A tilt adjustment device for sub-second precision adjustment

Abstract

The present invention relates to a tilting device for sub-second precision adjustment, comprising a tilting platform, a sub-step adjustment component, a sub-second adjustment component, and a carrier connected in sequence from bottom to top; the fixed end of the sub-step adjustment component is fixed to one side of the tilting platform, and the movable end is sleeved on the other side of the tilting platform; one end of the carrier is fixed to the fixed end of the sub-step adjustment component, and the other end is pressed flat against the movable end of the sub-second adjustment component; the sub-second adjustment component is arranged on the upper part of the sub-step adjustment component, and its movable end moves along the length direction of the carrier. The effect is: first, the sub-step adjustment component is used to achieve coarse adjustment of the carrier's rotation angle, and then the sub-second adjustment component is used to achieve fine adjustment of the carrier's rotation angle, and then the sub-second adjustment component is used to achieve sub-second precision adjustment of the upper equipment of the carrier within a larger angle range.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical motion precision control, in particular to a tilt adjustment device for sub-second precision adjustment. Background Art

[0002] In the field of cold atom interferometric precision measurement technology, precise adjustment of the initial spatial position of the cold atom gravity-sensitive unit is an important means to maintain high-precision plumbness of the Raman light wave vector. During the debugging stage of the Raman light collimation of the cold atom gravity-sensitive unit, an inclinometer is usually used to record the initial position of the sensitive unit when the Raman light is kept plumb, and its accuracy is generally at the sub-second level. In the subsequent debugging stage, the sensitive unit with the initial position adjusted will usually be moved to adapt to the flexibility of debugging, so it is necessary to adjust the actual position of the sensitive unit again to keep it consistent with the initial position. It is usually difficult to achieve this by manually adjusting the base of the sensitive unit. The existing two-dimensional tilt adjustment structure also has the disadvantages of being large in height, the adjustment accuracy is mostly above the second level, and the structure is heavy, which is not easy to carry and load and unload. Summary of the Invention

[0003] The present invention addresses the deficiencies in the background art and provides a tilt adjustment device for sub-second precision adjustment.

[0004] The technical solution of the present invention to solve the above technical problems is as follows: a tilt adjustment device for sub-second precision adjustment, comprising a tilt adjustment platform, a sub-step adjustment component, a sub-second adjustment component, and a bearing member connected in sequence from bottom to top, wherein the fixed end of the sub-step adjustment component is fixed to one side of the tilt adjustment platform, and the movable end is sleeved and pressed against the other side of the tilt adjustment platform; one end of the bearing member is fixed to the fixed end of the sub-step adjustment component, and the other end is pressed flat against the movable end of the sub-second adjustment component; by rotating the movable end of the sub-step adjustment component, one end of the bearing plate is driven to generate displacement in the Z-axis direction, thereby realizing sub-step rotation of the bearing plate in the Z-axis direction;

[0005] The sub-second adjustment component is arranged on the upper part of the sub-level adjustment component, and its movable end moves along the X-axis direction of the carrier. By rotating the rotating wheel at the fixed end of the sub-second adjustment component, the movable end of the sub-second adjustment component drives one end of the carrier to generate displacement in the Z-axis direction, so as to realize sub-second angle adjustment of the carrier plate in the Z-axis direction.

[0006] As a further technical solution, the sub-step adjustment assembly includes a first fixed member, an intermediate plate, a Z-direction movable member, and a second fixed member connected in sequence, wherein one end of the first fixed member is fixed to the tilt adjustment platform and the other end is connected to one end of the intermediate plate, and the other end of the intermediate plate is sleeve-pressed and connected to the Z-direction movable member to achieve Z-axis rotation along with the Z-direction movable member;

[0007] The lower part of the second fixing member is fixed to the middle plate, and the upper part is fixedly connected to one end of the supporting plate; the first fixing member, the second fixing member, the sub-second adjustment component, and the Z-direction moving member are arranged in sequence along the length direction of the tilting platform.

[0008] As a further technical solution, the first fixing member includes: a first fixing seat, a first rotating shaft, and a first connecting member, wherein a plurality of first fixing seats are provided and are spaced apart along the Y-axis direction of the tilting platform, so that the first rotating shaft is supported on the tilting platform through the plurality of first fixing seats;

[0009] One end of the first connecting member is sleeved on the first rotating shaft, and the other end is connected and fixed to the fixed end of the middle plate.

