Micro-nano coating nondestructive testing device and micro-nano coating nondestructive testing method

Abstract

The invention relates to the technical field of laser optical detection, and provides a micro-nano coating nondestructive testing device and a micro-nano coating nondestructive testing method.The device comprises a displacement carrying table, an intermediate infrared laser, a laser vibration meter, a signal processing module and a displacement carrying table controller; the displacement platform deck can move the device to be tested along a plurality of different directions; the mid-infrared laser is used for emitting mid-infrared laser with different wavelengths to the to-be-tested device; the laser vibration meter is used for emitting vibration detection laser to the micro-nano coating on the surface of the to-be-detected device and processing the received vibration detection laser to obtain vibration information of the surface of the to-be-detected device; the signal processing module is used for processing and converting the vibration information into a vibration electric signal; the displacement platform deck controller can apply compensation vibration to the displacement platform deck according to the vibration electric signal so as to offset initial vibration of the to-be-tested device in the displacement platform deck. According to the method, the micro-nano-scale rapid detection of the surface coating of the to-be-detected device can be realized, and the whole detection process does not cause any damage to the to-be-detected device.

Description

Technical Field

[0001] The present invention relates to the field of laser optical detection technology, and in particular to a micro-nano coating non-destructive detection device and a micro-nano coating non-destructive detection method. Background Art

[0002] Integrated circuits, discrete devices, sensors, optoelectronic devices, etc., involve a large number of nano-scale coating processing processes in micro-nano manufacturing and device-related fields. With the development of technologies such as artificial intelligence, new displays, and advanced communications, the requirements for device manufacturing processes are getting higher and higher. Nano-coating technology in micro-nano manufacturing is developing in the direction of small scale and refinement, and higher requirements are also put forward for nano-coating detection technology. The quality of the coating determines the functionality and reliability of various device applications and is a key factor that needs to be strictly controlled in the process.

[0003] At present, the quality control of nano coatings mostly uses optical microscopes to check the surface defects and uniformity of the coatings, scanning electron microscopes (SEM) to check high-resolution surface morphology and defects, X-ray energy spectrum (EDX) to analyze the elemental composition of the coatings, atomic force microscopes (AFM) to measure the thickness and surface roughness of the coatings, X-ray photoelectron spectroscopy (XPS) to analyze the chemical composition and bonding state of the coatings, and ellipsometry to measure the thickness and optical properties of the coatings. However, due to the limitations of the above technologies in terms of resolution, sensitivity, device (wafer) detection adaptation and other functions, it is impossible to achieve rapid non-destructive detection of nano coatings on micro-nano devices.

[0004] In view of this, the market is in urgent need of a new type of micro-nano coating non-destructive testing device and method to solve the problem that the existing technology cannot achieve rapid and non-destructive testing of nano-coatings in devices. Summary of the invention

[0005] The embodiments of the present disclosure provide a device and method for nondestructive testing of micro-nano coatings, in order to solve the problem that the prior art cannot perform rapid and nondestructive testing of nano-coatings in devices.

[0006] The micro-nano coating nondestructive testing device provided in the embodiment of the present disclosure includes a displacement stage, a mid-infrared laser, a laser vibrometer, a signal processing module and a displacement stage controller;

[0007] The displacement stage can move the device under test in multiple different directions;

[0008] The mid-infrared laser is used to emit mid-infrared lasers of different wavelengths to the micro-nano coating on the surface of the device to be tested;

[0009] The laser vibrometer is used to emit a vibration detection laser to the micro-nano coating on the surface of the device to be tested, and can receive the vibration detection laser reflected, refracted or scattered back, and process it accordingly to obtain the vibration information of the surface of the device to be tested;

[0010] The signal processing module is electrically connected to the laser vibrometer and is used to process and convert the vibration information into a vibration electrical signal;

[0011] The displacement stage controller is electrically connected to the signal processing module and the displacement stage respectively;

[0012] The displacement stage controller can apply a compensating vibration to the displacement stage according to the vibration electrical signal to offset the initial vibration of the device under test in the displacement stage.

