Differential exhaust mechanism and rotary valve device

Abstract

The invention provides a differential exhaust mechanism and a rotary valve device, and the differential exhaust mechanism comprises a purging assembly which is arranged at the penetrating position of a shell corresponding to a rotary shaft and is used for spraying purging gas to the rotary shaft; and the exhaust assembly is arranged corresponding to the penetrating position of the rotating shaft on the shell and is used for exhausting the purging gas after purging the rotating shaft. The purging assembly and the exhaust assembly correspond to the penetrating position of the rotating shaft on the shell, the purging assembly sprays purging gas to the rotating shaft, high-speed airflow of the purging gas has strong flushing force, and pollutants attached to the surface of the rotating shaft can be effectively flushed away. And meanwhile, the exhaust assembly exhausts air, and purge air with pollutants is exhausted away, so that the rotating shaft is cleaned in time. The purging assembly and the exhaust assembly play a role in removing pollutants and preventing the pollutants from entering the inner space of the shell at the communication position of the inner space of the shell and the external environment, and the problem that the pollutants enter the shell along the rotating shaft and pollute the inner space of the shell is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a differential exhaust mechanism and a rotary valve device. Background Art

[0002] Some semiconductor equipment pipelines are equipped with rotary valves to control the on / off status of the pipelines. However, the rotary shaft connection of the existing rotary valves may be contaminated by pollutants, which may enter the rotary valve along the rotary shaft and pollute the interior of the housing.

[0003] In view of this, it is necessary to propose a differential exhaust mechanism and a rotary valve device to solve the above problems. Summary of the invention

[0004] The object of the present invention is to provide a differential exhaust mechanism and a rotary valve device, so as to improve the problem that the rotating shaft of the existing rotary valve is contaminated with pollutants and then pollutes the inner space of the shell.

[0005] The present invention provides a differential exhaust mechanism, comprising: A purge assembly, which is arranged at a position corresponding to the rotation axis of the rotary valve device and on the housing of the rotary valve device and is used to spray purge gas toward the rotation axis; An exhaust component is arranged at a position where the rotating shaft penetrates the shell and is used to extract the purge gas after the rotating shaft is purged.

[0006] The beneficial effect of the differential exhaust mechanism provided by the present invention is that a purge assembly and an exhaust assembly are arranged at the penetration point of the rotating shaft on the shell, and purge gas is sprayed toward the rotating shaft through the purge assembly. Under the action of the high-speed airflow of the purge gas, pollutants attached to the rotating shaft can be washed away. At the same time, air is exhausted through the purge assembly so that the pollutants can be exhausted together with the purge gas, thereby avoiding the problem of pollutants entering the shell along the rotating shaft and causing pollution to the internal space of the shell.

[0007] In a possible embodiment, the rotating shaft partially extends out of the housing to form an extension portion; The purge assembly includes a first shell disposed on the outer wall of the shell and arranged around the protruding portion, a purge chamber arranged around the protruding portion is formed in the first shell, and the purge chamber is communicated with a gap between the shell and the rotating shaft.

[0008] The beneficial effect is that the first shell is arranged on the outer wall of the shell and close to the place where the rotating shaft passes through the shell, that is, the first shell is arranged close to the gap between the shell and the rotating shaft, so as to ensure that the pollutants on the extended part are blown away, and the pollutants are prevented from entering the shell from the gap and polluting the internal space of the shell. The purge chamber is arranged around the extended part, which can ensure that the circumferential direction of the extended part can be effectively purged and cleaned, and avoid leaving a cleaning dead corner to affect the purge cleaning effect.

[0009] In a possible embodiment, the exhaust assembly includes a second shell disposed on a side of the first shell away from the shell body and arranged around the extended portion, and an exhaust chamber arranged around the extended portion is formed in the second shell, and the exhaust chamber is connected to the purge chamber.

[0010] Its beneficial effect is that the second shell is arranged on the side of the first shell away from the shell, that is, the second shell is connected to the first shell. Since the exhaust chamber is connected to the purge chamber, the purge gas ejected from the purge chamber can be evacuated from the exhaust chamber after flushing the surface of the extension by evacuating the exhaust chamber, thereby achieving effective cleaning of the extension. No contaminants will remain on the rotating shaft, thereby avoiding the problem that the contaminants on the rotating shaft enter the shell along the rotating shaft and pollute the internal space of the shell. The exhaust chamber and the purge chamber are both arranged around the extension. In a possible embodiment, a sealing member is provided between a side of the second housing away from the first housing and the protruding portion.

