Optical integrated multiband on-line detection device

Abstract

The invention provides an optical integrated multiband on-line detection device, which belongs to the field of laser photoelectric system detection and is arranged at a laser output end of a laser photoelectric system. Comprising a reference unit, a beam shrinking unit, a near-field detection unit, a self-calibration unit, a far-field detection unit and an adjusting unit which are arranged in sequence, wherein the adjusting unit is connected with each unit; the reference unit comprises a reference window mirror with a cross wire; the beam shrinking unit comprises a primary mirror, a secondary mirror and a focusing mechanism for moving the secondary mirror which are sequentially arranged along a light path; the near-field detection unit comprises a near-field detector and a first spectroscope; the self-calibration unit comprises a self-calibration light source, a second spectroscope and a pyramid; the first spectroscope and the second spectroscope are sequentially arranged on a light path of a light beam output by the secondary mirror; the far-field detection unit comprises a far-field detector. According to the invention, the optical axis and pupil deviation of the laser beam relative to the reference can be rapidly and accurately tested.

Description

Technical Field

[0001] The present application relates to the technical field of laser optoelectronic system detection, and in particular to an optically integrated multi-band online detection device. Background Art

[0002] Compared with ordinary light sources, lasers have the advantages of good monochromaticity, good directionality and high brightness, so their application range is very wide. The near-field beam emitted by the laser has a small spot and a large beam divergence, which is suitable for laser processing technology; while the far-field beam has a large spot and a small beam divergence, which is suitable for laser imaging, ranging and other applications.

[0003] In practical applications, the position of the output light beam of the laser optoelectronic system is usually required to be high. A small pointing deviation of the output light beam will cause it to deviate from the target on the target surface after long-distance transmission. With the development of optical engineering technology, in some special applications, it is necessary to strictly control the position of the laser emitted by the laser optoelectronic system, which requires the detection of the pupil and optical axis deviation of the emitted laser. At present, the theodolite is usually used to test the deviation of the pupil and optical axis of the laser optoelectronic system. However, the efficiency of using the theodolite to test the deviation of the pupil and optical axis is low. Summary of the invention

[0004] In view of the technical problems existing in the background technology, the present application provides an optically integrated multi-band online detection device, which can quickly and accurately perform near-field and far-field optical benchmark tests on the laser emitted by the laser optoelectronic system to obtain pupil deviation and optical axis deviation.

[0005] The embodiment of the present application provides an optically integrated multi-band online detection device, which is arranged at the laser output end of a laser optoelectronic system, and includes a reference unit, a beam reduction unit, a near-field detection unit, a self-calibration unit, a far-field detection unit, and an adjustment unit connected to each unit in sequence; the reference unit includes a reference window mirror with a crosshair; the beam reduction unit includes a primary mirror, a secondary mirror, and a focusing mechanism for moving the secondary mirror in sequence along an optical path; the near-field detection unit includes a near-field detector and a first beam splitter; the self-calibration unit includes a self-calibration light source, a second beam splitter, and a cone; the first beam splitter and the second beam splitter are arranged in sequence on the optical path of a light beam output through the secondary mirror; the far-field detection unit includes a far-field detector; and a reference mirror with a crosshair is provided at the laser output end of the laser optoelectronic system.

[0006] The present application can realize the measurement of pupil deviation of laser emitted by laser photoelectric system through near-field detection and the measurement of optical axis deviation of laser emitted by laser photoelectric system through far-field detection by arranging near-field detection unit and far-field detection unit at the same time in the optical path. Specifically, in the process of near-field detection, near-field detection can be realized quickly and accurately through the cooperation of reference window mirror, beam reduction unit and adjustment unit. At the same time, the position of the secondary mirror is adjusted by the focusing mechanism, so that lasers of different focal lengths (i.e., the distance between reference mirror 9 and reference window mirror 21 is different) are converted into parallel light output after the beam reduction unit, providing favorable conditions for near-field detection. In the process of far-field detection, far-field detection can be realized quickly and accurately through the cooperation of self-calibration unit, first beam splitter, beam reduction unit, reference window mirror and adjustment unit. That is, the online detection device of the present application can realize the measurement of pupil and optical axis deviation at the same time through the cooperation between different units; and the components can be shared in the process of near-field detection and far-field detection.