[0013] In one possible implementation, the laser vibrometer includes a beam splitter, a beam combiner, and a photodetector sequentially arranged in its own optical path;

[0014] The beam splitter can split the laser beam emitted by the laser vibrometer into a detection laser beam and a reference laser beam, and the detection laser beam can be reflected, refracted or scattered back to the laser vibrometer after being irradiated on the device to be measured;

[0015] The beam combiner is used to combine the reference laser with the detection laser that is reflected, refracted or scattered back;

[0016] The photoelectric detector is used to detect the interference frequency difference of the combined laser beam and convert it into a vibration signal of the device to be tested.

[0017] In one possible implementation, the mid-infrared laser can irradiate the mid-infrared laser onto the device under test through a first optical path;

[0018] A first dichroic mirror, a second dichroic mirror and a reflective objective lens are sequentially arranged in the first optical path along the irradiation direction;

[0019] The mid-infrared laser can penetrate the first dichroic mirror and the second dichroic mirror respectively;

[0020] The detection laser can be reflected to the device under test through the second dichroic mirror, or reflected back to the laser vibrometer.

[0021] The reflective objective lens is used to focus the mid-infrared laser and the detection laser on the micro-nano coating on the surface of the device to be tested.

[0022] In one possible implementation manner, it further includes a focusing lens and a photosensitive coupling component arranged corresponding to the first dichroic mirror;

[0023] The device under test can partially reflect the mid-infrared laser back to the first dichroic mirror along the first optical path, and the first dichroic mirror can reflect the reflected mid-infrared laser back to the focusing lens;

[0024] The focusing lens is used to focus the mid-infrared laser reflected by the first dichroic mirror onto the photosensitive coupling component.

[0025] In one possible implementation, the laser vibrometer further includes a helium-neon laser and an acousto-optic modulator;

[0026] The helium-neon laser is used to emit laser light toward the beam splitter, and the laser light is a detection laser and a reference laser through the beam splitter;

[0027] The reference laser is irradiated to the beam combiner after passing through the acousto-optic modulator.

[0028] In one possible implementation, the signal processing module includes a lock-in amplifier and a processor;

[0029] The phase-locked amplifier is electrically connected to the photodetector and is used to phase-lock the signal vibration measured by the photodetector;

[0030] The processor is electrically connected to the lock-in amplifier and is capable of drawing a vibration intensity image according to the lock-in data of the lock-in amplifier.

[0031] In one possible implementation manner, the processor is also electrically connected to the mid-infrared laser, and is capable of regulating the mid-infrared laser to output a plurality of mid-infrared lasers of equally spaced wavelengths one by one.

[0032] In one possible implementation manner, the processor is also electrically connected to the displacement stage, and is capable of regulating the displacement stage to perform scanning movement along a preset trajectory path and a preset speed.

[0033] In addition, the embodiment of the present disclosure also provides a micro-nano coating non-destructive testing method, which can be applied to the above-mentioned micro-nano coating non-destructive testing device, and includes the following steps:

[0034] The first step is to place the device under test on a displacement stage, and adjust and move the displacement stage so that the device under test is accurately located in the detection focus area;

[0035] In the second step, the vibration information of the surface of the device under test is measured by a laser vibrometer, the signal processing module converts the vibration information into a vibration electrical signal, and the displacement stage controller applies a cycle of compensating vibration to the displacement stage according to the vibration electrical signal to offset the initial vibration of the device under test;

[0036] In the third step, the laser vibrometer emits a detection laser to the device under test, and the signal processing module selects the boundary of the area to be detected in the device under test based on the optical imaging screen of the laser vibrometer, and generates a moving scanning filling path of the displacement stage;

[0037] In the fourth step, a mid-infrared laser is used to emit a repetitive frequency mid-infrared laser to the device under test, and multiple wavelengths with equal spacing are selected within the spectral range of the mid-infrared laser and output one by one. At each wavelength, the laser vibrometer runs the detection task one by one, and the signal processing module draws a vibration intensity distribution image according to the multiple wavelengths of the mid-infrared laser.