[0010] As a further technical solution, the Z-axis movable part includes a screw, a nut, and a second connecting part. One end of the screw is vertically fixed to the upper part of the tilting platform, and the nut is threadedly connected to the screw. One end of the second connecting part is fixedly connected to the intermediate plate, and the other end is inserted into the screw to abut against the upper end surface of the nut. By pulling the nut, the side of the intermediate plate connected to it is driven to be displaced in the Z-axis direction, so as to realize the sub-stage rotation of the supporting plate in the Z-axis direction.

[0011] As a further technical solution, the Z-axis movable member further includes a gasket fixedly connected to the upper end surface of the nut, and the end of the second connecting member facing away from the intermediate plate abuts against the upper end surface of the gasket.

[0012] As a further technical solution, the second fixing member includes a second fixing seat, a third fixing seat, and a second rotating shaft. The second fixing seat and the third fixing seat are provided in plurality and are spaced apart along the Y-axis direction of the intermediate plate, so that the second rotating shaft is supported on the intermediate plate by the plurality of second fixing seats and supports the upper bearing member by the plurality of third fixing seats.

[0013] The first rotating shaft and the second rotating shaft are arranged in parallel.

[0014] As a further technical solution, the sub-second adjustment assembly further includes a fourth fixing seat, a worm, a turbine, an eccentric wheel, and a top wedge assembly. The worm is mounted on the intermediate plate via the fourth fixing seat. The rotating wheel is connected to one end of the worm and rotates around the Y-axis of the intermediate plate.

[0015] One side of the turbine is gear-engaged with the spiral gear ring on the worm, and the eccentric wheel is arranged on the upper part of the turbine and is eccentrically fixed to it. The rotation of the rotating wheel drives the worm and the turbine to rotate in turn, and then the eccentric wheel pushes and pulls the top wedge assembly to move along the X-axis direction of the intermediate plate;

[0016] One end of the carrier is fixedly connected to the top wedge assembly, and the movement of the top wedge assembly drives one end of the carrier plate to be displaced in the Z-axis direction, so as to realize sub-second rotation of the carrier toward the Z-axis direction.

[0017] As a further technical solution, the top wedge assembly includes a third connecting member, a push-pull rod, a fifth fixing seat, a top wedge connecting member, a top wedge body, a lower fixing seat, and an upper fixing seat. The fifth fixing seat and the lower fixing seat are both fixed to the middle plate. The push-pull rod is provided on the fifth fixing seat, so that the third connecting member, the push-pull rod, the top wedge connecting member, and the top wedge body are fixedly connected in sequence.

[0018] The side of the third connecting member facing away from the push-pull rod is connected to the eccentric wheel, and the upper fixed seat is fixedly connected to the supporting member and arranged opposite to the lower fixed seat, so that the side of the top wedge body facing away from the top wedge connecting member is inserted into the gap between the upper fixed seat and the lower fixed seat, and moves along the X-axis direction of the intermediate plate under the drive of the push-pull rod, so that the supporting plate is displaced in the Z-axis direction, so as to realize the sub-second rotation of the supporting plate toward the Z-axis direction.

[0019] As a further technical solution, the longitudinal section of the top wedge body is constructed as a right-angled trapezoid, and the lower base of the right-angled trapezoid is located on one side of the top wedge connecting piece.

[0020] As a further technical solution, a roller is sleeved on the connecting shaft of the lower fixed seat, so that the lower part of the top wedge body is placed on the roller.

[0021] The beneficial effects of the present invention are: first, sub-gradation precision adjustment of the carrier in the longitudinal direction is achieved through the sub-gradation adjustment component, then sub-second precision adjustment of the carrier in the longitudinal direction is achieved through the sub-second adjustment component, and then sub-second precision adjustment of the upper equipment of the carrier is achieved within a large angular range. At the same time, the structure has a small height dimension and can be positively stacked by at least one of the structures to achieve two-dimensional adjustment, and the adjustment accuracy can be above the sub-second level.

