Transfer device and transfer method

Abstract

Provided are a transfer device and a transfer method capable of preventing a transfer time difference of a sheet-like body from occurring at a transfer destination of the sheet-like body. The transfer device (EA) extracts the sheet-shaped bodies (CP) from the plurality of sheet-shaped bodies (CP) constituting the first aggregate shape (AF1), and transfers the sheet-shaped bodies (CP) to the support body (BP) so that the plurality of the extracted sheet-shaped bodies (CP) constitute the second aggregate shape (AF2). A transfer device (EA) is provided with: an extraction means (10) for extracting sheet-shaped bodies (CP) from a plurality of sheet-shaped bodies (CP) constituting a first assembly shape (AF1); and a collective support unit (20) that collectively supports the plurality of sheet-shaped bodies (CP) so as to constitute the second aggregate shape (AM2) before the sheet-shaped bodies (CP) taken out by the take-out unit (10) are transferred to the support body (BP), and that collectively transfers the plurality of sheet-shaped bodies (CP) that are supported together to the support body (BP).

Description

Technical Field

[0001] The invention relates to a transfer device and a transfer method. Background Art

[0002] There is known a transfer device that transfers a plurality of sheet-like objects (for example, refer to Patent Document 1).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2021-48201 Summary of the invention

[0006] 1. Technical issues to be resolved

[0007] Regarding the chip mounter (transfer device) described in Patent Document 1, when the sheet is taken out from a plurality of chips (sheet bodies) constituting a wafer shape (first collective shape) and the sheet is mounted (transferred) on a substrate (support body) in a manner such that the plurality of taken-out sheet bodies constitute a substrate mounting position shape (second collective shape), the sheet bodies are transferred one by one, and thus a transfer time difference of the sheet bodies is generated at the transfer destination. When a transfer time difference of the sheet bodies is generated at the transfer destination in this way, for example, when the chip bonding film is a heat-sensitive adhesive and the support body is heated as a whole, the chip bonding film of the sheet bodies transferred in the early stage is excessively heated, while on the other hand, the chip bonding film of the sheet bodies transferred in the later stage is only slightly heated, and thus a disadvantageous situation occurs in which the adhesive force of the sheet bodies is different depending on the position of the support body. In addition, such a disadvantageous situation may also occur in a case where cooling is required for the transfer of the sheet bodies to the support body, for example.

[0008] An object of the present invention is to provide a transfer device and a transfer method capable of preventing a transfer time difference of a sheet body from occurring at a transfer destination of the sheet body.

[0009] (II) Technical solution

[0010] The present invention adopts the structures described in the claims.

[0011] (III) Beneficial effects

[0012] According to the present invention, before the sheet bodies are transferred to the support body, the plurality of sheet bodies are collectively supported to form the second collective shape and collectively transferred to the support body, thereby preventing the transfer time difference of the sheet bodies from occurring at the transfer destination of the sheet bodies. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 (A) to (N) are explanatory diagrams of a transfer device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0014] Hereinafter, one embodiment of the present invention will be described based on the drawings.

[0015] In addition, the X-axis, Y-axis, and Z-axis of this embodiment are orthogonal to each other, the X-axis and the Y-axis are set as axes within a predetermined plane, and the Z-axis is set as an axis orthogonal to the predetermined plane. Figure 1 In (A), the reference is when viewed from the front direction. When the direction of the figure is not specified, "up" is the arrow direction of the Z axis and "down" is the opposite direction, "left" is the arrow direction of the X axis and "right" is the opposite direction, and "front" is the arrow direction of the Y axis and "rear" is the opposite direction. In addition, Figure 1 The (E) to (N) are from Figure 1 Since the figure is viewed in the same direction as (A), the markings of the X-axis, Y-axis, and Z-axis are omitted.