[0038] In one embodiment, the micro-nano coating nondestructive testing method further includes:

[0039] The subsequent inspection step is to adjust the wavelength of the mid-infrared laser emitted by the mid-infrared laser according to the peak in the vibration intensity distribution image, and perform random area inspection or full-surface inspection on other positions of the device to be tested.

[0040] Compared with the prior art, the technical solution provided by the embodiments of the present disclosure has the following advantages:

[0041] The micro-nano coating nondestructive testing device provided in the embodiment of the present disclosure can realize micro-nano-level detection of the surface coating of the device to be tested, and the entire detection process is non-destructive to the device to be tested, and there is no need for any additional pre-testing processing such as cutting and extraction on the device to be tested. It can also realize rapid detection and evaluation analysis of the integrity and defects of nano-coatings with a thickness of less than 2nm on the surface of large-size devices.

[0042] In addition, the micro-nano coating nondestructive testing method provided in the embodiment of the present disclosure can be applied to the above-mentioned micro-nano coating nondestructive testing device and can achieve the same beneficial effects.

[0043] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, in which:

[0045] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts.

[0046] Figure 1 A schematic diagram of a micro-nano coating nondestructive testing device provided by an embodiment of the present disclosure is shown;

[0047] Figure 2 An infrared light thermal vibration intensity spectrum of the micro-nano coating nondestructive testing device provided by an embodiment of the present disclosure for detecting the presence or absence of a coating is shown;

[0048] Figure 3 A flow chart of a nondestructive testing method for micro-nano coatings provided in an embodiment of the present disclosure is shown.

[0049] Explanation of the numbers in the figure: 1. Displacement stage;

[0050] 2. Mid-infrared laser; 111. Reflector; 101. Beam splitter; 102. Beam combiner; 103. Half-wave plate; 104. Polarizer;

[0051] 3. Laser vibrometer; 31. Helium-neon laser; 32. Beam splitter; 33. Beam combiner; 34. Photodetector; 35. Acousto-optic modulator;

[0052] 4. signal processing module; 41. lock-in amplifier; 42. processor;

[0053] 5. Displacement stage controller;

[0054] 6. Photosensitive coupling assembly; 61. Focusing lens. DETAILED DESCRIPTION

[0055] In order to make the purpose, features, and advantages of the present disclosure more obvious and easy to understand, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0056] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0057] Combination Figure 1 As shown, the embodiment of the present disclosure provides a micro-nano coating non-destructive testing device, which includes a displacement stage 1, a mid-infrared laser 2, a laser vibrometer 3, a signal processing module 4 and a displacement stage controller 5; the displacement stage 1 can move the device to be tested in multiple different directions; the mid-infrared laser 2 is used to emit mid-infrared lasers of different wavelengths to the device to be tested; the laser vibrometer 3 is used to emit a vibration detection laser to the micro-nano coating on the surface of the device to be tested, and can receive the vibration detection laser reflected, refracted or scattered back, and process it accordingly to obtain vibration information on the surface of the device to be tested; the signal processing module 4 is electrically connected to the laser vibrometer 3, and is used to process and convert the vibration information into a vibration electrical signal; the displacement stage controller 5 is electrically connected to the signal processing module 4 and the displacement stage 1 respectively; wherein the displacement stage controller 5 can apply a compensating vibration to the displacement stage 1 according to the vibration electrical signal to offset the initial vibration of the device to be tested in the displacement stage.

[0058] In one embodiment, the laser vibrometer 3 includes a beam splitter 32, a beam combiner 33 and a photodetector 34 which are sequentially arranged in its optical path; the signal processing module 4 is electrically connected to the laser vibrometer 3 and is used to receive and process the measurement signal of the laser vibrometer 3;

[0059] Among them, the beam splitter 32 can split the laser emitted by the laser vibrometer 3 into a detection laser and a reference laser, and the detection laser can be reflected, refracted or scattered back to the laser vibrometer 3 after irradiating the device to be tested; the beam combiner 33 is used to combine the reference laser with the reflected, refracted or scattered detection laser; the photodetector 34 is used to detect the interference frequency difference of the combined laser and convert it into a vibration signal of the device to be tested.

