System and method for testing service life of flow control component

Abstract

The invention discloses a system and a method for testing the service life of a flow control component. The system comprises a nitrogen source; a controller; a gas inlet of the to-be-tested valve body is connected with a nitrogen source, the to-be-tested valve body is provided with an electromagnetic valve used for opening and closing the to-be-tested valve body, and the electromagnetic valve is electrically connected with the controller and used for receiving an opening signal of the controller, further driving a valve rod in the to-be-tested valve body to move upwards, further opening the to-be-tested valve body to conduct the nitrogen source and receiving a closing signal of the controller; a valve rod in the to-be-tested valve body is driven to move downwards, so that the to-be-tested valve body is closed, and a nitrogen source is blocked; the position sensor is fixed above the to-be-detected valve body through a support, the detection end of the position sensor can be in contact with or separated from a valve rod of the to-be-detected valve body, and the position sensor is electrically connected with the controller so as to send a contact or separation signal to the controller. Through the electromagnetic valve, the position sensor and the controller, detection of the opening and closing response time of the valve body to be detected can be realized, and the service life of the valve body to be detected can be detected.

Description

Technical Field

[0001] The present invention relates to the technical field of valve parts testing, and more particularly to a life testing system and a testing method for a flow control component. Background Art

[0002] Fluid control components used in the semiconductor industry, such as diaphragm valves, cylinder valves and other gas-controlled valves, need to undergo certain life tests during the R&D stage. The number of life tests ranges from tens of thousands to tens of millions of times, and the testing process often incurs a lot of time, manpower, material and other resource costs. Often, some valves used in specific occasions, such as atomic layer deposition processes and chemical vapor deposition processes, have certain requirements for the opening and closing time of the valve itself, but the response time cannot be detected during the current life test process.

[0003] Therefore, how to provide a life test system and a test method for flow control components that can test the response time of the flow control components is an urgent problem that those skilled in the art need to solve. Summary of the invention

[0004] In view of this, the present invention provides a life test system and a test method for a flow control component that can test the response time of the flow control component.

[0005] In order to achieve the above object, the present invention adopts the following technical solution:

[0006] A life test system for a fluid control component, comprising:

[0007] Nitrogen source;

[0008] Controller;

[0009] A valve body to be tested, wherein the air inlet of the valve body to be tested is connected to the nitrogen source, the valve body to be tested is provided with a solenoid valve for opening and closing the valve body to be tested, the solenoid valve is electrically connected to the controller, and is used to receive an opening signal from the controller, thereby driving the valve stem inside the valve body to be tested to move upward, thereby opening the valve body to be tested, so as to conduct the nitrogen source, and to receive a closing signal from the controller, thereby driving the valve stem inside the valve body to be tested to move downward, thereby closing the valve body to be tested, so as to block the nitrogen source;

[0010] A position sensor is fixedly mounted above the valve body to be tested, a detection end of the position sensor can contact or separate from the valve stem of the valve body to be tested, and the position sensor is electrically connected to the controller to send a contact or separation signal to the controller.

[0011] It can be seen from the above technical solution that, compared with the prior art, the present invention discloses a life test system for flow control components. By setting a solenoid valve, a position sensor, and a controller, the opening and closing response time of the valve body to be tested can be detected, and the service life of the valve body can be indirectly judged according to its trend.

[0012] Furthermore, there are multiple valve bodies to be tested and multiple position sensors, multiple air inlets of the valve bodies to be tested are connected to air inlet pipes, and an air inlet nozzle connected to the nitrogen source is installed on the air inlet pipe; multiple air outlets of the valve bodies to be tested are connected to exhaust pipes, and an air outlet nozzle is installed on the exhaust pipe.

[0013] The beneficial effects of adopting the above technical solution are: multiple valve bodies can be tested at the same time, which improves the detection efficiency and saves time cost; and the integrated exhaust end can reduce the discharge of nitrogen at the tail end, which can save nitrogen cost (the reason is: during a single test, exhaust gas will be discharged from the tail end of a single valve body, and during an integrated test, all valve exhaust will be integrated into the exhaust pipe for discharge. The pressure and flow rate in the pipeline per unit time are certain, so the exhaust gas discharged per unit time will be less than the cumulative sum of the individual ones).

[0014] Furthermore, a pressure reducing valve and a pressure gauge for controlling the intake pressure are installed on the intake pipe.

[0015] The beneficial effect of adopting the above technical solution is that the pressure of the valve body to be tested during actual operation can be adjusted through the pressure reducing valve, the actual working environment of the valve body can be simulated, and the detection accuracy can be improved.

[0016] Furthermore, the position sensor includes an upper main rod and a lower detection rod, which are connected by a cable. There is a quick-plug connector female on the controller, and the top of the upper main rod is connected to the quick-plug connector female by quick plugging, so as to achieve the purpose of quick valve replacement and quick testing. The lower detection rod is fastened to the valve body to be tested by a nut fastener, and the bottom end of the lower detection rod is the detection end, which can contact or separate from the valve stem, thereby detecting the on-off state of the valve body, and then obtaining the response time of the detectable valve body.

