Near-field electromagnetic signal acquisition and control equipment

Abstract

The present invention relates to the technical field of near-field electromagnetic signal acquisition, and in particular to a near-field electromagnetic signal acquisition and control device. The device comprises a Y-axis linear module, an X-axis linear module, and a slide rail arranged on a frame, a fixed crossbeam arranged on a mover of the Y-axis linear module and a slider of the slide rail, an X-axis linear module arranged on the fixed crossbeam, and a probe arranged on the X-axis linear module. The frame comprises left and right frame platforms, a bottom plate arranged at the bottom of the frame, the left and right frame platforms respectively provided with the Y-axis linear module and the slide rail in parallel, the slide rail being adapted to be provided with a slider, a top frame arranged on the frame, the top frame provided with a downward-illuminating camera, a Z-axis cantilever arranged on the mover of the X-axis linear module, and a device for fixing the probe arranged at the lower end of the Z-axis cantilever. The present invention realizes high-speed, high-precision, and anti-interference automated acquisition of near-field electromagnetic signals.

Description

Technical Field

[0001] The present invention belongs to the technical field of detection equipment, and in particular relates to a near-field electromagnetic signal acquisition and control device. Background Art

[0002] In recent years, with the rapid development of electronic information science, the operating frequency of circuit boards and chips has increased at a geometric rate, and the integration and power level of the devices in them have become increasingly higher. This has brought many problems to the electromagnetic compatibility of circuit boards, chips, and even the entire system. In this context, the industry has formulated a large number of standards to limit the external electromagnetic radiation intensity of high-speed circuit boards, chips, etc. The standards mandate that products must pass a series of extremely rigorous tests before they are released to the market. These tests often require high testing costs and long testing cycles. These existing problems require R&D designers to consider the requirements of electromagnetic compatibility in the early stages of system design. Therefore, professional equipment is needed to perform some necessary tests. For example, Riscure's high-precision electromagnetic probe and electric XYZ worktable can simply clamp the probe to achieve XYZ movement, locate the chip surface, scan a certain point, and collect electromagnetic signals. However, there are many problems: 1. The positioning accuracy is poor, and only a single measurement of a small number of points can be achieved. After the measurement is completed, it cannot be marked, and repeated positioning is not accurate enough. Traceability is poor or cannot be traced; 2. There are many sources of electromagnetic interference, which affects the test results. High-end products should 1. It is difficult to meet the needs; 2. Imported high-precision acquisition equipment can only clamp probes from a single manufacturer, which limits the needs of different test scenarios. The probes currently used in the near field have different shapes and sizes, the probe clamping is unstable, the clampable probes are single, and they are not compatible with probes of various forms and structures, nor can the probes be stably changed in direction; 3. The probe is prone to accidental collision with protruding components in uneven circuit boards, causing damage to the probe; 4. The structure of the circuit board clamping mechanism is complex, and the poor clamping stability can easily cause position deviation, and the operation process is time-consuming and labor-intensive; 5. The types of chip modules on the tested circuit board are different, and the required near-field test methods also need to be proposed in a targeted manner. Summary of the Invention

[0003] In order to solve the problem of rapid, accurate and interference-resistant automatic detection of electromagnetic radiation from a chip, the present invention invents a near-field electromagnetic signal acquisition and control device.

[0004] The present invention adopts the following technical solutions:

[0005] Near-field electromagnetic signal acquisition and control equipment includes a Y-axis linear module, an X-axis linear module, and a slide rail arranged on a frame. A fixed beam is provided on the mover of the Y-axis linear module and the slider of the slide rail. The fixed beam is provided with an X-axis linear module. The X-axis linear module is provided with a probe. Left and right frame platforms are provided on the frame. A bottom plate is provided at the bottom of the frame. The left and right frame platforms are respectively provided with a Y-axis linear module and a slide rail in parallel. The slide rail is adapted to be provided with a slider. A top frame is provided on the frame. The top frame is provided with a downward-illuminating camera. A Z-axis cantilever is provided on the mover of the X-axis linear module. A device for fixing the probe is provided at the lower end of the Z-axis cantilever.

[0006] The near-field electromagnetic signal acquisition and control equipment also includes a partition assembly and a cover bin. Partition assemblies are arranged under the left and right frame platforms of the frame, and a cover bin is arranged on the frame for opening and closing. The closed cover bin, partition assembly and the upper frame of the frame together form a closed metal cavity. A thinner transition rod with an equilateral square cross-section is arranged in the middle of the Z-axis cantilever; the transition rod section passes through the partition assembly.

