Laser scribing mechanical light splitting device and equipment

Abstract

The invention provides a laser scribing mechanical light splitting device and equipment, and the device comprises an incident light splitting unit which is used for receiving incident laser and splitting the incident laser into multiple beams of laser; the multi-stage transfer light-splitting units receive the laser of the incident light-splitting unit step by step, and the number of the transfer light-splitting units is increased step by step; and the plurality of emergent units respectively receive the laser split by the last stage of transfer light splitting unit and convert the laser into emergent laser, and the distance between the emergent laser emitted by the plurality of emergent units is adjustable. The laser beam splitting function is achieved based on a pure mechanical beam splitting framework, single incident laser is decomposed into multiple beams of controllable emergent laser, and the distance between the emergent laser is flexibly adjusted. The reflectors of the multiple optical devices are adjusted independently, and if the optical devices are dirty or damaged, only the corresponding optical devices need to be replaced; most of optical devices are integrated on one integrated board, and once the devices are damaged, the integrated board can be directly detached for replacement.

Description

Technical Field

[0001] The invention relates to the field of perovskite laser scribing, and in particular to a laser scribing mechanical spectrometer and equipment. Background Art

[0002] With the rapid development of thin-film batteries, laser scribing equipment and related technologies have also been more widely used in the field of laser scribing of perovskite cells. The role of laser scribing in perovskite solar cells is to build the circuit structure in the perovskite cell through multiple laser etching, connect multiple perovskite cells in series into components, block conduction, and thus form a separate module. The serial interconnection structure limits the output current of the solar cell and increases the output voltage, thereby improving the overall performance of the cell.

[0003] The existing technology (such as Chinese patent CN116931254A) provides a solution, but its process design still has significant limitations. Figure 1 As shown in the figure, this technology relies on two large modules (module 01 and module 02) to complete the laser scribing process, in which the optical path between module 01 and module 02 is designed as a complex "8 in 8 out" structure. The "8 in 8 out" optical path design between module 01 and module 02 is highly dependent on the precise coordination of multiple groups of optical components. Once a component is damaged or the quality of the optical path is affected by external factors such as dust, the entire system needs to be shut down and the optical path needs to be refocused. Due to the involvement of multiple channels and complex alignment relationships, the focusing process is time-consuming and technically demanding, which greatly increases the difficulty of maintenance. In addition, an integral large refractive prism is used as the core optical element for beam control and focusing. This design requires focusing to be achieved by moving the entire refractive prism. Due to the large size and heavy weight of the prism, the moving process is not only complicated to operate, but also once the prism is damaged or the optical path is offset, the optical path of the entire system needs to be recalibrated, further exacerbating the maintenance burden. Summary of the invention

[0004] In order to solve the technical problem in the prior art that multiple optical paths are used in parallel, resulting in a complex structure and inconvenient maintenance, the present invention proposes a laser scribing mechanical spectrometer and equipment.

[0005] The technical solution adopted by the present invention is:

[0006] The present invention proposes a laser scribing mechanical spectrometer, comprising: a module platform, and a combined spectrometer unit installed on the module platform; wherein the combined spectrometer unit comprises:

[0007] An incident beam splitting unit, used for receiving the incident laser and splitting the incident laser into multiple laser beams;

[0008] The multi-stage transfer light splitting unit receives the laser from the incident light splitting unit step by step, and the number of the transfer light splitting units increases step by step;

[0009] The multiple emission units respectively receive the laser light separated by the last stage transfer light separation unit and convert the laser light into emission laser light, and the spacing between the emission laser light emitted by the multiple emission units is adjustable.

[0010] Specifically, the multi-stage transfer splitting unit includes:

[0011] Two primary transfer splitting units respectively receive the two laser beams distributed by the incident splitting unit and split the two laser beams into four laser beams;

[0012] The four secondary transfer and splitting units respectively receive the four laser beams allocated by the primary transfer and splitting unit, and split the four laser beams into eight laser beams again.

