Extreme ultraviolet light source system

Abstract

The invention relates to the technical field of semiconductors, in particular to an extreme ultraviolet light source system. The extreme ultraviolet light source system comprises a storage tank, a liquid drop generator and an impurity removal device, the storage tank is used for storing liquid tin metal, and the liquid drop generator is used for generating tin liquid drops. The impurity removal device comprises an impurity removal tank, a cooling mechanism and a filter screen, the top end of the impurity removal tank is communicated with an input pipe and an output pipe, one end of the input pipe extends out of the impurity removal tank and is communicated with an outlet of the storage tank, and one end of the output pipe extends out of the impurity removal tank and is communicated with an inlet of the liquid drop generator. And the cooling mechanism is arranged on the impurity removal tank. The filter screen is arranged in the impurity removal tank and located between the other end, stretching into the impurity removal tank, of the input pipe and the other end, stretching into the impurity removal tank, of the output pipe. The cooling mechanism cools the impurity removal tank, so that the liquid tin metal in the impurity removal tank becomes a supersaturated solution, tin oxide impurities are separated out, the liquid tin metal is filtered and removed through the filter screen, and the tin oxide impurities are prevented from blocking a nozzle of the droplet generator.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an extreme ultraviolet light source system. Background Art

[0002] The extreme ultraviolet lithography machine uses an extreme ultraviolet (EUV) exposure light source. The method of generating extreme ultraviolet light is to bombard a metal tin target with a high-frequency, high-energy pulsed laser to generate a high-temperature, high-density plasma. The plasma is constantly undergoing ionization and recombination processes and radiating extreme ultraviolet light. The effective element in the target that acts on the laser is metal tin, and the tin target is supplied in the form of tin droplets formed under the jet. The metal tin is heated to above its melting point to form molten liquid tin, and then the liquid tin is ejected through a micro-hole nozzle by applying air pressure to form a tin jet. At the same time, ultrasonic vibration is applied along the jet direction, and the tin jet breaks to form tin droplets with uniform spacing. Tin droplets are usually ejected vertically downward. At the same time, the laser emitted by a high-power laser is injected in a direction perpendicular to the direction of the tin jet, and after focusing, it bombards the tin droplets. The above-mentioned injected laser is a high-frequency pulsed laser, and the laser frequency needs to be synchronized with the frequency of the continuously ejected tin droplets, that is, one laser pulse acts on one tin droplet.

[0003] During the startup operation and maintenance phase of the EUV light source system, oxygen will enter the pipeline of the EUV light source system and react rapidly with the high-temperature liquid tin metal to form tin oxide. After a long period of accumulation, the oxide layer of the tin metal can easily clog the micron-sized nozzle of the droplet generator, reducing the service life of the droplet generator. Summary of the invention

[0004] The object of the present invention is to provide an extreme ultraviolet light source system to remove tin oxide impurities in liquid tin metal, reduce the risk of nozzle blockage of a droplet generator, and extend the service life of the droplet generator.

[0005] To achieve this purpose, the technical solution adopted by the present invention is:

[0006] The extreme ultraviolet light source system comprises a storage tank, a droplet generator and an impurity removal device, wherein the storage tank is used to store liquid tin metal, the droplet generator is used to generate tin droplets; the impurity removal device comprises:

[0007] An impurity removal tank, wherein an input pipe and an output pipe are connected at the top of the impurity removal tank, one end of the input pipe extends out of the impurity removal tank and is connected to the outlet of the storage tank, and one end of the output pipe extends out of the impurity removal tank and is connected to the inlet of the droplet generator;

[0008] A cooling mechanism, wherein the cooling mechanism is arranged on the impurity removal tank;

[0009] The filter screen is arranged in the impurity removal tank and is located between the other end of the input pipe extending into the impurity removal tank and the other end of the output pipe extending into the impurity removal tank.

[0010] As an optional solution of the extreme ultraviolet light source system, the impurity removal tank has a cooling cavity, and the cooling mechanism includes a cooling jacket, which is sleeved on the outer periphery of the impurity removal tank along the circumference of the impurity removal tank and is arranged directly opposite to the cooling cavity;

[0011] The cooling jacket is provided with a first joint and a second joint, and can be connected to a cold medium container through the first joint, and can discharge the cold medium in the cooling jacket through the second joint.