[0011] The beneficial effect is that the sealing member plays a sealing role between the side of the exhaust member away from the intake member and the protruding portion.

[0012] In a possible embodiment, the sealing member is disposed on a side of the second housing away from the first housing and sleeved on the protruding portion, and the rotating shaft can rotate inside the sealing member.

[0013] The beneficial effect is that the sealing member is arranged on the second outer shell and sleeved on the protruding portion. Since the sealing member is not fixedly connected to the rotating shaft, the rotating shaft can rotate in the sealing member, and at the same time, the sealing member plays a sealing role between the side of the exhaust member away from the air inlet member and the protruding portion.

[0014] In a possible embodiment, a lubricating sealing material is applied to the sealing member.

[0015] The beneficial effects are: on the one hand, the lubricating sealing material plays a lubricating role, which can reduce friction and enable the rotating shaft to rotate more smoothly in the seal; on the other hand, the lubricating sealing material also plays a sealing role, enhancing the sealing between the rotating shaft and the extending part.

[0016] In a possible embodiment, the exhaust assembly further includes an exhaust pipeline provided on the second shell and an exhaust component connected to the exhaust pipeline, wherein the exhaust component is used to extract the purge gas after the rotating shaft is purged.

[0017] The beneficial effect thereof is that the exhaust member can exhaust the purge gas containing pollutants through the exhaust chamber and the exhaust pipeline.

[0018] In a possible embodiment, the purge assembly further includes a purge pipeline provided on the first shell and a purge gas supply assembly connected to the purge pipeline, wherein the purge gas supply assembly is used to supply purge gas into the purge pipeline.

[0019] The beneficial effect thereof is that the purge gas supply component introduces the purge gas into the purge pipeline, and the purge gas enters the purge chamber to purge and clean the rotating shaft.

[0020] In a possible embodiment, the differential exhaust mechanism further includes a sealing cover provided on the outer wall of the shell corresponding to the protruding portion, and the purge assembly and the exhaust assembly are at least partially located in the sealing cover.

[0021] The beneficial effect is that the sealing cover is isolated from the external environment, thereby preventing pollutants from the external environment from contaminating the rotating shaft.

[0022] In a possible embodiment, the protruding portion is rotatably disposed on the sealing cover via a bearing.

[0023] The beneficial effect is that the bearing can reduce the friction between the sealing cover and the extending portion, so that the rotating shaft can rotate more smoothly.

[0024] In a possible embodiment, a lubricating sealing material is applied to the bearing.

[0025] The present invention further provides a rotary valve device, comprising a housing, a rotary valve body and a differential exhaust mechanism as in any of the above embodiments, wherein the rotary valve body is rotatably disposed in the housing via a rotating shaft. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the installation of the differential exhaust mechanism of the present invention in one embodiment.

[0027] Figure 2 It is a schematic diagram of the differential exhaust mechanism of the present invention being installed on a rotating shaft.

[0028] Figure 3 It is a schematic diagram of the installation of the differential exhaust mechanism of the present invention in another embodiment.

[0029] Explanation of the reference numerals: 100, differential exhaust mechanism; 110, purge assembly; 111, first shell; 1111, purge chamber; 112, purge pipeline; 113, first gap; 120, exhaust assembly; 121, second shell; 1211, exhaust chamber; 122, exhaust pipeline; 123, second gap; 130, seal; 140, sealing cover; 150, bearing; 200, shell; 210, gap; 300, rotary valve body; 310, rotating shaft; 311, extension; 400, driving member. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] As a common control element, rotary valve plays a vital role in semiconductor equipment. Its main function is to control the on and off of the fluid in the pipeline. In semiconductor equipment, the cleanliness requirements are extremely strict. The manufacturing process of semiconductor equipment needs to be carried out in an ultra-clean environment, because any tiny contamination may have a serious impact on the performance of semiconductor materials, resulting in an increase in the defect rate of semiconductor devices, a decrease in performance, or even complete failure.