[0013] Specifically, the incident light splitting unit includes:

[0014] The incident transflective device is installed close to one side of the module platform and divides the incident laser into refracted laser and transmitted laser, wherein the refracted laser corresponds to the multi-stage transfer splitting unit;

[0015] The first optical device is installed close to the other side of the module platform, and reflects or refracts the transmitted laser incident on the transflective device to the multi-stage transfer splitting unit.

[0016] Specifically, the output unit includes:

[0017] Polarization splitting module, which takes over the last stage of the multi-stage relay splitting unit to split a laser beam and divide the laser into P light and S light;

[0018] The sliding reflection module can slide and adjust the position on the S light reflection path of the polarization beam splitting module, and reflect the S light of the polarization beam splitting module to form an outgoing laser.

[0019] The present invention further comprises: a Y-axis driving module driving the module platform to move linearly along the Y-axis, and the output laser of the output unit is perpendicular to the Y-axis.

[0020] Furthermore, the sliding reflection module includes:

[0021] Electric slide, slidingly mounted on the module platform;

[0022] A focusing mirror, mounted on one end of the electric slide close to the polarization beam splitting module;

[0023] The second optical device is installed at one end of the electric slide away from the polarization splitting module.

[0024] Specifically, the module platform includes: a backplane, and an integrated board slidably mounted on the backplane, a Z-axis driving module driving the integrated board to slide, an incident spectrometer unit mounted on the backplane, a multi-stage transfer spectrometer unit and an output unit mounted on the integrated board, and the Z-axis driving module slides to adjust the position of the integrated board to change the focal length of the optical path.

[0025] Furthermore, the incident transflective device of the incident light splitting unit is installed on one side of the back plate near the top, and the first optical device is installed on the other side of the back plate near the top. The refracted laser of the incident transflective device and the refracted laser of the first optical device are emitted downward along the Z axis.

[0026] Furthermore, two assembly boards are arranged near the two sides of the integrated board, the multi-stage transfer splitting unit is respectively installed on the two assembly boards, the polarization splitting module of the output unit is installed on the said assembly boards, and the sliding reflection module of the output unit is installed on the back panel and located between the two assembly boards.

[0027] Furthermore, the transmission laser outlet of the incident transflective device is provided with an aperture, and the laser entrance of the first optical device is also provided with an aperture.

[0028] Furthermore, a wave plate capable of adjusting the beam power is provided at the laser inlet of the incident light splitting unit and / or the output unit.

[0029] The present invention also provides a device, comprising the above-mentioned laser scribing mechanical spectrometer.

[0030] Compared with the prior art, the present invention has the following advantages:

[0031] 1. This device realizes the laser beam splitting function based on a purely mechanical splitting architecture, decomposing a single incident laser into multiple controllable outgoing laser beams, and realizing flexible adjustment of the outgoing laser spacing.

[0032] 2. It avoids the limitations of traditional spectrometers due to fixed spacing or a single optical path, allowing the device to maintain efficient and accurate operation in a variety of laser scribing scenarios.

[0033] 3. The reflector adjustments of the eight-way optical devices are independent. If the optical devices are dirty or damaged, just replace the corresponding optical devices;

[0034] 4. Optical devices such as polarization beam splitter, focusing mirror, electric slide, and reflector are integrated on an integrated board. Once a device is damaged, the integrated board can be directly disassembled and replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0036] Figure 1 It is a structural schematic diagram of the prior art;

[0037] Figure 2 It is a front view of an embodiment of the present invention;

[0038] Figure 3 is a side view of an embodiment of the present invention;

[0039] Figure 4 is a schematic diagram of a three-dimensional structure in an embodiment of the present invention;

[0040] 12. Backplane; 13. Integrated board; 14. Assembly board;

[0041] 21. Incident transflective device; 22. First optical device; 23. Aperture; 24. Wave plate;