[0016] Regarding the transfer device EA for implementing the transfer method of the present invention, the transfer device EA starts from the first aggregate shape AF1 (refer to Figure 1 The plurality of sheet bodies CP of (B)) are taken out, and the plurality of taken out sheet bodies CP form a second aggregate shape AF2 (refer to Figure 1 The sheet body CP is transferred to the substrate BP as a support body in a manner as marked BB in (A) of FIG. 1 , and the transfer device EA includes: a take-out unit 10, which implements a take-out process, that is, takes out the sheet body CP from the plurality of sheet bodies CP constituting the first collective shape AF1; and a collective support unit 20, which implements a collective support process, that is, before the sheet body CP taken out by the take-out unit 10 is transferred to the substrate BP, the plurality of sheet bodies CP are collectively supported in a manner constituting the second collective shape AF2 (refer to Figure 1 (D)), and transfers the multiple sheet bodies CP supported together to the substrate BP; and an inspection unit 30, which implements an inspection process for inspecting the sheet bodies CP. The take-out unit 10, the supporting unit 20 and the inspection unit 30 are arranged near the supply unit 40 and the support body conveying unit 50. The supply unit 40 implements a supply process, that is, supplies multiple sheet bodies CP that become a first collective shape AF1, and the support body conveying unit 50 implements a support body conveying process for conveying the substrate BP.

[0017] In addition, if Figure 1As shown in (B), the plurality of sheet bodies CP of the present embodiment are formed by a circular base material BM attached to one surface of an adhesive sheet AS as a sheet body holding member. Such sheet bodies CP are formed into a square shape by cutting the base material BM at equal intervals along two orthogonal axial directions, forming a first collective shape AF1 (circular) on the adhesive sheet AS, and forming an integral body UP with the adhesive sheet AS.

[0018] The taking-out unit 10 includes: a so-called multi-joint robot 11 as a driving device, and a holding member 12, wherein the multi-joint robot 11 is composed of a plurality of arms and can displace an object supported by a working part, i.e., a front end arm 11A, to any position and at any angle within its working range, and the holding member 12 is supported by the front end arm 11A and can be held by adsorption by a decompression unit (holding unit) not shown, which is a decompression pump, a vacuum exhauster, etc. In addition, the taking-out unit 10 of the present embodiment takes out only the sheet body CP that has not been detected as abnormal by the inspection unit 30 from the plurality of sheet bodies CP constituting the first collective shape AF1.

[0019] The collective supporting unit 20 includes a first collective supporting unit 20A and a second collective supporting unit 20B, and can transfer a plurality of sheet bodies CP collectively supported by the first collective supporting unit 20A to the second collective supporting unit 20B.

[0020] The first collective supporting unit 20A comprises: a rotating motor 21 as a driving device, which supports a base part 21B with an output shaft 21A; a linear motor 22 as a driving device, which is supported by the base part 21B and serves as a separation unit to expand the interval between multiple sheet bodies CP supported collectively so that the multiple sheet bodies CP form a second collective shape AF2; a support plate 23A supported by the slider 22A of each linear motor 22; a rotating motor 23 as a driving device, which drives a chuck part 23B, and the chuck part 23B and the support plate 23A hold the separation adhesive sheet ASE as a separation part; and a detection device 24, which is a camera, optical sensor, etc. arranged above the base part 21B.

[0021] The second collective supporting unit 20B includes: a linear motor 25 as a driving device; a holding table 25D supported by an output shaft 25A of the linear motor 25 and configured to hold nine individual holding portions 25C of the sheet body CP one by one in a second collective shape AF2 (see FIG. 1 ). Figure 1 AA in (A); a liquid supply unit 26, which serves as a positioning unit, is connected to the holding surface 25B through a water supply path 25E (refer to Figure 1(G)), liquid LQ such as water or mixed liquid is supplied to each holding surface 25B (refer to Figure 1 (H)), positioning each sheet body CP supported by these holding surfaces 25B individually; a decompression unit (holding unit) 27 such as a decompression pump and a vacuum exhauster, which recovers the liquid LQ from each holding surface 25B via a water supply path 25E and adsorbs and holds the sheet body CP via the water supply path 25E; a cooling unit 28 such as a Peltier element and a cooling side of a heat pipe, which is built into the base member 21B and solidifies the liquid LQ supplied to each holding surface 25B; and a heating unit 29 such as a coil heater and a heating side of a heat pipe (refer to Figure 1 (G)), which is built into the holding table 25D, melts the solidified liquid LQ. In addition, the direct-acting motor 25, the holding table 25D, the liquid supply unit 26, and the decompression unit 27 are arranged at a position that does not interfere with the base member 21B and the parts rotating therewith when the base member 21B rotates.

[0022] The inspection unit 30 includes an inspection device 31 such as a camera and an optical sensor. The inspection device 31 inspects the sheet CP supplied from the supply unit 40 and can detect an abnormality in the outer shape of the sheet CP, a predetermined defective mark recorded on the sheet CP, and the like.