[0012] As an optional solution of the extreme ultraviolet light source system, the impurity removal tank also has a heat exchange cavity, and the heat exchange cavity is located above the cooling cavity;

[0013] A heat exchanger is arranged in the heat exchange cavity, and the heat exchanger includes a first heat exchange tube and a second heat exchange tube, one end of the first heat exchange tube is connected to one end of the input tube extending into the impurity removal tank, and the other end of the first heat exchange tube is communicated with the cooling cavity; one end of the second heat exchange tube is connected to one end of the output tube extending into the impurity removal tank, and the other end of the second heat exchange tube is communicated with the cooling cavity.

[0014] As an optional solution for the extreme ultraviolet light source system, the filter is arranged in the cooling cavity and is located between the other end of the first heat exchange tube and the other end of the second heat exchange tube.

[0015] As an optional solution for the extreme ultraviolet light source system, an attachment substrate is also provided in the cooling chamber.

[0016] As an optional solution of the extreme ultraviolet light source system, the attachment substrate is a wire mesh or a fin.

[0017] As an optional solution of the extreme ultraviolet light source system, the impurity removal tank includes:

[0018] A main tank body, the top of which is connected to the input pipe and the output pipe, and the bottom of which has an opening;

[0019] A bottom cover is detachably arranged at the bottom of the main tank body to block or open the opening.

[0020] As an optional solution for the extreme ultraviolet light source system, a temperature measuring component is installed in the impurity removal tank.

[0021] As an optional solution for the extreme ultraviolet light source system, a first heating element is arranged in the input tube.

[0022] As an optional solution of the extreme ultraviolet light source system, a second heating element is provided in the output tube.

[0023] The beneficial effects of the present invention are:

[0024] The extreme ultraviolet light source system proposed by the present invention comprises a storage tank, a droplet generator and an impurity removal device. Liquid tin metal in the storage tank enters the impurity removal tank through an input pipe. A cooling mechanism cools the impurity removal tank so that the liquid tin metal in the impurity removal tank becomes a supersaturated solution. The solubility of tin oxide impurities decreases as the temperature decreases and the impurities are precipitated from the liquid tin metal. The impurity removal operation of the liquid tin metal is achieved through the filtering effect of the filter net, thereby preventing the accumulated tin oxide impurities from clogging the nozzle of the droplet generator, reducing the risk of clogging the nozzle of the droplet generator, and extending the service life of the droplet generator. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural distribution diagram of the extreme ultraviolet light source system provided by an embodiment of the present invention.

[0026] The names and numbers of the components in the figure are as follows:

[0027] 1. Storage tank; 101. Cooling chamber; 102. Heat exchange chamber; 2. Droplet generator; 3. De-impurity tank; 31. Main tank body; 32. Bottom cover; 4. Input pipe; 5. Output pipe; 6. Filter; 7. Cooling jacket; 71. First joint; 72. Second joint; 8. Heat exchanger; 9. Wire mesh; 10. Temperature measuring element; 11. First heating element; 12. Second heating element; 13. First gas cylinder; 14. First gas pipeline; 15. First switch valve; 16. Third heating element; 17. Second switch valve; 18. Third switch valve; 19. Second gas cylinder; 20. Second gas pipeline; 21. Fourth switch valve; 22. Vacuum chamber; 23. Heater; 24. Reflux pipe; 25. Fourth heating element; 26. Fifth switch valve. DETAILED DESCRIPTION

[0028] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the present invention are further described below in conjunction with the accompanying drawings and through specific implementation methods. It is understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for the convenience of description, only the parts related to the present invention are shown in the accompanying drawings, not all.

[0029] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0031] In the description of this embodiment, the terms "upper", "lower", "right", "left" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0032] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0033] like Figure 1 As shown, the extreme ultraviolet light source system includes a storage tank 1 and a droplet generator 2. Liquid tin metal is stored in the storage tank to provide liquid tin metal to the droplet generator 2, so that the droplet generator 2 can generate tin droplets.