[0017] A testing method of the life test system of the fluid control component comprises the following steps:

[0018] Step 1: The controller sends an opening signal to the solenoid valve to control the solenoid valve to be energized so that the solenoid valve is opened. The solenoid valve drives the valve stem of the valve body to be tested to move upward and contact the detection end of the position sensor. At this time, the position sensor sends a signal to the controller. The controller calculates the signal feedback time difference according to the sending signal and the receiving signal, and then obtains the response time of the valve body to be tested to open;

[0019] Step 2: The controller sends a closing signal to the solenoid valve to control the solenoid valve to be powered off so that the solenoid valve is closed. The solenoid valve drives the valve stem of the valve body to be tested to move downward and disengage from the detection end of the position sensor. At this time, the position sensor sends a signal to the controller. The controller calculates the signal feedback time difference according to the sending signal and the receiving signal, and then obtains the response time of the valve body to be tested to close.

[0020] Step 3: Repeat the above steps to obtain the opening and closing response time curve of the valve body to be tested, and judge the life of the valve body to be tested by the curve. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0022] Figure 1 A schematic structural diagram of a life test system for a fluid control component provided by the present invention.

[0023] Figure 2 A schematic diagram of a three-dimensional model of a life test system for a fluid control component provided by the present invention.

[0024] Figure 3 It is a cross-sectional schematic diagram of the valve body to be tested and the solenoid valve assembly.

[0025] Figure 4 It is a three-dimensional schematic diagram of the valve body to be tested and the solenoid valve assembly. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] The embodiment of the present invention discloses a life test system for a fluid control component, comprising:

[0028] Nitrogen source 1;

[0029] Controller 2;

[0030] A valve body 3 to be tested, the air inlet of the valve body 3 to be tested is connected to the nitrogen source 1, the valve body 3 to be tested is provided with a solenoid valve 4 for opening and closing the valve body 3 to be tested, the solenoid valve 4 is electrically connected to the controller 2, and is used to receive an opening signal from the controller 2, thereby driving a valve stem 31 inside the valve body 3 to be tested to move upward, thereby opening the valve body 3 to be tested, so as to conduct the nitrogen source 1, and to receive a closing signal from the controller 2, thereby driving the valve stem 31 inside the valve body 3 to be tested to move downward, thereby closing the valve body 3 to be tested, so as to block the nitrogen source 1;

[0031] The position sensor 5 is fixedly installed above the valve body 3 to be tested. The detection end of the position sensor 5 can contact or separate from the valve stem 31 of the valve body 3 to be tested. The position sensor 5 is electrically connected to the controller 2 to send a contact or separation signal to the controller 2.

[0032] There are multiple valve bodies 3 to be tested and position sensors 5. The air inlets of the multiple valve bodies 3 to be tested are connected to an air inlet pipe 6, and an air inlet nozzle 7 connected to a nitrogen source 1 is installed on the air inlet pipe 6. The air outlets of the multiple valve bodies 3 to be tested are connected to an exhaust pipe 8, and an air outlet nozzle 9 is installed on the exhaust pipe 8.

[0033] The intake pipe 6 is provided with a pressure reducing valve 10 and a pressure gauge 11 for controlling the intake pressure.

[0034] A testing method for a life test system of a fluid control component comprises the following steps:

[0035] Step 1: The controller 2 sends an opening signal to the solenoid valve 4, controls the solenoid valve 4 to be energized, so that the solenoid valve 4 is opened, and the solenoid valve 4 drives the valve stem 31 of the valve body 3 to be tested to move upward and contact with the detection end of the position sensor 5. At this time, the position sensor 5 sends a signal to the controller 2. The controller 2 calculates the signal feedback time difference according to the sending signal and the receiving signal, and then obtains the response time of the valve body 3 to be tested to open;

[0036] Step 2: The controller 2 sends a closing signal to the solenoid valve 4, controls the solenoid valve 4 to cut off the power, so that the solenoid valve 4 is closed, and the solenoid valve 4 drives the valve stem 31 of the valve body 3 to be tested to move downward and disengage from the detection end of the position sensor 5. At this time, the position sensor 5 sends a signal to the controller 2. The controller 2 calculates the signal feedback time difference according to the sending signal and the receiving signal, and then obtains the response time of the valve body 3 to be tested to close;

[0037] Step 3: Repeat the above steps to obtain the opening and closing response time curve of the valve body 3 to be tested, and judge the life of the valve body to be tested through the curve. This is because as the valve body is continuously opened and closed, its response time will gradually increase, and the service life of the valve body can be indirectly judged based on its trend.

