Pipeline disassembling and assembling tool

Abstract

The invention discloses a pipeline disassembling and assembling tool, and relates to the field of semiconductor manufacturing equipment, the pipeline disassembling and assembling tool comprises two clamp arms, the clamp arms are provided with rotating parts, the two clamp arms are in cross rotating connection through the rotating parts, a handle area is formed on one side of the rotating parts of the two clamp arms, and a working area is formed on the other side of the rotating parts of the two clamp arms; the clamping assembly comprises two clamping pieces which are connected with the tong arms on one side of the working area respectively, clamping parts are arranged on the clamping pieces respectively, the clamping parts and the corresponding tong arms are arranged in a right-angle mode, and in the state of clamping the pipeline, the pipeline is parallel to the central axis of the two tong arms; the detection part is arranged at the tail end of the clamping piece, and the detection part is configured to be in contact with the inner wall of a process pipe of the furnace pipe equipment when the pipeline is parallel to the process pipe of the furnace pipe equipment; and the base is vertical to the central axis. And under the mutual cooperation of the base and the detection part, the installation precision of the pipeline is improved, so that the perpendicularity and parallelism of pipeline installation are ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing equipment, and in particular to a pipeline disassembly and assembly tool. Background Art

[0002] Furnace tube equipment is the main equipment for current semiconductor diffusion, oxidation, annealing and other processes. The accuracy and uniformity of the reaction gas flow control are the key performance indicators of the equipment.

[0003] In the furnace tube equipment, the reaction gas passes through the air inlet pipe from the gas path system and finally enters the reaction chamber. There is a heating furnace outside the reaction chamber to heat the reaction chamber.

[0004] The air inlet pipe is generally made of quartz, and the bottom of the air inlet pipe is placed in an adapter made of metal. Furnace tube equipment usually selects different numbers and sizes of air inlet pipes according to different process steps. However, since the air inlet pipes are relatively long and heavy, it is difficult to install them in the adapter. In addition, when multiple air inlet pipes are installed at the same time, it is difficult to ensure the verticality and parallelism of each air inlet pipe. Once there is an error in the installation operation, any one or more air inlet pipes may be tilted, which is very easy to rub against the reaction chamber to produce particles, affecting the process. Or the air inlet pipe may tilt and hit the wafer boat or wafer, causing it to break, affecting process safety.

[0005] At present, the installation and removal of the intake pipe is usually done manually. Because it is a manual operation, the heating furnace must be turned off during the operation to cool the reaction chamber to room temperature. Then the personnel wear professional gloves and install and remove the intake pipe by hand. This method has two very big disadvantages: first, the heating furnace must be cooled down in advance before installation, which is very time-consuming, because it takes time to cool down the heating furnace, and it takes time to heat up again, and the time is very long, usually two hours; second, the installation and removal are completely dependent on manual operation, and the installation and removal accuracy is difficult to guarantee, and collisions are prone to occur. Summary of the invention

[0006] The present application provides a pipeline disassembly and assembly tool, which is beneficial to the installation accuracy of the pipeline.

[0007] This application solves the above technical problems through the following technical solutions:

[0008] A pipeline disassembly and assembly tool, used for disassembling or installing pipelines in furnace pipe equipment, comprising:

[0009] Two clamp arms, each of which has a rotating part, the two clamp arms are cross-rotatably connected through the rotating parts, a handle area is formed on one side of the rotating parts of the two clamp arms, and a working area is formed on the other side;

[0010] At least one clamping assembly, the clamping assembly comprising two clamping members, each connected to a clamp arm on one side of the working area, the clamping members are respectively provided with a clamping portion, the clamping portion is arranged at a right angle to the corresponding clamp arm, when the two clamping members are closed, the clamping portion forms a clamping area matching the pipeline to clamp the pipeline, and the central axes of the two clamp arms are parallel to the pipeline;

[0011] a detection part, disposed at a distal end of the clamping member, the detection part being configured to: contact with an inner wall of the process pipe of the furnace tube device when the pipeline is parallel to the process pipe of the furnace tube device;

[0012] The base is configured such that: during the installation of the pipeline, the base cooperates with the reference part of the furnace tube equipment, and the base is perpendicular to the central axis to ensure the verticality of the pipeline installation.

