Implantable microphone

Abstract

The invention provides an implantable microphone. The implantable microphone comprises a microphone body and a closed first shell, the first shell comprises a relatively thick shell main body and a relatively thin sound receiving film; the microphone body is accommodated in the first shell; the microphone body comprises a second shell and a vibrating diaphragm, and a sound receiving front cavity is formed between the sound receiving diaphragm and the second shell; the second shell is provided with a sound hole which is formed towards the direction of the sound receiving film; and the vibrating diaphragm is arranged in the second shell and faces the sound hole. According to the configuration, based on the arrangement of the first shell, the microphone body is sealed in the first shell, so that the problem of leakage is solved; furthermore, a sound receiving front cavity is formed between the sound receiving film and the second shell, external sound pushes the sound receiving film to vibrate, the size of the sound receiving front cavity is changed, then the vibrating diaphragm is pushed to vibrate through the sound hole, different frequency responses can be achieved, and signal variation caused by sealing of the microphone body is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of medical devices, and in particular to an implantable microphone. Background Art

[0002] Hearing aids are a common means for hearing-impaired patients to improve their hearing, including air conduction hearing aids, bone conduction hearing aids, cochlear implants, etc. Hearing aids are generally composed of external and implanted parts, which complete the acquisition, processing, transmission (emission, transmission and reception, etc.), amplification (hearing aids) and coding stimulation (cochlear implants) of sound signals. The acquisition of sound signals is usually completed by sound sensors or sensor arrays.

[0003] Common microphones are classified into different types, such as electret microphones, condenser microphones, silicon microphones, piezoelectric microphones, etc. One of the common features of these microphones is that there are sound holes or openings on the surface of the shell, which are necessary channels for connecting the gas inside and outside the shell of the microphone. The microphone is connected to the external environment through the sound holes on the shell. When the external sound pressure is unbalanced with the sound pressure inside the shell, the gas will flow into or out of the shell through the sound holes to respond, and at the same time, the relative displacement of the internal diaphragm realizes the detection and pickup of the external sound pressure.

[0004] The full implantation of artificial hearing devices is a development trend in the future. However, due to the existence of the sound hole, direct implantation of the microphone will cause body fluids to penetrate into the microphone, causing problems such as short circuit and diaphragm damage. Summary of the invention

[0005] The purpose of the present invention is to provide an implantable microphone to solve the problem that the existing microphone cannot adapt to the implantation scene.

[0006] In order to solve the above technical problems, the present invention provides an implantable microphone, which includes: a microphone body and a closed first shell; the first shell includes a relatively thick shell body and a relatively thin sound-collecting membrane; the microphone body is accommodated in the first shell; the microphone body includes a second shell and a diaphragm, and a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell; the second shell has a sound hole opened in the direction of the sound-collecting membrane; the diaphragm is arranged in the second shell and faces the sound hole.

[0007] Optionally, the sound collecting membrane, the sound hole and the diaphragm are arranged along an axis;

[0008] The shell body includes a cylindrical portion extending along the axis, and the sound collecting membrane is closed and disposed at one end of the cylindrical portion along the axis; or

[0009] The shell body includes a cylindrical portion extending along the axial direction and an end cover connected to one axial end of the cylindrical portion, and the sound collecting membrane is arranged on the end cover.

[0010] Optionally, the implantable microphone further includes an isolating member, wherein the isolating member is disposed between the first shell and the second shell, and the isolating member, the sound collecting membrane and the second shell together define a sound collecting front cavity; wherein the sound collecting front cavity gradually shrinks toward the direction of the second shell.

[0011] Optionally, the sound collecting membrane is circular, and the radius r of the sound collecting membrane is determined according to a preset vibration displacement. and the preset first-order resonant frequency f r1 Sure:

[0012]

[0013]

[0014] Among them, p a is the average pressure of the sound collecting membrane, T is the average tension of the sound collecting membrane, and σ is the average surface density of the sound collecting membrane.

[0015] Optionally, the volume of the sound collecting front cavity is determined according to an equivalent electroacoustic parameter model.

[0016] Optionally, the ratio of the thickness of the shell body to the thickness of the sound collecting membrane is greater than 3.

[0017] Optionally, the center thickness of the sound collecting membrane is smaller than the edge thickness.

