Silicon carbide crystal ingot taking and processing device

Abstract

The invention discloses a silicon carbide crystal ingot taking and processing device, and particularly relates to the technical field of semiconductor material processing, the silicon carbide crystal ingot taking and processing device comprises a roller conveyor belt, the front side of the upper end of the roller conveyor belt is fixedly connected with a polishing assembly, the right side of the polishing assembly is fixedly connected with a transportation assembly, and the rear part of the transportation assembly is fixedly connected with a transfer assembly. According to the silicon carbide crystal ingot taking and machining device, the first vacuum pump, the second vacuum pump and the transfer assembly are arranged to be matched with one another, so that silicon carbide crystal ingots can be smoothly transferred to the upper end of the conveying assembly from the upper end of the roller conveying belt for temporary waiting; all the assemblies in the conveying assembly conduct preliminary cleaning on the surfaces of the silicon carbide crystal ingots, impurities and dirt attached to the surfaces of the silicon carbide crystal ingots are removed, the surface quality of the silicon carbide crystal ingots is ensured, the silicon carbide crystal ingots are smoothly conveyed into the polishing assembly after preliminary cleaning, subsequent polishing machining is conducted, and the surface smoothness and machining precision of the silicon carbide crystal ingots are further improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor material processing, and in particular to a silicon carbide ingot material taking and processing device. Background Art

[0002] Silicon carbide (SiC) ingot is an important wide bandgap semiconductor material, widely used in high-power electronics, optoelectronics and electronic devices under high temperature and high pressure environments. Silicon carbide ingots usually go through a series of processing steps such as growth, cutting, and polishing to obtain high-quality crystal surfaces and required dimensions. However, due to the high hardness and brittleness of silicon carbide, its processing often presents certain challenges, especially during the cutting and polishing process. How to accurately and efficiently process the ingots to avoid damage to the ingot surface and improve processing efficiency has become an important technical issue.

[0003] In traditional silicon carbide ingot processing, the ingot usually goes through a series of processing steps on a roller. However, due to the large size of silicon carbide ingots and their relatively hard crystal structure, traditional material handling methods often cannot flexibly adjust the direction of the ingot, resulting in uneven force and uneven surface during processing, and may even cause cracks or breakage of the ingot.

[0004] In the prior art, before fine processing such as polishing, the direction and position of the silicon carbide ingot can be flexibly adjusted by rotating the ingot. Specifically, the ingot is first taken out from the roller by rotating. The rotating motion can effectively change the direction of the ingot, avoiding the uneven stress and position error that may be caused by the traditional method of taking the ingot. The rotating material can not only smoothly transfer the ingot from the roller, but also provide a more stable starting state for the next fine processing.

[0005] After taking the material, the ingot is accurately placed on the next roller and transferred by a robot or other automated device. The key to this process is to accurately control the position and direction of the ingot to ensure that the ingot is not damaged during the transfer process and can continue to proceed with subsequent processing operations on the next roller, such as polishing, cutting or crystal surface treatment. Summary of the invention

[0006] The main purpose of the present invention is to provide a silicon carbide ingot material taking and processing device, which can effectively solve the problem of surface damage of the silicon carbide ingot caused by the inflexible material taking direction during the processing.

[0007] To achieve the above object, the technical solution adopted by the present invention is: A silicon carbide ingot material taking and processing device comprises a roller conveyor belt, a polishing assembly is fixedly connected to the front side of the upper end of the roller conveyor belt, a transport assembly is fixedly connected to the right side of the polishing assembly, a transfer assembly is fixedly connected to the rear of the transport assembly, a vacuum pump 2 is fixedly connected to the upper end of the transfer assembly, and a vacuum pump 1 is fixedly connected to the upper end of the vacuum pump 2.

[0008] Preferably, the transfer component includes a connecting plate, the upper end of the connecting plate is fixedly connected to a transmission component, a mating component one is meshed with the left side of the outer surface of the transmission component, a connecting block is slidably connected to the middle of the outer surface of the mating component one, a mating component two is slidably connected to the upper part of the transmission component, a mating component three is arranged on the upper part of the mating component two, and an adjustment component one is fixedly connected to the upper end of the mating component three.

[0009] Preferably, the transmission assembly includes a motor 1, the bottom end of the motor 1 is fixedly connected to the connecting plate, the output end of the connecting plate is fixedly connected to a transmission shaft via a coupling, the outer surface of the transmission shaft is fixedly connected to a bevel gear 1, the upper end of the transmission shaft is fixedly connected to a limiting transmission rod, and the upper end of the limiting transmission rod is fixedly connected to a spring.

