Photomask turnover device, photomask turnover equipment and photomask transportation method

Abstract

The invention belongs to the technical field of semiconductor production equipment manufacturing, and particularly relates to a photomask turnover device, photomask turnover equipment and a photomask transportation method, the photomask turnover device comprises two turnover assemblies, clamping ends of the two turnover assemblies are oppositely arranged, and a clamping station is arranged between the two clamping ends; the side, facing the clamping station, of the overturning assembly is provided with two clamping jaws. And when the photomask is arranged at the clamping station, the two overturning assemblies respectively clamp the opposite angles of the photomask through clamping jaws, and the clamping jaws are in contact with one side of the photomask. The two overturning assemblies are arranged, the two clamping jaws are arranged on the overturning assemblies, the clamping jaws of the two overturning assemblies clamp a pair of opposite angles of the photomask respectively, and each clamping jaw makes contact with one side of the photomask, so that the photomask is prevented from sliding off from the overturning assemblies, and the photomask is prevented from being damaged by large clamping force.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor production equipment manufacturing, and in particular relates to a mask flipping device, equipment and a transportation method. Background Art

[0002] In the semiconductor manufacturing process, photolithography, etching and oxidation are key technologies in the process. Among them, photolithography is to "print" the circuit pattern onto the mask through light, and the coating, exposure and development of photoresist are its key steps. Among them, the mask (photomask) is an important component in the exposure equipment. In the process of manufacturing semiconductor chips and panels, various specifications of masks are used. The storage and transportation environment of the mask must have a high degree of cleanliness, safety and stability.

[0003] The mask needs to circulate in the equipment, where the mask is usually rectangular. The mask cleaning equipment in the related technology usually clamps the two sides of the mask when the mask is flipped or transmitted by the transmission device or the flipping device, which can easily cause the mask to slip or the clamping force is too large, resulting in economic losses such as fragments.

[0004] Therefore, it is urgent to design a mask flipping device, equipment and transportation method to solve the technical problem that the clamps clamping the two sides of the mask during the circulation process easily cause the mask to slip or break.

[0005] It should be noted that the above information disclosed in this background technology section is only for understanding the background technology of the present application concept, and therefore, it may contain information that does not constitute the prior art. Summary of the invention

[0006] The embodiments of the present disclosure at least provide a mask flipping device, equipment and transportation method.

[0007] In a first aspect, an embodiment of the present disclosure provides a mask flipping device, comprising: two flipping assemblies, the clamping ends of which are arranged opposite to each other, and a clamping station is provided between the two clamping ends; Wherein, the flip assembly has two clamping claws on the side facing the clamping station; Furthermore, when the photomask is placed at the clamping station, the two flipping assemblies clamp the diagonal corners of the photomask through the clamping claws, and the clamping claws are in contact with one side of the photomask.

[0008] In an optional embodiment, a clamping limit groove is formed at the end of the clamping jaw, and the width of the clamping limit groove is consistent with the thickness of the photomask.

[0009] In an optional embodiment, the flip assembly includes a flip plate and a rotating shaft suitable for driving the flip plate to rotate; The clamping claw is installed on the side of the flip plate away from the rotating shaft; The distances from the rotating shaft to the two clamping jaws are equal.

[0010] In an optional embodiment, the flip assembly further includes a fixture bottom plate and two fixture fixing plates slidably mounted on the fixture bottom plate; The rotating shaft is drivingly connected to the fixture fixing plate.

[0011] In a second aspect, an embodiment of the present disclosure further provides a photomask flipping device, comprising the photomask flipping apparatus as described above, wherein the photomask flipping device further comprises: a loading robot and a loading transmission assembly respectively arranged on both sides of the flipping assembly.

[0012] In an optional embodiment, the loading and transporting assembly includes a horizontal slide rail and a transporting robot slidably disposed on the horizontal slide rail; The transmission manipulator comprises a driving seat, the driving seat has a manipulator column, the end of the column is equipped with a transmission seat, and one side of the transmission seat is respectively provided with two transmission claws; The two transmission claws are slidably connected to the transmission seat; The transmission claw is suitable for clamping the diagonal corner of the photomask after the flipping assembly is flipped, and the driving seat is suitable for driving the transmission claw to slide along the horizontal slide rail to the next process.