[0013] The positive and progressive effect of the present application is that the clamping part of the clamping member is arranged at right angles to the clamp arm, which is convenient for clamping the pipeline extending in the vertical direction. The base cooperates with the reference part of the furnace tube equipment to provide an installation reference for the installation of the pipeline, thereby ensuring the verticality of the pipeline installation. After the pipeline is inserted into the adapter of the furnace tube equipment, if the pipeline is parallel to the inner wall of the furnace tube equipment, the detection part will contact the inner wall of the process tube of the furnace tube equipment. By clamping at multiple positions of the pipeline, it is checked whether the detection part is in contact with the inner wall of the process tube, and the parallelism of the pipeline can be detected, thereby facilitating the adjustment of the parallelism of the pipeline. The parallelism of the pipeline can be adjusted by adjusting the bolts of the adapter. With the mutual cooperation of the base and the detection part, it is beneficial to improve the installation accuracy of the pipeline to ensure the verticality and parallelism of the pipeline installation, and the pipeline is not easy to collide during the installation process. In addition, the pipeline disassembly tool can be used to disassemble the pipeline at high temperature (100-200℃). Human hands will not directly contact the pipeline, and there is no need to wait for the pipeline to cool to room temperature, which is conducive to improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the closed state structure of the pipeline disassembly and assembly tool of Example 1 of the present application;

[0015] Figure 2 This is a schematic diagram of the structure of the pipeline disassembly and assembly tool in the open state of Example 1 of the present application;

[0016] Figure 3 This is a schematic diagram of the use status of the pipeline disassembly and assembly tool of Example 1 of the present application in the furnace tube equipment;

[0017] Figure 4 It is a schematic diagram of the cooperation between the base of the pipeline disassembly and assembly tool and the reference part of the furnace pipe equipment in Example 1 of the present application;

[0018] Figure 5 This is a schematic structural diagram of a clamping member of a pipeline disassembly tool according to Example 1 of the present application;

[0019] Figure 6 This is a schematic structural diagram of the clamp arm of the pipeline disassembly tool of Example 1 of the present application;

[0020] Figure 7 This is a structural schematic diagram of a base of a pipeline disassembly tool according to Example 1 of the present application;

[0021] Figure 8 This is a schematic diagram of the structure of the clamp arm and clamping assembly of the pipeline disassembly and assembly tool of Example 2 of the present application. DETAILED DESCRIPTION

[0022] The present application is further described below by way of examples, but the present application is not limited to the scope of the examples.

[0023] Example 1

[0024] like Figure 1-Figure 4 As shown, this embodiment provides a pipeline disassembly and assembly tool for disassembling or installing a pipeline 410 in a furnace pipe device 400. The pipeline disassembly and assembly tool includes two clamp arms 200, a clamp assembly, a detection portion 130 and a base 300. The clamp arm 200 has a rotating portion 220, and the two clamp arms 200 are cross-rotatably connected through the rotating portion 220. A handle area 240 is formed on one side of the rotating portion 220 of the clamp arm 200, and a working area 230 is formed on the other side. The clamp assembly includes two clamp members 100, which are respectively connected to the clamp arms 200 on one side of the working area 230. A clamping portion 110 is respectively provided on each clamp member 100, and the clamping portion 110 is arranged at a right angle to the corresponding clamp arm 200. When the clamp member 100 is closed, the clamping portion 110 forms a clamping area 120 matching the pipeline 410 to clamp the pipeline 410. When the pipeline 410 is clamped, the pipeline 410 is parallel to the central axis 250 of the two clamp arms 200. The detection part 130 is disposed at the end of the clamp 100, and the detection part 130 is configured to contact the inner wall of the process pipe 420 of the furnace tube equipment 400 when the pipeline 410 is installed to the furnace tube equipment 400 and is parallel to the process pipe 420 of the furnace tube equipment 400. The base 300 is configured to cooperate with the reference part 430 of the furnace tube equipment 400 during the installation of the pipeline 410, and the base 300 is perpendicular to the central axis 250 to ensure the verticality of the installation of the pipeline 410. The central axis 250 is the center line of the rotating part 220 in the vertical direction.