[0022] In addition, the device is small in height and light in weight, and is easy to carry and load and unload. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1This is a schematic structural diagram of a tilt adjustment device for sub-second precision adjustment according to the present invention;

[0024] Figure 2 This is a schematic diagram of the three-dimensional structure of a tilt adjustment device for sub-second precision adjustment of the present invention with the supporting plate removed;

[0025] Figure 3 This is a partially enlarged three-dimensional structural schematic diagram of a tilt adjustment device for sub-second precision adjustment of the present invention with the carrier plate removed;

[0026] Figure 4 It is a three-dimensional enlarged structural diagram of the top wedge assembly, the Z-direction movable member, and the intermediate plate on the tilting platform of the present invention when connected;

[0027] Figure 5 It is an enlarged structural diagram of the lower fixing seat;

[0028] Figure 6 This is a schematic diagram of the three-dimensional structure of two tilt adjustment devices in the present invention when they are orthogonally connected;

[0029] Figure 7 It is a three-dimensional structural entity after removing the upper supporting plate when two tilt adjustment devices are orthogonally connected in the present invention.

[0030] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0031] Tilt adjustment platform 1;

[0032] sub-fractional regulatory component 2;

[0033] A first fixing member 21, a first fixing seat 211, a first rotating shaft 212, and a first connecting member 213;

[0034] Middle plate 22;

[0035] Z-direction movable member 23, screw 231, nut 232, second connecting member 233, gasket 234;

[0036] The second fixing member 24, the second fixing seat 241, the third fixing seat 242, and the second rotating shaft 243;

[0037] Sub-second adjustment component 3;

[0038] Rotating wheel 31, fourth fixing seat 32;

[0039] Worm 33, spiral gear ring 331;

[0040] Turbine 34, eccentric wheel 35;

[0041] Top wedge assembly 36, third connecting member 361, bayonet 3611, push-pull rod 362, fifth fixing seat 363, top wedge connecting member 364, inner recess 3641, top wedge body 365, lower fixing seat 366, roller 3661, upper fixing seat 367;

[0042] Carrying member 4. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.

[0044] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the described features. In the description of this application, "plurality" means two or more, unless otherwise specifically specified.

[0045] In the description of this application, the term "for example" is used to mean "used as an example, illustration or explanation". Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is given to enable any person skilled in the art to implement and use the present invention. In the following description, details are listed for the purpose of explanation. It should be understood that a person of ordinary skill in the art will recognize that the present invention can be implemented without using these specific details. In other examples, well-known structures and processes will not be elaborated in detail to avoid obscuring the description of the present invention with unnecessary details. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the widest scope consistent with the principles and features disclosed in this application.

[0046] Example 1

[0047] In order to achieve high-precision debugging of the Raman light collimation of the cold atomic gravity sensitive unit and achieve sub-second precision adjustment, this embodiment provides a tilt adjustment device for sub-second precision adjustment, see Figure 1 、 Figure 2, comprising a tilting platform 1, a sub-grading adjustment component 2, a sub-second adjustment component 3, and a carrier 4, connected sequentially from bottom to top. The fixed end of the sub-grading adjustment component 2 is fixed to one side of the tilting platform 1, and the movable end is sleeved and pressed against the other side of the tilting platform 1. One end of the carrier 4 is fixed to the fixed end of the sub-grading adjustment component 2, and the other end is pressed flat against the movable end of the sub-second adjustment component 3. By rotating the movable end of the sub-grading adjustment component 2, one end of the carrier 4 is displaced in the Z-axis direction, thereby achieving sub-grading rotation of the carrier 4 in the Z-axis direction. It should be noted that the rotating end of the carrier 4 achieves Z-axis rotation under the action of the sub-grading adjustment component 2, that is, achieving sub-grading precision adjustment of the carrier 4 and one end of the upper equipment of the carrier 4 in the Z-axis direction. The specific parameters of the sub-grading precision adjustment are determined according to the actual situation.

[0048] The sub-second adjustment component 3 is disposed on top of the sub-gradation adjustment component 2, and its movable end moves along the X-axis direction of the carrier 4. By rotating the rotating wheel 31 at the fixed end of the sub-second adjustment component 3, the movable end of the sub-second adjustment component 3 drives one end of the carrier 4 to generate displacement in the Z-axis direction, thereby achieving sub-second rotation of the carrier 4 in the Z-axis direction. It can be seen that if the carrier 4 and the equipment on the carrier 4 are to be adjusted with sub-second precision in the Z-axis direction, the sub-gradation adjustment component 2 can be used to perform sub-gradation precision adjustment first, and then the sub-second adjustment component 3 can be used to perform adjustment, thereby achieving fast and accurate sub-second precision adjustment.