[0010] Preferably, the mating component 1 includes a bevel gear 2, the outer surface of the bevel gear 2 cooperates with the outer surface of the bevel gear 1, the left side of the bevel gear 2 is fixedly connected to a rotating rod 1, the middle part of the outer surface of the rotating rod 1 is slidably connected to the connecting block, the left side of the rotating rod 1 is fixedly connected to a bevel gear 3, the left side of the outer surface of the bevel gear 3 is meshed with a bevel gear 4, the middle part of the bevel gear 4 is fixedly connected to a rotating rod 2, the rotating rod 2 is rotatably connected to the front side of the roller conveyor belt, the front part of the rotating rod 2 is wrapped with a transmission belt, the other side of the transmission belt is wrapped with a transmission wheel, and the transmission wheel is fixedly connected to the rear of the transport component.

[0011] Preferably, the second matching component includes a fixing plate, a groove matching with the limiting transmission rod is opened in the middle of the fixing plate, a fixing tube is fixedly connected to the upper end of the fixing plate, and a matching block is fixedly connected to the upper end of the fixing tube.

[0012] Preferably, the mating component three includes a rotating wheel, the bottom of the rotating wheel is in contact with the mating block, the middle of the rotating wheel is rotatably connected to a connecting tube one, the inner cavity of the connecting tube one is slidably connected to the limiting transmission rod, the upper end of the connecting tube one is fixedly connected to a support frame, the bottom of the front and rear sides of the support frame are fixedly connected to suction cups, the upper outer surface of the support frame is fixedly connected to a support block, and the bottom of the support block is fixedly connected to a support rod.

[0013] Preferably, the adjustment component 1 includes a shell 1, the front and rear sides of the shell 1 are fixedly connected with support ears, the rear part of the right side of the shell 1 is fixedly connected with a connecting pipe 2, the middle part of the right side of the shell 1 is fixedly connected with a connecting pipe 3, the front part of the right side of the shell 1 is fixedly connected with a connecting pipe 4, the upper end of the shell 1 is fixedly connected with a solenoid valve, the left and right sides of the solenoid valve are fixedly connected with a connecting pipe 6, the right side of the solenoid valve is fixedly connected with two symmetrically arranged connecting pipes 5, and the inner cavity of the shell 1 is fixedly connected with a sliding component 1.

[0014] Preferably, the sliding component 1 comprises a sliding sheet, the front and rear sides of the sliding sheet are fixedly connected with isolation plates, the middle of the sliding sheet is provided with four ventilation holes, and the left side of the sliding sheet is fixedly connected with an isolation shell.

[0015] Preferably, the transport assembly comprises two supporting legs, and the upper parts of the two supporting legs close to each other are connected to a plurality of rollers for common rotation, and the left sides of the plurality of rollers are fixedly connected to transmission gears, and the rear end of the transmission gears on the left side is fixedly connected to the transmission wheel, and the outer surfaces of the plurality of transmission gears are wound and connected with hinges, the upper parts of the two supporting legs are fixedly connected to guide shells, and the inner cavities of the two guide shells are fixedly connected to a plurality of guide wheels, the left sides of the upper ends of the two guide wheels are commonly fixedly connected to a cleaning assembly, and the left side of the front part of the cleaning assembly is fixedly connected to a sliding assembly 2.

[0016] Preferably, the polishing assembly comprises a second shell, a control terminal is fixedly connected to the left front portion of the second shell, a sliding door is slidably connected to the middle front portion of the second shell, a processing table is fixedly connected to the bottom of the second shell, and an adjustment assembly 2 is fixedly connected to the left side of the second shell; The second adjustment component includes a second motor, the output end of the second motor is fixedly connected to a threaded rod one through a coupling, two sliding rods are fixedly connected to the upper part of the inner cavity of the second shell, the outer surfaces of the two sliding rods are slidably connected to a moving shell, the upper end of the moving shell is fixedly connected to a third motor, the output end of the third motor is fixedly connected to a second threaded rod through a coupling, the outer surface of the second threaded rod is threadedly connected to a moving block, the upper part of the moving block is fixedly connected to a fourth motor, and the output end of the fourth motor is fixedly connected to a polishing cutter head through a coupling.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. By setting vacuum pump 1, vacuum pump 2 and the transfer component to cooperate with each other, the silicon carbide ingot can be smoothly transferred from the upper end of the roller conveyor to the upper end of the transport component for temporary waiting. During the waiting process, the various components inside the transport component will perform preliminary cleaning on the surface of the silicon carbide ingot to remove impurities and dirt attached to its surface to ensure its surface quality. After preliminary cleaning, the silicon carbide ingot will be smoothly sent to the polishing component for subsequent polishing processing to further improve its surface finish and processing accuracy.