[0018] Optionally, the shell body and the sound collecting membrane are both made of titanium or titanium alloy; the shell body and the sound collecting membrane are welded or integrally formed.

[0019] Optionally, the implantable microphone further includes a feedthrough and a feedthrough seal, wherein the feedthrough is disposed on the first shell and is configured as a signal connection end of the microphone body, and the feedthrough seal is disposed outside the first shell and is used for sealingly sleeved outside the feedthrough.

[0020] Optionally, the thickness of the sound collecting membrane is 0.025 mm to 0.2 mm.

[0021] In summary, the implantable microphone provided by the present invention includes: a microphone body and a closed first shell; the first shell includes a relatively thick shell body and a relatively thin sound-collecting membrane; the microphone body is accommodated in the first shell; the microphone body includes a second shell and a diaphragm, and a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell; the second shell has a sound hole opened in the direction of the sound-collecting membrane; the diaphragm is arranged in the second shell and faces the sound hole.

[0022] With such a configuration, based on the setting of the first shell, the microphone body is sealed inside it, thus solving the leakage problem and meeting the needs of implantation applications; further, a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell, and external sound (directly or indirectly through tissue after implantation) drives the sound-collecting membrane to vibrate, thereby changing the volume of the sound-collecting front cavity, and then through the sound hole opened toward the sound-collecting membrane, drives the diaphragm toward the sound hole to vibrate, thereby realizing the detection and pickup of external sound pressure by the microphone body, achieving different frequency responses, and reducing signal variations caused by the sealing of the microphone body. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Those skilled in the art will appreciate that the accompanying drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0024] Figure 1 is a schematic diagram of a MEMS microphone;

[0025] Figure 2 is a schematic diagram of a preferred example of an implantable microphone according to an embodiment of the present invention;

[0026] Figure 3 is a schematic diagram of another preferred example of an implantable microphone according to an embodiment of the present invention;

[0027] Figure 4 is a schematic diagram of an equivalent electroacoustic parameter model of an implantable microphone according to an embodiment of the present invention;

[0028] Figure 5 is a schematic diagram of a frequency response curve of an implantable microphone according to an embodiment of the present invention;

[0029] Figure 6 to Figure 10 Schematic diagrams of several preferred examples of implantable microphones according to embodiments of the present invention.

[0030] In the attached figure:

[0031] 01-MEMS microphone; 010-sound hole; 011-shell; 012-diaphragm; 013-electret; 014-back plate; 015-connecting wire; 016-bottom plate; 017-package solder joint; 018-gap; 019-internal IC;

[0032] 10-microphone body; 11-second shell; 12-diaphragm; 13-sound hole; 20-first shell; 21-shell body; 210-cylindrical part; 211-end cover; 22-sound collecting membrane; 24-fixing part; 30-sound collecting front cavity; 40-feedthrough; 50-feedthrough seal; 60-isolating part; 70-connector. DETAILED DESCRIPTION

[0033] In order to make the purpose, advantages and features of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0034] As used in the present invention, the singular forms "a", "an", "one" and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the term "at least two" is usually used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" as well as "proximal end" and "distal end" generally refer to two corresponding parts, which include not only endpoints. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0035] The purpose of the present invention is to provide an implantable microphone to solve the problem that the existing microphones cannot adapt to implantation scenarios. The following is a description with reference to the accompanying drawings.

[0036] Please refer to Figure 1 , which shows a MEMS microphone 01, which includes a shell 011, a diaphragm 012, an electret 013, a back plate 014, a connecting line 015, a bottom plate 016, and a packaging solder joint 017. The shell 011 is roughly cylindrical, and a sound hole 010 is opened on the top surface (or the bottom surface or the side surface) along the axial direction. There is a gap 018 between the sound hole 010 and the diaphragm 012. The diaphragm 012 and the back plate 014 play the role of parallel plate capacitors. When the diaphragm 012 vibrates due to sound pressure, the distance of the gap 018 between it and the back plate 014 will also change, thereby changing the electrostatic capacitance. The back plate 014 is connected to the internal IC 019 through the connecting line 015. After the electrostatic capacitance changes, the internal IC 019 converts the sound pressure signal into an analog or digital signal, and outputs it to the outside through the packaging solder joint 017. The bottom plate 016 is generally a metal-clad carrier, such as a common PCB copper-clad plate. The internal IC 019 can be set on the bottom plate 016, and the package solder joint 017 is set at the bottom of the bottom plate 016 and exposed outside the shell 011 to correspond to different patch pins. The external power supply is powered by the package solder joint 017. The shell 011 is generally a metal shell, such as copper or aluminum, or even plastic, which is not biocompatible. The connection between the shell 011 and the bottom plate 016 can meet a certain waterproof level, but cannot meet the requirements of long-term implantation. In addition, with the presence of the sound hole 010, it is understandable that when the MEMS microphone 01 is set alone, it is impossible to isolate liquid leakage. It should also be noted that the above is only an exemplary description of the MEMS microphone 01. For other types of microphones, such as electret microphones, condenser microphones or piezoelectric microphones, the structure is roughly similar.