[0042] 31. Primary transfer and splitting unit; 32. Secondary transfer and splitting unit;

[0043] 41. Polarization beam splitting module; 42. Sliding reflection module; 421. Electric slide table; 422. Focusing lens; 423. Second optical device;

[0044] 5. Y-axis drive module;

[0045] 6. Z-axis drive module. DETAILED DESCRIPTION

[0046] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0047] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0048] Prior art CN116931254A uses two large modules (such as Figure 1As shown in the figure, the laser scribing process is completed by using modules 01 and 02, where the optical path between modules 01 and 02 is designed as a complex "8 in 8 out" structure. The "8 in 8 out" optical path design between modules 01 and 02 is highly dependent on the precise coordination of multiple groups of optical components. Once a component is damaged or the optical path quality is affected by external factors such as dust, the entire system needs to be shut down and the optical path needs to be refocused. Due to the involvement of multiple channels and complex alignment relationships, the focusing process is time-consuming and technically demanding, which greatly increases the difficulty of maintenance.

[0049] In this regard, Figure 2 , Figure 4 As shown, the present invention proposes a laser scribing mechanical spectrometer, comprising: a module platform and a combined spectrometer unit. The module platform is used to install the combined spectrometer unit, provide stable support and positioning functions, and ensure that the components of the combined spectrometer unit can accurately cooperate and operate according to the design requirements. The specific form and connection method of the module platform can be flexibly adjusted according to the actual application scenario to adapt to different installation environments or laser scribing requirements.

[0050] The combined spectroscopic unit mainly includes: an incident spectroscopic unit, a multi-stage transfer spectroscopic unit and an output unit; the incident spectroscopic unit is the starting end of the entire spectroscopic system, which is used to receive the incident laser and divide it into multiple laser beams through a preset spectroscopic structure (such as a diffraction grating or a prism array). The multi-stage transfer spectroscopic unit is composed of N stages (N≥2) of spectroscopic modules, and each stage of the transfer unit contains an independent optical element (such as a lens group or a reflector array). The transfer spectroscopic units of each stage increase the spectroscopic density step by step. Through this geometrically increasing spectroscopic path design, the number of output laser beams at each stage increases exponentially. The multiple output units are specifically multiple independent output units, each of which can include an independent focusing lens group and a displacement adjustment mechanism, so that an adjustable spacing range can be formed between adjacent output lasers by adjusting the displacement adjustment mechanism.

[0051] This device realizes the laser beam splitting function based on a purely mechanical splitting architecture, decomposing a single incident laser into multiple controllable outgoing lasers, and realizing flexible adjustment of the outgoing laser spacing. An orderly laser splitting and transmission link is formed between the incident splitting unit, the multi-stage transfer splitting unit, and the outgoing unit. This structural design avoids the limitations of traditional splitting devices caused by fixed spacing or a single optical path, allowing the device to maintain efficient and accurate operation in a variety of laser scribing scenarios. In addition, the modular component design can realize the rapid location and replacement of faulty units, simplifying the maintenance process.

[0052] In a further embodiment, the multi-stage transfer splitting unit of the device adopts a step-by-step multiplication splitting structure design, specifically including:

[0053] Two primary transfer splitting units 31 receive two laser beams split by the incident splitting unit respectively, and further split the single laser beam into two beams, thus finally forming four laser beams;

[0054] There are four secondary transfer spectrometers 32, each of which receives a single laser beam split by the primary transfer spectrometer 31, and splits the laser beam into two again through an independent spectrometer element (such as a microlens array or a diffraction grating), thereby realizing the output of eight laser beams.

[0055] Through the step-by-step multiplication of the splitting path design, the splitting density of each transfer unit increases geometrically, ensuring that the number of laser beams expands exponentially with the number of levels. Each transfer unit adopts a modular layout to support independent calibration and maintenance while maintaining the consistency of optical path transmission.