[0032] The rotary valve body is rotatably arranged in the housing through a rotating shaft. Since the rotating shaft needs to extend out of the housing to connect with the driving member, once the rotating shaft is contaminated with pollutants, as the rotating shaft rotates, these pollutants may enter the housing through the gap between the housing and the rotating shaft, thereby causing pollution to the pipeline.

[0033] In view of the problems existing in the prior art, an embodiment of the present invention provides a differential exhaust mechanism, which is applied to a rotary valve device on a pipeline of a semiconductor device. Figure 1 FIG. 1 is a schematic diagram of the installation of the differential exhaust mechanism of the present invention in one embodiment, see Figure 1The differential exhaust mechanism 100 includes a purge assembly 110 and an exhaust assembly 120. The purge assembly 110 is arranged at a position corresponding to the rotation shaft 310 of the rotary valve device on the housing 200 of the rotary valve device and is used to spray purge gas to the rotation shaft 310. The exhaust assembly 120 is arranged at a position corresponding to the rotation shaft 310 on the housing 200 and is used to extract the purge gas after the rotation shaft 310 is purged. The purge gas can be flexibly selected according to the actual process, for example, the purge gas is an inert gas.

[0034] The position where the rotating shaft 310 is inserted on the housing 200 of the rotary valve device can be understood as the connection point between the internal space of the housing 200 and the external environment. The rotating shaft 310 can rotate on the insertion device on the housing 200. Since there is a gap 210 between the rotating shaft 310 and the housing 200 at the insertion position, if the rotating shaft 310 is contaminated with pollutants, the pollutants may follow the rotating shaft 310 and enter the housing 200 from the insertion position of the rotating shaft 310 on the housing 200, thereby causing pollution to the internal space of the housing 200. In this embodiment, the purge component 110 and the exhaust component 120 corresponding to the insertion position of the rotating shaft 310 on the housing 200, the purge component 110 sprays purge gas to the rotating shaft 310, and the high-speed airflow of the purge gas has a strong flushing force, which can effectively flush away the pollutants attached to the surface of the rotating shaft 310. At the same time, the exhaust component 120 exhausts air to remove the purge gas with pollutants to achieve timely cleaning of the rotating shaft 310. The purge assembly 110 and the exhaust assembly 120 play a role in removing pollutants and blocking pollutants from entering the internal space of the shell 200 at the connection point between the internal space of the shell 200 and the external environment. This can prevent pollutants from entering the shell 200 along the rotating shaft 310 and polluting the internal space of the shell 200, thereby preventing contamination of the pipelines on the semiconductor equipment due to contamination in the rotary valve device, thereby effectively improving product quality.

[0035] In one embodiment, Figure 2 This is a schematic diagram of the differential exhaust mechanism of the present invention being installed on a rotating shaft, see Figure 1 and Figure 2 The rotating shaft 310 partially extends out of the housing 200 to form an extension portion 311, and the purge assembly 110 includes a first housing 111 disposed on the outer wall of the housing 200 and arranged around the extension portion 311. A purge chamber 1111 arranged around the extension portion 311 is formed in the first housing 111, and the purge chamber 1111 is communicated with the gap 210 between the housing 200 and the rotating shaft 310. The purge gas is introduced into the purge chamber 1111 to achieve the purge cleaning of the rotating shaft 310.

[0036] In this embodiment, the first housing 111 is disposed near the gap 210 between the housing 200 and the rotating shaft 310 and disposed on the outer wall of the housing 200. It can be understood that the first housing 111 covers the extension 311. By introducing the purge gas into the purge chamber 1111, the pollutants on the extension 311 are flushed away from the extension 311 under the action of the purge gas flow. The exhaust assembly 120 extracts the purge gas with pollutants to ensure that the pollutants are removed before entering the gap 210, and to prevent the pollutants from entering the housing 200 from the gap 210 and contaminating the internal space of the housing 200. The purge chamber 1111 is disposed around the extension 311, so that the purge gas flow can flow around the extension 311 and flush the surface of the extension 311, ensuring that the circumference of the extension 311 can be effectively purged and cleaned, avoiding the problem of residual pollutants caused by the presence of cleaning dead corners, thereby improving the cleaning effect.