[0049] along Figure 2 From the perspective, the X-axis direction is the length direction of the tilting platform 1, that is, from left to right; the Y-axis direction is the width direction of the tilting platform 1, that is, from front to back; and the Z-axis direction is Figure 1 As shown, the tilting platform 1 is adjusted to the direction of the supporting member 4.

[0050] For example, to achieve two-dimensional angle adjustment, the two tilt adjustment devices of the present invention can be connected in a stacked orthogonal manner, that is, the sub-gradation adjustment components 2 of the upper and lower layers can be arranged vertically in space (the other structural arrangements of the upper and lower layers are similar). (See Figure 6 、 Figure 7 )

[0051] In the specific implementation process, see Figure 2The sub-grading adjustment assembly 2 includes a first fixing member 21, an intermediate plate 22, a Z-direction movable member 23, and a second fixing member 24 connected in sequence. One end of the first fixing member 21 is fixed to the tilting platform 1, and the other end is connected to one end of the intermediate plate 22. The other end of the intermediate plate 22 is movably connected to the Z-direction movable member 23 to achieve a slight movement in the Z-axis direction along with the Z-direction movable member 23. That is, when the Z-direction movable member 23 moves, the end of the intermediate plate 22 connected to it is driven to move slightly along the Z-axis direction. At this time, the edge of the end of the intermediate plate 22 connected to the first fixing member 21 is a rotating edge, that is, the other side of the intermediate plate 22 rotates in the Z-axis direction along this rotating edge.

[0052] The width of the intermediate plate 22 on the side of the first fixing member 21 is greater than the width on the side of the intermediate plate 22 on the side of the Z-direction movable member 23 , so as to reduce the overall weight of the device, lower the cost, and facilitate portability.

[0053] The lower part of the second fixing member 24 is fixed to the middle plate 22, and the upper part is fixedly connected to one end of the supporting member 4, so that when the sub-grade adjustment component 2 and the sub-second adjustment component 3 move, a small movement of one side of the supporting member 4 in the Z-axis direction can be achieved; the first fixing member 21, the second fixing member 24, the sub-second adjustment component 3, and the Z-direction movable member 23 are arranged in sequence along the length direction of the tilting platform 1.

[0054] For example, see Figure 2 The first fixing member 21 includes: a first fixing seat 211, a first rotating shaft 212, and a first connecting member 213. The first fixing seats 211 are provided in plurality and are spaced apart along the Y-axis direction of the tilting platform 1, so that the first rotating shaft 212 is supported on the tilting platform 1 through the plurality of first fixing seats 211.

[0055] One end of the first connecting member 213 is sleeved on the first rotating shaft 212 , and the other end is connected and fixed to one end of the middle plate 22 .

[0056] For example, there are three first fixing seats 211, which are respectively located at both ends and the middle of the first rotating shaft 212. The longitudinal section of the first fixing seat 211 is an inverted T-shape, and the horizontal side of the inverted T-shape can be fixed to the tilting platform 1 by screws. A through hole (not numbered in the figure) is provided at the end of the vertical side of the inverted T-shape away from the horizontal side, which is used to sleeve the first rotating shaft 212, that is, the through hole is coaxial with the first rotating shaft 212.

[0057] For example, the first connecting member 213 is a structure with a Z-shaped longitudinal section (eg Figure 2), and a through hole for the first rotating shaft 212 to pass through is provided at the end of one of the transverse surfaces of the Z-shape, and at least two first connecting members 213 are provided, so that at least one is provided at both ends of the first rotating shaft 212. In order to reduce the cost and weight of the device, two first connecting members 213 are preferably provided, and are located at both ends of the first rotating shaft 212; and the other transverse side of the Z-shape can be connected to the intermediate plate 22 by screws, so that there is a gap between the intermediate plate 22 and the tilting platform 1. When the intermediate plate 22 is in motion, the first rotating shaft 212 can serve as the rotation axis of the intermediate plate 22, so that the intermediate plate 22 can achieve a small angle of rotation around the first rotating shaft 212.