[0037] To implement the requirements of the implantation scenario, please refer to Figure 2 and Figure 3 , and combined with reference Figures 6 to 10 An embodiment of the present invention provides an implantable microphone, which includes: a microphone body 10 and a closed first shell 20, the first shell 20 includes a relatively thick shell body 21 and a relatively thin sound-collecting membrane 22; the microphone body 10 is accommodated in the first shell 20; the microphone body 10 includes a second shell 11 and a diaphragm 12, and a sound-collecting front cavity 30 is formed between the sound-collecting membrane 22 and the second shell 11; the second shell 11 has a sound hole 13 opened in the direction of the sound-collecting membrane 22; the diaphragm 12 is arranged in the second shell 11 and faces the sound hole 13.

[0038] With such configuration, based on the setting of the first shell 20, the microphone body 10 is sealed inside it, thus solving the leakage problem and meeting the requirements of implantation applications; further, a sound-collecting front cavity 30 is formed between the sound-collecting membrane 22 and the second shell 11, and external sound (directly or indirectly through tissue after implantation) drives the sound-collecting membrane 22 to vibrate, thereby changing the volume of the sound-collecting front cavity 30, and then drives the diaphragm 12 toward the sound hole 13 through the sound hole 12 opened toward the sound-collecting membrane 22 to vibrate, thereby realizing the detection and pickup of external sound pressure by the microphone body 10, achieving different frequency responses, and reducing signal variations caused by the sealing of the microphone body 10.

[0039] In some embodiments, Figure 2 , Figure 6 and Fig. 9 As shown, the structure of the microphone body 10 can be roughly referred to the above-mentioned MEMS microphone 01. Preferably, the sound receiving membrane 22, the sound hole 13 and the diaphragm 12 are arranged along an axis (the axis is Figure 2 and Figure 3 Preferably, the diaphragm 12 is arranged directly opposite to the sound hole 13, the sound collecting diaphragm 22, the sound hole 13 and the diaphragm 12 are coaxially arranged, and the sound collecting diaphragm 22 and the diaphragm 12 are parallel to each other.

[0040] In some embodiments, Figure 2 , Figure 6 and Fig. 9 As shown, the shell body 21 includes a cylindrical portion 210 extending along the axis, and the sound-collecting membrane 22 is closed and arranged at one end of the cylindrical portion 210 along the axis; it can be understood that the sound-collecting membrane 22 covers and closes the entire cylindrical portion 210 along the axial direction, and the area of ​​the sound-collecting membrane 22 is equal to the internal cross-sectional area of ​​the cylindrical portion 210. The cross-sectional shape of the cylindrical portion 210 can be circular or rectangular.

[0041] In other embodiments, Figure 3 , Figure 7 , Figure 8 and Fig.10 As shown, the shell body 21 includes a cylindrical portion 210 extending along the axis and an end cap 211 connected to one axial end of the cylindrical portion 210, and the sound collecting membrane 22 is arranged on the end cap 211. In this configuration, the area of ​​the sound collecting membrane 22 is smaller than the internal cross-sectional area of ​​the cylindrical portion 210. It should be noted that the cross-sectional shape of the cylindrical portion 210 can be the same as or different from the shape of the sound collecting membrane 22. For example Fig.10 In the illustrated example, the cross-sectional shape of the cylindrical portion 210 is rectangular, but the shape of the sound collecting membrane 22 is circular. Preferably, the sound collecting membrane 22 and the sound hole 13 are both circular.