[0013] In an optional embodiment, the loading robot comprises a carrying seat and a cross arm slidably arranged on the carrying seat, and the cross arm is transmission-connected with the carrying seat; A plurality of loading limit grooves are arranged in an array on the cross arm.

[0014] In an optional embodiment, the feeding robot further comprises a rotating seat and a rotating electric actuator mounted on the rotating seat; The carrying seat is rotatably arranged on the rotating seat, and the rotating electric actuator is transmission-connected with the carrying seat.

[0015] In an optional embodiment, the loading robot further includes a support seat and a vertical slide rail, and the support seat is slidably disposed on the vertical slide rail.

[0016] In a third aspect, the embodiment of the present disclosure further provides a method for transporting a photomask, which is performed using the photomask flipping device as described above. The photomask transporting method includes the following steps: Step S1, the loading platform (4) loads materials horizontally, and the loading robot transports the horizontally placed photomask to the clamping station; Step S2, the two flipping assemblies rotate the clamps to a horizontal position and clamp the diagonal corners of the photomask, and the clamps are in contact with one side of the photomask; Step S3, the two flipping components drive the clamps to flip the photomask; In step S4, the loading and conveying assembly clamps the diagonal corners of the photomask to convey the flipped photomask to the next process.

[0017] The beneficial effect of the present invention is that, by setting two flipping assemblies and two clamping claws on the flipping assemblies, the clamping claws of the two flipping assemblies respectively clamp a pair of diagonal corners of the photomask, and each clamping claw contacts one side of the photomask to prevent the photomask from slipping off the flipping assemblies and the large clamping force from damaging the photomask.

[0018] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description, claims and drawings.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A three-dimensional diagram of a mask flipping device provided in an embodiment of the present disclosure; Figure 2 A schematic diagram of the structure of a feeding transmission assembly provided in an embodiment of the present disclosure; Figure 3 A front view of a loading robot provided in an embodiment of the present disclosure; Figure 4 A front view of a flip assembly provided in an embodiment of the present disclosure; Figure 5 A schematic diagram of the structure of a flip assembly provided in an embodiment of the present disclosure; Figure 6 A flow chart of a photomask conveying method provided in an embodiment of the present disclosure.

[0022] In the figure: 1. Flip assembly; 11. Clamping claw; 12. Clamping limit groove; 13. Flip plate; 14. Rotating shaft; 15. Clamp bottom plate; 16. Clamp fixing plate; 2. Loading manipulator; 21. Carrying seat; 22. Cross arm; 23. Loading limit slot; 24. Rotating seat; 25. Rotating electric actuator; 26. Support seat; 27. Vertical slide rail; 3. Material feeding transmission assembly; 31. Horizontal slide rail; 32. Transmission manipulator; 33. Driving seat; 34. Manipulator column; 35. Transmission seat; 36. Transmission claw; 4. Loading table; 5. Equipment frame; 6. Equipment power supply; 7. Clamping station. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] According to research, the photomask needs to be circulated in the equipment, and the photomask is usually rectangular. In the photomask cleaning equipment in the related art, when the photomask is flipped or transmitted by the transmission device or flipping device, the two sides of the photomask are usually clamped, which may cause the photomask to slip or the clamping force of the clamp is too large, resulting in economic losses such as fragmentation. Therefore, it is urgent to design a photomask flipping device, equipment and transportation method to solve the technical problem that the clamp clamping the two sides of the photomask during the circulation process may cause the photomask to slip or fragment.

[0025] The defects existing in the above solutions are the results obtained by the inventor after practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed by the present disclosure for the above problems below should be the contributions made by the inventor to the present disclosure during the disclosure process.