[0018] 2. Through the control of motor 1, the limit transmission rod can be accurately driven to rotate, so that the connecting tube 1 is slidably connected to the outer surface of the limit transmission rod to achieve flexible rotation. The connecting tube 1 cooperates with the matching block through the rotating wheel to ensure that the support frame can move up and down during the rotation process. In this way, the height and position of the silicon carbide ingot can be adjusted for more precise surface treatment. At the same time, the spring always applies tension to ensure that the connecting tube 1 keeps moving downward, so that the outer surface of the rotating wheel is always in close contact with the upper end of the matching block, further enhancing the stability and reliability of the entire device, and ensuring the precise matching of parts and components during the processing and a continuously stable working state. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is another perspective overall structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of the overall structure of the transfer assembly of the present invention; Figure 4 It is a schematic diagram of the overall structure of the transmission assembly of the present invention; Figure 5 It is a schematic diagram of the overall structure of the matching component three of the present invention; Figure 6 It is a schematic diagram of the overall structure of the adjustment component of the present invention; Figure 7 It is a sectional view of the overall structure of the sliding assembly of the present invention; Figure 8 It is a schematic diagram of the overall structure of the transport component of the present invention; Fig. 9 It is a schematic diagram of the overall structure of the polishing assembly of the present invention; Fig.10 It is a schematic diagram of the overall structure of the second regulating component of the present invention.

[0020] In the figure: 1, roller conveyor belt; 2, vacuum pump 1; 3, vacuum pump 2; 4, transfer assembly; 41, connecting plate; 42, transmission assembly; 421, motor 1; 422, bevel gear 1; 423, limit transmission rod; 424, spring; 43, matching assembly 1; 431, bevel gear 2; 432, rotating rod 1; 433, bevel gear 3; 434, rotating rod 2; 435, bevel gear 4; 436, transmission belt; 437, transmission wheel; 44, connecting block; 45, matching assembly 2; 451, fixed plate 1; 452, fixed pipe; 453, matching block; 46, matching assembly 3; 461, rotating wheel; 462, connecting pipe 1; 463, support frame; 464, support block; 465, support rod; 466, suction cup; 47, adjustment assembly 1; 471, shell 1; 472, ear; 473, connecting 1. Connecting pipe 2; 474. Connecting pipe 3; 475. Connecting pipe 4; 476. Connecting pipe 5; 477. Solenoid valve; 478. Connecting pipe 6; 479. Sliding assembly 1; 4791. Sliding sheet; 4792. Vent; 4793. Isolation shell; 4794. Isolation plate; 5. Transport assembly; 51. Support leg; 52. Transmission gear; 53. Roller 1; 54. Guide shell; 55. Guide wheel; 56. Cleaning assembly; 57. Sliding assembly 2; 58. Hinge; 6. Polishing assembly; 61. Shell 2; 62. Control end; 63. Adjusting assembly 2; 631. Motor 2; 632. Sliding rod; 633. Threaded rod 1; 634. Moving shell; 635. Motor 3; 636. Threaded rod 2; 637. Motor 4; 638. Moving block; 639. Polishing cutter head; 64. Sliding door; 65. Processing table. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] For example, see Figure 1 and Figure 2 As shown, a silicon carbide ingot material taking and processing device includes a roller conveyor 1, a polishing component 6 is fixedly connected to the front side of the upper end of the roller conveyor 1, a transport component 5 is fixedly connected to the right side of the polishing component 6, a transfer component 4 is fixedly connected to the rear of the transport component 5, a vacuum pump 2 3 is fixedly connected to the upper end of the transfer component 4, and a vacuum pump 1 2 is fixedly connected to the upper end of the vacuum pump 2 3.

[0023] During the implementation of this embodiment, first, the specific parameters of the control unit inside the polishing component 6 are debugged, and then during the process of the roller conveyor 1 moving the silicon carbide ingot, the vacuum pump 1 2 and the vacuum pump 2 3 and the transfer component 4 cooperate, so that the silicon carbide ingot at the upper end of the roller conveyor 1 can be moved to the upper end of the transport component 5 by the internal components of the transfer component 4, and the transport component 5 will deliver the silicon carbide ingot to the designated processing area. During the process of the transport component 5 transporting the silicon carbide ingot, due to the cooperation of the internal components, the surface of the unprocessed silicon carbide ingot can be preliminarily cleaned. After the processing of the silicon carbide ingot inside the polishing component 6 is completed, the operator can make the silicon carbide ingot on the upper end of the transport component 5 close to the polishing component 6 enter the polishing component 6 and clamp the silicon carbide ingot. Then, the polishing component 6 is started again to polish the surface of the silicon carbide ingot to achieve the predetermined smoothness standard.

