solution is urgently needed. Summary of the invention

[0003] In order to solve the above technical problems, the object of the present invention is to provide a FOUP picking and placing device and a FOUP picking and placing method when a FOUP automatic storage bin fails.

[0004] In order to achieve the above object, the present invention adopts the following technical solution:

[0005] A FOUP picking and placing device when a FOUP automatic storage bin fails, comprising a ladder installed on one side of a base of an electric picking and placing device in the FOUP automatic storage bin, a lifting and hanging device detachably installed on a crossbar of the ladder, and a handheld FOUP clamping device installed on a hanging rope of the lifting and hanging device, wherein the top of the ladder is slidably connected to a ceiling rail of the FOUP automatic storage bin.

[0006] Furthermore, the handheld FOUP clamping device includes a base body, a hanging ring installed on the top surface of the base body, two L-shaped support plates installed on both sides of the base body relatively, a handle installed on one side of the base body or / and one side of one of the L-shaped support plates, and two elastic stopping mechanisms respectively installed at both ends of the base body; a hanging rope of the lifting and hanging device is connected to the hanging ring, a slot is formed between the bottom surface of the base body and the L-shaped support plate, and two elastic stopping mechanisms are located at both ends of the slot; a stopping clamping space is formed between the two elastic stopping mechanisms, and the stopping clamping space is used to accommodate the top plate of the FOUP.

[0007] Furthermore, the elastic stop mechanism includes a linkage rod and two elastic stop assemblies respectively arranged in one-to-one correspondence with the two slots; the elastic stop assembly includes a mounting seat mounted on the seat body, a stop block telescopically slidably connected to the mounting seat, and an elastic member arranged in the mounting seat and elastically connected between the mounting seat and the stop block, and the two ends of the linkage rod are respectively fixedly connected to the stop blocks of the elastic stop assembly, and the stop blocks can be retracted into the mounting seat or extended out of the bottom surface of the mounting seat; when the stop block retracts into the mounting seat, the stop block moves away from the slot; when the stop block extends out of the bottom surface of the mounting seat, the stop block extends into the slot.

[0008] Furthermore, an extrusion slope is arranged on the outer side of the bottom end of the stop block.

[0009] Furthermore, a telescopic cavity is recessed downwardly on the bottom surface of the mounting seat, the stop block is telescopically and slidably connected to the inner wall of the telescopic cavity, and the elastic member is located in the telescopic cavity.

[0010] Furthermore, a lifting groove communicating with the telescopic cavity is formed on the side wall of the mounting seat, and the end of the linkage rod passes through the lifting groove and is fixedly connected to the side surface of the stop block.

[0011] Furthermore, a guide bevel is provided at the end of the L-shaped support plate, the guide bevel is located at the end bottom wall of the slot, and the guide bevel and the extrusion bevel are in a trumpet shape.

[0012] Furthermore, the lifting and hanging device includes a bracket, a locking mechanism arranged on the bracket and detachably connected to the cross bar of the ladder, a cantilever rod vertically arranged on the top of the bracket, and a lifting self-locking pulley installed on the cantilever rod, and the lifting self-locking pulley has a lifting rope connected to the top of the handheld FOUP clamping device.

[0013] Furthermore, the lifting and hanging device also includes a locking structure installed on the top of the bracket, and the locking structure is used to lock the cantilever rod.

[0014] Furthermore, the locking mechanism includes at least one locking assembly, which includes a lifting plate that is lifted and slidably connected to the bracket, a locking member for locking the lifting plate and the bracket together, a U-shaped socket installed on the lifting plate, a locking plate that is translatedly arranged in the U-shaped socket, and a locking bolt that is threaded through a side wall of the U-shaped socket and abuts against the locking plate.