[0058] In the specific implementation process, see Figure 2 、 Figure 3 The Z-direction movable part 23 includes a screw 231, a nut 232, and a second connecting part 233. One end of the screw 231 is vertically fixed to the upper part of the tilting platform 1, and the nut 232 is threadedly connected to the screw 231. One end of the second connecting part 233 is fixedly connected to the intermediate plate 22, and the other end is inserted into the screw 231 to abut against the upper end surface of the nut 232. By pulling the nut 232, the side of the intermediate plate 22 connected to it is driven to move slightly in the Z-axis direction, so as to realize the sub-step rotation of the bearing part 4 in the Z-axis direction. That is, when the nut 232 is pulled, the nut 232 rises or falls along the height direction of the screw 231 (i.e., the Z-axis direction), and then drives the second connecting member 233 and the intermediate plate 22 to rise or fall at the same time. Since the sub-second adjustment component 3 is located on the intermediate plate 22, and one end of the supporting member 4 is fixed to the second fixing member 24 and the other end is mounted on the sub-second adjustment component 3, the movement of the intermediate plate 22 can drive the sub-second adjustment component 3 and the supporting member 4 to rise or fall in the Z-axis direction in turn. In this process, when one end of the supporting member 4 located at the Z-direction movable member 23 produces a small displacement in the Z-axis direction, the second fixing member 24 at the opposite end thereof serves as a rotation axis.

[0059] To improve stability and extend the service life of the nut 232, the Z-movable member 23 further includes a washer 234 fixedly connected to the upper end surface of the nut 232. The end of the second connecting member 233 facing away from the intermediate plate 22 abuts against the upper end surface of the washer 234. For example, the upper end surface of the washer 234 can be a conical surface.

[0060] In the specific implementation process, see Figure 2The second fixing member 24 includes a second fixing seat 241, a third fixing seat 242, and a second rotating shaft 243. A plurality of second fixing seats 241 and third fixing seats 242 are provided, and are spaced apart along the Y-axis of the intermediate plate 22. The second rotating shaft 243 is supported on the intermediate plate 22 by the plurality of second fixing seats 241, and supports the upper portion of the supporting member 4 by the plurality of third fixing seats 242. The first rotating shaft 212 and the second rotating shaft 243 are arranged in parallel. During operation, the supporting member 4 can rotate about the second rotating shaft 243 in the Z-axis direction, that is, the second rotating shaft 243 serves as the rotation axis for the supporting member 4.

[0061] The sub-grading precision adjustment in the present invention is achieved as follows. For example, the rotation radius of the intermediate plate 22 (i.e., the vertical distance from the first rotating shaft 212 to the contact point between the intermediate plate 22 and the nut 232) is 400 mm, and the pitch of the screw 231 is 1 mm. When the nut 232 rotates one circle, the intermediate plate 22 rises 1 mm in the Z-axis direction. Correspondingly, the intermediate plate 22 rotates 0.143° relative to the horizontal plane in the Z-axis direction. When the rotation precision of the nut 232 is controlled within 36°, the rotation of the nut 232 can simultaneously realize the sub-grading angle rotation of the intermediate plate 22 and the carrier 4.

[0062] In the specific implementation process, see Figure 1-Figure 5 The sub-second adjustment assembly 3 also includes a fourth fixed seat 32, a worm 33, a turbine 34, an eccentric wheel 35, and a top wedge assembly 36. The worm 33 is mounted on the intermediate plate 22 through the fourth fixed seat 32. The runner 31 is connected to one end of the worm 33 and rotates around the Y-axis direction of the intermediate plate 22. One side of the turbine 34 is gear-engaged with the spiral gear ring 331 on the worm 33. The eccentric wheel 35 is arranged on the upper part of the turbine 34 and is eccentrically fixed thereto. The rotation of the runner 31 drives the worm 33 and the turbine 34 to rotate in turn, thereby causing the eccentric wheel 35 to push and pull the top wedge assembly 36 to move along the X-axis direction of the intermediate plate 22. One end of the carrier 4 is fixedly connected to the top wedge assembly 36. The movement of the top wedge assembly 36 drives one end of the carrier 4 to produce a smaller movement in the Z-axis direction to achieve sub-second rotation of the carrier 4.