[0024] Furthermore, by arranging vacuum pump 1 2, vacuum pump 2 3 and transfer assembly 4 to cooperate with each other, the silicon carbide ingot can be smoothly transferred from the upper end of the roller conveyor belt 1 to the upper end of the transport assembly 5 for temporary waiting. During the waiting process, the various components inside the transport assembly 5 will perform preliminary cleaning on the surface of the silicon carbide ingot to remove impurities and dirt attached to its surface to ensure its surface quality. After the preliminary cleaning, the silicon carbide ingot will be smoothly sent to the polishing assembly 6 for subsequent polishing processing to further improve its surface finish and processing accuracy.

[0025] For further information, please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the transfer component 4 includes a connecting plate 41, the upper end of the connecting plate 41 is fixedly connected to a transmission component 42, the left side of the outer surface of the transmission component 42 is meshed with a matching component 1 43, the middle part of the outer surface of the matching component 1 43 is slidably connected to a connecting block 44, the upper part of the transmission component 42 is slidably connected to a matching component 2 45, the upper part of the matching component 2 45 is provided with a matching component 3 46, the upper end of the matching component 3 46 is fixedly connected to an adjusting component 1 47, the transmission component 42 includes a motor 1 421, the bottom end of the motor 1 421 is fixedly connected to the connecting plate 41, the output end of the connecting plate 41 is fixedly connected to a transmission shaft through a coupling, the outer surface of the transmission shaft is fixedly connected to a bevel gear 1 422, the upper end of the transmission shaft is fixedly connected to a limited transmission rod 423, and the upper end of the limited transmission rod 423 is fixedly connected A spring 424 is fixedly connected, and the matching component 43 includes a bevel gear 2 431. The outer surface of the bevel gear 2 431 cooperates with the outer surface of the bevel gear 1 422. A rotating rod 1 432 is fixedly connected to the left side of the bevel gear 2 431. The middle part of the outer surface of the rotating rod 1 432 is slidingly connected to the connecting block 44. A bevel gear 3 433 is fixedly connected to the left side of the rotating rod 1 432. A bevel gear 435 is meshed with the left side of the outer surface of the bevel gear 3 433. The middle part of the bevel gear 435 is fixedly connected to the rotating rod 2 434. The rotating rod 2 434 is rotatably connected to the front side of the roller conveyor belt 1. A transmission belt 436 is wound around the front part of the rotating rod 2 434. A transmission wheel 437 is wound around the other side of the transmission belt 436. The transmission wheel 437 is fixedly connected to the rear part of the transport component 5.

[0026] In this implementation process, the motor 1 421 of the transmission component 42 will be controlled by the control unit inside the polishing component 6, and then the transmission shaft fixedly connected through the coupling at the output end will drive the bevel gear 1 422 fixedly connected to the outer surface to rotate. Subsequently, during the rotation of the bevel gear 1 422, it can be meshed with the bevel gear 2 431 to drive the rotating rod 1 432 to rotate. During the rotation of the rotating rod 1 432, the bevel gear 3 433 fixedly connected at the left end and the bevel gear 4 435 on the outer surface of the rotating rod 2 434 are meshed with each other, so that the transmission belt 436 wrapped around the outer surface of the rotating rod 2 434 can drive the transport component 5 to transport the silicon carbide ingot. The roller conveyor 1 driven by the rear of the transport component 5 smoothly transports the silicon carbide ingot to the polishing component 6, thereby achieving precise surface polishing.

[0027] Further, the motor 421 mentioned above is a relatively mature technical means in the prior art. In this solution, only its transmission function is utilized, and its working principle and circuit connection are not elaborated too much; Through the cooperation between the motor 1 421 in the transmission component 42 and the control unit, precise power transmission can be achieved, ensuring that the various gear systems inside the polishing component 6, the bevel gear 1 422, the bevel gear 2 431, the rotating rod 1 432, the rotating rod 2 434, the bevel gear 3 433, and the bevel gear 4 435 are meshed with each other and rotate in an orderly manner, thereby effectively driving the transportation component 5 to accurately transport the silicon carbide ingot. Driven by the transmission belt 436, the silicon carbide ingot will be stably transported to the roller conveyor belt 1 and finally sent to the polishing component 6, ensuring the smooth transition and precise docking of the silicon carbide ingot during the entire processing process, thereby improving the accuracy and efficiency of surface polishing.