[0037] In a specific embodiment, see Figure 2 There is a first gap 113 between the first shell 111 and the extension part 311. The first gap 113 is connected to the purge chamber 1111 and the gap 210 between the shell 200 and the rotating shaft 310. The first gap 113 can ensure that the airflow of the purge gas can flow more fully around the extension part 311 and wash away all pollutants on the peripheral wall of the extension part 311.

[0038] In another specific embodiment, see Figure 2 A first through hole is provided in the middle of the first shell 111, and the first through hole is connected to the purge chamber 1111. It can be understood that the first through hole is the chamber opening of the purge chamber 1111, and the extension portion 311 passes through the first through hole. The shape of the first shell 111 is not limited here, and the first shell 111 can be in a circular ring shape, a square ring shape, etc.

[0039] In one embodiment, see Figure 2 The purge assembly 110 further includes a purge pipeline 112 disposed on the first housing 111 and a purge gas supply assembly (not shown in the figure) connected to the purge pipeline 112. The purge gas supply assembly is used to supply purge gas into the purge pipeline 112. The purge gas is introduced into the purge pipeline 112 through the purge gas supply assembly, and the purge gas enters the purge chamber 1111 from the purge pipeline 112. The purge gas flow flushes the pollutants on the surface of the extension portion 311 to purge and clean the rotating shaft 310.

[0040] In one embodiment, see Figure 1 and Figure 2The exhaust assembly 120 includes a second shell 121 which is arranged on a side of the first shell 111 away from the shell body 200 and is arranged around the extended portion 311. An exhaust chamber 1211 which is arranged around the extended portion 311 is formed in the second shell 121. The exhaust chamber 1211 is connected to the purge chamber 1111. The purge gas after the extended portion 311 is purged is extracted by evacuating the exhaust chamber 1211.

[0041] In this embodiment, the second shell 121 is arranged on the side of the first shell 111 away from the shell body 200, and the exhaust chamber 1211 is connected to the purge chamber 1111. It can be understood that the first shell 111 and the second shell 121 are covered on the extension part 311 side by side, and the first shell 111 and the second shell 121 play a protective and isolating role on the extension part 311 to avoid the external environment from polluting the extension part 311. At the same time, by ventilating the purge chamber 1111 and exhausting the exhaust chamber 1211, the purge gas ejected from the purge chamber 1111 can be quickly extracted from the exhaust chamber 1211 after flushing the surface of the extension part 311, thereby achieving rapid and effective cleaning of the extension part 311.

[0042] Furthermore, since the exhaust chamber 1211 and the purge chamber 1111 are both arranged around the extension 311, the airflow of the purge gas flushes the extension 311 in a circumferential circle, ensuring the comprehensive cleaning of the extension 311. At the same time, the circumferential suction effect on the side of the purge chamber 1111 allows the purge gas flushed through the extension 311 to be sucked into the exhaust chamber 1211 with all the flushed pollutants, avoiding the pollutants remaining in the extension 311, the exhaust chamber 1211, and the purge chamber 1111. The synergistic effect of this circumferential flushing and circumferential suction significantly improves the cleaning effect of the extension 311. The circumferential suction effect on the side of the purge chamber 1111 not only accelerates the discharge of pollutants, but also enhances the flushing effect of the purge gas. Due to the larger suction range, the purge gas can more effectively flush the pollutants on the surface of the extension 311. Moreover, since the purge chamber 1111 and the exhaust chamber 1211 are both arranged around the extension portion 311, the airflow can quickly flow to the exhaust chamber 1211 along a preset path after flushing the extension portion 311, ensuring that the flushed pollutants can be discharged promptly and effectively.

[0043] In one embodiment, see Figure 2 There is a second gap 123 between the second shell 121 and the extension portion 311, and the second gap 123 is connected to the exhaust chamber 1211 and the first gap 113 respectively. The second gap 123 can ensure that the purge gas at the first gap 113 can enter the second gap 123 more smoothly and be drawn away through the exhaust chamber 1211.

