Visual inspection equipment for semiconductor breathable film

Abstract

The invention provides a visual inspection device for a semiconductor breathable film, and belongs to the field of visual inspection, the visual inspection device comprises a visual inspection mechanism and a main driving mechanism, and a rejecting mechanism (5) is arranged between the visual inspection mechanism (4) and the main driving mechanism (6). The removing mechanism (5) comprises a removing mounting plate (511), an adhesive tape reel (51), a stepping motor (52), a waste reel (53), a removing cylinder (59) and a pressing block (513), wherein the adhesive tape reel (51), the stepping motor (52), the waste reel (53) and the removing cylinder (59) are fixed on the removing mounting plate (511), the waste reel (53) is driven by the stepping motor (52) to rotate, the pressing block (513) is fixed at the lower end of the removing cylinder (59), and the pressing block (513) is located between the adhesive tape reel (51) and the waste reel (53); the adhesive tape starts from the adhesive tape reel (51), passes through the lower portion of the pressing block and then is wound on the waste reel (53). The structure is simplified, unqualified products can be accurately stuck away, the influence on qualified products is avoided, and the production efficiency and the product quality are improved.

Description

Technical Field

[0001] The invention relates to the field of visual inspection, and in particular to visual inspection equipment for semiconductor gas permeable membranes. Background Art

[0002] The semiconductor breathable film material strip is composed of a coating strip, a semiconductor breathable film body and a transparent colorless base film, which are sequentially combined from top to bottom.

[0003] During the production process, it is necessary to detect whether the size and shape of the semiconductor breathable membrane are qualified, and whether there are defects such as dirt, scratches, etc. on the surface. However, the existing detection methods mainly include manual detection and automated visual detection. Manual detection is inefficient, unreliable, and has unstable quality. During automated visual detection, patent CN107315017B marks unqualified products, and then cuts and splices the unqualified parts of the material strip to remove unqualified products. This solution has a complex structure and low efficiency, and requires marking, cutting, and splicing to complete the removal of unqualified products. Summary of the invention

[0004] In order to solve the technical problem of the complicated structure of rejecting unqualified products in the background technology, the present invention provides a visual inspection device for semiconductor breathable membranes with simple rejecting structure and high rejecting efficiency.

[0005] The technical solution of the present invention is: The visual inspection equipment for semiconductor breathable membranes includes a visual inspection mechanism 4 and a main drive mechanism 6, and is characterized in that a rejection mechanism 5 is also arranged between the visual inspection mechanism 4 and the main drive mechanism 6, and the rejection mechanism 5 includes a rejection mounting plate 511 and a tape reel 51 fixed on the rejection mounting plate 511, a stepper motor 52, a waste reel 53 driven to rotate by the stepper motor 52, a rejection cylinder 59 and a pressing block 513 fixed at the lower end of the rejection cylinder 59, and the pressing block 513 is located between the tape reel 51 and the waste reel 53; the tape used to stick off unqualified semiconductor breathable membranes starts from the tape reel 51, passes under the pressing block, and is wound on the waste reel 53.

[0006] Preferably, the visual inspection device for the semiconductor breathable membrane further comprises a first material reel 2 for fixing the semiconductor breathable membrane material roll to be inspected, a deflection correction mechanism 3, an optical fiber color mark sensor 9 and a winding mechanism. The base film with the semiconductor breathable membrane adhered thereto starts from the first material reel 2, passes through the deflection correction mechanism 3, the optical fiber color mark sensor 9, the visual inspection mechanism 4, the rejection mechanism 5, and the main drive mechanism 6 in sequence before reaching the winding mechanism.

[0007] Preferably, an auxiliary positioning component 10 is provided between the correction mechanism 3 and the visual inspection mechanism 4 and / or between the visual inspection mechanism 4 and the rejection mechanism 5 and / or between the rejection mechanism 5 and the main drive mechanism 6 and / or between the main drive mechanism 6 and the winding mechanism, so as to ensure that the forward direction of the base film does not deviate during the forward movement of the base film.

[0008] Specifically, the auxiliary positioning assembly 10 is installed on the working platform 11. Each group of auxiliary positioning assemblies 10 includes two adjustment blocks 103 and a scale plate 101. The adjustment blocks 103 are provided with adjustment holes. The locking member 102 passes through the adjustment holes and is locked on the working platform 11. The minimum distance between the two adjustment blocks 103 is just equal to the width of the base film. When in use, unscrew the locking member 102, adjust the positions of the two adjustment blocks 103, and ensure that each group of auxiliary positioning assemblies 10 is in a straight line.