[0056] In a further embodiment, the specific structure of the incident light splitting unit includes an incident transflective device 21 and a first optical device 22;

[0057] The incident transflective device 21 is installed on one side of the module platform, close to the incident position of the incident laser. Its main function is to receive the incident laser and decompose it into refracted laser and transmitted laser. Among them, the refracted laser is directly transmitted to the multi-stage transfer splitting unit as the basic part of the subsequent splitting processing; while the transmitted laser penetrates the incident transflective device 21, continues to propagate in the original direction, and is then reflected or refracted by the first optical device 22.

[0058] The first optical device 22 is installed on the other side of the module platform, located on the outgoing line path of the transmitted laser of the incident transflective device 21. Its main function is to reflect or refract the transmitted laser generated by the incident transflective device 21, so that its direction can be adjusted and finally transmitted to the multi-stage relay spectrometer. The first optical device 22 enables the transmitted laser to be accurately guided to the receiving position of the multi-stage relay spectrometer to ensure that the direction and energy distribution of the laser beam during the transmission process meet the design requirements. In addition, the angle and installation position of the first optical device 22 can be optimized according to specific application requirements to meet the accuracy and layout requirements of different laser scribing tasks.

[0059] In a further embodiment, the output unit specifically includes a polarization splitting module 41 and a sliding reflection module 42; wherein, the polarization splitting module 41 is located after the last stage of the multi-stage relay splitting unit, and its main task is to receive the laser output by the last stage relay splitting unit 31 and decompose it into two beams of light with different polarization directions, namely, P light and S light.

[0060] P light: refers to the polarized light component parallel to the incident plane, which is usually transmitted directly or subjected to subsequent optical processing according to design requirements.

[0061] S light: refers to the polarized light component perpendicular to the incident plane, which is usually reflected to another optical path for further processing.

[0062] The polarization splitting module 41 uses a polarization splitting device (such as a polarization splitting prism or a polarization beam splitter, specifically a PBS, also known as a polarization beam splitter) to decompose the incident laser using the polarization characteristics of light. The decomposed P light and S light propagate along independent optical paths, wherein the S light is guided to the sliding reflection module 42 to form the final outgoing laser.

[0063] The sliding reflection module 42 is arranged on the S light reflection optical path of the polarization splitting module 41, and its core function is to form an outgoing laser by reflecting the S light and realize the adjustability of the outgoing laser spacing. The sliding reflection module 42 can slide along the predetermined direction on the optical path of the S light, and adjust the outgoing direction and position of the S light after reflection by changing its position, thereby controlling the spacing between the outgoing laser and other laser beams. The sliding adjustment can be achieved by a mechanical device (such as a guide rail and a stepping motor), and the sliding reflection module 42 has built-in optical elements such as a reflector or a reflective prism, which is used to reflect the S light to a predetermined outgoing direction to form an outgoing laser.

[0064] In a further embodiment, the sliding reflection module 42 includes: an electric slide 421, a focusing mirror 422 and a second optical device 423. The electric slide 421 is slidably mounted on the integrated board 13 of the module platform through a slider or a guide rail, and can slide along the Y-axis direction. The electric slide 421 can specifically be driven by an electric drive to achieve precise linear motion through a motor and a transmission mechanism. The focusing mirror 422 is mounted on one end of the electric slide 421 close to the polarization splitting module 41. The focusing mirror 422 adjusts the diameter and divergence angle of the light beam by converging or diverging the S light so that it meets the requirements of subsequent optical path propagation. The second optical device 423 is mounted on one end of the electric slide 421 away from the polarization splitting module 41, and changes the direction of the S light through refraction or reflection, so that it is output at a predetermined angle and position (for example, output downward along the Z-axis direction) to form the final output laser.