[0063] Furthermore, the top wedge assembly 36 includes a third connecting member 361, a push-pull rod 362, a fifth fixing seat 363, a top wedge connecting member 364, a top wedge body 365, a lower fixing seat 366, and an upper fixing seat 367. The fifth fixing seat 363 and the lower fixing seat 366 are both fixed to the middle plate 22, and the push-pull rod 362 is disposed on the fifth fixing seat 363, so that the third connecting member 361, the push-pull rod 362, the top wedge connecting member 364, and the top wedge body 365 are fixedly connected in sequence.

[0064] The side of the third connecting member 361 facing away from the push-pull rod 362 is connected to the eccentric wheel 35, and the upper fixed seat 367 is fixedly connected to the supporting member 4 and is arranged opposite to the lower fixed seat 366, so that the side of the top wedge body 365 facing away from the top wedge connecting member 364 is inserted into the gap between the upper fixed seat 367 and the lower fixed seat 366, and moves along the X-axis direction of the intermediate plate 22 under the drive of the push-pull rod 362, so that the supporting member 4 is displaced in the Z-axis direction (such as a smaller movement) to achieve sub-second angular rotation of the supporting member 4.

[0065] For example, see Figure 3 The third connecting member 361 has a downward-opening notch 3611 on the side facing the eccentric wheel 35 for retaining the edge of the eccentric wheel 35. Specifically, the width of the notch 3611 matches the thickness of the edge of the eccentric wheel 35. A receptacle for inserting one end of the push-pull rod 362 is provided along the X-axis of the third connecting member 361. Once the push-pull rod 362 is inserted into the receptacle, it can be secured with a screw. For example, the fixing screw can be inserted along the Z-axis to securely connect the third connecting member 361 and the push-pull rod 362.

[0066] The other end of the push-pull rod 362 is inserted into the insertion hole of the top wedge connector 364 and fixed by a screw (for example, the screw is inserted along the Y-axis direction to connect and fix the end of the push-pull rod 362 to the top wedge connector 364). The top wedge connector 364 is provided with an opening facing the inner recess 3641 of the Z-direction movable member 23 on one side away from the push-pull rod 362, and a screw is inserted along the Y-axis direction of the inner recess 3641 to fix one end of the top wedge body 365 in the top wedge connector 364.

[0067] More specifically, the longitudinal section of the top wedge body 365 is a right-angled trapezoid (e.g. Figure 3), and the lower base of the right-angled trapezoid is located on the side of the top wedge connector 364, that is, the upper part of the top wedge body 365 has a slope, and the slope on the side of the top wedge connector 364 is higher than the slope on the side close to the Z-direction movable part 23. When the top wedge body 365 moves along the X-axis, the change in slope will cause this end of the support member 4 to produce a smaller movement in the Z-axis direction.

[0068] For example, see Figure 5 To facilitate the smooth movement of the top wedge body 365 and prevent it from falling out, a roller 3661 is sleeved on the connecting shaft of the lower fixed seat 366, so that the lower portion of the top wedge body 365 rests on the roller 3661. More specifically, the upper fixed seat 367 has an H-shaped longitudinal cross-section. Unlike the lower fixed seat 366, the H-shaped lower fixed seat 366 has coaxial rollers 3661 sleeved on its lateral sides, allowing the bottom end of the top wedge body 365 to slide along the rollers 3661 while the upper end of the top wedge body 365 rolls along the lateral side of the upper fixed seat 367.

[0069] Furthermore, the lower fixing seat 366 and the upper fixing seat 367 are fixedly connected to the middle plate 22 and the supporting member 4 respectively through screws.

[0070] The sub-second precision adjustment can be performed after the sub-grading precision adjustment is performed. The sub-second precision adjustment in the present invention is achieved as follows: for example, when the rotation radius of the carrier 4 (i.e., the vertical distance from the second rotating shaft 243 to the lower fixed base) is 300 mm, the number of teeth of the spiral gear ring 331 on the turbine 34 is 70, and the rotation of the turbine 34 by 80° drives the top wedge assembly 36 to generate a displacement of 3 mm in the X-axis direction; the inclination of the top wedge body 365 is 0.2 (i.e., the vertical distance of the top wedge body 365 in the Z-axis direction on the longitudinal section) is 0.2. , the ratio of the length in the X-axis direction to the length in the X-axis direction) is set, the worm 33 rotates one circle, and the turbine 34 rotates 36° / 7. Correspondingly, the displacement of the top wedge body 365 in the X-axis direction is 27mm / 140, and the displacement of the supporting member 4 pushed by the top wedge body 365 in the Z-axis direction is 27mm / 700, corresponding to a rotation angle of 0.00737° for the supporting member 4. When the rotation of the worm 33 is precisely controlled within 13°, the rotation of the worm 33 can achieve sub-second angular rotation of the supporting member 4.