[0028] Embodiment 2: This embodiment achieves the purpose of adsorbing silicon carbide ingots based on Embodiment 1. Figure 5 , Figure 6 and Figure 7 As shown, the matching component 2 45 includes a fixed plate 1 451, a groove 1 matching with the limit transmission rod 423 is opened in the middle of the fixed plate 1 451, a fixed tube 452 is fixedly connected to the upper end of the fixed plate 1 451, and a matching block 453 is fixedly connected to the upper end of the fixed tube 452. The matching component 3 46 includes a rotating wheel 461, the bottom of the rotating wheel 461 is in contact with the matching block 453, and a connecting tube 1 462 is rotatably connected to the middle of the rotating wheel 461. The inner cavity of the connecting tube 1 462 is slidably connected to the limit transmission rod 423, and the upper end of the connecting tube 1 462 is fixedly connected to a support frame 463, and the bottom of the front and rear sides of the support frame 463 are fixedly connected to suction cups 466, the upper outer surface of the support frame 463 is fixedly connected to a support block 464, and the bottom of the support block 464 is fixedly connected to a support rod 465. The adjustment component 1 47 includes a shell 1 471 , the front and rear sides of the shell 471 are fixedly connected with support ears 472, the rear part of the right side of the shell 471 is fixedly connected with a connecting pipe 2 473, the middle part of the right side of the shell 471 is fixedly connected with a connecting pipe 3 474, the front part of the right side of the shell 471 is fixedly connected with a connecting pipe 475, the upper end of the shell 471 is fixedly connected with a solenoid valve 477, the left and right sides of the solenoid valve 477 are fixedly connected with connecting pipes 6 478, the right side of the solenoid valve 477 is fixedly connected with two symmetrically arranged connecting pipes 5 476, the inner cavity of the shell 471 is fixedly connected with a sliding component 1 479, the sliding component 1 479 includes a sliding sheet 4791, the front and rear sides of the sliding sheet 4791 are fixedly connected with isolation plates 4794, the middle part of the sliding sheet 4791 is provided with four vents 4792, and the left side of the sliding sheet 4791 is fixedly connected with an isolation shell 4793.

[0029] During the implementation of this embodiment, the motor 421 will drive the limit transmission rod 423 fixedly connected to the upper end of the transmission shaft to rotate when controlled by the polishing component 6. During the rotation of the limit transmission rod 423, the outer surface of the limit transmission rod 423 is slidably connected to the inner cavity of the connecting tube 462, so that the connecting tube 462 can follow the rotation. During the rotation of the connecting tube 462, the outer surface of the connecting tube 462 is rotatably connected to the rotating wheel 461, and through the cooperation of the rotating wheel 461 and the matching block 453, the support frame 463 fixedly connected to the upper end of the connecting tube 462 can move up and down during the rotation. Furthermore, the other end of the spring 424 is fixedly connected to the inner cavity of the connecting tube 462, so that the spring 424 can always pull the connecting tube 462 downward, so that the rotating wheel 461 can make the outer surface of the rotating wheel 461 tightly attached to the upper end of the matching block 453.

[0030] Furthermore, while the support frame 463 moves up and down, the vacuum pump 1 2 and the vacuum pump 2 3 fixedly connected to the upper end of the support block 464 will be controlled by the polishing assembly 6, so that the vacuum pump 1 2 will blow air into the inner cavity of the connecting pipe 3 474, and the vacuum pump 2 3 will extract air from the input end on the left side of the shell 1 471. When the support frame 463 drops to a certain height by cooperating with the matching block 453, at this time, part of the gas entering from the inner cavity of the connecting pipe 3 474 will be diverted through the solenoid valve 477, and further enter the rear inner cavity of the shell 1 471 through the connecting pipe 5 476 to push the isolation plate 4794 located at the rear, so that the sliding sheet 4791 slides forward, and then blows into the shell 1 47 The gas in the inner cavity 1 will flow into the inner cavity of the connecting pipe 475 along the vent 4792, and then be discharged through the connecting pipe 475, so that the suction cup 466 arranged on the front side puts down the silicon carbide ingot. At the same time, during the displacement of the sliding piece 4791, the gas flow direction in the middle isolation shell 4793 is changed. At this time, the vacuum pump 23 will cooperate with the inner cavity of the shell 1 471 and the connecting pipe 2 473 to suck the silicon carbide ingot. Then, under the control of the motor 1 421, the silicon carbide ingot is sucked and moved. After the rotation reaches a certain position, the control unit inside the polishing assembly 6 will close the electromagnetic valve 477, so that the airflow is converted, and the silicon carbide ingot is moved reciprocatingly. Through the control of motor 421, the limit transmission rod 423 can be accurately driven to rotate, so that the connecting tube 462 is slidably connected to the outer surface of the limit transmission rod 423 to achieve flexible rotation. The connecting tube 462 cooperates with the matching block 453 through the rotating wheel 461 to ensure that the support frame 463 can move up and down during the rotation process, so that the height and position of the silicon carbide ingot can be adjusted for more accurate surface treatment. At the same time, the spring 424 always applies a pulling force to ensure that the connecting tube 462 keeps moving downward, so that the outer surface of the rotating wheel 461 is always in close contact with the upper end of the matching block 453, further enhancing the stability and reliability of the entire device and ensuring the precise matching of parts and components during the processing and a continuously stable working state.