[0026] In the following, some embodiments of the present invention are described in detail in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. In addition, in the accompanying drawings, in order to effectively describe the technical content, the thickness of the components can be exaggerated or reduced.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] Based on the above research, Figure 4The embodiment of the present disclosure provides a mask flipping device, including: a fixture base plate 15 and two fixture fixing plates 16 slidably mounted on the fixture base plate 15, two flipping plates 13 are arranged facing each other between the two fixture fixing plates 16, two clamping claws 11 are respectively arranged on the sides facing each other of the two flipping plates 13, and at the same time, the two sides of the two flipping plates 13 that are separated are respectively connected to the clamping fixing plate for rotation through a rotating shaft 14. A power device is provided inside the fixture fixing plate 16, and the two flipping plates 13 are respectively connected to the power device in the fixture fixing plate 16 for transmission through the rotating shaft 14. The power device adopts a conventional choice in the related art for driving parts to rotate, such as a motor. At the same time, a linear moving pair is also provided inside the fixture base plate 15, and the linear moving pair adopts a conventional choice in the related art for driving parts to slide linearly, such as a cylinder. The distance from the rotating shaft 14 to the two clamping claws 11 is equal to ensure that the mask can remain in place without displacement during the flipping process.

[0029] In addition, it should be noted that in some embodiments, the ends of the two clamping jaws 11 used to clamp the photomask are in a "V" shape. When the photomask is square, the "V"-shaped ends of the clamping jaws 11 can ensure that they are in close contact with the edges of the photomask when clamping the diagonal portions of the photomask. Clamping the diagonal portions only requires a small amount of force, and more importantly, it relies on its diagonal limiting function to prevent it from falling and prevent it from being broken into pieces due to excessive force when only the two sides are clamped. At the same time, photomasks of different sizes can also be adapted and clamped, which can increase the application range of the clamping jaws 11 and solve the problem of the photomask easily falling during the clamping process.

[0030] The clamping jaws 11 can move closer or farther away under the action of the clamp base to clamp or release the photomask, and can flip the photomask under the action of the clamp fixing plate 16 .

[0031] Reference Figure 4 In at least one embodiment, there is a clamping station 7 between the clamping ends of the two clamping jaws 11 , and after the photomask moves to the clamping station 7 , it can be clamped by the clamping jaws 11 .

[0032] Specifically, when the photomask is placed at the clamping station 7, the two flipping assemblies 1 clamp the diagonal corners of the photomask through the clamping claws 11, and the clamping claws 11 contact one side of the photomask. The diagonal corners of the photomask are clamped by the clamping claws 11 of the two flipping assemblies 1, and the diagonal corners of the photomask are symmetrical. At the same time, it is ensured that each clamping claw 11 contacts one side of the photomask, which can prevent the photomask from slipping off the fixture and damaging the photomask due to excessive clamping force.

[0033] Reference Figure 5 In at least one embodiment, a clamping limit groove 12 is provided at the end of the clamping jaw 11, and the width of the clamping limit groove 12 is consistent with the thickness of the mask to ensure that after the clamping jaw 11 contacts the edge of the mask, the mask can be clamped into the clamping limit groove 12 to prevent the mask from slipping or tipping over.

[0034] The present disclosure also provides a mask flipping device, including the mask flipping device as described above, referring to Figure 2 The photomask flipping device further includes: a loading robot 2 and a loading transmission assembly 3 respectively arranged on both sides of the flip assembly 1. The loading transmission assembly 3 can transport the horizontal photomask to the clamping station 7 so that the flip assembly 1 can clamp and flip the photomask. After the photomask is flipped, the loading robot 2 transports the flipped workpiece to the next process.