[0007] In some embodiments, the focusing mechanism includes a motor, a gear, and a guide rail connected in sequence; the gear is connected to an output shaft of the motor; and the gear is meshingly connected to the guide rail.

[0008] In this embodiment, the movement of the secondary mirror is achieved through the mutual coordination between the motor, gears and guide rails in the focusing mechanism, thereby changing the relative position relationship between the primary mirror and the secondary mirror, matching incident lasers of different optical focal lengths, and providing favorable conditions for near-field detection.

[0009] In some embodiments, the beam reduction unit further includes a switchable attenuation wheel and a switchable filter wheel which are sequentially arranged at the light beam output end of the secondary mirror.

[0010] In this embodiment, the switchable attenuation wheel attenuates lasers of different powers to the required power, and the switchable filter wheel filters out light of other wavelengths of the laser to achieve the output of lasers of specific wavelengths. Through the cooperation of the switchable attenuation wheel and the switchable filter wheel, the detection of lasers of different powers and different wavelengths can be achieved. At the same time, the switching time of the switchable attenuation wheel and the switchable filter wheel is short and the switching optical axis deviation is small, which can achieve fast and precise control.

[0011] In some embodiments, the self-calibration unit further comprises a movable baffle disposed at an input end of the pyramidal beam.

[0012] In this embodiment, the self-alignment calibration can be quickly achieved by setting the movable baffle.

[0013] In some embodiments, the optical integrated multi-band online detection device also includes an automatic control and data extraction unit; the automatic control and data extraction unit is electrically connected to the near-field detection unit, the self-calibration unit, the far-field detection unit and the adjustment unit respectively.

[0014] In this embodiment, the automatic control and data extraction unit controls the positions of the components through the control adjustment unit to achieve fast and accurate near-field and far-field detection; at the same time, the data in the near-field and far-field detectors are analyzed.

[0015] In some embodiments, the adjustment unit is an electric five-dimensional adjustment mechanism.

[0016] In this embodiment, the electric five-dimensional adjustment mechanism has high adjustment accuracy and repeated positioning accuracy, thereby achieving precise positioning of components.

[0017] In some embodiments, the reference unit further includes a cubic prism disposed above the reference window mirror; the cubic prism is used to calibrate the normal angle of the light entrance port of the reference window mirror.

[0018] In some embodiments, the reference window mirror is provided with an adjustment tool for adjusting the azimuth and pitch angle of the reference window mirror.

[0019] In some embodiments, the detection method of the optical integrated multi-band online detection device comprises the following steps:

[0020] S1, switch the target surface of the self-calibration unit to a cross-grained target, turn on the self-calibration light source, and the output light beam of the self-calibration light source is divided into two parts after passing through the second beam splitter, one part of the light is transmitted to the corner cone, reflected to the second beam splitter by the corner cone, and then reflected to the far-field detector by the second beam splitter to form a cross spot image; the other part of the light is reflected to the first beam splitter, transmitted to the secondary mirror by the first beam splitter, reflected to the primary mirror by the secondary mirror, reflected to the reference window mirror by the primary mirror, and the light beam reflected to the reference window mirror returns to the second beam splitter along the original path, and is transmitted to the far-field detector by the second beam splitter to form a cross spot image; if the two light spot images overlap, self-calibration is completed, and the self-calibration light source is turned off;

[0021] S2, turning on the laser photoelectric system, adjusting the focusing mechanism and the adjusting unit so that the crosshairs on the reference mirror are imaged at the center of the near-field detector, completing the pupil reference, and then turning off the laser photoelectric system;

[0022] S3, turn on the self-calibration light source, move the movable baffle to block the corner cone, the light beam emitted by the self-calibration light source is reflected to the first beam splitter, transmitted to the secondary mirror through the first beam splitter, reflected to the primary mirror through the secondary mirror, reflected to the reference window mirror through the primary mirror, and transmitted to the reference mirror, and then returns through the original path, the crosshairs on the self-calibration unit are imaged on the far-field detector, and the crosshairs on the self-calibration unit are imaged on the center of the far-field detector by adjusting the adjustment unit, the optical axis reference is completed, and the self-calibration light source is turned off;

[0023] S4, turning on the laser optoelectronic system, testing the spot centroid of the output light beam of the laser optoelectronic system on the near-field detector; and testing the spot centroid of the output light beam of the laser optoelectronic system on the far-field detector.