[0023] The supply unit 40 includes a supply stage 41 having a holding surface 41A. The holding surface 41A can be held by suction using a decompression unit (holding unit) such as a decompression pump or a vacuum exhauster (not shown).

[0024] The support body conveying unit 50 includes: a direct-acting motor 51 as a driving device, and a substrate holding arm 52, wherein the substrate holding arm 52 is supported on an output shaft 51A of the direct-acting motor 51, and has an adsorption pad 52A that can be adsorbed and held by a decompression unit (holding unit) not shown in the figure, such as a decompression pump or a vacuum exhauster.

[0025] As in Figure 1 As shown in the figure marked BB in (A), the substrate BP is configured in the following manner: 9 individual transfer parts BP2 each transferring one sheet CP to the transfer surface BP1 having the same shape as the outer shape of the sheet CP form a second collective shape AF2. In addition, a heat-sensitive adhesive (not shown) is laminated on the transfer surface BP1. In addition, the support body conveying unit 50 is set at a position that does not interfere with the base member 21B and the parts rotating therewith when the base member 21B rotates.

[0026] The above operation of the transfer device EA will be described.

[0027] First, regarding Figure 1The transfer device EA is configured with each component at the initial position indicated by the solid line in (A), and the user (hereinafter referred to as "the user") inputs a signal to start automatic operation to the transfer device EA via an operation unit (not shown) such as an operation panel or a personal computer. Figure 1 As shown in (A), the user or a transport unit (not shown) such as a multi-jointed robot or a conveyor belt places the separation adhesive sheet ASE on the support plate 23A so that the adhesive surface of the separation adhesive sheet ASE faces upward. In this way, the support unit 20 drives the rotary motor 23, and as shown by the double-dashed line in the figure, the outer edge of the separation adhesive sheet ASE is gripped by the support plate 23A and the chuck member 23B. Then, as shown in FIG. Figure 1 As shown in (A), when the user or the conveying unit (not shown) supplies the integrated object UP to the supply table 41 in such a manner that the sheet body CP is on the upper side, the supply unit 40 drives the decompression unit (not shown) to start the suction holding on the holding surface 41A. Figure 1 As shown in (A), when the user or the transport unit (not shown) brings the substrate BP into contact with the suction pad 52A with the transfer surface BP1 facing downward, the support transport unit 50 drives the decompression unit (not shown) to start suction holding on the suction pad 52A.

[0028] Next, the inspection unit 30 drives the inspection device 31, and the removal unit 10 drives the multi-joint robot 11 and the decompression unit (not shown), so that the holding member 12 sucks and holds the sheet-shaped bodies CP one by one, as shown in FIG. Figure 1 As shown by the double-dashed line in (A), the sheet body CP held by adsorption is bonded to the bonding surface of the separation adhesive sheet ASE. Figure 1 As shown in (C), the take-out unit 10 adheres the sheet body CP to the adhesive surface of the separation adhesive sheet ASE in the same arrangement as the individual holding portion 25C, so as to form an intermediate collective shape AFM which is a reduced shape of the second collective shape AF2, and performs the handover. In addition, based on the inspection result of the inspection unit 30, the take-out unit 10 selects only the sheet body CP with no abnormality in the outer shape and the single sheet body CP without the specified defective product mark, and takes out the sheet body CP from the plurality of sheet bodies CP constituting the first collective shape AF1.

[0029] When a predetermined number (9 in this embodiment) of sheet bodies CP are delivered to the collective support unit 20, the collective support unit 20 drives the linear motor 22 and the detection device 24. Based on the detection result of the detection device 24, as shown in FIG. Figure 1As shown in (D), the separating adhesive sheet ASE is stretched so that the collective shape of the sheet-like bodies CP on the separating adhesive sheet ASE becomes the second collective shape AF2. Next, when the collective shape of the sheet-like bodies CP on the separating adhesive sheet ASE becomes the second collective shape AF2, the supporting unit 20 stops driving the linear motor 22 and then drives the rotary motor 21, as shown in FIG. Figure 1 As shown in (E), the base member 21B is turned upside down and the liquid supply unit 26 is driven. Figure 1 As shown in (H), the liquid LQ is supplied to each holding surface 25B. Then, the support unit 20 drives the direct-acting motor 25, as shown in FIG. Figure 1 As shown by the double-dashed line in (E), the holding table 25D is raised so that each holding surface 25B supplied with the liquid LQ abuts against the lower surface of the sheet CP, and then the cooling unit 28 is driven to solidify the liquid LQ, and the sheet CP is held by each holding surface 25B. Next, the supporting unit 20 drives the direct-acting motor 25, as shown in FIG. Figure 1 As shown in (F), when the holding table 25D is restored to the initial position, the sheet body CP on the separation adhesive sheet ASE is delivered to the holding table 25D. When the sheet body CP is delivered to the holding table 25D, the supporting unit 20 drives the rotary motor 21 to restore the base component 21B to the initial position, and then drives the rotary motor 23 to restore the chuck component 23B to the initial position.