[0060] In one possible implementation, the mid-infrared laser 2 can irradiate the mid-infrared laser to the device under test through the first optical path; the first dichroic mirror 21, the second dichroic mirror 22 and the reflective objective lens 23 are sequentially arranged along the irradiation direction in the first optical path; the mid-infrared laser can penetrate the first dichroic mirror 21 and the second dichroic mirror 22 respectively; the detection laser can be reversely reflected to the device under test through the second dichroic mirror 22, or reversely reflected back to the laser vibrometer 3; the reflective objective lens 23 is used to focus the mid-infrared laser and the detection laser on the micro-nano coating on the surface of the device under test.

[0061] In one possible implementation, it also includes a focusing lens 61 and a photosensitive coupling component 6 that are arranged corresponding to the first dichroic mirror 21; the device under test can partially reflect the mid-infrared laser back to the first dichroic mirror 21 along the first optical path, and the first dichroic mirror 21 can reflect the reflected mid-infrared laser to the focusing lens 61; the focusing lens 61 is used to focus the mid-infrared laser reflected by the first dichroic mirror 21 on the photosensitive coupling component 6.

[0062] A dichroic mirror, also known as a two-color mirror, can almost completely transmit light of certain wavelengths and almost completely reflect light of other wavelengths.

[0063] In one possible implementation, the laser vibrometer 3 further includes a helium-neon laser 31 and an acousto-optic modulator 35 ; the helium-neon laser 31 is used to emit laser light toward a beam splitter 32 , and the laser light is converted into a detection laser and a reference laser through the beam splitter 32 ; the reference laser light is irradiated onto a beam combiner 33 after passing through the acousto-optic modulator 35 .

[0064] In one embodiment, the signal processing module 4 includes a phase-locked amplifier 41 and a processor 42; the phase-locked amplifier 41 is electrically connected to the photodetector 34, and is used to phase-lock the signal vibration measured by the photodetector 34; the processor 42 is electrically connected to the phase-locked amplifier 41, and can draw a vibration intensity image based on the phase-locked data of the phase-locked amplifier 41.

[0065] In one possible implementation, the processor 42 is also electrically connected to the mid-infrared laser 2 and is capable of regulating the mid-infrared laser 2 to output a plurality of mid-infrared lasers with equally spaced wavelengths one by one.

[0066] In one possible implementation manner, the processor 42 is also electrically connected to the displacement stage 1 and is capable of regulating the displacement stage 1 to perform scanning movement along a preset trajectory path and a preset speed.

[0067] The micro-nano coating nondestructive testing device can be specifically but not limited to being used for rapid nondestructive testing of surface nano-scale coatings on micro-nano devices, precision instruments, silicon wafers, etc., and the testing process is non-destructive to the device under test, and no additional pre-test pre-processing such as cutting, extraction, and surface treatment is required for the device under test.

[0068] Specifically, taking the detection of micro-nano foreign objects on the surface of silicon wafers with sub-micron-level photoresist residues and silicon carbide crystal wafers as an example, the usage process is explained in detail.

[0069] Before the nondestructive testing device for micro-nano coatings detects the micro-nano coatings on the surfaces of precision instruments, wafers, and other devices to be tested, the device to be tested is first fixedly placed on a displacement stage 1, and the displacement stage 1 can be specifically configured as a three-axis precision electrically controlled displacement stage. The device to be tested is moved to the point directly below the focusing lens 61 by controlling the displacement stage 1 to move precisely along the X-axis and the Y-axis, and then the displacement stage 1 is controlled to move slowly along the Z-axis to lift the device to be tested until the device to be tested is located at the focus of the focusing lens 61, that is, the surface of the device to be tested can be clearly imaged by the camera.

