A three-dimensional galvanometer scanning system

Abstract

This invention relates to the field of dynamic focusing equipment, and particularly to a three-dimensional galvanometer scanning system, comprising a Z-axis focusing mechanism, a galvanometer mechanism, and a focal working plane. The Z-axis focusing mechanism, galvanometer mechanism, and focal working plane are sequentially adjacent. The Z-axis focusing mechanism receives laser light emitted from a laser emitter and guides the laser light to the galvanometer mechanism by rotating it to adjust the incident and exit angles. The galvanometer mechanism reflects the laser light to different positions on the focal working plane. When the focal point of the laser needs to be adjusted, the incident and exit angles of the laser light passing through the Z-axis focusing mechanism can be changed simply by adjusting the current state of the Z-axis focusing mechanism and rotating it by a certain angle. Compared with traditional galvanometer scanning devices, this device has a relatively compact structure and does not produce abnormal movements. By changing the motion structure of the Z-axis focusing mechanism, the response speed of the three-dimensional scanning system is improved.

Description

Technical Field

[0001] This invention relates to the field of dynamic focusing equipment, and in particular to a three-dimensional galvanometer scanning system. Background Technology

[0002] The scanning galvanometer control system features high output torque, low rotational inertia, high speed, high precision, and stable operation, and is widely used in marking, engraving, drilling, cutting, welding, and high-speed machining. The working principle of the galvanometer-type laser scanning system is to amplify and collimate the laser beam output from the laser using a beam expander, then sequentially pass it through an x-axis scanning galvanometer, a y-axis scanning galvanometer, and a scanning focusing lens to converge it onto the workpiece surface. By controlling the distance between the x-axis and y-axis scanning galvanometers, the distance and position of the laser beam along the x and y directions on the material surface are adjusted, thus processing the workpiece surface.

[0003] Both technical solutions disclosed in Chinese patent documents “CN210649013U” and “CN111123463A” use a linear reciprocating motion to change the distance between the beam expander and the focusing lens, thereby changing the focal point position in the Z-axis direction. Due to the limitations of the linear reciprocating motion structure, the motion module in the Z-axis dynamic focusing device has a large inertia, which limits the response speed of the three-dimensional scanning system. Summary of the Invention

[0004] Based on this, it is necessary to provide a three-dimensional galvanometer scanning system to address the aforementioned technical problems. Compared with traditional galvanometer scanning devices, this device has a relatively compact structure and does not produce abnormal movements. By changing the motion structure of the Z-axis focusing mechanism of the transmission, the response speed of the three-dimensional scanning system is improved.

[0005] This invention provides a three-dimensional galvanometer scanning system, including a Z-axis focusing mechanism, a galvanometer mechanism, and a focal working plane; the Z-axis focusing mechanism, the galvanometer mechanism, and the focal working plane are sequentially adjacent; the Z-axis focusing mechanism is used to receive laser light emitted by a laser emitter and guide the laser light to the galvanometer mechanism by rotating and adjusting the incident angle and the exit angle; the galvanometer mechanism is used to reflect the laser light to different positions on the focal working plane.

[0006] In one embodiment, the laser emitter is located at the end of the Z-axis focusing mechanism away from the galvanometer mechanism, and the laser emitter and the Z-axis focusing mechanism are assembleable or detachable.

[0007] In one embodiment, the Z-axis focusing mechanism includes a first moving mirror and a second moving mirror; the first moving mirror and the second moving mirror are arranged opposite to each other, and the first moving mirror and the second moving mirror rotate in opposite directions.

[0008] In one embodiment, the first moving mirror rotates about its first axis, the second moving mirror rotates about its second axis, and the line connecting the first axis and the second axis is parallel to or coincides with the laser emitted by the laser emitter.

[0009] In one embodiment, the first axis and the second axis coincide with the central axes of two rods passing through the first moving mirror and the second moving mirror, respectively, and the ends of the rods extend to the outside of the Z-axis focusing mechanism.

[0010] In one embodiment, the minimum angle between the first moving mirror and the second moving mirror is zero, the maximum angle is an obtuse angle, and the obtuse angle opening faces downward.

[0011] In one embodiment, the Z-axis focusing mechanism further includes a beam expander and a focusing lens; after passing through the beam expander, the laser enters the range of the first moving mirror and the second moving mirror, and passes through the focusing lens under the refraction of the rotated first moving mirror and the second moving mirror.

[0012] In one embodiment, when the rotation angles of the first and second moving mirrors change, the maximum width of the laser spot as the laser passes through the focusing lens changes synchronously.

[0013] In one embodiment, the galvanometer mechanism includes an X-mirror and a Y-mirror; the X-mirror and the Y-mirror are parallel, and the X-mirror and the Y-mirror are used to reflect the laser in sequence and finally converge multiple laser points to the same position.