[0030] When the user or the conveying unit (not shown) holds the separation adhesive sheet AS on the support plate 23A and conveys the separation adhesive sheet AS to the disposal position, the supporting unit 20 drives the linear motor 22 to return the slider 22A to the initial position, and then drives the heating unit 29 to melt the liquid LQ. Figure 1 As shown in (I) and (J) of FIG. 1 , even if the sheet body CP supported by the liquid LQ before melting is displaced relative to the holding surface 25B, each sheet body CP is supported on the holding surface 25B via the liquid LQ in the molten state, so that Figure 1 As shown in (K), the support unit 20 is positioned in the same position and in the same direction as the holding surface 25B. Figure 1 As shown in (L) of FIG. 8 , the liquid LQ is recovered from each holding surface 25B via the water supply path 25E, and the sheet-shaped body CP is suction-held by each holding surface 25B.

[0031] Then, the support conveying unit 50 drives the direct-acting motor 51, such as Figure 1As shown in (M), the substrate BP is moved to the top of the holding table 25D, and then the supporting unit 20 drives the direct motor 25 to raise the holding table 25D as shown by the double-dashed line in the figure, so that the sheet body CP abuts against the transfer surface BP1. Next, the supporting unit 20 drives the heating unit 29 to heat the adhesive (not shown) stacked on the transfer surface BP1, and sticks the sheet body CP on the transfer surface BP1. Then, the driving of the decompression unit 27 is stopped to release the adsorption hold on each holding surface 25B. In addition, when the supporting unit 20 drives the direct motor 25 to restore the holding table 25D to its initial position, as shown in FIG. Figure 1 As shown in (N), the sheet CP is transferred to the substrate BP. Next, when the support body conveying unit 50 drives the direct-acting motor 51 to restore the substrate BP to the initial position, the user or the conveying unit not shown holds the substrate BP. Then, when the support body conveying unit 50 stops driving the decompression unit not shown to release the adsorption on the adsorption pad 52A, the user or the conveying unit not shown conveys the substrate BP to the subsequent process, and then repeats the same actions as above.

[0032] According to the above embodiment, before the sheet body CP is transferred to the substrate BP, a plurality of sheet bodies CP are supported together in a manner forming a second collective shape AF2, and the plurality of sheet bodies CP supported together are transferred together to the substrate BP, thereby preventing a time difference in the transfer of the sheet body CP at the transfer destination of the sheet body CP.

[0033] The units and processes in the present invention are not particularly limited as long as they can achieve the actions, functions or processes described for these units and processes, and are not limited to the components and processes of the single embodiment shown in the above embodiment. For example, the taking-out unit can take out the sheet-like body from the plurality of sheet-like bodies constituting the first set shape, and is not limited as long as it is within the technical scope compared with the technical common sense at the time of the application (the same applies to other units and processes).

[0034] Regarding the taking-out unit 10, it may be possible to take out the sheet body CP one by one or multiple times at a time from the multiple sheet bodies CP constituting the first collective shape AF1, it may be possible to hold or adhere the sheet body CP and take it out from the multiple sheet bodies CP constituting the first collective shape AF1, it may be possible to turn the sheet body CP taken out from the multiple sheet bodies CP constituting the first collective shape AF1 upside down or stand it up sideways and support it on the supporting unit 20, it may be possible to take out the sheet body CP detected as abnormal by the inspection unit 30 from the multiple sheet bodies CP constituting the first collective shape AF1 and hand it over to the supporting unit 20, or to hand it over to other objects other than the supporting unit 20.