[0038] In the above step 2, the specific steps of the solenoid valve controlling the valve body to close are: after the solenoid valve 4 is powered on, the solenoid valve 4 is opened, and the compressed air or nitrogen at the air inlet end 41 of the solenoid valve 4 enters the actuator inside the valve body 3 through the solenoid valve 4. Due to the internal pressure of the actuator, the internal actuator is opened, that is, the valve stem 31 moves up, and the entire valve changes from a closed state to an open state. At this time, the position sensor 5 contacts the valve stem 31, and the state of the valve is fed back through the PLC as an open state. After the solenoid valve 4 is powered off, the solenoid valve 4 is closed, and the compressed air or nitrogen in the solenoid valve 4 is discharged through the exhaust end 42 of the solenoid valve 4. At this time, the internal pressure of the actuator of the valve body drops to atmospheric pressure. Since the actuator has no pressure, the actuator returns to the initial state, that is, the valve stem 31 moves down and resets, and the entire valve changes from an open state to a closed state. At this time, the position sensor 5 is separated from the valve stem and does not contact the valve stem 31. The state of the valve is fed back through the PLC as a closed state.

[0039] In the above embodiment, the position sensor 5 is divided into an upper main rod 51 and a lower detection rod 52, and the two are connected by a cable. The top of the upper main rod 51 is quickly connected to the female head in the test system by a quick plug method, so as to achieve the purpose of quick valve replacement and quick testing. The lower detection rod 52 is fixedly installed inside the valve body, and the bottom end of the lower detection rod 52 is the detection end, which can contact or separate from the valve stem 31 inside the valve body, so as to detect the on-off state of the valve body and obtain the response time of the detectable valve body.

[0040] Therefore, the above system and method can simultaneously test the opening and closing response time of multiple valve bodies, and then indirectly judge the service life of the valve body according to its trend, thereby improving the detection efficiency and saving time cost.

[0041] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0042] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A life test system for a fluid control component, characterized in that: include: Nitrogen source (1); Controller (2); A valve body (3) to be tested, wherein the air inlet of the valve body (3) to be tested is connected to the nitrogen source (1), and the valve body (3) to be tested is provided with a solenoid valve (4) for opening and closing the valve body (3) to be tested, and the solenoid valve (4) is electrically connected to the controller (2) and is used to receive an opening signal from the controller (2), thereby driving a valve stem (31) inside the valve body (3) to move upward, thereby opening the valve body (3) to be tested, so as to conduct the nitrogen source (1), and to receive a closing signal from the controller (2), thereby driving a valve stem (31) inside the valve body (3) to move downward, thereby closing the valve body (3) to be tested, so as to block the nitrogen source (1); A position sensor (5), wherein the position sensor (5) is fixedly mounted above the valve body (3) to be tested, wherein the detection end of the position sensor (5) can be in contact with or separated from the valve stem (31) of the valve body (3) to be tested, and the position sensor (5) is electrically connected to the controller (2) to send a contact or separation signal to the controller (2).

2. A life test system for a fluid control component according to claim 1, characterized in that: The valve bodies (3) to be tested and the position sensors (5) are multiple in number, the air inlets of the multiple valve bodies (3) to be tested are connected to an air inlet pipe (6), the air inlet pipe (6) is equipped with an air inlet nozzle (7) connected to the nitrogen source (1), and the air outlets of the multiple valve bodies (3) to be tested are connected to an exhaust pipe (8), the exhaust pipe (8) is equipped with an air outlet nozzle (9).

3. A life test system for a fluid control component according to claim 2, characterized in that: The air intake pipe (6) is provided with a pressure reducing valve (10) and a pressure gauge (11) for controlling the air intake pressure.

4. A life test system for a fluid control component according to any one of claims 1 to 3, characterized in that: The position sensor (5) comprises an upper main rod (51) and a lower detection rod (52), which are connected by a cable. A quick-connect female connector is provided on the controller (2). The top of the upper main rod (51) is connected to the quick-connect female connector by quick plugging. The lower detection rod (52) is fastened to the valve body (3) to be tested by a nut fastener. The bottom end of the lower detection rod (52) is a detection end, which can be in contact with or separated from the valve stem (31).

5. A testing method for a life test system of a fluid control component according to any one of claims 1 to 4, characterized in that: The steps include: Step 1: The controller (2) sends an opening signal to the solenoid valve (4) to control the solenoid valve (4) to be energized so that the solenoid valve (4) is opened. The solenoid valve (4) drives the valve stem (31) of the valve body (3) to be tested to move upward and contact the detection end of the position sensor (5). At this time, the position sensor (5) sends a signal to the controller (2). The controller (2) calculates the signal feedback time difference based on the sending signal and the receiving signal, and then obtains the response time of the valve body (3) to be tested to open. Step 2: The controller (2) sends a closing signal to the solenoid valve (4) to control the solenoid valve (4) to be powered off so that the solenoid valve (4) is closed. The solenoid valve (4) drives the valve stem (31) of the valve body (3) to be tested to move downward and disengage from the detection end of the position sensor (5). At this time, the position sensor (5) sends a signal to the controller (2). The controller (2) calculates the signal feedback time difference based on the sending signal and the receiving signal, and then obtains the response time of the closing of the valve body (3) to be tested. Step 3: Repeat the above steps to obtain the opening and closing response time curve of the valve body (3) to be tested, and judge the life of the valve body to be tested by the curve.

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