[0024] In the technical solution of the embodiment of the present application, by simultaneously arranging a near-field detection unit and a far-field detection unit in the optical path, it is possible to measure the pupil deviation of the laser emitted by the laser optoelectronic system through near-field detection, and to measure the optical axis deviation of the laser emitted by the laser optoelectronic system through far-field detection; through the coordinated cooperation of the focusing mechanism, the switchable attenuation wheel and the switchable filter wheel, the near and far field detection of incident lasers of different bands and different powers can be achieved, which provides technical support for multi-band detection of optical integrated process technology, and can realize the detection of targets at different distances.

[0025] In some embodiments, the following step is also included: extracting and analyzing data from the near-field detector and the far-field detector.

[0026] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings used in the present application. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 This is a schematic diagram of the structure of an optically integrated multi-band online detection device in an embodiment of the present application;

[0029] Figure 2 This is a light path diagram of near-field detection imaging in an embodiment of the present application;

[0030] Figure 3 This is a light path diagram for near-field detection imaging in an embodiment of the present application.

[0031] Explanation of the reference numerals: 1000 - optically integrated multi-band online detection device; 1 - laser optoelectronic system; 2 - reference unit; 3 - beam reduction unit; 4 - near-field detection unit; 5 - self-calibration unit; 6 - far-field detection unit; 7 - adjustment unit; 8 - automatic control and data extraction unit; 9 - reference mirror; 21 - reference window mirror; 22 - cubic prism; 31 - primary mirror; 32 - focusing mechanism; 33 - secondary mirror; 34 - switchable attenuation wheel; 35 - switchable filter wheel; 41 - near-field detector; 42 - first spectroscope; 51 - self-calibration light source; 52 - second spectroscope; 53 - cone; 54 - movable baffle; 61 - far-field detector. DETAILED DESCRIPTION

[0032] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0033] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present application. However, it should be clear to those skilled in the art that the present application may also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present application.

[0034] The term "comprising" herein indicates the presence of the described features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their collections. The terms "comprising", "including", "having" and their variations all mean "including but not limited to", excluding that they are specially emphasized in other ways. Hereinafter, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating one or more of the features. In the description of the embodiments of the present application, unless otherwise stated, the meaning of "multiple" is two or more.

[0035] With the development of laser optical engineering technology, in some special applications, it is necessary to strictly control the position of the laser emitted by the laser optoelectronic system, which requires the detection of the pupil and optical axis deviation of the emitted laser. The efficiency of using theodolite to test the optical axis and pupil deviation of the light beam is low. Therefore, it is particularly important to quickly and accurately realize the positioning of the output laser, and then quickly complete the detection of the pupil and optical axis of the output beam of the laser optoelectronic system.

[0036] In order to solve the technical problem of low efficiency of theodolite detection, the present application provides an optically integrated multi-band online detection device, wherein, by simultaneously arranging a near-field detection unit and a far-field detection unit in the optical path, the pupil deviation of the laser emitted by the laser optoelectronic system can be measured by near-field detection, and the optical axis deviation of the laser emitted by the laser optoelectronic system can be measured by far-field detection; through the coordinated cooperation of the focusing mechanism, the switchable attenuation wheel and the switchable filter wheel, the near-field and far-field detection of incident light beams of different powers and different bands can be achieved, providing technical support for multi-band detection of optical integrated process technology, and can achieve detection of targets at different distances. The present application can quickly and accurately test the optical axis and pupil deviation of a laser beam relative to its reference.