[0025] The clamping portion 110 of the clamping member 100 is arranged at a right angle to the clamp arm 200, so as to facilitate clamping the pipe 410 extending in the vertical direction. The base 300 cooperates with the reference portion 430 of the furnace pipe device 400 to provide an installation reference for the installation of the pipe 410. The pipe 410 is parallel to the central axis 250, and the base 300 is perpendicular to the central axis 250, that is, the pipe 410 is perpendicular to the base 300, thereby ensuring the verticality of the installation of the pipe 410. After the pipeline 410 is inserted into the adapter 440 of the furnace tube device 400, if the pipeline 410 is parallel to the inner wall of the process tube 420 of the furnace tube device 400, the detection unit 130 will contact the inner wall of the process tube 420 of the furnace tube device 400. By clamping at multiple positions of the pipeline 410, it is checked whether the detection unit 130 is in contact with the inner wall of the process tube 420, and the parallelism of the pipeline 410 can be detected, so as to facilitate the adjustment of the parallelism of the pipeline 410. The parallelism of the pipeline 410 can be adjusted by adjusting the bolts of the adapter 440. With the mutual cooperation of the base 300 and the detection unit 130, it is beneficial to improve the installation accuracy of the pipeline 410, so as to ensure the verticality and parallelism of the installation of the pipeline 410, so that the pipeline 410 is not easy to collide during the installation process. In addition, the pipeline 410 can be disassembled at high temperature (eg, 100-200° C.) using a pipeline disassembly tool, and human hands will not directly contact the pipeline 410 , so there is no need to wait for the pipeline 410 to completely cool to room temperature, which is beneficial to improving work efficiency.

[0026] In this embodiment, the clamping member 100 further includes a transition portion 140 . The transition portion 140 is perpendicular to the clamping portion 110 , and the clamping portion 110 is connected to the clamp arm 200 via the transition portion 140 .

[0027] In some embodiments, the adapter portion 140 may not be provided, and the clamping portion 110 is directly connected to the clamp arm 200 .

[0028] Regarding the structure of the clamping member 100 Figure 1 and Figure 5 As shown, in this embodiment, the clamping member 100 is detachably connected to the clamp arm 200. Specifically, the clamping member 100 and the clamp arm 200 can be connected by screws or other detachable means, and the clamping member 100 is easy to replace to adapt to different types of pipelines.

[0029] In other embodiments, the clamping member 100 and the clamp arm 200 may also be configured as an integrated design.

[0030] In this embodiment, the shape of the clamping area 120 formed when the two clamping members 100 are closed is any one of circular, elliptical or square, so that it can adapt to circular pipelines, elliptical pipelines or square pipelines.

[0031] In this embodiment, the hardness of the clamping portion 110 is lower than the hardness of the pipeline 410. During the clamping process, the clamping portion 110 is unlikely to cause damage to the pipeline 410. Specifically, the clamping portion 110 can be made of PTFE material.

[0032] In this embodiment, the hardness of the detection part 130 is lower than the hardness of the process tube 420. During the disassembly and assembly of the pipeline 410, the detection part 130 is not easy to damage the inner wall of the process tube 420.

[0033] Furthermore, the end of the detection part 130 that contacts the inner wall of the process tube 420 is arc-shaped. When the arc-shaped structure contacts the inner wall of the process tube 420, it is not easy to scratch the inner wall of the process tube 420.

[0034] The structure of the clamp arm 200 is as follows: Figure 1 and Figure 6 As shown, in this embodiment, the handle area 240 of the clamp arm 200 is provided with an anti-slip portion 210. Specifically, the anti-slip portion 210 adopts an anti-slip groove design, which is not easy to slip when grasped by hand.

[0035] In this embodiment, the rotating portion 220 of the clamp arm 200 is a circular structure, and an opening 222 for connecting the pin 221 is also provided on the rotating portion 220. The structure of the rotating connection is not limited to this, and other structures that can achieve the rotating connection, such as a hinge structure, etc., can also be used in some embodiments.

[0036] The structure of the base 300 is as follows Figure 1 , Figure 2 , Figure 3 and Figure 7As shown, in this embodiment, the base 300 and the clamp arm 200 are of separate design. The base 300 includes two slots 310 for accommodating the clamp arms 200. The two clamp arms 200 are respectively located in the corresponding slots 310 when closed, and the clamp arms 200 are perpendicular to the base 300. During the pipeline installation process, the base 300 is matched with the reference part 430 of the furnace pipe equipment 400 to ensure that the base 300 is in a horizontal state. The base 300 remains stationary, the two clamp arms 200 are closed, and the pipeline 410 is clamped, so that the handle area of ​​the clamp arm 200 is placed in the slot 310, and the clamp arm 200 slides up and down in the slot 310, and the pipeline 410 is inserted into the adapter 440. Under the limiting effect of the slot 310, the central axis 250 of the two clamp arms 200 and the base 300 are always kept vertical. Since the pipeline 410 is parallel to the central axis 250, the pipeline 410 is perpendicular to the base 300 at this time, thereby ensuring the verticality of the pipeline installation. During the parallelism detection process between the pipeline 410 and the inner wall of the process pipe 420 of the furnace pipe equipment 400, the base 300 is kept stationary, and the clamp arm 200 moves in the vertical direction so that the clamping member 100 clamps different positions of the pipeline 410, and when clamping the pipeline 410, the clamp arm 200 is located in the slot 310 of the base 300, ensuring that the clamp arm 200 does not rotate, and the central axis 250 of the clamp arm 200 is kept perpendicular to the base 300, thereby ensuring the accuracy of the parallelism detection.