[0042] Optionally, the shell body 21 and the sound collecting membrane 22 are made of titanium or titanium alloy. Optionally, the shell body 21 and the sound collecting membrane 22 can be made of the same material or different materials, for example, the shell body 21 and the sound collecting membrane 22 are made of different grades of titanium alloy. The shell body 21 and the sound collecting membrane 22 can be integrally formed or connected by welding (such as laser welding). The first shell 20 and the second shell 11 can preferably be connected by welding.

[0043] The thickness of the sound-absorbing membrane 22 (referring to its dimension along the axial direction) is relatively thin, while the thickness of the shell body 21 (referring to the radial dimension of its cylindrical portion 210 or the dimension of its end cover 211 along the axial direction) is relatively thick, so that the rigidity of the shell body 21 is higher, while the rigidity of the sound-absorbing membrane 22 is lower, so that the responses of the shell body 21 and the sound-absorbing membrane 22 to the external sound pressure are significantly different.

[0044] In an exemplary embodiment, the sound collecting membrane 22 is circular, and its bending stiffness D is:

[0045]

[0046] Where E is the Young's modulus of the material, ν is the Poisson's ratio of the material, and t is the thickness of the sound collecting membrane 22. It can be seen that the bending stiffness D of the sound collecting membrane 22 increases rapidly with the increase of thickness t. The stiffness of the shell body 21 also shows such a rule, that is, the increase of thickness will lead to a rapid increase of stiffness. Based on this, it is preferred to configure the ratio of the thickness of the shell body 21 to the thickness of the sound collecting membrane 22 to be greater than 3. At this time, it can be considered that when the shell body 21 and the sound collecting membrane 22 are subjected to external sound pressure (or conducted by tissue after implantation), only the sound collecting membrane 22 vibrates, and the vibration of the shell body 21 can be ignored.

[0047] In another exemplary embodiment, the center thickness of the sound collecting membrane 22 is smaller than the edge thickness, which helps to improve the connection strength between the sound collecting membrane 22 and the shell body 21 while ensuring the sound pickup performance of the microphone body 10.

[0048] It is understandable that, since the microphone body 10 is enclosed inside the first housing 20, its diaphragm 12 is indirectly driven by the sound collecting front cavity 30, which inevitably produces certain signal variations. In order to reduce the variation in sound pickup performance caused by the microphone body 10 being enclosed, it is necessary to study and adjust the response curve of the entire implantable microphone to meet the requirements.

[0049] It has been found through research that changes in the area, thickness, and volume of the sound collecting front cavity 30 of the sound collecting membrane 22 will cause changes in the sound pickup performance of the microphone body 10. When the area of ​​the sound collecting membrane 22 is larger and the thickness is thinner, a greater sensitivity can be obtained, but the bandwidth is smaller. On the contrary, when the area of ​​the sound collecting membrane 22 is smaller and the thickness is thicker, a larger bandwidth can be obtained, but the sensitivity is smaller. The volume of the sound collecting front cavity 30 will affect the output curve. Therefore, it is necessary to set the appropriate area, thickness, and volume of the sound collecting front cavity 30 of the sound collecting membrane 22 according to the actual frequency response requirements.

[0050] In an exemplary embodiment, the sound collecting membrane 22 is circular as an example, and the low-frequency sensitivity of the sound collecting membrane 22 is related to the low-frequency vibration displacement. Proportional to:

[0051]

[0052] where p a is the average pressure of the sound collecting membrane 22, r is the average radius of the sound collecting membrane 22, and T is the average tension of the sound collecting membrane 22. It can be seen that as the radius r of the sound collecting membrane 22 decreases, the vibration system increases in stiffness and the amplitude decreases, resulting in a decrease in the sensitivity of the microphone body 10.

[0053] For bandwidth, the first-order resonant frequency f, which is directly related to bandwidth, can be examined. r1 :

[0054]

[0055] Wherein σ is the average surface density of the sound collecting membrane 22 , r is the average radius of the sound collecting membrane 22 , and T is the average tension of the sound collecting membrane 22 .