[0037] Please refer to Figure 1 , Figure 1 It is a structural schematic diagram of an optically integrated multi-band online detection device 1000, which is arranged at the laser output end of the laser optoelectronic system 1 and is used to test the pupil and optical axis deviation of the laser emitted by the laser optoelectronic system 1; it includes a reference unit 2, a beam reduction unit 3, a near-field detection unit 4, a self-calibration unit 5, a far-field detection unit 6 and an adjustment unit 7 connected to each unit.

[0038] The reference unit 2 is used to establish the pupil and optical axis reference, and includes a reference window mirror 21 with a crosshair. The normal of the outer surface of the reference window mirror 21 represents the direction reference of the incident light beam, and the crosshair represents the position reference of the incident light beam. The laser output by the laser optoelectronic system 1 is incident on the reference window mirror 21 from the center of the crosshairs of the reference window mirror 21 through the adjustment unit 7. At the same time, through the coordination of the reference mirror 9 and the reference window mirror 21, the reference transmission of the light beam output by the laser optoelectronic system 1 is further realized.

[0039] The beam reduction unit 3 is used to reduce the aperture of the output light beam of the laser seed source 1 so that it matches the aperture of the subsequent near-field detection unit 4 and the far-field detection unit 6, and includes a primary mirror 31, a secondary mirror 33 and a focusing mechanism 32 for moving the secondary mirror 33, which are arranged in sequence along the optical path; the light beam output by the laser optoelectronic system 1 is reflected by the primary mirror 31 and the secondary mirror 33 to achieve unobstructed beam reduction, and at the same time, the secondary mirror 33 is moved by the focusing mechanism 32 to realize the transmission of optical references of lasers with different optical focal lengths.

[0040] The near-field detection unit 4 is used to measure the pupil deviation of the output light beam of the laser optoelectronic system 1, and includes a near-field detector 41 and a first beam splitter 42. The output light of the laser optoelectronic system 1 is output through the reference unit 2 and the beam reduction unit 3, and then reflected by the first beam splitter 42 to enter the near-field detection unit 4 for imaging.

[0041] The self-calibration unit 5 is used to realize the self-alignment calibration of the optical integrated multi-band online detection device 1000, and includes a self-calibration light source 51, a second beam splitter 52, and a cone 53; the first beam splitter 42 and the second beam splitter 52 are sequentially arranged on the optical path of the light beam output by the secondary mirror 32. The output light beam of the self-calibration light source 51 is divided into two parts after passing through the second beam splitter 52, one part of the light is transmitted to the cone 53, reflected to the second beam splitter 52 by the cone 53, and then reflected to the far-field detection unit 6 by the second beam splitter 52 for imaging; the other part of the light is reflected to the first beam splitter 42, transmitted to the secondary mirror 32 by the first beam splitter 42, reflected to the primary mirror 31 by the secondary mirror 32, reflected to the reference window mirror 21 by the primary mirror 31, and the light beam reflected to the reference window mirror 21 returns to the second beam splitter 52 along the original path, and is transmitted to the far-field detection unit 6 by the second beam splitter 52 for imaging, and the two parts of light are made to overlap and be located at the center of the far-field detection unit 6 by the adjustment unit 7, thereby realizing the self-alignment calibration.

[0042] The far-field detection unit 6 is used to measure the optical axis deviation of the output light beam of the laser optoelectronic system 1, and includes a far-field detector 61. The output light of the laser optoelectronic system 1 is output through the reference unit 2 and the beam reduction unit 3, and then transmitted through the first beam splitter 42 to reach the second beam splitter 52. The second beam splitter 52 is transmitted again and enters the far-field detection unit 6 for imaging.

[0043] The adjustment unit 7 is used to adjust the orientation of the optical integrated multi-band online detection device 1000. The adjustment unit 7 is connected to the reference unit 2, the beam reduction unit 3, the near-field detection unit 4, the self-calibration unit 5 and the far-field detection unit 6 through cables.

