Multi-micropore throttling plane air floater

Abstract

The invention discloses a multi-micropore throttling plane air floater which comprises an integrated air floater part, an air floater face and an air channel, the air floater part integrates the function of traditionally needing four, six or eight independent air floater units, and the back face of the air floater part is arranged to be a mounting face used for being connected with a moving part or a load; the air floating surface is the front surface of the air floating part, a plurality of throttling holes are distributed in the air floating surface, the number, the hole diameter and the layout of the throttling holes are optimally designed, and the diameter of each throttling hole is 0.04 + / -0.005 mm; the air channel is arranged in the air flotation part and used for conveying compressed air to the throttling hole. Therefore, a plurality of air floatation units are integrated into one part, the purchase quantity is reduced, the import cost is reduced, the installation and debugging processes are simplified through integrated design, the time is shortened, the efficiency is improved, the product consistency is guaranteed through overall machining, the stable air floatation rigidity is larger than or equal to 300 N / mu m, the operation stability and reliability are enhanced, and rapid production can be achieved in China; and the production progress and project delivery are effectively guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of air bearings, and in particular to a multi-microporous throttling plane air bearing. Background Art

[0002] Import dependence and cost issues: At present, the plane air-floating parts used in related equipment are mainly imported from foreign countries. These imported parts are expensive and the cost of each part is high. Moreover, in actual application scenarios, 4, 6 or 8 imported parts are often used in combination, which greatly increases the procurement cost and brings a heavy economic burden to enterprises.

[0003] Supply cycle problem: The supply cycle of imported products is long, and the supply stability is poor due to various factors such as international logistics and trade policies. This seriously affects the production schedule and project delivery, resulting in great uncertainty in the production plan arrangement of enterprises.

[0004] Installation and debugging difficulties: Traditional imported flat air-floating parts are individual units, and installation and debugging are extremely complicated when used in combination. In application scenarios with extremely high requirements for flatness (accuracy needs to be controlled within 1-2 microns) and high requirements for air-floating stiffness (air-floating stiffness ≥ 300N / μm), if the flatness is inconsistent, air-floating is difficult to establish. The debugging process requires a lot of time and energy, which reduces work efficiency and increases the cost of use. Summary of the invention

[0005] The present application aims to solve one of the technical problems in the related art at least to some extent.

[0006] To this end, the first purpose of the present application is to provide a multi-microporous throttling plane air flotation, which integrates multiple air flotation units into one part, reducing the number of parts purchased and the high cost caused by imports.

[0007] The second purpose of the present application is to provide a multi-microporous throttling plane air flotation. The integrated design makes the installation process simple and quick. There is no need to carry out complicated assembly and debugging of multiple individual parts as in the traditional way. The integrated parts can be directly installed and put into use, which greatly shortens the installation and debugging time and improves work efficiency.

[0008] The third purpose of the present application is to provide a multi-microporous throttling plane flotation. The overall processing method ensures the consistency of the product, avoids the problem of inconsistent flatness that may occur when multiple individual parts are combined, ensures that the flotation stiffness stably reaches the requirement of ≥300N / μm, can reliably establish flotation, and improves the stability and reliability of the device operation.

[0009] The fourth purpose of this application is to provide a multi-microporous throttling plane air flotation. Compared with the long supply cycle of imported parts, this patented product can be quickly produced and processed domestically, effectively ensuring production progress and project delivery.

[0010] To achieve the above-mentioned purpose, the first embodiment of the present application proposes a multi-microporous throttling plane air flotation, including an integrated air flotation part, an air flotation surface and an air duct, wherein the air flotation part integrates the functions of 4, 6 or 8 separate air flotation units that are traditionally required, and its back side is set as a mounting surface for connecting with a moving part or a load; the air flotation surface is the front side of the air flotation part, and a plurality of throttling holes are distributed on the air flotation surface, the number, aperture and layout of the throttling holes are optimized, and the diameter of the throttling holes is The air duct is arranged inside the air-floating part and is used to transport compressed air to the throttle hole; the air-floating part is processed by a specific processing technology, and the air-floating surface is mirror-polished, and the surface roughness reaches Ra0.4μm, so as to ensure that the air-floating surface is smooth and free of dirt and scratches, thereby reducing air flow resistance.

