Liquid film generating device and application

Abstract

The invention relates to the technical field of microfluidics, in particular to a liquid film generating device and application, at least one second flow channel is arranged on the binding face of a first clamping block or a second clamping block of the liquid film generating device, one end of the second flow channel is located at an outlet of the first flow channel, and the other end of the second flow channel is located at the edge of the binding face of the first clamping block and the second clamping block. Or a thin film is arranged between the first clamping block and the second clamping block; the film is provided with at least one second runner, one end of the second runner is located at an outlet of the first runner, and the other end of the second runner is located on the edge of the attaching face of the first clamping block and the second clamping block. According to the liquid film generation device, a liquid film is formed at the edge of the attaching face of the first clamping block and the second clamping block through the second flow channel, the liquid film with the controllable size and thickness can be generated, the liquid film generation device can be suitable for various kinds of liquid including liquid metal, and meanwhile the thickness of the generated liquid film can reach the submicron level; the liquid film generating device can increase the area of the liquid film, realize accurate control of the thickness of the liquid film and improve the stability of the liquid film.

Description

Technical Field

[0001] The present invention relates to the field of microfluidic technology, and in particular to a liquid film generating device and application thereof. Background Art

[0002] In the fields of biology, chemistry and physics, the study of liquid samples is of great significance. However, due to the strong absorption of light by liquids, especially in the infrared and soft X-ray regions, the application of traditional spectroscopy technology in liquid samples is greatly limited, and it is difficult to analyze liquid samples efficiently and accurately. For example, in soft X-ray electron beam detection, the sample thickness is required to be in the range of 0.1μm to 1μm; in the field of biological detection, if the thickness of the fluid sample is at the submicron level, it is easy to obtain a clearer detection image by using X-ray rapid scanning or electron beam detection. In the semiconductor field, the most advanced lithography machine is the EUV lithography machine, the core principle of which is that the laser bombards the tin target to generate plasma, thereby radiating EUV light with a wavelength of 13.5nm. Among them, the liquid film target, as one of the target forms, has been proven to be able to be used for the generation of EUV light. However, since a large amount of debris is generated during the laser target shooting process, it will contaminate the reflector, resulting in a decrease in reflectivity and affecting the life of the light source, so it is necessary to accurately control the size and thickness of the liquid film target. In summary, the production of stable and controllable submicron thickness liquid films is of great significance in the fields of spectroscopy technology, biological detection and EUV light source.

[0003] At present, the main methods of producing liquid film are double jet impact and the use of a convergent nozzle device; the former requires high alignment accuracy and high requirements for the stability and cleanliness of the working environment; the latter is usually made of glass materials bonded together, with poor compressive strength. Since the liquid impact efficiency at the outlet is not high, the liquid film produced is narrow and long, and it is difficult to increase the width. In the field of detection, in order to improve the detection efficiency, it is necessary to increase the area of ​​the effective detection area; in the EUV light source, the liquid film target also needs a large area to reduce the generation of edge debris.

[0004] Therefore, the prior art still needs to be improved and developed. Summary of the invention

[0005] In view of the above-mentioned deficiencies of the prior art, an object of the present invention is to provide a liquid film generating device and application, aiming to solve the problems that the existing liquid film generating device requires higher alignment accuracy, has poor pressure resistance, and has a smaller effective area.

[0006] The technical solution of the present invention is as follows:

[0007] A liquid film generating device, comprising a first clamping block and a second clamping block which are arranged in contact with each other, and a film arranged between the first clamping block and the second clamping block;

[0008] A first flow channel is provided inside the first clamping block, an inlet of the first flow channel is provided on a side wall of the first clamping block, and an outlet of the first flow channel is provided on a fitting surface between the first clamping block and the second clamping block;

[0009] The film is provided with at least one second flow channel, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the bonding surface of the first clamping block and the second clamping block.

[0010] A liquid film generating device comprises a first clamping block and a second clamping block which are arranged in contact with each other;

[0011] A first flow channel is provided inside the first clamping block, an inlet of the first flow channel is provided on a side wall of the first clamping block, and an outlet of the first flow channel is provided on a fitting surface between the first clamping block and the second clamping block;

[0012] At least one second flow channel is provided on the fitting surface of the first clamping block or the second clamping block, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the fitting surface of the first clamping block and the second clamping block.

[0013] The liquid film generating device is characterized in that a groove is provided at the outlet of the first flow channel, and a filter is provided in the groove.

[0014] The liquid film generating device, wherein the first clamping block is provided with a plurality of internal threaded holes, and the second clamping block is provided with through holes corresponding to the internal threaded holes; the first clamping block and the second clamping block are fixed by screws.

