A one-step fabrication apparatus and method for micro-vias based on laser-induced microfluidics

Abstract

This invention discloses a one-step manufacturing apparatus and method for micro-vias based on laser-induced microjets, relating to the field of laser precision machining technology. The apparatus includes: a laser processing component whose laser output end corresponds to the area to be processed on the sample; and a side-axis water jet mechanism for forming a uniform water film on the surface of the area to be processed. When the laser processing component emits a laser beam towards the area to be processed, an annular hole is formed in the area, and the water film forms a laser-induced microjets at the laser focal point within the annular hole. Based on the high-speed, high-pressure, and stable characteristics of laser-induced microjets, suspended bubbles, debris, and other ablation products generated during the micro-via machining process are discharged in real time, avoiding defects such as recast layers and microcracks on the hole sidewalls and inlets. This improves the micro-via machining quality, laser energy utilization, and processing efficiency, achieving the technical effect of one-step, efficient, and high-quality laser-based micro-via machining of brittle and hard materials.

Description

Technical Field

[0001] This invention relates to the field of laser precision machining technology, and in particular to a one-step manufacturing apparatus and method for micro-holes based on laser-induced microfluidics. Background Technology

[0002] Transparent, brittle, and hard materials, such as silicon and glass, are widely used in integrated circuits, microelectromechanical systems (MEMS), and other fields. The precision, extreme, and micro-scale applications pose significant challenges to the high-quality micro / nano fabrication of these materials. Taking integrated circuits as an example, forming through-hole structures (Through Silicon Vias (TSV) and Through Glass Vias (TGV)) on silicon and glass substrates to connect and stack chips can increase chip interconnect density, reduce communication time, and lower power consumption.

[0003] In existing technologies, the mainstream through-hole processing techniques mainly include deep reactive ion etching (DRIE), laser-induced etching (LAI), and laser drilling. Among these, DIE often results in scallop-shaped, uneven etch morphologies due to alternating etching and passivation, while LAI suffers from high equipment costs and complex processes. Laser drilling, due to its high precision, simple process, and wide material applicability, is widely used in through-hole processing of brittle and hard materials. However, existing laser drilling technologies still have many shortcomings. For example, the material in the laser-irradiated area melts and solidifies to form a recast layer, which reduces surface quality and hole precision, and easily induces microcracks; debris deposition is difficult to remove from the processing area and absorbs laser energy under subsequent pulses, reducing laser energy utilization and processing efficiency. To achieve high-quality micro-hole processing, Dong Xia et al. from Xi'an Jiaotong University used a femtosecond laser in air to pre-fabricate holes, and then utilized the cavitation effect to refine the hole walls, significantly improving the surface quality of the through-holes (a two-step method). While the two-step method improves the hole wall processing quality, the complex steps greatly reduce processing efficiency.

[0004] Therefore, how to provide an efficient and high-quality micropore fabrication method is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide a one-step manufacturing apparatus and method for micro-vias based on laser-induced microfluidics, so as to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the present invention provides a one-step fabrication apparatus for micro-vias based on laser-induced microfluidics, comprising:

[0007] A laser processing component, wherein the laser output end corresponds to the area of ​​the sample to be processed;

[0008] A side-axis water jet mechanism is used to form a uniform water film on the surface of the area to be processed. When the laser processing component emits a laser beam toward the area to be processed, an annular hole is formed in the area to be processed, and the water film forms a laser-induced microjet at the laser focal point within the annular hole.

[0009] Furthermore, it also includes:

[0010] A pneumatic platform, a three-axis moving platform is mounted on the pneumatic platform;

[0011] An operating chamber is located on the three-axis moving platform, and the sample can be clamped inside the operating chamber;

[0012] The circulation mechanism is connected at one end to the operating chamber and at the other end to the off-axis water jet mechanism.

[0013] Furthermore, the off-axis water jet mechanism includes:

[0014] A water jet nozzle is connected to a nozzle fixing rod via a nozzle positioning nut, and the water inlet end of the water jet nozzle is connected to the other end of the circulation mechanism.

[0015] A pipe clamp is used to adjust the height and angle of the water jet nozzle relative to the sample. The nozzle fixing rod is connected to the side wall of the operating chamber via the pipe clamp.