[0009] Preferably, the main drive mechanism 6 includes two parallel vertical plates 61, each vertical plate 61 is provided with a first groove on the upper part, a slider 62 that can slide up and down is provided in the first groove, an adjustment rod 63 and an upper pressure roller 64 are movably connected between the two sliders 62, and a second groove 641 is provided on the upper pressure roller 64, and the width of the second groove 641 is smaller than the width of the base film of the semiconductor breathable film strip; it is ensured that the two sides of the second groove 641 only press the two sides of the base film, and will not press the semiconductor breathable film on the base film. A driving roller 65 is movably installed between the two vertical plates 61, and the driving roller 65 is located directly below the upper pressure roller 64. A cross rod 67 is fixed across the two sides of the first groove, and the cross rod 67 is located below the adjustment rod 63. The adjustment rod 63 is provided with two third grooves 631. When the adjustment rod 63 rotates, the third groove 631 can contact and separate with the cross rod 67.

[0010] Preferably, in order to enable the upper pressure roller 64 to continuously apply downward pressing force, the upper end of the slider 62 is connected to a screw rod 69 passing through a nut 610 via a spring 68 , and the nut 610 is fixed on the vertical plate 61 .

[0011] Preferably, a scale is provided on the vertical plate 61, so that it can be intuitively judged whether the pressing force applied by the two ends of the adjustment rod 63 is balanced, thereby ensuring that the base film moves forward in a straight line.

[0012] Preferably, the working platform 11 below the pressing block 513 is provided with one, two or more air holes 510; or the working platform 11 below the pressing block 513 is hollowed out, and a removal platform 58 is provided, and the removal platform 58 is provided with one, two or more air holes 510; an air suction mechanism for adsorbing the semiconductor breathable membrane is provided below the air hole 510.

[0013] Preferably, the rejection cylinder 59 is connected to the pressure block 513 via a fixed block 512, and two pressure rods 516 are fixed on the fixed block 512 and located on the left and right sides of the pressure block 513, respectively. The lower end of each pressure rod 516 is provided with a sleeve 514 through an elastic piece; the spacing between the two pressure rods 516 on the left is smaller than the width of the base film, and the spacing between the two pressure rods 516 on the right is smaller than the width of the base film; the width of the tape is smaller than the spacing between the two pressure rods 516 on the left and the spacing between the two pressure rods 516 on the right.

[0014] Preferably, a first guide shaft 54 ​​and a second guide shaft 55 are arranged on the left side of the pressing block 513 and below the tape reel 51 , and a third guide shaft 56 and a fourth guide shaft 57 are arranged on the right side of the pressing block 513 and below the waste reel 53 .

[0015] Preferably, two limiting rings 517 are provided on the first guide shaft 54 ​​and / or the second guide shaft 55 and / or the third guide shaft 56 and / or the fourth guide shaft 57 , and the adhesive tape moves between the two limiting rings 517 .

[0016] The advantages of the present invention are: (1) The rejection mechanism of the semiconductor breathable film visual inspection equipment adopts components such as a tape reel, a stepper motor and a rejection cylinder. The structure is simplified and can accurately remove defective products, avoiding the impact on qualified products. The setting of the air holes and the suction mechanism facilitates the separation of the tape and the base film with the semiconductor breathable film material tape, preventing the tape from sticking to the base film and affecting the continued advancement of the base film, ensuring the reliability of rejection and improving production efficiency and product quality. The design of the pressure rod and the sleeve can press on both sides of the base film, preventing the tape from sticking to the base film and further improving the reliability of rejection.

[0017] (2) The main drive mechanism uses a slider and an adjustment rod that can slide up and down, which can adjust the clamping force according to needs. The adjustment is convenient and quick, and ensures the stable advancement of the base film without deviation.

[0018] (3) The setting of the auxiliary positioning component ensures that the basement membrane does not deviate during the forward movement, thereby improving the stability and accuracy of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is the front view of the overall structure of the present invention; Figure 2 It is a three-dimensional view of the overall structure of the present invention; Figure 3 It is a schematic diagram of the three-dimensional structure of the rejecting mechanism of the present invention; Figure 4 It is a partial front view of the rejection mechanism of the present invention; Figure 5 It is a partial enlarged view of the rejection mechanism of the present invention; Figure 6 is a schematic diagram of the three-dimensional structure of the main drive mechanism; Figure 7 Schematic diagram of the adjusting rod structure; Figure 8 A top view of the auxiliary positioning component; Fig. 9 This is the electrical control principle diagram of the present invention.