[0044] The present application quickly realizes the self-calibration of the optical integrated multi-band online detection device 1000 by setting a self-calibration unit 5 in the optical path; by simultaneously setting a near-field detection unit 4 and a far-field detection unit 6 in the optical path, the pupil deviation of the laser emitted by the laser optoelectronic system can be measured by near-field detection, and the optical axis deviation of the laser emitted by the laser optoelectronic system can be measured by far-field detection. Specifically, in the process of near-field detection, the incident laser is imaged to the near-field detector 41 quickly and accurately through the cooperation of the crosshairs of the reference window mirror 21, the primary mirror 31, the secondary mirror 33 and the adjustment unit 7, so as to realize near-field detection. At the same time, the position of the secondary mirror 33 is adjusted by the focusing mechanism 32, so that lasers of different optical focal lengths are converted into parallel light output after passing through the beam reduction unit 3, providing favorable conditions for near-field detection. In the process of far-field detection, through the mutual cooperation of the self-calibration light source 51, the second beam splitter 52, the corner cone 53, the first beam splitter 42, the secondary mirror 32, the primary mirror 31, the reference window mirror 21 and the adjustment unit 7, the laser is input to the far-field detector 61 quickly and accurately to achieve far-field detection. That is, the online detection device of the present application can simultaneously achieve pupil and optical axis deviations through the mutual cooperation between different units; and the components can be shared during near-field detection and far-field detection. At the same time, during detection, by adjusting the position of the secondary mirror 33, the incident light beams of different optical focal lengths are converged and imaged on the near-field detector 41 and the far-field detector 61, thereby realizing the detection of targets at different distances; the online detection device of the present application is high-precision, efficient, and automatically completes the benchmark establishment, with flexible structure, convenient installation and adjustment, and high reliability.

[0045] Further, in the embodiment of the present application, the focusing mechanism 32 includes a motor, a gear and a guide rail connected in sequence; the gear is connected to the output shaft of the motor; and the gear is meshed with the guide rail. The motor drives the gear to rotate, thereby driving the guide rail to move linearly, and then driving the secondary mirror 33 to move. The linkage mechanism formed by the motor, the gear and the guide rail is a relatively mature structure, which will not be repeated here. The movement of the secondary mirror 33 is achieved through the mutual coordination between the motor, the gear and the guide rail in the focusing mechanism 32, thereby changing the relative position relationship between the primary mirror 31 and the secondary mirror 33 to adapt to lasers with different optical focal lengths, and to achieve parallel light output of lasers with different optical focal lengths in the beam reduction unit 3, providing favorable conditions for near-field detection. The influence of the linearity error of the guide rail movement on the principal point causes the detector principal point accuracy to be less than one pixel.

[0046] Further, in the embodiments of the present application, Figure 1As shown, the beam reduction unit 3 also includes a switchable attenuation wheel 34 and a switchable filter wheel 35 which are sequentially arranged at the light beam output end of the secondary mirror 33. The switchable attenuation wheel 34 matches incident lasers of different powers, and the switchable attenuation wheel 34 attenuates lasers of different powers to the required power, thereby realizing the output of lasers of specific power. The switchable filter wheel 35 matches incident lasers of different bands, and the switchable filter wheel 35 filters out light of other bands of the laser, thereby realizing the output of lasers of specific wavelengths. According to the difference of the light beams filtered out by the switchable filter wheel 35, the near and far field detection of incident light beams in the visible, near-infrared, and short-wave infrared bands can be realized, providing technical support for multi-band detection of optical integrated process technology. Through the cooperation of the switchable attenuation wheel 34 and the switchable filter wheel 35, the output of lasers of different powers and multi-bands can be realized. At the same time, the switching time of the switchable attenuation wheel 34 and the switchable filter wheel 35 is short and the deviation of the switching optical axis is small, thereby realizing fast and precise regulation.

[0047] Further, in the embodiments of the present application, Figure 1 As shown, the self-calibration unit 5 further comprises a movable baffle 54 disposed at the light beam input end of the corner cone 53. When self-collimation calibration is required, the movable baffle 54 is moved away so that the light beam passing through the second beam splitter 52 can be transmitted to the corner cone 53, thereby quickly achieving self-collimation.