[0065] The distance between each light beam is changed by the electric slide 421. If the electric slide 421 adjusts the distance between each light path to be 14-18 mm, then when the distance is 16 mm, the first scribing can produce sub-cells with a distance of 16 mm in width.

[0066] Specifically, the module platform includes a back plate 12, an integrated board 13 and a Z-axis driving module 6; wherein the incident light splitting unit is mounted on the back plate 12, and its position remains fixed to ensure the stable input of the incident laser. The integrated board 13 is a movable part of the module platform, and is mounted on the back plate 12 by sliding (for example, by setting a slider). The integrated board 13 can slide along the Z-axis direction, and a multi-stage transfer light splitting unit and an emission unit are installed thereon. The Z-axis driving module 6 is a power mechanism that drives the integrated board 13 to slide, and can achieve precise control by electric, pneumatic or hydraulic means.

[0067] The optical path focal length adjustment function of the laser scribing mechanical spectrometer is realized through the coordinated work of the back plate 12, the integrated board 13 and the Z-axis drive module 6. The incident spectrometer unit is fixed on the back plate 12, the multi-stage transfer spectrometer unit and the output unit are installed on the slidable integrated board 13, and the Z-axis drive module 6 changes the optical path focal length by adjusting the position of the integrated board 13. This design not only improves the flexibility and adaptability of the device, but also ensures the stability and accuracy of the processing process, meeting the diverse laser scribing needs.

[0068] Specifically, the incident spectroscopic unit includes an incident transflective device 21 and a first optical device 22. The incident transflective device 21 is installed on one side of the back plate 12 near the top. The back plate 12 provides a stable installation platform for the incident transflective device 21, ensuring that it can effectively receive external incident lasers and perform preliminary spectroscopic processing. After the incident transflective device 21 decomposes the incident laser, its refracted laser is emitted downward along the Z axis. The first optical device 22 is installed on the other side of the back plate 12 near the top, and is arranged opposite to the incident transflective device 21. This layout not only makes full use of the space of the back plate 12, but also optimizes the transmission path of the incident laser. The first optical device 22 receives the transmitted laser of the incident transflective device 21. After refraction adjustment, its refracted laser is also emitted downward along the Z axis, maintaining the same directionality as the refracted laser of the incident transflective device 21.

[0069] Two assembly plates 14 are arranged near the two sides of the integrated board 13, and the two assembly plates 14 are located below the incident spectrometer. The multi-stage transfer spectrometer units are respectively installed on the two assembly plates 14, making full use of the space of the assembly plates 14 to ensure the reasonable extension and graded processing of the laser light path. The polarization spectrometer module 41 is installed on the assembly plate 14, and the sliding reflection module 42 is installed on the back plate 12 and is located between the two assembly plates 14. The design of fixing it to the back plate 12 ensures the stability of the installation, and at the same time, it is located between the two assembly plates 14, which is convenient for receiving the laser processed by the polarization spectrometer module 41 and performing the final reflection output.

[0070] By setting two assembly boards 14 on the integrated board 13 and reasonably distributing the multi-stage transfer splitting unit and the polarization splitting module 41, the internal space utilization of the device is optimized. The polarization splitting module 41 moves with the integrated board 13, and combined with the sliding reflection module 42 fixed to the back plate 12, the dynamic adjustment of the optical path and the stable output are achieved, and the subsequent disassembly and maintenance are also convenient.

[0071] Specific as Figure 2 As shown, the two assembly plates 14 are symmetrically arranged, the assembly plate 14 located on the left side has a triangular outline as a whole, and the hypotenuse on the right side of the assembly plate 14 is stepped, wherein each assembly plate 14 is provided with a first-level transit spectrometer unit 31 and two second-level transit spectrometer units 32, the first-level transit spectrometer unit 31 is located at the upper left corner of the assembly plate 14, the two second-level transit spectrometer units 32 are respectively located at the lower side and the right side of the first-level transit spectrometer unit 31, four polarization spectrometer modules 41 are spaced from top to bottom along the stepped hypotenuse on the right side of the assembly plate 14, and the layout of the components on the right assembly plate 14 is symmetrical with the layout of the components on the left assembly plate 14.