[0014] In one embodiment, the focal working plane includes a first working surface and a second working surface; the first working surface and the second working surface are at different distances from the laser emitter, and the first working surface and the second working surface are perpendicular to the laser incident direction.

[0015] The aforementioned 3D galvanometer scanning system, when in use, emits a laser beam from the laser emitter. The laser beam passes sequentially through the Z-axis focusing mechanism and the galvanometer mechanism, converging at a specific position on the focal plane. To adjust the focal point, the Z-axis focusing mechanism is rotated at a certain angle, altering its incident and exit angles, ultimately focusing the laser beam at another location on the focal plane. Compared to traditional galvanometer scanning devices, this system is structurally more compact and does not experience any shifts. By modifying the motion of the Z-axis focusing mechanism, the response speed of the 3D scanning system is improved. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the three-dimensional galvanometer scanning system provided by the present invention;

[0018] Figure 2 This is a schematic diagram of the internal module distribution of the three-dimensional galvanometer scanning system provided by the present invention;

[0019] Figure 3 This is one of the internal architecture diagrams of the three-dimensional galvanometer scanning system provided by the present invention;

[0020] Figure 4 This is the second schematic diagram of the internal architecture of the three-dimensional galvanometer scanning system provided by the present invention;

[0021] Figure 5 A partial structural schematic diagram of the side of the system housing provided by the present invention;

[0022] Figure 6 This is one of the schematic diagrams of the internal structure of the system housing provided by the present invention;

[0023] Figure 7 This is the second schematic diagram of the internal structure of the system casing provided by the present invention;

[0024] Figure 8 This is the third schematic diagram of the internal structure of the system shell provided by the present invention.

[0025] Figure label:

[0026] 110. Z-axis focusing mechanism; 111. Beam expander; 112. First moving mirror; 1121. First axis; 113. Second moving mirror; 1131. Second axis; 114. Focusing mirror; 120. Galvanometer mechanism; 121. X-galvanometer; 122. Y-galvanometer; 130. Focal working plane; 131. First working surface; 132. Second working surface; 140. System housing; 141. Limiting groove; 142. Annular groove; 150. Third rotating rod; 160. Transmission assembly; 170. Rotating sleeve; 171. Thick plate section; 172. Thin plate section; 173. Limiting block; 180. Clamping head; 181. Clamping seat; 1811. Slot; 182. Insert rod; 200. Laser emitter. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] The following is combined with Figures 1 to 8 This invention describes a three-dimensional galvanometer scanning system.

[0029] like Figures 1 to 4 As shown, in one embodiment, a three-dimensional galvanometer scanning system includes a Z-axis focusing mechanism 110, a galvanometer mechanism 120, and a focal working plane 130; the Z-axis focusing mechanism 110, the galvanometer mechanism 120, and the focal working plane 130 are sequentially adjacent to each other. The Z-axis focusing mechanism 110 is used to receive the laser emitted by the laser emitter 200 and guide the laser to the galvanometer mechanism 120 by rotating and adjusting the incident angle and the exit angle. The galvanometer mechanism 120 is used to reflect the laser to different positions on the focal working plane 130.

[0030] In the aforementioned 3D galvanometer scanning system, the laser emitter 200 emits a laser beam during operation. The laser beam passes sequentially through the Z-axis focusing mechanism 110 and the galvanometer mechanism 120, converging at a specific position on the focal working plane 130. When the focal point of the laser needs to be adjusted, simply rotating the Z-axis focusing mechanism 110 by a certain angle changes the incident and exit angles of the laser beam as it passes through it, ultimately focusing the laser beam at another position on the focal working plane 130. Compared to traditional galvanometer scanning devices, this device has a more compact structure and does not produce any abnormal movements. By changing the motion structure of the Z-axis focusing mechanism 110, the response speed of the 3D scanning system is improved.

[0031] In one embodiment, the laser emitter 200 is located at the end of the Z-axis focusing mechanism 110 away from the galvanometer mechanism 120, and the laser emitter 200 and the Z-axis focusing mechanism 110 can be assembled or disassembled.

[0032] Specifically, in this embodiment, the Z-axis focusing mechanism 110 and the galvanometer mechanism 120 are both disposed between the system housing 140. The laser inlet and the laser outlet are located at opposite ends of the system housing 140. The inlet is positioned opposite the laser emitter 200. Depending on actual needs, the laser emitter 200 can be placed outside as a separate device or assembled with the system housing 140. The outlet is directly opposite the focal working plane 130.

[0033] In one embodiment, the Z-axis focusing mechanism 110 includes a first moving mirror 112 and a second moving mirror 113; the first moving mirror 112 and the second moving mirror 113 are arranged opposite to each other, and the rotation directions of the first moving mirror 112 and the second moving mirror 113 are opposite.