[0020] Among them, 1. frame; 2. first material reel; 3. deviation correction mechanism; 4. visual inspection mechanism; 5. rejection mechanism; 6. main drive mechanism; 7. second material reel; 8. third material reel; 9. fiber optic color mark sensor; 10. auxiliary positioning component; 11. working platform; 12. support leg; 13. cross rail; 14. guide roller; 51. tape reel; 52. stepper motor; 53. waste reel; 54. first guide shaft; 55. second guide shaft; 56. third guide shaft; 57. fourth guide shaft; 58. rejection platform; 59. rejection cylinder ;510, air hole;511, removal installation plate;512, fixing block;513, pressure block;514, sleeve;515, reinforcement plate;516, pressure rod;517, limit ring;518, cylinder fixing plate;61, vertical plate;62, slider;63, adjustment rod;631, third groove;64, upper pressure roller;641, second groove;65, driving roller;66, handle;67, cross rod;68, spring;69, screw;610, nut;611, main drive motor;101, scale plate;102, locking piece;103, adjustment block. DETAILED DESCRIPTION

[0021] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are partial embodiments of the present invention, rather than all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention. It should also be noted that the orientation or position relationship indicated by the terms "upper", "lower", "left", "right", etc. is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0022] like Figure 1-Figure 2As shown, the visual inspection equipment for semiconductor breathable membranes includes a first material reel 2 for fixing the semiconductor breathable membrane material roll to be inspected, a deviation correction mechanism 3, an optical fiber color mark sensor 9, a visual inspection mechanism 4, a rejection mechanism 5, a main drive mechanism 6 and a winding mechanism, etc. The above mechanisms are all fixed on a frame 1, and the frame 1 includes a working platform 11 and four supporting legs 12, which has a compact and stable structure and is easy to operate and observe. The forward direction of the base film, that is, the length direction of the working platform 11 is the X-axis, the width direction of the working platform 11 is the Y-axis, and the vertical direction is the Z-axis.

[0023] The first material reel 2 is selected to be a pneumatic tensioning shaft, a hydraulically driven tensioning shaft, or a mechanical hand expansion shaft, and other structures for fixing the material reel may also be used.

[0024] The correcting mechanism 3 can be any correcting mechanism for strip products in the prior art, which is not an improvement point of the present application, so it will not be described in detail herein.

[0025] Since the semiconductor breathable membrane may have different colors, and the base membrane is colorless and transparent, when the colored semiconductor breathable membrane product passes through the color fiber optic color mark sensor 9, it will trigger the color fiber optic color mark sensor 9 to generate a control signal and send the control signal to the camera of the visual detection mechanism 4 for shooting.

[0026] The visual inspection mechanism 4 includes a camera, a visual controller, and a fill light, etc. The camera is connected to the visual controller via a video cable, and a fill light is arranged around the camera. Preferably, the camera is adjustable in the XYZ axis direction, and the fill light is adjustable in the XYZ axis direction, which is more flexible and can meet the inspection requirements of semiconductor breathable membranes of different specifications and positions. The photos taken by the camera are sent to the visual controller for product qualification judgment and sent to the PLC controller.

[0027] like Figure 3-Figure 5 The rejecting mechanism 5 includes a rejecting mounting plate 511, a tape reel 51, a stepper motor 52, a waste reel 53 driven by the stepper motor 52, a rejecting cylinder 59 and a pressing block 513 fixed to the lower end of the rejecting cylinder 59; the tape reel 51, the stepper motor 52 and the rejecting cylinder 59 are all fixed on the rejecting mounting plate 511; the pressing block 513 is located between the tape reel 51 and the waste reel 53; the tape used to stick off the unqualified semiconductor breathable film starts from the tape reel 51, passes under the pressing block and is wound on the waste reel 53.