[0072] In a preferred embodiment, an aperture 23 is installed at the outlet of the transmitted laser of the incident transflective device 21, and an aperture 23 is also provided at the laser entrance of the first optical device 22. The main function of the aperture 23 is to control the aperture size of the transmitted laser, and to reduce the influence of stray light by limiting the lateral size of the light beam, thereby improving the transmission quality of the light beam. Both apertures 23 can be adjusted according to actual needs, so as to optimize the characteristics of the light beam and adapt to various processing requirements.

[0073] In a preferred embodiment, in order to achieve precise control of the laser power, a wave plate 24 is provided at the laser entrance of the incident light splitting unit and / or the output unit. The wave plate 24 (e.g., a half-wave plate or a quarter-wave plate) controls the beam power by adjusting the polarization state of the laser. The wave plate 24 is usually mounted on a rotating seat, and the polarization direction of the laser is adjusted by rotating the angle of the wave plate 24, thereby changing the intensity of the transmitted or reflected beam. This enables the device to dynamically adjust the output power of the laser according to the processing requirements, thereby improving the flexibility and adaptability of the device.

[0074] like Figure 3As shown, the device specifically also includes a Y-axis driving module 5. The Y-axis driving module 5 is used to drive the module platform to perform linear motion along the Y-axis direction, and is specifically located on the back side of the back plate 12. The laser beam emitted by the emitting unit is at a 90-degree angle to the Y-axis direction, that is, the laser propagation direction is perpendicular to the Y-axis motion direction of the module platform. When the Y-axis driving module 5 drives the module platform to move along the Y-axis, the combined spectroscopic unit installed on the module platform moves synchronously therewith. Since the emitted laser is perpendicular to the Y-axis, the Y-axis motion of the module platform will cause the laser beam to form a straight line marking trajectory along the Y-axis direction on the processing surface. Therefore, by adjusting the motion parameters (such as speed and position) of the Y-axis driving module 5, the length, speed and position of the marking can be accurately controlled to meet the high-precision processing requirements, and at the same time, in conjunction with the electric slide 421, it can be compatible with the marking of sub-cells with various spacings.

[0075] For example, if the Y-axis driving module 5 steps 8mm to draw a line, a sub-cell with a width of 8mm can be drawn; if the Y-axis driving module 5 steps 4mm to draw a line, a sub-cell with a width of 4mm can be drawn. Similarly, the spacing between each optical path is an integer multiple of the width of the sub-cell.

[0076] In a supplementary embodiment, the Y-axis driving module 5 can be installed on the base or supporting structure of the device, and connected to the module platform through a guide mechanism such as a guide rail or a slider to ensure the stability and consistency of the movement direction.

[0077] The Y-axis drive module 5 can be driven electrically, pneumatically or hydraulically, and transmits power to the module platform through a transmission mechanism (such as a lead screw, a gear rack or a linear motor), thereby achieving precise linear motion along the Y-axis.

[0078] In a preferred embodiment, the first optical device 22 and the second optical device 423 may be reflectors, or other optical devices that can deflect the light path.

[0079] In a preferred embodiment, the intermediate light splitting unit and the incident transflective device 21 can both be 1 / 2 transflective mirrors, which can split the light path and divide the energy into 45%-55%. Then, the PBS (i.e., polarization light splitting module 41) plus the wave plate 24 are used to fine-tune the power, and the light path splitting and power adjustment are independent and do not affect each other.

[0080] The present invention also provides a device for laser scribing, comprising the above-mentioned laser scribing mechanical spectrometer.