[0035] Reference Figure 1 and Figure 2 In some embodiments, the feeding transmission assembly 3 includes a horizontal slide rail 31 and a transmission robot 32 slidably disposed on the horizontal slide rail 31. A driving device is installed on the horizontal slide rail 31 and is in transmission connection with the transmission robot 32 so that the transmission robot 32 can slide along the horizontal slide rail 31. The driving device adopts a conventional option in the related art for driving parts to slide along the horizontal slide rail 31, such as a chain drive. The transmission robot 32 includes a driving seat 33, and the driving seat 33 has a robot column 34, a transmission seat 35 is installed at the end of the column, and two transmission claws 36 are respectively arranged on one side of the transmission seat 35, and the two transmission claws 36 are slidably connected to the transmission seat 35. Specifically, a driving device is also provided inside the transmission seat 35. The driving device adopts the conventional selection used in the related art for driving two parts to extend and retract toward each other, such as a motor, and a gear is installed at the movable end of the motor. The two transmission claws 36 are respectively installed with racks, and the racks of the two transmission claws are respectively located on both sides of the gear. When the motor rotates, the two transmission claws 36 can be driven to slide toward or away from each other through the gear to achieve the function of clamping or releasing the photomask. On the other hand, the end of the transmission claw 36 for clamping is also designed to be "V" shaped. When the photomask is square, the transmission claw 36 also adopts the method of clamping the photomask diagonally to carry the photomask, further avoiding the problem of fragments when transporting the photomask. On the other hand, the use of the "V" shaped transmission claw 36 in conjunction with the extension and retraction of the driving device in the transmission seat 35 can also make the transmission claw 36 adapt to photomasks of different sizes, thereby improving the adaptability of the whole device to photomasks of different specifications.

[0036] The transmission claw 36 is suitable for clamping the photomask after the flipping assembly 1 is flipped, and the driving seat 33 is suitable for driving the transmission claw 36 to slide along the horizontal slide rail 31 to the next process position.

[0037] Reference Figure 2In some embodiments, the loading robot 2 includes a carrier seat 21 and a cross arm 22 slidably disposed on the carrier seat 21, and the cross arm 22 is transmission-connected to the carrier seat 21. A plurality of loading limit grooves 23 are arranged in an array on the cross arm 22. The mask flipping device also includes a loading platform 4, and the carrier seat 21 is provided with a driving device, which adopts a conventional selection of horizontal sliding of driving parts, such as a chain drive. The cross arm 22 slides along the carrier seat 21 to the loading platform 4 to receive a new mask and place it on the loading limit groove 23. Then, the cross arm 22 transports the mask to the clamping station 7.

[0038] Reference Figure 3 In some embodiments, in order to facilitate adjusting the angle of the cross arm 22 so that the cross arm 22 can tilt the horizontally placed photomask to a certain angle so that the flip assembly 1 can clamp the diagonal of the photomask, the loading robot 2 also includes a rotating seat 24 and a rotating electric actuator 25 installed on the rotating seat 24. The carrying seat 21 is rotatably arranged on the rotating seat 24, and the rotating electric actuator 25 is transmission-connected to the carrying seat 21. The rotating electric actuator 25 can be a motor.

[0039] Reference Figure 3 In some embodiments, in order to further enable the cross arm 22 to be raised and lowered to adapt to the height of the clamping station 7, the loading robot 2 further includes a support seat 26 and a vertical slide rail 27, and the support seat 26 is slidably arranged on the vertical slide rail 27. A driving device is arranged on the support seat 26, and the driving device adopts a conventional selection of driving parts for horizontal sliding, such as a chain drive.

[0040] In addition, refer to Figure 1 In some embodiments, the mask flipping device further includes a device frame 5 for encapsulating the above components. Figure 2 The mask flipping device also includes a device power supply 6 for supplying power to the above-mentioned components.

[0041] Reference Figure 6 The embodiment of the present disclosure further provides a method for transporting a photomask, which is performed using the photomask flipping device as described above. The photomask transporting method includes the following steps: Step S1, the loading platform (4) loads materials horizontally, and the loading robot 2 transports the horizontally placed photomask to the clamping station 7; Step S2, the two flipping components 1 rotate the clamping jaws 11 to a horizontal position and clamp the diagonal corners of the photomask, and the clamping jaws 11 are in contact with one side of the photomask; Step S3, the two flipping components 1 drive the clamping claws 11 to flip the photomask; In step S4, the loading and conveying assembly 3 clamps the diagonal corners of the photomask to transport the flipped photomask to the next process.