[0015] The liquid film generating device, wherein the liquid film generating device also includes a hollow liquid supply pipeline connected to the inlet of the first flow channel, a conversion interface connected to the hollow liquid supply pipeline, and a fixing member sleeved on the hollow liquid supply pipeline and connected to the conversion interface; a first sealing gasket is provided between the fixing member and the first clamping block, and a second sealing gasket is provided between the conversion interface and the fixing member.

[0016] In the liquid film generating device, at least one of the second flow channels forms a convergence opening at the edge of the bonding surface of the first clamping block and the second clamping block.

[0017] The liquid film generating device, wherein the span of the convergence port is between 60° and 150°.

[0018] The liquid film generating device, wherein the ends of the first clamping block and the second clamping block close to the convergence port are planar nozzle structures or convergence type nozzle structures.

[0019] The invention discloses an application of a liquid film generating device in a soft X-ray electron beam detection system.

[0020] A liquid film generating device is used in an EUV lithography machine.

[0021] Beneficial effects: The present invention provides a liquid film generating device and application, the liquid film generating device comprises a first clamp and a second clamp which are arranged to be bonded to each other; a first flow channel is arranged inside the first clamp, the inlet of the first flow channel is arranged on the side wall of the first clamp, and the outlet of the first flow channel is arranged on the bonding surface of the first clamp and the second clamp; at least one second flow channel is arranged on the bonding surface of the first clamp or the second clamp, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the bonding surface of the first clamp and the second clamp. Alternatively, a film is arranged between the first clamp and the second clamp; the film is provided with at least one second flow channel, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the bonding surface of the first clamp and the second clamp. The liquid film generating device provided by the present invention forms a liquid film at the edge of the bonding surface of the first clamp and the second clamp through the second flow channel. It can generate a liquid film with controllable size and thickness, and can be applied to various liquids including liquid metals. At the same time, the thickness of the generated liquid film can reach the sub-micron level; and the pressure resistance of the device exceeds 10 atmospheres, which is more than 10 times higher than the pressure resistance of the traditional microfluidic chip formed by glass bonding, and can provide a reliable target material generation method for the research and development of EUV light sources. In addition, the liquid film generating device has significant advantages in increasing the area of ​​the liquid film, achieving precise control of the thickness of the liquid film, and improving the stability of the liquid film. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the explosion structure of a liquid film generating device of the present invention;

[0023] Figure 2 is a schematic diagram of a film structure with a hollow pattern;

[0024] Figure 3 Schematic diagram of the convergence port of the second flow channel;

[0025] Explanation of the reference numerals: first clamp block 10 , inlet 11 , outlet 12 , internal threaded hole 13 , second clamp block 20 , through hole 21 , film 30 , second flow channel 31 , filter screen 40 , bolt 50 , hollow liquid supply pipeline 60 , adapter 70 , second sealing gasket 71 , fixing part 80 , first sealing gasket 81 , and constriction port 90 . DETAILED DESCRIPTION

[0026] The present invention provides a liquid film generating device and application. To make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail below. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0027] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as herein.

[0028] like Figure 1 As shown, the present invention provides a liquid film generating device, comprising a first clamping block 10 and a second clamping block 20 which are arranged in contact with each other, and a film 30 arranged between the first clamping block 10 and the second clamping block 20;

[0029] A first flow channel is provided inside the first clamping block 10, an inlet 11 of the first flow channel is provided on a side wall of the first clamping block 10, and an outlet 12 of the first flow channel is provided on a fitting surface between the first clamping block 10 and the second clamping block 20;

[0030] The film 30 is provided with at least one second flow channel 31 , one end of the second flow channel 31 is located at the outlet 12 of the first flow channel, and the other end is located at the edge of the bonding surface of the first clamping block 10 and the second clamping block 20 .

[0031] In addition, the present invention also provides another structure of a liquid film generating device, including a first clamping block 10 and a second clamping block 20 which are arranged in contact with each other;

[0032] A first flow channel is provided inside the first clamping block 10, an inlet 11 of the first flow channel is provided on a side wall of the first clamping block 10, and an outlet 12 of the first flow channel is provided on a fitting surface between the first clamping block 10 and the second clamping block 20;

[0033] At least one second flow channel 31 is provided on the fitting surface of the first clamping block 10 or the second clamping block 20 , one end of the second flow channel 31 is located at the outlet 12 of the first flow channel, and the other end is located at the edge of the fitting surface of the first clamping block 10 and the second clamping block 20 .

[0034] In this embodiment, the provided liquid film generating device forms a liquid film at the edge of the bonding surface of the first clamp and the second clamp through the second flow channel. It can generate a liquid film with controllable size and thickness, and can be applied to various liquids including liquid metals. At the same time, the thickness of the generated liquid film can reach the sub-micron level; and the pressure resistance of the device exceeds 10 atmospheres, which is more than 10 times higher than the pressure resistance of the traditional microfluidic chip formed by glass bonding, and can provide a reliable target material generation method for the research and development of EUV light sources. In addition, the liquid film generating device has significant advantages in increasing the area of ​​the liquid film, achieving precise control of the thickness of the liquid film, and improving the stability of the liquid film.