[0034] Specifically, the extreme ultraviolet light source system also includes a first gas cylinder 13, a first gas pipe 14 and a first switch valve 15, one end of the first gas pipe 14 is connected to the gas outlet of the first gas cylinder 13, and the other end of the first gas pipe 14 can be connected to the inlet of the storage tank 1. The first switch valve 15 is installed on the first gas pipe 14 to open or close the first gas pipe 14. The first gas cylinder 13 stores one or more mixed gases of multiple gases such as argon, helium, neon, nitrogen, hydrogen, etc., so as to pressurize the storage tank 1 through the first gas pipe 14 to realize the transportation operation of liquid tin metal. In other embodiments, a plurality of first gas cylinders 13 are provided, and the plurality of first gas cylinders 13 respectively store a single gas of the above-mentioned gases, and the single gas in the plurality of first gas cylinders 13 is flexibly adjusted according to the use requirements. The mixed ratio is finally filled into the storage tank 1 through the first gas pipe 14 to realize the pressurization operation of the storage tank 1.

[0035] Furthermore, a third heating element 16 is provided on the periphery of the storage tank 1. The third heating element 16 is an electric heater to achieve heating and heat preservation of the storage tank 1, so that the storage tank 1 is always kept within a suitable temperature range to prevent the tin metal in the storage tank 1 from changing from liquid to solid, thereby ensuring the fluidity of the liquid tin metal. In addition, a thermometer is also installed in the storage tank 1 to monitor the internal temperature of the storage tank 1 in real time, and flexibly adjust the heating time and heating power of the third heating element 16 according to the measured value of the thermometer to adapt to different temperature changes of the storage tank 1.

[0036] like Figure 1 As shown, the extreme ultraviolet light source system also includes a vacuum generator (not shown in the figure), a second gas cylinder 19, a second gas pipe 20, a fourth switch valve 21 and a vacuum chamber 22. The above-mentioned vacuum generator (i.e., a vacuum pump) usually keeps the air pressure of the vacuum chamber 22 between 0.01Pa and 100Pa, so that the vacuum chamber 22 maintains the air pressure environment for generating the extreme ultraviolet light source through the vacuum generator. One end of the second gas pipe 20 is connected to the second gas cylinder 19, and the other end of the second gas pipe 20 is connected to the inlet of the droplet generator 2. The fourth switch valve 21 is installed on the second gas pipe 20 to open or close the second gas pipe 20. When the fourth switch valve 21 is opened, the second gas cylinder 19 pressurizes the droplet generator 2 through the second gas pipe 20, so that the liquid tin metal is ejected through the nozzle of the droplet generator 2 and forms a tin jet in the vacuum chamber 22, and the droplet generator 2 applies ultrasonic vibration along the jet direction, so that the tin jet breaks to form tin droplets with uniform spacing.

[0037] Specifically, the extreme ultraviolet light source system also includes a laser, and the laser emitted by the laser is injected in a direction perpendicular to the tin jet direction, and after focusing, it bombards the tin droplets, so that the tin droplets generate high-temperature, high-density plasma, and the plasma continuously undergoes ionization and recombination processes and radiates extreme ultraviolet light. Since the components required for the generation of the extreme ultraviolet light source are all existing technologies, the components and working principles of the extreme ultraviolet light source in the extreme ultraviolet light source system are not described in detail.

[0038] like Figure 1 As shown, the extreme ultraviolet light source system also includes a heater 23 and a reflux pipe 24, the inlet of the heater 23 is connected to the bottom end of the vacuum chamber 22, the outlet of the heater 23 is connected to one end of the reflux pipe 24, and the other end of the reflux pipe 24 is connected to the storage tank 1. Specifically, the tin droplets in the vacuum chamber 22 enter the heater 23 for heating to increase the temperature of the tin droplets to prevent the tin droplets from solidifying into a solid state and blocking the reflux pipe 24 after the temperature drops in the vacuum chamber 22. By setting the reflux pipe 24, the liquid tin metal can flow back to the storage tank 1 through the reflux pipe 24, thereby realizing the recycling of the tin metal. The heating temperature of the heater 23 can be flexibly set, and it is only necessary to ensure that the tin droplets will not solidify into a solid state. The above-mentioned heater 23 is an electric heater, which is easy to use and install.

[0039] Furthermore, the return pipe 24 is provided with a fourth heating element 25 and a fifth switch valve 26, and the fifth switch valve 26 is used to open or close the return pipe 24. The fourth heating element 25 is an electric heater to achieve heating and heat preservation of the return pipe 24, so that the return pipe 24 is always kept within a suitable temperature range, and the tin metal in the return pipe 24 is prevented from changing from liquid to solid, thereby ensuring the fluidity of the tin metal.