[0011] A multi-microporous throttling plane flotation in an embodiment of the present application integrates multiple flotation units into one part, which reduces the purchase quantity and import costs. The integrated design simplifies the installation and commissioning process, shortens the time and improves efficiency. The overall processing ensures product consistency, stabilizes the flotation stiffness ≥300N / μm, enhances operational stability and reliability, and can be quickly produced domestically. Compared with imported parts, it effectively guarantees production progress and project delivery.

[0012] In addition, the multi-microporous throttling plane air flotation proposed in the present application may also have the following additional technical features:

[0013] In one embodiment of the present application, an air cushion with a thickness of about 10 μm can be formed between the air-bearing surface and the guide rail, and the air-bearing stiffness of the air-bearing device is not less than 300 N / μm.

[0014] In one embodiment of the present application, during the processing of the air-floating parts, stress relief treatment is performed after rough processing, and stabilization treatment is performed after fine processing to eliminate processing stress and ensure the dimensional stability of the parts.

[0015] In one embodiment of the present application, the periphery of the air-bearing surface is rounded, and the fillet radius satisfies R≤0.5mm and Rmax≤0.6mm. The chamfer of the threaded hole on the air-bearing part is 0.5mm, and all sharp edges are blunted and deburred to avoid damage to other components during use.

[0016] The advantages of this application compared with the existing technology are:

[0017] (1) Integrating multiple air flotation units into one part reduces the number of parts purchased and the high cost caused by imports.

[0018] (2) The integrated design makes the installation process simple and quick. There is no need to carry out complex assembly and debugging of multiple individual parts as in the traditional way. The integrated parts can be directly installed and put into use, which greatly shortens the installation and debugging time and improves work efficiency.

[0019] (3) The overall processing method ensures the consistency of the product, avoids the problem of inconsistent flatness that may occur when multiple individual parts are combined, ensures that the air flotation stiffness stably reaches the requirement of ≥300N / μm, can reliably establish air flotation, and improves the stability and reliability of the device operation.

[0020] (4) Compared with the long supply cycle of imported parts, this patented product can be quickly produced and processed domestically, effectively ensuring production progress and project delivery.

[0021] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0023] Figure 1 A three-dimensional diagram of an integrated air-floating component of a multi-microporous throttling plane air-floating according to an embodiment of the present application;

[0024] Figure 2 It is a front view of an air flotation surface of a multi-microporous throttling plane air flotation according to another embodiment of the present application;

[0025] Figure 3 A side view of an integrated air-floating component of a multi-microporous throttling plane air-floating according to another embodiment of the present application;

[0026] Figure 4 This is a schematic diagram of the actual application of an integrated air flotation component of a multi-microporous throttling plane air flotation according to another embodiment of the present application.

[0027] As shown in the figure: 1. Air-floating parts; 2. Air-floating surface; 3. Air duct; 4. Installation surface. DETAILED DESCRIPTION

[0028] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limitations on the present application. On the contrary, the embodiments of the present application include all changes, modifications and equivalents that fall within the spirit and connotation of the appended claims.

[0029] A multi-microporous throttling plane air flotation according to an embodiment of the present application is described below in conjunction with the accompanying drawings.

[0030] like Figure 1-Figure 4 As shown, a multi-microporous throttling plane air flotation according to an embodiment of the present application is provided, and the multi-microporous throttling plane air flotation device is mainly composed of an integrated air flotation component 1, an air flotation surface 2 and an air channel 3.

[0031] It is understandable that the air-floating component 1 plays a key role. It integrates the functions of 4, 6 or 8 traditional separate air-floating units. The mounting surface 4 on the back is used to firmly connect with the moving parts or loads, providing a mounting base for the entire device.

[0032] When working, external compressed air enters the device. The compressed air is transmitted through the air channel 3 set inside the air flotation part 1. The air channel 3 is like a pipeline that accurately delivers the compressed air to each throttle hole on the air flotation surface 2. The air flotation surface 2 is located on the front of the air flotation part 1. The number, diameter and layout of the throttle holes on it have been carefully optimized. The diameter of the throttle hole is

[0033] When compressed air flows out of the throttle hole, an air cushion is formed between the air-bearing surface 2 and the guide rail. Thanks to the mirror polishing of the air-bearing surface 2, the surface roughness reaches Ra0.4μm, which makes the air-bearing surface 2 smooth and free of dirt and scratches, effectively reducing the air flow resistance and making the formed air cushion more stable. Finally, the stable air cushion supports the air-bearing part 1 and its connected moving parts or loads, achieving high-precision, low-friction movement to meet the operation requirements of the equipment.