[0035] The number of the taking-out unit 10 taking out the sheet bodies CP from the multiple sheet bodies CP constituting the first collective shape AF1 and handing the sheet bodies CP over to the supporting unit 20 is not limited as long as it is 2 or more. For example, it can be more than the number of sheet bodies CP possessed by one integral object UP, and can be any number as long as it is the number required to constitute the second collective shape AF2.

[0036] The collective supporting unit 20 may be composed of only the first collective supporting unit 20A or only the second collective supporting unit 20B. When the collective supporting unit 20 is composed of only the first collective supporting unit 20A, the first collective supporting unit 20A collectively supports the plurality of sheets CP taken out by the taking-out unit 10 in such a manner that the plurality of sheets CP form the second collective shape AF2, and then the plurality of sheets CP can be collectively transferred to the substrate BP without passing through the second collective supporting unit 20B. In addition, when the collective supporting unit 20 is composed of only the second collective supporting unit 20B, the second collective supporting unit 20B collectively supports the plurality of sheets CP taken out by the taking-out unit 10 in such a manner that the plurality of sheets CP form the second collective shape AF2, and then the plurality of sheets CP can be collectively transferred to the substrate BP without passing through the first collective supporting unit 20A.

[0037] Regarding the first collective supporting unit 20A, a separation unit may not be used. For example, a driving device such as a chuck cylinder, an adsorption holding mechanism, etc. may be set on the base part 21B to support multiple sheet bodies CP at a time. When the sheet body CP is handed over to the second collective supporting unit 20B or transferred to the support body, a pressing unit such as a roller or a gas blowing may be used to press the sheet body CP toward the second collective supporting unit 20B and the support body. The base part 21B does not need to be turned upside down. Instead, a second collective supporting unit 20B and a support body may be arranged above the supported sheet body CP to hand over and transfer the sheet body CP. The detection device 24 may also be omitted.

[0038] Regarding the second collective supporting unit 20B, there may be no positioning unit, the holding surface 25B may be of a shape different from the outer shape of the sheet body CP, and there may be no separate holding portion 25C. For example, a driving device such as a chuck cylinder, an adsorption holding mechanism, etc. may be provided on the holding table 25D to support multiple sheets CP collectively. Multiple sheets CP may be supported collectively via adhesive sheets, adhesives, etc. When the sheet body CP is transferred to the support body, the sheet body CP may be pressed toward the support body by a pressing component. The liquid supply unit 26 and the cooling unit 28 may not be used, and the sheet body CP may be held on the holding surface 25B by a driving device such as a chuck cylinder and a decompression unit 27. There may be no cooling unit 28 and heating unit 29. The holding table 25D may be turned upside down to transfer multiple sheets CP from above the substrate BP to the transfer surface BP1.

[0039] The number of the individual holding portions 25C is not limited as long as there are two or more, and any number may be used as long as it is the number required to configure the second aggregate shape AF2.

[0040] The inspection unit 30 receives abnormality information of the sheet body CP from other devices in the form of data. Based on the data, the removal unit 10 can remove only the sheet body CP in which no abnormality is detected from the multiple sheet bodies CP constituting the first collective shape AF1. The transfer device EA of the present invention may or may not be provided with the inspection unit 30.

[0041] The supply unit 40 can hold multiple sheet bodies CP constituting the first collective shape AF1 that are not adhered to the adhesive sheet AS on the holding surface 41A, or a supply table 41 that cannot be adsorbed and held on the holding surface 41A can be used. In the transfer device EA of the present invention, the supply unit 40 may be provided or not.

[0042] The support body conveying unit 50 can use an adsorption table as a support body, and transfer multiple sheet bodies CP supported by a supporting unit 20 in a manner of forming a second collective shape AF2, and can turn the transferred multiple sheet bodies CP upside down. In the transfer device EA of the present invention, the support body conveying unit 50 may be provided or not.

[0043] When at least one of the adhesive sheet AS and the separating adhesive sheet ASE adopts a method in which the adhesive force is reduced by applying a prescribed energy, the transfer device EA may include an energy applying unit that applies the prescribed energy to at least one of them. Such prescribed energy may be any energy form such as a method of applying electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, a method of applying a heating medium such as hot water or hot air, or a method of applying a cooling medium such as cold water or cold air, and the energy applying unit may apply the prescribed energy to the adhesive sheet AS in consideration of the characteristics, properties, properties, materials, composition, and structure of the adhesive sheet AS.