[0056] Therefore, the radius r of the sound collecting membrane 22 can be adjusted according to the preset vibration displacement. and the first-order resonant frequency f r1 to determine. And the vibration displacement According to the required sensitivity setting, the first-order resonant frequency f r1 Set according to the required bandwidth.

[0057] Optionally, the volume of the sound collecting front cavity 30 is determined according to an equivalent electroacoustic parameter model. Figure 4 , which shows the equivalent electroacoustic parameter model by way of example. S1 is the effective vibration area of ​​the sound collecting membrane 22 under external pressure excitation; M1, C1, and R1 are the equivalent mass, compliance coefficient, and elastic resistance of the effective vibration area of ​​the sound collecting membrane 22, respectively. Ca is the equivalent acoustic capacitance of the sound collecting front cavity 30, and Wherein V is the volume of the sound collecting front cavity 30 , ρ is the density of the gas in the sound collecting front cavity 30 , and c is the speed of sound in the gas in the sound collecting front cavity 30 .

[0058] The thickness of the sound collecting membrane 22 will affect its rigidity and the frequency response curve of the microphone body 10. Optionally, the thickness of the sound collecting membrane 22 is preferably 0.025 mm to 0.2 mm, and more preferably 0.025 mm to 0.050 mm. Figure 5 , under an input sound pressure of 94dBSPL, where curve A is the frequency response curve when the microphone body 10 is directly exposed, it can be observed that it is relatively flat in the frequency range of 100Hz to 10kHz. Curve B is the frequency response curve when the microphone body 10 is placed in the first shell 20 and the thickness of the sound collecting membrane 22 is 0.025mm. The low-frequency sensitivity of the microphone body 10 is lower than that of curve A. Curve C is the frequency response curve when the microphone body 10 is placed in the first shell 20 and the thickness of the sound collecting membrane 22 is 0.050mm. The low-frequency sensitivity of the microphone body 10 is further reduced than that of curve B, but the low-frequency flat area of ​​curve C is increased relative to curve B, that is, relative to the thickness of the thinner sound collecting membrane 22, the slightly thicker thickness of the sound collecting membrane 22 can relatively increase the bandwidth. Based on the above analysis, those skilled in the art can select the appropriate thickness of the sound collecting membrane 22 within the range of 0.025mm to 0.2mm according to the balance between sensitivity and bandwidth.

[0059] Please continue to refer to Figure 2 and Figure 3 Optionally, the implantable microphone further includes a feedthrough 40, which is disposed on the first shell 20 and is configured as a signal connection end of the microphone body 10. In an alternative exemplary embodiment, the feedthrough 40 is sealed and connected to the first shell 20, such as by welding. The feedthrough 40 is connected to the package solder joint 17 of the microphone body 10 on the inner side of the first shell 20, and the feedthrough 40 is used to connect to the wire on the outer side of the first shell 20 to achieve functions such as signal interaction and power supply.

[0060] Optionally, the implantable microphone further includes a feedthrough seal 50, which is disposed in the first shell 20 and is used to seal the outside of the feedthrough 40. The feedthrough seal 50 may be a silicone seal sleeve, which can reduce the interfering vibration transmitted to the first shell 20. Optionally, the implantable microphone further includes a connector 70, which facilitates the interconnection and replacement of the lead wires of the feedthrough 40 with the external wires.

[0061] Furthermore, the implantable microphone further comprises a fixing member 24 disposed on the first housing 20 , and the fixing member 24 can be disposed on the housing body 21 and has a fixing hole. The setting of the fixing member 24 facilitates the fixing of the first housing 20 .

[0062] Figures 6 to 10Several different shapes of implantable microphones are shown. Figure 8 As shown, the implantable microphone further includes an isolator 60, which is disposed between the first shell 20 and the second shell 11. The isolator 60, the sound collecting membrane 22 and the second shell 11 together define a sound collecting front cavity 30; wherein the sound collecting front cavity 30 gradually shrinks toward the second shell 11. The provision of the isolator 60 defines the shape of the sound collecting front cavity 30 and reduces the volume of the sound collecting front cavity 30, which is beneficial to improving the output curve in some application scenarios.

[0063] Based on the implantable microphone provided in this embodiment, it can be transferred from outside the body to the body without worrying about leakage, achieving full implantation of key components of artificial hearing equipment, solving the various inconveniences that patients wearing hearing aids must wear external devices to collect sound. Furthermore, since the first shell 20 and the sound-collecting membrane 22 are made of biocompatible materials (titanium or titanium alloy), it solves the biocompatibility problem of existing microphone shells and human tissues.