[0044] In another embodiment, see Figure 2 A second through hole is provided in the middle of the second shell 121, and the second through hole is connected to the exhaust chamber 1211. It can be understood that the second through hole is the chamber opening of the exhaust chamber 1211, and the extension portion 311 passes through the second through hole. The shape of the second shell 121 is not limited here, and the second shell 121 can be in a circular ring shape, a square ring shape, etc.

[0045] In a specific embodiment, see Figure 1 and Figure 2 The exhaust assembly 120 also includes an exhaust pipeline 122 provided on the second housing 121 and an exhaust member (not shown in the figure) connected to the exhaust pipeline 122, and the exhaust member is used to extract the purge gas after the rotating shaft 310 is purged. The specific type of the exhaust member is not limited here. For example, the exhaust member is a device capable of extracting air, such as an exhaust pump. Through the exhaust action of the exhaust member, the purge gas with pollutants is sucked into the exhaust chamber 1211 and is extracted through the exhaust pipeline 122, ensuring that the washed pollutants can be discharged in a timely and effective manner.

[0046] In one embodiment, see Figure 1 and Figure 2 The side of the second shell 121 away from the first shell 111 and the protruding portion 311 are sealed by a seal 130. The seal 130 is a sealing ring, etc. The number of seals 130 is not limited here. Under the sealing action of the seal 130, even if the rotating shaft 310 rotates, it can ensure that the protruding portion 311 and the side of the second shell 121 away from the first shell 111 are effectively sealed.

[0047] In one embodiment, the sealing member 130 is disposed on a side of the second housing 121 away from the first housing 111 and sleeved on the overhanging portion 311, and the rotating shaft 310 can rotate in the sealing member 130. The design of the sealing member 130 not only allows the rotating shaft 310 to rotate freely, but also forms a reliable seal between the side of the exhaust member away from the intake member and the overhanging portion 311, thereby enhancing the sealing performance.

[0048] In a specific embodiment, see Figure 1 and Figure 2, the seal 130 is coated with a lubricating sealing material, and the lubricating sealing material is vacuum grease, silicone grease, etc. The lubricating sealing material on the seal 130 can significantly reduce the friction between the extension 311 and the seal 130, so that the rotation of the rotating shaft 310 in the seal 130 becomes smoother, and the wear between the rotating shaft 310 and the seal 130 due to friction can be avoided. The lubricating sealing material not only has a lubricating effect, but also has excellent sealing performance. The lubricating sealing material can fill the small gap between the extension 311 and the seal 130, and enhance the sealing between the extension 311 and the seal 130. The lubricating sealing material on the extension 311 can be removed by the inflation of the purge gas supply assembly and the exhaust of the exhaust member in the aforementioned scheme, thereby avoiding the problem that the lubricating sealing material on the extension 311 enters the housing 200 along the rotating shaft 310 and pollutes the internal space of the housing 200.

[0049] In one embodiment, see Figure 1 and Figure 2 The differential exhaust mechanism 100 further includes a sealing cover 140 disposed on the outer wall of the housing 200 corresponding to the extension 311, and the purge assembly 110 and the exhaust assembly 120 are at least partially located in the sealing cover 140. The design of the sealing cover 140 can prevent the extension 311 of the rotating shaft 310 from directly contacting the external environment, and prevent pollutants from the external environment from falling on the extension 311, thereby playing an isolating and protecting role for the extension 311.

[0050] The inside of the shell 200 is the vacuum side, and the sealing cover 140 is the atmosphere side. By arranging a purge assembly 110 and an exhaust assembly 120 on the extending portion 311 of the rotating shaft 310 extending out of the shell 200, pollutants on the extending portion 311 can be flushed away, and the purge gas and pollutants can be discharged through the suction action of the exhaust assembly 120, thereby preventing pollutants from entering the shell 200 along the rotating shaft 310 and causing pollution to the vacuum side.

[0051] In a specific embodiment, see Figure 1 and Figure 2 The first shell 111 and the second shell 121 are located in the sealing cover 140, the purge pipeline 112 extends out of the sealing cover 140 and is connected to the purge gas supply component located outside the sealing cover 140, and the exhaust pipeline 122 extends out of the sealing cover 140 and is connected to the exhaust component located outside the sealing cover 140.