[0031] Embodiment 3: This embodiment further processes the silicon carbide ingot based on Embodiment 1 and Embodiment 2. Figure 8 As shown, the transport assembly 5 includes two supporting legs 51, and the upper parts of the two supporting legs 51 that are close to each other are connected to a plurality of rollers 53 for common rotation, and the left sides of the plurality of rollers 53 are fixedly connected to transmission gears 52, and the rear end of the left transmission gear 52 is fixedly connected to the transmission wheel 437, and the outer surfaces of the plurality of transmission gears 52 are wrapped with hinges 58, and the upper parts of the two supporting legs 51 are fixedly connected to guide shells 54, and the inner cavities of the two guide shells 54 are fixedly connected to a plurality of guide wheels 55, and the upper left sides of the two guide wheels 55 are commonly fixedly connected to a cleaning assembly 56, and the front left side of the cleaning assembly 56 is fixedly connected to a sliding assembly 2 57.

[0032] In this implementation process, after the suction cup 466 places the silicon carbide ingot on the plurality of rollers 53, the rear part of the transmission gear 52 at the rear left side of the support leg 51 is fixedly connected to the transmission wheel 437, and the transmission gear 52 is driven to rotate during the rotation of the transmission wheel 437. During the rotation of the left transmission gear 52, the plurality of rollers 53 are driven to transport the silicon carbide ingot through the hinge 58. During the transportation of the silicon carbide ingot, the guide wheels 55 at the front and rear sides will calibrate the silicon carbide ingot. Subsequently, the cleaning assembly 56 The surface of the silicon carbide ingot will be cleaned to ensure a higher quality surface treatment effect in the subsequent polishing process. Since the front part of the cleaning component 56 is provided with a sliding component 2 57, and there are silicon carbide ingots lined up on the right, the silicon carbide ingot on the left will be continuously cleaned. After the silicon carbide ingot is polished inside the polishing component 6, the polishing component 6 will release the silicon carbide ingot on the far left, and then process the next silicon carbide ingot. At this time, the operator only needs to fix the silicon carbide ingot transported to the inside of the polishing component 6; It should be noted that the cleaning assembly 56 is composed of two cleaning rollers and two cleaning plates. In this solution, those skilled in the art only need to rotate the two cleaning rollers to achieve the cleaning of the silicon carbide ingot, which will not be elaborated in this solution. Furthermore, the sliding assembly 2 57 is composed of an electric telescopic rod and a stop rod, and the electric telescopic rod is controlled by the control unit inside the polishing assembly 6 to determine whether to release the silicon carbide ingot into the inner cavity of the polishing assembly 6, and the electric telescopic rod is a conventional technical means in the prior art, and will not be elaborated in this solution; After the silicon carbide ingot is accurately placed on the roller 1 53 by the suction cup 466, the fixed connection between the transmission gear 52 and the transmission wheel 437 can effectively drive the transmission gear 52 to rotate, thereby driving the roller 1 53 through the hinge 58 to realize the smooth transportation of the silicon carbide ingot. During the transportation process, the front and rear guide wheels 55 can accurately calibrate the silicon carbide ingot to ensure its stable position. The cleaning component 56 thoroughly cleans the surface of the silicon carbide ingot during transportation to ensure high-quality surface treatment effects in the subsequent polishing process. Since the sliding component 2 57 is provided at the front of the cleaning component 56 and there are silicon carbide ingots queued on the right side, the ingots on the left will continue to be cleaned, thereby ensuring that each ingot is fully cleaned before entering the polishing component 6. Finally, the polishing component 6 will release the leftmost silicon carbide ingot after completing polishing. The operator only needs to fix the new ingot, making the entire processing process efficient, continuous and stable.