[0048] Further, in the embodiments of the present application, Figure 1 As shown, the optical integrated multi-band online detection device 1000 also includes an automatic control and data extraction unit 8; the automatic control and data extraction unit 8 is electrically connected to the near-field detection unit 4, the self-calibration unit 5, the far-field detection unit 6 and the adjustment unit 7. On the one hand, the automatic control and data extraction unit 8 can control the adjustment unit 7 to adjust the position of each component to achieve fast and accurate near-field and far-field detection; on the other hand, it can extract the centroid data of the far-field detection spot of the light beam and the centroid data of the near-field detection spot. It has digital image processing software, which can calculate the miss amount and can collect and process the spot information received by the near-field and far-field detectors.

[0049] Further, in the embodiments of the present application, Figure 1 As shown, the adjustment unit 7 is an electric five-dimensional (X direction, Y direction, Z direction, azimuth, pitch) adjustment mechanism. The electric five-dimensional adjustment mechanism has high adjustment accuracy and repeated positioning accuracy, and realizes accurate positioning of components. Based on the spot centroid and centroid extraction technology, by adding a five-dimensional electric adjustment mechanism, the optical axis and pupil reference of the online detection device can be automatically established.

[0050] Further, in the embodiments of the present application, Figure 1 As shown, the reference unit 2 further includes a cubic prism 22 disposed above the reference window mirror 21 ; the cubic prism 22 is used to calibrate the normal angle of the light entrance port of the reference window mirror 21 .

[0051] In a second aspect, the present application also provides a detection method of the above-mentioned optical integrated multi-band online detection device 1000, comprising the following steps:

[0052] S1. Switch the target surface of the self-calibration unit 5 to a cross-grained target, turn on the self-calibration light source 51, remove the movable baffle 54, and the output light beam of the self-calibration light source 51 is divided into two parts after passing through the second beam splitter 52. One part of the light is transmitted to the corner cone 53, reflected by the corner cone 53 to the second beam splitter 52, and then reflected by the second beam splitter 52 to the far-field detector 61 to form a cross spot image; the other part of the light is reflected to the first beam splitter 42, transmitted to the secondary mirror 32 through the first beam splitter 42, reflected to the primary mirror 31 through the secondary mirror 32, reflected to the reference window mirror 21 through the primary mirror 31, and the light beam reflected to the reference window mirror 21 returns to the second beam splitter 52 along the original path, and is transmitted to the far-field detection unit 6 through the second beam splitter 52 to form a cross spot image. If the two ten-character light spot images overlap and are located at the center of the far-field detection unit 6, the self-calibration is considered to be completed at this time. If the two ten-character light spot images do not overlap, the two parts of light are made to overlap and be located at the center of the far-field detection unit 6 by adjusting the azimuth and pitch angles of the reference window mirror 21, that is, the two cross light spot images are made to overlap and be located at the center of the crosshairs on the far-field detector 61 by adjusting the azimuth and pitch angles of the reference window mirror 21, and then the self-calibration is completed; turn off the self-calibration light source 51, reset the movable baffle 54, and make the movable baffle 54 block the angle cone 53.

[0053] S2. Turn on the laser optoelectronic system 1. The automatic control and data extraction unit 8 controls the adjustment unit 7 to work. The focusing mechanism 32 and the adjustment unit 7 are adjusted so that the crosshairs on the reference mirror 9 are imaged at the center of the near-field detector 41. The pupil reference is completed, and the laser optoelectronic system 1 is turned off.