[0040] During the startup operation and maintenance phase of the EUV light source system, oxygen will enter the pipeline of the EUV light source system and react rapidly with the high-temperature liquid tin metal to form tin oxide. The oxide layer of the tin metal can easily clog the micron-sized nozzle of the droplet generator 2 after a long period of accumulation, thereby reducing the service life of the droplet generator 2.

[0041] To solve the above problems, Figure 1As shown, the extreme ultraviolet light source system of this embodiment also includes a de-impurity device, which includes a de-impurity tank 3, a cooling mechanism and a filter 6. The top of the de-impurity tank 3 is connected with an input pipe 4 and an output pipe 5. One end of the input pipe 4 extends out of the de-impurity tank 3 and is connected to the outlet of the storage tank 1. One end of the output pipe 5 extends out of the de-impurity tank 3 and is connected to the inlet of the droplet generator 2. The cooling mechanism is arranged on the de-impurity tank 3. The filter 6 is arranged in the de-impurity tank 3 and is located between the other end of the input pipe 4 extending into the de-impurity tank 3 and the other end of the output pipe 5 extending into the de-impurity tank 3. The liquid tin metal in the storage tank 1 enters the impurity removal tank 3 through the input pipe 4. The cooling mechanism cools the impurity removal tank 3 so that the liquid tin metal in the impurity removal tank 3 becomes a supersaturated solution. The solubility of the tin oxide impurity decreases as the temperature decreases and it precipitates from the liquid tin metal. The impurity removal operation of the liquid tin metal is achieved through the filtering effect of the filter mesh 6, thereby preventing the accumulated tin oxide impurities from clogging the nozzle of the droplet generator 2, reducing the risk of clogging the nozzle of the droplet generator 2, and extending the service life of the droplet generator 2.

[0042] Specifically, the impurity removal tank 3 cooperates with the cooling mechanism to capture the oxide impurities of the liquid tin metal in the droplet generator 2 by a cold trap method. A temperature measuring component 10 is installed in the impurity removal tank 3. The temperature measuring component 10 is a thermometer, which is easy to install and use and has a low cost. The temperature in the impurity removal tank 3 is monitored in real time by the temperature measuring component 10, and the cooling time and cooling power of the cooling mechanism can be flexibly adjusted according to the measured value of the temperature measuring component 10 to adapt to different temperature changes of the impurity removal tank 3.

[0043] like Figure 1 As shown, a first heating element 11 is provided in the input pipe 4, and a second heating element 12 is provided in the output pipe 5. The first heating element 11 and the second heating element 12 are both electric heaters, which respectively realize heating and heat preservation of the input pipe 4 and the output pipe 5, so that the input pipe 4 and the output pipe 5 are always kept in a suitable temperature range, and the tin metal in the input pipe 4 and the output pipe 5 is prevented from changing from liquid to solid, thereby ensuring the fluidity of the liquid tin metal. In addition, a second switch valve 17 is provided on the input pipe 4, and a third switch valve 18 is provided on the output pipe 5. The second switch valve 17 can open or close the input pipe 4, and the third switch valve 18 can open or close the output pipe 5.

[0044] like Figure 1As shown, there is a cooling cavity 101 in the impurity removal tank 3, and the cooling mechanism includes a cooling jacket 7, which is sleeved on the outer periphery of the impurity removal tank 3 along the circumference of the impurity removal tank 3 and arranged opposite to the cooling cavity 101. The cooling jacket 7 is provided with a first joint 71 and a second joint 72, and can be connected to a cold medium container through the first joint 71, and can discharge the cold medium in the cooling jacket 7 through the second joint 72. The cold medium enters the cooling jacket 7 from the first joint 71 to cool the cooling cavity 101 of the impurity removal tank 3, so that the liquid tin metal entering the impurity removal tank 3 is cooled and becomes a supersaturated solution, and the solubility of tin oxide impurities decreases as the temperature decreases and precipitates from the liquid tin metal. The cold medium flows out through the second joint 72 and flows back to the external cold medium container to circulate and cool the impurity removal tank 3.