[0015] The present invention also provides a method for picking up and placing a FOUP, based on the application of the above-mentioned FOUP automatic storage bin picking up and placing device when the FOUP automatic storage bin fails, including the following specific methods:

[0016] When the FOUP automatic storage bin loses power or fails, the electric pick-and-place device in the FOUP automatic storage bin cannot take out the FOUP stored in the storage rack of the FOUP automatic storage bin. At this time, the operator can push the electric pick-and-place device together with the ladder to move to the required position along the ceiling rail of the FOUP automatic storage bin, and then an operator climbs up the ladder and installs the lifting and hanging device on the ladder. The operator holds the handheld FOUP clamping device, clamps the top plate of the FOUP through the handheld FOUP clamping device, and takes the FOUP out of the storage rack, and then lifts the handheld FOUP clamping device together with the FOUP through the lifting and hanging device. Another operator catches the lowered FOUP below and releases the FOUP from the handheld FOUP clamping device, and then the lifting and hanging device lifts the handheld FOUP clamping device again until the operator on the ladder holds the handheld FOUP clamping device again to clamp another FOUP, and repeats the above operations to realize the FOUP stored in the storage rack of the FOUP automatic storage bin from top to bottom.

[0017] The beneficial effects of the present invention are as follows: in actual application, when the FOUP automatic storage bin is out of power or fails, the electric pick-and-place device in the FOUP automatic storage bin cannot take out the FOUP stored in the storage rack of the FOUP automatic storage bin. At this time, the operator can push the electric pick-and-place device together with the ladder to move to the desired position along the ceiling rail of the FOUP automatic storage bin, and then an operator climbs up the ladder and installs the lifting and hanging device on the ladder. The operator holds the handheld FOUP clamping device, clamps the top plate of the FOUP through the handheld FOUP clamping device, and takes the FOUP out of the storage rack, and then lifts the handheld FOUP clamping device together with the FOUP through the lifting and hanging device. Another operator catches the lowered FOUP below and releases the FOUP from the handheld FOUP clamping device, and then the lifting and hanging device lifts the handheld FOUP clamping device again, until the operator on the ladder holds the handheld FOUP clamping device again to clamp another FOUP, and repeats the above operation to realize the FOUP stored in the storage rack of the FOUP automatic storage bin from top to bottom. The present invention enables an operator standing on a ladder to take out and lower a FOUP stored in an automatic FOUP storage bin in a power outage or malfunction state or to lift and place the FOUP in an automatic FOUP storage bin in a power outage or malfunction state by cooperating with a lifting hanging device and a handheld FOUP clamping device, thereby greatly improving the efficiency of taking and placing FOUPs and improving the safety of operators taking and placing FOUPs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram of the present invention in use; wherein the electric pick-and-place device is hidden in the FOUP automatic storage bin.

[0019] Figure 2 It is a schematic diagram of the three-dimensional structure of the handheld FOUP clamping device of the present invention clamping a FOUP.

[0020] Figure 3 It is a schematic diagram of the three-dimensional structure of the FOUP clamping device of the present invention.

[0021] Figure 4 It is a cross-sectional view of the elastic stop assembly of the present invention.

[0022] Figure 5 It is a schematic diagram of the three-dimensional structure of the lifting and hanging device of the present invention.

[0023] Figure 6 It is a schematic diagram of the three-dimensional structure of the locking assembly of the present invention.

[0024] Description of reference numerals:

[0025] 1. Ladder; 2. Lifting suspension device; 3. Handheld FOUP clamping device; 4. FOUP automatic storage bin; 5. Seat body; 6. Suspension ring; 7. L-shaped support plate; 8. Handle; 9. Elastic stop mechanism; 10. Slot; 11. Linking rod; 12. Elastic stop component; 13. Mounting seat; 14. Stop block; 15. Elastic member; 16. Extrusion inclined surface; 17. Guide inclined surface; 18. Telescopic cavity; 20. Bracket; 21. Locking mechanism; 22. Cantilever rod; 23. Lifting self-locking pulley; 24. Locking structure; 25. Locking component; 26. Lifting plate; 27. Locking piece; 28. U-shaped socket; 29. Locking plate; 30. Locking bolt; 31. Observation hole. Detailed implementation manner

[0026] For the convenience of those skilled in the art to understand, the present invention will be further described below in conjunction with embodiments and the accompanying drawings. The content mentioned in the implementation manner does not limit the present invention.