[0044] The sheet body CP may not be adhered to the sheet body holding component, but may form the first collective shape AF1 on the holding surface 41A. It may not be formed by cutting the base material BM. For example, a plurality of sheet bodies CP pre-formed into a specified shape may be gathered to form the first collective shape AF1.

[0045] The sheet-shaped body holding member may be an iron plate, a resin plate, paper, an adhesive tape, wood, ceramics, or the like, as long as it can support the plurality of sheet-shaped bodies CP constituting the first collective shape AF1.

[0046] The separation member may be rubber, cloth, a net, a spring, or the like, as long as it can increase the interval between the plurality of sheet bodies CP supported together.

[0047] The first collective shape AF1 and the second collective shape AF2 can be polygons such as circles, ellipses, triangles, quadrilaterals, or any other shapes, and there is no limitation as long as the first collective shape AF1 is different from the second collective shape AF2.

[0048] The intermediate aggregate shape AFM can be a polygon such as a circle, an ellipse, a triangle, a quadrilateral, or any other shape.

[0049] The number of sheet bodies CP forming the first collective shape AF1, the second collective shape AF2 and the intermediate collective shape AFM is not limited as long as it is 2 or more. For example, it can be more than the number of sheet bodies CP possessed by one integral object UP, and can be any number as long as it is the number required to form the second collective shape AF2.

[0050] Regarding the substrate BP, as long as there are two or more independent transfer parts BP2, the number is not limited, there may be no independent transfer part BP2, and a pressure-sensitive adhesive may be laminated or no adhesive may be laminated.

[0051] The support may be in any form such as an adhesive sheet or an adsorption table.

[0052] Regarding the holding surface 41A, the sheet holding component, the separation component and the support body, they may have the function of holding the sheet CP, such as the adhesiveness of bonding the sheet CP, the magnetic adsorption property of magnetically adsorbing the sheet CP, the adsorption property of adsorbing the sheet CP, or they may not have the function of holding the sheet CP.

[0053] The subsequent process can be any process such as plating process, cleaning process, etching process, immersion process, cutting process, oxide film formation process, nitriding process, grinding process, sandblasting process, polishing process, coating process, laminating process, sheet bonding process, surface treatment process, hole opening process, bending process, inspection process, verification process, irradiation process, etc.

[0054] There are no particular limitations on the material, type, shape, etc. of the sheet body CP, the base material BM, the sheet body holding part, the separation part, and the support body in the present invention. For example, the sheet body CP, the base material BM, the sheet body holding part, the separation part, and the support body may be polygonal such as a circle, an ellipse, a triangle, a quadrilateral, or other shapes, and the adhesion of the sheet body holding part and the separation part may be pressure-sensitive adhesion, heat-sensitive adhesion, etc. When the heat-sensitive adhesion method is adopted, it is sufficient to bond by setting a heating unit such as an appropriate coil heater for heating the sheet body holding part and the separation part, the heating side of a heat pipe, etc. In addition, when an adhesive sheet is used as a sheet-shaped body holding component or a separating component, the adhesive sheet may be, for example, any of the following forms, namely: a single layer with only an adhesive layer, two layers with a substrate and an adhesive layer stacked, three layers or more with one or more intermediate layers stacked between the substrate and the adhesive layer, three layers or more with one or more cover layers stacked on the upper surface of the substrate, a substrate, an intermediate layer or a cover layer arranged in a peelable manner, a double-sided adhesive sheet consisting of only a single layer of an adhesive layer, a double-sided adhesive sheet with an adhesive layer stacked on the two outermost surfaces of one or more intermediate layers, etc. In addition, as the base material BM and the sheet-shaped body CP, for example, it may be a monomer of food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit substrate, an information recording substrate such as an optical disc, a glass plate, a steel plate, a ceramic, a wood board or a resin, etc., or a composite formed by two or more of these, and any form of components, articles, etc. may be the object. The adhesive sheet AS and the separating adhesive sheet ASE may be any sheet, film, tape, or the like, such as an information recording label, a decorative label, a protective sheet, a dicing tape, a die bonding film, a die-bonding tape, or a recording layer forming resin sheet.