[0007] The bottom plate is an insulator, and a matrix of threaded holes is provided on the bottom plate. Steel wire screw sleeves are provided in the threaded holes. The bottom plate is used to place and fix the plate to be tested, and the fixed plate to be tested is adapted to be provided with a clamping piece for clamping the plate to be tested.

[0008] The partition assembly includes: a long guide rail, a short guide rail, a long slide, a short slide, a fixed plate, a lower cover, and an upper cover. Two long guide rails and two short guide rails are spliced ​​in pairs to form a frame. The long guide rails and the short guide rails are provided with grooves for accommodating the long slide, the short slide and the fixed plate. The inner sides are stacked with a short slide that moves laterally, a long slide that moves endways, and a fixed plate. A rectangular opening is provided in the fixed plate. The long slide and the short slide are respectively provided with slots parallel to the extension direction of the plate body. The slots of the long slide and the short slide intersect crosswise and form a rectangular through hole that runs through the top and bottom. The rectangular through hole is adapted to the transition rod of the Z-axis cantilever. When the long slide and the short slide are moved along the long guide rail When the short guide rail slides, the rectangular through hole formed by the cross intersection of the slot holes of the long skateboard and the short skateboard moves in the X and Y directions within the range of the rectangular opening, and the upper and lower sides of the partition assembly remain shielded. The long skateboard and the short skateboard are respectively provided with circular holes, which are stepped holes. The stepped hole of the long skateboard is adapted to be provided with a lower cover, and the stepped hole of the short skateboard is adapted to be provided with an upper cover. The inner diameter of the stepped hole of the short skateboard is larger than the outer diameter of the lower cover. When the rectangular through hole formed by the cross intersection of the slot holes of the long skateboard and the short skateboard is within the range of the rectangular opening to one corner, the circular holes set on the long skateboard and the short skateboard are coaxial, and the camera's field of view is projected onto the bottom plate through the circular holes set on the long skateboard and the short skateboard.

[0009] A light source is provided in the middle of the top frame and is adapted adjacent to the camera. An infrared indicator is provided in the middle of the top frame and is adjacent to the camera.

[0010] The clamping part is provided with multiple steps, the clamping part shaft is provided with a through hole deviating from the axis, each step of the multiple steps is provided with a U-shaped groove, and the locking screw is adapted to pass through the through hole and be screwed into the wire screw sleeve hole of the base plate.

[0011] The device for fixing the probe is a probe fixing device, including: a fixed plate, an upper plate, a lower plate, a guide column, an axis tube, a spring, a vertical clamping plate, and a horizontal clamping plate. The fixed plate is vertically arranged for connecting the Z-axis cantilever, and the upper plate and the lower plate are arranged in parallel on the fixed plate. The guide column and the axis tube are fixedly arranged in parallel between the upper plate and the lower plate. The vertical clamping plate is arranged in the horizontal groove formed between the upper plate and the lower plate, and the vertical clamping plate is provided with a hole-type sliding bearing. The hole-type sliding bearing is adapted to the axis of the axis tube to constrain the vertical clamping plate to float up and down in the horizontal groove formed between the upper plate and the lower plate. The axis tube sleeve between the upper plate and the vertical clamping plate is provided with a spring, and the vertical clamping plate is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism.

[0012] A transverse clamping plate is fixedly arranged under the vertical clamping plate. The transverse clamping plate is provided with front and rear through holes with one end open, and the front and rear through holes are provided with screw locking mechanisms.

[0013] The near-field electromagnetic signal acquisition and control device also includes a tensioning sleeve. The upper and lower through holes and the front and rear through holes are provided with tensioning sleeves. The tensioning sleeve is provided with radial openings. A polygonal hole is provided in the sleeve for clamping an adapted polygonal probe body.