[0016] Furthermore, the circulation mechanism includes:

[0017] A filter tank is installed on the pneumatic platform and connected to the operating room. A first drain valve is installed at the connection point. A filter element is installed inside the filter tank.

[0018] A water storage tank is connected to the filter tank, and a second drain valve is provided at the connection point. The water storage tank is connected to the inlet end of the water jet nozzle, and a circulation pump is provided in the water storage tank.

[0019] Furthermore, the water storage tank is filled with a microjet solution, which uses distilled water as a solvent and one or more of glycerol, n-butanol, or acetone as a solute, and the concentration of the microjet solution is 0.5-1 mol / L.

[0020] Furthermore, it also includes:

[0021] Two workpiece clamping heads are connected to the inner wall of the operating chamber via an electrically controlled rotating head for clamping, and the two workpiece clamping heads are capable of clamping the sample;

[0022] A lighting fixture is installed at the bottom of the operating chamber and corresponds to the sample.

[0023] Furthermore, the laser processing assembly includes:

[0024] A femtosecond laser emits a laser beam that passes sequentially through a beam expander, a semi-transparent and semi-reflective mirror, a positioning aperture, a first reflecting mirror, a spatial optical modulator, a second reflecting mirror, and a plano-convex lens before entering the focusing objective. The operating chamber has an opening at the top, and the focusing objective is located at the top of the operating chamber and faces the area to be processed.

[0025] A CCD industrial camera is used where a portion of the laser beam is reflected by a semi-transparent mirror and then enters the CCD industrial camera through an imaging lens. The CCD industrial camera corresponds to the area to be processed.

[0026] Furthermore, the focusing objective is perpendicular to the sample, and the water jet nozzle is disposed off-axis on one side of the focusing objective.

[0027] Furthermore, it also includes:

[0028] A vacuum cleaner is mounted on the pneumatic platform, with the suction end of the vacuum cleaner located on the other side of the focusing lens.

[0029] This invention also provides a one-step manufacturing method for microvias based on laser-induced microfluidics, which, using the aforementioned one-step microvia manufacturing apparatus based on laser-induced microfluidics, includes the following steps:

[0030] The laser output end of the laser processing component emits a laser beam toward the area to be processed of the sample, forming an annular hole in the area to be processed. The off-axis water jet mechanism forms a uniform water film on the surface of the area to be processed. The water film forms a laser-induced microjet at the laser focal point inside the annular hole. The laser-induced microjet removes the ablation products and bubbles inside the annular hole.

[0031] The present invention discloses the following technical effects:

[0032] 1. Based on the characteristics of high speed, high pressure and stability of laser-induced microjets, ablation products such as suspended bubbles and debris in the micro-hole processing are discharged in real time, avoiding defects such as recast layer and microcracks on the sidewall and entrance of the hole. This improves the processing quality, laser energy utilization and processing efficiency of micro-holes, and realizes the technical effect of one-step high-efficiency and high-quality processing of micro-holes in brittle and hard materials by laser method.

[0033] 2. A uniform thin water film is formed on the sample surface by a side-axis water jet mechanism to achieve the conditions for the asymmetric collapse of laser-induced cavitation bubbles, effectively reducing the thermal effect and preventing the loss and scattering of the laser by the liquid, thus ensuring the stable generation of laser microjets.

[0034] 3. This invention combines a laser beam spatial shaping method with an optical spatial modulator to achieve functions such as shaping, beam splitting, and free shape customization, enabling parallel micro-hole processing and free micro-hole pattern design, effectively improving the processing efficiency of through-hole arrays, and solving the problems of low degree of freedom and monotonous patterns in micro-hole processing. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0037] Figure 2 This is a schematic diagram of the sample processing.

[0038] Figure 3 This is a diagram illustrating the working principle of a water jet.