[0033] For further information, please refer to Fig.10 As shown, the polishing component 6 includes a second shell 61, a control end 62 is fixedly connected to the left front portion of the second shell 61, a sliding door 64 is slidably connected to the middle front portion of the second shell 61, a processing table 65 is fixedly connected to the bottom of the second shell 61, and an adjustment component 63 is fixedly connected to the left side of the second shell 61; the adjustment component 63 includes a second motor 631, an output end of the second motor 631 is fixedly connected to a threaded rod 1 633 through a coupling, two sliding rods 632 are fixedly connected to the upper part of the inner cavity of the second shell 61, and a moving shell 634 is slidably connected to the outer surfaces of the two sliding rods 632, a motor three 635 is fixedly connected to the upper end of the moving shell 634, a threaded rod two 636 is fixedly connected to the output end of the motor three 635 through a coupling, a moving block 638 is threadedly connected to the outer surface of the threaded rod two 636, a motor four 637 is fixedly connected to the upper part of the moving block 638, and a polishing cutter head 639 is fixedly connected to the output end of the motor four 637 through a coupling.

[0034] In this implementation process, when the silicon carbide ingot is fastened to the upper end of the processing table 65, the operator is required to open the sliding doors 64 on both sides and fix the silicon carbide ingot, and further debug the parameters in the control end 62 to make each component work normally. After the operator fixes the silicon carbide ingot, at this time, motor 2 631, motor 3 635 and motor 4 637 will operate according to the parameters debugged by the operator, and drive threaded rod 1 633 to move the movable shell 634 left and right, and motor 3 635 will drive threaded rod 2 636 to rotate during the rotation process, so that the movable block 638 moves up and down, and then, the polishing head 639 will polish the silicon carbide ingot to ensure that the silicon carbide ingot achieves the expected accuracy and surface quality during the polishing process.

[0035] After the operator opens the sliding doors 64 on both sides and fixes the silicon carbide ingot, he can adjust the parameters of the control terminal 62 to make each component operate as needed. Motor 2 631, motor 3 635 and motor 4 637 work according to the adjusted parameters, driving threaded rod 1 633 to move the movable shell 634 left and right, while motor 3 635 drives threaded rod 2 636 to rotate, thereby moving the movable block 638 up and down, ensuring that the silicon carbide ingot is accurately positioned and height adjusted during the polishing process, thereby ensuring that the surface treatment of the ingot achieves the expected accuracy and high quality.

[0036] It should be further explained that the control terminal 62 mentioned above is a very mature prior art. In this solution, only the control function is used, and its working principle will not be elaborated in detail.

[0037] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A silicon carbide ingot material processing device, comprising a roller conveyor belt (1), characterized in that: The front side of the upper end of the roller conveyor belt (1) is fixedly connected to a polishing assembly (6), the right side of the polishing assembly (6) is fixedly connected to a transport assembly (5), the rear part of the transport assembly (5) is fixedly connected to a transfer assembly (4), the upper end of the transfer assembly (4) is fixedly connected to a second vacuum pump (3), and the upper end of the second vacuum pump (3) is fixedly connected to a first vacuum pump (2); The transfer assembly (4) comprises a connecting plate (41), the upper end of which is fixedly connected to a transmission assembly (42), a mating assembly 1 (43) meshingly engaged with the left side of the outer surface of the transmission assembly (42), a connecting block (44) slidably connected to the middle of the outer surface of the mating assembly 1 (43), a mating assembly 2 (45) slidably connected to the upper part of the transmission assembly (42), a mating assembly 3 (46) disposed on the upper part of the mating assembly 2 (45), and an adjusting assembly 1 (47) fixedly connected to the upper end of the mating assembly 3 (46).

2. The silicon carbide ingot material taking and processing device according to claim 1, characterized in that: The transmission assembly (42) comprises a motor 1 (421), the bottom end of the motor 1 (421) is fixedly connected to the connecting plate (41), the output end of the connecting plate (41) is fixedly connected to a transmission shaft via a coupling, the outer surface of the transmission shaft is fixedly connected to a bevel gear 1 (422), the upper end of the transmission shaft is fixedly connected to a limited transmission rod (423), and the upper end of the limited transmission rod (423) is fixedly connected to a spring (424).

3. The silicon carbide ingot material taking and processing device according to claim 1, characterized in that: The mating component 1 (43) comprises a bevel gear 2 (431), the outer surface of the bevel gear 2 (431) and the outer surface of the bevel gear 1 (422) mutually cooperate with each other, the left side of the bevel gear 2 (431) is fixedly connected to a rotating rod 1 (432), the middle part of the outer surface of the rotating rod 1 (432) is slidably connected to the connecting block (44), the left side of the rotating rod 1 (432) is fixedly connected to a bevel gear 3 (433), the left side of the outer surface of the bevel gear 3 (433) is meshed with a bevel gear 4 (435), the middle part of the bevel gear 4 (435) is fixedly connected to a rotating rod 2 (434), the rotating rod 2 (434) is rotatably connected to the front side of the roller conveyor belt (1), the front part of the rotating rod 2 (434) is wound with a transmission belt (436), the other side of the transmission belt (436) is wound with a transmission wheel (437), and the transmission wheel (437) is fixedly connected to the rear part of the transport component (5).