[0034] In one embodiment of the present application, Figure 1-Figure 4 As shown, in the actual operation of the multi-microporous throttling plane flotation device, the flotation surface 2, the throttling hole and the air channel 3 and other components work together to form an air cushion of a specific thickness and an air flotation stiffness that meets the requirements between the flotation surface 2 and the guide rail.

[0035] It is understandable that when the external compressed air is connected to the air flotation device, the compressed air first enters the air channel 3 inside the air flotation component 1. The air channel 3 serves as a delivery channel to stably and evenly guide the compressed air to the air flotation surface 2. The air flotation surface 2 is located on the front of the air flotation component 1, and is distributed with throttle holes of optimized design in number, aperture and layout, and the diameter of the throttle hole is

[0036] When compressed air flows out of these throttle holes, due to the special design of the throttle holes and the precision processing of the air bearing surface 2 (the air bearing surface 2 is mirror-polished with a surface roughness of Ra0.4μm), the speed and pressure of the air flow are evenly distributed, so that an air cushion with a thickness of about 10μm can be formed between the air bearing surface 2 and the guide rail. This air cushion is like a layer of "air cushion" that separates the air bearing part 1 and the moving parts or loads it carries from the guide rail.

[0037] The air flotation stiffness of the air flotation device is not less than 300N / μm, thanks to the reasonable design and precise manufacturing of the entire device. On the one hand, the optimized throttle hole design enables the compressed air to provide stable and sufficient support when forming an air cushion; on the other hand, the uniformity of the gap between the air flotation surface 2 and the guide rail and the overall structural strength and stability of the air flotation part 1 jointly ensure that when the air flotation device is subjected to external force, it can provide a restoring force of not less than 300N for every 1μm deformation, ensuring the high precision and stability of the air flotation device during operation, so that the equipment can operate reliably.

[0038] In one embodiment of the present application, Figure 1-Figure 4 As shown, in the multi-microporous throttling plane air flotation device, the air flotation part 1 is a core component, and its processing technology plays a key role in the overall performance of the device. In particular, stress relief treatment is performed after rough processing, and stabilization treatment is performed after fine processing. These two links effectively eliminate processing stress and ensure the dimensional stability of the parts.

[0039] It is understandable that in the rough machining stage, the air-floating part 1 is preliminarily machined according to the design requirements using suitable machining equipment such as CNC lathes and milling machines, removing most of the excess and preliminarily forming the general shape of the air-floating part 1, including the basic outlines of the air-floating surface 2, the air channel 3 and the mounting surface 4. However, during the rough machining process, due to the influence of factors such as cutting force and cutting heat, residual stress will be generated inside the air-floating part 1. If these residual stresses are not eliminated in time, they may cause deformation of the part during subsequent processing or use, affecting dimensional accuracy and performance.

[0040] Stress relief treatment stage: After the rough machining is completed, the air-floating part 1 is placed in a heat treatment furnace for stress relief annealing. According to the material characteristics of the air-floating part 1, set the appropriate heating temperature, holding time and cooling speed. For example, for the air-floating part 1 made of aluminum alloy, the heating temperature may be set at 200-300℃, the holding time is about 2-3 hours, and then slowly cooled with the furnace. In this process, the residual stress inside the air-floating part 1 is released, the organizational structure is gradually homogenized, and the internal stress level is effectively reduced, providing a stable foundation for subsequent fine machining.

[0041] Finishing stage: After completing the stress relief treatment, more precise processing equipment, such as high-precision grinders, EDM machines, etc., is used to finish the air-bearing part 1. In this stage, the air-bearing surface 2 is mirror-polished to a surface roughness of Ra0.4μm, and the throttle hole is precisely processed to ensure that the throttle hole diameter is At the same time, the dimensional accuracy and surface quality of the airway 3, as well as the flatness and position accuracy of the mounting surface 4 are ensured. However, the finishing process will also produce certain processing stress, which, although smaller than that during roughing, will still affect the dimensional stability of the parts.