[0052] In one embodiment, see Figure 1 and Figure 2The extension part 311 is rotatably mounted on the sealing cover 140 through the bearing 150, and the number of the bearing 150 is not limited here. The extension part 311 and the sealing cover 140 are connected by the bearing 150. Due to the rolling action of the rolling body inside the bearing 150, the sliding friction can be converted into rolling friction, thereby greatly reducing the friction resistance, ensuring that the rotating shaft 310 will not be subjected to excessive friction resistance during the rotation process, and will not produce a jamming phenomenon, thereby ensuring the smoothness and stability of the rotation of the rotating shaft 310.

[0053] In a specific embodiment, the inner ring of the bearing 150 is sleeved on the overhanging portion 311, and the outer ring of the bearing 150 is disposed on the side wall of the sealing cover 140 away from the housing 200. When the rotating shaft 310 rotates, the inner ring and the outer ring rotate relative to each other, and the rolling element between the inner ring and the outer ring rotates to play a lubricating role, ensuring that the rotating shaft 310 can rotate smoothly.

[0054] In a specific embodiment, a lubricating sealing material is applied to the bearing 150. The lubricating sealing material on the bearing 150 has a lubricating effect, which can significantly reduce the friction resistance of the bearing 150 during operation, so that the bearing 150 can operate more smoothly.

[0055] The present invention also provides a rotary valve device, Figure 3 FIG. 1 is a schematic diagram of the installation of the differential exhaust mechanism of the present invention in another embodiment. Figure 1 and Figure 3 The rotary valve device includes a housing 200 , a rotary valve body 300 , and a differential exhaust mechanism 100 as in any of the above embodiments. The rotary valve body 300 is rotatably disposed in the housing 200 via a rotating shaft 310 .

[0056] In a specific embodiment, see Figure 1 A rotating shaft 310 is disposed at one end of the rotary valve body 300 , and an extending portion 311 of the rotating shaft 310 partially extends out of the sealing cover 140 and is connected to the driving member 400 , and the driving member 400 is used to drive the rotating shaft 310 to rotate.

[0057] In a specific embodiment, see Figure 3 A rotating shaft 310 is respectively provided on the opposite ends of the rotary valve body 300, and the two rotating shafts 310 are both extended out of the shell 200. The extended parts 311 of the two rotating shafts 310 are respectively provided with a differential exhaust mechanism 100, and the extended part 311 of one of the rotating shafts 310 partially extends out of the sealing cover 140 and is connected to the driving member 400, and the driving member 400 is used to drive the rotating shaft 310 to rotate.

[0058] Specifically, the driving member 400 is a device such as a motor or a rotary cylinder that can drive the rotating shaft 310 to rotate. The specific type of the driving member 400 is not limited here and can be flexibly selected according to actual process requirements.

[0059] The technical effects of the differential exhaust mechanism and the rotary valve device of the present invention are explained in detail below.

[0060] 1. A purge assembly 110 and an exhaust assembly 120 are provided at the position where the rotating shaft 310 of the corresponding rotary valve device passes through, and the purge assembly 110 sprays purge gas to the rotating shaft 310 to flush away pollutants attached to the rotating shaft 310. At the same time, the exhaust assembly 120 extracts the purged gas to prevent pollutants from entering the housing 200 along with the rotating shaft 310, thereby avoiding the pollution problem of the internal space of the housing 200.

[0061] 2. The first housing 111 is disposed on the outer wall of the housing 200 and around the extension 311 of the rotating shaft 310. The purge chamber 1111 is connected to the gap 210 between the housing 200 and the rotating shaft 310. By introducing purge gas into the purge chamber 1111, the pollutants on the surface of the rotating extension 311 are flushed by the airflow, so that the pollutants are separated from the extension 311. The exhaust assembly 120 exhausts air and extracts the purge gas with pollutants to prevent the pollutants from entering the housing 200 from the gap 210. The purge chamber 1111 is designed to surround the extension 311, so that the purge gas can be fully flushed around the extension 311, avoiding cleaning dead corners and improving the cleaning effect.

[0062] 3. The purge chamber 1111 and the exhaust chamber 1211 are arranged around the extension 311, so that the purge gas can fully flush the surface of the rotating shaft 310, ensuring that the extension 311 is fully cleaned. The circumferential suction effect of the purge chamber 1111 can effectively suck and discharge the flushed pollutants, prevent the pollutants from remaining, and enhance the cleaning effect of the purge gas.