[0014] The device for fixing the probe is a universal probe fixing device, including: a horizontal fixing plate, a variable clamping piece, an adjusting nut, a force adjustment spring, a T-bar, a ball spring pin, and a locking screw. The left side of the horizontal fixing plate is used to be fixed to the Z-axis cantilever. A raised plate is provided on the right side of the horizontal fixing plate. The plate is provided with a horizontal through hole. The T-end of the T-bar is connected with a variable clamping piece. The tail rod body of the T-bar is inserted into the through hole of the horizontal fixing plate. The tail of the T-bar that passes through the through hole is provided with an external thread. The tail of the T-bar is sleeved with a force adjustment spring. An adjusting nut is screwed on the external thread, and ball spring pins sunk into the body of the horizontal fixing plate are distributed on the adjacent surfaces of the horizontal fixing plate and the variable clamping piece. Small pits corresponding to the ball spring pins are provided on the adjacent surface of the variable clamping piece. The variable clamping piece can rotate freely 360 degrees around the axis of the rod body at the tail of the T-bar, wherein the positioning and limiting are achieved in the up, down, left and right directions by the cooperation of the ball spring pin and the small pit. The variable clamping piece is provided with a through hole for passing the probe, an opening is provided on one side of the through hole, and a locking screw is provided adjacent to the through hole for locking the clamping probe.

[0015] Compared with the existing technology, the present invention can achieve the following technical effects: combining with the visual recognition system to take pictures, realize grid division, guide the module to accurately move and cooperate with the probe to collect data, realize the signal collection, recording and traceability functions corresponding to the coordinate points, can continuously locate and collect the measured target, and can also locate and collect data for a single point. Through the setting of the probe fixing device and the universal probe fixing device, the probe direction can be adjusted at multiple angles to locate and collect data for a certain point in three-dimensional space, and an elastic floating mechanism and anti-collision mechanism are provided to prevent the probe from accidentally colliding. The probe fixing device The universal probe fixture can take into account probes with different structures and functions, further improving the probe clamping capacity and stability. The insulating base plate is equipped with a wire screw sleeve to achieve insulation while improving the use effect and life of the threaded hole. By setting the cover, partition assembly and the upper frame of the frame to form a closed metal cavity, interference sources such as motors and cameras are isolated, meeting the requirements of accurate electromagnetic signal acquisition in high-end scenarios, while also taking into account the camera field of view projection. The special design of the clamping parts can meet the requirements of clamping plates and chips of different heights and shapes. The setting of the U-shaped groove can realize two-way positioning of the edges and corners of the plate.

[0016] The present invention realizes high-speed, high-precision, and interference-resistant automatic acquisition of near-field electromagnetic signals. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention without the lower cover and the upper cover;

[0018] Figure 2 This is a schematic diagram of the partial three-dimensional structure of the partition assembly of the present invention after the lower cover and the upper cover are installed;

[0019] Figure 3 yes Figure 2 The right-facing schematic diagram of

[0020] Figure 4 yes Figure 2 Schematic diagram of the top view;

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the Z-axis cantilever;

[0022] Figure 6 It is a schematic diagram of the partition assembly without the lower cover and the upper cover;

[0023] Figure 7 This is an exploded view of the partition assembly without the lower cover and upper cover;

[0024] Figure 8 This is a schematic diagram of the state when the long slide and the short slide circular holes are aligned and the lower cover and the upper cover are opened;

[0025] Figure 9It is a schematic diagram of the three-dimensional structure of the first device for fixing the measuring head;

[0026] Figure 10 It is a schematic diagram of the three-dimensional structure of the clamping part;

[0027] Figure 11 This is a three-dimensional diagram of the second type of fixed probe device and a schematic diagram of the variable working state;

[0028] Figure 12 yes Figure 11 Right-pointing schematic diagram and variable state schematic diagram;

[0029] Figure 13 yes Figure 12 Schematic diagram of the middle AA section;

[0030] Figure 14 This is a schematic diagram of the installation structure of the second fixed probe in the flipped state of the clamping part;

[0031] Figure 15 It is a schematic diagram of the structure of the clamping part fixed on the base plate by locking screws and wire thread sleeves.

[0032] Among them, 1-frame, 2-base plate, 3-frame table, 4-Y-axis linear module, 5-X-axis linear module, 6-slide rail, 7-top frame, 8-camera, 9-light source, 10-infrared indicator, 11-Z-axis cantilever, 12-partition assembly, 13-clamp, 14-locking screw, 15-straight rod point probe, 16-annular probe, 17-cover, 18-probe fixture, 19-plate and chip, 20-universal probe fixture, 1101-transition rod, 1201-long guide rail, 1202-short guide rail, 1203-long slide, 1204-short slide, 120 5-fixed plate, 1206-lower cover, 1207-upper cover, 1301-multi-step, 1302-through hole, 1303-U-shaped groove, 1801-fixed plate, 1802-upper plate, 1803-lower plate, 1804-guide column, 1805-axle tube, 1806-spring, 1807-vertical clamping plate, 1808-horizontal clamping plate, 1809-tensioning sleeve, 2001-horizontal fixed plate, 2002-variable clamping part, 2003-adjusting nut, 2004-force adjusting spring, 2005-T-rod, 2006-ball spring pin, 2007-locking screw. DETAILED DESCRIPTION