[0071] It can be explained that the rotation accuracy can be determined according to specific parameters of each structure, for example, the pitch of the screw 231, the number of teeth of the spiral gear ring 331, the inclination of the top wedge body 365, etc.

[0072] It should be noted that, in this embodiment, the first fixing seat 211 , the second fixing seat 241 , the third fixing seat 242 , the fourth fixing seat 32 , and the fifth fixing seat 363 have the same structure, but the setting direction of the third fixing seat 242 is opposite to that of the first fixing seat 211 .

[0073] For example, the upper fixing seat 367 may be a structure formed by connecting two third fixing seats 242 via a connecting shaft, and the setting direction of the upper fixing seat 367 is the same as the setting direction of the third fixing seat 242 .

[0074] It should be noted that, in the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0075] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0076] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A tilt adjustment device for sub-second precision adjustment, characterized in that: The invention comprises an inclination adjustment platform (1), a sub-gradation adjustment component (2), a sub-second adjustment component (3), and a bearing member (4) connected in sequence from bottom to top; the fixed end of the sub-gradation adjustment component (2) is fixed to one side of the inclination adjustment platform (1), and the movable end is sleeved and pressed on the other side of the inclination adjustment platform (1); one end of the bearing member (4) is fixed to the fixed end of the sub-gradation adjustment component (2), and the other end is flatly pressed on the movable end of the sub-second adjustment component (3); by rotating the movable end of the sub-gradation adjustment component (2), one end of the bearing member (4) is driven to rotate in the Z-axis direction, so as to realize the sub-gradation rotation of the bearing member (4) in the Z-axis direction; The sub-second adjustment component (3) is arranged on the upper part of the sub-level adjustment component (2), and its movable end moves along the X-axis direction of the carrier (4). By rotating the rotating wheel (31) at the fixed end of the sub-second adjustment component (3), the movable end of the sub-second adjustment component (3) drives one end of the carrier (4) to generate displacement in the Z-axis direction, thereby realizing sub-second angle adjustment of the carrier (4) in the Z-axis direction; The sub-grading adjustment assembly (2) includes an intermediate plate (22); The sub-second adjustment assembly (3) further includes a fourth fixed seat (32), a worm (33), a turbine (34), an eccentric wheel (35), and a top wedge assembly (36); the worm (33) is mounted on the intermediate plate (22) via the fourth fixed seat (32); the rotating wheel (31) is connected to one end of the worm (33) and rotates around the Y-axis direction of the intermediate plate (22); One side of the turbine (34) is tooth-engaged with the spiral gear ring (331) on the worm (33), and the eccentric wheel (35) is arranged on the upper part of the turbine (34) and is eccentrically fixed thereto. The rotation of the rotating wheel (31) drives the worm (33) and the turbine (34) to rotate in sequence, thereby causing the eccentric wheel (35) to push and pull the top wedge assembly (36) to move along the X-axis direction of the intermediate plate (22); One end of the carrier (4) is fixedly connected to the top wedge assembly (36), and the movement of the top wedge assembly (36) drives one end of the carrier (4) to be displaced in the Z-axis direction, so as to achieve sub-second rotation of the carrier (4) in the Z-axis direction.

2. The tilt adjustment device for sub-second precision adjustment according to claim 1, characterized in that: The sub-grading adjustment component (2) further includes a first fixing member (21), a Z-direction movable member (23), and a second fixing member (24); the first fixing member (21), the intermediate plate (22), the Z-direction movable member (23), and the second fixing member (24) are connected in sequence, one end of the first fixing member (21) is fixed to the tilting platform (1), and the other end is connected to one end of the intermediate plate (22); the other end of the intermediate plate (22) is sleeve-pressed and connected to the Z-direction movable member (23) to realize rotation in the Z-axis direction along with the Z-direction movable member (23); The lower portion of the second fixing member (24) is fixed to the middle plate (22), and the upper portion is fixedly connected to one end of the bearing member (4); the first fixing member (21), the second fixing member (24), the sub-second adjustment component (3), and the Z-direction movable member (23) are arranged in sequence along the length direction of the tilting platform (1).