[0039] Figure 4 Electron microscope image of a cross-shaped micro-perforation;

[0040] Figure 5 Electron microscope image of a triangular micro-aperture;

[0041] Figure 6 Electron microscope image of a square micro-aperture;

[0042] Figure 7 Electron microscope image of a circular micro-aperture;

[0043] Figure 8 Electron microscope image of the micro-perforation inlet in Example 2;

[0044] Figure 9 Electron microscope image of the micro-hole outlet in Example 2;

[0045] Figure 10 This is an electron microscope image of the cross-section of the micro-hole in Example 2;

[0046] Figure 11 for Figure 10 A magnified electron microscope image of a portion of the image;

[0047] Among them, 1. Femtosecond laser; 2. CCD industrial camera; 3. Beam expander; 4. Imaging lens; 5. Semi-transparent mirror; 6. Positioning aperture; 7. Focusing objective lens; 8. Plano-convex lens; 9. Second reflecting mirror; 10. Laser beam; 11. First reflecting mirror; 12. Optical spatial modulator; 13. Nozzle fixing rod; 14. Nozzle positioning nut; 15. Water jet nozzle; 16. Pipe clamp; 17. Water pipe; 18. Workpiece clamping head; 19. Fixture electronically controlled rotating head; 2 0. First drain valve; 21. Filter tank; 22. Second drain valve; 23. Circulation pump; 24. Water storage tank; 25. Filter element; 26. Pneumatic platform; 27. X-direction track; 28. Y-direction track; 29. ​​Z-direction displacement stage; 30. Lighting lamp; 31. Operating room; 32. Sample; 33. Vacuum cleaner; 34. Computer; 35. Water jet; 36. Annular hole; 37. Water film; 38. Suspended bubble; 39. Debris; 40. Laser-induced microjet. Detailed Implementation

[0048] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0049] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0050] This invention provides a one-step micro-via manufacturing apparatus based on laser-induced microfluidics, comprising:

[0051] A laser processing component, the laser output end of which corresponds to the area to be processed in the sample 32;

[0052] A side-axis water jet mechanism is used to form a uniform water film 37 on the surface of the area to be processed. When the laser processing component emits a laser beam 10 towards the area to be processed, an annular hole 36 is formed in the area to be processed. The water film 37 forms a laser-induced microjet 40 at the laser focal point within the annular hole 36.

[0053] In this embodiment, it also includes:

[0054] A pneumatic platform 26 is provided, and a three-axis moving platform is mounted on the pneumatic platform 26. The three-axis moving platform includes an X-axis track 27, a Y-axis track 28, and a Z-axis displacement stage 29, which are used for movement in the X, Y, and Z directions, respectively. The X-axis track 27 and the Y-axis track 28 have a stroke of 0cm-35cm and a positioning accuracy of 5nm-50nm. The Z-axis displacement stage 29 has a stroke of 0mm-40mm and a positioning accuracy of 1nm-15nm.

[0055] The operating chamber 31 is set on a three-axis moving platform. The sample 32 can be clamped in the operating chamber 31. The three-axis moving platform is used to drive the sample 32 to move along a preset processing path. The moving speed is 1μm / s-10mm / s. The scanning diameter of the round hole is preferably 20μm or more, and the minimum unit shape of the irregular hole is 2μm or more.

[0056] The circulation mechanism is connected to the control chamber 31 at one end and to the off-axis water jet mechanism at the other end.

[0057] In this embodiment, the pneumatic platform 26 is used to prevent minor vibrations from affecting the optical path and the off-axis water jet. The pneumatic platform 26 consists of cylinders, valves, and other components. By adjusting the movement trajectory of the cylinders, external vibrations can be isolated, providing stable and precise motion control for processing.

[0058] In this embodiment, the off-axis water jet mechanism includes:

[0059] The water jet nozzle 15 is connected to the nozzle fixing rod 13 via the nozzle positioning nut 14. The water inlet end of the water jet nozzle 15 is connected to the other end of the circulation mechanism. The diameter of the water jet nozzle 15 is 0.05-0.5mm, the flow rate is 100-1000L / h, the vertical distance between the water jet nozzle 15 and the upper surface of the sample 32 is 5-20mm, and the angle between the nozzle and the upper surface of the sample 32 is 20-60°.

[0060] The pipe clamp 16 connects the nozzle fixing rod 13 to the side wall of the operating chamber 31. The pipe clamp 16 is used to adjust the height and angle of the water jet nozzle 15 relative to the sample 32. The pipe clamp 16 consists of bolts and a pipe support. The two sections of the nozzle fixing rod 13 are fastened by the bolts at both ends, thereby realizing the adjustment and fixation of the height of the nozzle fixing rod 13. The pipe support is rotatable, so the angle of the nozzle fixing rod 13 can be adjusted. The model of the pipe clamp 16 can be flexibly selected as needed. Its specific structure is existing technology and will not be described in detail here.