[0042] Stabilization treatment stage: In order to further eliminate the stress generated by fine machining and improve the dimensional stability of the air-floating part 1, it is subjected to stabilization treatment. A common stabilization treatment method is aging treatment, which is to place the air-floating part 1 in a specific environment (such as room temperature or slightly above room temperature) for a period of time, generally 24-48 hours. During the aging process, the microstructure inside the air-floating part 1 gradually stabilizes, and the residual stress is further released, thereby ensuring that the air-floating part 1 can maintain high-precision dimensional stability during subsequent assembly and use, ensuring the reliable performance of the entire air-floating device.

[0043] In one embodiment of the present application, Figure 1-Figure 4 As shown, in the manufacturing process of the multi-microporous throttling plane flotation device, specific treatment of the periphery of the flotation surface 2, the threaded hole openings and all sharp edges is an important step to ensure the safe and stable operation of the device.

[0044] It is understandable that the air flotation surface 2 has rounded corners.

[0045] Process selection: After the air-bearing part 1 has completed the main processing steps of the air-bearing surface 2, a special fillet processing tool is used to perform a fillet operation on the periphery of the air-bearing surface 2. According to the material and size of the air-bearing part 1, a fillet grinding wheel equipped with a CNC grinder or an EDM wire cutting machine can be used for fillet processing.

[0046] Parameter control: During the processing, the fillet radius is strictly controlled. According to the design requirements, the fillet radius must meet R≤0.5mm and Rmax≤0.6mm. Through precise programming and real-time monitoring of the processing equipment, ensure that the processed fillet radius is within the specified range. For example, when using a CNC grinder, the accuracy of the fillet radius is guaranteed by entering precise grinding path and feed parameters. After processing each air-floating part 1, use a measuring tool (such as a radius gauge) to measure the fillet radius around the air-floating surface 2. Once the radius is found to be out of the specified range, adjust or rework immediately.

[0047] Chamfering of threaded holes

[0048] Tool selection: For the threaded hole on the air-floating part 1, after the thread processing is completed, a special chamfering tool is used to perform the hole chamfering operation. Common chamfering tools such as carbide chamfering tools are selected according to the size of the threaded hole.

[0049] Operation process: Install the chamfering tool on the drilling machine or machining center, adjust the tool position to align it with the threaded hole opening. Start the equipment and let the tool cut the threaded hole opening at an appropriate speed and feed rate to form a 0.5mm chamfer. During the processing, pay attention to controlling the cutting parameters to avoid deformation or damage of the threaded hole due to excessive cutting force. After processing, check the chamfer of each threaded hole opening to ensure that the chamfer size is uniform and meets the 0.5mm requirement.

[0050] Sharp edge blunting and deburring

[0051] Preliminary cleaning: Use files, sandpaper and other tools to preliminarily remove the more obvious sharp edges and larger burrs on the air-floating part 1. The operator needs to be careful and grind along the direction of the sharp edge to avoid excessive grinding that affects the dimensional accuracy and surface quality of the part.

[0052] Fine processing: Use advanced processes such as chemical deburring or electrolytic deburring to further process the parts. For example, in chemical deburring, the air-floating part 1 is immersed in a specific chemical solution. The solution will react chemically with the burrs, causing them to gradually dissolve, and at the same time slightly corrode the sharp edges to achieve a blunting effect. During the treatment process, the concentration, temperature and treatment time of the chemical solution must be strictly controlled to ensure that the burrs and sharp edges can be effectively removed without causing excessive corrosion to the part body. After the treatment is completed, the air-floating part 1 is cleaned and dried, and then a comprehensive inspection is carried out to ensure that all sharp edges have been blunted and there are no residual burrs, so as to avoid scratches, wear and other damage to other components during the use of the device, and ensure the reliability and service life of the entire air-floating device.

[0053] Specifically, when the multi-microporous throttling plane air flotation device is actually used, the working process is as follows:

[0054] 1. Installation stage: First, install the air-floating part 1 with the moving part or load through the mounting surface 4 on its back. According to actual needs, select a suitable installation method, such as bolt connection, welding, etc., to ensure that the air-floating part 1 is firmly connected to the moving part or load, providing a stable foundation for subsequent work. During the installation process, the fit and flatness of the mounting surface 4 must be ensured to avoid installation errors that affect the air-floating effect.

[0055] 2. Air supply preparation: Connect the external compressed air source to the air flotation device, ensure that the air supply pipeline is well sealed to prevent compressed air leakage. Check whether the pressure and flow of compressed air meet the design requirements of the air flotation device to ensure that sufficient and stable air source can be provided for the air flotation device.