[0028] Preferably, a first guide shaft 54 ​​and a second guide shaft 55 are arranged on the left side of the pressing block 513 and below the tape reel 51, and a third guide shaft 56 and a fourth guide shaft 57 are arranged on the right side of the pressing block 513 and below the waste reel 53. More preferably, two limiting rings 517 are arranged on the first guide shaft 54 ​​and / or the second guide shaft 55 and / or the third guide shaft 56 and / or the fourth guide shaft 57, and the tape moves between the two limiting rings 517.

[0029] Preferably, the bottom surface of the pressing block 513 is a plane, and the pressing block 513 is in an inverted trapezoidal shape. The design of the pressing block enables the adhesive tape to fit tightly to the base film.

[0030] Preferably, after the pressing block 513 is pressed down and lifted, in order to facilitate the separation of the adhesive tape and the base film with the semiconductor breathable film material tape, an air hole 510 can be directly opened on the working platform 11 below the pressing block 513, and the number of the air holes is one, two or more. The working platform 11 below the pressing block 513 can also be hollowed out, and a rejection platform 58 is provided. The rejection platform 58 is provided with an air hole 510, and the number of the air holes is one, two or more. An air suction mechanism (not shown in the figure) is provided below the air hole 510, and the air suction mechanism absorbs the base film, thereby preventing the adhesive tape from sticking the base film together and affecting the continued advancement of the base film, thereby ensuring the reliability of rejection.

[0031] Preferably, the reject cylinder 59 is fixed on the reject mounting plate 511 via a cylinder fixing plate 518, and the cylinder fixing plate 518 and the reject mounting plate 511 are reinforced by a reinforcing plate 515 to improve stability.

[0032] Preferably, the rejecting cylinder 59 is connected to the pressing block 513 through a fixed block 512, and two pressing rods 516 are fixed on the fixed block 512 and located on the left and right sides of the pressing block 513, respectively. The lower end of each pressing rod 516 is provided with a sleeve 514 through an elastic member; the spacing between the two pressing rods 516 on the left is smaller than the width of the base film, and the spacing between the two pressing rods 516 on the right is smaller than the width of the base film. When the pressing block 513 is pressed down, the pressing rods 516 can press both sides of the base film. In order to prevent the pressing rods 516 from restricting the movement of the tape, the width of the tape is smaller than the spacing between the two pressing rods 516 on the left and the spacing between the two pressing rods 516 on the right.

[0033] The working process of the rejection mechanism is: the tape starts from the tape reel 51, passes through the first guide shaft 54, the second guide shaft 55, the rejection platform 58, the fourth guide shaft 57, and the third guide shaft 56 in sequence before reaching the waste reel 53; the base film from the visual inspection mechanism 4 moves forward under the traction of the main drive mechanism 6, passes under the pressure block 513, and the main drive mechanism 6 pauses for 0.2s. At this time, the rejection cylinder 59 drives the pressure block 513 to press the tape down, and the sleeve 514 presses both sides of the base film. The tape sticks away the defective products, and the waste reel 53 rotates a certain angle to drive the tape under the pressure block 513 to move forward so that the defective products can be picked up next time, and then the main drive mechanism 6 continues to move forward.

[0034] like Figure 6-Figure 7 The main drive mechanism 6 includes two parallel vertical plates 61, each of which is provided with a first groove on the upper part of the vertical plate 61, and the vertical plate is in a "concave" shape as a whole. A slider 62 that can slide up and down is provided in the first groove, and an adjusting rod 63 and an upper pressing roller 64 are movably connected between the two sliders 62. A second groove 641 is provided on the upper pressing roller 64. The width of the second groove 641 is smaller than the width of the base film of the semiconductor breathable membrane material strip, ensuring that the two sides of the second groove 641 only press the two sides of the base film, and will not press the semiconductor breathable membrane on the base film. A driving roller 65 is arranged between the two vertical plates 61. The driving roller 65 is located directly below the upper pressure roller 64. A cross rod 67 is fixed across the two sides of the first groove. The cross rod 67 is located below the adjustment rod 63. Two third grooves 631 are arranged on the adjustment rod 63. When the adjustment rod 63 rotates, the third groove 631 can contact and separate with the cross rod 67. In order to facilitate the rotation of the adjustment rod 63, a handle 66 is fixed at one end of the adjustment rod 63. In order to make the upper pressure roller 64 continuously apply downward pressing force, the upper end of the slider 62 is connected to the screw 69 passing through the nut 610 through the spring 68, and the nut 610 is fixed on the vertical plate 61. Preferably, a scale is arranged on the vertical plate 61, so that it can be intuitively judged whether the pressing force applied by the two ends of the adjustment rod 63 is balanced to ensure that the base film moves forward in a straight line. The driving roller 65 is driven to rotate by the main drive motor 611. The main drive mechanism 6 is used in the following manner: in the initial state, the third groove 631 on the adjustment rod 63 does not contact the cross rod 67, and the slider 62 is in a high position. At this time, the upper pressure roller 64 is separated from the driving roller 65, which is convenient for adjusting the position of the base film or making other adjustments; after the adjustment is completed, the handle 66 is turned, the adjustment rod 63 rotates, the third groove 631 on the adjustment rod 63 contacts the cross rod 67, and the slider 62 is in a low position. At this time, the upper pressure roller 64 presses the driving roller 65, thereby pressing the base film. As the driving roller 65 rotates, the function of driving the base film forward can be realized.