[0045] In the present embodiment, the above-mentioned cooling mechanism can cool down the liquid tin metal in the impurity removal tank 3 by water cooling or air cooling. When the refrigerant is cooling water, the cooling water of relatively low temperature flows through the cooling jacket 7 and exchanges heat with the liquid tin metal in the impurity removal tank 3, so that the liquid tin metal is cooled down to become a supersaturated solution, and the cooling water flows back to the refrigerant container from the second joint 72, and the refrigerant container flows to the cooling jacket 7 again after cooling down the refluxed cooling water, so as to realize the circulation of cooling water. When the refrigerant is cryogenic air, the cryogenic air flows through the cooling jacket 7 and exchanges heat with the liquid tin metal in the impurity removal tank 3, so that the liquid tin metal is cooled down to become a supersaturated solution, and the air flows back to the refrigerant container from the second joint 72, and the refrigerant container flows to the cooling jacket 7 again after cooling down the refluxed air, so as to realize the circulation of air. Specifically, the refrigerant container is connected to the first joint 71 and the second joint 72 respectively through two pipelines, so as to realize the circulation of cooling water or cryogenic air.

[0046] like Figure 1 As shown, the impurity removal tank 3 also has a heat exchange chamber 102, and the heat exchange chamber 102 is located above the cooling chamber 101. A heat exchanger 8 is arranged in the heat exchange chamber 102, and the heat exchanger 8 includes a first heat exchange tube and a second heat exchange tube. One end of the first heat exchange tube is connected to the end of the input tube 4 extending into the impurity removal tank 3, and the other end of the first heat exchange tube is connected to the cooling chamber 101. One end of the second heat exchange tube is connected to the end of the output tube 5 extending into the impurity removal tank 3, and the other end of the second heat exchange tube is connected to the cooling chamber 101. Before entering the cooling chamber 101, the liquid tin metal flowing into the impurity removal tank 3 first exchanges heat with the liquid tin metal flowing out of the impurity removal tank 3 through the heat exchanger 8, so that the liquid tin metal entering the cooling chamber 101 is pre-cooled, so that the liquid tin metal is more likely to form a supersaturated solution, which is beneficial to the precipitation of tin oxide impurities and is beneficial to reducing the energy consumption of the cooling mechanism. At the same time, the temperature of the liquid tin metal flowing out of the impurity removal tank 3 increases and has better fluidity, which is beneficial to reducing the energy consumption of the second heating element 12.

[0047] Specifically, a partition plate is provided in the impurity removal tank 3, and the partition plate divides the inner cavity of the impurity removal tank 3 into an independent heat exchange cavity 102 and a cooling cavity 101. The heat exchanger 8 is installed in the heat exchange cavity 102, and the filter screen 6 is arranged in the cooling cavity 101 and is located between the other end of the first heat exchange tube and the other end of the second heat exchange tube. The liquid tin metal enters the cooling cavity 101 after passing through the input pipe 4 and the first heat exchange tube, and then the liquid tin metal is filtered by the filter screen 6, and the tin oxide impurities are filtered and remain in the impurity removal tank 3. The filtered liquid tin metal flows to the droplet generator 2 through the second heat exchange tube and the output pipe 5, thereby avoiding clogging the nozzle of the droplet generator 2.

[0048] like Figure 1 As shown, an attachment matrix is ​​also provided in the cooling chamber 101, so that some impurities such as tin oxide nucleate, crystallize, grow and deposit to the bottom of the impurity removal tank 3 in the supersaturated solution (liquid tin metal) (at this time, the gravity of the impurities is greater than the buoyancy in the liquid tin metal), and some tin oxide impurities are adsorbed on the attachment matrix in a heterogeneous nucleation manner, and some heterogeneous nucleated impurities are deposited on the filter screen 6. The attachment matrix of this embodiment is a wire mesh 9 or a fin. By providing the wire mesh 9 or the fin, the tin oxide impurities are better attached to the wire mesh 9 or the fin, which is conducive to improving the impurity removal effect of the impurity removal tank 3.

[0049] Furthermore, the impurity removal tank 3 includes a main tank body 31 and a bottom cover 32. The top of the main tank body 31 is connected with an input pipe 4 and an output pipe 5, and the bottom of the main tank body 31 has an opening. The bottom cover 32 is detachably arranged at the bottom of the main tank body 31 to block or open the opening. By setting the impurity removal tank 3 as a split structure, the processing and manufacturing of the impurity removal tank 3 is facilitated. At the same time, the bottom cover 32 is opened, the filter screen 6 and the wire mesh 9 are disassembled or replaced through the opening at the bottom of the main tank body 31, and the impurities deposited on the bottom cover 32 are cleaned, so as to facilitate the normal use of the impurity removal tank 3.