[0056] 3. Air flotation start: Open the compressed air supply, and the compressed air enters the air channel 3 inside the air flotation part 1. The air channel 3 transports the compressed air to the throttle hole on the air flotation surface 2. Since the number, diameter and layout of the throttle holes are carefully optimized, and the diameter of the throttle hole is When compressed air flows out of the throttle hole, an air cushion is formed between the air bearing surface 2 and the guide rail. The air bearing surface 2 is mirror-polished to a surface roughness of Ra0.4μm, which effectively reduces the air flow resistance and makes the formed air cushion more stable. The thickness is about 10μm. This air cushion separates the air bearing part 1 and the connected moving parts or loads from the guide rail, achieving contactless support.

[0057] 4. Operation phase: During the operation of the equipment, the air flotation device ensures high precision and stability of movement with an air flotation stiffness of no less than 300N / μm. When the moving parts or loads are subjected to external forces, the overall structural strength of the air flotation part 1 and the uniform gap between the air flotation surface 2 and the guide rail ensure that the air flotation device can provide a restoring force of no less than 300N for every 1μm deformation, so that the moving parts or loads always maintain a stable operating state, meeting the high-precision and low-friction movement requirements of the equipment.

[0058] 5. Maintenance and inspection: Perform maintenance and inspection on the flotation device regularly. Check whether the fillet radius around the flotation surface 2 still meets the requirements of R≤0.5mm and Rmax≤0.6mm, and use a radius gauge to measure. If there is wear or deformation, repair it in time; check whether the 0.5mm chamfer of the threaded hole is intact and whether there are burrs or damage; check whether all sharp edges are blunt and have no residual burrs. At the same time, check whether the flotation surface 2 is dirty or scratched. If so, clean or re-polish it according to the situation. In addition, check whether the air duct 3 is blocked or leaking to ensure normal compressed air delivery. Through regular maintenance and inspection, ensure that the flotation device is always in good working condition and extend its service life.

[0059] In summary, a multi-microporous throttling plane flotation in an embodiment of the present application integrates multiple flotation units into one part, reduces the purchase quantity, reduces import costs, and the integrated design simplifies the installation and commissioning process, shortens time, and improves efficiency. The overall processing ensures product consistency, stabilizes the flotation stiffness ≥300N / μm, enhances operational stability and reliability, and can be quickly produced domestically. Compared with imported parts, it effectively guarantees production progress and project delivery.

[0060] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0061] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0062] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and deform the above embodiments within the scope of the present application.

Claims

1. A multi-microporous throttling plane air flotation, characterized in that: It comprises an integrated air-floating component (1), an air-floating surface (2) and an air passage (3), wherein: The air-floating component (1) integrates the functions of four, six or eight separate air-floating units that are traditionally required, and its back side is provided as a mounting surface (4) for connecting with a moving part or a load; The air-floating surface (2) is the front side of the air-floating component (1), and a plurality of throttling holes are distributed on the air-floating surface (2). The number, diameter and layout of the throttling holes are optimized, and the diameter of the throttling holes is The air passage (3) is arranged inside the air-floating component (1) and is used to transport compressed air to the throttle hole; The air-floating part (1) is processed by a specific processing technology, and the air-floating surface (2) is mirror-polished, with a surface roughness of Ra0.4 μm, so as to ensure that the air-floating surface (2) is smooth and free of dirt and scratches, thereby reducing air flow resistance.

2. A multi-microporous throttling plane air flotation according to claim 1, characterized in that: An air cushion with a thickness of about 10 μm can be formed between the air-floating surface (2) and the guide rail, and the air-floating stiffness of the air-floating device is not less than 300 N / μm.

3. The multi-microporous throttling plane air flotation according to claim 1 is characterized in that: During the processing of the air-floating part (1), a stress relief treatment is performed after rough processing, and a stabilization treatment is performed after fine processing to eliminate processing stress and ensure the dimensional stability of the part.

4. The multi-microporous throttling plane air flotation according to claim 1, characterized in that: The periphery of the air-floating surface (2) is rounded, and the fillet radius satisfies R≤0.5mm and Rmax≤0.6mm. The chamfer of the threaded hole on the air-floating part (1) is 0.5mm, and all sharp edges are blunted and deburred to avoid damage to other parts during use.

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