[0034] Specifically, there are n first moving mirrors 112 and n second moving mirrors 113. In use, each first moving mirror 112 is combined with one second moving mirror 113. Multiple combinations of first moving mirrors 112 and second moving mirrors 113 can be distributed sequentially to refract the laser multiple times. The first moving mirrors 112 and the second moving mirrors 113 rotate at the same speed but in opposite directions.

[0035] In one embodiment, the first moving mirror 112 rotates about its first axis 1121, and the second moving mirror 113 rotates about its second axis 1131. The line connecting the first axis 1121 and the second axis 1131 is parallel to or coincides with the laser emitted by the laser emitter 200.

[0036] Specifically, since the first axis 1121 and the second axis 1131 serve as the rotation centers of the first moving mirror 112 and the second moving mirror 113, respectively, the first axis 1121 and the second axis 1131 are located at the center points on the sides of the first moving mirror 112 and the second moving mirror 113. Since the line connecting the first axis 1121 and the second axis 1131 is parallel to or coincides with the laser emitted by the laser emitter 200, the state of the laser entering the first moving mirror 112 and exiting the second moving mirror 113 remains stable.

[0037] In one embodiment, the first axis 1121 and the second axis 1131 are respectively aligned with the central axes of two rods passing through the first moving mirror 112 and the second moving mirror 113, and the ends of the rods extend to the outside of the Z-axis focusing mechanism 110.

[0038] Specifically, the end of the rod used to control the rotation of the first moving mirror 112 and the second moving mirror 113 extends through to the outer surface of the system housing 140 for hand-held twisting operation. Preferably, a servo motor can be installed inside the system housing 140, and the drive shaft of the servo motor is connected to the rod for transmission. The drive button of the servo motor is set on the surface of the system housing 140 for operation by the operator.

[0039] It should be noted that the minimum angle between the first moving mirror 112 and the second moving mirror 113 is zero, the maximum angle is an obtuse angle, and the obtuse angle opening faces downward.

[0040] In one embodiment, the Z-axis focusing mechanism 110 further includes a beam expander 111 and a focusing lens 114; after passing through the beam expander 111, the laser enters the range of the first moving mirror 112 and the second moving mirror 113, and passes through the focusing lens 114 under the refraction of the rotated first moving mirror 112 and the second moving mirror 113.

[0041] Specifically, the first moving mirror 112 and the second moving mirror 113 rotate at the same speed but in opposite directions. This design ensures that the laser center point is always incident along the center of the focusing mirror 114.

[0042] In one embodiment, when the rotation angle of the first moving mirror 112 and the second moving mirror 113 changes, the maximum width of the laser spot when the laser passes through the focusing mirror 114 changes synchronously.

[0043] Specifically, assuming the first state is as follows: Figure 3 As shown, the two points where the laser enters the surface of the focusing lens 114 are A1 and B1, respectively. In the second state, as shown... Figure 4 As shown, the two points when the laser enters the surface of the focusing lens 114 are divided into A2 and B2. Based on the actual state, the distance between A1 and B1 and the distance between A2 and B2 can be judged, thereby determining that the final focal point of the laser is located at a certain position on the focal working plane 130.

[0044] In one embodiment, the galvanometer mechanism 120 includes an X-mirror 121 and a Y-mirror 122; the X-mirror 121 and the Y-mirror 122 are parallel and are used to reflect the laser in sequence, and finally converge multiple laser points to the same position.

[0045] Specifically, the focal working plane 130 includes a first working plane 131 and a second working plane 132; the first working plane 131 and the second working plane 132 are at different distances from the laser emitter 200, and the first working plane 131 and the second working plane 132 are perpendicular to the laser incident direction.

[0046] like Figure 5 As shown, in one embodiment, the system housing 140 has a plurality of limiting grooves 141 on its side, the plurality of limiting grooves 141 are arranged in a ring array, and the system housing 140 also has an annular groove 142 on its side, the central axis of the annular groove 142 coincides with the array center of the plurality of limiting grooves 141, and the annular groove 142 is connected to the plurality of limiting grooves 141.

[0047] It should be noted that in this embodiment, the first axis 1121 is the central axis of the first rotating rod, and the second axis 1131 is the central axis of the second rotating rod. That is, the first rotating rod and the second rotating rod are respectively mounted on the first moving mirror 112 and the second moving mirror 113.

[0048] In one embodiment, a third rotating rod 150 and the aforementioned first and second rotating rods are installed through the side of the system housing 140. The three rotating rods are connected at one end inside the system housing 140 via a transmission assembly 160, and when the third rotating rod 150 rotates, it will drive the first and second rotating rods to rotate in opposite directions.