[0070] Next, the laser vibrometer 3 is turned on, and the detection laser emitted by the laser vibrometer 3 is focused on the micro-nano coating on the surface of the device to be tested. According to the design size of the micro-nano coating, an appropriate multiple is selected, and the displacement stage 1 is controlled to move slowly up and down to adjust the position of the focus point of the detection laser from the device to be tested. According to the intensity of the laser energy reflected back to the laser vibrometer 3 by the second dichroic mirror 22, the best position for the detection laser to be focused on the surface of the device to be tested is found.

[0071] The data collected by the laser vibrometer 3 is imported into the phase-locked amplifier 41 in the signal processing module 4. The phase-locked amplifier 41 phase-locks the signal according to the light source frequency of the detection laser, thereby obtaining the initial vibration electrical signal of the device under test; then, the phase-locked amplifier 41 feeds back the initial vibration electrical signal to the sample stage controller 5, so that the sample stage controller 5 outputs a compensating vibration to offset the initial vibration of the device under test, which is equivalent to shielding the influence of the space environment and external interference on the device under test.

[0072] Then, based on the optical imaging image, the area size and boundaries that need to be detected on the surface of the device to be tested are selected and imported into the control program of the displacement stage 1 through the signal processing module 4 to generate a moving scanning filling path for the displacement stage 1 and set the actual scanning speed of the displacement stage 1, which can be specifically between 0.1mm / s-100mm / s.

[0073] Finally, the mid-infrared laser 2 is turned on and made to output mid-infrared laser pulses at a certain repetition frequency. The repetition frequency can be specifically between 10kHz and 1000kHz. The mid-infrared laser is a wide-spectrum laser light source. The wavelength range can be between 0.8m and 10m. The output power at a single wavelength is usually between 3mW and 300mW. The mid-infrared laser is also focused by the focusing lens 61 at the same position as the focus of the detection laser. Then, multiple wavelengths with equal spacing are selected from the infrared light spectrum range of the mid-infrared laser and output one by one. The displacement stage 1 runs the detection task one by one at each wavelength. The specific process of the detection is: the displacement stage 1 scans the entire detection area point by point along the preset path and speed. During the scanning process, the signal reflected by the detection laser in the laser vibrometer 3 interferes with the reference laser. The laser vibration measurement function based on the Doppler effect can realize the accurate measurement of the vibration displacement and velocity of the sample in the point area. The measurement accuracy can reach sub-picometers. After each detection task, the vibration data of each point in the entire detection area can be obtained. The data of the laser vibrometer 3 is then imported into the phase-locked amplifier 41, which then phase-locks the signal according to the light source frequency of the mid-infrared laser, thereby obtaining the vibration intensity signal of each detection point at the frequency. The signal processing module 4 then scans and splices point by point to draw an image of the vibration intensity in the entire detection area. When the detection laser irradiates the micro-nano coating on the surface of the device to be tested, the photothermal vibration intensity spectrum is Figure 2 The photothermal vibration intensity changes with the change of nano-coating thickness. Moreover, when the thickness of the nano-coating in different areas of the device under test is consistent, the photothermal vibration intensity is consistent. When the thickness of the nano-coating in different areas is uneven, the photothermal vibration intensity will change significantly. When the device under test has no nano-coating on its surface, the photothermal vibration intensity spectrum is Figure 2 Middle b state.

[0074] In summary, the embodiments of the present disclosure provide a nondestructive testing device for micro-nano coatings, which can ensure that the entire testing process is non-destructive to the device under test, and does not require any additional pre-testing processing such as cutting and extraction on the device under test. It can achieve rapid detection and evaluation analysis of the integrity and defects of nano-coatings with a thickness of less than 2nm on the surface of large-size devices.