[0055] Regarding the driving device in the above-mentioned embodiment, it can be a single body using electric devices such as rotary motors, direct-acting motors, linear motors, single-axis robots, so-called multi-joint robots with two-axis or three-axis joints or more, cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders. A direct or indirect combination of these electric devices, actuators, etc. can be adopted, and a method that can or cannot control the torque, speed, etc. of the output parts of these electric devices, actuators, etc. can be adopted.

[0056] In the above-mentioned embodiment, with respect to an arbitrary object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, objects A and B that move relatively, object B may move relative to the immovable object A, object A may move relative to the immovable object B, or both object A and object B may move. As long as the result achieved by the movement is the same, either object A or object B may move. In the case of using a rotating member such as a roller, a driving device that drives the rotating member to rotate may be provided, and the rotating member may be made of rubber, The surface of the rotating component and the rotating component itself may be composed of deformable components such as resin. The surface of the rotating component and the rotating component itself may be composed of non-deformable components. Instead of the roller, other components such as a shaft that rotates or does not rotate and blades may be used. When a pressing unit such as a pressing roller or a pressing head is used to press the object to be pressed, the following methods may be used in place of or in combination with the above-mentioned methods: a roller, a round rod, a blade member, a brush-like member. In addition, the following method may be used: a method of blowing gas such as the atmosphere or other gases. The component for pressing may be composed of deformable components such as rubber, resin, sponge, etc. When the peeling plate, peeling roller and other peeling units, peeling components and the like are used to peel the peeled object, the above-mentioned exemplified methods may be replaced or used in combination with the following: plate-shaped components, round rods, rollers and the like; the peeling components may be made of deformable components such as rubber and resin, or may be made of non-deformable components; when the supporting (holding) unit, supporting (holding) component and the like are used to support (hold) the supported component (held component), the holding units such as chuck motors and chuck cylinders, Coulomb force, adhesives (adhesives) and the like may be used; When a cutting unit, a cutting component, etc. are used to cut the cut component or to form a cutting depth or a cutting line on the cut component, the cutting method described above can be replaced by or used in combination with: a cutter, a laser cutter, an ion beam, fire, heat, water pressure, a heating wire, a jet of gas or liquid, etc. for cutting, or cutting can be performed by moving the object to be cut by a driving unit composed of appropriate driving devices.

[0057] Description of Reference Numerals

[0058] EA-transfer device; 10-removal unit; 20-support unit; 22-linear motor (separation unit); 26-liquid supply unit (positioning unit); 30-inspection unit; AF1-first aggregate shape; AF2-second aggregate shape; BP-substrate (support body); CP-sheet body.

Claims

1. A transfer device, characterized in that: The invention relates to a method for removing a sheet-like body from a plurality of sheet-like bodies constituting a first collective shape, and transferring the sheet-like body to a support body in such a manner that the plurality of sheet-like bodies removed form a second collective shape, and comprising: a taking-out unit that takes out the sheet-like body from the plurality of sheet-like bodies forming the first collective shape; and A collective supporting unit collectively supports a plurality of the sheet-like bodies so as to form the second aggregate shape before the sheet-like bodies taken out by the taking-out unit are transferred to the supporting body, and collectively transfers the plurality of the sheet-like bodies collectively supported to the supporting body.

2. The transfer device according to claim 1, characterized in that: The taking-out unit takes out only the sheet-like objects for which no abnormality is detected by the inspection unit that inspects the sheet-like objects from the plurality of sheet-like objects constituting the first aggregate shape.

3. The transfer device according to claim 1 or 2, characterized in that: The collective supporting unit includes a separating unit that expands the intervals between the plurality of sheet-like bodies supported collectively so that the plurality of sheet-like bodies form the second collective shape.

4. The transfer device according to claim 1 or 2, characterized in that: The collective supporting unit includes a positioning unit that individually positions each of the sheet-like bodies collectively supported.

5. A transfer method, characterized in that: The sheet-like body is taken out from the plurality of sheet-like bodies constituting the first collective shape, and the sheet-like body is transferred to the support body in a manner that the plurality of the taken-out sheet-like bodies constitute the second collective shape, and the following steps are performed: a taking-out step of taking out the sheet-like body from the plurality of sheet-like bodies constituting the first aggregate shape; and The collective supporting step collectively supports the plurality of sheet-like bodies so as to form the second aggregate shape before the sheet-like bodies taken out in the taking out step are transferred to the support body, and collectively transfers the plurality of sheet-like bodies supported collectively to the support body.

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