3. The tilt adjustment device for sub-second precision adjustment according to claim 2, characterized in that: The first fixing member (21) comprises: a first fixing seat (211), a first rotating shaft (212), and a first connecting member (213); a plurality of the first fixing seats (211) are provided and are spaced apart along the Y-axis direction of the tilting platform (1), so that the first rotating shaft (212) is supported on the tilting platform (1) through the plurality of the first fixing seats (211); One end of the first connecting member (213) is sleeved on the first rotating shaft (212), and the other end is connected and fixed to the fixed end of the middle plate (22).

4. The tilt adjustment device for sub-second precision adjustment according to claim 3, characterized in that: The Z-direction movable member (23) comprises a screw (231), a nut (232), and a second connecting member (233). One end of the screw (231) is vertically fixed to the upper portion of the tilting platform (1). The nut (232) is threadedly connected to the screw (231). One end of the second connecting member (233) is fixedly connected to the intermediate plate (22), and the other end is inserted into the screw (231) to abut against the upper end surface of the nut (232). By pulling the nut (232), the side of the intermediate plate (22) connected to it is driven to move in the Z-axis direction, so as to realize the sub-stage rotation of the bearing member (4) in the Z-axis direction.

5. The tilt adjustment device for sub-second precision adjustment according to claim 4, characterized in that: The Z-direction movable member (23) further includes a washer (234) fixedly connected to the upper end surface of the nut (232), and one end of the second connecting member (233) facing away from the intermediate plate (22) abuts against the upper end surface of the washer (234).

6. The tilt adjustment device for sub-second precision adjustment according to claim 3, characterized in that: The second fixing member (24) includes a second fixing seat (241), a third fixing seat (242), and a second rotating shaft (243). The second fixing seat (241) and the third fixing seat (242) are provided in plurality and are spaced apart along the Y-axis direction of the middle plate (22), so that the second rotating shaft (243) is supported on the middle plate (22) through the plurality of second fixing seats (241) and supports the upper bearing member (4) through the plurality of third fixing seats (242). The first rotating shaft (212) and the second rotating shaft (243) are arranged in parallel.

7. The tilt adjustment device for sub-second precision adjustment according to claim 1, characterized in that: The top wedge assembly (36) includes a third connecting member (361), a push-pull rod (362), a fifth fixing seat (363), a top wedge connecting member (364), a top wedge body (365), a lower fixing seat (366), and an upper fixing seat (367). The fifth fixing seat (363) and the lower fixing seat (366) are both fixed to the middle plate (22). The push-pull rod (362) is arranged on the fifth fixing seat (363), so that the third connecting member (361), the push-pull rod (362), the top wedge connecting member (364), and the top wedge body (365) are fixedly connected in sequence. The side of the third connecting member (361) facing away from the push-pull rod (362) is connected to the eccentric wheel (35), and the upper fixed seat (367) is fixedly connected to the supporting member (4) and arranged opposite to the lower fixed seat (366), so that the side of the top wedge body (365) facing away from the top wedge connecting member (364) is inserted into the gap between the upper fixed seat (367) and the lower fixed seat (366), and moves along the X-axis direction of the intermediate plate (22) under the drive of the push-pull rod (362), so that the supporting member (4) is displaced in the Z-axis direction, so as to realize the sub-second rotation of the supporting member (4) in the Z-axis direction.

8. The tilt adjustment device for sub-second precision adjustment according to claim 7, characterized in that: The longitudinal section of the top wedge body (365) is configured as a right-angled trapezoid, and the lower base of the right-angled trapezoid is located on one side of the top wedge connecting member (364).

9. The tilt adjustment device for sub-second precision adjustment according to claim 7, characterized in that: A roller (3661) is sleeved on the connecting shaft of the lower fixed seat (366), so that the lower part of the top wedge body (365) is placed on the roller (3661).

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