[0050] Specifically, the circumferential edge of the bottom cover 32 is pivotally mounted on the bottom of the main tank body 31, and is detachably fastened to the opening at the bottom of the main tank body 31 through a buckle structure. In addition, a sealing ring is snap-fitted to the circumferential edge of the bottom cover 32 to ensure the sealing between the bottom cover 32 and the main tank body 31, and to prevent the liquid tin metal from leaking at the bottom opening of the main tank body 31.

[0051] The above embodiments are only to illustrate the basic principles and characteristics of the present invention. The present invention is not limited by the above embodiments. Without departing from the spirit and scope of the present invention, the present invention may be subject to various changes and modifications, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. Extreme ultraviolet light source system, characterized in that: The invention comprises a storage tank (1), a liquid droplet generator (2) and an impurity removal device, wherein the storage tank (1) is used to store liquid tin metal, the liquid droplet generator (2) is used to generate tin liquid droplets; and the impurity removal device comprises: an impurity removal tank (3), wherein an input pipe (4) and an output pipe (5) are provided at the top end of the impurity removal tank (3), one end of the input pipe (4) extends out of the impurity removal tank (3) and is in communication with the outlet of the storage tank (1), and one end of the output pipe (5) extends out of the impurity removal tank (3) and is in communication with the inlet of the droplet generator (2); A cooling mechanism, wherein the cooling mechanism is arranged on the impurity removal tank (3); The filter screen (6) is arranged in the impurity removal tank (3) and is located between the other end of the input pipe (4) extending into the impurity removal tank (3) and the other end of the output pipe (5) extending into the impurity removal tank (3).

2. The extreme ultraviolet light source system according to claim 1, characterized in that: The impurity removal tank (3) has a cooling cavity (101) therein, and the cooling mechanism comprises a cooling jacket (7), the cooling jacket (7) being sleeved on the outer circumference of the impurity removal tank (3) along the circumferential direction of the impurity removal tank (3) and being arranged opposite to the cooling cavity (101); The cooling jacket (7) is provided with a first joint (71) and a second joint (72), and can be connected to a cold medium container through the first joint (71), and can discharge the cold medium in the cooling jacket (7) through the second joint (72).

3. The extreme ultraviolet light source system according to claim 2, characterized in that: The impurity removal tank (3) further comprises a heat exchange chamber (102), wherein the heat exchange chamber (102) is located above the cooling chamber (101); A heat exchanger (8) is arranged in the heat exchange chamber (102), and the heat exchanger (8) comprises a first heat exchange tube and a second heat exchange tube, one end of the first heat exchange tube is connected to one end of the input tube (4) extending into the impurity removal tank (3), and the other end of the first heat exchange tube is communicated with the cooling chamber (101); one end of the second heat exchange tube is connected to one end of the output tube (5) extending into the impurity removal tank (3), and the other end of the second heat exchange tube is communicated with the cooling chamber (101).

4. The extreme ultraviolet light source system according to claim 3, characterized in that: The filter screen (6) is arranged in the cooling chamber (101) and is located between the other end of the first heat exchange tube and the other end of the second heat exchange tube.

5. The extreme ultraviolet light source system according to claim 2, characterized in that: An attachment substrate is also provided in the cooling cavity (101).

6. The extreme ultraviolet light source system according to claim 5, characterized in that: The attachment substrate is a wire mesh (9) or a fin.

7. The extreme ultraviolet light source system according to any one of claims 1 to 6, characterized in that: The impurity removal tank (3) comprises: A main tank body (31), wherein the top of the main tank body (31) is connected with the input pipe (4) and the output pipe (5), and the bottom of the main tank body (31) has an opening; A bottom cover (32) is detachably arranged at the bottom of the main tank body (31) to block or open the opening.

8. The extreme ultraviolet light source system according to any one of claims 1 to 6, characterized in that: A temperature measuring component (10) is installed in the impurity removal tank (3).

9. The extreme ultraviolet light source system according to any one of claims 1 to 6, characterized in that: A first heating element (11) is arranged in the input pipe (4).

10. The extreme ultraviolet light source system according to any one of claims 1 to 6, characterized in that: A second heating element (12) is arranged in the output pipe (5).

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