[0027] As Figures 1 to 6 shown, a FOUP picking and placing device in case of failure of a FOUP automatic storage bin provided by the present invention includes a ladder 1 installed on one side of the base of an electric picking and placing device installed in the FOUP automatic storage bin 4, a lifting suspension device 2 detachably installed on the cross bar of the ladder 1, and a handheld FOUP clamping device 3 installed on the suspension rope of the lifting suspension device 2. The top of the ladder 1 is slidably connected to the overhead rail of the FOUP automatic storage bin 4.

[0028] In actual application, when the FOUP automatic storage bin 4 is out of power or fails, the electric pick-and-place device in the FOUP automatic storage bin 4 cannot take out the FOUP stored in the storage rack of the FOUP automatic storage bin 4. At this time, the operator can push the electric pick-and-place device together with the ladder 1 to move to the required position along the ceiling rail of the FOUP automatic storage bin 4. Then an operator climbs up the ladder 1 and installs the lifting hanging device 2 on the ladder 1. The operator holds the handheld FOUP clamping device 3 and clamps the top plate of the FOUP through the handheld FOUP clamping device 3. The FOUP is taken out of the storage rack, and the handheld FOUP clamping device 3 is then lowered together with the FOUP by the lifting and hanging device 2. Another operator receives the lowered FOUP and releases the handheld FOUP clamping device 3 from the FOUP. Then the lifting and hanging device 2 lifts the handheld FOUP clamping device 3 again until the operator on the ladder 1 takes the handheld FOUP clamping device 3 to clamp another FOUP again. The above operation is repeated to realize the FOUP stored in the storage rack of the FOUP automatic storage bin 4 being lowered from top to bottom. The present invention enables the operator standing on the ladder 1 to cooperate with the lifting and hanging device 2 and the handheld FOUP clamping device 3 to take out and lower the FOUP stored in the FOUP automatic storage bin 4 in a power outage or fault state, or to lift the FOUP and place it in the FOUP automatic storage bin 4 in a power outage or fault state, thereby greatly improving the efficiency of taking and placing the FOUP and improving the safety of the operator taking and placing the FOUP.

[0029] In this embodiment, the handheld FOUP clamping device 3 includes a base body 5, a hanging ring 6 installed on the top surface of the base body 5, two L-shaped support plates 7 installed on both sides of the base body 5 relatively, a handle 8 installed on one side of the base body 5 or / and one side of one of the L-shaped support plates 7, and two elastic stopping mechanisms 9 respectively installed at both ends of the base body 5; the hanging rope of the lifting and hanging device 2 is connected to the hanging ring 6, and a slot 10 is formed between the bottom surface of the base body 5 and the L-shaped support plate 7, and the two elastic stopping mechanisms 9 are located at both ends of the slot 10; a stopping clamping space is formed between the two elastic stopping mechanisms 9, and the stopping clamping space is used to accommodate the top plate of the FOUP.

[0030] In actual application, the operator holds the handle 8 so that the two slots 10 are aligned with the top plate of the FOUP, and then drives the handheld FOUP clamping device 3 to be laterally inserted into the top plate of the FOUP, so that the top plate of the FOUP squeezes the elastic stopping mechanism 9 at one end, so that the elastic stopping end of the elastic stopping mechanism 9 is compressed, and the top plate of the FOUP moves along the slot 10 until the top plate of the FOUP moves into the stopping clamping space, and the top plate of the FOUP does not squeeze the corresponding elastic stopping end of the elastic stopping mechanism 9, and the elastic stopping end of the elastic stopping mechanism 9 rebounds and resets to block one end surface of the top plate of the FOUP, and the elastic stopping end of the other elastic stopping mechanism 9 blocks the other end surface of the top plate of the FOUP, so that the top plate of the FOUP is stopped and clamped on the handheld FOUP clamping device 3, and the FOUP can be lifted or lowered by the lifting and hanging device 2. Since elastic stopping mechanisms 9 are provided at both ends of the seat body 5, the operator can hold the handheld FOUP clamping device 3 and insert it sideways into the top plate of the FOUP from the elastic stopping mechanism 9 on any side, so that the operator can use the handheld FOUP clamping device 3 to clamp the FOUP. The handheld FOUP clamping device 3 has good structural symmetry and is easy and efficient to operate.