[0054] S3, turn on the self-calibration light source 51, the light beam emitted by the self-calibration light source 51 is reflected to the first beam splitter 42, transmitted to the secondary mirror 32 through the first beam splitter 42, reflected to the primary mirror 31 through the secondary mirror 32, reflected to the reference window mirror 21 through the primary mirror 31, transmitted to the reference mirror 9 through the reference window mirror 21, and then the light beam returns along the original path, and the crosshairs on the self-calibration unit 5 are imaged on the far-field detector 61. By adjusting the adjustment unit 7, the crosshairs on the self-calibration unit 5 are imaged at the center of the far-field detector 61, the optical axis reference is completed, and the self-calibration light source 51 is turned off. At this time, the crosshairs on the reference mirror 9 are also imaged at the center of the near-field detector 41, that is, by adjusting the adjustment unit 7, the crosshairs on the reference mirror 9 can be imaged at the center of the near-field detector 41, and the crosshairs on the self-calibration unit 5 can be imaged at the center of the far-field detector 61 at the same time.

[0055] S4, turn on the laser photoelectric system 1, and test the spot centroid of the output beam of the laser photoelectric system 1 on the near-field detector 41. Specifically: the optical path diagram of the near-field detection process is as follows: Figure 2 As shown in FIG. 1 , the outgoing light of the laser optoelectronic system 1 is outputted by the reference unit 2 and the beam reduction unit 3, and then reflected by the first beam splitter 42 into the near-field detection unit 4, and imaged on the near-field detector 41, as shown in FIG. Figure 2 As shown in b; the near-field detector 41 transmits the received light spot information to the automatic control and data extraction unit 8, and the digital image processing software of the automatic control and data extraction unit 8 extracts the near-field light spot centroid data to obtain the distance between the pupil (i.e., the center of the dot) and the center of the crosshairs, i.e., the pupil deviation.

[0056] Test the spot centroid of the output beam of the laser optoelectronic system 1 at the far-field detector 61; specifically: the optical path diagram of the far-field detection process is as follows Figure 3 As shown in FIG. 1 , the output light of the laser optoelectronic system 1 is outputted by the reference unit 2 and the beam reduction unit 3, and then projected to the second beam splitter 52 through the first beam splitter 42, and then transmitted into the far-field detection unit 6 through the second beam splitter 52, and imaged on the far-field detector 61, as shown in FIG. Figure 3 As shown in b; the far-field detector 61 transmits the received light spot information to the automatic control and data extraction unit 8, and the digital image processing software of the automatic control and data extraction unit 8 extracts the far-field light spot centroid data to obtain the distance between the optical axis (i.e., the center of the dot) and the center of the crosshairs, i.e., the optical axis deviation.

[0057] In the near-field detection and far-field detection process, after completing the pupil reference in step S2, the near-field detection may be subsequently performed, and after the near-field detection is completed, the optical axis reference in step S3 may be performed, and then the far-field detection may be performed.

[0058] The present application simultaneously sets a near-field detection unit 4 and a far-field detection unit 6 in the optical path, so that the pupil deviation of the laser emitted by the laser optoelectronic system can be measured by near-field detection, and the optical axis deviation of the laser emitted by the laser optoelectronic system can be measured by far-field detection; through the coordinated cooperation of the focusing mechanism 32, the switchable attenuation wheel 34 and the switchable filter wheel 35, the near and far field detection of incident laser beams with different optical focal lengths, different bands and different powers can be achieved, which provides technical support for multi-band detection of optical integrated process technology and can realize the detection of targets at different distances.

[0059] It should be noted that the present application is not limited to the above-mentioned embodiments. The above-mentioned embodiments are only examples, and the embodiments having the same structure as the technical idea and exerting the same effect within the scope of the technical solution of the present application are all included in the technical scope of the present application. In addition, without departing from the scope of the main purpose of the present application, various modifications that can be thought of by those skilled in the art to the embodiments and other methods of combining some of the constituent elements in the embodiments are also included in the scope of the present application.

Claims

1. An optically integrated multi-band online detection device, arranged at the laser output end of a laser optoelectronic system, characterized in that: It includes a reference unit, a beam reduction unit, a near-field detection unit, a self-calibration unit, a far-field detection unit and an adjustment unit connected to each unit. The reference unit includes a reference window mirror with a crosshair; The beam reduction unit comprises a primary mirror, a secondary mirror and a focusing mechanism for moving the secondary mirror, which are sequentially arranged along the optical path; The near-field detection unit comprises a near-field detector and a first spectroscope; The self-calibration unit comprises a self-calibration light source, a second beam splitter and a cone; the first beam splitter and the second beam splitter are sequentially arranged on the optical path of the light beam outputted by the secondary mirror; The far-field detection unit includes a far-field detector; The laser output end of the laser photoelectric system is provided with a reference mirror with a crosshair.