[0064] In addition, for artificial hearing devices that do not use implantable microphones, since sound is picked up outside the body, the sound signal needs to be transmitted to the implant part through other means. For example, cochlear implants usually use RF communication to transmit signals to the stimulator, which results in energy loss. However, devices that use implantable microphones can directly transmit signals to the stimulator to avoid losses during transmission and improve energy utilization.

[0065] In summary, the implantable microphone provided by the present invention includes: a microphone body and a closed first shell; the first shell includes a relatively thick shell body and a relatively thin sound-collecting membrane; the microphone body is accommodated in the first shell; the microphone body includes a second shell and a diaphragm, and a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell; the second shell has a sound hole opened in the direction of the sound-collecting membrane; the diaphragm is arranged in the second shell and faces the sound hole. In this configuration, based on the setting of the first shell, the microphone body is sealed inside it, thereby solving the leakage problem and meeting the implantation application requirements; further, a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell, and the external sound (directly or indirectly through the tissue after implantation) drives the sound-collecting membrane to vibrate, changing the volume of the sound-collecting front cavity, and then through the sound hole opened toward the sound-collecting membrane, the diaphragm toward the sound hole is driven to vibrate, thereby realizing the detection and pickup of the external sound pressure by the microphone body, and different frequency responses can be achieved, reducing the signal variation caused by the sealing of the microphone body.

[0066] It should be noted that the above embodiments can be combined with each other. The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure are within the protection scope of the present invention.

Claims

1. An implantable microphone, characterized in that: include: A microphone body and a closed first shell; the first shell includes a relatively thick shell body and a relatively thin sound-collecting membrane; the microphone body is accommodated in the first shell; the microphone body includes a second shell and a diaphragm, and a sound-collecting front cavity is formed between the sound-collecting membrane and the second shell; the second shell has a sound hole opened in the direction of the sound-collecting membrane; the diaphragm is arranged in the second shell and faces the sound hole.

2. The implantable microphone according to claim 1, characterized in that The sound collecting membrane, the sound hole and the diaphragm are arranged along an axis; The shell body includes a cylindrical portion extending along the axis, and the sound collecting membrane is closed and disposed at one end of the cylindrical portion along the axis; or The shell body includes a cylindrical portion extending along the axial direction and an end cover connected to one axial end of the cylindrical portion, and the sound collecting membrane is arranged on the end cover.

3. The implantable microphone according to claim 1, characterized in that The implantable microphone further includes an isolating member, which is disposed between the first shell and the second shell. The isolating member, the sound collecting membrane and the second shell together define a sound collecting front cavity, wherein the sound collecting front cavity gradually shrinks toward the second shell.

4. The implantable microphone according to claim 1, characterized in that The sound collecting membrane is circular, and the radius r of the sound collecting membrane is determined according to the preset vibration displacement. and the preset first-order resonant frequency f r1 Sure: Among them, p a is the average pressure of the sound collecting membrane, T is the average tension of the sound collecting membrane, and σ is the average surface density of the sound collecting membrane.

5. The implantable microphone according to claim 1, characterized in that The volume of the sound collecting front cavity is determined according to an equivalent electroacoustic parameter model.

6. The implantable microphone according to claim 1, characterized in that The ratio of the thickness of the shell body to the thickness of the sound collecting membrane is greater than 3.

7. The implantable microphone according to claim 1, characterized in that The central thickness of the sound collecting membrane is smaller than the edge thickness.

8. The implantable microphone according to claim 1, characterized in that The shell body and the sound collecting membrane are made of titanium or titanium alloy; the shell body and the sound collecting membrane are welded or integrally formed.

9. The implantable microphone according to claim 1, characterized in that The implantable microphone further comprises a feedthrough and a feedthrough seal. The feedthrough is arranged on the first shell and configured as a signal connection end of the microphone body. The feedthrough seal is arranged in the first shell and is used for sealingly sleeved outside the feedthrough.

10. The implantable microphone according to claim 1, characterized in that The thickness of the sound collecting membrane is 0.025 mm to 0.2 mm.

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