[0075] In addition, if Figure 3As shown, the embodiment of the present disclosure also provides a micro-nano coating non-destructive testing method, which can be applied to the above-mentioned micro-nano coating non-destructive testing device, and includes the following steps:

[0076] The first step is to place the device under test on the displacement stage 1, and adjust the displacement stage 1 so that the device under test is precisely located in the detection focus area;

[0077] In the second step, the vibration information of the surface of the device under test is measured by the laser vibrometer 3, the signal processing module 4 converts the vibration information into a vibration electrical signal, and the displacement stage controller 5 applies a cycle of compensating vibration to the displacement stage 1 according to the vibration electrical signal to offset the initial vibration of the device under test;

[0078] In the third step, the laser vibrometer 3 emits a detection laser to the device under test, and the signal processing module 4 selects the boundary of the area to be detected in the device under test based on the optical imaging picture of the laser vibrometer 3, and generates a moving scanning filling path of the displacement stage 1;

[0079] In the fourth step, the mid-infrared laser 2 emits a repetitive frequency mid-infrared laser to the device under test, and selects multiple equally spaced wavelengths within the spectral range of the mid-infrared laser and outputs them one by one. At each wavelength, the laser vibrometer 3 runs the detection task one by one, and the signal processing module 4 draws a vibration intensity distribution image based on the multiple wavelengths of the mid-infrared laser.

[0080] In one embodiment, the micro-nano coating nondestructive testing method further includes:

[0081] In the subsequent inspection step, the wavelength of the mid-infrared laser emitted by the selected mid-infrared laser 2 is adjusted according to the peak in the vibration intensity distribution image, and random area detection or full-surface detection is performed on other positions of the device to be tested.

[0082] The micro-nano coating nondestructive testing method also provided in the embodiment of the present disclosure can be adapted to the above-mentioned micro-nano coating nondestructive testing device, and can also achieve the detection process without causing any destructiveness to the surface coating of the device to be tested, and no additional pre-test processing such as cutting, extraction, surface treatment, etc. is required for the device to be tested, thereby achieving the beneficial effects of rapid detection and evaluation and analysis of the integrity and defects of nano-coatings with a thickness of less than 2nm on the surface of large-size devices.

[0083] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0084] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A micro-nano coating nondestructive testing device, characterized in that: include: A displacement stage (1) capable of moving the device under test in a plurality of different directions; A mid-infrared laser (2) is used to emit mid-infrared lasers of different wavelengths to the micro-nano coating on the surface of the device to be tested; A laser vibrometer (3) is used to emit a vibration detection laser to the micro-nano coating on the surface of the device to be tested, and is capable of receiving the vibration detection laser reflected, refracted or scattered back, and correspondingly processing to obtain vibration information of the surface of the device to be tested; A signal processing module (4), electrically connected to the laser vibrometer (3), and used for processing and converting the vibration information into a vibration electrical signal; A displacement stage controller (5) is electrically connected to the signal processing module (4) and the displacement stage (1) respectively; The displacement stage controller (5) is capable of applying a compensating vibration to the displacement stage (1) according to the vibration electrical signal, so as to offset the initial vibration of the device to be tested in the displacement stage.

2. The micro-nano coating nondestructive testing device according to claim 1, characterized in that: The laser vibrometer (3) comprises a beam splitter (32), a beam combiner (33) and a photoelectric detector (34) which are sequentially arranged in its own optical path; The beam splitter (32) is capable of splitting the laser beam emitted by the laser vibrometer (3) into a detection laser beam and a reference laser beam, and the detection laser beam can be reflected, refracted or scattered back to the laser vibrometer (3) after being irradiated on the device to be measured; The beam combiner (33) is used to combine the reference laser with the detection laser that is reflected, refracted or scattered back; The photoelectric detector (34) is used to detect the interference frequency difference of the combined laser beam and convert it into a vibration signal of the device to be tested.