[0061] In this embodiment, the circulation mechanism includes:

[0062] The filter tank 21 is set on the pneumatic platform 26 and connected to the operating room 31. A first drain valve 20 is set at the connection. The filter tank 21 is equipped with a filter element 25, which is replaced every 1 hour of operation.

[0063] The water storage tank 24 is connected to the filter tank 21, and a second drain valve 22 is provided at the connection point. The water storage tank 24 is connected to the water inlet of the water jet nozzle 15 through the water pipe 17, and a circulation pump 23 is provided in the water storage tank 24.

[0064] Liquid in the control chamber 31 can flow from the control chamber 31 into the filter tank 21 through the height difference, be filtered by the filter element 25, and then flow back to the water storage tank 24 to be supplied to the water jet nozzle 15 again. The flow rate of the circulation pump 23 is steplessly adjustable and displayed on the dial on the pump body.

[0065] In this embodiment, the water storage tank 24 is filled with a microjet solution. The microjet solution uses distilled water as a solvent and one or more of glycerol, n-butanol, or acetone as a solute. The concentration of the microjet solution is 0.5-1 mol / L.

[0066] In this embodiment, it also includes:

[0067] Two workpiece clamping heads 18 are connected to the inner wall of the operating chamber 31 via a fixture electrically controlled rotating head 19. The two workpiece clamping heads 18 can clamp thin, brittle, hard sheet-like samples 32 ranging from 4 to 10 inches in size. The samples 32 can be made of glass, ceramics, or crystals. Before micro-hole processing, the surface of the samples 32 is polished to control its surface roughness to below 1 μm and its thickness to below 2 mm. Before and after micro-hole processing, the samples 32 are ultrasonically cleaned in ethanol and deionized water and then dried. One end of the fixture electrically controlled rotating head 19 is connected to the workpiece clamping head 18, and the other end is mounted on the inner wall of the operating chamber 31 via a bearing. The fixture electrically controlled rotating head 19 and the workpiece clamping head 18 are rotated by a motor, which enables the sample 32 to be processed into micro-holes within a certain curved surface range. The angle range of the fixture electrically controlled rotating head 19 is adjustable from -15° to 15°. In this embodiment, the processing angle is 0°.

[0068] An illumination lamp 30 is installed at the bottom of the operating chamber 31 and corresponds to the sample 32.

[0069] In this embodiment, the laser processing component includes:

[0070] The femtosecond laser 1 has a wavelength of 1030nm in the infrared band, or 515nm in the second harmonic visible band, or 343nm in the third harmonic ultraviolet band. The pulse width is preferably within 300fs, and the single pulse energy required for processing is preferably above 5μJ. The laser repetition frequency is 1kHz-100kHz. The laser beam 10 is emitted from the femtosecond laser 1 and passes sequentially through the beam expander 3, the semi-transparent semi-reflective mirror 5, the positioning aperture 6, the first reflector 11, the spatial light modulator 12, the second reflector 9, and the plano-convex lens 8 before entering the focusing objective lens 7. The top opening of the operating chamber 31 is located at the top of the operating chamber 31 and faces the area to be processed. The spatial light modulator is a reflective phase-type digitally driven liquid crystal modulator with a resolution of 2048×2048 or higher, a refresh rate of 60Hz or higher, and has phase correction and gamma correction functions and is equipped with a water cooling device. The magnification of the focusing objective lens 7 is preferably 4-100x, and the numerical aperture is 0.1-1.45.

[0071] The CCD industrial camera 2 receives a laser beam 10, which is partially reflected by a semi-transparent mirror 5 and enters the CCD industrial camera 2 through an imaging lens 4. The CCD industrial camera 2 corresponds to the area to be processed.

[0072] The optical spatial modulator 12 can achieve customizable phase modulation and beam shaping. The CCD industrial camera 2 can observe the beam distribution pattern loaded by the optical spatial modulator 12 and the real-time processing status of the sample 32. Each lens assembly and focusing objective 7 can be switched according to processing requirements. The laser energy, wavelength, repetition frequency, pulse width, and pulse sequence can all be set.