[0049] like Figures 6 to 8 As shown, a rotating sleeve 170 is installed at one end of the third rotating rod 150 located outside the system housing 140. The rotating sleeve 170 includes a thick plate portion 171, a thin plate portion 172, and a limiting block 173. The two thin plate portions 172 are respectively disposed on both sides of the thick plate portion 171, and there is a certain gap between the thin plate portion 172 and the surface of the system housing 140. The two limiting blocks 173 are respectively disposed on the side of the two thin plate portions 172 facing the system housing 140, and are respectively engaged in the two limiting grooves 141.

[0050] The thick plate portion 171 is in contact with the surface of the movable bonding system housing 140, while the thin plate portion 172 is less thick than the thick plate portion 171 and has a certain elasticity. When the third rotating rod 150 rotates, the limiting block 173 disengages from the limiting groove 141 and moves along the annular groove 142. During this process, the thin plate portion 172 is subjected to the pressure of the limiting groove 141 and undergoes bending deformation.

[0051] In one embodiment, the clamping head 180 is disposed at one end of the first rotating rod and the second rotating rod located inside the system housing 140. The clamping head 180 includes a clamping seat 181 and an insert rod 182. The clamping seat 181 is connected to the end of the first rotating rod or the second rotating rod located inside the system housing 140. A slot 1811 is provided at the end of the clamping seat 181 away from the first rotating rod or the second rotating rod. The slot 1811 is generally rectangular in shape, and the upper and lower ends of the slot 1811 respectively pass through the upper and lower ends of the clamping seat 181. The side end of the first moving mirror 112 or the second moving mirror 113 is engaged in the slot 1811. The insert rod 182 is horizontally inserted into the clamping seat 181. The insert rod 182 passes through the slot 1811. An insertion hole for the insert rod 182 to pass through is provided on the surface of the first moving mirror 112 or the second moving mirror 113.

[0052] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A three-dimensional galvanometer scanning system, characterized in that, It includes a Z-axis focusing mechanism, a galvanometer mechanism, and a focal working plane; the Z-axis focusing mechanism, the galvanometer mechanism, and the focal working plane are sequentially adjacent to each other. The Z-axis focusing mechanism is used to receive the laser emitted by the laser emitter and guide the laser to the galvanometer mechanism by rotating and adjusting the incident angle and the exit angle. Furthermore, by changing the motion structure of the Z-axis focusing mechanism, the response speed of the three-dimensional scanning system is improved. The Z-axis focusing mechanism includes a first moving mirror, a second moving mirror, a beam expander, and a focusing mirror. The first moving mirror and the second moving mirror are arranged opposite to each other, and the first moving mirror and the second moving mirror rotate in opposite directions but at the same speed, so as to ensure that the laser center point is always incident along the center of the focusing mirror section. After passing through the beam expander, the laser enters the range of the first moving mirror and the second moving mirror, and passes through the focusing mirror under the refraction of the first moving mirror and the second moving mirror after rotation. When the rotation angle of the first moving mirror and the second moving mirror changes, the maximum width of the laser spot when the laser passes through the focusing mirror changes synchronously. The galvanometer mechanism includes an X-mirror and a Y-mirror; used to reflect the laser in sequence. The galvanometer mechanism is used to reflect the laser to different positions on the focal working plane, which is perpendicular to the laser incident direction. The focal working plane includes a first working surface and a second working surface. The distances between the first working surface and the second working surface and the laser emitter are different, and the first working surface and the second working surface are perpendicular to the laser incident direction.

2. The three-dimensional galvanometer scanning system according to claim 1, characterized in that, The laser emitter is located at the end of the Z-axis focusing mechanism that is away from the galvanometer mechanism, and the laser emitter and the Z-axis focusing mechanism can be assembled or disassembled.

3. The three-dimensional galvanometer scanning system according to claim 2, characterized in that, The first moving mirror rotates about its first axis, and the second moving mirror rotates about its second axis. The line connecting the first axis and the second axis is parallel to or coincides with the laser emitted by the laser emitter.

4. The three-dimensional galvanometer scanning system according to claim 3, characterized in that, The first axis and the second axis coincide with the central axes of two rods passing through the first moving mirror and the second moving mirror, respectively, and the ends of the rods extend to the outside of the Z-axis focusing mechanism.

5. The three-dimensional galvanometer scanning system according to claim 4, characterized in that, The minimum angle between the first moving mirror and the second moving mirror is zero, the maximum angle is an obtuse angle, and the obtuse angle opening faces downward.

6. The three-dimensional galvanometer scanning system according to claim 5, characterized in that, The X-mirror and the Y-mirror are parallel and ultimately converge multiple laser points to the same location.

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