[0033] like Figure 1-15, near-field electromagnetic signal acquisition and control equipment, including: frame 1, base plate 2, Y-axis linear module 4, X-axis linear module 5, slide rail 6, top frame 7, camera 8, Z-axis cantilever 11, partition assembly 12, clamping part 13, locking screw 14, cover compartment 17, and probe fixing device 18. The frame 1 is rectangular, and is provided with left and right frame platforms 3 on the frame 1. A base plate 2 is provided at the bottom of the frame 1. The left and right frame platforms 3 are respectively provided with Y-axis linear modules 4 and slide rails 6 in parallel. The slide rails 6 are adapted to be provided with sliders. Fixed beams are provided on the movers of the Y-axis linear modules 4 and the sliders of the slide rails 6. The fixed beams are provided with X-axis linear modules 5. The left and right frame platforms 3 adjacent to the frame 1 are provided with gantry-type top frames 7. A downward-illuminating camera 8 is provided in the middle of the top frame 7. A Z-axis cantilever 11 is provided on the mover of the X-axis linear module 5. The Z-axis cantilever 11 extends downward in an "inverted L" shape. A probe fixing device 18 is fixed at the lower end of the Z-axis cantilever 11 for fixing the probe. The probes include: straight rod point probes 15 and annular probes 16, which are used for measurement needs in different directions and different measuring points. , a partition assembly 12 is provided under the left and right frame platforms 3 of the frame 1, and a cover bin 17 is provided on the frame 1 for opening and closing. The closed cover bin 17, the partition assembly 12 and the upper frame body of the frame 1 together form a closed metal cavity to isolate the electromagnetic radiation caused by the module motor, camera, light source, etc. from spreading outward, and prevent the generated electromagnetic radiation from interfering with the probe, the measured plate under the partition assembly 12 - the plate body and the chip 19. The bottom plate 2 is an insulator, such as phenolic resin. A matrix of threaded holes is provided on the bottom plate 2, and a wire screw sleeve is provided in the threaded hole. The bottom plate 2 is used to place and fix the measured plate, and is adapted to be provided with a clamping member 13 for clamping the measured plate. The clamping member 13 is provided with multiple steps 1301 of a certain height but different heights, and the axis of the clamping member 13 is provided with a through hole 1302 deviating from the axis, such as Figure 10 Each step of the multi-step step 1301 is respectively provided with a U-shaped groove 1303, and the locking screw 14 is adapted to pass through the through hole 1302 and screwed into the wire screw sleeve hole of the bottom plate 2.

[0034] A light source 9 is provided in the middle of the top frame 7 and is adjacent to the camera 8 .

[0035] An infrared indicator 10 is provided in the middle of the top frame 7 and is adjacent to the camera 8 .

[0036] like Figure 5 , Figure 2 A thinner transition rod 1101 with an equilateral square cross section is provided in the middle of the Z-axis cantilever 11; the transition rod section passes through the partition assembly 12.

[0037] like Figure 2 、 Figure 6-7As shown, the partition assembly 12 includes: a long guide rail 1201, a short guide rail 1202, a long slide 1203, a short slide 1204, a fixed plate 1205, a lower cover 1206, and an upper cover 1207. The two long guide rails 1201 and the two short guide rails 1202 are spliced ​​in pairs to form a frame. The long guide rails 1201 and the short guide rails 1202 are provided with grooves inside to accommodate the long slide 1203, the short slide 1204, and the fixed plate 1205. Figure 7 , a short slide 1204 that moves laterally, a long slide 1203 that moves endways, and a fixed plate 1205 are stacked on the inside, and a rectangular opening is provided in the fixed plate 1205. The long slide 1203 and the short slide 1204 are respectively provided with slots parallel to the extension direction of the plate body. The slots of the long slide 1203 and the short slide 1204 cross-intersect and form a rectangular through-hole that passes through from top to bottom. The rectangular through-hole is adapted to the transition rod 1101 of the Z-axis cantilever 11. When the long slide 1203 and the short slide 1204 slide along the long guide rail 1201 and the short guide rail 1202, the rectangular through-hole formed by the cross-intersection of the slots of the long slide 1203 and the short slide 1204 moves in the X and Y directions within the range of the rectangular opening, and the upper and lower sides of the partition assembly 12 remain shielded. The long slide 1203 and the short slide 1204 are respectively provided with circular holes, such as Figure 7 , the circular hole is a stepped hole, the stepped hole of the long slide 1203 is adapted to be provided with a lower cover 1206, the stepped hole of the short slide 1204 is adapted to be provided with an upper cover 1207, the inner diameter of the stepped hole of the short slide 1204 is larger than the outer diameter of the lower cover 1206, when the rectangular through hole formed by the cross intersection of the slot holes of the long slide 1203 and the short slide 1204 is within the range of the rectangular mouth to one corner, the circular holes provided on the long slide 1203 and the short slide 1204 are coaxial, such as Figure 1 As shown, at this time, the viewing angle of the camera 8 is projected onto the bottom plate 2 through the circular holes provided in the long slide 1203 and the short slide 1204 .