[0073] In this embodiment, the focusing objective 7 is perpendicular to the sample 32, and the water jet nozzle 15 is disposed off-axis on one side of the focusing objective 7.

[0074] In this embodiment, it also includes:

[0075] The vacuum cleaner 33 is mounted on the pneumatic platform 26, and the suction end of the vacuum cleaner 33 is located on the other side of the focusing lens 7.

[0076] In this embodiment, a computer 34 is also included, which is electrically connected to the femtosecond laser 1, the vacuum cleaner 33, the three-axis moving platform, and the fixture electrically controlled rotating head 19. The computer 34 can control the start and stop of each device and control its parameters.

[0077] This invention also provides a one-step manufacturing method for microvias based on laser-induced microfluidics, using a one-step manufacturing apparatus for microvias based on laser-induced microfluidics, comprising the following steps:

[0078] S1: Install each device according to the above embodiment, debug the device, inject distilled water into the water storage tank 24, turn on the vacuum cleaner 33, turn on the lighting 30, install the focusing lens 7, and prepare to start processing;

[0079] S2: The sample 32 is placed flat in the two workpiece clamping heads 18. The focal point position is determined by writing and executing a program on the three-axis moving platform. The specific implementation path is as follows: control the three-axis moving platform to move at a constant speed in a straight line at certain intervals. The vertical height is changed with each movement. In this way, a series of micro-groove arrays can be ablated on the surface of the sample 32. Each laser direct writing process is photographed by a CCD camera, and the position with the narrowest ablation width is determined by measurement as the experimental focal point height.

[0080] S3: Take sample 32 and place it flat in two workpiece clamping heads 18. Open the first drain valve 20, the second drain valve 22, and the water jet nozzle 15 to form a uniform water film 37 on the upper surface of the area to be processed of sample 32.

[0081] S4: Turn on the femtosecond laser 1, and the laser beam 10 is emitted towards the area to be processed. The three-axis moving platform moves the sample 32 along the preset path, forming an annular hole 36 in the area to be processed. Under the action of the water film 37, the laser-induced microjets 40 occur inside the annular hole 36. Specifically, due to the use of energy exceeding the cavitation generation threshold, laser-induced cavitation bubbles are generated at the focal point of the laser after refraction by the liquid surface in the hole. Under the constraint of the wall, the cavitation bubbles undergo asymmetric collapse under the action of pressure difference and form laser-induced microjets 40 inclined to the hole wall. The force of the laser-induced microjets 40 causes the liquid to form a local rapid flow. The water flow moves tangentially under the action of the processing path and discharges the suspended bubbles 38, debris 39 and other ablation products in the annular hole 36. The laser-induced microjets 40 move synchronously with the laser focal point position. The laser-induced microjets 40 vacuum cleaner 33 discharges the water mist generated during processing.

[0082] Example 1

[0083] The above embodiments enable the fabrication of customizable through-holes with free-entry shapes on monocrystalline silicon wafers.

[0084] Sample 32 is a 6-inch silicon wafer with a thickness of 500 micrometers. The wafer is polished on both sides, wiped with alcohol and dried, and then placed horizontally in two workpiece clamping heads 18.

[0085] The flow rate of the circulating pump 23 is set to 600 L / h. The angle between the water jet nozzle 15 and the surface of the sample 32 is about 45°. A nozzle with a diameter of 0.1 mm is used. The distance between the nozzle and the upper surface of the sample 32 is about 10 mm. The water film 37 formed by the water jet 35 is controlled to cover the laser focal area in a stable region.

[0086] Micro-holes in the shapes of crosses, triangles, squares, and circles are sequentially scanned and processed using a three-axis moving platform and laser processing components. The scanning speed is 1 mm / s, and the acceleration during the start and stop of the scanning process is 50 mm / s². 2 Set rounded corners at the inflection points of the pattern and set the number of scans to 150.

[0087] Based on the images captured by the CCD camera, ablation products such as suspended bubbles 38 and debris 39 during the entire processing can be discharged in real time, and the final formed hole sidewalls and entrances are free of defects such as recast layers and microcracks.

[0088] Example 2

[0089] The difference between this embodiment and embodiment 1 is that a single Gaussian beam is split into nine identical Gaussian beams by loading a preset computational hologram through spatial light modulator software, and arranged in an array with the same spacing. The light field distribution is detected by a CCD camera and the parameters are adjusted as needed.