[0081] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0082] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0083] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0084] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A laser scribing mechanical spectrometer, characterized in that: include: A module platform, and a combined light splitting unit installed on the module platform; wherein the combined light splitting unit comprises: An incident beam splitting unit, used for receiving the incident laser and splitting the incident laser into multiple laser beams; A multi-stage transfer spectrometer unit receives the laser light from the incident spectrometer unit stage by stage, and the number of the transfer spectrometer units increases stage by stage; The multiple emission units respectively receive the laser light separated by the last stage transfer light separation unit and convert the laser light into emission laser light, and the spacing between the emission laser light emitted by the multiple emission units is adjustable.

2. The laser scribing mechanical spectrometer according to claim 1, characterized in that: The multi-stage transfer splitting unit comprises: Two primary transfer light splitting units respectively receive the two laser beams distributed by the incident light splitting unit and split the two laser beams into four laser beams; The four secondary transfer and splitting units respectively receive the four laser beams distributed by the primary transfer and splitting unit, and split the four laser beams into eight laser beams again.

3. The laser scribing mechanical spectrometer according to claim 1, wherein: The incident light splitting unit comprises: An incident transflective device is installed close to one side of the module platform and divides the incident laser into refracted laser and transmitted laser, wherein the refracted laser corresponds to a multi-stage transfer splitting unit; The first optical device is installed close to the other side of the module platform, and reflects or refracts the transmitted laser incident on the transflective device to the multi-stage transfer splitting unit.

4. The laser scribing mechanical spectrometer according to claim 1, wherein: The emission unit comprises: A polarization splitting module, which receives a laser beam from the last stage of the multi-stage transfer splitting unit and splits the laser beam into P light and S light; The sliding reflection module can slide on the S light reflection path of the polarization beam splitting module to adjust its position, and reflect the S light of the polarization beam splitting module to form an outgoing laser.

5. The laser scribing mechanical spectrometer according to claim 1, characterized in that: Also includes: A Y-axis driving module drives the module platform to move linearly along the Y-axis, and the output laser of the output unit is perpendicular to the Y-axis.

6. The laser scribing mechanical spectrometer according to claim 4, characterized in that: The sliding reflection module comprises: Electric slide, slidingly mounted on the module platform; A focusing lens, mounted on one end of the electric slide close to the polarization beam splitting module; The second optical device is installed at one end of the electric slide away from the polarization splitting module.

7. The laser scribing mechanical spectrometer according to any one of claims 1 to 5, characterized in that: The module platform includes: a back plate, and an integrated board slidably mounted on the back plate, a Z-axis driving module driving the integrated board to slide, the incident light splitting unit is mounted on the back plate, the multi-stage transfer light splitting unit and the output unit are mounted on the integrated board, and the Z-axis driving module slides to adjust the position of the integrated board to change the focal length of the optical path.

8. The laser scribing mechanical spectrometer according to claim 7, characterized in that: The incident reflective device of the incident light splitting unit is installed on one side of the back plate near the top, and the first optical device is installed on the other side of the back plate near the top. The refracted laser of the incident reflective device and the refracted laser of the first optical device are emitted downward along the Z axis.

9. The laser scribing mechanical spectrometer according to claim 7, characterized in that: Two assembly boards are arranged near the two sides of the integrated board, the multi-stage transfer splitting unit is respectively mounted on the two assembly boards, the polarization splitting module of the output unit is mounted on the assembly boards, and the sliding reflection module of the output unit is mounted on the back panel and located between the two assembly boards.

10. The laser scribing mechanical spectrometer according to claim 3, characterized in that: The transmission laser outlet of the incident transflective device is provided with an aperture, and the laser entrance of the first optical device is also provided with an aperture.

11. The laser scribing mechanical spectrometer according to claim 1, wherein: The laser inlet of the incident light splitting unit and / or the output unit is provided with a wave plate capable of adjusting the beam power.

12. A device, characterized in that: It comprises the laser scribing mechanical spectrometer as claimed in any one of claims 1 to 11.

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