[0035] During the forward movement of the base film, the forward direction of the base film should always be kept from deviating. Therefore, a group of auxiliary positioning components 10 are provided between the correction mechanism 3 and the visual inspection mechanism 4, between the visual inspection mechanism 4 and the rejection mechanism 5, between the rejection mechanism 5 and the main drive mechanism 6, and between the main drive mechanism 6 and the winding mechanism. The auxiliary positioning components 10 are installed on the working platform 11. Each group of auxiliary positioning components 10 includes two adjustment blocks 103 with adjustment holes and a scale plate 101. The adjustment blocks 103 are installed on the working platform 11 through the locking member 102. The distance between the two adjustment blocks 103 is just equal to the width of the base film. When in use, unscrew the locking member 102, adjust the position of the two adjustment blocks 103, ensure that each group of auxiliary positioning components 10 is in a straight line, and the installation, adjustment and maintenance of the equipment are more convenient and quick.

[0036] The winding mechanism comprises a third material reel 8 for fixing a new coated tape and a second material reel 7 for fixing a final product.

[0037] Preferably, Figure 1-2 In the figure, a horizontal rail 13 is arranged between two adjacent supporting legs on the left and right, and the first material reel 2 for fixing the semiconductor breathable film tape to be tested, the third material reel 8 for fixing the new coating tape and the second material reel 7 for fixing the final product can all be fixed on the horizontal rail 13, and the relative distances of the three material reels can be adjusted arbitrarily on the horizontal rail 13, thereby improving the flexibility and adaptability of the equipment.

[0038] Combination Figure 1-Figure 9 , the working principle of the present invention is described: the semiconductor breathable film material strip to be detected starts from the first material reel 2, the film covering strip of the semiconductor breathable film material strip to be detected is from another material reel (not shown in the figure), and the base film with the semiconductor breathable film passes through the correction mechanism 3 and the optical fiber color mark sensor 9 in turn and enters the detection range of the visual detection mechanism 4. The optical fiber color mark sensor 9 detects the color signal and sends a photo signal to the PLC controller. The PLC controller controls the camera to take a photo, and sends the taken photo to the visual processor for judgment and sends it to the display screen for display. When it is determined to be a defective product, the visual processor sends an NG signal to the PLC controller. When the defective product reaches the rejection position, the PLC controller controls the main drive mechanism to pause for 0.2s. At the same time, the rejection cylinder presses down the tape, and the tape sticks to the defective product. The waste reel 53 rotates a certain angle, driving the tape under the pressure block 513 to move forward so that the defective product can be picked up next time. The base film from which the defective product has been rejected continues to move forward, and after turning around the guide roller 14, it is laminated with the new coating tape fixed on the third material reel 8, and is wound on the second material reel 7, and the rejection is completed.

[0039] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A visual inspection device for a semiconductor gas permeable membrane, comprising a visual inspection mechanism (4) and a main drive mechanism (6), characterized in that: A rejection mechanism (5) is also provided between the visual inspection mechanism (4) and the main drive mechanism (6), the rejection mechanism (5) comprising a rejection mounting plate (511), a tape reel (51) fixed on the rejection mounting plate (511), a stepper motor (52), a waste reel (53) driven to rotate by the stepper motor (52), a rejection cylinder (59), and a pressing block (513) fixed to the lower end of the rejection cylinder (59), the pressing block (513) being located between the tape reel (51) and the waste reel (53); the tape used to stick off unqualified semiconductor breathable films starts from the tape reel (51), passes under the pressing block, and is wound around the waste reel (53).