[0031] In this embodiment, the elastic stop mechanism 9 includes a linkage rod 11 and two elastic stop assemblies 12 respectively arranged in one-to-one correspondence with the two slots 10; the elastic stop assembly 12 includes a mounting seat 13 mounted on the seat body 5, a stop block 14 telescopically slidably connected to the mounting seat 13, and an elastic member 15 arranged in the mounting seat 13 and elastically connected between the mounting seat 13 and the stop block 14. The two ends of the linkage rod 11 are respectively fixedly connected to the stop block 14 of the elastic stop assembly 12, and the stop block 14 can be retracted into the mounting seat 13 or extended out of the bottom surface of the mounting seat 13; when the stop block 14 is retracted into the mounting seat 13, the stop block 14 moves away from the slot 10; when the stop block 14 extends out of the bottom surface of the mounting seat 13, the stop block 14 extends into the slot 10; specifically, the elastic member 15 can be a spring.

[0032] In actual application, when the handheld FOUP clamping device 3 is inserted into the top plate of the FOUP, the top plate of the FOUP will squeeze the stop block 14 of the elastic stop assembly 12, so that the stop block 14 retracts upward into the mounting seat 13 and compresses the elastic member 15. When the top plate of the FOUP is completely moved into the stop clamping space, the stop block 14 is not subjected to the squeezing force. The stop block 14 moves downward and resets under the action of the rebound force of the elastic member 15, so that the stop block 14 extends into the slot 10. The stop blocks 14 of the two elastic stop assemblies 12 block the two sides of the top plate of the FOUP, so that the handheld FOUP clamping device 3 clamps the FOUP. When the FOUP is lowered or placed in the FOUP automatic storage bin 4, the operator below holds the FOUP with one hand and applies an upward force to the linkage rod 11 with the other hand, so that the stop blocks 14 of the two elastic stop assemblies 12 are synchronously retracted upward into the mounting seat 13 and the elastic member 15 is compressed. At this time, the FOUP can be laterally pulled out of the handheld FOUP clamping device 3. After the FOUP is pulled out of the handheld FOUP clamping device 3, the operator releases the force on the linkage rod 11, so that the stop block 14 extends into the slot 10 under the action of the rebound force of the elastic member 15.

[0033] In this embodiment, an extrusion slope 16 is provided on the outer side of the bottom end of the stop block 14. With the extrusion slope 16, during the relative lateral movement of the FOUP and the handheld FOUP clamping device 3, the top plate of the FOUP abuts against the extrusion slope 16 and applies an extrusion force to the extrusion slope 16. With the relative movement of the top plate of the FOUP and the stop block 14, the stop block 14 will retract upward into the mounting seat 13 and compress the elastic member 15 until the top plate of the FOUP is completely moved into the stop clamping space, and the stop block 14 will move downward and reset under the action of the resilience of the elastic member 15.

[0034] In this embodiment, the bottom surface of the mounting seat 13 is concavely provided with a telescopic cavity 18, the stopper 14 is telescopically and slidably connected to the inner wall of the telescopic cavity 18, and the elastic member 15 is located in the telescopic cavity 18. When the stopper 14 telescopically moves, the telescopic cavity 18 guides the stopper 14, improves the stability of the movement of the stopper 14, and makes the structure of the mounting seat 13, the elastic member 15 and the stopper 14 compact.