[0035] Specifically, the liquid film generating device provided by the present invention has a simple structure and low cost, and most of the structures are standard parts, or obtained by turning and milling, which is convenient for disassembly and assembly. In the process of liquid film generation, the liquid film generating device provided by the present invention can control the size of the liquid film by controlling the liquid supply pressure or flow rate, thereby effectively adjusting the thickness of the liquid film. In addition, each structure in the liquid film generating device has good replaceability. According to different needs, the film pattern can be changed to change the structure of the second flow channel, or the required pattern can be etched on the fitting surface of the first clamp or the second clamp to change the structure of the second flow channel to control the aspect ratio of the liquid film. In addition, the liquid film generating device has low requirements on the working environment and equipment, is easy to implement, and has a short device preparation cycle and low preparation difficulty.

[0036] In some embodiments, a groove is provided at the outlet 12 of the first flow channel, and a filter screen 40 is provided in the groove. The filter screen 40 is arranged at the outlet of the first flow channel to avoid contamination of the liquid by the external pipeline, greatly reducing the risk of blockage of the flow channel, and is suitable for application scenarios with high requirements for the purity of the used fluid.

[0037] In some embodiments, the first clamp block 10 is provided with a plurality of internal threaded holes 13, and the second clamp block 20 is provided with through holes 21 corresponding to the internal threaded holes 13; the first clamp block 10 and the second clamp block 20 are fixed by screws 50. The internal threaded holes 13 are distributed in a matrix on the first clamp block 10, and the second clamp block 20 is fixed to the first clamp block 10 by passing the screws 50 through the through holes 21, so that the first clamp block and the second clamp block are arranged to fit each other.

[0038] In a preferred embodiment, the first clamping block, the second clamping block and the film each have 2n threaded holes for screw fixing, where n is an integer greater than or equal to 1.

[0039] In some embodiments, the liquid film generating device further includes a hollow liquid supply pipeline 60 connected to the inlet 11 of the first flow channel, a transfer port 70 connected to the hollow liquid supply pipeline 60, and a fixing member 80 sleeved on the hollow liquid supply pipeline 60 and connected to the transfer port 70; a first sealing gasket 81 is provided between the fixing member 80 and the first clamping block 10, and a second sealing gasket 71 is provided between the transfer port 70 and the fixing member 80. Specifically, the first clamping block 10 is provided with a first flow channel inside, and can be transferred to the liquid supply pipe through a hollow pipeline with external threads. Compared with the atomic bonding method, the liquid film generating device of the present invention can withstand higher internal pressure, and the compressive strength is more than 10 times that of the microfluidic chip formed by traditional glass bonding.

[0040] In some embodiments, the material of the hollow liquid supply pipeline 60 may be, but is not limited to, various pressure-resistant materials such as stainless steel and PEEK.

[0041] In some embodiments, the connection between the hollow liquid supply pipeline 60 and the first clamping block 10 includes various forms including but not limited to threaded connection, welding, etc.

[0042] In some embodiments, at least one of the second flow channels 31 forms a convergence opening 90 at the edge of the fitting surface of the first clamping block 10 and the second clamping block 20 .

[0043] Specifically, Figure 2 The second flow channel shown can be a single flow channel or branched into multiple flow channels, but it converges at the edge of the fitting surface of the first clamping block 10 and the second clamping block 20, that is, it converges at the outlet of the second flow channel 31 to increase the horizontal velocity component of the liquid near the outlet, and the convergence angle can be adjusted to adjust the aspect ratio of the liquid film.

[0044] In some embodiments, the film has a hollow pattern, and the second flow channel is formed by the hollow pattern.

[0045] In some embodiments, the span of the constriction opening is between 60° and 150°.

[0046] Specifically, the span of the convergence port refers to the angle formed by the side wall of the second flow channel at the outlet; if the liquid film generating device is a single flow channel, the convergence port is the angle formed by the inner wall of the flow channel at the outlet; if the liquid film generating device is a multi-flow channel, the span of the convergence port is the angle formed by the two outermost inner walls of the two outermost flow channels at the outlet.

[0047] In some embodiments, when the second flow channels include at least two, the inner span of the convergence port is 80°-100°.

[0048] Specifically, the inner span of the convergence port refers to the angle formed by the two inner walls of the two outermost flow channels at the outlet. Figure 3 As shown, they all include two second flow channels, from left to right: the span of the second flow channel convergence port is 120 degrees, and the inner span is 80°; the span of the second flow channel convergence port is 120 degrees, and the inner span is 100°; the span of the second flow channel convergence port is 80 degrees, and the inner span is 90°.