2. The visual inspection device for semiconductor gas permeable membrane according to claim 1, characterized in that: The semiconductor breathable film visual inspection device further comprises a first material reel (2) for fixing a semiconductor breathable film material roll to be inspected, a deflection correction mechanism (3), an optical fiber color mark sensor (9) and a reeling mechanism. The base film with the semiconductor breathable film adhered thereto starts from the first material reel (2), passes through the deflection correction mechanism (3), the optical fiber color mark sensor (9), the visual inspection mechanism (4), the rejection mechanism (5) and the main drive mechanism (6) in sequence, and then reaches the reeling mechanism.

3. The visual inspection device for semiconductor gas permeable membrane according to claim 2, characterized in that: An auxiliary positioning component (10) is provided between the deviation correction mechanism (3) and the visual detection mechanism (4) and / or between the visual detection mechanism (4) and the rejection mechanism (5) and / or between the rejection mechanism (5) and the main drive mechanism (6) and / or between the main drive mechanism (6) and the winding mechanism.

4. The visual inspection device for semiconductor gas permeable membrane according to claim 3, characterized in that: Each set of auxiliary positioning components (10) comprises two adjustment blocks (103) and a scale plate (101). An adjustment hole is provided on the adjustment block (103). The locking member (102) passes through the adjustment hole and is locked on the working platform (11). The minimum distance between the two adjustment blocks (103) is exactly equal to the width of the base film.

5. The visual inspection device for semiconductor gas permeable membrane according to any one of claims 1 to 4, characterized in that: The main drive mechanism (6) comprises two parallel vertical plates (61), each vertical plate (61) is provided with a first groove on the upper part, a slider (62) that can slide up and down is provided in the first groove, an adjustment rod (63) and an upper pressure roller (64) are movably connected between the two sliders (62), a second groove (641) is provided on the upper pressure roller (64), and the width of the second groove (641) is smaller than the width of the base film of the semiconductor breathable film strip; a driving roller (65) is movably installed between the two vertical plates (61), the driving roller (65) is located directly below the upper pressure roller (64), a cross rod (67) is fixed across the two sides of the first groove, the cross rod (67) is located below the adjustment rod (63), and two third grooves (631) are provided on the adjustment rod (63), and when the adjustment rod (63) rotates, the third grooves (631) can contact and separate from the cross rod (67).

6. The visual inspection device for semiconductor gas permeable membrane according to claim 5, characterized in that: The upper end of the slider (62) is connected to a screw rod (69) passing through a nut (610) via a spring (68), and the nut (610) is fixed on the vertical plate (61).

7. The visual inspection device for semiconductor gas permeable membrane according to any one of claims 1 to 4, characterized in that: The working platform (11) below the pressing block (513) is provided with one, two or more air holes (510); or the working platform (11) below the pressing block (513) is hollowed out, and a rejection platform (58) is provided, and the rejection platform (58) is provided with one, two or more air holes (510); An air suction mechanism for adsorbing the semiconductor air permeable membrane is arranged below the air hole (510).

8. The visual inspection device for semiconductor gas permeable membrane according to claim 7, characterized in that: The rejecting cylinder (59) and the pressing block (513) are connected via a fixed block (512); two pressing rods (516) are fixed on the fixed block (512) and located on the left and right sides of the pressing block (513), respectively; a sleeve (514) is provided at the lower end of each pressing rod (516) through an elastic sleeve; the spacing between the two pressing rods (516) on the left is smaller than the width of the base film, and the spacing between the two pressing rods (516) on the right is smaller than the width of the base film; the width of the adhesive tape is smaller than the spacing between the two pressing rods (516) on the left and the spacing between the two pressing rods (516) on the right.

9. The visual inspection device for semiconductor gas permeable membrane according to claim 8, characterized in that: A first guide shaft (54) and a second guide shaft (55) are arranged on the left side of the pressing block (513) and below the tape reel (51), and a third guide shaft (56) and a fourth guide shaft (57) are arranged on the right side of the pressing block (513) and below the waste reel (53).

10. The visual inspection device for semiconductor gas permeable membrane according to claim 9, characterized in that: Two limiting rings (517) are arranged on the first guide shaft (54) and / or the second guide shaft (55) and / or the third guide shaft (56) and / or the fourth guide shaft (57), and the adhesive tape moves between the two limiting rings (517).

Images