[0042] In the several embodiments provided in this application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Inspired by the above-mentioned ideal embodiments of the present invention and through the above-mentioned description, relevant staff can make various changes and modifications without departing from the technical idea of ​​the present invention. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A mask flipping device, characterized in that: include: Two flip assemblies (1), the clamping ends of which are arranged opposite to each other, and a clamping station (7) is provided between the two clamping ends; Wherein, the flip assembly (1) has two clamping claws (11) on the side facing the clamping station (7); Furthermore, when the photomask is placed in the clamping station (7), the two flipping assemblies (1) clamp the diagonal corners of the photomask through the clamping claws (11), and the clamping claws (11) are in contact with one side of the photomask.

2. The mask flipping device according to claim 1, characterized in that: The end of the clamping claw (11) is provided with a clamping limit groove (12), and the width of the clamping limit groove (12) is consistent with the thickness of the light mask.

3. The mask flipping device according to claim 1, characterized in that: The flip assembly (1) comprises a flip plate (13) and a rotating shaft (14) suitable for driving the flip plate (13) to rotate; The clamping claw (11) is mounted on a side of the flip plate (13) away from the rotating shaft (14); The distances from the rotating shaft (14) to the two clamping jaws (11) are equal.

4. The mask flipping device according to claim 2, characterized in that: The flip assembly (1) further comprises a fixture bottom plate (15) and two fixture fixing plates (16) slidably mounted on the fixture bottom plate (15); The rotating shaft (14) is in driving connection with the fixture fixing plate (16).

5. A mask flipping device, characterized in that: It comprises the mask flipping device according to any one of claims 1 to 4, and the mask flipping device further comprises: a loading robot (2) and a loading transmission component (3) respectively arranged on both sides of the flipping component (1).

6. The mask flipping device according to claim 5, characterized in that: The loading and conveying assembly (3) comprises a horizontal slide rail (31) and a conveying robot (32) slidably arranged on the horizontal slide rail (31); The transmission robot (32) comprises a driving seat (33), the driving seat (33) having a robot column (34), a transmission seat (35) being installed at the end of the column, and two transmission claws (36) being respectively arranged on one side of the transmission seat (35); The two transmission claws (36) are slidably connected to the transmission seat (35); The transmission claw (36) is suitable for clamping the diagonal portion of the photomask after the flipping assembly (1) has been flipped, and the drive seat (33) is suitable for driving the transmission claw (36) to slide along the horizontal slide rail (31) to the next process.

7. The mask flipping device according to claim 5, characterized in that: The loading robot (2) comprises a carrying seat (21) and a cross arm (22) slidably arranged on the carrying seat (21), and the cross arm (22) is transmission-connected to the carrying seat (21); A plurality of loading limit grooves (23) are arranged in an array on the cross arm (22).

8. The mask flipping device according to claim 7, characterized in that: The feeding robot (2) further comprises a rotating seat (24) and a rotating electric actuator (25) mounted on the rotating seat (24); The mounting seat (21) is rotatably arranged on the rotating seat (24), and the rotary electric actuator (25) is transmission-connected to the mounting seat (21).

9. The mask flipping device according to claim 8, characterized in that: The loading robot (2) further comprises a support seat (26) and a vertical slide rail (27), wherein the support seat (26) is slidably arranged on the vertical slide rail (27).

10. A method for transporting a photomask, characterized in that: The transport method is performed using the mask flipping device as described in any one of claims 5 to 9, and the mask transport method includes the following steps: Step S1, the loading platform (4) loads materials horizontally, and the loading robot (2) transports the horizontally placed photomask to the clamping station (7); Step S2, the two flipping components (1) rotate the clamping claws (11) to a horizontal position and clamp the diagonal corners of the photomask, and the clamping claws (11) are in contact with one side of the photomask; Step S3, the two flipping components (1) drive the clamping claws (11) to flip the photomask; In step S4, the loading and conveying assembly (3) clamps the diagonal corners of the photomask to transport the flipped photomask to the next process.

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