[0063] 4. A seal 130 is provided between the side of the second housing 121 away from the first housing 111 and the extension 311 to prevent external pollutants from entering the exhaust chamber 1211. The seal 130 is sleeved on the extension 311 and is not fixedly connected to the rotating shaft 310, so that the rotating shaft 310 can rotate smoothly in the seal 130. This design ensures the sealing performance without affecting the rotation flexibility of the rotating shaft 310.

[0064] 5. The lubricating sealing material plays a lubricating role, which can reduce friction and make the rotating shaft 310 rotate more smoothly in the sealing member 130 ; at the same time, the lubricating sealing material can also enhance the sealing between the rotating shaft 310 and the sealing member 130 .

[0065] 6. A sealing cover 140 is provided on the outer wall of the housing 200, and the first housing 111, the second housing 121 and at least part of the extension 311 are located in the sealing cover 140, which plays a role of isolating from the external environment. This design can prevent pollutants from the external environment from contaminating the part where the rotating shaft 310 is installed on the housing 200.

[0066] 7. The arrangement of the bearing 150 reduces the friction between the sealing cover 140 and the extension portion 311, so that the rotating shaft 310 can rotate more smoothly. At the same time, the bearing 150 can also support the rotating shaft 310 and enhance the stability of the structure.

[0067] In the description of the present invention, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0068] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0069] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0070] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by those with ordinary skills in the field to which the present invention belongs.

Claims

1. A differential exhaust mechanism, characterized in that: include: A purge assembly, which is arranged at a position corresponding to the rotation axis of the rotary valve device and on the housing of the rotary valve device and is used to spray purge gas toward the rotation axis; An exhaust component is arranged at a position where the rotating shaft penetrates the shell and is used to extract the purge gas after the rotating shaft is purged.

2. The differential exhaust mechanism according to claim 1, characterized in that: The rotating shaft partially extends out of the shell to form an extension portion; The purge assembly includes a first shell disposed on the outer wall of the shell and arranged around the protruding portion, a purge chamber arranged around the protruding portion is formed in the first shell, and the purge chamber is communicated with a gap between the shell and the rotating shaft.

3. The differential exhaust mechanism according to claim 2, characterized in that: The exhaust assembly includes a second shell disposed on a side of the first shell away from the shell body and arranged around the protruding portion. An exhaust chamber arranged around the protruding portion is formed in the second shell, and the exhaust chamber is communicated with the purge chamber.

4. The differential exhaust mechanism according to claim 3, characterized in that: A sealing member is provided between the side of the second housing away from the first housing and the protruding portion.

5. The differential exhaust mechanism according to claim 4, characterized in that: The sealing member is arranged on a side of the second housing away from the first housing and sleeved on the protruding portion, and the rotating shaft can rotate in the sealing member.

6. The differential exhaust mechanism according to claim 5, characterized in that: The sealing member is coated with lubricating sealing material.

7. The differential exhaust mechanism according to claim 3, characterized in that: The exhaust assembly further includes an exhaust pipeline disposed on the second shell and an exhaust member connected to the exhaust pipeline, wherein the exhaust member is used to extract the purge gas after the rotating shaft is purged.

8. The differential exhaust mechanism according to claim 2, characterized in that: The purge assembly further includes a purge pipeline disposed on the first shell and a purge gas supply assembly connected to the purge pipeline, wherein the purge gas supply assembly is used to supply purge gas into the purge pipeline.

9. The differential exhaust mechanism according to any one of claims 2 to 8, characterized in that: It also includes a sealing cover which is arranged on the outer wall of the shell corresponding to the protruding portion, and the purge component and the exhaust component are at least partially located in the sealing cover.

10. The differential exhaust mechanism according to claim 9, characterized in that: The outwardly extending portion is rotatably arranged on the sealing cover through a bearing.

11. A rotary valve device, characterized in that: A housing, a rotary valve body, and a differential exhaust mechanism as claimed in any one of claims 1 to 10, wherein the rotary valve body is rotatably arranged in the housing via a rotating shaft.

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