[0037] like Figure 4 and Figure 7 As shown, the base 300 includes a stepped portion 320 that matches the reference portion 430 , and the stepped portion 320 cooperates with the reference portion 430 to ensure the horizontality of the base 300 .

[0038] In this embodiment, the reference part 430 is made of ferromagnetic material, and the base 300 is a magnet. The base 300 can be adsorbed on the reference part 430, and the installation process is more convenient and can be completed by one person.

[0039] Example 2

[0040] like Figure 8 As shown, this embodiment is basically the same as the solution in Embodiment 1, except that: the pipeline disassembly and assembly tool includes a plurality of clamping assemblies, each clamping assembly includes two clamping parts 100, and the plurality of clamping assemblies are distributed in the vertical direction. The clamping assembly at the bottom is connected to the clamp arm 200 on one side of the working area, and the adapter of the clamping assembly at the upper part is connected to the clamping assembly at the lower part.

[0041] In some embodiments, the adapter portion may not be provided, and the plurality of clamping assemblies may be directly provided on the clamp arm along the vertical direction.

[0042] By setting up multiple clamping components, on the one hand, it is more stable when clamping the pipeline; on the other hand, during the parallelism detection process, there is no need to move the clamp arm 200. The parallelism of the pipeline can be ensured as long as the detection parts of the two clamping components are in contact with the inner wall of the process pipe, and the parallelism detection is more convenient.

[0043] Although the specific implementation methods of the present application are described above, those skilled in the art should understand that this is only an example, and the protection scope of the present application is defined by the appended claims. Those skilled in the art may make various changes or modifications to these implementation methods without departing from the principles and essence of the present application, but these changes and modifications all fall within the protection scope of the present application.

Claims

1. A pipeline disassembly and assembly tool, used for disassembling or installing pipelines in furnace tube equipment, characterized in that: include: Two clamp arms, each of which has a rotating part, the two clamp arms are cross-rotatably connected through the rotating parts, a handle area is formed on one side of the rotating parts of the two clamp arms, and a working area is formed on the other side; At least one clamping assembly, the clamping assembly comprising two clamping members, respectively connected to the clamp arms on one side of the working area, the clamping members are respectively provided with clamping portions, the clamping portions are arranged at right angles to the corresponding clamp arms, when the two clamping members are closed, the clamping portions form a clamping area matching the pipeline to clamp the pipeline, and the central axes of the two clamp arms are parallel to the pipeline; a detection part, disposed at a distal end of the clamping member, the detection part being configured to: contact with an inner wall of the process pipe of the furnace tube device when the pipeline is parallel to the process pipe of the furnace tube device; The base is configured such that: during the installation of the pipeline, the base cooperates with the reference part of the furnace tube equipment, and the base is perpendicular to the central axis to ensure the verticality of the pipeline installation.

2. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The clamping member is detachably connected to the clamp arm.

3. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The shape of the clamping area is any one of circular, elliptical or square.

4. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The hardness of the clamping portion is lower than the hardness of the pipeline.

5. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The base comprises two slots for accommodating the clamp arms. When the two clamp arms are closed, they are respectively located in the corresponding slots and clamp the base.

6. The pipeline disassembly and assembly tool according to claim 1 or 5, characterized in that: The base includes a stepped portion matching the reference portion, and the base cooperates with the reference portion through the stepped portion.

7. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The handle area of ​​the pliers arm is provided with an anti-slip portion.

8. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The reference part is made of ferromagnetic material, and the base is a magnet.

9. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The hardness of the detection part is lower than the hardness of the process tube.

10. The pipeline disassembly and assembly tool according to claim 1, characterized in that: One end of the detection portion that contacts the inner wall of the process tube is arc-shaped.

11. The pipeline disassembly and assembly tool according to claim 1, characterized in that: The pipeline disassembly and assembly tool comprises a plurality of clamping components, and the plurality of clamping components are distributed along the vertical direction.

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