[0038] There are two devices for fixing the probe, a probe fixing device 18 and a universal probe fixing device 20, such as Figure 9The first probe fixing device 18 includes: a fixing plate 1801, an upper plate 1802, a lower plate 1803, a guide column 1804, a shaft tube 1805, a spring 1806, a vertical clamping plate 1807, a horizontal clamping plate 1808, and a tensioning sleeve 1809. The fixing plate 1801 is vertically arranged for connecting the Z-axis cantilever 11. The upper plate 1802 and the lower plate 1803 are arranged in parallel below the fixing plate 1801. The guide column 1804 and the shaft tube 1805 are fixedly arranged in parallel between the upper plate 1802 and the lower plate 1803. The upper plate 1802 and the lower plate 1803 form a space between them. A vertical clamping plate 1807 is provided in the horizontal groove, and the vertical clamping plate 1807 is provided with a hole-type sliding bearing. The hole-type sliding bearing is adapted to the hole axis of the shaft tube 1805, constraining the vertical clamping plate 1807 to float up and down in the horizontal groove formed between the upper plate 1802 and the lower plate 1803. The shaft tube 1805 between the upper plate 1802 and the vertical clamping plate 1807 is sleeved with a spring 1806, and the vertical clamping plate 1807 is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism, and the screw locking can elastically compress the diameter of the upper and lower through holes to realize the placement of the shaft body in the hole.

[0039] Furthermore, a horizontal clamping plate 1808 is fixedly installed under the vertical clamping plate 1807, and is provided with front and rear through holes with one end open. The front and rear through holes are provided with screw locking mechanisms. The screw locking can elastically compress the diameter of the front and rear through holes to achieve the placement of the shaft in the hole.

[0040] Furthermore, a tension sleeve 1809 is provided in the upper and lower through holes and the front and rear through holes. The tension sleeve 1809 is provided with a radial opening and a polygonal hole is provided in the sleeve for clamping an adapted polygonal probe body, such as Figure 9 The straight rod point probe 15 is shown.

[0041] like Figure 11-14The second universal probe fixing device 20 includes: a horizontal fixing plate 2001, a variable clamping member 2002, an adjusting nut 2003, a force adjusting spring 2004, a T-shaped rod 2005, a ball spring pin 2006, and a locking screw 2007. The left side of the horizontal fixing plate 2001 is used to be fixed to the Z-axis cantilever 11. A raised plate is provided on the right side of the horizontal fixing plate 2001. The plate is provided with a horizontal through hole. The T-shaped end of the T-shaped rod 2005 is connected with a variable clamping member 2002. The tail rod body of the T-shaped rod 2005 is inserted into the through hole of the horizontal fixing plate 2001. The tail of the T-shaped rod 2005 passing through the through hole is fixed to the Z-axis cantilever 11. The tail of the rod body is provided with an external thread, and the tail of the rod body of the T-bar 2005 is provided with a force adjustment spring 2004, and the external thread is screwed with an adjusting nut 2003. The adjacent surface of the horizontal fixing plate 2001 and the clamping member 2002 is provided with a ball spring pin 2006 sunk into the plate body of the horizontal fixing plate 2001, and the adjacent surface of the clamping member 2002 is provided with a small pit corresponding to the ball spring pin 2006. The clamping member 2002 can rotate freely 360 degrees around the axis of the rod body of the T-bar 2005, wherein the upper, lower, left and right directions are fixed and limited by the cooperation of the ball spring pin 2006 and the small pit. Figure 12 The clamping member 2002 can also be flipped 90 degrees, or temporarily fixed at a certain balance point. The positioning, limiting and flipping force of the clamping member 2002 can be adjusted by screwing the adjusting nut 2003 to compress the force adjusting spring 2004. The clamping member 2002 is provided with a through hole for passing the probe, an opening is provided on one side of the through hole, and a locking screw 2007 is provided adjacent to the through hole for locking the clamping probe.