[0035] In this embodiment, a lifting groove communicating with the telescopic cavity 18 is formed on the side wall of the mounting seat 13, and the end of the linkage rod 11 passes through the lifting groove and is fixedly connected to the side of the stop block 14. The provision of the lifting groove not only facilitates the connection between the linkage rod 11 and the stop block 14, but also guides the linkage rod 11, improves the stability of the lifting movement of the linkage rod 11, limits the lifting stroke of the linkage rod 11, and when the stop block 14 extends into the slot 10 under the elastic force of the elastic member 15, the bottom wall of the lifting groove supports the linkage rod 11.

[0036] Specifically, the side wall of the L-shaped support plate 7 is provided with an observation hole 31 connected to the slot 10, and the observation hole 31 is arranged corresponding to the stop block 14. When in use, the operator can observe the use status of the stop block 14 through the observation hole 31 to ensure that the stop block 14 can work normally.

[0037] In this embodiment, a guide bevel 17 is provided at the end of the L-shaped support plate 7. The guide bevel 17 is located at the bottom wall of the end of the slot 10. The guide bevel 17 and the extrusion bevel 16 are in a trumpet shape to play a role of expansion and guidance. With this structural design, when the handheld FOUP clamping device 3 inserts and clamps the top plate of the FOUP, the guide bevel 17 and the extrusion bevel 16 play a guiding role, which facilitates the handheld FOUP clamping device 3 to insert and clamp the top plate of the FOUP.

[0038] In this embodiment, the lifting and hanging device 2 includes a bracket 20, a locking mechanism 21 disposed on the bracket 20 and detachably connected to the crossbar of the ladder 1, a cantilever rod 22 vertically disposed on the top of the bracket 20, and a lifting self-locking pulley 23 installed on the cantilever rod 22, and the lifting self-locking pulley 23 is connected to the top of the handheld FOUP clamping device 3. In actual application, the bracket 20 is locked on the crossbar of the ladder 1 by the locking mechanism 21 to realize the assembly of the lifting and hanging device 2 and the ladder 1. When the handheld FOUP clamping device 3 clamps the top plate of the FOUP and takes the FOUP out of the FOUP automatic storage bin 4, the FOUP is suspended by the lifting self-locking pulley 23. Since the locking mechanism 21 is detachably connected to the crossbar of the ladder 1, the height of the lifting self-locking pulley 23 can be changed by installing the locking mechanism 21 on the crossbars of different heights of the ladder 1.

[0039] Specifically, the bracket 20 of the lifting and hanging device 2 is provided with a shoulder strap; in actual application, the operator wears the shoulder strap to carry the lifting and hanging device 2, and then the operator can climb the ladder 1; by carrying the lifting and hanging device 2 on the back of the operator, the safety of the operator climbing the ladder 1 is improved, and it is convenient to install and fix the lifting and hanging device 2 on the crossbar of the ladder 1 at the required height.

[0040] In this embodiment, the lifting and hanging device 2 further includes a locking structure 24 installed on the top of the bracket 20, and the locking structure 24 is used to lock the cantilever rod 22. The setting of the locking structure 24 facilitates the disassembly and maintenance of the cantilever rod 22 and the bracket 20, realizes the modular assembly of the lifting and hanging device 2, and is convenient for transportation, carrying and storage.

[0041] In this embodiment, the locking mechanism 21 includes at least one locking assembly 25, which includes a lifting plate 26 that is lifted and slidably connected to the bracket 20, a locking member 27 for locking the lifting plate 26 and the bracket 20 together, a U-shaped socket 28 installed on the lifting plate 26 and with an opening facing downward, a locking plate 29 that is translated and disposed in the U-shaped socket 28, and a locking bolt 30 that is threaded through a side wall of the U-shaped socket 28 and abuts against the locking plate 29. Specifically, the locking member can be a bolt.