[0090] Based on the images captured by the CCD camera, ablation products such as suspended bubbles 38 and debris 39 during the entire processing can be discharged in real time, and the final formed hole sidewalls and entrances are free of defects such as recast layers and microcracks.

[0091] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0092] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A one-step method for manufacturing micro-vias based on laser-induced microfluidics, characterized in that, Application of a one-step micro-hole fabrication device based on laser-induced microfluidics; The one-step fabrication apparatus for micro-vias based on laser-induced microfluidics includes: The laser processing component has its laser output end corresponding to the processing area of ​​the sample (32); A side-axis water jet mechanism is used to form a uniform water film (37) on the surface of the area to be processed. When the laser processing component emits a laser beam (10) toward the area to be processed, an annular hole (36) is formed in the area to be processed, and the water film (37) forms a laser-induced microjet (40) at the laser focal point in the annular hole (36). A pneumatic platform (26) and a three-axis moving platform are mounted on the pneumatic platform (26); The operating chamber (31) is located on the three-axis moving platform, and the sample (32) can be clamped in the operating chamber (31); The circulation mechanism is connected at one end to the operating chamber (31) and at the other end to the off-axis water jet mechanism; The off-axis water jet mechanism includes: The water jet nozzle (15) is connected to the nozzle fixing rod (13) by the nozzle positioning nut (14), and the water inlet end of the water jet nozzle (15) is connected to the other end of the circulation mechanism; The nozzle fixing rod (13) is connected to the side wall of the operating chamber (31) via the pipe clamp (16). The pipe clamp (16) is used to adjust the height and angle of the water jet nozzle (15) relative to the sample (32). The circulation mechanism includes: A filter tank (21) is set on the pneumatic platform (26) and connected to the operating room (31). A first drain valve (20) is set at the connection. A filter element (25) is set inside the filter tank (21). A water storage tank (24) is connected to the filter tank (21), and a second drain valve (22) is provided at the connection point. The water storage tank (24) is connected to the water inlet end of the water jet nozzle (15), and a circulation pump (23) is provided in the water storage tank (24). The water storage tank (24) is filled with a microjet solution, which uses distilled water as a solvent and one or more of glycerol, n-butanol or acetone as a solute. The concentration of the microjet solution is 0.5-1 mol / L. Also includes: Two workpiece clamping heads (18) are connected to the inner wall of the operating chamber (31) via a clamping electronically controlled rotating head (19), and the two workpiece clamping heads (18) are able to clamp the sample (32). A lighting lamp (30) is installed at the bottom of the operating chamber (31) and corresponds to the sample (32). The laser processing component includes: A femtosecond laser (1) emits a laser beam (10) which passes sequentially through a beam expander (3), a semi-transparent semi-reflective mirror (5), a positioning aperture (6), a first reflector (11), a spatial optical modulator (12), a second reflector (9), and a plano-convex lens (8) before entering a focusing objective (7). The top of the operating chamber (31) is open, and the focusing objective (7) is located at the top of the operating chamber (31) and faces the area to be processed. The CCD industrial camera (2) has a laser beam (10) that is partially reflected by a semi-transparent mirror (5) and enters the CCD industrial camera (2) through an imaging lens (4). The CCD industrial camera (2) corresponds to the area to be processed. Includes the following steps: The laser output end of the laser processing component emits a laser beam (10) to the processing area of ​​the sample (32), forming an annular hole (36) in the processing area. The off-axis water jet mechanism forms a uniform water film (37) on the surface of the processing area. The water film (37) forms a laser-induced microjet (40) at the laser focus in the annular hole (36). The laser-induced microjet (40) discharges the ablation products and bubbles in the annular hole (36).

2. The one-step manufacturing method for micro-vias based on laser-induced microfluidics according to claim 1, characterized in that, The focusing objective (7) is perpendicular to the sample (32), and the water jet nozzle (15) is disposed off-axis on one side of the focusing objective (7).

3. The one-step manufacturing method for micro-vias based on laser-induced microfluidics according to claim 2, characterized in that, Also includes: A vacuum cleaner (33) is mounted on the pneumatic platform (26), and the suction end of the vacuum cleaner (33) is located on the other side of the focusing lens (7).

Images