Spraying device for metal target production and processing

Abstract

The invention belongs to the technical field of spraying equipment, and particularly relates to a spraying device for metal target production and processing, the spraying device comprises a box body, a liquid inlet and a control panel, a carrying mechanism is arranged in the box body, and a spraying assembly matched with the carrying mechanism is arranged at the inner side part of the box body; the carrying mechanism comprises a rotating disc and carrying rods, the rotating disc is rotationally arranged on the rear side in the box body and is in transmission connection with the electric driving part, the multiple carrying rods are evenly arranged on the rotating disc, the multiple carrying rods extend towards the front side of the box body, and multiple threaded connecting openings are evenly formed in the carrying rods in the length direction. Partition operation can be carried out during spraying processing, the whole operation preparation time is saved, the continuity of production processing is improved, meanwhile, the coating sprayed and covered on the target material can be partially or completely removed through the gravity action in a circumferential rotation mode, and subsequent production such as drying and packaging treatment is better facilitated.

Description

Technical Field

[0001] The invention belongs to the technical field of spraying equipment, and in particular relates to a spraying device for producing and processing metal target materials. Background Art

[0002] The target material is mainly used as a sputtering source for the coating system to sputter on the substrate to form various functional films under appropriate process conditions. The production and processing of the target material, especially the metal target material, is mainly carried out by a casting process, that is, the metal material is fluidized by heating, and then injected into a mold to solidify it to form a target material. There is currently a target material part that is a cup-shaped structure composed of a guard ring and a base, and the target material is cast in the cup-shaped structure. In order to ensure that the surface of the metal target material will not be contaminated or corroded by external impurities before use, in addition to covering the cup-shaped structure, the surface of the target material is also sprayed with an anti-corrosion coating. However, most general spraying equipment currently adopts the form of single-plane spraying, which is inefficient on the one hand, and on the other hand, the waiting time for the spraying equipment is long and there is no corresponding post-spraying processing operation, which has higher requirements for subsequent processing steps such as drying and packaging. Summary of the invention

[0003] The purpose of the present invention is to provide a spraying device for producing and processing metal targets, so as to solve the problems mentioned in the background technology.

[0004] In order to achieve the above technical objectives, the technical solution adopted by the present invention is as follows: A spraying device for producing and processing metal target materials comprises a box body, a liquid inlet and a control panel, wherein a carrying mechanism is arranged in the box body, and a spraying assembly matching the carrying mechanism is arranged in the inner side of the box body; The carrying mechanism includes a turntable and a carrying rod, wherein the turntable is rotatably arranged at the rear side of the box body and is transmission-connected to the electric drive member, and the number of the carrying rods is several and evenly arranged on the turntable, and the several carrying rods extend toward the front side of the box body, and the carrying rods are evenly provided with several threaded connection ports along the length direction; An operating opening is provided at the upper end of the box body, and a door panel is hingedly provided at the operating opening.

[0005] The spraying assembly includes a guide rail, a carrier plate and a nozzle. The guide rail is connected to the inner wall of the box, the carrier plate is slidably connected to the guide rail, the nozzle is arranged on the carrier plate and faces the middle of the box, the nozzle is connected to the liquid inlet through a hose, and the liquid inlet is connected to an external liquid storage mechanism.

[0006] A baking lamp is also arranged on the inner wall of the box body on one side opposite to the spraying assembly.

[0007] The rotating disk is also provided with a baffle corresponding to the carrying rod.

[0008] The door panel is transparent and has a hole, wherein a rubber glove extending into the box body is arranged at the hole.

[0009] A transparent observation window is arranged at the front end of the box body.

[0010] Compared with the prior art, this application has at least the following advantages: Through the several carrier rods arranged on the turntable, the spraying process can be carried out in a zoned manner, which saves the time of overall operation preparation and improves the continuity of production and processing. At the same time, the circular rotation can also partially or completely remove the coating sprayed on the target material through gravity, which is more conducive to subsequent production such as drying and packaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The present invention is further illustrated by means of the non-limiting examples given in the accompanying drawings.

[0012] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0013] Figure 2 It is a structural cross-sectional view of the present invention.

[0014] Figure 3 It is a schematic diagram of the partial structure of the box and its interior of the present invention.

[0015] Figure 4 It is a structural schematic diagram of the carrying mechanism of the present invention.

[0016] Figure 5 Schematic diagram of the overall structure of the target material.

[0017] Box body 1, liquid inlet 11, transparent observation window 12, turntable 2, carrier rod 21, threaded connection port 22, operation port 3, door panel 31, cavity 32, guide rail 4, carrier plate 41, nozzle 42, hose 43, baking lamp 5, baffle 6, guard ring 7, base 71, target material 72. DETAILED DESCRIPTION

[0018] In order to enable those skilled in the art to better understand the present invention, the technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0019] like Figure 1-5 As shown, a spraying device for producing and processing metal target materials comprises a box body 1, a liquid inlet 11 and a control panel. A carrying mechanism is provided in the box body 1, and a spraying assembly matching the carrying mechanism is provided on the inner side of the box body 1; The carrying mechanism includes a turntable 2 and a carrying rod 21. The turntable 2 is rotatably arranged at the rear side of the box body 1 and is transmission-connected to the electric drive member. There are a plurality of carrying rods 21 that are evenly arranged on the turntable 2. The plurality of carrying rods 21 extend toward the front side of the box body 1. The carrying rods 21 are evenly provided with a plurality of threaded connection ports 22 along the length direction. An operation opening 3 is formed at the upper end of the box body 1 , and a door panel 31 is hingedly provided at the operation opening 3 .