4. The silicon carbide ingot material taking and processing device according to claim 2, characterized in that: The second mating component (45) comprises a fixing plate (451), a groove (451) is provided in the middle of the fixing plate (451) and is mating with the limit transmission rod (423), a fixing tube (452) is fixedly connected to the upper end of the fixing plate (451), and a mating block (453) is fixedly connected to the upper end of the fixing tube (452).

5. The silicon carbide ingot material taking and processing device according to claim 4, characterized in that: The mating component three (46) comprises a rotating wheel (461), the bottom of the rotating wheel (461) is fitted with the mating block (453), the middle of the rotating wheel (461) is rotatably connected to a connecting tube one (462), the inner cavity of the connecting tube one (462) is slidably connected to the limit transmission rod (423), the upper end of the connecting tube one (462) is fixedly connected to a support frame (463), the bottoms of the front and rear sides of the support frame (463) are fixedly connected to suction cups (466), the upper part of the outer surface of the support frame (463) is fixedly connected to a support block (464), and the bottom of the support block (464) is fixedly connected to a support rod (465).

6. The silicon carbide ingot material taking and processing device according to claim 1, characterized in that: The regulating component 1 (47) comprises a shell 1 (471), the front and rear sides of the shell 1 (471) are fixedly connected with supporting ears (472), the rear right side of the shell 1 (471) is fixedly connected with a connecting pipe 2 (473), the middle right side of the shell 1 (471) is fixedly connected with a connecting pipe 3 (474), the front right side of the shell 1 (471) is fixedly connected with a connecting pipe 4 (475), the upper end of the shell 1 (471) is fixedly connected with a solenoid valve (477), the left and right sides of the solenoid valve (477) are fixedly connected with a connecting pipe 6 (478), the right side of the solenoid valve (477) is fixedly connected with two symmetrically arranged connecting pipes 5 (476), and the inner cavity of the shell 1 (471) is fixedly connected with a sliding component 1 (479).

7. The silicon carbide ingot material taking and processing device according to claim 6, characterized in that: The sliding assembly 1 (479) comprises a sliding sheet (4791), the front and rear sides of the sliding sheet (4791) are fixedly connected to isolation plates (4794), the middle of the sliding sheet (4791) is provided with four ventilation holes (4792), and the left side of the sliding sheet (4791) is fixedly connected to an isolation shell (4793).

8. The silicon carbide ingot material taking and processing device according to claim 3, characterized in that: The transport assembly (5) comprises two supporting legs (51), the upper parts of the two supporting legs (51) being close to each other are connected to a plurality of rollers (53) for rotation, the left sides of the plurality of rollers (53) are fixedly connected to a transmission gear (52), the rear end of the transmission gear (52) on the left side is fixedly connected to a transmission wheel (437), the outer surfaces of the plurality of transmission gears (52) are connected by a hinge (58), the upper parts of the two supporting legs (51) are fixedly connected to a guide shell (54), the inner cavities of the two guide shells (54) are fixedly connected to a plurality of guide wheels (55), the upper left sides of the two guide wheels (55) are fixedly connected to a cleaning assembly (56), and the front left side of the cleaning assembly (56) is fixedly connected to a sliding assembly (57).

9. The silicon carbide ingot material taking and processing device according to claim 1, characterized in that: The polishing assembly (6) comprises a second housing (61), a control terminal (62) being fixedly connected to the left front portion of the second housing (61), a sliding door (64) being slidably connected to the middle front portion of the second housing (61), a processing table (65) being fixedly connected to the bottom of the second housing (61), and an adjustment assembly (63) being fixedly connected to the left side of the second housing (61); The second adjustment component (63) includes a second motor (631), the output end of the second motor (631) is fixedly connected to a threaded rod (633) via a coupling, two sliding rods (632) are fixedly connected to the upper part of the inner cavity of the second shell (61), the outer surfaces of the two sliding rods (632) are slidably connected to a moving shell (634), the upper end of the moving shell (634) is fixedly connected to a third motor (635), the output end of the third motor (635) is fixedly connected to a threaded rod (636) via a coupling, the outer surface of the threaded rod (636) is threadedly connected to a moving block (638), the upper part of the moving block (638) is fixedly connected to a fourth motor (637), and the output end of the fourth motor (637) is fixedly connected to a polishing cutter head (639) via a coupling.

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