2. The optical integrated multi-band online detection device according to claim 1, characterized in that: The focusing mechanism comprises a motor, a gear and a guide rail which are connected in sequence; the gear is connected to the output shaft of the motor; and the gear is meshedly connected to the guide rail.

3. The optical integrated multi-band online detection device according to claim 2, characterized in that: The beam reduction unit further comprises a switchable attenuation wheel and a switchable filter wheel which are sequentially arranged at the light beam output end of the secondary mirror.

4. The optical integrated multi-band online detection device according to claim 3, characterized in that: The self-calibration unit further comprises a movable baffle plate arranged at the input end of the pyramidal light beam.

5. The optical integrated multi-band online detection device according to claim 4, characterized in that: The optical integrated multi-band online detection device also includes an automatic control and data extraction unit; the automatic control and data extraction unit is electrically connected to the near-field detection unit, the self-calibration unit, the far-field detection unit and the adjustment unit respectively.

6. The optical integrated multi-band online detection device according to claim 5, characterized in that: The adjustment unit is an electric five-dimensional adjustment mechanism.

7. The optical integrated multi-band online detection device according to claim 6, characterized in that: The reference unit further comprises a cubic prism arranged above the reference window mirror; the cubic prism is used to calibrate the normal angle of the light entrance port of the reference window mirror.

8. The optical integrated multi-band online detection device according to claim 7, characterized in that: The reference window mirror is provided with an adjustment tool for adjusting the azimuth and pitch angle of the reference window mirror.

9. The optical integrated multi-band online detection device according to claim 1, characterized in that: The detection method of the optical integrated multi-band online detection device comprises the following steps: S1, switch the target surface of the self-calibration unit to a cross-grained target, turn on the self-calibration light source, and the output light beam of the self-calibration light source is divided into two parts after passing through the second beam splitter, one part of the light is transmitted to the corner cone, reflected to the second beam splitter by the corner cone, and then reflected to the far-field detector by the second beam splitter to form a cross spot image; the other part of the light is reflected to the first beam splitter, transmitted to the secondary mirror by the first beam splitter, reflected to the primary mirror by the secondary mirror, reflected to the reference window mirror by the primary mirror, and the light beam reflected to the reference window mirror returns to the second beam splitter along the original path, and is transmitted to the far-field detector by the second beam splitter to form a cross spot image; if the two light spot images overlap, self-calibration is completed, and the self-calibration light source is turned off; S2, turning on the laser photoelectric system, adjusting the focusing mechanism and the adjusting unit so that the crosshairs on the reference mirror are imaged at the center of the near-field detector, completing the pupil reference, and then turning off the laser photoelectric system; S3, turn on the self-calibration light source, move the movable baffle to block the corner cone, the light beam emitted by the self-calibration light source is reflected to the first beam splitter, transmitted to the secondary mirror through the first beam splitter, reflected to the primary mirror through the secondary mirror, reflected to the reference window mirror through the primary mirror, and transmitted to the reference mirror, and then returns through the original path, the crosshairs on the self-calibration unit are imaged on the far-field detector, and the crosshairs on the self-calibration unit are imaged on the center of the far-field detector by adjusting the adjustment unit, the optical axis reference is completed, and the self-calibration light source is turned off; S4, turning on the laser optoelectronic system, testing the spot centroid of the output light beam of the laser optoelectronic system on the near-field detector; and testing the spot centroid of the output light beam of the laser optoelectronic system on the far-field detector.

10. The optical integrated multi-band online detection device according to claim 9, characterized in that: The method also includes the following steps: extracting and analyzing data from the near-field detector and the far-field detector.

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