[0042] In actual application, the U-shaped socket 28 is inserted into the crossbar of the ladder 1, and the crossbar of the ladder 1 is located between a side wall of the U-shaped socket 28 and the locking plate 29. Then, the locking bolt 30 is tightened so that the locking bolt 30 is screwed into the U-shaped socket 28 and contacts the locking plate 29, so that the locking plate 29 moves closer to one side of the crossbar of the ladder 1 until the locking plate 29 cooperates with a side wall of the U-shaped socket 28 to be locked on the crossbar of the ladder 1. When it is necessary to disassemble the lifting and hanging device 2, it is only necessary to loosen the locking bolt 30 to pull the U-shaped socket 28 away from the crossbar of the ladder 1. In addition, the locking member 27 is loosened so that the lifting plate 26 can be lifted and lowered relative to the bracket 20 to change the height position of the locking assembly 25 on the bracket 20, thereby changing the height of the cantilever rod 22 and the lifting self-locking pulley 23.

[0043] Specifically, there are two locking mechanisms 21, which are arranged in a row along the height direction of the bracket 20. By increasing the number of locking mechanisms 21, the firmness of the lifting and hanging device 2 being locked on the crossbar of the ladder 1 is improved.

[0044] The present invention also provides a method for picking up and placing a FOUP, based on the application of the above-mentioned FOUP automatic storage bin picking up and placing device when the FOUP automatic storage bin fails, including the following specific methods:

[0045] When the FOUP automatic storage bin 4 is out of power or fails, the electric pick-and-place device in the FOUP automatic storage bin 4 cannot take out the FOUP stored in the storage rack of the FOUP automatic storage bin 4. At this time, the operator can push the electric pick-and-place device together with the ladder 1 to move to the required position along the ceiling rail of the FOUP automatic storage bin 4. Then an operator climbs up the ladder 1 and installs the lifting hanging device 2 on the ladder 1. The operator holds the handheld FOUP clamping device 3, clamps the top plate of the FOUP through the handheld FOUP clamping device 3, and takes the FOUP out of the storage rack. After the FOUP is taken out of the storage rack, the handheld FOUP clamping device 3 is lowered together with the FOUP by the lifting and hanging device 2. Another operator catches the lowered FOUP and releases the FOUP from the handheld FOUP clamping device 3. Then the lifting and hanging device 2 lifts the handheld FOUP clamping device 3 again until the operator on the ladder 1 takes the handheld FOUP clamping device 3 to clamp another FOUP. The above operation is repeated to realize the lifting of the FOUP stored in the storage rack of the FOUP automatic storage bin 4 from top to bottom.

[0046] All technical features in this embodiment can be freely combined according to actual needs.

[0047] The above embodiments are preferred implementation schemes of the present invention. In addition, the present invention may also be implemented in other ways. Any obvious replacement without departing from the concept of the present technical solution is within the protection scope of the present invention.

Claims

1. A device for picking up and placing FOUPs when a FOUP automatic storage bin fails, characterized in that: The invention comprises a ladder (1) installed on one side of the base of an electric pick-and-place device in an automatic FOUP storage bin (4), a lifting and hanging device (2) detachably installed on the crossbar of the ladder (1), and a handheld FOUP clamping device (3) installed on the hanging rope of the lifting and hanging device (2); the top of the ladder (1) is slidably connected to the ceiling rail of the automatic FOUP storage bin (4).

2. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 1, characterized in that: The handheld FOUP clamping device (3) comprises a base (5), a hanging ring (6) mounted on the top surface of the base (5), two L-shaped support plates (7) mounted on both sides of the base (5) opposite to each other, a handle (8) mounted on one side of the base (5) or / and one side of one of the L-shaped support plates (7), and two elastic stop mechanisms (9) respectively mounted on both ends of the base (5); a hanging rope of the lifting hanging device (2) is connected to the hanging ring (6), a slot (10) is formed between the bottom surface of the base (5) and the L-shaped support plate (7), and two elastic stop mechanisms (9) are located at both ends of the slot (10); a stop clamping space is formed between the two elastic stop mechanisms (9), and the stop clamping space is used to accommodate the top plate of the FOUP.

3. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 2, characterized in that: The elastic stop mechanism (9) comprises a linkage rod (11) and two elastic stop assemblies (12) respectively arranged in one-to-one correspondence with the two slots (10); the elastic stop assembly (12) comprises a mounting seat (13) mounted on the seat body (5), a stop block (14) telescopically slidably connected to the mounting seat (13), and an elastic member (15) arranged in the mounting seat (13) and elastically connected between the mounting seat (13) and the stop block (14), The two ends of the movable rod (11) are respectively fixedly connected to the stop block (14) of the elastic stop assembly (12); the stop block (14) can be retracted into the mounting seat (13) or extended out of the bottom surface of the mounting seat (13); when the stop block (14) is retracted into the mounting seat (13), the stop block (14) moves away from the slot (10); when the stop block (14) is extended out of the bottom surface of the mounting seat (13), the stop block (14) extends into the slot (10).

4. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 3, characterized in that: An extrusion slope (16) is arranged on the outer side of the bottom end of the stop block (14); a guide slope (17) is arranged at the end of the L-shaped support plate (7), the guide slope (17) is located at the end bottom wall of the slot (10), and the guide slope (17) and the extrusion slope (16) are in a trumpet shape.

5. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 4, characterized in that: The bottom surface of the mounting seat (13) is concavely provided with a telescopic cavity (18), the stop block (14) is telescopically and slidably connected to the inner wall of the telescopic cavity (18), and the elastic member (15) is located in the telescopic cavity (18).

6. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 5, characterized in that: A lifting groove communicating with the telescopic cavity (18) is formed on the side wall of the mounting seat (13); the end of the linkage rod (11) passes through the lifting groove and is fixedly connected to the side of the stop block (14).

7. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 1, characterized in that: The lifting and hanging device (2) comprises a bracket (20), a locking mechanism (21) arranged on the bracket (20) and detachably connected to the crossbar of the ladder (1), a cantilever rod (22) vertically arranged on the top of the bracket (20), and a lifting self-locking pulley (23) installed on the cantilever rod (22), and the lifting self-locking pulley (23) is connected to the top of the handheld FOUP clamping device (3).

8. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 7, characterized in that: The lifting and hanging device (2) also includes a locking structure (24) installed on the top of the bracket (20), and the locking structure (24) is used to lock the cantilever rod (22).

9. The device for taking and placing FOUPs when a FOUP automatic storage bin fails according to claim 7, characterized in that: The locking mechanism (21) comprises at least one locking assembly (25), the locking assembly (25) comprising a lifting plate (26) connected to the bracket (20) in a lifting and sliding manner, a locking member (27) for locking the lifting plate (26) and the bracket (20) together, a U-shaped socket (28) mounted on the lifting plate (26), a locking plate (29) arranged in translation in the U-shaped socket (28), and a locking bolt (30) threadedly penetrating a side wall of the U-shaped socket (28) and abutting against the locking plate (29).

10. A method for picking up and placing a FOUP, characterized in that: Based on the application of the FOUP automatic storage bin failure FOUP pick-up and placement device as claimed in any one of claims 1 to 9, the specific method includes the following: When the FOUP automatic storage bin (4) loses power or fails, the electric pick-and-place device in the FOUP automatic storage bin (4) cannot take out the FOUP stored in the storage rack of the FOUP automatic storage bin (4). At this time, the operator can push the electric pick-and-place device together with the ladder (1) to move to the desired position along the ceiling rail of the FOUP automatic storage bin (4). Then an operator climbs up the ladder (1) and installs the lifting hanging device (2) on the ladder (1). The operator holds the handheld FOUP clamping device (3) and clamps the top plate of the FOUP through the handheld FOUP clamping device (3). The FOUP is taken out of the storage rack, and the handheld FOUP clamping device (3) is then lowered together with the FOUP by the lifting and hanging device (2). Another operator receives the lowered FOUP and releases the FOUP from the handheld FOUP clamping device (3). Then the lifting and hanging device (2) lifts up the handheld FOUP clamping device (3) again until the operator on the ladder (1) takes the handheld FOUP clamping device (3) again to clamp another FOUP. The above operation is repeated to realize the lifting of the FOUP stored in the storage rack of the FOUP automatic storage bin (4) from top to bottom.

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