[0042] The cover 17 is connected to the frame 1 by a hinge, or is fastened separately, and no gap is generated at the joint in the process or the electromagnetic isolation effect is achieved by setting a shielding material such as conductive rubber or polymer composite shielding material at the gap, such as Figure 3 As shown, the cables connecting the motor, camera 8, etc. are led out from the cover compartment 17 next to the external controller, and the cables are provided with a shielding layer.

[0043] Implementation method:

[0044] like Figure 1 , the cover 17 is opened, the controller drives the X-axis linear module 5 and the Y-axis linear module 4 to work, the mover of the Y-axis linear module 4 and the slider of the slide rail 6 and the fixed beam are integrated, the mover of the Y-axis linear module 4 moves along the Y direction, so that the fixed beam and the X-axis linear module 5 move at the same time, and the slider of the slide rail 6 moves with it, so that the Z-axis cantilever 11 stays at the position where it works in the X and Y directions. Figure 1 The upper left corner of the rectangular opening of the fixed plate 1205 is also the working initial position; after the equipment has run for many times and generated cumulative errors, the setting of the working initial position can achieve the function of mechanical return to zero and eliminate the cumulative errors.

[0045] like Figure 8, the lower cover 1206 and the upper cover 1207 are opened from the long slide 1203 and the short slide 1204 to meet the illumination observation of the camera and the infrared indicator 10;

[0046] The infrared indicator 10 is projected onto the bottom plate 2 to guide the installation of the tested board and the chip 19 to be positioned within the field of view of the camera 8, as shown in FIG. Figure 1 、 Figure 15 As shown, the board and the chip 19 are clamped by a plurality of clamping members 13, and the locking screw 14 is screwed into the wire screw sleeve hole of the bottom plate 2. By eccentrically rotating the clamping member 13, a certain step of the multi-step step 1301 is clamped to the outer periphery of the board body and the chip 19. The multi-step step 1301 is used to lift to meet the height of different boards and chips 19, so that the distance between the measured surface and the camera 8 is within the optimal field of view clarity range of the camera 8. After the position is stable, the locking screw 14 is tightened to make it stable. The U-shaped groove 1303 is used to adapt and position the right-angle edge of the measured board.

[0047] When using the probe fixing device 18, adjust the screw locking mechanism to loosen the tension sleeve 1809, and move the polygonal straight rod point probe 15 vertically up and down so that the probe end point is consistent in height with the fixed plate and the measured surface of the chip 19; when the side head body is a cylinder, the tension sleeve 1809 can be removed and locked directly.

[0048] When the universal probe fixture 20 is used, the probe is installed in the through hole of the clamping member 2002, and the locking screw 2007 is adjusted to lock and clamp the probe so that it can move vertically up and down so that the probe end point is at the same height as the fixed plate and the measured surface of the chip 19;

[0049] At this time, the controller controls the camera 8 and the light source 9 to take pictures, and the image is processed and grid-divided at the back end. The system automatically establishes the X-axis and Y-axis coordinates of the working initial position, the grid initial position, the scanning path, and the grid end position. The lower cover 1206 and the upper cover 1207 cover the long slide 1203 and the short slide 1204, and the cover bin 17 is closed, so that the electromagnetic interference sources such as the motor and the camera 8 are enclosed in the space inside the cover bin 17. The controller controls the driving of the X-axis linear module 5 and the Y-axis linear module 4 to work, so that the Z-axis cantilever 11 and its probe scan according to the predetermined grid initial position, scanning path, and grid end position. For example, the probe performs data acquisition once every 1 mm step, and the acquired data and the coordinate position data are transmitted to the controller so that the corresponding electromagnetic signal data of the image coordinate point is stored to achieve traceability.

[0050] In addition to performing the above-mentioned automatic path scanning, the X-axis linear module 5 and the Y-axis linear module 4 can also be manually controlled to work, fixed to a certain point on the measured surface of the board and the chip 19, store the coordinates and collect the probe data.

[0051] During the above measurement process, when the probe accidentally touches the protrusions of the measured plate and chip 19, the vertical clamping plate 1807 of the probe fixing device 18 compresses the spring 1806 and floats toward the upper plate 1802, thereby avoiding obstacles and preventing contact damage.