3. The micro-nano coating nondestructive testing device according to claim 2, characterized in that: The mid-infrared laser (2) is capable of irradiating the mid-infrared laser onto the device to be tested through a first optical path; A first dichroic mirror (21), a second dichroic mirror (22) and a reflecting objective lens (23) are sequentially arranged in the first light path along the irradiation direction; The mid-infrared laser can penetrate the first dichroic mirror (21) and the second dichroic mirror (22) respectively; The detection laser can be reflected by the second dichroic mirror (22) to the device to be tested, or reflected back to the laser vibrometer (3); The reflective objective lens (23) is used to focus the mid-infrared laser and the detection laser on the micro-nano coating on the surface of the device to be tested.

4. The micro-nano coating nondestructive testing device according to claim 3, characterized in that: It also includes a focusing lens (61) and a photosensitive coupling component (6) which are arranged corresponding to the first dichroic mirror (21); The sample to be tested is capable of partially reflecting the mid-infrared laser back to the first dichroic mirror (21) along the first optical path, and the first dichroic mirror (21) is capable of reflecting the reflected mid-infrared laser back to the focusing lens (61); The focusing lens (61) is used to focus the infrared laser reflected by the first dichroic mirror (21) onto the photosensitive coupling component (6).

5. The micro-nano coating nondestructive testing device according to claim 2, characterized in that: The laser vibrometer (3) further comprises a helium-neon laser (31) and an acousto-optic modulator (35); The helium-neon laser (31) is used to emit laser light toward the beam splitter (32), and the laser light is split into the detection laser light and the reference laser light after passing through the beam splitter (32); The reference laser is irradiated onto the beam combiner (33) after passing through the acousto-optic modulator (35).

6. The micro-nano coating nondestructive testing device according to claim 2, characterized in that: The signal processing module (4) comprises a lock-in amplifier (41) and a processor (42); The phase-locked amplifier (41) is electrically connected to the photodetector (34) and is used to phase-lock the signal vibration measured by the photodetector (34); The processor (42) is electrically connected to the lock-in amplifier (41) and is capable of drawing a vibration intensity image based on the lock-in data of the lock-in amplifier (41).

7. The micro-nano coating nondestructive testing device according to claim 6, characterized in that: The processor (42) is also electrically connected to the mid-infrared laser (2), and is capable of regulating the mid-infrared laser (2) to output a plurality of mid-infrared lasers of equidistant wavelengths one by one.

8. The micro-nano coating nondestructive testing device according to claim 6, characterized in that: The processor (42) is also electrically connected to the displacement platform (1), and is capable of regulating the displacement platform (1) to perform scanning movement along a preset trajectory path and a preset speed.

9. A micro-nano coating non-destructive testing method, applicable to the micro-nano coating non-destructive testing device according to any one of claims 1 to 8, characterized in that: The following steps are involved: The first step is to place the device under test on a displacement stage (1) and adjust and move the displacement stage (1) so that the device under test is precisely located in a detection focus area; In the second step, the vibration information of the surface of the device to be tested is measured by a laser vibrometer (3), the signal processing module (4) converts the vibration information into a vibration electrical signal, and the displacement stage controller (5) applies a cycle of compensating vibration to the displacement stage (1) according to the vibration electrical signal to offset the initial vibration of the device to be tested; In a third step, the laser vibrometer (3) emits a detection laser to the device under test, and the signal processing module (4) selects the boundary of the region to be detected in the device under test based on the optical imaging image of the laser vibrometer (3), and generates a moving scanning filling path of the displacement stage (1); In the fourth step, a mid-infrared laser (2) is used to emit a mid-infrared laser with a repetitive frequency to the device to be tested, and multiple wavelengths with equal spacing are selected within the spectral range of the mid-infrared laser and output one by one. At each wavelength, the laser vibrometer (3) performs the detection task one by one, and the signal processing module (4) draws a vibration intensity distribution image according to the multiple wavelengths of the mid-infrared laser.

10. The nondestructive testing method for micro-nano coating according to claim 9, characterized in that: Also includes: The subsequent inspection step is to adjust the wavelength of the mid-infrared laser emitted by the mid-infrared laser (2) according to the peak in the vibration intensity distribution image, and to perform random area inspection or full-surface inspection on other positions of the device to be tested.

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