[0049] In some embodiments, one end of the first clamping block 10 and the second clamping block 20 close to the convergence port is a planar nozzle structure or a convergence type nozzle structure.

[0050] In addition, the present invention also provides an application of a liquid film generating device in a soft X-ray electron beam detection system.

[0051] In this embodiment, the liquid film generating device can generate a larger liquid film area, and the liquid film thickness can reach submicron level. Therefore, applying the liquid film generating device to a soft X-ray electron beam detection system can increase the effective detection area and realize efficient and accurate analysis of liquid samples.

[0052] In addition, the present invention also provides an application of a liquid film generating device in an EUV lithography machine.

[0053] In this embodiment, the liquid film generating device can generate a larger liquid film area, and the liquid film thickness can reach submicron level. At the same time, the pressure resistance exceeds 10 atmospheres, which is more than 10 times higher than the pressure resistance of traditional microfluidic chips formed by glass bonding. It can provide a stable and reliable target material generation method for the research and development of EUV light sources.

[0054] In summary, the present invention provides a liquid film generating device and application, the liquid film generating device includes a first clamp and a second clamp that are arranged in contact with each other; a first flow channel is arranged inside the first clamp, the inlet of the first flow channel is arranged on the side wall of the first clamp, and the outlet of the first flow channel is arranged on the contact surface between the first clamp and the second clamp; at least one second flow channel is arranged on the contact surface of the first clamp or the second clamp, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the contact surface between the first clamp and the second clamp. Alternatively, a film is arranged between the first clamp and the second clamp; the film is provided with at least one second flow channel, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the contact surface between the first clamp and the second clamp. The liquid film generating device provided by the present invention forms a liquid film at the edge of the bonding surface of the first clamp and the second clamp through the second flow channel. It can generate a liquid film with controllable size and thickness, and can be applied to various liquids including liquid metals. At the same time, the thickness of the generated liquid film can reach the sub-micron level; and the pressure resistance of the device exceeds 10 atmospheres, which is more than 10 times higher than the pressure resistance of the traditional microfluidic chip formed by glass bonding, and can provide a reliable target material generation method for the research and development of EUV light sources. In addition, the liquid film generating device has significant advantages in increasing the area of ​​the liquid film, achieving precise control of the thickness of the liquid film, and improving the stability of the liquid film.

[0055] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A liquid film generating device, characterized in that: It includes a first clamping block and a second clamping block which are arranged in contact with each other, and a film arranged between the first clamping block and the second clamping block; A first flow channel is provided inside the first clamping block, an inlet of the first flow channel is provided on a side wall of the first clamping block, and an outlet of the first flow channel is provided on a fitting surface between the first clamping block and the second clamping block; The film is provided with at least one second flow channel, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the bonding surface of the first clamping block and the second clamping block.

2. A liquid film generating device, characterized in that: It includes a first clamping block and a second clamping block which are arranged in close contact with each other; A first flow channel is provided inside the first clamping block, an inlet of the first flow channel is provided on a side wall of the first clamping block, and an outlet of the first flow channel is provided on a fitting surface between the first clamping block and the second clamping block; At least one second flow channel is provided on the fitting surface of the first clamping block or the second clamping block, one end of the second flow channel is located at the outlet of the first flow channel, and the other end is located at the edge of the fitting surface of the first clamping block and the second clamping block.

3. The liquid film generating device according to claim 1 or 2, characterized in that: A groove is provided at the outlet of the first flow channel, and a filter screen is provided in the groove.

4. The liquid film generating device according to claim 1 or 2, characterized in that: The first clamping block is provided with a plurality of internal thread holes, and the second clamping block is provided with through holes corresponding to the internal thread holes; the first clamping block and the second clamping block are fixed by screws.

5. The liquid film generating device according to claim 1 or 2, characterized in that: The liquid film generating device also includes a hollow liquid supply pipeline connected to the inlet of the first flow channel, a transfer interface connected to the hollow liquid supply pipeline, and a fixing member sleeved on the hollow liquid supply pipeline and connected to the transfer interface; a first sealing gasket is provided between the fixing member and the first clamping block, and a second sealing gasket is provided between the transfer interface and the fixing member.

6. The liquid film generating device according to claim 1 or 2, characterized in that: At least one of the second flow channels forms a convergence opening at the edge of the fitting surface of the first clamping block and the second clamping block.

7. The liquid film generating device according to claim 6, characterized in that: The span of the convergence opening is between 60° and 150°.

8. The liquid film generating device according to claim 6, characterized in that: One end of the first clamping block and the second clamping block close to the convergence port is a planar nozzle structure or a convergence type nozzle structure.

9. Use of the liquid film generating device according to any one of claims 1 to 8 in a soft X-ray electron beam detection system.

10. Use of the liquid film generating device according to any one of claims 1 to 8 in an EUV lithography machine.

Images