[0020] When the target material 72 is subjected to coating spraying, the base 71 is rotated and loaded into the threaded connection port 22 of the carrier rod 21, wherein the thread on the base 71 matches the thread in the threaded connection port 22 of the carrier rod 21 to achieve a stable and fast connection. When the connection preparation of the target material 72 on the single carrier rod 21 is completed, the electric drive can be turned on through the control panel to adjust the position of the turntable 2. The control panel adopts any single-chip microcomputer capable of realizing the opening and closing of the electric control component and logic control, and is composed of existing mature control modules, and the electric drive adopts any one having a rotational driving force, such as a motor. The control panel and the electric drive belong to the prior art and those skilled in the art should understand and adopt any simple replacement implementation, so no further details are given here. When the carrier rod 21 moves to the spray assembly along with the turntable 2, the target material 72 in the guard ring 7 directly faces the spray assembly, and the spray assembly sprays the coating through the control panel, thereby coating the surface of the target material 72 in the guard ring 7; After the coating of the target material 72 on a single carrier rod 21 is sprayed, the turntable 2 continues to move and drives the target material 72 on the carrier rod 21 toward the lower side. At this time, the excess coating on the target material 72 in the guard ring 7 slides down and drips due to the influence of gravity, which can reduce the influence of the excess coating on the subsequent disassembly and the subsequent drying process; By using the circular processing method driven by the turntable 2, the target material 72 can be disassembled, assembled, sprayed and processed more conveniently and quickly, which can effectively improve the continuity and efficiency of the processing.

[0021] The spraying assembly includes a guide rail 4, a carrier plate 41 and a nozzle 42. The guide rail 4 is connected to the inner wall of the box body 1. The carrier plate 41 is slidably connected to the guide rail 4. The nozzle 42 is arranged on the carrier plate 41 and faces the middle of the box body 1. The nozzle 42 is connected to the liquid inlet 11 through a hose 43, and the liquid inlet 11 is connected to an external liquid storage mechanism.

[0022] The guide rail 4 is used to cooperate with the carrier plate 41 to slide horizontally to the left and right. The carrier plate 41 is provided with a corresponding rolling structure such as a roller, and the roller is controlled by a motor built into the carrier plate 41, so as to cooperate with the control panel to achieve automatic horizontal sliding to the left and right, and use the nozzle 42 and the paint pumped by the pressure pump in the external liquid storage mechanism to spray, so as to achieve the spraying processing of the target material 72 in the length direction of the carrier rod 21.

[0023] A baking lamp 5 is also provided on the inner wall of the box body 1 on the side opposite to the spraying assembly.

[0024] The setting of the baking lamp 5 can preliminarily dry the target material 72 after the spraying process is completed and the paint is dripped by gravity, so as to preliminarily solidify the coating and reduce pollution and damage during subsequent removal. The baking lamp 5 adopts the common resistance heating form, which is also a common heating method currently available.

[0025] The rotating disc 2 is further provided with a baffle 6 corresponding to the carrying rod 21 .

[0026] The baffle 6 can block the spray output paint of the spray assembly to a certain extent, preventing the sprayed paint from affecting the target material 72 or the baking lamp 5 at other positions.

[0027] The door panel 31 is transparent and has a hole 32 . A rubber glove extending into the box body 1 is provided at the hole 32 .

[0028] The transparent door panel 31 cooperates with rubber gloves, so that the components on the carrier rod 21 can be disassembled when the door panel 31 is closed and the spray assembly is running, without waiting, thereby improving the operation efficiency and convenience.

[0029] A transparent observation window 12 is provided at the front end of the box body 1 .

[0030] This allows for more intuitive and convenient internal observation.

[0031] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A spraying device for producing and processing metal targets, comprising a housing, a liquid inlet and a control panel, characterized in that: The box body is provided with a carrying mechanism, and the inner side of the box body is provided with a spraying assembly matching the carrying mechanism; The carrying mechanism includes a turntable and a carrying rod, wherein the turntable is rotatably arranged at the rear side of the box body and is transmission-connected to the electric drive member, and the number of the carrying rods is several and evenly arranged on the turntable, and the several carrying rods extend toward the front side of the box body, and the carrying rods are evenly provided with several threaded connection ports along the length direction; An operating opening is provided at the upper end of the box body, and a door panel is hingedly provided at the operating opening.

2. A spraying device for producing and processing metal targets according to claim 1, characterized in that: The spraying assembly includes a guide rail, a carrier plate and a nozzle. The guide rail is connected to the inner wall of the box, the carrier plate is slidably connected to the guide rail, the nozzle is arranged on the carrier plate and faces the middle of the box, the nozzle is connected to the liquid inlet through a hose, and the liquid inlet is connected to an external liquid storage mechanism.

3. A spraying device for producing and processing metal targets according to claim 2, characterized in that: A baking lamp is also arranged on the inner wall of the box body on one side opposite to the spraying assembly.

4. A spraying device for producing and processing metal targets according to claim 3, characterized in that: The rotating disk is also provided with a baffle corresponding to the carrying rod.

5. A spraying device for producing and processing metal targets according to claim 4, characterized in that: The door panel is transparent and has a hole, wherein a rubber glove extending into the box body is arranged at the hole.

6. A spraying device for producing and processing metal targets according to claim 5, characterized in that: A transparent observation window is arranged at the front end of the box body.

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