[0052] When the universal probe fixture 20 is used, Figure 11-12 The clamping member 2002 has a multi-directional flipping capability, which can be flipped by compressing the force regulating spring 2004 and stretching the T-bar 2005, or by exceeding the limiting force of the ball spring pin 2006 through the collision deflection force, so that it can be deflected to avoid obstacles and prevent touch damage.

[0053] The clamping member 2002 of the universal probe fixture 20 has multiple direction adjustments, such as Figure 11 The left and right rotation method, such as Figure 12 The up and down swing mode, such as Figure 13 The vertical and horizontal positioning / limiting methods, such as Figure 14 The flipping mode can meet the automatic scanning measurement and temporary multi-angle single-point measurement of different working conditions. During the adjustment process, the adjusting nut 2003 can be adjusted to compress the force adjusting spring 2004 for force control.

[0054] The probe fixing device 18 can clamp the horizontal annular probe 16 or the straight rod point probe 15 to meet different measurement requirements.

Claims

1. A near-field electromagnetic signal acquisition and control device, comprising a Y-direction linear module (4), an X-direction linear module (5), and a slide rail (6) provided on a frame (1), a fixed beam provided on the mover of the Y-direction linear module (4) and a slider of the slide rail (6), an X-direction linear module (5) provided on the fixed beam, and a probe provided on the X-direction linear module (5), characterized in that: The frame (1) is provided with left and right frame platforms (3), the bottom of the frame (1) is provided with a bottom plate (2), the left and right frame platforms (3) are respectively provided with Y-axis linear modules (4) and slide rails (6) in parallel, the slide rails (6) are adapted to be provided with sliders, the frame (1) is provided with a top frame (7), the top frame (7) is provided with a downward-illuminating camera (8), the mover of the X-axis linear module (5) is provided with a Z-axis cantilever (11), and the lower end of the Z-axis cantilever (11) is provided with a device for fixing a probe; It also includes a partition assembly (12) and a cover bin (17), wherein the partition assembly (12) is provided under the left and right frame platforms (3) of the frame (1), and the cover bin (17) is provided on the frame (1) for opening and closing. The closed cover bin (17), the partition assembly (12) and the upper frame body of the frame (1) together form a closed metal cavity, and a thin transition rod (1101) with an equilateral square cross section is provided in the middle of the Z-axis cantilever (11); the transition rod section passes through the partition assembly (12); The partition assembly (12) includes: a long guide rail (1201), a short guide rail (1202), a long slide plate (1203), a short slide plate (1204), a fixed plate (1205), a lower cover (1206), and an upper cover (1207). The two long guide rails (1201) and the two short guide rails (1202) are spliced ​​in pairs to form a frame. The long guide rails (1201) and the short guide rails (1202) are provided with grooves on the inner sides for accommodating the long slide plate (1203), the short slide plate (1204), and the fixed plate (1205). A short slide plate (1204) that moves laterally, a long slide plate (1203) that moves end-to-end, and a fixed plate (1205) are provided. A rectangular opening is provided in the fixed plate (1205). The long slide plate (1203) and the short slide plate (1204) are respectively provided with slots parallel to the extension direction of the plate body. The slots of the long slide plate (1203) and the short slide plate (1204) intersect crosswise and form a rectangular through hole that passes through from top to bottom. The rectangular through hole is adapted to the transition rod (1101) of the Z-axis cantilever (11). When the long slide plate When the long guide rail (1201) and the short guide rail (1202) slide, the rectangular through hole formed by the cross intersection of the slotted holes of the long slide plate (1203) and the short slide plate (1204) moves in the X and Y directions within the rectangular opening, and the upper and lower surfaces of the partition assembly (12) remain shielded. The long slide plate (1203) and the short slide plate (1204) are respectively provided with circular holes, which are step holes. The step hole of the long slide plate (1203) is adapted to be provided with a lower cover (1206). The short slide plate (1204) is provided with a lower cover (1206). The stepped hole of the short slide (1204) is adapted to be provided with an upper cover (1207), the inner diameter of the stepped hole of the short slide (1204) is larger than the outer diameter of the lower cover (1206), and when the rectangular through hole formed by the cross intersection of the slot holes of the long slide (1203) and the short slide (1204) is within the range of the rectangular opening to one corner, the circular holes provided on the long slide (1203) and the short slide (1204) are coaxial, and the viewing angle of the camera (8) is projected onto the bottom plate (2) through the circular holes provided on the long slide (1203) and the short slide (1204).

2. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The bottom plate (2) is an insulator. The bottom plate (2) is provided with a matrix of threaded holes. Steel wire screw sleeves are provided in the threaded holes. The bottom plate (2) is used to place and fix the plate to be tested. The fixed plate to be tested is adapted to be provided with a clamping piece (13) for clamping the plate to be tested.

3. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: A light source (9) is provided in the middle of the top frame (7) and is adapted adjacent to the camera (8). An infrared indicator (10) is provided in the middle of the top frame (7) and is adjacent to the camera (8).

4. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The clamping member (13) is provided with multiple steps (1301), the clamping member (13) is provided with a through hole (1302) deviating from the axis, each step of the multiple steps (1301) is provided with a U-shaped groove (1303), and the locking screw (14) is adapted to pass through the through hole (1302) and be screwed into the wire screw sleeve hole of the base plate (2).

5. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The device for fixing the probe is a probe fixing device (18), comprising: a fixing plate (1801), an upper plate (1802), a lower plate (1803), a guide column (1804), an axis tube (1805), a spring (1806), a vertical clamping plate (1807), and a horizontal clamping plate (1808). The fixing plate (1801) is vertically arranged for connecting the Z-axis cantilever (11). The fixing plate (1801) is provided with an upper plate (1802) and a lower plate (1803) in parallel. The guide column (1804) and the axis tube (1805) are fixedly provided between the upper plate (1802) and the lower plate (1803). A vertical clamping plate (1807) is provided in the transverse groove formed between the upper plate (1802) and the lower plate (1803), and the vertical clamping plate (1807) is provided with a hole-type sliding bearing. The hole-type sliding bearing is adapted to the hole axis of the shaft tube (1805), constraining the vertical clamping plate (1807) to float up and down in the transverse groove formed between the upper plate (1802) and the lower plate (1803). The shaft tube (1805) between the upper plate (1802) and the vertical clamping plate (1807) is provided with a spring (1806). The vertical clamping plate (1807) is provided with upper and lower through holes with one end open, and the upper and lower through holes are provided with a screw locking mechanism.

6. The near-field electromagnetic signal acquisition and control device according to claim 5, characterized in that: A transverse clamping plate (1808) is fixedly provided under the vertical clamping plate (1807), and the transverse clamping plate (1808) is provided with front and rear through holes with one end open, and the front and rear through holes are provided with screw locking mechanisms.

7. The near-field electromagnetic signal acquisition and control device according to claim 6, characterized in that: It also includes a tensioning sleeve (1809), which is arranged in the upper and lower through holes and the front and rear through holes. The tensioning sleeve (1809) is provided with a radial opening, and a polygonal hole is provided in the sleeve for clamping an adapted polygonal probe body.

8. The near-field electromagnetic signal acquisition and control device according to claim 1, characterized in that: The device for fixing the probe is a universal probe fixing device (20), comprising: a horizontal fixing plate (2001), a variable clamping member (2002), an adjusting nut (2003), a force adjustment spring (2004), a T-shaped rod (2005), a ball spring pin (2006), and a locking screw (2007). The left side of the horizontal fixing plate (2001) is used for fixing to the Z-axis cantilever (11). The right side of the horizontal fixing plate (2001) is provided with a raised plate, and the plate is provided with a horizontal through hole. The T-shaped end of the T-shaped rod (2005) is connected and provided with a variable clamping member (2002). The tail rod body of the T-shaped rod (2005) is inserted into the through hole of the horizontal fixing plate (2001). The tail end of the tail rod body of the T-shaped rod (2005) passing through the through hole is provided with an external thread. The tail sleeve is provided with a force adjustment spring (2004), and an adjusting nut (2003) is screwed on the external thread. Ball spring pins (2006) sunk into the body of the horizontal fixing plate (2001) are distributed on the adjacent surfaces of the horizontal fixing plate (2001) and the variable clamping member (2002). A small pit corresponding to the ball spring pin (2006) is provided on the adjacent surface of the variable clamping member (2002). The variable clamping member (2002) can rotate freely 360 degrees around the axis of the tail rod body of the T-bar (2005), wherein the ball spring pin (2006) cooperates with the small pit to achieve positioning and limiting in the up, down, left and right directions. The variable clamping member (2002) is provided with a through hole for penetrating a probe, an opening is provided on one side of the through hole, and a locking screw (2007) is provided adjacent to the through hole for locking and clamping the probe.

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